CN109765185A - A kind of Laser Photoacoustic Spectroscopy detection device using single photoacoustic cell measurement multicomponent gas - Google Patents
A kind of Laser Photoacoustic Spectroscopy detection device using single photoacoustic cell measurement multicomponent gas Download PDFInfo
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Abstract
A kind of optoacoustic spectroscopy detection device using single photoacoustic cell measurement multicomponent gas, the device includes shut-off valve (1), particulate matter filter device (2), gas drier (3), electromagnetic switch valve one (4), pressure sensor (5), electromagnetic switch valve two (6), sonic nozzle (7), vacuum pump (8), quantum cascade laser array module (9), spectroscope module (10), reference gas chamber (11) to be measured, difference resonates photoacoustic cell (12), acoustic-electric conversion module (13), insulating box (14), optical power detector (15), delustring pond (16), locking phase amplifying circuit (17) and industrial personal computer (18)；Multiple laser is coupled in a branch of optical path by the quantum cascade laser array module (9).The arrangement achieves single photoacoustic cells to measure various faults gas composition simultaneously.With strong antijamming capability, equipment long-time stability are good, and precision is high, later period non-maintaining advantage, it can be achieved that measurement trace gas to 100% concentration gases.
Description
Technical field
The invention belongs to optoacoustic spectroscopy gas detection technology fields, more particularly in a kind of electric power, nuclear energy, petrochemical industry
The on-line monitoring or off-line detection device of characteristic gas component.
Background technique
It can be decomposed inside the equipment such as power transformer, GIS in electric power/nuclear energy industry and generate the various nature of trouble and absolutely of capable of reacting
The gas of edge ageing properties；Accurate detection failure and aging character gas are to realize that important transformer equipment operating status diagnoses
It is crucial；The raw material of the basic chemical industries such as ethyl alcohol material and fine chemical product is mainly natural gas, accurate real-time monitoring raw material and production
Gas component and content in the process are the cores for guaranteeing above-mentioned quality of chemical products.Accurate detection CO, CO in real time2、CH4(first
Alkane), C2H4(ethylene), C2H6(ethane), C2H2(acetylene), H2、SO2F2(bifluoride sulfonyl), CF4(carbon tetrafluoride), SO2、H2S and
The gases such as COS (hydroxyl sulphur) are to ensuring that it is important that the industry devices such as electric power, nuclear energy, petrochemical industry operational safety or product quality have
Meaning.Traditional detection method has chromatography, electrochemical sensor method, nano-sensor method, absorption spectrometry etc..Wherein chromatography
Method needs timing replacement chromatographic column, increases testing cost and manpower loss, cannot achieve the long-term on-line monitoring of equipment；Electrochemistry
The gaseous species of sensor method detection and sensitivity are all limited；Nano-sensor method poor repeatability is never effectively solved
Certainly.Spectroscopic methodology detection gas is novel detection method popular in recent years, wherein shadow of the absorption spectrometry vulnerable to light scattering, refraction
It rings, needs the absorption cell of long light path, and higher cost；Structure is complicated for FTIR spectrum method, and quantitative analysis accuracy needs
It improves；Raman spectroscopy detection sensitivity is lower, can not detect trace gas.Optoacoustic spectroscopy detection is a kind of no background measurement side
Method, the not influence of light scattering have wide application market in field of gas detection.Its core component is mainly by light source, light
The module compositions such as sound conversion pool, acoustical-electrical transducer, ambient noise deduction.But traditional photocaustic spectroscopy shakes vulnerable to ambient enviroment
Dynamic, noise, temperature change interference, and the resonant frequency for the photoacoustic cell that resonates can generate drift because of the variation of photoacoustic cell internal gas component
It moves.When long-term measurement, impurity and corrosive gas under test gas can pollute corrosion microphone, influence its acoustic characteristic.
The interference that difference type photoacoustic cell can effectively weaken ambient enviroment vibration, noise, temperature change are brought, and under test gas is not
It is contacted with acoustical-electrical transducer, it is possible to prevente effectively from the corrosion to acoustical-electrical transducer.Resonance photoacoustic cell can be formed pair in photoacoustic cell
The standing wave of photoacoustic signal amplifies, and further increases the detection sensitivity of system, and cylinder resonance photoacoustic cell presses standing wave distribution mode
Difference can be divided into longitudinal, angular, radial three kinds of resonance modes, wherein working in the resonance photoacoustic cell pond of longitudinal resonance mode
Constant highest is most obvious to the standing wave enlarge-effect of photoacoustic signal.But traditional difference type photoacoustic cell is mostly using single photoacoustic cell
Cooperate the mode of single laser, difference type photoacoustic cell is only filled with a kind of calibrating gas of component to be detected, is only able to satisfy single gas
The detection of body, system structure can become extremely complex when detection gas type is more.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of on-line monitoring or offline inspection electric power, nuclear energy, petrochemical industries
The device of middle characteristic gas component can carry out real-time online prison to electric power, nuclear energy, petrochemical industry characteristic gas component content
Survey or offline inspection have while monitoring Multicomponent, do not consume carrier gas, is pollution-free, strong antijamming capability, apparatus simplified, inspection
Survey high sensitivity, it is non-maintaining the features such as.The present invention is the mode using quantum cascade laser array, and multiple laser is coupled to
In a branch of optical path, and it is real by way of the ratio preliminary filling certain concentration multicomponent gas being absorbed in photoacoustic cell according to gas
The function of single difference resonance type photoacoustic cell measurement multicomponent gas is showed.
The technical scheme is that electric power, nuclear energy, petrochemical industry characteristic gas component on-line monitoring or offline inspection system
System, it is connected on equipment characteristic gas air hatch to be monitored or extracts the process gas in process of producing product when detection,
Particulate matter filter device, gas drier, electromagnetic switch valve one, pressure sensor, reference to be measured are sequentially connected on shut-off valve
Gas chamber, electromagnetic switch valve two, sonic nozzle, vacuum pump, characteristic gas to be detected pass sequentially through above-mentioned module and eventually by true
Sky pump discharge；Detection device includes quantum cascade laser array module, spectroscope module, reference gas chamber to be measured, difference resonance
Photoacoustic cell, acoustic-electric conversion module, insulating box, optical power detector, delustring pond, locking phase amplifying circuit and industrial personal computer.
