CN109809040A - A kind of technology of the package and packing machine of ultrahigh vacuum cavity - Google Patents
A kind of technology of the package and packing machine of ultrahigh vacuum cavity Download PDFInfo
- Publication number
- CN109809040A CN109809040A CN201910211321.9A CN201910211321A CN109809040A CN 109809040 A CN109809040 A CN 109809040A CN 201910211321 A CN201910211321 A CN 201910211321A CN 109809040 A CN109809040 A CN 109809040A
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- Prior art keywords
- vacuum cavity
- auxiliary beam
- ultrahigh vacuum
- aluminum foil
- cavity
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- Granted
Links
- 238000012856 packing Methods 0.000 title claims abstract description 21
- 238000005516 engineering process Methods 0.000 title claims abstract description 14
- 239000011888 foil Substances 0.000 claims abstract description 42
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 40
- 238000009461 vacuum packaging Methods 0.000 claims abstract description 28
- 229920000742 Cotton Polymers 0.000 claims abstract description 24
- 239000004033 plastic Substances 0.000 claims abstract description 15
- 229920003023 plastic Polymers 0.000 claims abstract description 15
- 238000004804 winding Methods 0.000 claims abstract description 5
- 238000007789 sealing Methods 0.000 claims description 49
- 239000005030 aluminium foil Substances 0.000 claims description 25
- 238000004806 packaging method and process Methods 0.000 claims description 23
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- 238000010521 absorption reaction Methods 0.000 claims description 9
- 210000000078 claw Anatomy 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 241001669679 Eleotris Species 0.000 claims description 4
- 239000012141 concentrate Substances 0.000 claims description 4
- 239000000945 filler Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- 238000013016 damping Methods 0.000 claims description 3
- 239000006260 foam Substances 0.000 claims description 3
- 229920001903 high density polyethylene Polymers 0.000 claims description 3
- 239000004700 high-density polyethylene Substances 0.000 claims description 3
- 238000012946 outsourcing Methods 0.000 claims 1
- 230000003064 anti-oxidating effect Effects 0.000 abstract description 3
- 230000004888 barrier function Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000012858 packaging process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000002023 wood Substances 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002984 plastic foam Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B31/00—Packaging articles or materials under special atmospheric or gaseous conditions; Adding propellants to aerosol containers
- B65B31/04—Evacuating, pressurising or gasifying filled containers or wrappers by means of nozzles through which air or other gas, e.g. an inert gas, is withdrawn or supplied
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B51/00—Devices for, or methods of, sealing or securing package folds or closures; Devices for gathering or twisting wrappers, or necks of bags
- B65B51/10—Applying or generating heat or pressure or combinations thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B61/00—Auxiliary devices, not otherwise provided for, for operating on sheets, blanks, webs, binding material, containers or packages
- B65B61/04—Auxiliary devices, not otherwise provided for, for operating on sheets, blanks, webs, binding material, containers or packages for severing webs, or for separating joined packages
- B65B61/06—Auxiliary devices, not otherwise provided for, for operating on sheets, blanks, webs, binding material, containers or packages for severing webs, or for separating joined packages by cutting
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Vacuum Packaging (AREA)
- Packages (AREA)
Abstract
The invention discloses a kind of technologies of the package of ultrahigh vacuum cavity, including inner packing and outer packing；Inner packing includes plastic winding film layer, pearl cotton wrapping layer, bubble bags layer and the aluminum foil under vacuum packaging bag layer that vacuum cavity is set gradually from inside to outside；Outer packing includes the packed in cases layer and wooden framed case wrapper set gradually from inside to outside.The present invention provides a kind of technology of the package that barrier ability of air is strong, anti-oxidation, waterproof and dampproof.
Description
Technical field
The present invention relates to vacuum cavity packing technique fields, and in particular to a kind of technology of the package and packet of ultrahigh vacuum cavity
Installation.
Background technique
In semiconductor fabrication, there is progress in the reaction cavity of many important tangible vacuum environments of processing step,
The vacuum degree of vacuum cavity and the surface cleanliness of vacuum cavity will affect the reaction of semiconductor, to influence final molding
Semiconductor components and devices quality.
