CN109737535A - High-accuracy more sensing large space constant temperature systems - Google Patents

High-accuracy more sensing large space constant temperature systems Download PDF

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Publication number
CN109737535A
CN109737535A CN201910180899.2A CN201910180899A CN109737535A CN 109737535 A CN109737535 A CN 109737535A CN 201910180899 A CN201910180899 A CN 201910180899A CN 109737535 A CN109737535 A CN 109737535A
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CN
China
Prior art keywords
air
fan
accuracy
opening
temperature sensor
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Pending
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CN201910180899.2A
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Chinese (zh)
Inventor
周春强
吴小华
张一博
卢诗毅
刘强
李克天
曾建军
张平
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Foshan Ax Photoelectric Technology Co Ltd
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Foshan Ax Photoelectric Technology Co Ltd
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Priority to CN201910180899.2A priority Critical patent/CN109737535A/en
Publication of CN109737535A publication Critical patent/CN109737535A/en
Pending legal-status Critical Current

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Abstract

The present invention provides a kind of high-accuracy more sensing large space constant temperature systems, comprising: at least one Air cooler component, at least one air supply duct, annular wind shower pipe road, rack, sealant;The sealant is wrapped in the rack to form a cooling space in the rack, and the annular wind shower pipe road is set in the rack and is located in the cooling space;Each Air cooler component is connected to by an air supply duct with the annular wind shower pipe road;Multiple cold wind holes are provided on the tube wall in the annular wind shower pipe road, for providing uniform cold wind to the bottom direction of the cooling space;The fan assembly includes the Air cooler main body for generating cold air and the mixing chamber for mixing cold air with surrounding air.