Above-mentioned quantum cascade laser array module include laser driving and temperature control module, quantum cascade laser array,
Light path calibration laser, all-wave length total reflective mirror, specific wavelength total reflective mirror, each quantum cascade laser can be inspired for single
Or the super-narrow line width laser of various features gas component absorption peak, and after being focused by condenser lens by specific wavelength total reflective mirror with
All-wave length total reflective mirror is injected in spectroscope module after converging to same optical path, the optoacoustic generated by the laser to different wave length
Signal carries out the concentration that detection can be finally inversed by each component gas.Light path calibration laser is the laser of naked eyes visible wavelength, same
Sample is by injecting spectroscope module after specific wavelength total reflective mirror and the convergence of all-wave length total reflective mirror, for calibrating quantum cascade laser
The optical path of array module is not used in excitation under test gas and generates photoacoustic signal, and light path calibration laser is 0.38 μm -0.78 μm of wavelength
Visible light.Laser driving and temperature control module can freely adjust the size of electric current, output voltage range according to the actual situation
0-20V exports electric current 0-1A, and current stability is better than 0.1mA, kHz modulation output can be realized as needed, in conjunction with semiconductor system
Cooler (TEC) realizes chip temperature control, precisely adjusts chip wavelength.Laser driving and temperature control module in each laser it
Between switched over using analog switch mode, to realize different wavelength output.
Above-mentioned quantum cascade laser array can realize that single laser detects the function of more gas compositions, in which:
1) for when detecting electric power, nuclear energy transformer:
The tunable wave length range of the quantum cascade laser one of configuration is 7.10 μm -7.38 μm, and wavelength covers C2H4、CH4、
C2H2The characteristic absorption peak of three kinds of gas, selected C2H4、CH4、C2H2Gas characteristic absorption peak wavelength is located at 7.10 μm, 7.38
μm,7.37μm；
The tunable wave length range of the quantum cascade laser two of configuration is 4.34 μm -4.54 μm, and wavelength covers CO, CO2Two kinds
The characteristic absorption peak of gas, selected CO, CO2Gas characteristic absorption peak wavelength is located at 4.54 μm, 4.34 μm；
The wavelength of the quantum cascade laser three of configuration is 3.35 μm, covers C2H6The characteristic absorption peak of gas, selected C2H6Gas
Characteristic absorption peak wavelength is located at 3.35 μm.
2) for detecting electric power GIS equipment SF6When decomposing gas:
The wavelength of the quantum cascade laser one of configuration is 7.07 μm, and wavelength covers H2The characteristic absorption peak of S gas, selected H2S
Gas characteristic absorption peak wavelength is located at 7.07 μm；
The tunable wave length range of the quantum cascade laser two of configuration is 4.34 μm -4.54 μm, and wavelength covers CO, CO2Two kinds
The characteristic absorption peak of gas, selected CO, CO2Gas characteristic absorption peak wavelength is located at 4.54 μm, 4.34 μm；
The tunable wave length range of the quantum cascade laser three of configuration is 7.43 μm -7.87 μm, and wavelength covers SO2、CF4、
SO2F2The characteristic absorption peak of three kinds of gas, selected SO2、CF4、SO2F2Gas characteristic absorption peak wavelength be located at 7.43 μm,
7.79μm、7.87μm。
3) when for detecting gas in the control of petrochemical industry quality of natural gas:
The wavelength of the quantum cascade laser one of configuration is 7.07 μm -7.43 μm, and wavelength covers H2S、SO2The feature of two kinds of gas
Absorption peak, selected H2S、SO2Gas characteristic absorption peak wavelength is located at 7.07 μm, 7.43 μm；
The wavelength of the quantum cascade laser two of configuration is 4.34 μm, and wavelength covers CO2The characteristic absorption peak of gas, selected CO2
Gas characteristic absorption peak wavelength is located at 4.34 μm；
The tunable wave length range of the quantum cascade laser three of configuration is 4.83 μm, and wavelength covers the characteristic absorption of COS gas
Peak, selected COS gas characteristic absorption peak wavelength are located at 4.83 μm.
4) for detecting petrochemical industry methanol production equipment conversion combined coefficient monitoring gas:
The wavelength of the quantum cascade laser one of configuration is 7.54 μm, and wavelength covers CH4The characteristic absorption peak of gas, selected CH4
Gas characteristic absorption peak wavelength is located at 7.54 μm；
The tunable wave length range of the quantum cascade laser two of configuration is 4.34 μm -4.54 μm, and wavelength covers CO, CO2Two kinds
The characteristic absorption peak of gas, selected CO, CO2Gas characteristic absorption peak wavelength is located at 4.54 μm, 4.34 μm；
Quantum cascade laser three can not be configured when detection petrochemical industry methanol production equipment conversion combined coefficient monitoring gas.
The upper spectroscope module includes one piece of semi-transparent semi-reflecting lens and one piece of total reflective mirror, by quantum cascade laser array mould
The laser induced breakdown that block is injected is the identical laser of two beam energies.Semi-transparent semi-reflecting lens in spectroscope module are that broadband is semi-transparent semi-reflecting
Mirror, or be made of the narrowband semi-transparent semi-reflecting lens turntable that driving motor controls, turntable converts certain wave according to the optical maser wavelength of transmitting
The semi-transparent semi-reflecting lens of section.The angle of semi-transparent semi-reflecting lens and total reflective mirror can be manually adjusted by pedestal.
Above-mentioned reference gas chamber to be measured is the chamber of the two identical sizes hollowed out in a square piece, wherein gas chamber to be measured
It is the container that under test gas enters detection device.And gas chamber to be measured and reference gas chamber interior walls are coated with gold or nickel, gas chamber to be measured and ginseng
It is more identical than air cell size, diameter 5mm-50mm, length 0.1mm-200mm.The reference gas chamber N pure by one preliminary filling of capillary2、
He, Ar or air, in detection SF6It can the pure SF of preliminary filling when decomposing gas and natural gas component6, standard natural gas to be to offset background
Interference of the gas absorption spectrum line to gas absorption spectrum line to be measured.
