CN109839169A - Capacitance level transducer and vacuum degree on-Line Monitor Device - Google Patents
Capacitance level transducer and vacuum degree on-Line Monitor Device Download PDFInfo
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- CN109839169A CN109839169A CN201711207268.2A CN201711207268A CN109839169A CN 109839169 A CN109839169 A CN 109839169A CN 201711207268 A CN201711207268 A CN 201711207268A CN 109839169 A CN109839169 A CN 109839169A
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- level transducer
- capacitance level
- vacuum degree
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Abstract
The present invention relates to capacitance level transducer and vacuum degree on-Line Monitor Devices.The capacitance level transducer includes capacitor and signal wire;The capacitor includes first electrode and second electrode, the first electrode is the cylindrical shape surrounded by pectinate texture, multiple identical pole plate compositions in interval pectinate texture, the structure of the second electrode is identical with the structure of the first electrode, and the pole plate of the first electrode and the second electrode alternates to form the shape structure that keeps my fingers crossed;The first electrode and the second electrode draw signal wire respectively, and the cylinder interior that the signal wire is surrounded from the first electrode and the second electrode is drawn.Capacitance level transducer provided by the invention and vacuum degree on-Line Monitor Device can be improved the precision and anti-interference ability of level monitoring, better adapt to high temperature and high pressure environment, while reducing monitoring cost, be suitble to large-scale production and application.
Description
Technical field
The present invention relates to sensor technical fields, and in particular to capacitance level transducer and vacuum degree on-line monitoring dress
It sets.
Background technique
In the industrial production, the component needs of many equipment just can guarantee normal use in vacuum environment, for example, point
Connect switch.Tap switch is applied to the tap changing and connection of coil apparatus, wherein being divided into off circuit tap changer and having load point
Connect switch.Tap switch is in vacuum environment, and the destruction of vacuum environment will lead to tap switch damage.
The mode of existing detection vacuum is pressure transducer, once vacuum environment is destroyed, pressure transducer detects monitoring
Pressure change in range realizes alarm.But pressure transducer is at high cost, and higher to the environmental requirement used, is not suitable for
The vacuum detecting of high temperature and high pressure environment.
Summary of the invention
For the defects in the prior art, capacitance level transducer provided by the invention and vacuum degree on-line monitoring dress
Set, can be improved the precision and anti-interference ability of level monitoring, better adapt to high temperature and high pressure environment, at the same reduce monitoring at
This, is suitble to large-scale production and application.
In a first aspect, a kind of capacitance level transducer provided by the invention, comprising: capacitor, signal wire;The capacitor
Device includes first electrode and second electrode, and the first electrode is the cylindrical shape surrounded by pectinate texture, and multiple intervals are identical
Pole plate constitutes the pectinate texture, and the structure of the second electrode is identical with the structure of the first electrode, and described first
Electrode and the pole plate of the second electrode alternate to form the shape structure that keeps my fingers crossed;
The first electrode and the second electrode draw signal wire respectively, and the signal wire is from the first electrode and institute
The cylinder interior that second electrode surrounds is stated to draw.
Capacitance level transducer provided by the invention, the friendship formed by the pars pectinata pole plate of first electrode and second electrode
Finger of cupping one hand in the other before the chest can play the shielding action to internal signal wire, reduce the interference of sensor output signal, help to mention
The detection accuracy of high sensor;Sensor bulk is reduced without in addition setting shielding construction based on the structure.In addition, capacitor
The electrode of device uses pectinate texture, increases the relative area of two interpolar of capacitor, helps to improve detection accuracy, meanwhile, electricity
Container uses cylindrical structure, can effectively reduce the size of capacitor, better adapt to narrow monitoring space.
Preferably, the spacing distance of the two neighboring pole plate of the first electrode is less than 1 millimeter.
Preferably, the signal wire is wrapped with electro-magnetic screen layer.
Preferably, the signal wire is wrapped with insulating layer.
Preferably, the outer surface of the first electrode and the second electrode has insulating layer.
Second aspect, the present invention provides a kind of vacuum degree on-Line Monitor Devices, comprising: appoints described in above-mentioned first aspect
It anticipates a kind of capacitance level transducer, the liquid level of the liquid for sealing vacuum area is arranged in the capacitance level transducer
Place;Signal processing unit, two bars of the signal acquisition terminal of the signal processing unit and the capacitance level transducer
Line connection, the signal processing unit are used to monitor the capacitance variations of the capacitance level transducer, are supervised according to capacitance variations
Survey vacuum degree.
