CN109786338A - A kind of amorphous alloy flexible base board - Google Patents
A kind of amorphous alloy flexible base board Download PDFInfo
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- CN109786338A CN109786338A CN201910054670.4A CN201910054670A CN109786338A CN 109786338 A CN109786338 A CN 109786338A CN 201910054670 A CN201910054670 A CN 201910054670A CN 109786338 A CN109786338 A CN 109786338A
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- amorphous alloy
- base board
- flexible base
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Abstract
The present invention provides a kind of amorphous alloy flexible base boards.Amorphous alloy flexible base board of the present invention is made of amorphous alloy material；Wherein, the amorphous alloy material includes: one or more of zirconium-base amorphous alloy, cu-based amorphous alloys, titanium-based amorphous alloy, Fe-based amorphous alloy, cobalt base amorphous alloy, ni-based amorphous alloy or rare-earth-base amorphous alloy etc..Flexible base board of the present invention has many advantages, such as that high resiliency, high intensity and environmental resistance are good, is not susceptible to plastic deformation.
Description
Technical field
The present invention relates to amorphous alloy applied technical fields, in particular to a kind of amorphous alloy flexible base board.
Background technique
With the development of semiconductor process technique, the research in terms of flexible electronic device, which also achieves, substantially to be developed.It is soft
Property electronic device mainly by by electronic device integration on flexible substrates, to realize the flexible function of electronic equipment.
Support and protection component of the flexible base board as entire flexible electronic device, not only for the display product of electronic device
Matter has important influence, but will directly affect the service life of electronic equipment, thus both at home and abroad for the development of flexible base board
It is attached great importance to always with exploitation.
Currently, flexible base board has that flexibility cannot get both with intensity or flexibility is much of that, but intensity is inadequate；
Intensity is much of that, but flexible and inadequate.The material for preparing flexible base board usually selects the polymer such as polyimides, although poly-
Closing object material substrate has certain flexibility and impact resistance, but since polymer nature is limited, this material is in height
Dimensional stability is poor under the conditions of temperature, and glass transition temperature is low.Under high temperature and environment under low pressure, glass substrate be easy by
Thermal expansion, if the substrate caused by being easy to appear substrate expansion is bent, sticks up using polymer flexibility material as substrate
Phenomena such as bent, this is for the appearance of electronic device and service life, hence it is evident that is unfavorable.
In view of this, the present invention is specifically proposed.
Summary of the invention
The first object of the present invention is to provide a kind of amorphous alloy flexible base board, amorphous alloy flexible base board tool of the present invention
The advantages that having high resiliency, high intensity and environmental resistance good, being not susceptible to plastic deformation.
The second object of the present invention is to provide the preparation method of amorphous alloy flexible base board described in one kind.
The third object of the present invention is to provide a kind of flexible electronic device comprising amorphous alloy flexible base board of the present invention.
In order to realize above-mentioned purpose of the invention, the following technical scheme is adopted:
A kind of amorphous alloy flexible base board, the amorphous alloy flexible base board are made of amorphous alloy material；Wherein, described
Amorphous alloy material includes: zirconium-base amorphous alloy, cu-based amorphous alloys, titanium-based amorphous alloy, Fe-based amorphous alloy, cobalt base amorphous
One or more of alloy, ni-based amorphous alloy or rare-earth-base amorphous alloy etc..
Preferably, the elastic limit of amorphous alloy flexible base board provided by the present invention is 1~4%.
Preferably, the bending radius of amorphous alloy flexible base board provided by the present invention is less than or equal to 3mm.
Preferably, the intensity of amorphous alloy flexible base board provided by the present invention is 1000~4000MPa.
Meanwhile the present invention also provides the preparation methods of the amorphous alloy flexible base board, comprising: uses vacuum hotpressing
Molding or the molding method of vacuum hot rolling, obtain amorphous alloy flexible base board.
Preferably, preparation method provided by the present invention includes: under vacuum conditions, temperature to be heated to supercooling liquid phase region
Amorphous alloy in range is hot-forming, is post-processed after rapid cooling, and amorphous alloy flexible base board is obtained.
Preferably, in preparation method of the present invention, the hot-forming pressure is 100~1000MPa, and the time is
60~90s.
Preferably, preparation method of the present invention includes: under vacuum conditions, temperature to be heated to supercooling liquid phase region model
Interior amorphous alloy hot-roll forming is enclosed, is post-processed after rapid cooling, obtains amorphous alloy flexible base board.