Above-mentioned difference resonance photoacoustic cell is single order longitudinal resonance photoacoustic cell, is the container that photoacoustic signal generates, material is brass
Or stainless steel, it is assembled single piece after the chamber for digging out identical size respectively in two square pieces, and two sides
The junction of shape part hollows out out the horn-like cavity that can place acoustic-electric conversion module, and the junction diameter of cavity and photoacoustic cell is
1mm-2mm is 10mm-20mm with acoustic-electric conversion module connected component diameter.Its material is brass or stainless steel, and in photoacoustic cell
Wall is coated with gold or nickel, and photoacoustic cell diameter is in 5mm-10mm, and for length in 50mm-200mm, draw ratio is greater than or equal to 12:1, and light
Sound pond works in first order resonant mode.Difference of the ratio of filled calibrating gas according to absorption peak absorption intensity selected by gas with various
It matches, is respectively positioned in the flat response curve of acoustic-electric conversion module, is obtained with the photoacoustce signal intensity for guaranteeing that gas with various generates
Obtain wide detection dynamic range.The photoacoustic spectrum signals that system generates may be expressed as:
Wherein S is the photoacoustic spectrum signals intensity generated, and P is excitation light power, and M is the sensitivity of acoustic-electric conversion module,
CcellFor photoacoustic cell pond constant, ηiTo absorb the efficiency that luminous energy is converted into thermal energy, αiFor absorbent components rubbing under incentive optical wavelength
That absorption coefficient of light, ciFor the concentration for absorbing component, AbFor the generation efficiency of background signal.When modulating frequency is lower than 10kHz,
ηiIt can be approximately constant 1.In a determining system: sensitivity M, the photoacoustic cell of excitation light power P, acoustic-electric conversion module
Pond constant CcellIt is definite value, therefore is in acoustic-electric conversion module to meet the photoacoustce signal intensity that each gas generates in photoacoustic cell
In flat response curve, ciWith αiProduct should be definite value.Difference resonance photoacoustic cell combination above-mentioned theory basis and actual test
Afterwards, by two preliminary filling electric power of inflating port, nuclear energy, petrochemical industry individual features gas composition calibrating gas, ratio system
Number are as follows:
1) for when detecting electric power, nuclear energy transformer: difference resonance photoacoustic cell passes through two preliminary filling C of inflating port2H4、CH4、C2H2、
CO、CO2、C2H6And N2Seven kinds of gases.Wherein C2H4、CH4、C2H2、CO、CO2、C2H6Ratio it is directly proportional to its absorption coefficient,
This six kinds of void fraction proportionality coefficients of preliminary filling are 700:70:50:5:5:1.
2) for detecting electric power GIS equipment SF6When decomposing gas: difference resonance photoacoustic cell passes through two preliminary filling H of inflating port2S、CO、
CO2、SO2、CF4、SO2F2And N2Seven kinds of gases.Wherein H2S、CO、CO2、SO2、CF4、SO2F2Ratio and its absorption coefficient at
Direct ratio, this six kinds of void fraction proportionality coefficients of preliminary filling are 60000:80:80:120:1:10.
3) when for detecting gas in the control of petrochemical industry quality of natural gas: difference resonance photoacoustic cell passes through two preliminary filling H of inflating port2S、
SO2、CO2, COS and N2Five kinds of gases.Wherein H2S、SO2、CO2, the ratio of COS it is directly proportional to its absorption coefficient, preliminary filling this
Four kinds of void fraction proportionality coefficients are 4000:10:5:1.
4) when for detecting petrochemical industry methanol production equipment conversion combined coefficient monitoring gas: difference resonance photoacoustic cell passes through inflating port
Two preliminary filling CH4, CO, CO and N2Four kinds of gases.Wherein CH4、CO、CO2Ratio it is directly proportional to its absorption coefficient, preliminary filling this
Three kinds of void fraction proportionality coefficients are 10:1:1.
Above-mentioned acoustic-electric conversion module is the capacitive microphone for detecting difference photoacoustic signal, sensitivity 30mV/Pa.
Above-mentioned insulating box is Resistant heating insulating box, for maintaining temperature in reference gas chamber to be measured and difference resonance photoacoustic cell
At 50 DEG C.
Above-mentioned optical power detector is used to detect the power excursion of laser, and laser drift signal Real-time Feedback is driven to laser
And temperature control module, by realizing laser driving and the adjustment of temperature control module parameter to quantum cascade laser array output wave
Long and energy is modified.
Above-mentioned delustring pond is used to absorb the laser energy for being not used for excitation photoacoustic signal, be full of high concentration in delustring pond with light
The congener gas composition in sound pond, and proportionality coefficient is identical with photoacoustic cell.
Above-mentioned locking phase amplifying circuit and industrial personal computer may filter that other than 1kHz-4kHz for extracting specific wavelength frequency signal
Noise signal, the noise of conversion to input terminal is 50nV, temperature drift≤10ppm/ DEG C, the amplification factor of amplifier is adjustable model
It encloses not less than 104。
Detailed description of the invention
Some specific embodiments of the present invention is described in detail by way of example and not limitation below in reference to attached drawing.Attached drawing
In identical appended drawing reference denote same or similar part or part.It should be appreciated by those skilled in the art that these attached drawings
It is not necessarily drawn to scale.
Fig. 1 is optoacoustic spectroscopy detection device overall structure diagram of the invention.
Fig. 2 is that laser one detects C2H4、CH4、C2H2Wavelength schematic diagram selected by three kinds of gases.
Fig. 3 is that laser two detects CO, CO2Wavelength schematic diagram selected by two kinds of gases.
Fig. 4 is that laser three detects C2H6Wavelength schematic diagram selected by gas.
