CN109828437A - Anti-stick hardened structure - Google Patents
Anti-stick hardened structure Download PDFInfo
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- CN109828437A CN109828437A CN201711178511.2A CN201711178511A CN109828437A CN 109828437 A CN109828437 A CN 109828437A CN 201711178511 A CN201711178511 A CN 201711178511A CN 109828437 A CN109828437 A CN 109828437A
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Abstract
A kind of anti-stick hardened structure is applied to exposure device, and for being exposed operation to a part to be exposed, anti-stick hardened structure includes the anti-stick hardened structure: compressing component, exposure light source and at least one Blow off module.Compressing component includes light transmission plate body, compress component can by control module control and selectively to load-bearing part close to or far from, load-bearing part for carrying part to be exposed.Exposure light source, which is set to, compresses component, and light beam caused by exposure light source can pass through light transmission plate body.At least one Blow off module can be controlled by control module and selectively be blown.Wherein, when part to be exposed, which is attached at, compresses component, control module can control Blow off module air blowing, so that part to be exposed is separated from each other with component is compressed.By the Blow off module and the cooperation for compressing component, part to be exposed can be effectively reduced after completing exposure operation, be attached at the probability compressed on component, compresses on component because part to be exposed is attached to reduce and cause problem difficult on subsequent job.
Description
Technical field
The present invention relates to a kind of anti-stick hardened structure, especially a kind of anti-stick hardened structures applied to circuit board exposure device.
Background technique
Existing exposure device is easy after part to be exposed completes exposure because of a variety of causes, and part to be exposed is pasted
It invests on exposure device, so will lead to the difficulty of subsequent job.Edge this, the present inventor is concentrated on studies and cooperates theoretical fortune
With, and propose that a kind of design is reasonable and is efficiently modified the present invention of the above problem.
Summary of the invention
The main purpose of the present invention is to provide a kind of anti-stick hardened structures applied to exposure device, for improving existing skill
In art, part to be exposed is easy to be attached at the problem for compressing on component, and causing subsequent job difficulty after completing exposure.
To achieve the goals above, the present invention provides a kind of anti-stick hardened structure, is applied to an exposure device, described anti-stick
For being exposed operation to a part to be exposed, anti-stick hardened structure includes hardened structure: one compresses component, an exposure light source and at least
One Blow off module.Compressing component includes a light transmission plate body, compress component can by a control module control and selectively
To a load-bearing part close to or far from load-bearing part is for carrying part to be exposed.Exposure light source, which is set to, compresses component, and exposure light source
Generated light beam can pass through light transmission plate body.At least one Blow off module can by control module control and selectively blow.
Wherein, when part to be exposed, which is attached at, compresses component, control module can control Blow off module air blowing so that part to be exposed with compress
Component is separated from each other.
Preferably, the anti-stick hardened structure also includes at least one ejector pin component, which includes a thimble
Part, the thimble part can by the control module control and selectively protrude from the light transmission plate body, be attached at supporting
The part to be exposed for compressing component.
Preferably, the component that compresses includes a light shield, and the light shield is removedly set to the light transmission plate body, institute
Light shield is stated at least one avoid holes, the ejector pin component can selectively pass through the evacuation by the control module
Hole and protrude from the light transmission plate body and the light shield, to support the part to be exposed for being attached at the light shield, and make described
Part to be exposed is separated from each other with the light shield.
Preferably, the light transmission plate body has a perforation, and the perforation is disposed through the light transmission plate body, the air blowing
One venthole of module and the perforation are interconnected；Wherein, the ejector pin component and the Blow off module can be controlled and same
Shi Zuodong or successive actuation, so that the part to be exposed is separated from each other with the light shield.
Preferably, the side gas hole of the Blow off module is located at the side of the light transmission plate body, when the Blow off module
When being controlled by the control module, the Blow off module can be blown from a side of the light transmission plate body to the surface of the light transmission plate body
Gas out；Wherein, the ejector pin component and the Blow off module can by the control module control and actuation simultaneously or successively
Actuation, so that the part to be exposed is separated from each other with the component that compresses.
Preferably, the anti-stick hardened structure includes at least two thimble parts and two side-blown stomatas, and two
The side-blown stomata is located between two thimble parts.
Preferably, the Blow off module includes a fixed structure, and the fixed structure is fixedly installed on the light-transmitting plate
The side of body is formed with a gas passage in the fixed structure, and the gas passage can guide gas to the light transmission plate body
Surface flow.