By the inner surface polishing technology of research and development ultrahigh vacuum cavity, the inner surface corrosion resistance of vacuum cavity is improved,
So that the microcosmic surface of cavity inner surface is smoother, reflecting rate is higher；By researching and developing toilet's cleaning technique, for blind hole and again
Miscellaneous shaped objects hit the dirt of body surface using the cavitation of ultrasonic wave, remove the mesh for reaching and effectively cleaning
's.
Ultrahigh vacuum cavity surfaces externally and internally and the purity requirements of sealing position are high, for the packaging for meeting ultrahigh vacuum cavity
It is required that having developed the technology of the package and packaging facilities of system.
Summary of the invention
It is an object of the present invention to for ultrahigh vacuum cavity surfaces externally and internally, sealing position roughness requirements height, cleanliness
High problem provides a kind of technology of the package that barrier ability of air is strong, anti-oxidation, waterproof and dampproof.
To avoid generating scratch to ultrahigh vacuum cavity surface in packaging process, it is a further object of the present invention to provide one kind
For the aluminum foil under vacuum packing machine of ultrahigh vacuum cavity, the packing machine structure is simple, is suitble to the vacuum chamber of different sizes and shapes
Body packaging, packaging efficiency is high, saves aluminum foil sack.
To achieve the above object, the technical solution of the present invention is to provide a kind of technologies of the package of ultrahigh vacuum cavity, including
Inner packing and outer packing；Inner packing include vacuum cavity set gradually from inside to outside plastic winding film layer, pearl cotton wrapping layer,
Bubble bags layer and aluminum foil under vacuum packaging bag layer；Outer packing includes the packed in cases layer and wooden framed case set gradually from inside to outside
Wrapper；
Ultrahigh vacuum cavity is placed on packaging operation platform, is wrapped in using the plastic foil with a thickness of 0.1~0.2mm super
The outer surface and vacuum sealing face of high vacuum cavity；The inner cavity of ultrahigh vacuum cavity high pure nitrogen is filled using plastic packaging bag；
By vacuum cavity being wrapped, there is good loosening, rain-proof, dust-proof etc. by the strongly tensile generated distortional stress of film
Effect.
High pure nitrogen is filled using polybag in inside, on the one hand reduces the abrasion of vacuum cavity inner surface, on the one hand protects
The damageable zone of vacuum cavity.
Ultrahigh vacuum cavity high spot and stress concentrate position using pearl cotton package, pearl cotton with a thickness of 5~10mm,
The structure of pearl cotton wrapping layer is pearl cotton, moisture absorption layer, pearl cotton, moisture absorption layer, and the moisture absorption layer is fixed on pearl cotton surface；It is precious
Pearl cotton has the characteristics such as high resiliency, light, heat-insulated, shockproof and sound insulation.
Bubble bags are coated in ultrahigh vacuum cavity external surface, the bubble bags are high pressure high density polyethylene foam bag；Gas
Bubble bag effectively prevents the shock of vacuum cavity, ensures to play a protective role when vacuum cavity is shaken, while having heat preservation
Heat-insulated effect.
Aluminum foil under vacuum packaging bag layer is coated on the outside of bubble bags, the aluminum foil under vacuum packaging bag is taken out true by vacuum packing machine
Vacancy reason；Aluminum foil under vacuum packaging bag has good barrier air performance, anti-oxidation, waterproof, humidity resistance excellent, and has
Good mechanical performance, anti-burst performance is high, and puncture resistant tear resistance is strong.
The ultrahigh vacuum cavity lifting installed using aluminum foil under vacuum packaging bag is put into carton, Packaging Box size and super
The size of high vacuum cavity is adapted, and is equipped with damping filler in carton interior；Packaging Box is easy to encapsulate, inside filling
The flexible fillers such as plastic foam have good resistance to compression, shockproof effect.
