CN109821690A - Nozzle cleaning device and coating machine - Google Patents
Nozzle cleaning device and coating machine Download PDFInfo
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- CN109821690A CN109821690A CN201910115437.2A CN201910115437A CN109821690A CN 109821690 A CN109821690 A CN 109821690A CN 201910115437 A CN201910115437 A CN 201910115437A CN 109821690 A CN109821690 A CN 109821690A
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- cleaning device
- solvent
- recycling
- nozzle cleaning
- fin
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Abstract
The present invention discloses a kind of nozzle cleaning device and coating machine, and wherein nozzle cleaning device is used for clean coater nozzle, and nozzle cleaning device includes cleaner, recycling can, recovery channel, vacuum lead and back pressure air extractor；The cleaner has solvent recovery mouth, and described recovery channel one end connects the solvent recovery mouth, and the other end connects the recycling can, and the both ends of the vacuum lead are separately connected the recycling can and the back pressure air extractor.
Description
Technical field
The present invention relates to the coating machines of a kind of nozzle cleaning device and the application nozzle cleaning device.
Background technique
In the production process of display panel, need to carry out photoresist coating technique using linear photoresist coating machine.Light
Generally existing gel problem in coating process is hindered, i.e., after the completion of light blockage coating, part photoresist remains in nozzle tip and surrounding.
It will form defect when nozzle tip is under unclean state to be coated, seriously affect product yield.Therefore every is being carried out
Before the photoresist coating of glass, need to clean nozzle.
Current relatively effective mode is to spray to carry out nozzle with mordant solvent by nozzle cleaning device
Cleaning, and existing nozzle cleaning device usually provides the absorption that power carries out dissolvent residual liquid by vacuum pump, due to solvent
With volatility and corrosivity, vacuum pump is easy to the etchant gas evaporated by solvent damage.
Summary of the invention
The main object of the present invention is to provide a kind of nozzle cleaning device, it is intended to which extend nozzle cleaning device uses the longevity
Life.
To achieve the above object, nozzle cleaning device proposed by the present invention, including cleaner, recycling can, recovery channel, pumping
Vacuum pipe and back pressure air extractor；
The cleaner has solvent recovery mouth, and described recovery channel one end connects the solvent recovery mouth, and the other end connects
The recycling can is connect, the both ends of the vacuum lead are separately connected the recycling can and the back pressure air extractor, the back
It presses air extractor to generate suction and the solvent after clean coater nozzle is sucked into recycling can.
Optionally, the back pressure air extractor further includes air compressor, cabinet and is placed in the intracorporal fin of the case
Piece component, the cabinet, which offers, vacuumizes entrance, compressed gas entrance and exhaust outlet, the vacuum lead and the pumping
Vacuum inlet connection, the air compressor are connect with the compressed gas entrance.
Optionally, the fin component includes at least one set of fin unit, and fin unit described in every group includes that multi-disc is uniform
Spaced water conservancy diversion fin forms the runner of both ends perforation, the entrance court of the runner between the two adjacent water conservancy diversion fins
It is arranged to the compressed gas entrance, the outlet of the runner is arranged towards the exhaust outlet.
Optionally, each water conservancy diversion fin setting arc-shaped in the longitudinal direction.
Optionally, the material of the water conservancy diversion fin is galvanized sheet iron or plastics.
Optionally, the recycling can is provided with discharge valve.
Optionally, the cleaner includes pedestal, and the pedestal offers the groove with coating machine nozzle cooperation, institute
The bottom wall for stating groove offers the solvent recovery mouth.
It optionally, further include solvent stock tank, the pedestal offers solvent liquid outlet in the side wall of the groove, described
Solvent stock tank is connect with the solvent liquid outlet.
Optionally, quick coupling, the quick coupling and institute are provided between the solvent stock tank and the cleaner
State the connection of solvent liquid outlet.
