CN109830881A - A kind of optical frequency com generator based on silicon nitride - Google Patents
A kind of optical frequency com generator based on silicon nitride Download PDFInfo
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- 230000003287 optical effect Effects 0.000 title claims abstract description 84
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 46
- 229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 45
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- 229910052710 silicon Inorganic materials 0.000 abstract description 8
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- 150000004767 nitrides Chemical group 0.000 abstract description 4
- 238000001228 spectrum Methods 0.000 description 9
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- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 5
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Abstract
The invention proposes a kind of optical frequency com generator based on silicon nitride, it include: the mirror surface set gradually, gain media, filter, the generator for generating optical frequency com and the controller being connected with the gain media, filter, laser of the mirror surface for self- pomped in future source is reflected, the gain media is for amplifying the laser reflected back, the filter exports laser to the generator, and the generator is nitride silicon device.A kind of optical frequency com generator based on silicon nitride of the invention can greatly simplify the system complexity of optical frequency com and reduce cost with nitridation silicon chip.
Description
Technical field
The present invention relates to a kind of optical frequency com generator, in particular to a kind of optical frequency com based on silicon nitride generates
Device.
Background technique
Optical frequency com (OFC) refers on frequency spectrum a series of frequency by uniform intervals and with relevant stable phase angle relationship
The spectrum of rate component composition.With the rapid development of optical communication technique, OFC is since it is in the generation of optics random waveform, multi-wavelength
The extensive use in the fields such as ultra-short pulse generation and dense wave division multipurpose has attracted the concern of more and more scholars.
In principle, optical frequency com shows as the optical frequency sequence with equal frequencies interval on frequency domain, in time domain
On show as the electromagnetism field oscillation envelope with femtosecond magnitude time width, the spectrum width and electromagnetic field of optical frequency sequence
The slow time width for becoming envelope of oscillation meets Fourier transformation relationship.This distribution in time domain and frequency domain of ultrashort pulse is special
Property just seem our daily combs used, the frequency comb for being referred to as optical region of visualization, referred to as " light comb ".Light comb is equivalent to
One optical frequency synthesizer is the tool for carrying out absolute optical frequency measurement most effective so far, can be by caesium original
Sub- microwave frequency marking and opctical frequency standard are accurate and simply connect, for develop high-resolution, high-precision, high accuracy frequency mark
Standard provides carrier, be also accurate spectrum, astrophysics, quantum manipulation etc. scientific researches direction provide ideal research
Tool gradually applies to optical frequency accurate measurement, the measurement of atomic ion transition energy level, the synchronization of remote signal clock by people
In the fields such as satellite navigation.
So far, the generation of most optical frequency coms is based on gas, solid and fiber pulse laser, and
The loss of most of chips is higher, so amplifier is also needed just to can produce optical frequency com, the body of laser and amplifier
Product is general all larger, and price is expensive, more than a Wan Meiyuan, leads to so while optical frequency com can be widely applied to light
The fields such as letter, data center, optical detection, spectroscopy, medical treatment, quantum, atomic clock, but the cost of the system of optical frequency com is big
It is universal that it is constrained greatly.
Summary of the invention
In order to solve the problems, such as that higher, system complex is lost in optical frequency com generator in the prior art, the present invention is provided
A kind of low-power consumption, system simplification optical frequency com generator based on silicon nitride.
The invention discloses a kind of optical frequency com generator based on silicon nitride, comprising: the mirror surface that sets gradually,
Gain media, filter, the generator for generating optical frequency com and it is connected with the gain media, filter
Controller, laser of the mirror surface for self- pomped in future source are reflected, and the gain media will be for that will reflect
The laser to come over amplifies, and the filter exports laser to the generator, and the generator is nitrogen
SiClx device.
Further, the generator includes that optical waveguide, ring resonator, resonator and optical frequency com output connect
Mouthful, the optical waveguide, which is used to for the laser of single mode to imported into the ring resonator, carries out resonance, then will be after resonance
Laser export to optical frequency com output interface to export optical frequency com, the resonator controls resonance frequency.
Further, the mirror surface has high reflection coating, is at least plated in relative to the gain media
One end.
Further, the gain media uses three-five gain media.
Further, the mirror surface and gain media are coupled on the first chip by edge, the filtering
Device and generator are coupled on the second chip by edge.
