CN109738092B - Bidirectional thermopile type thin film heat flowmeter and heat flow measuring method - Google Patents
Bidirectional thermopile type thin film heat flowmeter and heat flow measuring method Download PDFInfo
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Abstract
The invention discloses a bidirectional thermopile type thin film heat flowmeter and a heat flow measuring method, wherein a surface, close to a measured surface, of a thermocouple is used as a heat sensing surface, a surface opposite to the heat sensing surface is used as an open surface, the thermocouple comprises a cold end and a hot end, the heat sensing surface of the cold end is provided with a first heat resistance layer, the open surface of the cold end is provided with a second heat resistance layer, the heat sensing surface of the hot end is provided with a second heat resistance layer, and the open surface of the hot end is provided with a first heat resistance layer, so that the total heat resistance on two sides of the cold end of the thermocouple is the same as the total heat resistance on two sides of the. Functionally, the method does not cause the difference of the heat flux density, improves the measurement precision of the heat flux density, can quickly calculate the heat flux density according to the corresponding heat flux measurement method, and can more accurately judge the heat flux direction through the positive and negative values of the heat flux density value. In the aspect of process, the method avoids the problems of side lead and corrosion hole opening when the nodes at the cold end and the hot end of the traditional thermocouple are arranged in an upper layer and a lower layer, and is more beneficial to engineering realization.
Description
Technical Field
The invention relates to the field of thermal testing, in particular to a bidirectional thermopile type thin film heat flowmeter and a heat flow measuring method.
Background
In the process of developing an aircraft engine, a whole engine and parts thereof need to be subjected to long-time trial run, a large number of aerodynamic performance tests and structural strength tests are carried out, including steady-state performance, transition-state performance, instability state fault research and the like, so as to determine the perfection degree of the performance and the working reliability of the aero-engine, and the tests are mainly characterized in that: the method has the advantages of complex technology, multiple links, large workload, large investment and long period, and needs to rely on reliable test technology to provide useful information data. In a sense, there is no advanced testing technology, no advanced aero-engine, and no engine theory and technology advance.
As one of the main contents of the testing technique, accurate measurement of heat flow is of paramount importance. The safety and the service life of the hot end part are directly determined by the temperature level and the temperature gradient of the hot end part of the aero-engine, and the temperature level and the temperature gradient depend on the cooling design of the hot end part and the precision of an engine thermal analysis system, so that the accurate acquisition of the surface heat flow of the hot end part cannot be avoided, and the problem is a big problem in the current thermal measurement technology.
Conventional embedded heat flow meters have significant disadvantages: due to the large thermal mass, the response time is long, the response frequency is low, large relative errors can be caused to the measurement results, the measurement is inaccurate, the processing technology is extremely complex, and the engineering realizability is poor.
Disclosure of Invention
The invention aims to provide a bidirectional thermopile type thin film heat flowmeter and a heat flow measuring method, and the technical effect of improving the heat flow density measuring accuracy is achieved.
In order to achieve the purpose, the invention provides the following scheme:
a bidirectional thermopile type thin film heat flow meter is sputtered or attached to a measured surface for heat flow detection, the surface of the heat flow meter close to the measured surface is a heat sensing surface, and the surface opposite to the heat sensing surface is an open surface; the heat flow meter comprises a thermocouple, a first heat resistance layer and a second heat resistance layer, the thermocouple comprises a cold end and a hot end, the cold end and the hot end are arranged side by side, a heat sensing surface of the cold end is provided with the first heat resistance layer, an open surface of the cold end is provided with the second heat resistance layer, a heat sensing surface of the hot end is provided with the second heat resistance layer, and an open surface of the hot end is provided with the first heat resistance layer.
Optionally, the thicknesses of the first thermal resistance layer and the second thermal resistance layer are equal.
Optionally, the cold end and the hot end are located at the same physical layer height.
Optionally, the thermocouple is a thin film thermocouple.
Optionally, the first thermal resistance layer and the second thermal resistance layer have different thermal conductivities.
Optionally, the thermopile thin film heat flow meter includes a plurality of thermocouples, which are connected in series.
A method of measuring heat flow based on a bi-directional thermopile thin film heat flow meter, the method comprising:
determining a gauge head coefficient ξ of the thin film heat flow meter;
measuring a voltage signal f (E) output by the thin film heat flow meter;
and (e) calculating the heat flow density q of the surface of the object to be measured according to the formula q- ξ f (E).