Preferably, the capacitance level transducer is placed perpendicular to the liquid levels.
It preferably, further include alarm unit, the alarm unit is connect with the output end of the signal processing unit, described
Signal processing unit once detects that the capacitance variations value of the capacitance level transducer is more than threshold value, then exports alarm signal
Number, it is realized and is alarmed by the alarm unit.
It preferably, further include sensor unit, the sensor unit is arranged in the liquid, for monitoring environment ginseng
Number, the output end of the sensor unit are connect with the signal processing unit, and the signal processing unit is also used to according to institute
It states environmental parameter and corrects the capacitance variations value.
Preferably, the sensor unit includes: temperature sensor, conductivity sensor, and the environmental parameter includes: temperature
Degree and conductivity.
Vacuum degree on-Line Monitor Device provided by the invention is mentioned using the liquid level sensor with the shape structure that keeps my fingers crossed
The high precision and anti-interference ability of level monitoring, can better adapt to the complex environments such as high temperature and pressure;Liquid level sensor
Compact can better adapt to compact-sized installation environment;Monitoring cost is reduced, is suitble to produce and answer on a large scale
With.
Detailed description of the invention
Fig. 1 is capacitance level transducer provided by the embodiment of the present invention one;
Fig. 2 is vacuum degree on-Line Monitor Device provided by the embodiment of the present invention two.
Specific embodiment
It is described in detail below in conjunction with embodiment of the attached drawing to technical solution of the present invention.Following embodiment is only used for
Clearly illustrate technical solution of the present invention, therefore be intended only as example, and cannot be used as a limitation and limit protection of the invention
Range.
It should be noted that unless otherwise indicated, technical term or scientific term used in this application should be this hair
The ordinary meaning that bright one of ordinary skill in the art are understood.
Embodiment one
As shown in Figure 1, present embodiments providing a kind of capacitance level transducer 1, comprising: capacitor, signal wire 10.Electricity
Container includes first electrode 11 and second electrode 12.First electrode 11 is the cylindrical shape surrounded by pectinate texture, multiple interval phases
Same pole plate 13 constitutes pectinate texture.The structure of second electrode 12 is identical with the structure of first electrode 11, first electrode 11
It alternates to form the shape structure that keeps my fingers crossed with the pars pectinata pole plate 13 of second electrode 12.First electrode 11 and second electrode 12 are divided
Not Yin Chu signal wire 10, cylinder interior that signal wire 10 is surrounded from first electrode 11 and second electrode 12 draws.
It can be played pair by the shape structure that keeps my fingers crossed that the pars pectinata pole plate 13 of first electrode 11 and second electrode 12 is formed
The shielding action of internal signal wire 10 reduces the interference of sensor output signal, helps to improve the detection accuracy of sensor;Base
Sensor bulk is reduced without in addition setting shielding construction in the structure.In addition, the electrode of capacitor uses pectinate texture,
The relative area for increasing two interpolar of capacitor helps to improve detection accuracy, meanwhile, capacitor uses cylindrical structure, can
The effective size for reducing capacitor, better adapts to narrow monitoring space.
Preferably, the spacing distance of the two neighboring pole plate 13 of first electrode 11 is less than 1 millimeter.Capacitance sensor can use
MEMS (Microelectromechanical Systems, MEMS) technology carries out micro Process, makes capacitance sensor
Size meets requirement.
Preferably, signal wire 10 is wrapped with electro-magnetic screen layer.
Preferably, signal wire 10 is wrapped with insulating layer.
Preferably, the outer surface of first electrode 11 and second electrode 12 has insulating layer.
The material that insulating layer can also select anti-corrosion capability strong is made, so that sensor can be used for conducting liquid, or anti-
Only electrode or conducting wire react with liquid, improve the service life of capacitance level transducer 1, while preventing capacitance type liquid level
1 contaminated fluid of sensor.