Further, the mirror surface and gain media are coupled on the first chip by microprism, the filter
Wave device and generator are coupled on the second chip by microprism.
Further, the resonator includes following functions module:
Frequency reception module, for receiving the resonance frequency numerical value of user's needs；
Micro treatment module is instructed for being issued according to the resonance frequency numerical value to resonant motor drive module；
Resonant motor drive module, for the operating according to the order-driven resonant motor；
Resonant motor, for being moved by the physical resonant of the resonance frequency Numerical Implementation ring resonator.
Further, the ring resonator is the silicon nitride microcavity that inner wall has mirror surface.
Further, the controller includes following functions unit:
Unit is excited, for gain media described in excitation or suspend mode；
Unit is adjusted, for adjusting the light passing rate of the filter.
Further, the controller is integrated with the resonator.
Implement a kind of optical frequency com generator based on silicon nitride of the invention, there is technical effect beneficial below:
It is different from the prior art that middle optical frequency com generator power consumption is big, deficiency of higher cost, in the technical program
Generator in optical frequency com generator based on silicon nitride is nitride silicon device, and silicon nitride has very wide transmitted spectrum, and
And can accomplish ultra-low loss, silicon nitride has the transmittance of more long wavelength in mid and far infrared spectrum, and silicon nitride also has light
Preferably restrictive, same optical device can accomplish smaller size, and can be made integrated chip and more accord with light
The application in the fields such as electronics and microelectronics can greatly simplify the system complex journey of optical frequency com with nitridation silicon chip
It spends and reduces cost.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention without any creative labor, may be used also for those of ordinary skill in the art
To obtain other drawings based on these drawings.
Fig. 1 is a kind of functions of modules figure of the optical frequency com generator based on silicon nitride of the embodiment of the present invention；
Fig. 2 is the structure function module map of generator in Fig. 1；
Fig. 3 is the laser waveform schematic diagram that pumping source generates；
Fig. 4 is the laser waveform schematic diagram that optical frequency com generates；
Fig. 5 is the laser waveform schematic diagram that single mode optical frequency com generates；
Fig. 6 is the structure chart inside optical frequency com generator material object.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Please refer to Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5 and Fig. 6, the embodiment of the present invention, a kind of optics frequency based on silicon nitride
Rate combs generator 1, comprising: the mirror surface 10 that sets gradually, gain media 20, filter 30, for generating optical frequency com
Generator 40 and the controller 50 that is connected with gain media 20, filter 30.
Wherein, gain media 20, filter 30 can connect controller 50 by SPI interface.
Laser of the mirror surface 10 for self- pomped in future source is reflected；
Gain media 20 is for amplifying the laser reflected back；
Laser is carried out single-mode output to generator 40 by filter 30；
Optical filter is the instrument for carrying out wavelength selection, it can pick out required wave from numerous wavelength
It is long, and the light in addition to this wavelength will be rejected and pass through.It can be used for wavelength selection, the noise filtering of image intensifer, increasing
Beneficial balanced, light multiplexing/demultiplexing.
In the technical program, the product type of filter 30: FBG-11-23456.
The product type that gain media 20 uses can are as follows: SAFC-1550-20-HR (image intensifer).
Generator 40 is nitride silicon device.
Silicon nitride material has many excellent performances, such as high-melting-point, high rigidity, stiff stability, low-expansion coefficient, good leads
Hot, strong thermal shock resistance and excellent optical property etc., silicon nitride block materials and its film can be widely used in photoelectron, micro-
The industries such as electronics, machining, chemical industry, solar battery, aerospace and integrated circuit.
In terms of optical property, silicon nitride has very wide transmitted spectrum, and can accomplish ultra-low loss, and silicon nitride is in
Far-infrared spectrum has the transmittance of more long wavelength, and silicon nitride also has light better binding character, and same optical device can
It to accomplish smaller size, and can be made the application that integrated chip more accords with the fields such as photoelectron and microelectronics, use
Silicon chip is nitrogenized, can greatly simplify the system complexity of optical frequency com and reduce cost.In the present invention, it uses
The device that silicon nitride is made into is preferably to select as the material of generator 40.