In some embodiments, nozzle cleaning device include cleaner, recycling can, recovery channel, vacuum lead and
Back pressure air extractor；
The cleaner has solvent recovery mouth, and described recovery channel one end connects the solvent recovery mouth, and the other end connects
The recycling can is connect, the both ends of the vacuum lead are separately connected the recycling can and the back pressure air extractor, the back
It presses air extractor to generate suction and the solvent after clean coater nozzle is sucked into recycling can；
The nozzle cleaning device further includes air compressor, and the back pressure air extractor includes cabinet and is placed in institute
The intracorporal fin component of case is stated, the cabinet, which offers, vacuumizes entrance, compressed gas entrance and exhaust outlet, described to vacuumize
Pipeline is connect with the entrance that vacuumizes, and the air compressor is connect with the compressed gas entrance；
The fin component includes at least one set of fin unit, and fin unit described in every group includes the setting of multi-disc uniform intervals
Water conservancy diversion fin, form the runner of both ends perforation between the two adjacent water conservancy diversion fins, the entrance of the runner is towards the pressure
The setting of contracting gas access, the outlet of the runner is arranged towards the exhaust outlet；The water conservancy diversion fin is in arc in the longitudinal direction
Shape setting, the recycling can are provided with discharge valve.
The present invention also proposes a kind of coating machine, including coating machine nozzle, which further includes such as above-mentioned nozzle cleaning
Device.
For technical solution of the present invention by setting back pressure air extractor in nozzle cleaning device, back pressure air extractor can pass through corrosion resistant
Erosion material (such as plastics, galvanized sheet iron) is made, and vacuum is generated by back pressure air extractor, to provide recycling for cleaner
The suction of solvent, compared to existing nozzle cleaning device directly in such a way that vacuum pump provides solvent recovery suction, this hair
Bright nozzle cleaning device can avoid causing the damage of important component such as vacuum pump because solvent has corrosivity, can so extend
The service life of nozzle cleaning device reduces its working service cost, while this programme generates pull of vacuum by back pressure mode
Mode, have higher efficiency, can also accordingly reduce electric energy loss.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
The structure shown according to these attached drawings obtains other attached drawings.
Fig. 1 is the structural schematic diagram of one embodiment of nozzle cleaning device of the present invention；
Fig. 2 is the cross section structure schematic diagram of the cleaner of nozzle cleaning device in Fig. 1；
Fig. 3 is the schematic cross-sectional view of the back pressure air extractor of nozzle cleaning device in Fig. 1.
Drawing reference numeral explanation:
| Label | Title | Label | Title |
| 100 | Nozzle cleaning device | 511 | Vacuumize entrance |
| 10 | Cleaner | 513 | Compressed gas entrance |
| 11 | Pedestal | 515 | Exhaust outlet |
| 13 | Groove | 53 | Water conservancy diversion fin |
| 15 | Solvent recovery mouth | 55 | Runner |
| 17 | Solvent liquid outlet | 60 | Air compressor |
| 20 | Recovery channel | 70 | Quick coupling |
| 30 | Recycling can | 80 | Fluid reservoir |
| 40 | Vacuum lead | 90 | Discharge valve |
| 50 | Back pressure air extractor | 200 | Coating machine nozzle |
| 51 | Cabinet |
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.Base
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts it is all its
His embodiment, shall fall within the protection scope of the present invention.
It is to be appreciated that the directional instruction (such as up, down, left, right, before and after ...) of institute is only used in the embodiment of the present invention
In explaining in relative positional relationship, the motion conditions etc. under a certain particular pose (as shown in the picture) between each component, if should
When particular pose changes, then directionality instruction also correspondingly changes correspondingly.
In the present invention unless specifically defined or limited otherwise, term " connection ", " fixation " etc. shall be understood in a broad sense,
For example, " fixation " may be a fixed connection, it may be a detachable connection, or integral；It can be mechanical connection, be also possible to
Electrical connection；It can be directly connected, the connection inside two elements or two can also be can be indirectly connected through an intermediary
The interaction relationship of a element, unless otherwise restricted clearly.It for the ordinary skill in the art, can basis
Concrete condition understands the concrete meaning of above-mentioned term in the present invention.