Preferably, the light transmission plate body has a perforation, and the perforation is disposed through the light transmission plate body, described anti-stick
Hardened structure includes at least two Blow off module, at least one described Blow off module is defined as a longitudinal Blow off module, until
A few Blow off module is defined as a lateral Blow off module, a venthole of the longitudinal direction Blow off module and the perforation phase
Intercommunicated, the transverse direction Blow off module includes the fixed structure.
Preferably, the light transmission plate body has a perforation, and the perforation is disposed through the light transmission plate body, the air blowing
One venthole of module and the perforation are interconnected.
Preferably, the component that compresses includes a light shield, and the light shield is removedly set to the light transmission plate body, institute
Light shield is stated at least one avoid holes, the avoid holes, the perforation and the venthole are connected to each other；Wherein, institute
State Blow off module can by the control module control and optionally through the venthole be discharged gas so that attach described in
The part to be exposed and the light shield of light shield are separated from each other.
Beneficial effects of the present invention can be: pass through the Blow off module and the cooperation for compressing component, Ke Yiyou
Effect reduces part to be exposed after completing exposure operation, is attached at the probability compressed on component, to reduce because part to be exposed attaches
Problem difficult on subsequent job is caused in compressing on component.
Be further understood that feature and technology contents of the invention to be enabled, please refer to below in connection with it is of the invention specifically
Bright and attached drawing, however, the drawings only provide reference and explanation, is not intended to limit the present invention.
Detailed description of the invention
Fig. 1 is the schematic diagram of anti-stick hardened structure of the invention.
Fig. 2 is the schematic diagram for compressing component of anti-stick hardened structure of the invention.
Fig. 3 A is the cross-sectional view of anti-stick hardened structure of the invention after hatching III shown in FIG. 1 cutting.
Enlarged diagram of Fig. 3 B by Fig. 3 A location A indicated.
Fig. 4 is the front view of Fig. 3 A.
Fig. 5 is the partial cutaway schematic of anti-stick hardened structure of the invention.
The enlarged diagram that Fig. 6 divides for Fig. 2 institute's frame portion.
Specific embodiment
Illustrate the embodiment of anti-stick hardened structure of the invention, those skilled in the art below by way of specific specific example
Other advantages and effect of the present invention can be understood easily as the content disclosed by this specification.The present invention also can be by other not
Same specific example is implemented or is applied, and details in this specification can also be based on different perspectives and applications, be not contrary to
It is lower from the spirit of the present invention to carry out various modifications and change.Schema of the invention is only to briefly describe again, not according to actual size
Describe, that is, unreacted goes out the related actual size constituted, first give chat it is bright.This hair is further described in embodiment below
Bright viewpoint, but not anyways to limit the scope of the invention.
It is the schematic diagram of anti-stick hardened structure of the invention also referring to Fig. 1 and Fig. 2.As shown, anti-stick hardened structure
1 includes one to compress component 10, a load-bearing part 20, an exposure light source 30 and multiple Blow off module 40.Load-bearing part 20 is for carrying
One part (not shown) to be exposed.Compressing component 10, to be electrically connected a control module (not shown, such as microprocessor, computer
Deng), and compressing component 10 can be controlled by control module, selectively close to or far from load-bearing part 20；Compressing component 10 includes
There is a light transmission plate body 11, the light transmission plate body 11 can be fixed to each other with a light shield M；It compresses component 10 and is provided with exposure light source 30,
And the exposing light beam that exposure light source 30 is issued can penetrate light transmission plate body 11, to be irradiated to 20 direction of load-bearing part.Specifically, it controls
Molding block can be provided with part to be exposed in load-bearing part 20, and when compressing component 10 and being fixedly installed light shield M, control compresses component
10 is close to load-bearing part 20, so that light shield M correspondence presses on part to be exposed, then control module can control exposure light source again
30 actuations are exposed operation to treat exposed part.In the present embodiment, it is set to exposure light source 30 and compresses component 10 and be
Example, but not limited to this, and in different applications, exposure light source 30 also can be set to be compressed in load-bearing part 20 or be set to simultaneously
Component 10 and load-bearing part 20, it is without restriction to this；Relatively, the light-transmitting plate body 11 has also can be set in load-bearing part 20.
As shown in Fig. 2, compressing component 10 may include Blow off module 40 there are two types of kenel, one of Blow off module 40
It is defined as a lateral Blow off module 40A, another Blow off module is then defined as a longitudinal Blow off module 40B.Lateral Blow off module
The blowing direction of 40A substantially edge is in the surface of light transmission plate body 11, and the blowing direction of longitudinal Blow off module 40B is then substantially along vertical
It is blowed in the direction (i.e. the normal line vector of light transmission plate body 11) on the surface of light transmission plate body 11.Lateral Blow off module 40A and longitudinal direction are blown
Gas module 40B is all electrically connected control module, and control module can control longitudinal Blow off module 40B and lateral Blow off module 40A
Selectively blow.In practical applications, lateral Blow off module 40A or longitudinal Blow off module can be provided only with by compressing component 10
40B, or compress component 10 and can be provided with lateral Blow off module 40A and longitudinal Blow off module 40B simultaneously, it can add according to demand
It is without restriction to this with variation.
