CN109752389A - sheet surface cleanliness measurement method - Google Patents
sheet surface cleanliness measurement method Download PDFInfo
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- CN109752389A CN109752389A CN201711085968.9A CN201711085968A CN109752389A CN 109752389 A CN109752389 A CN 109752389A CN 201711085968 A CN201711085968 A CN 201711085968A CN 109752389 A CN109752389 A CN 109752389A
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- drop
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- measurement method
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Abstract
Sheet surface cleanliness measurement method disclosed by the invention, comprising steps of providing cleanliness measuring device comprising objective table, dropping liquid part and camera, the dropping liquid part are oppositely arranged with the objective table, and the camera is located at the side of the objective table；The sheet material for having surface to be measured is provided；The sheet material is placed in the objective table, keeps the surface to be measured opposite with the dropping liquid part, applies at least one drop on the surface to be measured using the dropping liquid part；Phase is taken at least one described drop using the camera；And the cleanliness on the surface to be measured of the sheet material is determined at phase according at least one drop.The measurement method can quantify, and can be reduced erroneous judgement, manage convenient for silicon chip surface quality grading, reduce unnecessary postchannel process loss.
Description
Technical field
The invention belongs to silicon materials processing technique fields, and in particular to a kind of sheet surface cleanliness measurement method.
Background technique
With the continuous development of world economy, modernization construction constantly increases high efficient energy sources demand.Photovoltaic power generation conduct
One kind of the main energy sources of green energy resource and human kind sustainable development is increasingly subject to the attention of countries in the world and is sent out energetically
Exhibition.Crystal silicon material is also constantly expanding as a kind of common solar battery substrate, the market demand.Too by the manufacture of crystal silicon sheet material
Positive energy cell piece needs to undergo process for etching, to form pyramid flannelette light trapping structure in silicon chip surface.Silicon chip surface is dirty right
The influence of making herbs into wool, especially alkaline reagent process for etching is significant.The dirty region hydrophobicity of silicon chip surface organic matter is strong, and flannelette is raw
It is long slowly, the serious making herbs into wool even flannelette that whitens that also results in forms failure.However, existing silicon chip surface cleanliness measurement master
Will be by way of appearance visual inspection, misjudgment phenomenon happens occasionally；Also, due to being doped with artificial subjective factor, measurement standard not
One.Therefore, it is necessary to provide a kind of method for measuring silicon chip surface cleanliness, accomplish quantitatively evaluating, in order to silicon chip surface matter
Amount classification control reduces unnecessary postchannel process loss.
Summary of the invention
The purpose of the present invention is to provide a kind of sheet surface cleanliness measurement methods, solve existing surface cleanliness
Measurement is easy erroneous judgement, is difficult to the problem of quantization modulation.
The technical scheme adopted by the invention is that: sheet surface cleanliness measurement method, comprising steps of
There is provided cleanliness measuring device comprising objective table, dropping liquid part and camera, the dropping liquid part and the objective table
It is oppositely arranged, the camera is located at the side of the objective table；
The sheet material for having surface to be measured is provided；
The sheet material is placed in the objective table, keeps the surface to be measured opposite with the dropping liquid part, utilizes the dropping liquid
Part applies at least one drop on the surface to be measured；
Phase is taken at least one described drop using the camera；And
According at least one drop at phase, the cleanliness on the surface to be measured of the sheet material is determined.
Specifically, the contact angle of at least one drop is measured, institute is analyzed at phase according at least one drop
The Contact-angle measurement of at least one drop is stated as a result, determining the cleanliness on the surface to be measured of the sheet material.
Example, the surface to be measured of the sheet material is polygon and has N number of edge, using the dropping liquid part in institute
When stating surface to be measured and applying at least one drop, apply a drop respectively close to N number of edge on the surface to be measured.
Further, using the dropping liquid part when the surface to be measured applies at least one drop, in the table to be measured
Apply a drop at the center in face.
Further, the clean of the surface to be measured of the sheet material is determined according to the contact angle average value of at least one drop
Cleanliness grade.
Example, contact angle the Mean Limit A and B of at least one drop are set, wherein A < B, according to surface
Cleannes quality is divided into I grades, II grades and III level from high to low, by the sheet material, when the contact of at least one drop
Angle average value < A, the sheet material are I grades；When A≤at least one drop contact angle average value < B, the sheet material are II grades；
When contact angle average value >=B, the sheet material of at least one drop are III level.
Further, as the contact angle average value < A of at least one drop, A≤some drop is connect if it exists
It the case where feeler value < B, then takes near the drop and a little resurveys, to determine whether for the sheet material to be reduced to II grades；If contact angle is flat
Mean limit C > B, as A≤at least one drop contact angle average value < B, B≤some drop contact if it exists
It the case where angle value < C, then takes near the drop and a little resurveys, to determine whether to be reduced to III level.