In addition, the description for being such as related to " first ", " second " in the present invention is used for description purposes only, and should not be understood as
Its relative importance of indication or suggestion or the quantity for implicitly indicating indicated technical characteristic.Define as a result, " first ",
The feature of " second " can explicitly or implicitly include at least one of the features.In addition, the technical side between each embodiment
Case can be combined with each other, but must be based on can be realized by those of ordinary skill in the art, when the combination of technical solution
Conflicting or cannot achieve when occur will be understood that the combination of this technical solution is not present, also not the present invention claims guarantor
Within the scope of shield.
The present invention proposes a kind of nozzle cleaning device 100, is used for clean coater nozzle 200.
Incorporated by reference to referring to figs. 1 to Fig. 3, in an embodiment of the present invention, the nozzle cleaning device 100 include cleaner 10,
Recycling can 30, recovery channel 20, vacuum lead 40 and back pressure air extractor 50；Cleaner 10 has solvent recovery mouth 15,
20 one end of recovery channel connects solvent recovery mouth 15, and the other end connects recycling can 30, and the both ends of vacuum lead 40 are separately connected
Recycling can 30 and back pressure air extractor 50, back pressure air extractor 50 generate suction and pass through the solvent after clean coater nozzle 200
Recycling can 30 is sucked by solvent recovery mouth 15 and recovery channel 20.
The present invention used solvent during coating machine nozzle 200 cleans is N-Methyl pyrrolidone, by spraying
Mouth cleaning device 100 sets back pressure air extractor 50, and back pressure air extractor 50 can pass through corrosion-resistant material (such as plastics, galvanized sheet iron)
It is made, back pressure air extractor 50 generates vacuum, so that the power of recycling design is provided for cleaner 10, compared to existing
In such a way that vacuum pump provides solvent recovery power, nozzle cleaning device 100 of the invention can avoid nozzle cleaning device 100
Parts damages are caused because solvent has corrosivity, can so extend the service life of nozzle cleaning device 100, reduce its use
Maintenance cost, while this programme generates the mode of pull of vacuum by back pressure mode, has higher efficiency, and can also accordingly drop
Low electric energy loss.
Referring to figure 2., specifically, institute's nozzle cleaning device 100 includes air compressor 60, cabinet 51 and is placed in case
Fin component in body 51, cabinet 51, which offers, vacuumizes entrance 511, compressed gas entrance 513 and exhaust outlet 515, takes out true
Vacant duct 40 is connect with entrance 511 is vacuumized, and air compressor 60 is connect with compressed gas entrance 513.
The application conveys compressed air into cabinet 51 by air compressor 60, and compressed air passes through the fin in cabinet 51
The flow velocity of the guide functions of piece component, compressed air increases, and is formed when compressed air is discharged by exhaust outlet 515, in cabinet 51 low
Vacuum is pressed, such 10 part of cleaner generates suction, and the solvent after cleaning coating machine nozzle 200 is sucked by recovery channel 20
Recycling can 30, the mordant gas that solvent volatilization generates then continues to enter cabinet 51 along vacuum lead 40, and is pressing
It is discharged together under the drive of contracting air by exhaust outlet 515.The application is that cleaner 10 provides recycling by back pressure air extractor 50
The suction of solvent, while structure is simple, efficiency is higher, can so reduce the cost of entire nozzle cleaning device 100.
The fin component includes at least one set of fin unit, and every group of fin unit includes leading for multi-disc uniform intervals setting
Fin 53 is flowed, forms the runner 55 of both ends perforation between two adjacent fair water fin pieces 53, the entrance of runner 55 is towards compressed gas
Entrance 513 is arranged, and the outlet of runner 55 is arranged towards exhaust outlet 515.The extending direction of the application runner 55 is and compressed gas
Flow to identical, by the effect of water conservancy diversion fin 53, the flow velocity of compressed gas is accelerated, in this way, generating vacuum in cabinet 51, and leads to
It crosses and vacuumizes the generation suction of entrance 511, it will be in the solvent sucking recycling can 30 in cleaner 10.