Packaged carton is put into wooden framed case, the wooden framed case size and ultrahigh vacuum cavity maximum weight and
Maximum outside dimension is adapted.The content maximum weight and maximum outside dimension of wooden framed case are according to storage and transportation condition and vacuum chamber
What the size of body determined.
The vacuum sealing face to vacuum cavity, damageable zone, stress is needed to concentrate the positions such as position real during the packaging process
Apply local buffer packaging.Local buffer packaging is implemented to wrap up using padded coamings such as pad pasting, pearl cotton, bubble bags to above-mentioned position
It protects and uses winding film fixed.
After local buffer position reinforces, packaging of aluminium foil bag is carried out to vacuum cavity using packing machine, is then taken out
It is vacuum-treated.
The wooden framed case is made of pedestal, side, end face and top cover as a preferred technical solution,；Pedestal is by sliding
Wood, Duanmu, sleeper, bottom plate and rubbing strip；Ultrahigh vacuum cavity is fixed on the base by connector, ultrahigh vacuum cavity
It is protected at base contacts with padded coaming, the size of wooden framed case pedestal is greater than the size of ultrahigh vacuum cavity.
Vacuum cavity is secured firmly to wooden case using the fasteners such as bolt and/or pressure thick stick, block, strut, steel band, steel wire etc.
On pedestal, it is ensured that pedestal is not detached from vacuum cavity when the operation modes such as lifting or fork truck, and prevents cavity in transit
Movement is generated with pedestal, vacuum cavity will be protected with reinforcement material contact portion using padded coaming.
The side plate of the wooden framed case and end plate are equipped with joist support and auxiliary strut, the beam as a preferred technical solution,
Hold the diagonal brace for intersection.
A kind of ultrahigh vacuum cavity aluminum foil under vacuum packing machine, including support frame, aluminium foil guide roller stand, station, lifting support
Plate, vacuum pump and air pressure or hydraulic elevator platform；Support frame as described above includes x to girder and y to girder, aluminium foil guide roller stand be located at y to
Girder center, y are respectively equipped with the auxiliary beam of y1 and the auxiliary beam of y2 to girder two sides, the auxiliary beam of y1 and the auxiliary beam of y2 be respectively equipped be fitted to each other it is upper
Sealing plate and lower sealing plate, upper sealing plate and lower sealing plate pass through guide rail and the auxiliary beam of y1 and the auxiliary beam of y2 along the auxiliary beam of y1 and the auxiliary Liang Yundong of y2 respectively,
Upper sealing plate and lower sealing plate are electrically connected to a power source respectively；Aluminium foil guide roller stand is located at the surface of station, vacuum pump and air pressure or liquid
Pressure lifting platform is located at the lower section of station, and the station surface is equipped with several through-holes, the hole size and air pressure or liquid
The support claw size of pressure is adapted, and the station center is equipped with package aperture；The package aperture is located at same with aluminium foil guide roller stand
In vertical straight line；The lower section of the package aperture is equipped with the upper heat sealing plate and lower heat sealing plate being fitted to each other.
Packing machine be equipped with lifting support plate, after vacuum packaging, by lifting support plate surrounding setting hoisting ring or
Person's card slot compatible with fork truck, carries out the transfer of vacuum cavity.
Several air pressures or hydraulic pressure support pawl suitably lift vacuum cavity from station, and aluminum foil sack is covered true
After cavity external surface, then vacuum cavity put back on station, and air pressure or hydraulic pressure support pawl height drop to station one
Under.Due to lifting vacuum cavity by several air pressures or hydraulic pressure support pawl, pass through air pressure or hydraulic pressure support pawl each other
The cooperation being raised and lowered can carry out the suit of aluminum foil sack, and effectively avoid knocking in conventional packaging process
Touch problem.