Description

High-accuracy more sensing large space constant temperature systems
Technical field
The present invention relates to temperature control fields, and in particular to a kind of high-accuracy more sensing large space constant temperature systems.
Background technique
Ultra-precision Turning or semicon industry are had to control particularly with high-precision, the semi-finished product of processing for a long time Temperature processed it is constant.Based on the micro-structure of previous Ultra-precision Turning experience working height 5um or so, if temperature is not able to maintain Constant temperature just will appear thermal deformation and cause overproof scrap.Therefore, the temperature control side of traditional air-conditioning single-sensor cooling or clean room Case not can solve problems.
Therefore, the prior art is defective, needs to improve.
Summary of the invention
The object of the present invention is to provide a kind of high-accuracy more sensing large space constant temperature systems, have and improve temperature stability Effect.
High-accuracy sense large space constant temperature systems the present invention provides a kind of, comprising: at least one Air cooler component, extremely more A few air supply duct, annular wind shower pipe road, rack, sealant;The sealant is wrapped in the rack in the rack One cooling space of upper formation, the annular wind shower pipe road are set in the rack and are located in the cooling space;It is described every The one Air cooler component is connected to by an air supply duct with the annular wind shower pipe road;The pipe in the annular wind shower pipe road Multiple cold wind holes are provided on wall, for providing uniform cold wind to the bottom direction of the cooling space;
The fan assembly includes Air cooler main body for generating cold air and for carrying out cold air and surrounding air Mixed mixing chamber;The mixing chamber is set in the Air cooler main body and is connected by the first opening with the Air cooler main body Logical, the cold air which is provided with for generating the Air cooler main body sucks the first fan in the mixing chamber; Second for entering for outside air is provided on the mixing chamber to be open and for arranging mixing air to the air-supply The third in channel is open, which is provided with the second fan for sucking outside air, third opening setting There is the third fan for mixing air to be discharged to the air-supply passage.
In high-accuracy more sensing large space constant temperature systems of the present invention, the fan assembly further includes master control mould Group, the master control module are communicated with first fan, second fan, the third fan and the Air cooler main body Connection.
In high-accuracy more sensing large space constant temperature systems of the present invention, second opening is provided with for adjusting The opening adjuster of the aperture of second opening is saved, the opening adjuster and the master control module communicate to connect.
In high-accuracy more sensing large space constant temperature systems of the present invention, it is provided in the mixing chamber for detecting Mix the 4th temperature sensor of cavity temperature;
The temperature information that the master control module is used to be detected according to the 4th temperature sensor controls the opening adjuster Aperture.
In high-accuracy more sensing large space constant temperature systems of the present invention, the first tune is additionally provided in the mixing chamber Fan is saved, the first adjusting fan and the master control module communicate to connect, the air-out direction and described second of the first adjusting fan The air-out direction of fan is vertical and towards first opening, and described first adjusts the cold wind that fan is used to suck in the first fan And second fan sucking outside air mixed.
In high-accuracy more sensing large space constant temperature systems of the present invention, it is additionally provided in the mixing chamber and master control Mould group communication connection second adjust fan, it is described second adjusting fan close on out the first opening setting and with this second opening phase It is right, for forming convection current with second fan.
In high-accuracy more sensing large space constant temperature systems of the present invention, second opening is provided with for examining The second temperature sensor of external air temperature is surveyed, the second temperature sensor and the master control module communicate to connect.
In high-accuracy more sensing large space constant temperature systems of the present invention, the third opening is provided with for examining Survey the third temperature sensor of the leaving air temp of mixing chamber;The third temperature sensor and the master control module communicate to connect.
It further include multiple first temperature sensors in high-accuracy more sensing large space constant temperature systems of the present invention, Multiple first temperature sensor is communicated to connect with the master control module respectively;
Multiple first temperature sensor is located in the cooling space and is located in different height.
In high-accuracy more sensing large space constant temperature systems of the present invention, at least one described Air cooler component includes Two Air cooler components;At least one described air supply duct includes two air supply ducts;
Described two Air cooler components pass through two air supply ducts respectively and are connected to and in communication with the annular wind shower pipe road, and this two Middle point symmetry of link position of a air supply duct on the annular wind shower pipe road about the annular wind shower pipe road.
Air-cooler ontology is generated cold wind by using setting mixing chamber and mixed with outside air by the present invention, mixed It keeps exporting again when temperature is constant after conjunction is balanced giving annular wind shower pipe road, temperature controlled stability and harmony can be improved.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of high-accuracy more sensing large space constant temperature systems in some embodiments of the invention.