Furthermore, it is understood that referring to Figure 2 together, Fig. 3 A, Fig. 3 B and Fig. 4, Fig. 3 A be shown as the section of Fig. 1 hatching III and show
It is intended to, Fig. 3 B then shows that the enlarged diagram for the location A that Fig. 3 A is indicated, Fig. 4 are shown as the front view of Fig. 3 B.As shown,
Compressing component 10 can be set that there are two lateral Blow off module 40A, each transverse direction Blow off module 40A can wrap containing a fixed knot
Structure 41, the fixed structure 41 are fixedly installed on the side of light transmission plate body 11, a gas passage are formed in fixed structure 41
411, and fixed structure 41 is in the side towards light transmission plate body 11, be formed with multiple side-blown stomatas 412, and gas passage 411 and
Multiple side-blown stomatas 412 can guide surface flow of the gas to light transmission plate body 11.
In practical applications, when light shield M is fixedly installed on light transmission plate body 11,412 energy of gas passage 411 and side-blown stomata
Guide surface flow of the gas to light shield M；Also it that is, being set in the embodiment for compressing component 10 in light shield M, is fixed on and compresses group
The lateral Blow off module 40A of part 10, there are scheduled on the surface of the multiple side-blown stomatas 412 for being included and light transmission plate body 11
Distance (such as the thickness according to light shield M is designed), and each side-blown stomata 412 is not tightly attached to the setting of light transmission plate body 11.
Specifically, when the component 10 that compresses for being provided with light shield M is controlled by control module and presses on load-bearing part 20 with right
Be set to load-bearing part 20 part to be exposed be exposed operation after, it is mutual that control module in control compresses component 10 and load-bearing part 20
When separation, part to be exposed may be adsorbed because of various factors (such as the electrostatic force formed between part to be exposed and light shield M)
In on the light shield M for compressing component 10, blow at this point, control module can control transverse direction Blow off module 40A to treat exposed part,
So that part to be exposed is separated from each other with light shield M.In practical applications, control module can compress component 10 and hold in control
It when holder 20 is separated from each other, while controlling lateral Blow off module 40A and carrying out actuation, so that part to be exposed is separated from each other with light shield M；
Control module, which can also be controlled first, to be compressed component 10 and first separates a preset distance with load-bearing part 20, and controls lateral Blow off module
40A carries out air blowing operation, then (such as can be by relevant sensor, to supporting when part to be exposed is no longer attached at light shield M
The light transmission plate body 11 of pressure component 10 is detected), control module is controlled to compress component 10 and separate with load-bearing part 20 to original again and be set
Fixed distance.
It is noted that the present embodiment is correspondingly arranged in the phase each other of light transmission plate body 11 with two transverse direction Blow off module 40A
Pair two sides, and for multiple side-blown stomatas 412 of two lateral Blow off module 40A are then arranged face to face each other, but
Be not limited, in other embodiments, compress component 10 can be provided only with single lateral Blow off module 40A, three with
On lateral Blow off module 40A, or lateral Blow off module 40A can be not provided with, and be provided only with longitudinal Blow off module (after
Text is described in detail).In different applications, each fixed structure 41 can be set to releasably secure compresses component 10, and related raw
Produce manufacturer or user, then it can be according to demand selectively in the periphery of the light transmission plate body 11 setting lateral Blow off module
40A。
As shown in figure 4, compressing component 10 is also provided with multiple longitudinal Blow off module 40B, each longitudinal direction Blow off module 40B
Venthole (figure do not indicate) then corresponding light transmission plate body 11 being located at surface, also that is, light-transmitting plate body 11 and light shield M are respectively provided with
111 and multiple avoid holes M1 of multiple perforation, 111 and these avoid holes M1 of these perforation are then multiple with longitudinal Blow off module 40B
Venthole is interconnected, and whereby, longitudinal Blow off module 40B is controlled and the gas that generates, can blow to the direction far from light shield M
Out, so that the part to be exposed being attached on light shield M be enable to be separated from each other with light shield M.It is similar to aforementioned lateral Blow off module 40A
Ground, control module can be while control compress component 10 and load-bearing part 20 is separated from each other, and control longitudinal direction Blow off module 40B makees
It is dynamic, so that longitudinal direction Blow off module 40B blows to the part to be exposed for being attached at the surface light shield M, make part to be exposed and light shield M phase accordingly
Mutually separation.Control module, which also can control, to be compressed component 10 and first separates a preset distance with load-bearing part 20, and controls longitudinal air blowing
Module 40B blows, and then when part to be exposed is not attached at light shield M, control module controls again compresses component 10 and load-bearing part 20
It separates to the distance of original start.