The aluminum foil sack two sides have been sealed, and are respectively equipped with packaging opening up and down, and aluminum foil sack will be housed
Aluminium foil guide roller stand is placed on y to girder center, vacuum cavity to be packaged is wrapped with aluminium foil, vacuum cavity passes through several gas
Pressure or hydraulic pressure support pawl are propped up, and aluminum foil sack passes through package aperture, and is in the upper heat sealing plate below package aperture and lower heat-sealing
Plate part heat-sealed aluminium foils packaging bag under shed leaves an opening and connect with the conduit vacuumized, waits and opening on aluminum foil sack
Mouth is vacuumized after being sealed.After under shed part seals, the upper sealing plate of aluminium foil guide roller stand two sides and lower sealing plate are to aluminium
Foilpac bag upper opening is sealed.Vacuumize process is carried out after hot wind, under shed is carried out after vacuumizing complete
Heat-sealing.After aluminum foil sack upper opening and under shed seal, aluminum foil sack is sheared from aluminium foil guide roller stand with cutter
Get off, completes the packaging of vacuum cavity.
The auxiliary beam of the y1 and the auxiliary beam of y2 and x, which are connected to girder by guide rail, as a preferred technical solution, transports along x to girder
It is dynamic.The auxiliary beam of y1 and the auxiliary beam of y2 move to girder along x while driving upper sealing plate and lower sealing plate and cutter and cutter slot to move, and complete
The heat-sealing and cutting of aluminum foil sack.
The auxiliary beam of the y1 and the auxiliary beam of y2 are respectively equipped with the cutter being fitted to each other and cutter slot as a preferred technical solution,
The cutter and cutter slot are electrically connected to a power source respectively, and the cutter and cutter slot are connect with the auxiliary beam of y1 and the auxiliary beam of y2 by guide rail
Along the auxiliary beam of y1 and the auxiliary Liang Yundong of y2.It is cut afterwards since aluminum foil sack is first sealed, upper sealing plate and lower sealing plate are first
Along the auxiliary beam of y1 and the auxiliary Liang Yundong of y2, along the auxiliary beam of y1 and the auxiliary Liang Yundong of y2 after cutter and cutter slot.
Aluminium foil guide roller stand both ends are respectively equipped with tensioner as a preferred technical solution,.Prevent aluminum foil sack from existing
Deformation occurs in downward drawing process, and fold occurs and then influences heat-sealing effect, therefore installs tensioner, packaging heat-sealing region
Aluminum foil sack is in tensioning state always.
The y is respectively equipped with laser orientation instru-ment to the aluminium foil guide roller stand both ends of girder as a preferred technical solution,.Due to
Upper sealing plate and lower sealing plate are sealed along the auxiliary beam of y1 and the auxiliary Liang Yundong of y2, therefore laser positioning is arranged in the site for starting heat-sealing
Instrument, so that heat-sealing more accurately reduces leak source, it is easy to operate.Laser orientation instru-ment additionally aid cutter and cutter slot movement determine
Position, accurately cuts out aluminum foil sack, saves the use of aluminum foil sack.
Air pressure or hydraulic support claw surface coating plastic scuff-resistant coating as a preferred technical solution,.In air pressure or hydraulic
Support claw on coating plastic scuff-resistant coating help to reduce the abrasion of mechanical surface, and support claw is directly and inside vacuum cavity
Plastics nitrogen filling baggy fabric contact, avoid contacting with interior surface as far as possible, reduce scratch, improve surface roughness.
The advantages and beneficial effects of the present invention are: the present invention provides a kind of technology of the package of ultrahigh vacuum cavity, use
The inner surface and the outer surface that vacuum cavity is effectively protected in the technique will not generate scratch, and obstruct that air performance is strong, oxygen
Change, waterproof, mechanical performance are strong, and puncture resistant tear resistance is strong.Using vacuum packing machine provided by the invention, it is suitble to different rulers
The packaging of vacuum cavity very little, of different shapes, packaging efficiency is high, saves aluminum foil sack.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of wooden framed case side plate of the present invention；
Fig. 2 is the structural schematic diagram of wooden framed case pedestal of the present invention
Fig. 3 is aluminum foil under vacuum packing machine structural schematic diagram of the present invention；
In figure: 1, upper frame member；2, column；3, diagonal brace；4, waterproof material；5, lower frame member；6, heel post；7, skid；8, it holds
Wood；9, sleeper；10, bottom plate；11, rubbing strip；12, support frame；13, aluminium foil guide roller stand；14, station；15, lifting support
Plate；16, vacuum pump；17, air pressure or hydraulic elevator platform；18, x is to girder；19, y is to girder；20, the auxiliary beam of y1；21, the auxiliary beam of y2；
22, upper sealing plate；23, lower sealing plate；24, through-hole；25, upper heat sealing plate；26, lower heat sealing plate；27, cutter；28, cutter slot；29, laser
Position indicator.