Further, as the contact angle average value < A of at least one drop, there are A≤some drops to connect
The case where feeler value < B, if the A resurveyed≤drop contact angle value < B point be it is multiple, which is reduced to II grades；Work as A
When the contact angle average value < B of≤at least one drop, the case where there are B≤some drop contact angle values < C, if
The B resurveyed≤drop contact angle value < C point be it is multiple, which is reduced to III level.
Further, the cleanliness measuring device further includes light source, and the light source is located at the objective table far from described
The other side of camera, when taking phase to the drop using the camera, the light source is open state.
Further, the cleanliness measuring device further includes the data processing module that signal is connected to the camera,
The data processing module receive from the camera at mutually and calculating contact angle result；The cleanliness measuring device is also
The display of the data processing module is connected to including signal, the display is for showing the contact angle result.
Sheet surface cleanliness measurement method of the invention solves the existing existing appearance of visual inspection surface cleanliness measurement
It easily judges by accident, be difficult to the problem of quantization modulation.Sheet surface cleanliness measurement method of the invention utilizes cleanliness measuring device, with
Cleanliness of the drop in the contact angle values characterization sheet surface of sheet surface.It is clean to thus provide a kind of quantifiable sheet surface
Cleanliness measurement method reduces erroneous judgement, manages convenient for silicon chip surface quality grading, reduces unnecessary postchannel process loss.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the cleanliness measuring device that the present invention uses；
Fig. 2 is that sheet surface applies the schematic diagram after drop.
In figure, 10. cleanliness measuring devices, 11. objective tables, 12. dropping liquid parts, 13. cameras, 14 light sources, at 15. data
Manage module, 16. displays, 100. sheet materials, 101. surfaces to be measured, 102. edges, 103. drops.
Specific embodiment
The following describes the present invention in detail with reference to the accompanying drawings and specific embodiments.
The present invention provides a kind of sheet surface cleanliness measurement method, it may include following steps:
The first step provides cleanliness measuring device 10.
As shown in Figure 1, cleanliness measuring device 10 can be contact angle measurement comprising objective table 11, is taken the photograph dropping liquid part 12
As head 13, light source 14, data processing module 15 and display 16.Dropping liquid part 12 is oppositely arranged with objective table 11,13 He of camera
Light source 14 is relatively arranged on the two sides of objective table 11.15 signal of data processing module is connected to camera 13, comes from for receiving
Camera 13 at phase data and calculate contact angle result.16 signal of display is connected to data processing module 15, for showing
Calculated result.
Second step provides sheet material 100, with surface 101 to be measured.The surface to be measured 101 of sheet material 100 be polygon and
With N number of edge 102.
In the present embodiment, sheet material 100 is the quasi- square sheet of silicon material.Specifically, surface 101 to be measured is generally shaped like
Regular quadrangle, there are four edges 102 for tool, and connect between two adjacent edges 102 for curved corners.
Sheet material 100 is placed in objective table 11 by third step, is kept surface 101 to be measured opposite with dropping liquid part 12, is utilized dropping liquid part 12
Apply at least one drop 103 on surface 101 to be measured.
Specifically, dropping liquid part 12 applies multiple drops 103, the quantity of multiple drops 103 and dropwise addition position on surface 101 to be measured
Setting can arbitrarily choose.In the present embodiment, apply drop 103 on surface 101 to be measured using pure water.On surface 101 to be measured
Apply a drop 103 respectively at N number of edge 102, it is preferable that drop 103 and edge 102 at proximal edge 102
Spacing is less than or equal to 5 millimeters.Further, also apply a drop 103 at the center on surface 101 to be measured.Apply multiple
Sheet material 100 after drop 103 is as shown in Figure 2.
4th step takes phase at least one described drop 103 using camera 13.While taking phase, light source 14 is kept to open
It opens.
5th step determines the cleaning on the surface to be measured 101 of sheet material 100 according at least one drop 103 at phase
Degree.
In this step, the contact angle at phase of at least one drop 103 is measured, and according at least one drop 103
Contact angle average value determine sheet material 100 surface to be measured 101 cleanliness.Contact angle values boundary A, B and C are set, wherein A
< B < C, I grades, II grades and III level are divided into according to surface cleanness quality from high to low, by sheet material 100.Specifically:
The standard of I grades of sheet materials 100 are as follows: the contact angle average value < A of at least one drop 103.In the present embodiment, if it exists
It the case where A≤some drop 103 contact angle values < B, takes near the drop 103 and a little resurveys.If in the point resurveyed, A≤liquid
The point for dripping contact angle values < B is more than 3, then the sheet material 100 is reduced to II grades.Preferably, the point and the drop 103 of selection are resurveyed
Spacing be less than or equal to 5 millimeters.
The standard of II grades of sheet materials 100 are as follows: A≤at least one drop 103 contact angle average value < B.In the present embodiment, if
The case where there are B≤some drop 103 contact angle values < C, takes near the drop 103 and a little resurveys.If in the point resurveyed, B
The point of≤drop contact angle value < C is more than 3, then the sheet material 100 is reduced to III level.Preferably, the point and the liquid of selection are resurveyed
The spacing of drop 103 is less than or equal to 5 millimeters.
