CN109782956B - Display panel manufacturing method - Google Patents
Display panel manufacturing method Download PDFInfo
- Publication number
- CN109782956B CN109782956B CN201910057585.3A CN201910057585A CN109782956B CN 109782956 B CN109782956 B CN 109782956B CN 201910057585 A CN201910057585 A CN 201910057585A CN 109782956 B CN109782956 B CN 109782956B
- Authority
- CN
- China
- Prior art keywords
- sensing
- layer
- display panel
- piezoresistive
- elastomer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The invention discloses a display panel manufacturing method, which comprises the following steps: cleaning the glass substrate; sputtering an electrode material on a glass substrate to form an electrode layer; manufacturing a sensor electrode on the electrode layer by adopting a graphical preparation process; uniformly coating the elastomer solution on the sensor electrode, and baking and curing to form an elastomer layer; sputtering a metal material on the elastic body layer, stretching the elastic body layer, forming uniformly distributed cracks on the elastic body layer under the stress action of the metal material, and defining the cracks as a sensing holding area; uniformly coating the sensing piezoresistive solution on the elastomer layer, infiltrating the sensing piezoresistive solution into the sensing holding area, and baking and curing to form a piezoresistive sensing area; an encapsulation layer is disposed on the elastomer layer. The elastomer layer forms a crack structure, and the piezoresistive sensing area is generated in the crack, so that the piezoresistive sensing material is not easy to fall off and shift under external force, and the stability and the service life of the display panel are enhanced.
Description
Technical Field
The invention relates to the technical field of display panels, in particular to a manufacturing method of a display panel.
Background
At present, most of flat panel displays use a functional integration technology to integrate multiple sensing components together to realize a sensor system, so that flat panel displays become thinner and lighter. For the purpose of pressure touch, a touch sensor is integrated above the flat display panel. There are currently three main types of touch sensors, namely piezoelectric, piezo-capacitive and piezo-resistive types. The piezoresistive sensor can be used for converting external pressure into a resistance change signal to detect, and can be widely applied to intelligent touch display, bionic skin, wearable intelligent electronic equipment and the like due to the reasons of low manufacturing cost, sensitive signal detection, large signal detection range and the like, and the technology has attracted great attention in the industry.
The traditional high-sensitivity piezoresistive sensor is prepared by Carbon Nanotube (CNT), graphene and composite materials thereof and the like based on carbonaceous materials, and the loading pressure value is detected by detecting the output change of an electric signal of resistivity after the sensor is stressed by force.
Most of these sensor fabrication methods require complicated processes and precise designs, but since the active piezoresistive material is usually released by external forces, some simple coating methods can lead to instability of the sensor and a short sensor life. Meanwhile, the high elastic modulus of graphene and Carbon Nanotubes (CNTs) may prevent movement of atoms therein, resulting in difficulty in using the internal atomic structure to further improve the sensitivity of the corresponding sensor.
Disclosure of Invention
The invention aims to provide a manufacturing method of a display panel, wherein an elastomer layer is of a crack structure, and a piezoresistive sensing area is generated in the crack, so that a piezoresistive sensing material is not easy to fall off and shift under external force, and the stability and the service life of the display panel are enhanced.
In order to achieve the purpose, the invention provides the following scheme:
a display panel manufacturing method, the method comprising:
cleaning the glass substrate;
sputtering an electrode material on the glass substrate to form an electrode layer;
manufacturing a sensor electrode on the electrode layer by adopting a graphical preparation process;
uniformly coating the elastomer solution on the sensor electrode, and baking and curing to form an elastomer layer;
sputtering a metal material on the elastomer layer, stretching the elastomer layer, and forming uniformly distributed cracks on the elastomer layer under the stress action of the metal material, wherein the cracks are defined as a sensing holding area;
uniformly coating a sensing piezoresistive solution on the elastomer layer, wherein the sensing piezoresistive solution permeates into the sensing holding area and forms a piezoresistive sensing area after baking and curing;
an encapsulation layer is disposed on the elastomer layer.
Optionally, the piezoresistive sensing regions are layered structures.