Fig. 2 is one kind of the Air cooler component of high-accuracy more sensing large space constant temperature systems in some embodiments of the invention Structural schematic diagram.
Fig. 3 is the vertical view of the Air cooler component of high-accuracy more sensing large space constant temperature systems in some embodiments of the invention Structural schematic diagram.
Specific embodiment
Embodiments of the present invention are described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein from beginning Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng The embodiment for examining attached drawing description is exemplary, and for explaining only the invention, and is not considered as limiting the invention.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside", " up time The orientation or positional relationship of the instructions such as needle ", " counterclockwise " is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of The description present invention and simplified description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with spy Fixed orientation construction and operation, therefore be not considered as limiting the invention.In addition, term " first ", " second " are only used for Purpose is described, relative importance is not understood to indicate or imply or implicitly indicates the quantity of indicated technical characteristic. " first " is defined as a result, the feature of " second " can explicitly or implicitly include one or more feature.? In description of the invention, the meaning of " plurality " is two or more, unless otherwise specifically defined.
Fig. 1 is please referred to, Fig. 1 is the knot of the high-accuracy more sensing large space constant temperature systems of one of some embodiments of the application Structure schematic diagram, which includes: at least one Air cooler component 10, at least one air supply tube Road 20, annular wind shower pipe road 30, rack 40, sealant 50, multiple first temperature sensors;The sealant 50 is wrapped in described To form a cooling space in the rack 40 in rack 40, the annular wind shower pipe road 30 is set in the rack 40 and position In in the cooling space;Each Air cooler component 10 passes through an air supply duct 20 and the annular wind shower pipe Road 30 is connected to;Multiple cold wind holes are provided on the tube wall in the annular wind shower pipe road 30, for the bottom of the cooling space Direction provides uniform cold wind;Multiple first temperature sensor is located on the different height in the cooling space, the Air cooler Component 10 is connect with the temperature for being detected according to multiple first temperature sensor with multiple first temperature sensor communication The cold air temperature of information control output.
Wherein, which is divided into five gradient regions from top to bottom, and being located in the gradient region of bottom needs It carries out on cooling Installing machine tool region 100 at pre-determined distance.
Wherein, multiple first temperature sensor includes first gradient temperature sensor 61, first gradient temperature sensor 61 are arranged in the bottom in annular wind shower pipe road 30, the temperature of the outlet air for detecting annular wind shower pipe road 30.
Wherein, multiple first temperature sensor includes the second gradient temperature sensor 62, the second gradient temperature sensor 62 are arranged in 61 lower section of the first gradient temperature sensor, for detecting the cold wind of the blowout of annular wind shower pipe road 30 from first gradient To the temperature change of the second gradient, the temperature difference is at ± 0.1 DEG C.
Wherein, multiple first temperature sensor includes 3rd gradient temperature sensor 63,3rd gradient temperature sensor 63 are arranged in 62 lower section of the second gradient temperature sensor;3rd gradient temperature sensor 63 is for cold wind from the second gradient to the The temperature change of three gradients, the temperature difference is at ± 0.1 DEG C.
Wherein, multiple first temperature sensor includes 4th gradient temperature sensor 64,4th gradient temperature sensor 64 are located at below 3rd gradient temperature sensor.64 position of 4th gradient temperature sensor (detection pyrotoxin) measurement is close Target is measured, calorific value is detected.
Wherein, multiple first temperature sensor includes the 5th gradient temperature sensor 65, the 5th gradient temperature sensor 65 are located at four gradient temperature sensors, 64 lower section, and for detecting the temperature change of least significant end, hot-air rises from this measurement point, Based on this point measured temperature can predict will temperature change.
Referring to Fig. 2 and Fig. 3, which includes for generating the Air cooler main body 11 of cold air, using In the mixing chamber 12 for mixing cold air with surrounding air and the master control module for being used to integrally control.The master control module point Not in the Air cooler main body 11, the mixing chamber 12 electronic device and multiple first temperature sensor communication connect.
Wherein, the mixing chamber 12 be set in the Air cooler main body 11 and by one first opening (not shown) with it is described Air cooler main body 11 is connected to, and the cold air which is provided with for generating the Air cooler main body 11 sucks the mixing The opening degree adjuster 121 of the first fan 122 in chamber 12 and the aperture for adjusting second opening.
Wherein, it is provided with the second opening 125 for entering for outside air on the mixing chamber 12 and is used to mix Air, which is arranged, is open 130 to the third of the air-supply passage 20, and for sucking outside air is provided at second opening 125 Two fans 124 are provided with third fan 129 for mixing air to be discharged to the air-supply passage 20 at third opening 130.