Generator 40 includes optical waveguide 41 (silicon nitride material), ring resonator 42 (silicon nitride material), 43 (nitrogen of resonator
SiClx material) and optical frequency com output interface 44 (silicon nitride material), optical waveguide 41 is for importing the laser of single mode
Resonance is carried out to ring resonator 42, then the laser after resonance is exported into optical frequency com output interface 44 to export optics frequency
Rate comb, resonator 43 control resonance frequency.
Mirror surface 10 is at least plated in gain media including substrate and the high reflection coating being coated on substrate, high reflection coating
20 one end.High reflection coating can be the coat of metal, such as silver-plated, zinc coat, be also possible to glass microbedding, and substrate can be
The metal plates such as stainless steel, aluminium sheet.
Gain media 20 preferably uses three-five gain media, such as: InP (indium phosphide) device, InGaAs device,
In, indium phosphide is a kind of chemical substance, is the Dark grey crystal of pitchy luster.InP (indium phosphide) device has the spy of semiconductor
Property.Reaction is heated in quartz ampoule by indium metal and red phosphorus to be made.
Referring to Fig. 6, mirror surface 10 and gain media 20 are coupled on the first chip by edge, filter 30 and life
It grows up to be a useful person and 40 is coupled on the second chip by edge；Or: mirror surface 10 and gain media 20 are coupled in by microprism
On one chip, filter 30 and generator 40 are coupled on the second chip by microprism.
Resonator 43 includes following functions module:
Frequency reception module, for receiving the resonance frequency numerical value of user's needs；
Micro treatment module is instructed for being issued according to resonance frequency numerical value to resonant motor drive module；
Resonant motor drive module, for the operating according to order-driven resonant motor；
Resonant motor, for being moved by the physical resonant of resonance frequency Numerical Implementation ring resonator.
Ring resonator 42 is the silicon nitride microcavity that inner wall has mirror surface.
In the technical scheme, frequency reception module includes key and memory, and user passes through key-press input resonance frequency number
Value, memory save resonance frequency numerical value, for micro treatment module calling.
Model can be used in micro treatment module are as follows: the programmable microprocessor module of AD9833 DDS.
Model can be used in resonant motor drive module are as follows: the motor driven plate module of L298N.
Controller 50 includes following functions unit:
Unit is excited, for gain media described in excitation and/or suspend mode；
Unit is adjusted, for adjusting the light passing rate of the filter.
50 implementation of controller can are as follows: microprocessor (model: STM32F103C8T6 microcontroller) and microprocessor
The multiple function buttons or function button (multiple excitation units and/or adjusting unit) being connected, such as " starting " key presses down
(power circuit for being equivalent to realization and microprocessor), microprocessor start gain media 20 and filter 30；" stopping " key
Press down (the power-off circuit for being equivalent to realization and microprocessor), microprocessor sleeping gain media 20 and filter 30；It " adjusts
Section " key presses down, the luminous flux of microprocessor tunable filter 30.
In another embodiment, controller 50 is integrated with resonator 43.
It is described in detail below as follows:
The technical solution of the application relates generally to a kind of optical frequency com generator, greatly reduces generation optical frequency
Energy needed for comb, simplifies system structure, which can be used for optic communication, data center, optical detection, spectrum
The fields such as, medical treatment, quantum, atomic clock.
In other words, the invention proposes a kind of optical frequency com generator based on silicon nitride is based on low-loss silicon nitride
Optical frequency com generator is small in size, structure is simple, low energy consumption, and cost is greatly reduced.
The present invention it is main its by a mirror surface, gain media, integrated filter and a low-loss silicon nitride light
Chip (generator 40) composition, the optical chip are mainly made of ring resonator and optical waveguide, and ring resonator not only provides instead
It penetrates, and according to design, optical frequency com can produce by nonlinear effect.Compared with optical frequency com system before, this
Novel generator structures are simple, and required low energy consumption, so do not need external laser or amplifier, generator is small in size,
It is at low cost, it is easily integrated and is mass produced.
The course of work of optical frequency com generator 1 of the invention are as follows:
Firstly, gain media is coupled with optical chip；
Secondly, excitation gain media, and integrated filter is adjusted, so that it is obtained maximum light passing rate；
Finally, next adjusting low-loss silicon nitride ring resonator, so that it is started resonance, adjusts integrated circuit later,
Resonant state is adjusted, optical frequency com is exported.
It is analyzed below with spectroanalysis instrument.
It is measured by spectroanalysis instrument, measurement result is as shown in figure 3, figure 4 and figure 5.