Optionally, before the elastomer solution is uniformly coated on the sensor electrode, the elastomer solution is subjected to stirring and vacuum bubble removal treatment.
Optionally, a metal material is sputtered on the elastomer layer, the elastomer layer is stretched, and the elastomer layer forms uniformly distributed cracks under the stress of the metal material, and the cracks are defined as a sensing holding area.
Optionally, the electrode material is composed of at least one of molybdenum, aluminum, silver and indium tin oxide.
Optionally, the elastomer solution is a transparent polydimethylsiloxane solution.
Optionally, the baking and curing are performed in a vacuum drying oven, and the baking temperature ranges from 80 ℃ to 180 ℃.
Optionally, the metal material is composed of at least one of molybdenum, aluminum, silver and indium tin oxide.
Optionally, the material of the piezoresistive sensing regions is titanium carbide.
Optionally, the patterning preparation process includes: photoetching, developing, baking and etching.
According to the invention content provided by the invention, the invention discloses the following technical effects: the invention provides a display panel manufacturing method, wherein an elastomer layer forms a crack structure, and a piezoresistive sensing area is generated in the crack, so that a piezoresistive sensing material is not easy to fall off and shift under external force, and the stability and the service life of the display panel are enhanced; in addition, in the manufacturing method of the display panel, the piezoresistive sensing area material adopts titanium carbide which has a layered structure and can be quickly and reversibly recovered when external pressure is removed, so that the sensitivity of the display panel is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic flow chart illustrating a method for manufacturing a display panel according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a display panel according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a display panel under external pressure according to an embodiment of the present invention;
fig. 4 is a diagram of an interdigital electrode pattern in accordance with an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a manufacturing method of a display panel, wherein a piezoresistive sensing area is generated in a crack of an elastomer layer, so that a piezoresistive sensing material is not easy to fall off and shift under an external force, and the stability and the service life of the display panel are enhanced.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
As shown in fig. 1 to 3, the present invention provides a method for manufacturing a display panel, the method comprising:
step 101: cleaning the glass substrate 10;
step 102: sputtering an electrode material on the glass substrate 10 to form an electrode layer;
step 103: manufacturing a sensor electrode 21 on the electrode layer by adopting a graphical preparation process;
step 104: uniformly coating an elastomer solution on the sensor electrode 21, and baking and curing to form an elastomer layer 31;
step 105: sputtering a metal material on the elastomer layer 31, stretching the elastomer layer 31, and forming uniformly distributed cracks on the elastomer layer 31 under the stress action of the metal material, wherein the cracks are defined as a sensing holding area 32;
step 106: uniformly coating a sensing piezoresistive solution on the elastomer layer 31, wherein the sensing piezoresistive solution permeates into the sensing holding area 32 and forms a piezoresistive sensing area 51 after baking and curing;
step 107: an encapsulation layer 60 is disposed on the elastomer layer 31.
In step 102, the electrode material is composed of at least one of molybdenum, aluminum, silver and indium tin oxide.
In step 103, after the electrode layer is coated with the photoresist, the sensor electrode 21 is manufactured through a patterning preparation process such as photolithography, development, baking, etching, and the like.
Wherein, in step 104, the elastomer solution is a transparent polydimethylsiloxane solution; the elastomer solution is subjected to stirring and vacuum debubbling before being uniformly coated on the sensor electrode 21.
In step 105, after the elastic body layer 31 forms uniformly distributed cracks through stress stretching of the metal material, the metal material on the elastic body layer 31 is removed by an etching method;
the metal material is composed of at least one of molybdenum, aluminum, silver and indium tin oxide.
In step 106, the piezoresistive sensing regions 51 are layered; the piezoresistive sensing region 51 is made of titanium carbide, graphene or carbon nanotubes;
the display panel using titanium carbide as the sensing piezoresistive material can meet the requirement of detecting the tiny pressure on the panel, the sensitivity of the display panel is improved, and meanwhile, the crack structure formed by the organic material enables the sensing piezoresistive material to form a highly interconnected line structure in the crack, so that the piezoresistive sensing material is not easy to fall off and shift due to external pressure, and the stability and the service life of the display panel are further improved.