Wherein, the first adjusting fan 128, air-out direction and second fan 124 are additionally provided in mixing chamber 12 Air-out direction is vertical and towards first opening, and described first adjusts the cold wind that fan 128 is used to suck in the first fan 122 And second fan 124 suck outside air mixed.
Wherein, the second adjusting fan 123 is additionally provided in mixing chamber 12, the second adjusting fan 123 closes on out first Opening setting is simultaneously opposite with second opening 125, for forming convection current with second fan 124.
Wherein, the second temperature sensor 126 for detecting external air temperature, institute are provided at second opening 125 State the third temperature sensor 131 that the leaving air temp for detecting mixing chamber 12 is provided at third opening 130, the mixing chamber The 4th temperature sensor 127 for detecting the temperature in mixing chamber 12 is provided in 12.
Wherein, Air cooler ontology 11 generate cold air to enter mixing chamber 12, it is necessary to pass through opening degree adjuster 121, First fan 122, control system make 111 opening degree adjusters open certain aperture, and 110 air-conditioning cold airs is then driven to enter One's intention as revealed in what one says fan starts exhausting cold air, then first adjusts the opening of fan 128 so that cold air will be filled with entire mixing chamber 12, then so The 4th temperature sensor 127 detects 12 air temperature of mixing chamber afterwards, and temperature is lower than controller set temperature at this time.
Wherein, which is end to end annular channel, is evenly spaced apart to be provided on bottom wall more A cold wind hole.In the present embodiment, which includes two Air cooler components;At least one described air supply tube Road includes two air supply ducts;Two Air cooler components pass through two two air supply ducts respectively and the annular wind shower pipe road connects It connects and is connected to, and midpoint of link position of two air supply ducts on the annular wind shower pipe road about the annular wind shower pipe road Symmetrically.The temperature and wind speed for the cold wind that can be discharged in each cold wind hole by using two Air cooler components are more equal Weighing apparatus.
In some embodiments, when the environment temperature of the second temperature sensor 126 detection is higher than mixing chamber temperature, master control Mould group control the second fan 124, second of driving adjusts fan 123, opens the sucking that exhausting mode continues environmental gas and mixes Chamber 12, at this point, the 4th temperature in mixing chamber 12 passes as the pressure in continuous sucking surrounding air mixing chamber 12 can become larger Sensor 127 detects temperature and also begins to ramp up, and consequently reaches the temperature value of setting, then drives third fan 129, gas is allowed to start Outlet reaches stable gas pressure, i.e., until third temperature sensor 131 is consistent with the 4th temperature sensor 127 detection temperature at this time It passes in and out flow and air-out flow is constant, into flow stable state.It is incoming with each sensor signal into after flow stable state, The signal gradually measured is actually detected target.
In some embodiments, it is higher than 0.01 DEG C of setting value or more when the 4th temperature sensor 127 detects temperature, at this time Temperature drift, master control module are first gradually increased the opening degree of opening degree adjuster 121, and 12 temperature of mixing chamber gradually decreases down at this time Close to desired temperature, the index then evaluated becomes the measured value fluctuating change of the 4th temperature sensor 127, in order to eliminate temperature Fluctuation needs to adjust the revolving speed of the first fan 122 and then adjusts the inlet of cold air, and to keep temperature to stablize, fluctuation is stablized 0.005 DEG C, at this time it is believed that reaching the temperature stable state of mixing chamber;And then the fan for needing to adjust 16 third fans 129 turns Speed guarantees that mixing chamber be in flow stable state, when to detect temperature consistent for third temperature sensor 131 and the 4th temperature sensor 127, Reach the stable state of set-point temperature.
In some embodiments, when the 4th temperature sensor 127 detection temperature in mixing chamber is lower than 0.01 DEG C of setting value More than, temperature is relatively low at this time, firstly, the reduction opening degree of master control module control opening degree adjuster 121, and then adjusts second Fan 124, in the cold air unit time, the reduction of conveying capacity, the inflow of air hot gas, temperature are gradually gone up, are set when reaching Definite value, evaluation index becomes the measured value fluctuating change of the 4th temperature sensor 127 at this time, needs to adjust to eliminate temperature fluctuation The revolving speed of third fan 129 and then the gas output for adjusting cold air stablize fluctuation at 0.005 DEG C, need to adjust to keep temperature to stablize The revolving speed of third fan 129 guarantees that mixing chamber is in flow stable state, when third temperature sensor 131 and the 4th temperature sensor 127 detection temperature are consistent, that is, reach the stable state of set-point temperature.
In the description of this specification, reference term " embodiment ", " certain embodiments ", " schematically implementation What the description of mode ", " example ", " specific example " or " some examples " etc. meant to describe in conjunction with the embodiment or example Particular features, structures, materials, or characteristics are contained at least one embodiment or example of the invention.In this specification In, schematic expression of the above terms are not necessarily referring to identical embodiment or example.Moreover, the specific spy of description Sign, structure, material or feature can be combined in any suitable manner in any one or more embodiments or example.