In use, capacitance level transducer 1 is immersed in liquid, so that the pars pectinata of capacitor is perpendicular to liquid level, this
Sample helps to improve detection accuracy.Medium between first electrode 11 and second electrode 12 is liquid and its gas above, by
In the permittivity ε of liquid1With the permittivity ε of gas on liquid level2Difference, such as: ε1>ε2, then when liquid level increases, capacitor
Total dielectric constant ε value increases thus capacitance therewith and increases between 1 liang of electrode of formula liquid level sensor, otherwise when liquid level declines, ε value subtracts
Small, capacitance also reduces.So capacitance level transducer 1 can measure liquid level by the variation of two interelectrode capacitances
Height.
Embodiment two
As shown in Fig. 2, present embodiment discloses a kind of vacuum degree on-Line Monitor Devices, comprising: capacitance level transducer 1
With signal processing unit 2.
Capacitance level transducer 1 is arranged at the liquid level of the liquid for sealing vacuum area.
Preferably, capacitance level transducer 1 includes: capacitor, signal wire 10.Capacitor includes first electrode 11 and
Two electrodes 12.First electrode 11 is cylindrical shape, and the side of first electrode 11 is made of multiple pars pectinatas, it is preferable that first electrode
The spacing distance of 11 two neighboring pars pectinatas is less than 1 millimeter.The complete phase of structure of the structure of second electrode 12 and first electrode 11
Together, the pars pectinata of first electrode 11 and second electrode 12 alternates to form the shape structure that keeps my fingers crossed.First electrode 11 and second
Electrode 12 draws signal wire 10 respectively, and the cylinder interior that first electrode 11 and second electrode 12 surround is arranged in signal wire 10.This
Outside, signal wire 10 is wrapped with electro-magnetic screen layer, can further decrease electromagnetic interference.10 outermost layer of signal wire is wrapped with insulation
Have insulating layer, the material that insulating layer can also select anti-corrosion capability strong in the outer surface of layer, first electrode 11 and second electrode 12
Material is made, so that sensor can be used for conducting liquid, or prevent electrode or conducting wire from reacting with liquid, improves capacitance type liquid level
The service life of sensor 1, while preventing 1 contaminated fluid of capacitance level transducer.
It can be played by the shape structure that keeps my fingers crossed that the pars pectinata of first electrode 11 and second electrode 12 is formed and inside is believed
The shielding action of number line 10 reduces the interference of sensor output signal, helps to improve the detection accuracy of sensor.In addition, electric
The electrode of container uses pectinate texture, increases the relative area of two interpolar of capacitor, helps to improve monitoring accuracy, meanwhile,
Capacitor uses cylindrical structure, can effectively reduce the size of capacitor, better adapt to narrow monitoring space.
As shown in Fig. 2, capacitance level transducer 1 perpendicular to liquid levels place so that capacitor plate 13 perpendicular to
Liquid level.
Signal processing unit 2 is arranged in vacuum area in Fig. 2, it, can be according to vacuum area in actual application
Space size selection by signal processing unit 2 be arranged in vacuum area or outside vacuum area.
Signal processing unit 2, the signal acquisition terminal of signal processing unit 2 and two bars of capacitance level transducer 1
Line 10 connects, and signal processing unit 2 is used to monitor the capacitance variations of capacitance level transducer 1, is monitored according to capacitance variations true
Reciprocal of duty cycle.Wherein, signal processing unit 2 includes signal deteching circuit and the processor for handling data.Processor can use
CPU, FPGA, DSP, ARM, ASIC or other microprocessor chips realizations with the same function, can be according to practical application
Concrete condition carries out selection design, does not repeat herein.Signal deteching circuit is the circuit of common measurement small capacitance, such as
Charge/discharge capacitance measurement circuit, AC bridge capacitance measuring circuit, exchange locking phase amplification capacitance measurement circuit etc., these circuits are equal
For the circuit of common measurement small capacitance, details are not described herein.
Vacuum degree on-Line Monitor Device further includes alarm unit 3, the output end company of alarm unit 3 and signal processing unit 2
It connects, signal processing unit 2 once detects that the capacitance variations value of capacitance level transducer 1 is more than threshold value, then exports alarm signal
Number, it is realized and is alarmed by alarm unit 3.