Appended drawing reference meaning is as follows in figure:
1- shut-off valve, 2- particulate matter filter device, 3- gas drier, 4- electromagnetic switch valve one, 5- pressure sensor, 6- electricity
Magnetic switch valve two, 7- sonic nozzle, 8- vacuum pump, 9- quantum cascade laser array module, the driving of 91- laser and temperature control mould
Block, 92- quantum cascade laser array, 921- laser one, 922- laser two, 923- laser three, 924- condenser lens
One, 925- condenser lens two, 926- condenser lens three, 93- light path calibration laser, 94- all-wave length total reflective mirror, 95- specific wavelength
Total reflective mirror one, 96- specific wavelength total reflective mirror two, 97- specific wavelength total reflective mirror three, 98- specific wavelength total reflective mirror four, 10- light splitting
Mirror module, 101- semi-transparent semi-reflecting lens, 102- total reflective mirror, 11- reference gas chamber to be measured, 111- air inlet, 112- exhaust outlet, 113- window
Mouth piece one, 114- diaphragm two, 115- diaphragm three, 116- diaphragm four, 117- gas chamber to be measured, 118- reference gas chamber, 119-
Inflating port one, 12- difference resonance photoacoustic cell, 121- diaphragm five, 122- diaphragm six, 123- diaphragm seven, 124- diaphragm
Eight, 125- photoacoustic cell one, 126- photoacoustic cell two, 127- inflating port two, 13- acoustic-electric conversion module, 131- acoustic-electric modulus of conversion block film
Piece, 14- insulating box, 15- optical power detector, 16- delustring pond, 17- locking phase amplifying circuit, 18- industrial personal computer.
Specific embodiment
With reference to the accompanying drawings of the specification and specific embodiment, technical solution of the present invention is described in further detail.
Fig. 1 shows one embodiment that the present invention measures the optoacoustic spectroscopy detection device of multicomponent gas using single photoacoustic cell,
The embodiment is for detecting Power Transformer Faults characteristic gas component.As shown in Figure 1, the detection device includes shut-off valve 1,
Grain object filter device 2, gas drier 3, electromagnetic switch valve 1, pressure sensor 5, electromagnetic switch valve 26, sonic nozzle
7, vacuum pump 8, quantum cascade laser array module 9, spectroscope module 10, reference gas chamber 11 to be measured, difference resonance photoacoustic cell
12, acoustic-electric conversion module 13, insulating box 14, optical power detector 15, delustring pond 16, locking phase amplifying circuit 17, industrial personal computer 18.
In one embodiment, which passes through the one of shut-off valve 1
Side is connected on transformer vacuum degasser, is then turned off on the gas channels of valve 1 and is connected with particulate matter filter device in turn
2, gas drier 3, electromagnetic switch valve 1, pressure sensor 5, reference gas chamber 11 to be measured, electromagnetic switch valve 26, velocity of sound spray
Mouth 7, vacuum pump 8, characteristic gas pass sequentially through above-mentioned module and are discharged eventually by vacuum pump 8；Detection device includes quantum stage
Join laser array module 9, spectroscope module 10, reference gas chamber 11 to be measured, difference resonance photoacoustic cell 12, acoustic-electric conversion module
13, insulating box 14, optical power detector 15, delustring pond 16, locking phase amplifying circuit 17 and industrial personal computer 18.
The quantum cascade laser array module 9 includes laser driving and temperature control module 91, quantum cascade laser battle array
Column 92, light path calibration laser 93, all-wave length total reflective mirror 94, specific wavelength total reflective mirror 95-98.Quantum cascade laser array 92 wraps
Include three quantum cascade laser 921-923, each quantum cascade laser 921-923 can inspire for it is single one or more
The super-narrow line width laser of transformer decomposed gas component absorption peak, and pass through specific wavelength after being focused by condenser lens 924-926
Total reflective mirror 95-98 and all-wave length total reflective mirror 94 are injected in spectroscope module 10 after converging to same optical path.Quantum cascade laser
921-923 inspires the laser of different wave length, can by the photoacoustic signal that laser of the detection under test gas to different wave length generates
To be finally inversed by the concentration of each component under test gas.Light path calibration laser 93 is the laser of naked eyes visible wavelength, is equally passed through
Specific wavelength total reflective mirror 95-98 and all-wave length total reflective mirror 94 inject spectroscope module 10 after converging, and swash for calibrating quanta cascade
The optical path of light device array module 9 is not used in excitation under test gas and generates photoacoustic signal.In quantum cascade laser array module 9
Laser driving and temperature control module 91 can freely adjust the size of electric current according to the actual situation, output voltage range 0-20V, defeated
Electric current 0-1A out, current stability 0.1mA can realize kHz modulation output, in conjunction with semiconductor cooler (TEC) as needed
It realizes chip temperature control, precisely adjusts chip wavelength.Laser driving and temperature control mould in quantum cascade laser array module 9
Block 91 switches over each quantum cascade laser 921-923 using analog switch mode, to realize different wavelength output.
Specifically, the visible light that the light path calibration laser 93 in quantum cascade laser array module 9 is 0.55 μm of wavelength.All-wave length is complete
Anti- mirror 94, specific wavelength total reflective mirror 95-98 angle can be manually adjusted by pedestal.
Quantum cascade laser array 92 in the quantum cascade laser array module 9 can realize that single laser detection is more
The function of gas composition, wherein the tunable wave length range of quantum cascade laser 1 is 7.10 μm -7.38 μm, and wavelength is contained
Cover C2H4、CH4、C2H2The characteristic absorption peak of three kinds of gas, as shown in Fig. 2, selected C2H4、CH4、C2H2Characteristic absorption peak wavelength point
It Wei Yu not be 7.10 μm, 7.38 μm, 7.37 μm；The tunable wave length range of quantum cascade laser 2 922 is 4.34 μm of -4.54 μ
M, wavelength cover CO, CO2The characteristic absorption peak of two kinds of gas, as shown in figure 3, selected CO, CO2Characteristic absorption peak wavelength distinguishes position
In 4.54 μm, 4.34 μm；The wavelength of quantum cascade laser 3 923 is 3.35 μm, covers C2H6The characteristic absorption peak of gas, such as
Shown in Fig. 4, selected C2H6Characteristic absorption peak wavelength is located at 3.35 μm.