Optionally, the gauge head coefficient
Wherein λ1Is the thermal conductivity, lambda, of the first thermal resistance layer2The thermal conductivity of the second thermal resistance layer is delta, and the thicknesses of the first thermal resistance layer and the second thermal resistance layer are delta.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects: the thermocouple comprises a cold end and a hot end, wherein the cold end is provided with a first thermal resistance layer, the cold end is provided with a second thermal resistance layer, the hot end is provided with a first thermal resistance layer, the open surface of the hot end is provided with a second thermal resistance layer, and the open surface of the hot end is provided with a first thermal resistance layer, so that the total thermal resistance of the two sides of the cold end of the thermocouple is the same as the total thermal resistance of the two sides of the hot end of the thermocouple. Functionally, the method does not cause the difference of the heat flux density, improves the measurement precision of the heat flux density, can quickly calculate the heat flux density according to the corresponding heat flux measurement method, and can more accurately judge the heat flux direction through the positive and negative values of the heat flux density value. In the aspect of process, the method avoids the problems of side lead and corrosion hole opening when the nodes at the cold end and the hot end of the traditional thermocouple are arranged in an upper layer and a lower layer, and is more beneficial to engineering realization.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a heat flow meter according to an embodiment of the present invention;
fig. 2 is a schematic diagram of a thermopile connection of a bidirectional thermopile thin film heat flow meter according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a bidirectional thermopile type thin film heat flow meter, which improves the measurement accuracy of heat flow density and can judge the direction of heat flow.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Examples
The invention discloses a bidirectional thermopile type film heat flow meter, as shown in figure 1, the heat flow meter is sputtered or attached to a measured surface 5 for heat flow detection, the surface of the heat flow meter close to the measured surface 5 is a heat sensing surface, and the surface opposite to the heat sensing surface is an open surface; the heat flow meter includes thermocouple, first thermal resistance layer 3 and second thermal resistance layer 4, and the thermocouple is the film thermocouple, and the thermocouple includes cold junction 2 and hot junction 1, and cold junction 2 and hot junction 1 set up side by side, and the sensible heat face of cold junction 2 sets up first thermal resistance layer 3, and the open face of cold junction 2 sets up second thermal resistance layer 4, and the sensible heat face of hot junction 1 sets up second thermal resistance layer 4, and the open face of hot junction 1 sets up first thermal resistance layer 3.
The total thermal resistance on the two sides of the cold end 2 of the thermocouple is the same as that on the two sides of the hot end 1 of the thermocouple, so that the difference of heat flux density cannot be caused, and the measurement precision of the heat flux density is improved.
The rotationally symmetrical arrangement structure of the first thermal resistance layer 3 and the second thermal resistance layer 4 enables the heat flow meter to measure heat flow flowing into a measured surface from an open surface and also can measure heat flow flowing to a heat sensing surface from the measured surface, and therefore measurement of bidirectional heat flow density is achieved.
First thermal resistance layer 3 and second thermal resistance layer 4's thickness equals, cold junction 2 and hot junction 1 are located same physical layer height, this kind of design on the one hand greatly reduced the processing degree of difficulty, only need to sputter the effect that the metal of different thermal conductivities can reach the measurement difference in temperature respectively to cold junction 2 and hot junction 1, on the other hand, the problem of being difficult to control when having avoided using hydrofluoric acid to corrode the thermal resistance layer surface in order to make the thermal film thermocouple pass through the thermal resistance layer, the easy fracture inefficacy when also having avoided the thermocouple to stride across the thermal resistance layer side simultaneously problem, thereby very big increase film heat flow meter's stability and life-span.
The first and second thermal resistance layers 3 and 4 have different thermal conductivities.
The thermopile thin film heat flow meter includes a plurality of thermocouples connected in series.
As shown in figure 2, the cold ends and the hot ends of a plurality of thermocouples are connected in sequence to form the thermopile, so that the output signal can be increased, the error is reduced, and the measurement precision of the bidirectional thermopile type thin film heat flow meter is improved.
The invention also discloses a heat flow measuring method based on the bidirectional thermopile type thin film heat flow meter, which comprises the following steps:
determining a gauge head coefficient ξ of the thin film heat flow meter;
measuring a voltage signal f (E) output by the thin film heat flow meter;
and (e) calculating the heat flow density q of the surface of the object to be measured according to the formula q- ξ f (E).
Coefficient of gauge head
Wherein λ1Is the thermal conductivity, lambda, of the first thermal resistance layer2The thermal conductivity of the second thermal resistance layer is δ, and the thicknesses of the first thermal resistance layer and the second thermal resistance layer are both δ.