In use, the immersion of capacitance level transducer 1 is used to seal in the liquid of vacuum area, so that the comb of capacitor
Shape portion helps to improve detection accuracy perpendicular to liquid level in this way, and liquid is full of between first electrode 11 and second electrode 12, record
Under capacitance level transducer 1 at this time capacitance.Vaccum when equipment is destroyed, the liquid decline of sealing, capacitor
Device top starts to expose liquid level, causes the dielectric constant of two interpolar of capacitor to reduce, causes the capacitor of capacitor to reduce, condenser type
Liquid level sensor 1 connects external signal processing unit by signal wire 10, can be detected the variation of capacitance, and reported
It is alert.The case where due to vacuum area leakage, is different, and the speed and height of liquid level decline are also different, and signal processing unit 2 can be with
According to height and speed that the amount of capacitance variation and the velocity estimated liquid level of variation decline, and then obtain equipment vacuum degree feelings
Condition makes different grades of alarm.
The difference of environment is likely to affect the variation of liquid dielectric or capacitor itself, and capacitance type liquid level is caused to pass
The capacitance variations of sensor 1.In order to reduce environmental factor bring measurement error, vacuum degree on-line monitoring dress provided in this embodiment
Setting further includes sensor unit 4, as shown in Fig. 2, sensor unit 4 is arranged in liquid, for monitoring environmental parameter, sensor
The output end of unit is connect with signal processing unit, and signal processing unit 2 is also used to correct capacitance variations value according to environmental parameter.
Output capacitance changing value can be corrected using predetermined environment matched curve according to the current environmental parameter of acquisition, wherein
Environment matched curve can be obtained by laboratory equipment bench test, changed the environmental parameter in test chamber, obtained different rings
The output signal of capacitance level transducer 1 under the parameter of border, by between computer fitting environmental parameter and capacitance variations value
Relationship obtains environment matched curve.Based on sensor unit 4 and environment matched curve, can effectively reduce because environment changes
Bring measurement error improves the reliability of testing result.Wherein, sensor unit 4 includes but is not limited to lower sensor:
Temperature sensor, conductivity sensor;Accordingly, environmental parameter includes the ginseng that temperature and conductivity etc. may influence capacitance
Number.
The mode of existing detection vacuum is pressure transducer, but pressure transducer is at high cost, and the environmental requirement to using
It is higher, it is not suitable for the vacuum detecting of high temperature and high pressure environment.Vacuum degree on-Line Monitor Device provided in this embodiment, using having
The liquid level sensor for the shape structure that keeps my fingers crossed improves the precision and anti-interference ability of level monitoring, can better adapt to height
The complex environments such as warm high pressure;Liquid level sensor compact can better adapt to compact-sized installation environment;Reduce prison
Cost is surveyed, large-scale production and application are suitble to.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise ", " axial direction ", " radial direction ", " circumferential direction " be orientation based on the figure or
Positional relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must
There must be specific orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more of the features.In the description of the present invention, the meaning of " plurality " is two or more, unless separately
There is clearly specific restriction.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral;It can be mechanical connect
It connects, is also possible to be electrically connected;It can be directly connected, can also can be in two elements indirectly connected through an intermediary
The interaction relationship of the connection in portion or two elements.It for the ordinary skill in the art, can be according to specific feelings
Condition understands the concrete meaning of above-mentioned term in the present invention.
In the present invention unless specifically defined or limited otherwise, fisrt feature in the second feature " on " or " down " can be with
It is that the first and second features directly contact or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature be directly above or diagonally above the second feature, or be merely representative of
First feature horizontal height is higher than second feature.Fisrt feature can be under the second feature " below ", " below " and " below "
One feature is directly under or diagonally below the second feature, or is merely representative of first feature horizontal height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not
It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office
It can be combined in any suitable manner in one or more embodiment or examples.In addition, without conflicting with each other, the skill of this field
Art personnel can tie the feature of different embodiments or examples described in this specification and different embodiments or examples
It closes and combines.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations;To the greatest extent
Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement;And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme should all cover within the scope of the claims and the description of the invention.
Claims (10)
1. a kind of capacitance level transducer characterized by comprising capacitor, signal wire;
The capacitor includes first electrode and second electrode, and the first electrode is the cylindrical shape surrounded by pectinate texture, more
A identical pole plate composition in interval pectinate texture, the complete phase of structure of the structure of the second electrode and the first electrode
Together, the pole plate of the first electrode and the second electrode alternates to form the shape structure that keeps my fingers crossed;
The first electrode and the second electrode draw signal wire respectively, and the signal wire is from the first electrode and described
The cylinder interior that two electrodes surround is drawn.