Claims (10)

  1. High-accuracy sense large space constant temperature systems 1. a kind of characterized by comprising at least one Air cooler component, at least more One air supply duct, annular wind shower pipe road, rack, sealant;The sealant is wrapped in the rack in the rack A cooling space is formed, the annular wind shower pipe road is set in the rack and is located in the cooling space;It is described each The Air cooler component is connected to by an air supply duct with the annular wind shower pipe road;The tube wall in the annular wind shower pipe road On be provided with multiple cold wind holes, for providing uniform cold wind to the bottom direction of the cooling space;
    The fan assembly includes Air cooler main body for generating cold air and for carrying out cold air and surrounding air Mixed mixing chamber;The mixing chamber is set in the Air cooler main body and by one first opening and the Air cooler main body Connection, the cold air which is provided with for generating the Air cooler main body suck the first wind in the mixing chamber Fan;It is provided with the second opening for entering for outside air on the mixing chamber and is sent for arranging mixing air to described The third in wind channel is open, which is provided with the second fan for sucking outside air, which sets It is equipped with the third fan for mixing air to be discharged to the air-supply passage.
  2. 2. high-accuracy more sensing large space constant temperature systems according to claim 1, which is characterized in that the fan assembly is also Including master control module, the master control module and first fan, second fan, the third fan and described air-cooled The connection of owner's body communication.
  3. 3. high-accuracy more sensing large space constant temperature systems according to claim 2, which is characterized in that second opening It is provided with the opening degree adjuster of the aperture for adjusting second opening, the opening degree adjuster and the master control module are logical Letter connection.
  4. 4. high-accuracy more sensing large space constant temperature systems according to claim 3, which is characterized in that set in the mixing chamber It is equipped with the 4th temperature sensor for detecting mixing cavity temperature;
    The temperature information that the master control module is used to be detected according to the 4th temperature sensor controls the opening adjuster Aperture.
  5. 5. high-accuracy more sensing large space constant temperature systems according to claim 2, which is characterized in that in the mixing chamber also It is provided with the first adjusting fan, the first adjusting fan and the master control module communicate to connect, the outlet air side of the first adjusting fan To vertical with the air-out direction of second fan and towards first opening, described first, which adjusts fan, is used for the first wind The outside air of the cold wind and the sucking of the second fan of fanning sucking is mixed.
  6. 6. high-accuracy more sensing large space constant temperature systems according to claim 5, which is characterized in that in the mixing chamber also Be provided with master control module communication connection second adjust fan, it is described second adjusting fan close on the first opening place and with this Second opening is opposite, for forming convection current with second fan.
  7. 7. high-accuracy more sensing large space constant temperature systems according to claim 2, which is characterized in that second opening It is provided with the second temperature sensor for detecting external air temperature, the second temperature sensor and the master control module are logical Letter connection.
  8. 8. high-accuracy more sensing large space constant temperature systems according to claim 4, it is characterised in that the third opening It is provided with the third temperature sensor of the leaving air temp for detecting mixing chamber;The third temperature sensor and the master control mould Group communication connection.
  9. 9. high-accuracy more sensing large space constant temperature systems according to claim 2, which is characterized in that further include multiple first Temperature sensor, multiple first temperature sensor are communicated to connect with the master control module respectively;
    Multiple first temperature sensor is located in the cooling space and is located in different height.
  10. High-accuracy sense large space constant temperature systems 10. according to claim 2 more, which is characterized in that it is described at least one Air cooler component includes two Air cooler components;At least one described air supply duct includes two air supply ducts;
    Described two Air cooler components pass through two air supply ducts respectively and are connected to and in communication with the annular wind shower pipe road, and this two Middle point symmetry of link position of a air supply duct on the annular wind shower pipe road about the annular wind shower pipe road.
CN201910180899.2A 2019-03-11 2019-03-11 High-accuracy more sensing large space constant temperature systems Pending CN109737535A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112945099A (en) * 2021-02-08 2021-06-11 杭州晶耐科光电技术有限公司 On-line detection system for shaft size

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JP2009127976A (en) * 2007-11-27 2009-06-11 Ntt Data Ex Techno Corp Cooling system
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KR20140105315A (en) * 2013-02-22 2014-09-01 안동대학교 산학협력단 Apparatus for controlling temperatus and humidity
CN106322585A (en) * 2016-08-17 2017-01-11 凯天环保科技股份有限公司 Temperature control and humidity control air conditioner system of high-bay depot
CN107687272A (en) * 2017-09-13 2018-02-13 中天道成(苏州)洁净技术有限公司 Energy-saving high-cleanness, high Cleanroom system
KR20180084350A (en) * 2017-01-17 2018-07-25 (주)에이피이씨 Eco-friendly Energy Storage System
CN209763385U (en) * 2019-03-11 2019-12-10 佛山艾克斯光电科技有限公司 High-precision multi-sensing large-space constant-temperature system

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009127976A (en) * 2007-11-27 2009-06-11 Ntt Data Ex Techno Corp Cooling system
CN202565648U (en) * 2012-04-10 2012-11-28 苏州明威医疗科技有限公司 Cooling system used in machine room
KR20140061077A (en) * 2012-11-13 2014-05-21 한국과학기술연구원 Natural ventilation and heating system using solar radiation energy for buildings
KR20140105315A (en) * 2013-02-22 2014-09-01 안동대학교 산학협력단 Apparatus for controlling temperatus and humidity
CN106322585A (en) * 2016-08-17 2017-01-11 凯天环保科技股份有限公司 Temperature control and humidity control air conditioner system of high-bay depot
KR20180084350A (en) * 2017-01-17 2018-07-25 (주)에이피이씨 Eco-friendly Energy Storage System
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112945099A (en) * 2021-02-08 2021-06-11 杭州晶耐科光电技术有限公司 On-line detection system for shaft size

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