The application can have multiple groups fin unit, the spacing between adjacent fin unit in arranged in matrix in cabinet 51
Can be the same or different, optionally, spacing between the adjacent fin unit of the application be identical.And it is provided with four
Group.The side wall that cabinet 51 is arranged in entrance 511 is vacuumized, the roof of cabinet 51, exhaust outlet is arranged in compressed gas entrance 513
515 are arranged in the bottom wall of cabinet.The setting arc-shaped in the longitudinal direction of the application water conservancy diversion fin 53, in homogeneous thickness lamellar
Construction, and each water conservancy diversion fin 53 is being indent towards 511 side of entrance is vacuumized, and vacuumizes the one of entrance 511 deviating from
Side is evagination, then the flow velocity that compressed air flows through 53 evagination side of fair water fin piece is greater than the flow velocity of indent side, in indent one
Side generates low pressure, to realize suction force, realizes that 10 side of cleaner sucks solvent in recycling can 30.
The material of the application water conservancy diversion fin 53 and cabinet 51 is galvanized sheet iron or plastics, such water conservancy diversion fin 53 and case
Body 51 is not easy to be corroded, and the service life is longer for back pressure air extractor 50.
The application is provided with discharge valve 90 in recycling can 30, it is possible to understand that, liquid can also be set in recycling can 30
Face detection sensor detects the height of the solvent in recycling can 30 by level detection sensors device, when detecting in recycling can 30
When liquid level reaches the height of setting, level detection sensors device issues control signal and controls discharge valve 90 for recycling can 30
Interior liquid discharge.
Referring to figure 2., the cleaner 10 includes pedestal 11, and pedestal 11 offers recessed with the cooperation of coating machine nozzle 200
Slot 13, the bottom wall of groove 13 offer solvent recovery mouth 15.The material of the pedestal 11 can be rubber, by being arranged in pedestal 11
Groove 13 solvent and is contained in groove 13,200 cleaning efficiency of coating machine nozzle is more during coating machine nozzle 200 cleans
It is high.After cleaner 10 cleans coating machine nozzle 200, solvent can flow into solvent recovery mouth 15, the recycling of solvent along groove 13
It is more smooth.
The nozzle cleaning device 100 further includes solvent stock tank 80, and pedestal 11 offers solvent in the side wall of groove 13 and goes out
Liquid mouth 17, solvent stock tank 80 are connect with solvent liquid outlet 17.The application is provided with liquid outlet in the two sidewalls of groove 13, leads to
The two sides to coating machine nozzle 200 while ejection of solvent are crossed, the cleaning process of coating machine nozzle 200 is rapider.
In some embodiments, it is provided with quick coupling 70 between the solvent stock tank 80 and the cleaner 10, fastly
Quick coupling 70 is connected to solvent liquid outlet 17.By the setting of quick coupling 70, the dismounting of nozzle cleaning device 100 is rapider.
The present invention also proposes that a kind of coating machine, including coating machine nozzle 200, the coating machine further include nozzle cleaning device
100, the specific structure of the nozzle cleaning device 100 please refers to above-described embodiment, since this coating machine uses above-mentioned all realities
Whole technical solutions of example, therefore at least all beneficial effects brought by the technical solution with above-described embodiment are applied, herein
No longer repeat one by one.
The foregoing is merely alternative embodiments of the invention, are not intended to limit the scope of the invention, all at this
Under the inventive concept of invention, using equivalent structure transformation made by description of the invention and accompanying drawing content, or directly/use indirectly
It is included in other related technical areas in scope of patent protection of the invention.
Claims (10)
1. a kind of nozzle cleaning device is used for clean coater nozzle, which is characterized in that including cleaner, recycling can, recovery tube
Road, vacuum lead and back pressure air extractor；
The cleaner has solvent recovery mouth, and described recovery channel one end connects the solvent recovery mouth, and the other end connects institute
Recycling can is stated, the both ends of the vacuum lead are separately connected the recycling can and the back pressure air extractor, and the back pressure is taken out
Device of air generates suction and the solvent after clean coater nozzle is sucked recycling can.
2. nozzle cleaning device as described in claim 1, which is characterized in that it further include air compressor, the back pressure pumping
Device includes cabinet and is placed in the intracorporal fin component of the case, and the cabinet, which offers, vacuumizes entrance, compressed gas
Entrance and exhaust outlet, the vacuum lead are connect with the entrance that vacuumizes, the air compressor and the compressed gas
The connection of body entrance.