2. capacitance level transducer according to claim 1, which is characterized in that the two neighboring pole plate of first electrode
Spacing distance less than 1 millimeter.
3. capacitance level transducer according to claim 1, which is characterized in that the signal wire is wrapped with electromagnetic screen
Cover layer.
4. capacitance level transducer according to claim 1, which is characterized in that the signal wire is wrapped with insulation
Layer.
5. capacitance level transducer according to claim 1, which is characterized in that the first electrode and second electricity
Has insulating layer in the outer surface of pole.
6. a kind of vacuum degree on-Line Monitor Device characterized by comprising
Capacitance level transducer of any of claims 1-5, the capacitance level transducer setting are being used for
At the liquid level for sealing the liquid of vacuum area;
Signal processing unit, two bars of the signal acquisition terminal of the signal processing unit and the capacitance level transducer
Line connection, the signal processing unit are used to monitor the capacitance variations of the capacitance level transducer, are supervised according to capacitance variations
Survey vacuum degree.
7. vacuum degree on-Line Monitor Device according to claim 6, which is characterized in that the capacitance level transducer hangs down
Directly placed in the liquid level of the liquid.
8. vacuum degree on-Line Monitor Device according to claim 6, which is characterized in that it further include alarm unit, the report
Alert unit is connect with the output end of the signal processing unit, and the signal processing unit once detects the capacitance type liquid level
The capacitance variations value of sensor is more than threshold value, then exports alarm signal, is realized and is alarmed by the alarm unit.
9. vacuum degree on-Line Monitor Device according to claim 8, which is characterized in that it further include sensor unit, it is described
Sensor unit is arranged in the liquid, for monitoring environmental parameter, the output end of the sensor unit and the signal
Processing unit connection, the signal processing unit are also used to correct the capacitance variations value according to the environmental parameter.
10. vacuum degree on-Line Monitor Device according to claim 9, which is characterized in that the sensor unit includes: temperature
Sensor, conductivity sensor are spent, the environmental parameter includes: temperature and conductivity.
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CN201711207268.2A CN109839169A (en) | 2017-11-27 | 2017-11-27 | Capacitance level transducer and vacuum degree on-Line Monitor Device |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113418968A (en) * | 2021-06-01 | 2021-09-21 | 大连海事大学 | Cross capacitive sensor, manufacturing method of sensor and oil detection system |
CN114435158A (en) * | 2022-02-18 | 2022-05-06 | 中国第一汽车股份有限公司 | Living body detection device and control method of vehicle wireless charger |
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CN102288259A (en) * | 2011-05-13 | 2011-12-21 | 嘉兴学院 | Segmentation capacitance type liquid level sensor and liquid level measurement method thereof |
CN102374885A (en) * | 2010-08-27 | 2012-03-14 | 重庆支点仪器仪表有限公司 | Comb capacitance type oil level sensor |
CN106573110A (en) * | 2014-04-15 | 2017-04-19 | 塞伯斯多夫劳动有限责任公司 | Medication injector with capacitive fill level measurement capacity, and contact sensor |
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CN102374885A (en) * | 2010-08-27 | 2012-03-14 | 重庆支点仪器仪表有限公司 | Comb capacitance type oil level sensor |
CN102288259A (en) * | 2011-05-13 | 2011-12-21 | 嘉兴学院 | Segmentation capacitance type liquid level sensor and liquid level measurement method thereof |
CN106573110A (en) * | 2014-04-15 | 2017-04-19 | 塞伯斯多夫劳动有限责任公司 | Medication injector with capacitive fill level measurement capacity, and contact sensor |
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CN113418968A (en) * | 2021-06-01 | 2021-09-21 | 大连海事大学 | Cross capacitive sensor, manufacturing method of sensor and oil detection system |
CN113418968B (en) * | 2021-06-01 | 2023-02-21 | 大连海事大学 | Cross capacitive sensor, manufacturing method of sensor and oil detection system |
CN114435158A (en) * | 2022-02-18 | 2022-05-06 | 中国第一汽车股份有限公司 | Living body detection device and control method of vehicle wireless charger |
CN114435158B (en) * | 2022-02-18 | 2023-11-21 | 中国第一汽车股份有限公司 | Living body detection device and control method of vehicle wireless charger |
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