By means of SiO2Is the first heat-resistant layer material and Al2O3As a second heat-resistant layer material, the heat conductivity coefficient is lambda1＝0.63W/(m2C.) and lambda2＝33.5W/(m2DEG C), the thickness delta is 5 mu m according to the formula
Calculating measuring head coefficient of heat flow meter, adopting platinum rhodium 13-platinum as thermocouple material, at 1000 deg.C and heat flow density q being 1000W/m2When the voltage signals output by the series connection of 50 heat flow meters are f (E) 4.48 multiplied by 10-3And mV meets the measurement requirement.
When the voltage signal value output by the heat flow meter is negative, the heat flow direction can be judged to be opposite to the measured heat flow direction.
The method disclosed by the embodiment corresponds to the device disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the description of the method part.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (5)
1. The bidirectional thermopile type thin film heat flow meter is characterized in that the heat flow meter is sputtered or attached to a measured surface for heat flow detection, the surface of the heat flow meter close to the measured surface is a heat sensing surface, and the surface opposite to the heat sensing surface is an open surface; the heat flow meter comprises a thermocouple, a first heat resistance layer and a second heat resistance layer, the thermocouple comprises a cold end and a hot end, the cold end and the hot end are arranged side by side, the cold end and the hot end are located at the same physical layer height, a heat sensing surface of the cold end is provided with the first heat resistance layer, an open surface of the cold end is provided with the second heat resistance layer, a heat sensing surface of the hot end is provided with the second heat resistance layer, an open surface of the hot end is provided with the first heat resistance layer, and the thickness of the first heat resistance layer is equal to that of the second heat resistance layer.
2. A bi-directional thermopile thin film heat flow meter in accordance with claim 1, wherein said thermocouples are thin film thermocouples.
3. The bi-directional thermopile thin film heat flow meter of claim 1, wherein the first and second thermal resistance layers have different thermal conductivities.
4. A bi-directional thermopile thin film heat flow meter in accordance with claim 1, wherein the thermopile thin film heat flow meter comprises a plurality of thermocouples connected in series.
5. A method of measuring heat flow in a bi-directional thermopile thin film heat flow meter in accordance with claim 1, said method comprising:
determining a gauge head coefficient ξ of the thin film heat flow meter;
measuring a voltage signal f (E) output by the thin film heat flow meter;
calculating the heat flow density q of the surface of the object to be measured according to the formula q- ξ f (E);
coefficient of the gauge head
Wherein λ1Is the thermal conductivity, lambda, of the first thermal resistance layer2The thermal conductivity of the second thermal resistance layer is delta, and the thicknesses of the first thermal resistance layer and the second thermal resistance layer are delta.
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| CN113091956B (en) * | 2021-03-12 | 2022-08-19 | 上海交通大学 | Double-layer thermal resistance type thin film thermopile type heat flowmeter and preparation method |
| CN114813200B (en) * | 2022-07-01 | 2022-10-04 | 中国飞机强度研究所 | Device and method for measuring high-temperature characteristics of airplane component |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6257761B1 (en) * | 1997-12-30 | 2001-07-10 | National Science Council | Insulation measuring apparatus which forces heat flow in one direction with a constant temperature region |
| JP2008187085A (en) * | 2007-01-31 | 2008-08-14 | Tokyo Electron Ltd | Inspecting device and inspecting method for substrate for temperature monitoring |
| CN101819074A (en) * | 2010-03-16 | 2010-09-01 | 中国飞机强度研究所 | Diaphragm type heat-flow density sensor and manufacturing method thereof |
| CN104122010A (en) * | 2014-07-25 | 2014-10-29 | 北京卫星环境工程研究所 | Radiation heat flow measuring device |
-
2018
- 2018-12-29 CN CN201811635261.5A patent/CN109738092B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6257761B1 (en) * | 1997-12-30 | 2001-07-10 | National Science Council | Insulation measuring apparatus which forces heat flow in one direction with a constant temperature region |
| JP2008187085A (en) * | 2007-01-31 | 2008-08-14 | Tokyo Electron Ltd | Inspecting device and inspecting method for substrate for temperature monitoring |
| CN101819074A (en) * | 2010-03-16 | 2010-09-01 | 中国飞机强度研究所 | Diaphragm type heat-flow density sensor and manufacturing method thereof |
| CN104122010A (en) * | 2014-07-25 | 2014-10-29 | 北京卫星环境工程研究所 | Radiation heat flow measuring device |
Non-Patent Citations (1)
| Title |
|---|
| 方俊等;基于Abaqus的热流传感器非稳态传热研究;《仪器仪表学报》;20180115;第39卷(第1期);第152-161页 * |
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