3. nozzle cleaning device as claimed in claim 2, which is characterized in that the fin component includes at least one set of fin list
Member, fin unit described in every group include the water conservancy diversion fin of multi-disc uniform intervals setting, are formed between the two adjacent water conservancy diversion fins
The runner of both ends perforation, the entrance of the runner are arranged towards the compressed gas entrance, and the outlet of the runner is described in
Exhaust outlet setting.
4. nozzle cleaning device as claimed in claim 3, which is characterized in that each water conservancy diversion fin is in the longitudinal direction
Arc setting.
5. nozzle cleaning device as claimed in claim 3, which is characterized in that the material of the water conservancy diversion fin be galvanized sheet iron or
Person's plastics.
6. the nozzle cleaning device as described in any one of claim 1 to 5, which is characterized in that the cleaner includes base
Seat, the pedestal offer the groove with coating machine nozzle cooperation, and the bottom wall of the groove offers the solvent recovery
Mouthful.
7. nozzle cleaning device as claimed in claim 6, which is characterized in that further include solvent stock tank, the pedestal is in institute
The side wall for stating groove offers solvent liquid outlet, and the solvent stock tank is connect with the solvent liquid outlet.
8. nozzle cleaning device as claimed in claim 7, which is characterized in that between the solvent stock tank and the cleaner
It is provided with quick coupling, the quick coupling is connected to the solvent liquid outlet.
9. a kind of nozzle cleaning device is used for clean coater nozzle, which is characterized in that including cleaner, recycling can, recovery tube
Road, vacuum lead and back pressure air extractor；
The cleaner has solvent recovery mouth, and described recovery channel one end connects the solvent recovery mouth, and the other end connects institute
Recycling can is stated, the both ends of the vacuum lead are separately connected the recycling can and the back pressure air extractor, and the back pressure is taken out
Device of air generates suction and the solvent after clean coater nozzle is sucked recycling can；
The nozzle cleaning device further includes air compressor, and the back pressure air extractor includes cabinet and is placed in the case
Intracorporal fin component, the cabinet, which offers, vacuumizes entrance, compressed gas entrance and exhaust outlet, the vacuum lead
It is connect with the entrance that vacuumizes, the air compressor is connect with the compressed gas entrance；
The fin component includes at least one set of fin unit, and fin unit described in every group includes leading for multi-disc uniform intervals setting
Fin is flowed, forms the runner of both ends perforation between the two adjacent water conservancy diversion fins, the entrance of the runner is towards the compressed gas
The setting of body entrance, the outlet of the runner is arranged towards the exhaust outlet；The water conservancy diversion fin is arc-shaped in the longitudinal direction to be set
It sets, the recycling can is provided with discharge valve.
10. a kind of coating machine, including coating machine nozzle, which is characterized in that further include such as any one of claim 1 to 9 institute
The nozzle cleaning device stated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910115437.2A CN109821690B (en) | 2019-02-14 | 2019-02-14 | Nozzle cleaning device and coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910115437.2A CN109821690B (en) | 2019-02-14 | 2019-02-14 | Nozzle cleaning device and coating machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109821690A true CN109821690A (en) | 2019-05-31 |
| CN109821690B CN109821690B (en) | 2022-01-25 |
Family
ID=66862148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910115437.2A Active CN109821690B (en) | 2019-02-14 | 2019-02-14 | Nozzle cleaning device and coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109821690B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113070184A (en) * | 2021-06-07 | 2021-07-06 | 成都拓米电子装备制造有限公司 | Cleaning device and cleaning method for slit extrusion coating head |
| CN113939391A (en) * | 2019-06-14 | 2022-01-14 | 沃克斯艾捷特股份有限公司 | Method and apparatus for producing 3D molded articles using a layered technique, and coating machine having a vacuum enclosure |
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| EP2441526A1 (en) * | 2010-10-13 | 2012-04-18 | Exel Industries | Method and facility for cleaning a spraying circuit, in particular of paint, and for treating the chemical effluent generated |
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| Publication number | Publication date |
|---|---|
| CN109821690B (en) | 2022-01-25 |
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