Specific embodiment
With reference to the accompanying drawings and examples, further description of the specific embodiments of the present invention.Following embodiment is only
For clearly illustrating technical solution of the present invention, and not intended to limit the protection scope of the present invention.
The technology of the package of ultrahigh vacuum cavity, including inner packing and outer packing；Inner packing include vacuum cavity from inside to outside
Plastic winding film layer, pearl cotton wrapping layer, bubble bags layer and the aluminum foil under vacuum packaging bag layer set gradually；Outer packing include by
The packed in cases layer and wooden framed case wrapper set gradually from inside to outside；
Ultrahigh vacuum cavity is placed on packaging operation platform, is wrapped in using the plastic foil with a thickness of 0.1~0.2mm super
The outer surface and vacuum sealing face of high vacuum cavity；The inner cavity of ultrahigh vacuum cavity high pure nitrogen is filled using plastic packaging bag；
Ultrahigh vacuum cavity high spot and stress concentrate position using pearl cotton package, pearl cotton with a thickness of 5~10mm,
The structure of pearl cotton wrapping layer is pearl cotton, moisture absorption layer, pearl cotton, moisture absorption layer, and the moisture absorption layer is fixed on pearl cotton surface；
Bubble bags are coated in ultrahigh vacuum cavity external surface, the bubble bags are high pressure high density polyethylene foam bag；
Aluminum foil under vacuum packaging bag layer is coated on the outside of bubble bags, the aluminum foil under vacuum packaging bag is taken out true by vacuum packing machine
Vacancy reason；
The ultrahigh vacuum cavity lifting installed using aluminum foil under vacuum packaging bag is put into carton, Packaging Box size and super
The size of high vacuum cavity is adapted, and is equipped with damping filler in carton interior；
Packaged carton is put into wooden framed case, the wooden framed case size and ultrahigh vacuum cavity maximum weight and
Maximum outside dimension is adapted.
The side plate and end plate of the wooden framed case are equipped with joist support and auxiliary strut, and the joist support is the diagonal brace intersected.Frame
The side plate of wooden case is equipped with upper frame member 1, column 2, diagonal brace 3, waterproof material 4, lower frame member 5 and heel post 6.
The wooden framed case is made of pedestal, side, end face and top cover；Pedestal is by skid 7, Duanmu 8, sleeper 9, bottom plate
10 and rubbing strip 11；Ultrahigh vacuum cavity is fixed on the base by connector, at ultrahigh vacuum cavity and base contacts
It is protected with padded coaming, the size of wooden framed case pedestal is greater than the size of ultrahigh vacuum cavity.
Including support frame 12, aluminium foil guide roller stand 13, station 14, lifting support plate 15, vacuum pump 16 and air pressure or hydraulic
Lifting platform 17；Support frame as described above includes x to girder 18 and y to girder 19, and aluminium foil guide roller stand is located at y to girder center, and y is to girder
Two sides are respectively equipped with the auxiliary beam 20 of y1 and the auxiliary beam 21 of y2, and the auxiliary beam of y1 and the auxiliary beam of y2 are respectively equipped with the upper sealing plate 22 being fitted to each other and lower envelope
Plate 23, upper sealing plate and lower sealing plate pass through guide rail and the auxiliary beam of y1 and the auxiliary beam of y2 along the auxiliary beam of y1 and the auxiliary Liang Yundong of y2 respectively, upper sealing plate and
Lower sealing plate is electrically connected to a power source respectively；Aluminium foil guide roller stand is located at the surface of station, vacuum pump 16 and air pressure or hydraulic lifting
Platform 17 is located at the lower section of station, and the station surface is equipped with several through-holes 24, the hole size and air pressure or hydraulic
Support claw size be adapted, the station center be equipped with package aperture 24；The package aperture is located at same with aluminium foil guide roller stand
In vertical straight line；The lower section of the package aperture is equipped with the upper heat sealing plate 25 and lower heat sealing plate 26 being fitted to each other.