The spectroscope module 10 includes one piece of semi-transparent semi-reflecting lens 101 and one piece of total reflective mirror 102, will be by quanta cascade laser
The laser induced breakdown that device array module 9 is injected is the identical laser of two beam energies, and the semi-transparent semi-reflecting lens 101 in spectroscope module 10 are
Broadband semi-transparent semi-reflecting lens.Semi-transparent semi-reflecting lens 101 and the angle of total reflective mirror 102 can be manually adjusted by pedestal.
The reference gas chamber 11 to be measured is the cylindrical chamber of the two identical sizes hollowed out in a square piece, respectively to
Survey gas chamber 117 and reference gas chamber 118.The material of reference gas chamber 11 to be measured is brass, and gas chamber to be measured 117 and reference gas chamber 118
Inner wall is coated with gold, and gas chamber 117 to be measured is identical as 118 size of reference gas chamber, diameter 20mm, length 100mm.Air inlet 111
Positioned at gas chamber to be measured at the 10mm of entering light side, diameter 3mm, long 4mm, gas outlet 112 is located at gas chamber to be measured apart from light emission side
At 10mm, diameter 3mm, long 4mm.Diaphragm 1 and diaphragm 2 114 are respectively with corrosion resistant seal glue in gas to be measured
The entering light of room 117 and reference gas chamber 118 is surveyed, can be by diaphragm with the laser guaranteed in quantum cascade laser array module 9
Gas chamber 117 to be measured is injected with reference gas chamber 118, diaphragm 3 115 and diaphragm 4 116 use corrosion resistant seal glue respectively
In the flash ranging out of gas chamber 117 to be measured and reference gas chamber 118, to guarantee that the laser for passing through gas chamber 117 to be measured and reference gas chamber 118 can
To inject in photoacoustic cell 125,126, the material of diaphragm is made of the quartz material of light transmittance >=99%.Reference gas chamber 118 by
The pure N of inflating port one 119 preliminary filling2。
The difference resonance photoacoustic cell 12 is assembly after the cylindrical chamber for digging out identical size respectively in two square pieces
Made of single piece, which forms photoacoustic cell 1, photoacoustic cell 2 126.The junction of two square pieces hollows out
The horn-like cavity of acoustic-electric conversion module 13, the company of horn-like cavity and photoacoustic cell 1, photoacoustic cell 2 126 can be placed out
Connecing place's diameter is 2mm, is 7mm with 13 connected component diameter of acoustic-electric conversion module.The material of difference resonance photoacoustic cell 12 is brass,
And photoacoustic cell 1,2 126 inner wall of photoacoustic cell are coated with gold, photoacoustic cell 1,2 126 diameter of photoacoustic cell are 8mm, and length is
100mm, draw ratio 25:2.Diaphragm 5 121 and diaphragm 6 122 are respectively with corrosion resistant seal glue in photoacoustic cell one
125 survey with the entering light of photoacoustic cell 2 126, with guarantee can be by diaphragm by the laser of gas chamber 117 to be measured and reference gas chamber 118
It injects in photoacoustic cell 1 and photoacoustic cell 2 126, diaphragm 7 123 and diaphragm 8 124 use corrosion resistant seal glue respectively
In the flash ranging out of photoacoustic cell 1 and photoacoustic cell 2 126, to guarantee that the laser for passing through photoacoustic cell 1 and photoacoustic cell 2 126 can
To inject in optical power detector 15 and delustring pond 16, the material of diaphragm is made of the quartz material of light transmittance >=99%.Difference
Resonance photoacoustic cell 12 is divided to pass through 2 127 preliminary filling of inflating port C2H4、CH4、C2H2、CO、CO2、C2H6And N2Seven kinds of gases, and body
Product ratio is respectively 7%, 0.7%, 0.5%, 0.05%, 0.05%, 0.01%, 91.69%.
The acoustic-electric conversion module 13 is to be passed using the condenser type of titanium film for detecting difference photoacoustic signal, acoustic-electric conversion module
Sensor, the acoustic-electric conversion module 13 are arranged at the central axis of difference resonance photoacoustic cell 12, are connected to photoacoustic cell 1
With the central closing of photoacoustic cell 2 126, junction is bell shape, diameter 7mm at wide opening, diameter 2mm at slot.Acoustic-electric
13 diameter 14mm of conversion module, the use titanium metal material film of acoustic-electric conversion module diaphragm 131, diameter 12mm, 10 μm of thickness.Acoustic-electric
Conversion module 13 is dense under test gas to obtain for detecting the difference photoacoustic signal that under test gas generates in two groups of metal tubes
The acoustical signal of degree linearly, sensitivity 10mV/Pa-50mV/Pa.
The insulating box 14 is Resistant heating insulating box, and reference gas chamber 11 to be measured places it with difference resonance photoacoustic cell 12
In, to guarantee that reference gas chamber 11 to be measured maintains 50 DEG C with temperature in difference resonance photoacoustic cell 12.
The optical power detector 15 is used to detect the power excursion of laser, and laser drift signal Real-time Feedback is driven to laser
Dynamic and temperature control module 91, by realizing laser driving and the adjustment of 91 parameter of temperature control module to quantum cascade laser array
92 output wavelengths and energy are modified.
The delustring pond 16 is used to absorb the laser energy for being not used for excitation photoacoustic signal, is full of high concentration in delustring pond 16
C2H4、CH4、C2H2、CO、CO2、C2H6Six kinds of gases, and volume ratio coefficient is respectively 85%, 7%, 3%, 2%, 2%, 1%.
The locking phase amplifying circuit 17 and industrial personal computer 18 is for extracting specific wavelength frequency signal, locking phase amplifying circuit 17 and work
Control machine 18 may filter that the noise signal other than 1kHz-4kHz, and the noise of conversion to input terminal is 50nV, temperature drift≤
10ppm/ DEG C, the amplification factor adjustable extent of amplifier is not less than 104。
Present invention applicant combines Figure of description to be described in detail and describe implementation example of the invention, but ability
Field technique personnel it should be understood that more than implement example be only the preferred embodiments of the invention, in detail explanation be intended merely to help
Reader is helped to more fully understand spirit of that invention, and it is not intended to limit the protection scope of the present invention, on the contrary, any based on of the invention
Any improvement or modification made by spirit should all be fallen within the scope and spirit of the invention.