Preferably, in preparation method of the present invention, the feeding speed of the hot-roll forming is 0.01~1m/s.
Further, present invention provides the flexible electronic devices comprising amorphous alloy flexible base board of the present invention.
Compared with prior art, the invention has the benefit that
Amorphous alloy flexible base board of the present invention utilizes the advantages of amorphous alloy material low elastic modulus, high resiliency deformation, makes
It possesses good flexible characteristic, and bending bending function can be better achieved；Meanwhile in the present invention, amorphous alloy material is utilized
Expect high intensity, it can be to avoid bending that flexible base board common used material is easy to appear during machine-shaping, warping phenomenon.
Meanwhile the corrosion resisting property that amorphous alloy flexible base board of the present invention is excellent using amorphous alloy material, to environment temperature
Change insensitive, thus the flexible base board prepared is suitable for a variety of different use environments, and service life is than current material
It grows.
In the present invention, amorphous alloy material used has good thermoplastic shaping ability, and processing method is more simple and easy,
And the available substrate with different structure and shape, to meet the actual production demand of electronic device.
Specific embodiment
Embodiment of the present invention is described in detail below in conjunction with embodiment, but those skilled in the art will
Understand, the following example is merely to illustrate the present invention, and is not construed as limiting the scope of the invention.It is not specified in embodiment specific
Condition person carries out according to conventional conditions or manufacturer's recommended conditions.Reagents or instruments used without specified manufacturer is
The conventional products that can be obtained by commercially available purchase.
Amorphous alloy flexible base board provided by the present invention is a kind of for flexible electronic device amorphous alloy flexibility base
Plate is the popularization of flexible electronic device with the defect for overcoming existing polymer flexibility substrate to be easily deformed under high temperature and low temperature
Material foundation is provided with application.
Specifically, amorphous alloy flexible base board provided by the present invention, be with zirconium-base amorphous alloy, cu-based amorphous alloys,
One of titanium-based amorphous alloy, Fe-based amorphous alloy, cobalt base amorphous alloy, ni-based amorphous alloy or rare-earth-base amorphous alloy etc.
Or made from a variety of amorphous alloy materials；
Amorphous alloy concrete composition as above can be with are as follows: ZrTiCuNiBeNb (such as Zr61Ti11Cu13Ni10Be3Nb2
Deng), TiZrBeCu (such as Ti45Zr20Be25Cu10 etc.), CuZrAlBe (such as Cu43Zr43Al7Be7 etc.), NiZrTiSi
(Ni57Zr20Ti20Si3) etc..
Further, the elastic limit of amorphous alloy flexible base board as above is 1~4%, and bending radius is less than or equal to 3mm,
And the intensity of amorphous alloy flexible base board is 1000~4000MPa；
Present invention amorphous alloy flexible base board as above can use vacuum hot pressing formation or the molding method of vacuum hot rolling
It obtains, is specifically described as follows:
Vacuum hot pressing formation prepares amorphous alloy flexible base board:
(1) it feeds intake: Mold polishing is polished, the ultrasonic cleaning of amorphous alloy raw material；By amorphous alloy raw material together with mold one
It rises and is put into vacuum hot pressing formation machine.
(2) heating in vacuum: vacuum hot pressing formation machine is subjected to vacuumize process, vacuum degree is higher than 3.0x10-3Pa；Simultaneously will
Temperature is heated in the range intervals of amorphous alloy supercooling liquid phase region.
(3) it forms: after the vacuum and the heating condition that reach step (2), it is hot-forming to apply pressure progress；Mold pressure exists
100MPa~1000MPa；Hot pressing time is in 60s~900s.
(4) it samples: hot pressing die taking-up in step (3) being rapidly cooled and takes out sample.
(5) it post-processes: sample is cut, the post-processing such as be polished directly.
Vacuum hot rolling molding preparation amorphous alloy flexible base board:
(1) it feeds intake: amorphous alloy raw material is cleaned by ultrasonic, place into Vacuum Heat milling train.
(2) heating in vacuum: Vacuum Heat milling train is subjected to vacuumize process, vacuum degree is higher than 3.0x10-3Pa；Simultaneously by temperature
It is heated in the range intervals of amorphous alloy supercooling liquid phase region.
(3) it forms: after the vacuum and the heating condition that reach step (2), hot-roll forming being carried out to it；Feeding speed is
0.01m/s~1m/s.
(4) it samples: the sample in step (3) is taken out and is rapidly cooled.