In step 104 and step 106, the baking and curing are carried out in a vacuum drying oven, and the baking temperature ranges from 80 ℃ to 180 ℃.
As shown in fig. 4, the sensor electrodes 21 are an interdigitated electrode pattern.
The working process of the display panel disclosed by the invention is as follows:
when an external pressure F is applied to the display panel, the perpendicular distance between two adjacent piezoresistive sensing regions 51 is reduced, the sensing retention region 32 between the sensing materials is reduced, and the internal resistance R is reducedcAnd increases the conductivity and thus the current. The external pressure can be monitored by resistivity changes of varying interlayer distance.
When pressure F increases to a certain level, piezoresistive sensing regions 51 become more compact, the interlayer distance gradually decreases, and the resistance further decreases, but at the same time the rate of decrease becomes smaller. Piezoresistive sensor sensitivity gradually saturates when strain exceeds a threshold.
Furthermore, when pressure F is quickly removed, the distance between adjacent layers in piezoresistive sensing region 51 can quickly return to the original state due to the reversibility of the material of piezoresistive sensing region 51. The distance between adjacent layers in piezoresistive sensing regions 51 can be reduced and reversibly restored by an external force switch.
Therefore, the resistance values of the resistors are different when different pressures F are applied, so that the magnitude of the pressure F can be obtained by measuring the resistance values of the piezoresistive sensing layers.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (10)
1. A method of manufacturing a display panel, the method comprising: cleaning the glass substrate; sputtering an electrode material on the glass substrate to form an electrode layer; manufacturing a sensor electrode on the electrode layer by adopting a graphical preparation process; uniformly coating the elastomer solution on the sensor electrode, and baking and curing to form an elastomer layer; sputtering a metal material on the elastomer layer, stretching the elastomer layer, and forming uniformly distributed cracks on the elastomer layer under the stress action of the metal material, wherein the cracks are defined as a sensing holding area; uniformly coating a sensing piezoresistive solution on the elastomer layer, wherein the sensing piezoresistive solution permeates into the sensing holding area and forms a piezoresistive sensing area after baking and curing; an encapsulation layer is disposed on the elastomer layer.
2. The method of claim 1 wherein the piezoresistive sensing regions are layered structures.
3. The method of manufacturing a display panel according to claim 1, wherein the elastomer solution is subjected to stirring and vacuum debubbling before the elastomer solution is uniformly coated on the sensor electrode.
4. The method for manufacturing a display panel according to claim 1, wherein after the elastic body layer forms the cracks uniformly distributed by the stress stretching of the metal material, the metal material on the elastic body layer is removed by etching.
5. The method for manufacturing a display panel according to claim 1, wherein the electrode material is composed of at least one of molybdenum, aluminum, silver, and indium tin oxide.
6. The method of manufacturing a display panel according to claim 1, wherein the elastomer solution is a transparent polydimethylsiloxane solution.
7. The method for manufacturing a display panel according to claim 1, wherein the baking and curing are performed in a vacuum oven, and the baking temperature is in a range of 80 ℃ to 180 ℃.
8. The method for manufacturing a display panel according to claim 1, wherein the metal material is composed of at least one of molybdenum, aluminum, and silver.