Claims (28)
1. a kind of optoacoustic spectroscopy detection device using single photoacoustic cell measurement multicomponent gas, which is characterized in that the device includes
Shut-off valve (1), particulate matter filter device (2), gas drier (3), electromagnetic switch valve one (4), pressure sensor (5), electricity
Magnetic switch valve two (6), sonic nozzle (7), vacuum pump (8), quantum cascade laser array module (9), spectroscope module (10),
Reference gas chamber (11) to be measured, difference are resonated photoacoustic cell (12), acoustic-electric conversion module (13), insulating box (14), optical power detector
(15), delustring pond (16), locking phase amplifying circuit (17) and industrial personal computer (18)；
Wherein, the gas channels that under test gas is passed through are followed successively by shut-off valve (1), particulate matter filter device (2), gas drier
(3), electromagnetic switch valve one (4), pressure sensor (5), reference gas chamber to be measured (11), electromagnetic switch valve two (6), sonic nozzle
(7) and vacuum pump (8)；
Laser is generated by quantum cascade laser array module (9), enters reference gas chamber to be measured by spectroscope module (10)
(11), multiple laser is coupled in a branch of optical path by the quantum cascade laser array module (9).
2. the optoacoustic spectroscopy detection device as described in claim 1 using single photoacoustic cell measurement multicomponent gas, feature exist
In the quantum cascade laser array module (9) includes laser driving and temperature control module (91), quantum cascade laser battle array
Arrange (92), light path calibration laser (93), all-wave length total reflective mirror (94) and specific wavelength total reflective mirror (95-98).
3. the optoacoustic spectroscopy detection device as claimed in claim 2 using single photoacoustic cell measurement multicomponent gas, feature exist
In the quantum cascade laser array (92) includes multiple quantum cascade laser and multiple condenser lenses.
4. the optoacoustic spectroscopy detection device as claimed in claim 3 using single photoacoustic cell measurement multicomponent gas, feature exist
Be disposed as three in, quantum cascade laser and condenser lens, each quantum cascade laser (921-923) excitation for
Single or various ingredients absorption peak super-narrow line width laser in gas is surveyed, and passes through institute after being focused by condenser lens (924-926)
It states after specific wavelength total reflective mirror (95-98) converges to same optical path with the all-wave length total reflective mirror (94) and injects the spectroscope mould
In block (10).
5. the optoacoustic spectroscopy detection device as claimed in claim 4 using single photoacoustic cell measurement multicomponent gas, feature exist
In being switched between the quantum cascade laser (921-923) using analog switch mode, realize that different wavelength is defeated
Out.
6. the optoacoustic spectroscopy detection device as claimed in claim 2 using single photoacoustic cell measurement multicomponent gas, feature exist
In laser driving and temperature control module (91) can according to the actual situation freely in the quantum cascade laser array module (9)
It adjusts the size of electric current and realizes kHz modulation output as needed, realize chip temperature control in conjunction with semiconductor cooler, it is quasi-
Really adjust chip wavelength.
7. the optoacoustic spectroscopy detection device as claimed in claim 3 using single photoacoustic cell measurement multicomponent gas, feature exist
In single laser inspection can be achieved in the quantum cascade laser array (92) in the quantum cascade laser array module (9)
The function of more gas compositions is surveyed,
When for detecting transformer: the tunable wave length range of quantum cascade laser one (921) is 7.10 μm -7.38 μm, wave
Length covers C2H4、CH4、C2H2The characteristic absorption peak of three kinds of gas, selected C2H4、CH4、C2H2Gas characteristic absorption peak wavelength difference
Positioned at 7.10 μm, 7.38 μm, 7.37 μm；The tunable wave length range of quantum cascade laser two (922) is 4.34 μm of -4.54 μ
M, wavelength cover CO, CO2The characteristic absorption peak of two kinds of gas, selected CO, CO2Gas characteristic absorption peak wavelength is located at 4.54 μ
m,4.34μm；The wavelength of quantum cascade laser three (923) is 3.35 μm, covers C2H6The characteristic absorption peak of gas, selected C2H6
Gas characteristic absorption peak wavelength is located at 3.35 μm.
8. the optoacoustic spectroscopy detection device as claimed in claim 3 using single photoacoustic cell measurement multicomponent gas, feature exist
In single laser inspection can be achieved in the quantum cascade laser array (92) in the quantum cascade laser array module (9)
The function of more gas compositions is surveyed,
For detecting GIS equipment SF6When decomposing gas: the wavelength of quantum cascade laser one (921) is 7.07 μm, and wavelength is covered
H2The characteristic absorption peak of S gas, selected H2S gas characteristic absorption peak wavelength is located at 7.07 μm；Quantum cascade laser two (922)
Tunable wave length range be 4.34 μm -4.54 μm, wavelength covers CO, CO2The characteristic absorption peak of two kinds of gas, selected CO, CO2
Gas characteristic absorption peak wavelength is located at 4.54 μm, 4.34 μm；The tunable wave length range of quantum cascade laser three (923)
It is 7.43 μm -7.87 μm, wavelength covers SO2、CF4、SO2F2The characteristic absorption peak of three kinds of gas, selected SO2、CF4、SO2F2Gas
Characteristic absorption peak wavelength is located at 7.43 μm, 7.79 μm, 7.87 μm.
9. the optoacoustic spectroscopy detection device as claimed in claim 3 using single photoacoustic cell measurement multicomponent gas, feature exist
In single laser inspection can be achieved in the quantum cascade laser array (92) in the quantum cascade laser array module (9)
The function of more gas compositions is surveyed,
For detect petrochemical industry quality of natural gas control in gas when: the wavelength of quantum cascade laser one (921) be 7.07 μm-
7.43 μm, wavelength covers H2S、SO2The characteristic absorption peak of two kinds of gas, selected H2S、SO2Gas characteristic absorption peak wavelength distinguishes position
In 7.07 μm, 7.43 μm；The wavelength of quantum cascade laser two (922) is 4.34 μm, and wavelength covers CO2The characteristic absorption of gas
Peak, selected CO2Gas characteristic absorption peak wavelength is located at 4.34 μm；The tunable wave length range of quantum cascade laser three (923)
It is 4.83 μm, wavelength covers the characteristic absorption peak of COS gas, and selected COS gas characteristic absorption peak wavelength is located at 4.83 μm.