(5) it post-processes: sample is cut, the post-processing such as be polished directly.
The amorphous alloy flexible base board as prepared by method as above can not only meet flexible electronic device for substrate material
Expect the requirement of flexible characteristic, but also have the characteristics that high intensity, can adapt in different temperatures environment, and due to amorphous alloy sheet
The unique structure feature of body, but also board structure provided by the present invention is not susceptible to deformation.
Further, the present invention can also provide a kind of flexible electronic device based on amorphous alloy flexible base board of the present invention
Part.Wherein, the flexible electronic device includes: flexible electron display screen, flexible battery plate, flexible skin device etc..
Case study on implementation 1: zirconium-base amorphous alloy flexible base board
Vacuum hot pressing formation method is used to prepare: by composition of alloy for Zr61Ti11Cu13Ni10Be3Nb2 amorphous alloy raw material
It is cleaned by ultrasonic 10min, Mold polishing is polished, then amorphous alloy raw material and mold is put into togerther in vacuum hot pressing formation machine.
Device vacuum system is opened, is evacuated to vacuum degree greater than 3.0x10-3Pa.The heating schedule of starting device simultaneously, by temperature plus
Within the scope of heat to 310 DEG C -450 DEG C of the supercooling liquid phase region of Zr61Ti11Cu13Ni10Be3Nb2 amorphous alloy.Bring into operation equipment,
It pressurizes to mold, the pressure that material is subject to continues 60~900s in 100~1000MPa, entire hot pressing time.To hot pressing
It after journey, takes out die sample and is rapidly cooled, finally sample is cut, remove corner, carrying out sanding and polishing
Deng post-processing, so that its surface roughness is reached corresponding standard, obtain product zirconium-base amorphous alloy flexible base board.
XRD (X-ray diffraction) analysis and structure observation are carried out to obtained zirconium-base amorphous alloy flexible base board, it was demonstrated that
It still keeps amorphous state.The bending radius 2.5mm of the flexible base board, compressive strength 1900MPa.
Case study on implementation 2: zirconium-base amorphous alloy flexible base board
It is prepared using the vacuum hot rolling method of forming: Zr61Ti11Cu13Ni10Be3Nb2 amorphous alloy raw material is cleaned by ultrasonic
It is put into after 10min on Vacuum Heat milling train material conveying platform.Device vacuum system is opened, is evacuated to vacuum degree greater than 3.0x10-3Pa。
Temperature, is heated to the supercooling liquid phase region of Zr61Ti11Cu13Ni10Be3Nb2 amorphous alloy by the heating schedule of starting device simultaneously
Within the scope of 310 DEG C -450 DEG C.Bring into operation equipment, carries out hot rolling treatment to material, the speed control of feeding is in 0.01m/s-1m/
Between s.After course of hot rolling, takes out hot-rolled sample and be rapidly cooled, cutting shaping finally is carried out to sample, is being carried out
The post-processing such as sanding and polishing, reaches corresponding surface roughness requirements, obtains product zirconium-base amorphous alloy flexible base board.
XRD analysis and structure observation are carried out to obtained zirconium-base amorphous alloy flexible base board, it was demonstrated that it still keeps non-
Crystalline structure.The bending radius 2.6mm of the flexible base board, compressive strength 1950MPa.
Case study on implementation 3: titanium-based amorphous alloy flexible base board
It is prepared using vacuum hot pressing formation method: Ti45Zr20Be25Cu10 amorphous alloy raw material is cleaned by ultrasonic 10min, it will
Mold polishing polishing, then amorphous alloy raw material and mold are put into togerther in vacuum hot pressing formation machine.Device vacuum system is opened,
Vacuum degree is evacuated to greater than 3.0x10-3Pa.The heating schedule of starting device simultaneously, temperature is heated to
Within the scope of 300 DEG C -410 DEG C of the supercooling liquid phase region of Ti45Zr20Be25Cu10 amorphous alloy.Bring into operation equipment, carries out to mold
Pressurization, the pressure that material is subject to continue 60s-900s in 100MPa-1000MPa, entire hot pressing time.To the end of hot pressing
Afterwards, it takes out die sample to be rapidly cooled, finally sample is cut, remove corner, carrying out the rear places such as sanding and polishing
Reason, makes its surface roughness reach corresponding standard, obtains product titanium-based amorphous alloy flexible base board.