It is noted that control module is electrically connected transverse direction Blow off module 40A and longitudinal Blow off module 40B, and control
Module can also control gas flow, the gas pressure etc. that lateral Blow off module 40A and longitudinal direction Blow off module 40B are blown,
It can be changed according to demand.It illustrates, in special application, such as double-sided exposure, compresses component 10 and carrying
The case where part 20 can be controlled when supporting each other and be rotated etc., the transverse direction Blow off module 40A and longitudinal Blow off module
40B can also be set to load-bearing part 20 simultaneously and compress component 10.
In preferable application, in order to really make part to be exposed not be attached at light shield M, compress component 10 be also provided with it is more
A ejector pin component 50, each ejector pin component 50 can wrap containing a thimble part 51, and the part of the thimble part 51 can controlled molding
Block controls and selectively passes through the perforation 111 of light transmission plate body 11 and the avoid holes M1 of light shield M, and protrudes from the surface of light shield M,
To which pushing and pressing are attached at the part to be exposed on the surface light shield M, it is separated from each other part to be exposed with light shield M.Control module
Can be when control compress component 10 and load-bearing part 20 is separated from each other, 50 actuation of needle assemblies is supported in control, so that thimble part 51 is convex
For light shield M, and push against part to be exposed.
As shown in figure 5, ejector pin component 50 can be with longitudinal Blow off module 40B modularized design, and thimble part 51 and longitudinal
Blow off module 40B can be by the successive actuation of control module or actuation simultaneously, so as to be attached at the part and light shield to be exposed on light shield M
M is separated from each other.In practical applications, lateral Blow off module 40A, longitudinal Blow off module can be provided with simultaneously by compressing component 10
40B and ejector pin component 50, and control module can first control longitudinal Blow off module when treating exposed part completion exposure operation
40B and the simultaneously or successively actuation of ejector pin component 50 then control cross so as to be formed with gap between part to be exposed and light shield M again
It blows to Blow off module 40A, the gas that such transverse direction Blow off module 40A is blown out can enter between part to be exposed and light shield M
Gap in, and then be separated from each other part to be exposed easily with light shield M.
As shown in Figures 5 and 6, in practical applications, compressing component 10 can be set that there are two ejector pin component 50 and one are horizontal
To Blow off module 40A, and two side-blown stomatas 412 of lateral Blow off module 40A can be located at light transmission plate body 11 perforation 111 and
Two ejector pin components 50 are between the avoid holes M1 on the surface light shield M, will be compared in this way, the gas that transverse direction Blow off module 40A is blown out
It is easily accessible in the gap that aforementioned part to be exposed is formed between light shield M by the pushing and pressing of thimble part 51.
It illustrates, in previous embodiment, is set to exposure light source 30 and light shield M and compresses component 10, and to
Exposed part is illustrated in case where the possible surface that be attached at light shield M after exposure, but in another embodiment, is exposed
Radiant 30 and light shield M also can be set in load-bearing part 20, and part to be exposed may be then attached at after the completion of exposure
The case where light transmission plate body 11, at this point, lateral Blow off module 40A, longitudinal direction Blow off module 40B and ejector pin component 50 can equally carry out
Previous embodiment it is contained make flowing mode actuation, and be separated from each other part to be exposed with light transmission plate body 11, repeated no more in this.
It, can be in conclusion anti-stick hardened structure 1 of the invention is by the mutual cooperation of Blow off module 40, ejector pin component 50
Effectively make part to be exposed after the completion of exposure operation, be not attached on light shield or light transmission plate body, so as to make subsequent job (such as
Part to be exposed is moved using mechanical arm) it goes on smoothly, the efficiency of overall operation can be effectively promoted whereby.
The foregoing is merely preferable possible embodiments of the invention, non-therefore limitation the scope of the patents of the invention, thus it is all
The equivalence techniques variation done with description of the invention and schema content, is both contained in protection scope of the present invention.