10. the optoacoustic spectroscopy detection device as claimed in claim 3 using single photoacoustic cell measurement multicomponent gas, feature exist
In single laser inspection can be achieved in the quantum cascade laser array (92) in the quantum cascade laser array module (9)
The function of more gas compositions is surveyed,
Gas is monitored when for detecting petrochemical industry methanol production equipment conversion combined coefficient: the wave of quantum cascade laser one (921)
A length of 7.54 μm, wavelength covers CH4The characteristic absorption peak of gas, selected CH4Gas characteristic absorption peak wavelength is located at 7.54 μm；Amount
The tunable wave length range of qc laser two (922) is 4.34 μm -4.54 μm, and wavelength covers CO, CO2The spy of two kinds of gas
Levy absorption peak, selected CO, CO2Gas characteristic absorption peak wavelength is located at 4.54 μm, 4.34 μm.
11. the optoacoustic spectroscopy detection device as claimed in claim 2 using single photoacoustic cell measurement multicomponent gas, feature exist
In the laser that, the light path calibration laser (93) is naked eyes visible wavelength, by the specific wavelength total reflective mirror (95-98) with
The spectroscope module (10) is injected after all-wave length total reflective mirror (94) convergence.
12. the optoacoustic spectroscopy detection device as claimed in claim 11 using single photoacoustic cell measurement multicomponent gas, feature
It is, the visible light that the light path calibration laser (93) is 0.38 μm -0.78 μm of wavelength.
13. the optoacoustic spectroscopy detection device as claimed in claim 2 using single photoacoustic cell measurement multicomponent gas, feature exist
In the angle of the all-wave length total reflective mirror (94) and the specific wavelength total reflective mirror (95-98) can be carried out manual by pedestal
It adjusts.
14. the optoacoustic spectroscopy detection device as described in claim 1 using single photoacoustic cell measurement multicomponent gas, feature exist
In the spectroscope module (10) includes one piece of semi-transparent semi-reflecting lens (101) and one piece of total reflective mirror (102), will be by quantum stage
Joining the laser induced breakdown that laser array module (9) are injected is the identical laser of two beam energies.
15. the optoacoustic spectroscopy detection device as claimed in claim 14 using single photoacoustic cell measurement multicomponent gas, feature
It is, the semi-transparent semi-reflecting lens (101) are broadband semi-transparent semi-reflecting lens, or the narrowband semi-transparent semi-reflecting lens turntable controlled by driving motor
It constitutes, turntable converts the semi-transparent semi-reflecting lens of specific band according to the optical maser wavelength of transmitting.
16. the optoacoustic spectroscopy detection device as claimed in claim 14 using single photoacoustic cell measurement multicomponent gas, feature
It is, the semi-transparent semi-reflecting lens (101) and the angle of the total reflective mirror (102) can be manually adjusted by pedestal.
17. the optoacoustic spectroscopy detection device as described in claim 1 using single photoacoustic cell measurement multicomponent gas, feature exist
In the reference gas chamber (11) to be measured includes gas chamber to be measured (117) and reference gas chamber (118), and under test gas passes through air inlet
(111) enter the gas chamber (117) to be measured, the reference gas chamber (118) is by inflating port one (119) preliminary filling N2, He, Ar or sky
Gas.
18. the optoacoustic spectroscopy detection device as described in claim 1 using single photoacoustic cell measurement multicomponent gas, feature exist
In difference resonance photoacoustic cell (12) is single order longitudinal resonance photoacoustic cell, for generating photoacoustic signal；The acoustic-electric modulus of conversion
Block (13) is for detecting the difference photoacoustic signal.
19. the optoacoustic spectroscopy detection device as claimed in claim 18 using single photoacoustic cell measurement multicomponent gas, feature
It is, when for detecting transformer: difference resonance photoacoustic cell (12) passes through inflating port two (127) preliminary filling C2H4、CH4、C2H2、
CO、CO2、C2H6And N2Seven kinds of gases, wherein C2H4、CH4、C2H2、CO、CO2、C2H6Ratio it is directly proportional to its absorption coefficient,
This six kinds of void fraction proportionality coefficients of preliminary filling are 700:70:50:5:5:1.
20. the optoacoustic spectroscopy detection device as claimed in claim 18 using single photoacoustic cell measurement multicomponent gas, feature
It is, when for detecting transformer: for detecting GIS equipment SF6When decomposing gas: difference resonance photoacoustic cell (12) passes through
Inflating port two (127) preliminary filling H2S、CO、CO2、SO2、CF4、SO2F2And N2Seven kinds of gases, wherein C2H4、CH4、C2H2、CO、CO2、
C2H6Ratio it is directly proportional to its absorption coefficient, this six kinds of void fraction proportionality coefficients of preliminary filling are 60000:80:80:
120:1:10。
21. the optoacoustic spectroscopy detection device as claimed in claim 18 using single photoacoustic cell measurement multicomponent gas, feature
It is, when for detecting gas in the control of petrochemical industry quality of natural gas: difference resonance photoacoustic cell (12) passes through inflating port two
(127) preliminary filling H2S、SO2、CO2, COS and N2Five kinds of gases, wherein H2S、SO2、CO2, COS ratio and its absorption coefficient at
Direct ratio, these four void fraction proportionality coefficients of preliminary filling are 4000:10:5:1.
22. the optoacoustic spectroscopy detection device as claimed in claim 18 using single photoacoustic cell measurement multicomponent gas, feature
It is, when for detecting petrochemical industry methanol production equipment conversion combined coefficient monitoring gas: difference resonance photoacoustic cell (12) is logical
Overcharge port two (127) preliminary filling CH4, CO, CO and N2Four kinds of gases, wherein CH4、CO、CO2Ratio and its absorption coefficient at
Direct ratio, these three void fraction proportionality coefficients of preliminary filling are 10:1:1.