XRD analysis and structure observation are carried out to obtained titanium-based amorphous alloy flexible base board, it was demonstrated that it still keeps non-
Crystalline state.The bending radius 2.5mm of the flexible base board, compressive strength 2200MPa.Case study on implementation 4: titanium-based amorphous alloy flexibility base
Plate
It is prepared using the vacuum hot rolling method of forming: after Ti45Zr20Be25Cu10 amorphous alloy raw material is cleaned by ultrasonic 10min
It is put on Vacuum Heat milling train material conveying platform.Device vacuum system is opened, is evacuated to vacuum degree greater than 3.0x10-3Pa.It opens simultaneously
Temperature, is heated to 300 DEG C -410 DEG C of the supercooling liquid phase region of Ti45Zr20Be25Cu10 amorphous alloy by the heating schedule of dynamic equipment
In range.Bring into operation equipment, carries out hot rolling treatment to material, the speed control of feeding is between 0.01m/s-1m/s.To heat
It after rolling process, takes out hot-rolled sample and is rapidly cooled, cutting shaping finally is carried out to sample, carrying out sanding and polishing etc.
Post-processing, reaches corresponding surface roughness requirements, obtains product titanium-based amorphous alloy flexible base board.
XRD analysis and structure observation are carried out to obtained titanium-based amorphous alloy flexible base board, it was demonstrated that it still keeps non-
Crystalline structure.The bending radius 2.6mm of the flexible base board, compressive strength 2230MPa.
Case study on implementation 5: cu-based amorphous alloys flexible base board
It is prepared using vacuum hot pressing formation method: Cu43Zr43Al7Be7 amorphous alloy raw material being cleaned by ultrasonic 10min, by mould
Have sanding and polishing, then amorphous alloy raw material and mold are put into togerther in vacuum hot pressing formation machine.Device vacuum system is opened, is taken out
Vacuum to vacuum degree is greater than 3.0x10-3Pa.The heating schedule of starting device simultaneously, it is non-to be heated to Cu43Zr43Al7Be7 for temperature
Within the scope of 410 DEG C -520 DEG C of the supercooling liquid phase region of peritectic alloy.Bring into operation equipment, pressurizes to mold, the pressure that material is subject to
By force in 100MPa-1000MPa, entire hot pressing time continues 60s-900s.After hot pressing, takes out die sample and carry out
It is quickly cooled down, finally sample is cut, remove corner, carrying out the post-processing such as sanding and polishing, reaching its surface roughness
To corresponding standard, product cu-based amorphous alloys flexible base board is obtained.
XRD analysis and structure observation are carried out to obtained cu-based amorphous alloys flexible base board, it was demonstrated that it still keeps non-
Crystalline state.The bending radius 2.8mm of the flexible base board, compressive strength 2300MPa.Case study on implementation 6: cu-based amorphous alloys flexibility base
Plate
It is prepared using the vacuum hot rolling method of forming: being put after Cu43Zr43A7lBe7 amorphous alloy raw material is cleaned by ultrasonic 10min
Enter on Vacuum Heat milling train material conveying platform.Device vacuum system is opened, is evacuated to vacuum degree greater than 3.0x10-3Pa.Start simultaneously
Temperature is heated to -520 DEG C of ranges in 410 DEG C of supercooling liquid phase region of Cu43Zr43A7lBe7 amorphous alloy by the heating schedule of equipment
It is interior.Bring into operation equipment, carries out hot rolling treatment to material, the speed control of feeding is between 0.01m/s-1m/s.To hot rolled
It after journey, takes out hot-rolled sample and is rapidly cooled, cutting shaping finally is carried out to sample, carrying out sanding and polishing etc.
Reason, reaches corresponding surface roughness requirements, obtains product cu-based amorphous alloys flexible base board.
XRD analysis and structure observation are carried out to obtained cu-based amorphous alloys flexible base board, it was demonstrated that it still keeps non-
Crystalline structure.The bending radius 2.6mm of the flexible base board, compressive strength 2360MPa.