Claims (10)
1. a kind of anti-stick hardened structure, which is characterized in that the anti-stick hardened structure is applied to an exposure device, the anti-stick hardened structure
For being exposed operation to a part to be exposed, the anti-stick hardened structure includes:
One compresses component, includes a light transmission plate body, it is described compress component can by a control module control and selectively to
One load-bearing part is close to or far from the load-bearing part is for carrying the part to be exposed；
One exposure light source, be set to it is described compress component, and light beam caused by the exposure light source can pass through the light-transmitting plate
Body；And
At least one Blow off module, can by the control module control and selectively blow；
Wherein, when the part to be exposed be attached at it is described compress component when, the control module can control the Blow off module and blow
Gas, so that the part to be exposed is separated from each other with the component that compresses.
2. anti-stick hardened structure according to claim 1, which is characterized in that the anti-stick hardened structure also includes at least one
Ejector pin component, the ejector pin component include a thimble part, the thimble part can by the control module control and selectivity
Ground protrudes from the light transmission plate body,
The part to be exposed for compressing component is attached to support.
3. anti-stick hardened structure according to claim 2, which is characterized in that the component that compresses includes a light shield, described
Light shield is removedly set to the light transmission plate body, and the light shield has at least one avoid holes, and the ejector pin component can pass through
The control module selectively can pass through the avoid holes and protrude from the light transmission plate body and the light shield, be attached with supporting
In the part to be exposed of the light shield, and it is separated from each other the part to be exposed with the light shield.
4. anti-stick hardened structure according to claim 3, which is characterized in that the light transmission plate body has a perforation, described to wear
Hole is disposed through the light transmission plate body, and a venthole of the Blow off module and the perforation are interconnected；Wherein, the top
Needle assemblies and the Blow off module can be controlled and actuation simultaneously or successive actuation, so that the part to be exposed and the light shield phase
Mutually separation.
5. anti-stick hardened structure according to any one of claim 2 to 4, which is characterized in that the side of the Blow off module
Gas hole is located at the side of the light transmission plate body, when the Blow off module is controlled by the control module, the Blow off module
It can be from a side of the light transmission plate body to the surface blow gas of the light transmission plate body；Wherein, it the ejector pin component and described blows
Gas module can by the control module control and actuation simultaneously or successive actuation, so as to the part to be exposed and described compress group
Part is separated from each other.
6. anti-stick hardened structure according to claim 5, which is characterized in that the anti-stick hardened structure includes at least two institutes
Thimble part and two side-blown stomatas are stated, two side-blown stomatas are located between two thimble parts.
7. anti-stick hardened structure according to claim 1, which is characterized in that the Blow off module includes a fixed structure,
The fixed structure is fixedly installed on the side of the light transmission plate body,
A gas passage is formed in the fixed structure, the gas passage can guide gas to the surface of the light transmission plate body
Flowing.
8. anti-stick hardened structure according to claim 7, which is characterized in that the light transmission plate body has a perforation, described to wear
Hole is disposed through the light transmission plate body, and the anti-stick hardened structure includes at least two Blow off module, at least one institute
It states Blow off module and is defined as a longitudinal Blow off module, at least one described Blow off module is defined as a lateral Blow off module, described
One venthole of longitudinal Blow off module and the perforation are interconnected, and the transverse direction Blow off module includes the fixed structure.
9. anti-stick hardened structure according to claim 1, which is characterized in that the light transmission plate body has a perforation, described to wear
Hole is disposed through the light transmission plate body, and a venthole of the Blow off module and the perforation are interconnected.
10. anti-stick hardened structure according to claim 8 or claim 9, which is characterized in that the component that compresses includes a light shield,
The light shield is removedly set to the light transmission plate body, and the light shield has at least one avoid holes, the avoid holes, described
Perforation and the venthole are connected to each other；Wherein, the Blow off module can by the control module control and selectivity
Gas is discharged by the venthole in ground, so that the part to be exposed for attaching the light shield is separated from each other with the light shield.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711178511.2A CN109828437A (en) | 2017-11-23 | 2017-11-23 | Anti-stick hardened structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711178511.2A CN109828437A (en) | 2017-11-23 | 2017-11-23 | Anti-stick hardened structure |
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| Publication Number | Publication Date |
|---|---|
| CN109828437A true CN109828437A (en) | 2019-05-31 |
Family
ID=66858199
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711178511.2A Pending CN109828437A (en) | 2017-11-23 | 2017-11-23 | Anti-stick hardened structure |
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| CN104137224A (en) * | 2012-02-27 | 2014-11-05 | 佳能株式会社 | Imprint apparatus and imprint method, and article manufacturing method |
| KR20130135482A (en) * | 2012-06-01 | 2013-12-11 | (주)세명백트론 | A mask glass stage for exposing, exposing apparatus having the same and exposing method using the same |
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Application publication date: 20190531 |