23. the optoacoustic spectroscopy detection device as described in claim 1 using single photoacoustic cell measurement multicomponent gas, feature exist
In the reference gas chamber (11) to be measured and difference resonance photoacoustic cell (12) are placed in the insulating box (14) to maintain a perseverance
Determine temperature.
24. the optoacoustic spectroscopy detection device as claimed in claim 2 using single photoacoustic cell measurement multicomponent gas, feature exist
In the optical power detector (15) is used to detect the power excursion of laser, and by power excursion signal Real-time Feedback to described
Laser driving and temperature control module (91), by realizing laser driving and the adjustment of temperature control module (91) parameter to institute
It states quantum cascade laser array (92) output wavelength and energy is modified.
25. the optoacoustic spectroscopy detection device as described in claim 1 using single photoacoustic cell measurement multicomponent gas, feature exist
In the delustring pond (16) is used to absorb the laser energy for being not used for excitation photoacoustic signal.
26. as the described in any item optoacoustic spectroscopy using single photoacoustic cell measurement multicomponent gas of claim 19-22 detect dress
It sets, which is characterized in that resonating photoacoustic cell (12) congener gas with the difference full of high concentration in the delustring pond (16)
Body component.
27. the optoacoustic spectroscopy detection device as described in claim 1 using single photoacoustic cell measurement multicomponent gas, feature exist
In the locking phase amplifying circuit (17) and the industrial personal computer (18) are for extracting specific wavelength frequency signal, measurement frequency range
1kHz-4kHz。
28. the optoacoustic spectroscopy detection device as claimed in claim 26 using single photoacoustic cell measurement multicomponent gas, feature
It is, the locking phase amplifying circuit (17) and the industrial personal computer (18) may filter that the noise signal other than 1kHz-4kHz, conversion
Noise to input terminal is 50nV, and the amplification factor adjustable extent of temperature drift≤10ppm/ DEG C, amplifier is not less than 104。
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN110426371A (en) * | 2019-09-10 | 2019-11-08 | 国网重庆市电力公司电力科学研究院 | A kind of system detecting the HF gas in SF6 electrical equipment |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101887009A (en) * | 2010-03-22 | 2010-11-17 | 山东省科学院自动化研究所 | Intrinsic safety photoacoustic spectrum gas monitoring system based on optical acoustic sensor |
| CN102713565A (en) * | 2009-09-30 | 2012-10-03 | 康宁股份有限公司 | Gas sensor based on photoacoustic detection |
| CN102954948A (en) * | 2011-08-26 | 2013-03-06 | 中国科学院安徽光学精密机械研究所 | Gas sensor based on photoacoustic spectrometry |
| CN104198393A (en) * | 2014-04-29 | 2014-12-10 | 贵州电力试验研究院 | On-line monitoring system and method for SF6 decomposition gas components in electrical equipment |
| CN104849214A (en) * | 2015-04-20 | 2015-08-19 | 北京航天控制仪器研究所 | Enhanced multi-group photoacoustic spectrum gas sensing device based on quartz tuning fork |
| CN108535184A (en) * | 2018-04-10 | 2018-09-14 | 大连理工大学 | A kind of optoacoustic spectroscopy multicomponent trace gas detection instrument and method |
-
2019
- 2019-01-22 CN CN201910060515.3A patent/CN109765185B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102713565A (en) * | 2009-09-30 | 2012-10-03 | 康宁股份有限公司 | Gas sensor based on photoacoustic detection |
| CN101887009A (en) * | 2010-03-22 | 2010-11-17 | 山东省科学院自动化研究所 | Intrinsic safety photoacoustic spectrum gas monitoring system based on optical acoustic sensor |
| CN102954948A (en) * | 2011-08-26 | 2013-03-06 | 中国科学院安徽光学精密机械研究所 | Gas sensor based on photoacoustic spectrometry |
| CN104198393A (en) * | 2014-04-29 | 2014-12-10 | 贵州电力试验研究院 | On-line monitoring system and method for SF6 decomposition gas components in electrical equipment |
| CN104849214A (en) * | 2015-04-20 | 2015-08-19 | 北京航天控制仪器研究所 | Enhanced multi-group photoacoustic spectrum gas sensing device based on quartz tuning fork |
| CN108535184A (en) * | 2018-04-10 | 2018-09-14 | 大连理工大学 | A kind of optoacoustic spectroscopy multicomponent trace gas detection instrument and method |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110389106A (en) * | 2019-07-25 | 2019-10-29 | 国网重庆市电力公司电力科学研究院 | A kind of infrared photoacoustic spectra quantitative analysis method of SF6 decomposition components |
| CN110426371A (en) * | 2019-09-10 | 2019-11-08 | 国网重庆市电力公司电力科学研究院 | A kind of system detecting the HF gas in SF6 electrical equipment |
| CN111380805A (en) * | 2020-01-02 | 2020-07-07 | 华中科技大学 | Photoacoustic cell with adjustable resonant frequency and adjusting method |
| CN111380805B (en) * | 2020-01-02 | 2021-04-06 | 华中科技大学 | Photoacoustic cell with adjustable resonant frequency and adjusting method |
| CN112067556A (en) * | 2020-09-29 | 2020-12-11 | 湖北鑫英泰系统技术股份有限公司 | Oil-gas detection method and device for oil-immersed equipment |
| CN112067556B (en) * | 2020-09-29 | 2021-08-17 | 湖北鑫英泰系统技术股份有限公司 | Oil-gas detection method and device for oil-immersed equipment |
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| CN112504987A (en) * | 2021-02-06 | 2021-03-16 | 湖北鑫英泰系统技术股份有限公司 | Method and system for identifying mixture of gas ethylene and acetylene in transformer oil |
| CN113447445A (en) * | 2021-06-29 | 2021-09-28 | 浙大宁波理工学院 | Device for simultaneously detecting at least two different halogenated hydrocarbon gases |
| CN113758876A (en) * | 2021-09-29 | 2021-12-07 | 中广核研究院有限公司 | Gas detection equipment and system in oil |
| WO2024045341A1 (en) * | 2022-09-01 | 2024-03-07 | 南方电网科学研究院有限责任公司 | Photoacoustic spectrometry-based gas testing apparatus |
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