With resonant state is gradually adjusted, the optical frequency com of mode-lock status is finally obtained, for the optics verified
Frequency comb is mode-lock status, is measured using Spectrum Analyzer, obtains measurement result as shown in the right side Fig. 5, it was demonstrated that
Optical frequency com is mode-lock status, which is 1525~1635nm, more than 100nm, by further excellent
The scattering for changing resonant cavity, can obtain broader optical frequency com.
Implement a kind of optical frequency com generator based on silicon nitride of the invention, there is technical effect beneficial below:
The optics based on silicon nitride that middle power consumption is big, deficiency of higher cost, in the technical program is different from the prior art
Generator in frequency comb generator is nitride silicon device, and silicon nitride has very wide transmitted spectrum, and can accomplish ultralow damage
Consumption, silicon nitride have the transmittance of more long wavelength in mid and far infrared spectrum, and silicon nitride also has light better binding character, equally
Optical device can accomplish smaller size, and can be made integrated chip and more accord with the fields such as photoelectron and microelectronics
Application, with nitridation silicon chip, can greatly simplify the system complexity of optical frequency com and reduce cost.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of optical frequency com generator based on silicon nitride, comprising: mirror surface, the gain media, filtering set gradually
Device, the generator for generating optical frequency com and the controller being connected with the gain media, filter, it is described
Laser of the mirror surface for self- pomped in future source is reflected, and the gain media is used to carry out the laser reflected back
Amplification, the filter export laser to the generator, which is characterized in that the generator is silicon nitride device
Part.
2. the optical frequency com generator according to claim 1 based on silicon nitride, which is characterized in that the generator
Including optical waveguide, ring resonator, resonator and optical frequency com output interface, the optical waveguide is used for single mode
Laser imported into the ring resonator and carries out resonance, then by the laser after resonance export to optical frequency com output interface with
Optical frequency com is exported, the resonator controls resonance frequency.
3. the optical frequency com generator according to claim 1 based on silicon nitride, which is characterized in that the reflecting mirror
Face has high reflection coating, at least one end of plating relative to the gain media.
4. the optical frequency com generator according to claim 1 based on silicon nitride, which is characterized in that the gain is situated between
Matter uses three-five gain media.
5. the optical frequency com generator according to claim 1 based on silicon nitride, which is characterized in that the reflecting mirror
Face and gain media are coupled on the first chip by edge, and the filter and generator are coupled in the second core by edge
On piece.
6. the optical frequency com generator according to claim 1 based on silicon nitride, which is characterized in that the reflecting mirror
Face and gain media are coupled on the first chip by microprism, and the filter and generator are coupled in by microprism
On two chips.
7. the optical frequency com generator according to claim 2 based on silicon nitride, which is characterized in that the resonator
Including following functions module:
Frequency reception module, for receiving the resonance frequency numerical value of user's needs；
Micro treatment module is instructed for being issued according to the resonance frequency numerical value to resonant motor drive module；
Resonant motor drive module, for the operating according to the order-driven resonant motor；
Resonant motor, for being moved by the physical resonant of the resonance frequency Numerical Implementation ring resonator.
8. the optical frequency com generator according to claim 2 based on silicon nitride, which is characterized in that the annular is humorous
The chamber that shakes is the silicon nitride microcavity that inner wall has mirror surface.
9. the optical frequency com generator according to claim 1 based on silicon nitride, which is characterized in that the controller
Including following functions unit:
Unit is excited, for gain media described in excitation and/or suspend mode；
Unit is adjusted, for adjusting the light passing rate of the filter.
10. the optical frequency com generator according to claim 2 based on silicon nitride, which is characterized in that the control
Device is integrated with the resonator.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111610682A (en) * | 2020-05-19 | 2020-09-01 | 西南大学 | Rectangular optical frequency comb generation system based on silicon nitride micro-ring on chip |
| CN113567379A (en) * | 2021-09-27 | 2021-10-29 | 深圳大学 | Gas molecule fingerprint identification system |
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| CN209487931U (en) * | 2019-02-03 | 2019-10-11 | 深圳市硅光半导体科技有限公司 | A kind of optical frequency com generator based on silicon nitride |
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| CN113567379A (en) * | 2021-09-27 | 2021-10-29 | 深圳大学 | Gas molecule fingerprint identification system |
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