The auxiliary beam of the y1 and the auxiliary beam of y2 and x are connected by guide rail to girder and are moved along x to girder.
The auxiliary beam of the y1 and the auxiliary beam of y2 are respectively equipped with the cutter 27 and cutter slot 28 being fitted to each other, the cutter and cutter slot
It is electrically connected to a power source respectively, the cutter and cutter slot are connect by guide rail along the auxiliary beam of y1 and the auxiliary beam of y2 with the auxiliary beam of y1 and the auxiliary beam of y2
Movement.
Aluminium foil guide roller stand both ends are respectively equipped with tensioner.
The y is respectively equipped with laser orientation instru-ment 29 to the aluminium foil guide roller stand both ends of girder.
Air pressure or hydraulic support claw surface coating plastic scuff-resistant coating.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvements and modifications can also be made, these improvements and modifications
Also it should be regarded as protection scope of the present invention.
Claims (9)
1. the technology of the package of ultrahigh vacuum cavity, which is characterized in that including inner packing and outer packing；Inner packing includes vacuum cavity
Plastic winding film layer, pearl cotton wrapping layer, bubble bags layer and the aluminum foil under vacuum packaging bag layer set gradually from inside to outside；Outsourcing
Dress includes the packed in cases layer and wooden framed case wrapper set gradually from inside to outside；
Ultrahigh vacuum cavity is placed on packaging operation platform, it is true to be wrapped in superelevation using the plastic foil with a thickness of 0.1~0.2mm
The outer surface and vacuum sealing face of cavity body；The inner cavity of ultrahigh vacuum cavity high pure nitrogen is filled using plastic packaging bag；
Ultrahigh vacuum cavity high spot and stress concentrate position using pearl cotton package, pearl cotton with a thickness of 5~10mm, pearl
The structure of cotton wrapping layer is pearl cotton, moisture absorption layer, pearl cotton, moisture absorption layer, and the moisture absorption layer is fixed on pearl cotton surface；
Bubble bags are coated in ultrahigh vacuum cavity external surface, the bubble bags are high pressure high density polyethylene foam bag；
Aluminum foil under vacuum packaging bag layer is coated on the outside of bubble bags, the aluminum foil under vacuum packaging bag vacuumizes place by vacuum packing machine
Reason；
The ultrahigh vacuum cavity lifting installed using aluminum foil under vacuum packaging bag is put into carton, Packaging Box size and superelevation are true
The size of cavity body is adapted, and is equipped with damping filler in carton interior；
Packaged carton is put into wooden framed case, the wooden framed case size and ultrahigh vacuum cavity maximum weight and maximum
Outside dimension is adapted.
2. the technology of the package of ultrahigh vacuum cavity according to claim 1, which is characterized in that the wooden framed case is the bottom of by
Seat, side, end face and top cover are constituted；Pedestal is by skid, Duanmu, sleeper, bottom plate and rubbing strip；By connector by superelevation
Vacuum cavity is fixed on the base, and ultrahigh vacuum cavity is protected at base contacts with padded coaming, the ruler of wooden framed case pedestal
The very little size greater than ultrahigh vacuum cavity.
3. the technology of the package of ultrahigh vacuum cavity according to claim 2, which is characterized in that the side plate of the wooden framed case
It is equipped with joist support and auxiliary strut with end plate, the joist support is the diagonal brace intersected.