The standard of III level sheet material 100 are as follows: contact angle average value >=B of at least one drop 103, if there is multiple test points
Contact angle values >=B, directly return and re-measured again after washing.
In the present embodiment, A 10, B 12, C 15.Certainly, according to 103 material of environmental gas, the selection of drop and sheet material
The difference of matter and the requirement of different degrees of quality grading, the setting of A, B and C can correspond to adjustment.
Claims (10)
1. sheet surface cleanliness measurement method, comprising steps of
There is provided cleanliness measuring device comprising objective table, dropping liquid part and camera, the dropping liquid part are opposite with the objective table
Setting, the camera are located at the side of the objective table；
The sheet material for having surface to be measured is provided；
The sheet material is placed in the objective table, keeps the surface to be measured opposite with the dropping liquid part, is existed using the dropping liquid part
The surface to be measured applies at least one drop；
Phase is taken at least one described drop using the camera；And
According at least one drop at phase, the cleanliness on the surface to be measured of the sheet material is determined.
2. sheet surface cleanliness measurement method as described in claim 1, which is characterized in that according at least one described drop
At phase, measure the contact angle of at least one drop, analyze the Contact-angle measurement of at least one drop as a result, determining
The cleanliness on the surface to be measured of the sheet material.
3. sheet surface cleanliness measurement method as claimed in claim 2, which is characterized in that the surface to be measured of the sheet material is
Polygon and have N number of edge, using the dropping liquid part when the surface to be measured applies at least one drop, it is described to
It surveys surface and applies a drop respectively close to N number of edge.
4. sheet surface cleanliness measurement method as claimed in claim 3, which is characterized in that using the dropping liquid part described
When surface to be measured applies at least one drop, apply a drop at the center on the surface to be measured.
5. sheet surface cleanliness measurement method as claimed in claim 4, which is characterized in that according at least one described drop
Contact angle average value determine the sheet material surface to be measured cleaniliness classs.
6. sheet surface cleanliness measurement method as claimed in claim 5, which is characterized in that at least one described drop is arranged
Contact angle Mean Limit A and B, wherein A < B, is divided into from high to low, by the sheet material according to surface cleanness quality
I grades, II grades and III level, when contact angle average value < A, the sheet material of at least one drop are I grades；When A≤described at least
Contact angle average value < B, sheet material of one drop are II grades；When contact angle average value >=B, the sheet material of at least one drop
For III level.
7. sheet surface cleanliness measurement method as claimed in claim 6, which is characterized in that when at least one drop
When contact angle average value < A, if it exists the case where A≤some drop contact angle values < B, then a weight is taken near the drop
It surveys, to determine whether for the sheet material to be reduced to II grades；If contact angle Mean Limit C > B, when A≤at least one drop
When contact angle average value < B, if it exists the case where B≤some drop contact angle values < C, then a weight is taken near the drop
It surveys, to determine whether to be reduced to III level.
8. sheet surface cleanliness measurement method as described in claim 7, which is characterized in that when at least one described drop
Contact angle average value < A when, the case where there are A≤some drop contact angle values < B, if the A≤drop resurveyed connects
The point of feeler value < B be it is multiple, which is reduced to II grades；As A≤at least one drop contact angle average value < B
When, the case where there are B≤some drop contact angle values < C, if the B resurveyed≤drop contact angle value < C point is more
It is a, which is reduced to III level.
9. such as sheet surface cleanliness measurement method described in any item of the claim 1 to 8, which is characterized in that the cleaning
Spending measuring device further includes light source, and the light source is located at the other side of the objective table far from the camera, is taken the photograph using described
When taking phase to the drop as head, the light source is open state.
10. sheet surface cleanliness measurement method as claimed in claim 9, which is characterized in that the cleanliness measuring device
It further include the data processing module that signal is connected to the camera, the data processing module is received from the camera
At phase and calculate contact angle result；The cleanliness measuring device further includes the display that signal is connected to the data processing module
Device, the display is for showing the contact angle result.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711085968.9A CN109752389A (en) | 2017-11-07 | 2017-11-07 | sheet surface cleanliness measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711085968.9A CN109752389A (en) | 2017-11-07 | 2017-11-07 | sheet surface cleanliness measurement method |
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| CN109752389A true CN109752389A (en) | 2019-05-14 |
Family
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| Application Number | Title | Priority Date | Filing Date |
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| CN201711085968.9A Pending CN109752389A (en) | 2017-11-07 | 2017-11-07 | sheet surface cleanliness measurement method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114324382A (en) * | 2020-09-30 | 2022-04-12 | 北京小米移动软件有限公司 | Panel terminal cleanliness detection method and panel terminal cleanliness detection device |
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| CN114324382A (en) * | 2020-09-30 | 2022-04-12 | 北京小米移动软件有限公司 | Panel terminal cleanliness detection method and panel terminal cleanliness detection device |
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