Case study on implementation 7: ni-based amorphous alloy flexible base board
It is prepared using vacuum hot pressing formation method: Ni57Zr20Ti20Si3 amorphous alloy raw material is cleaned by ultrasonic 10min, it will
Mold polishing polishing, then amorphous alloy raw material and mold are put into togerther in vacuum hot pressing formation machine.Device vacuum system is opened,
Vacuum degree is evacuated to greater than 3.0x10-3Pa.The heating schedule of starting device simultaneously, temperature is heated to
Within the scope of 500 DEG C -610 DEG C of the supercooling liquid phase region of Ni57Zr20Ti20Si3 amorphous alloy.Bring into operation equipment, carries out to mold
Pressurization, the pressure that material is subject to continue 60s-900s in 100MPa-1000MPa, entire hot pressing time.To the end of hot pressing
Afterwards, it takes out die sample to be rapidly cooled, finally sample is cut, remove corner, carrying out the processing such as sanding and polishing,
So that its surface roughness is reached corresponding standard, obtains product ni-based amorphous alloy flexible base board.
XRD (X-ray diffraction) analysis and structure observation are carried out to obtained ni-based amorphous alloy flexible base board, it was demonstrated that
It still keeps amorphous state.The bending radius 3.0mm of the flexible base board, compressive strength 3100MPa.
Case study on implementation 8: ni-based amorphous alloy flexible base board
It is prepared using the vacuum hot rolling method of forming: being put after Ni57Zr20Ti20Si3 amorphous alloy raw material is cleaned by ultrasonic 10min
Enter on Vacuum Heat milling train material conveying platform.Device vacuum system is opened, is evacuated to vacuum degree greater than 3.0x10-3Pa.Start simultaneously
Temperature is heated to -610 DEG C of ranges in 500 DEG C of supercooling liquid phase region of Ni57Zr20Ti20Si3 amorphous alloy by the heating schedule of equipment
It is interior.Bring into operation equipment, carries out hot rolling treatment to material, the speed control of feeding is between 0.01m/s-1m/s.To hot rolled
It after journey, takes out hot-rolled sample and is rapidly cooled, cutting shaping finally is carried out to sample, carrying out sanding and polishing etc.
Reason, reaches corresponding surface roughness requirements, obtains product ni-based amorphous alloy flexible base board.
XRD (X-ray diffraction) analysis and structure observation are carried out to obtained ni-based amorphous alloy flexible base board, it was demonstrated that
It still keeps amorphous structure.The bending radius 3.0mm of the flexible base board, compressive strength 3160MPa.
Although illustrate and describing the present invention with specific embodiment, it will be appreciated that without departing substantially from of the invention
Many other change and modification can be made in the case where spirit and scope.It is, therefore, intended that in the following claims
Including belonging to all such changes and modifications in the scope of the invention.
Claims (10)
1. a kind of amorphous alloy flexible base board, which is characterized in that the amorphous alloy flexible base board is made of amorphous alloy material；
Wherein, the amorphous alloy material include: zirconium-base amorphous alloy, it is cu-based amorphous alloys, titanium-based amorphous alloy, Fe-based amorphous
One or more of alloy, cobalt base amorphous alloy, ni-based amorphous alloy or rare-earth-base amorphous alloy etc..
2. amorphous alloy flexible base board according to claim 1, which is characterized in that the bullet of the amorphous alloy flexible base board
Property the limit be 1~4%.
3. amorphous alloy flexible base board according to claim 1, which is characterized in that the amorphous alloy flexible base board it is curved
Bilge radius is less than or equal to 3mm.
4. amorphous alloy flexible base board according to claim 1, which is characterized in that the amorphous alloy flexible base board it is strong
Degree is 1000~4000MPa.
5. the preparation method of amorphous alloy flexible base board of any of claims 1-4 characterized by comprising adopt
With vacuum hot pressing formation or the molding method of vacuum hot rolling, amorphous alloy flexible base board is obtained.
6. preparation method according to claim 5 characterized by comprising under vacuum conditions, temperature was heated to
Amorphous alloy within the scope of cold liquid phase region is hot-forming, is post-processed after rapid cooling, and amorphous alloy flexible base board is obtained.
7. preparation method according to claim 6, which is characterized in that the hot-forming pressure be 100~
1000MPa, time are 60~90s.
8. preparation method according to claim 5 characterized by comprising under vacuum conditions, temperature was heated to
Amorphous alloy hot-roll forming within the scope of cold liquid phase region, is post-processed after rapid cooling, obtains amorphous alloy flexible base board.
9. preparation method according to claim 8, which is characterized in that the feeding speed of the hot-roll forming be 0.01~
1m/s。
10. the flexible electronic device comprising amorphous alloy flexible base board described in any one of claim 1-4.
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| CN113545560A (en) * | 2021-07-08 | 2021-10-26 | 深圳大学 | Sole based on carbon fiber plate and production method thereof |
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| CN109786338B (en) | 2021-07-09 |
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