4. a kind of ultrahigh vacuum cavity aluminum foil under vacuum packing machine, which is characterized in that including support frame, aluminium foil guide roller stand, station,
Lift support plate, vacuum pump and air pressure or hydraulic elevator platform；Support frame as described above includes x to girder and y to girder, aluminium foil guide roller stand
Positioned at y to girder center, y is respectively equipped with the auxiliary beam of y1 and the auxiliary beam of y2 to girder two sides, and the auxiliary beam of y1 and the auxiliary beam of y2 are respectively equipped with each other
It is auxiliary along the auxiliary beam of y1 and y2 with the auxiliary beam of y1 and the auxiliary beam of y2 that the upper sealing plate of cooperation and lower sealing plate, upper sealing plate and lower sealing plate pass through guide rail respectively
Beam movement, upper sealing plate and lower sealing plate are electrically connected to a power source respectively；Aluminium foil guide roller stand is located at the surface of station, vacuum pump and gas
Pressure or hydraulic elevator platform are located at the lower section of station, and the station surface is equipped with several through-holes, the hole size and gas
Pressure or hydraulic support claw size are adapted, and the station center is equipped with package aperture；The package aperture and aluminium foil guide roller stand position
In in same vertical straight line；The lower section of the package aperture is equipped with the upper heat sealing plate and lower heat sealing plate being fitted to each other.
5. a kind of ultrahigh vacuum cavity aluminum foil under vacuum packing machine according to claim 4, which is characterized in that the auxiliary beam of y1
It is connected to girder by guide rail with the auxiliary beam of y2 and x and is moved along x to girder.
6. a kind of ultrahigh vacuum cavity aluminum foil under vacuum packing machine according to claim 5, which is characterized in that the auxiliary beam of y1
It is respectively equipped with the cutter being fitted to each other and cutter slot with the auxiliary beam of y2, the cutter and cutter slot are electrically connected to a power source respectively, described
Cutter and cutter slot are connect by guide rail along the auxiliary beam of y1 and the auxiliary Liang Yundong of y2 with the auxiliary beam of y1 and the auxiliary beam of y2.
7. a kind of ultrahigh vacuum cavity aluminum foil under vacuum packing machine according to claim 6, which is characterized in that the aluminium foil is led
Roller frame both ends are respectively equipped with tensioner.
8. a kind of ultrahigh vacuum cavity aluminum foil under vacuum packing machine according to claim 7, which is characterized in that the y is to master
The aluminium foil guide roller stand both ends of beam are respectively equipped with laser orientation instru-ment.
9. a kind of ultrahigh vacuum cavity aluminum foil under vacuum packing machine according to claim 8, which is characterized in that air pressure is hydraulic
Support claw surface coating plastic scuff-resistant coating.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910211321.9A CN109809040B (en) | 2019-03-20 | 2019-03-20 | Packaging process of ultrahigh vacuum cavity |
| CN202010138758.7A CN111422403B (en) | 2019-03-20 | 2019-03-20 | Packaging process and packaging machine for ultrahigh vacuum cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910211321.9A CN109809040B (en) | 2019-03-20 | 2019-03-20 | Packaging process of ultrahigh vacuum cavity |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010138758.7A Division CN111422403B (en) | 2019-03-20 | 2019-03-20 | Packaging process and packaging machine for ultrahigh vacuum cavity |
Publications (2)
| Publication Number | Publication Date |
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| CN114889863A (en) * | 2022-05-26 | 2022-08-12 | 许继电源有限公司 | Screen cabinet mixed packaging method |
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| CN109809040B (en) | 2020-06-30 |
| CN111422403A (en) | 2020-07-17 |
| CN111422403B (en) | 2021-06-08 |
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Address after: 225400 He Han 1 and 6 Groups, Hanzhuang Village, Huangqiao Town, Taixing City, Taizhou City, Jiangsu Province Patentee after: Jiangsu Guangke Precision Equipment Co.,Ltd. Country or region after: China Address before: 214400 Changshan Road, Jiangyin High-tech Park, Wuxi City, Jiangsu Province Patentee before: JIANGYIN GKVAC MACHINERY Co.,Ltd. Country or region before: China |