9. The method of claim 1 wherein the piezoresistive sensing regions are made of titanium carbide.
10. The method according to claim 1, wherein the patterning preparation process comprises: photoetching, developing, baking and etching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910057585.3A CN109782956B (en) | 2019-01-22 | 2019-01-22 | Display panel manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910057585.3A CN109782956B (en) | 2019-01-22 | 2019-01-22 | Display panel manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109782956A CN109782956A (en) | 2019-05-21 |
| CN109782956B true CN109782956B (en) | 2020-06-02 |
Family
ID=66501930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910057585.3A Active CN109782956B (en) | 2019-01-22 | 2019-01-22 | Display panel manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109782956B (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107369699A (en) * | 2016-05-13 | 2017-11-21 | 三星显示有限公司 | Flexible display apparatus and its manufacture method and compliant conductive pattern |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050100625A (en) * | 2003-01-20 | 2005-10-19 | 코닌클리즈케 필립스 일렉트로닉스 엔.브이. | Touch sensitive display device |
| IT1399202B1 (en) * | 2010-03-30 | 2013-04-11 | Corbelli | METHOD FOR THE PRODUCTION OF FUNCTIONALIZED ELASTOMERIC ARTICLES AND MANUFACTURED ARTICLES |
| JP2014125399A (en) * | 2012-12-27 | 2014-07-07 | Asahi Glass Co Ltd | Method for producing reinforced glass substrate for forming touch panel |
| JP6479815B2 (en) * | 2013-12-19 | 2019-03-06 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア | Highly scalable manufacturing technology and packaging devices for electronic circuits |
| CN105738013B (en) * | 2016-02-02 | 2018-07-13 | 上海交通大学 | A kind of high sensitivity pressure type sensor and preparation method thereof |
| CN107960004A (en) * | 2016-10-14 | 2018-04-24 | 鹏鼎控股(深圳)股份有限公司 | Scalable circuit board and preparation method thereof |
-
2019
- 2019-01-22 CN CN201910057585.3A patent/CN109782956B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107369699A (en) * | 2016-05-13 | 2017-11-21 | 三星显示有限公司 | Flexible display apparatus and its manufacture method and compliant conductive pattern |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109782956A (en) | 2019-05-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8692646B2 (en) | Piezoresistive type touch panel; manufacturing method thereof; and display device, touch pad, pressure sensor, touch sensor, game console and keyboard having the panel | |
| US10613668B2 (en) | Touch sensor having au-shaped electronically conducive micromesh | |
| Niu et al. | Graphene-elastomer nanocomposites based flexible piezoresistive sensors for strain and pressure detection | |
| Jeong et al. | Flexible resistive pressure sensor with silver nanowire networks embedded in polymer using natural formation of air gap | |
| Ryu et al. | Intrinsically stretchable multi-functional fiber with energy harvesting and strain sensing capability | |
| You et al. | A wearable piezocapacitive pressure sensor with a single layer of silver nanowire-based elastomeric composite electrodes | |
| KR101094165B1 (en) | Piezoresistive-type Touch Panel, Manufacturing Method Thereof, Display Device, Touch Pad and Pressure Sensor having it | |
| JP6049898B2 (en) | Pressure sensing device and assembly method thereof | |
| Cui et al. | Design and operation of silver nanowire based flexible and stretchable touch sensors | |
| JP5749704B2 (en) | Touch panel electrode pattern and manufacturing method thereof | |
| US10175783B2 (en) | Touch sensor | |
| CN106325578B (en) | Pressure sensing touch panel | |
| CN106197774A (en) | Flexible piezoresistive tactile sensor array and preparation method thereof | |
| AT13879U1 (en) | Touch sensor assembly | |
| CN113044806B (en) | MEMS device monolithic integrated structure for realizing pressure sensing and method thereof | |
| Chen et al. | High-tactile sensitivity of piezoresistive sensors with a micro-crack structure induced by thin film tension | |
| EP3921616B1 (en) | Low hysteresis and flexible pressure sensitive composite | |
| Liu et al. | Highly sensitive and optically transparent resistive pressure sensors based on a graphene/polyaniline-embedded PVB film | |
| CN113776699B (en) | Positive pressure insensitive interdigital capacitive strain sensor and preparation method thereof | |
| Guo et al. | A flexible and high temperature tolerant strain sensor of La0. 7Sr0. 3MnO3/Mica | |
| CN109782956B (en) | Display panel manufacturing method | |
| Yu et al. | Capacitive stretchable strain sensor with low hysteresis based on wavy-shape interdigitated metal electrodes | |
| CN110277026B (en) | Display panel, preparation method thereof and display device | |
| Arshak et al. | Sensitivity of polyvinyl butyral/carbon-black sensors to pressure | |
| Lee et al. | Pressure-sensitive strain sensor based on a single percolated Ag nanowire layer embedded in colorless polyimide |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |