CN109725466A - Polarization illuminator, light orientation equipment and polarized illumination control method - Google Patents
Polarization illuminator, light orientation equipment and polarized illumination control method Download PDFInfo
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- CN109725466A CN109725466A CN201711048807.2A CN201711048807A CN109725466A CN 109725466 A CN109725466 A CN 109725466A CN 201711048807 A CN201711048807 A CN 201711048807A CN 109725466 A CN109725466 A CN 109725466A
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- light
- polarization
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- polarizing component
- condensing unit
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Abstract
The present invention provides a kind of polarization illuminators, it include: light source, beam condensing unit, polarizing component and polarization light conversion element, polarizing component receives the incident light that the sum that light source issues is assembled through beam condensing unit, incident light includes the first polarised light and the second polarised light, first polarised light is different from the second polarization light polarization direction, polarizing component reflects the first polarised light and is emitted the second polarised light, polarization light conversion element is arranged in the optical path between beam condensing unit and polarizing component, polarization light conversion element is configured to the first polarised light of transmission to beam condensing unit, and be converted to the second polarised light for being incident to polarizing component.The present invention provides a kind of polarization illuminator, light orientation equipment and polarized illumination control methods, polarization light conversion element is increased in polarization illuminator, to change the polarization angle for the light that polarizing component is reflected back, and the polarization light of required assigned direction is reintroduced back to by optical path by beam condensing unit, improve the capacity usage ratio of light orientation equipment.
Description
Technical field
The present invention relates to light orientation field, especially a kind of polarization illuminator, light orientation equipment and polarized illumination
Control method.
Background technique
In display panel manufacturing field, the allocating process of substrate mainly has physical friction orientation and two kinds of light orientation, and rubs
It wipes orientation to compare, light orientation equipment has the advantages that no electrostatic, pollution-free, high-efficient, therefore the prior art generallys use light and matches
Orientation processing is carried out to substrate to equipment.Light orientation equipment includes the board for being used to support substrate and the polarization above board
Substrate is placed on board when carrying out orientation processing to substrate and is coated with the side of photosensitive alignment liquid by illuminating apparatus
Upward, the ultraviolet light irradiation substrate in polarization illuminator is opened, to form alignment film on substrate.
With the variation of the market demand, the requirement for display panel production line yield is higher and higher, thus to light orientation
The capacity usage ratio of equipment has higher requirement.
Currently, in light orientation equipment, needing to be converted to the ordinary ray that light source issues by polarizing component has finger
Determine the polarised light of polarization state.The polarizing component mainly used in current light orientation equipment only allows single polarization direction (S polarized light
Or P-polarized light, the two electric field oscillation direction are vertical) light pass through.The light overwhelming majority of another polarization direction is reflected, few
Amount is absorbed by the element, and the energy for causing light orientation equipment actually available can not be more than the 50% of incidence polarizing element light ray energy.
Summary of the invention
The embodiment of the present invention is designed to provide a kind of polarization illuminator, light orientation equipment and polarized illumination control
Method processed, to solve the problems, such as that existing polarization illuminator capacity usage ratio is poor.
In order to achieve the above object, the embodiment of the invention provides a kind of polarization illuminators, comprising: light source, optically focused
Device, polarizing component and polarization light conversion element, the polarizing component receive the sum of the light source sending through the beam condensing unit
The incident light of aggregation, the incident light include the first polarised light and the second polarised light, and first polarised light is inclined with described second
Light polarization direction of shaking is different, and the polarizing component reflects first polarised light and is emitted second polarised light, the polarization
Light conversion element is arranged in the optical path between the beam condensing unit and polarizing component, and the polarization light conversion element is configured to pass
Defeated first polarised light is converted to the second polarised light for being incident to the polarizing component to the beam condensing unit.
Further, the beam condensing unit includes camber reflection cover, and the coke of the camber reflection cover is arranged in the light source
At point.
Further, the light source uses white light source or ultraviolet source.
Further, the polarization light conversion element includes quarter-wave plate.
Further, the polarization light conversion element is configured to convert the reflected light of the polarizing component as circularly polarized light.
Further, the polarization illuminator further includes filter plate, and the filter plate setting is in the light source and rises
In optical path between inclined element.
Further, the polarization illuminator further includes protection glass, and the protection glass is arranged in the light source
In optical path between polarizing component.
The embodiment of the invention also provides a kind of smooth orientation equipment, including the polarization illuminator.
The embodiment of the invention also provides a kind of polarized illumination control methods, comprising:
The incident light that the sum that light source issues is assembled through beam condensing unit is received by polarizing component, the incident light includes first
Polarised light and the second polarised light, first polarised light is different from the second polarization light polarization direction, is polarized member by described
Part reflects first polarised light and is emitted second polarised light；
Second light is converged to polarization light conversion element by the beam condensing unit, is converted by the polarised light
Second light is converted to the second polarised light and is transmitted to the polarizing component by element.
Further, the beam condensing unit includes camber reflection cover, the polarized illumination control method further include:
Light source is arranged in the focal point of the camber reflection cover.
The embodiment of the invention provides a kind of polarization illuminator, light orientation equipment and polarized illumination control method,
Polarization light conversion element is increased in polarization illuminator, to change the polarization angle for the light that polarizing component is reflected back,
And the polarization light of required assigned direction is reintroduced back to by optical path by beam condensing unit, unserviceable energy is again sharp by before
With to improve the capacity usage ratio of light orientation equipment.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the polarization illuminator that the embodiment of the present invention one provides；
Fig. 2 is the working principle diagram for the polarization light conversion element that the embodiment of the present invention one provides；
Fig. 3 is the working principle diagram for the polarizing component that the embodiment of the present invention one provides；
Fig. 4 is the working principle diagram for the polarization illuminator that the embodiment of the present invention one provides.
In figure, 1: light source, 2: beam condensing unit, 3: protection glass, 4: filter plate, 5: polarization light conversion element, 6: being polarized member
Part, 7: real estate.
Specific embodiment
A specific embodiment of the invention is described in more detail below in conjunction with schematic diagram.According to following description and
Claims, advantages and features of the invention will become apparent from.It should be noted that attached drawing is all made of very simplified form and
Using non-accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Embodiment one
As shown in Figure 1, the embodiment of the invention provides a kind of polarization illuminators, comprising: light source 1, beam condensing unit 2,
Polarizing component 6 and polarization light conversion element 5, the polarizing component 6 receive the sum of the sending of light source 1 through the beam condensing unit 2
The incident light of aggregation, the incident light include the first polarised light and the second polarised light, and first polarised light is inclined with described second
Light polarization direction of shaking is different, and the polarizing component 6 reflects first polarised light and is emitted second polarised light, the polarization
Light conversion element 5 is arranged in the optical path between the beam condensing unit 2 and polarizing component 6, and the polarization light conversion element 5 configures
To transmit first polarised light to the beam condensing unit 2, and be converted to the second polarised light for being incident to the polarizing component 6.
Wherein, the light that light source 1 issues is the first light, and the polarization light conversion element 5 converts first polarised light
For the second light, second light is converged to by polarization light conversion element 5 by beam condensing unit 2, is turned by the polarised light
Element 5 is changed second light is converted to the second polarised light and is transmitted to the polarizing component 6.
As shown in figure 3, passing through available first polarised light of polarizing component 6 and the second polarised light.In the present embodiment,
One polarised light is S polarized light, and the second polarised light is P-polarized light.
In the present embodiment, beam condensing unit 2 is used to for two lightlike lines being converged to polarizing component 6, the light that polarizing component 6 exports
Line is incident to real estate 7.On the one hand, the first light of light source 1 is converged to polarization light conversion element 5 and is polarized by beam condensing unit 2
Element 6；On the other hand, polarization light conversion element 5 by the S polarized light that polarizing component 6 reflects be converted to the second light be transmitted to it is poly-
Second light is converged to polarization light conversion element 5 again by electro-optical device 2, beam condensing unit, polarizes light conversion element 5 for second light
Line is converted to P-polarized light, which can participate in exposing normal through polarizing component 6 into substrate face 7.
Further, what the light source 1 issued is non-polarized light, and the non-polarized light can be considered the collection of all directions polarised light
It closes, and the set includes the polarised light of certain specific both direction, wherein the polarised light of certain both direction can be polarization side
To orthogonal two polarised lights.The light source 1 can also directly issue polarised light, contain at least two spy in the polarised light
Determine the polarised light in direction, wherein the polarised light of two specific directions can be orthogonal two polarised lights in polarization direction.Institute
Stating light source 1 can be using white light source or ultraviolet source, and preferably rodlike ultraviolet source, the beam condensing unit 2 include curved surface
Reflector, the light source 1 are arranged near the focal position of the camber reflection cover.Therefore, the no polarization being emitted by light source 1 is special
Property ordinary ray, partially by camber reflection cover reflect, by camber reflection cover reflect light can be with less parallel light
Form propagate outward.In the present embodiment, the focal point of camber reflection cover is arranged in light source 1, and rodlike ultraviolet source is distributed
Direction is arranged in parallel with camber reflection cover.
Preferably, the polarization light conversion element includes quarter-wave plate.After ordinary ray passes through quarter-wave plate
Polarization characteristic distribution will not be changed, linearly polarized light can be changed into elliptically polarized light or circularly polarized light after passing through.And current wave plate work
Skill can be realized > 99% transmitance, will not influence the illumination index of equipment.
Fig. 2 and Fig. 4 are please referred to, the angle for the S polarized light that polarizing component 6 reflects in Fig. 2 is only to illustrate, in the present embodiment
In, the optical axis of quarter-wave plate and the optical axis direction of polarised light are in 45 ° of angles, and the polarization light conversion element 5 is configured to turn
The S polarized light for changing the polarizing component reflection is circularly polarized light, and circularly polarized light is again introduced into polarization after the reflection of camber reflection cover
Circularly polarized light is reconverted into P-polarized light in turn by light conversion element 5, polarization light conversion element 5.
With continued reference to FIG. 1, the polarization illuminator further includes protection glass 3 and filter plate 4.The protection glass
3 are arranged in the optical path between the light source 1 and polarizing component 6, and protection glass 3 is used to completely cut off the high temperature and others of light source 1
Optical element, and complete heat dissipation wind channel is formed inside the lamp house formed convenient for light source 1 and beam condensing unit 2.The filter plate 4 is arranged
In optical path between the light source 1 and polarizing component 6, it is subsequent that filter plate 4 is used to ensure that the light of only service band to enter
Optical element.
In the present embodiment, filter plate 4 is arranged in protection glass 3 and polarizes in the optical path between light conversion element 5, light
It successively is transmitted to polarizing component 6 through protection glass 3, filter plate 4 and polarization light conversion element 5 after the reflection of beam condensing unit 2, but not
It is limited to this.In another embodiment, it can will protect glass 3 that filter plate 4 is set and polarizes the optical path between light conversion element 5
On, light is successively transmitted to through filter plate 4, protection glass 3 and polarization light conversion element 5 after the reflection of beam condensing unit 2 and is polarized member
Part 6.
In the present embodiment, polarizing component 6 selects wiregrating, but not limited to this.The P that polarizing component 6 is transmissive to demand is inclined
Shake light, and reflects S polarized light.The P-polarized light of transmission, which shines directly into, participates in orientation on real estate.
The present embodiment additionally provides a kind of smooth orientation equipment, including the polarization illuminator and is used to support substrate
Board.For the working principle of light orientation equipment, those skilled in the art have known that details are not described herein.
It in the prior art, is Eall by total light energy that reflector is reflected into polarizing component, it is assumed that demand is P
Polarised light, then polarizing component reflection is S polarized light, and the P-polarized light light intensity for defining reality output is Ep, is polarized element reflection
The S polarized light light intensity returned is Es.In traditional light orientation equipment, the capacity usage ratio of polarizing component is practical be η=Ep/Eall <
48%, the reflection light light intensity energy accounting of actual measurement is Ep/Eall ≈ 40%.
In the present embodiment, by increasing wave plate, unserviceable S polarized light it can will be converted into P-polarized light before, weight
Newly enter optical path.It is reflected the influence that cover reflectivity and air absorb, the actual utilization rate of the S polarized light being reflected back can reach
To 50-70%.Final capacity usage ratio η is 68%~76%.Under comparing, the embodiment of the present invention can significantly improve light and match
To the capacity usage ratio of equipment.Compared to more original polarization illuminator, 41%~58% can be promoted.
Embodiment two
The present embodiment additionally provides a kind of polarized illumination control method, specifically includes:
The incident light that the sum that light source 1 issues is assembled through beam condensing unit 2 is received by polarizing component 6, the incident light includes
First polarised light and the second polarised light, first polarised light is different from the second polarization light polarization direction, passes through described
Inclined element reflects first polarised light and is emitted second polarised light；
Setting polarization light conversion element 5, passes through the polarised light in optical path between beam condensing unit 2 and polarizing component 6
First polarised light is converted to the second light and is transmitted to the beam condensing unit 2 by conversion element 5；
Second light is converged to polarization light conversion element 5 by the beam condensing unit 2, is turned by the polarised light
Element 5 is changed second light is converted to the second polarised light and is transmitted to the polarizing component 6.
Further, the beam condensing unit 2 includes camber reflection cover, the polarized illumination control method further include:
Light source 1 is arranged in the focal point of the camber reflection cover.
In the present embodiment, light is issued by light source 1, by filter plate 4, polarization light conversion element 5 and polarizing component 6
After form P-polarized light, and be directly entered real estate 7 exposure, and reflect S polarized light by polarization light conversion element 5 twice
Change polarization state, is finally also partially converted to P-polarized light, and enter real estate 7 by polarizing component 6 and expose.
To sum up, the embodiment of the invention provides the controls of a kind of polarization illuminator, light orientation equipment and polarized illumination
Method increases polarization light conversion element in polarization illuminator, to change the polarization for the light that polarizing component is reflected back
Angle, and the polarization light of required assigned direction is reintroduced back to by optical path by beam condensing unit, the unserviceable energy by before
It re-uses, to improve the capacity usage ratio of light orientation equipment.
Specifically, it will be transmitted to beam condensing unit after the S polarized light conversion of polarizing component reflection, then passes through beam condensing unit optically focused
To polarization light conversion element and polarizing component, the P-polarized light of polarizing component output is enhanced, polarization illuminator is improved
Capacity usage ratio.
The above is only a preferred embodiment of the present invention, does not play the role of any restrictions to the present invention.Belonging to any
Those skilled in the art, in the range of not departing from technical solution of the present invention, to the invention discloses technical solution and
Technology contents make the variation such as any type of equivalent replacement or modification, belong to the content without departing from technical solution of the present invention, still
Within belonging to the scope of protection of the present invention.
Claims (10)
1. a kind of polarization illuminator characterized by comprising light source, beam condensing unit, polarizing component and polarised light conversion member
Part, the polarizing component receive the incident light that the sum that the light source issues is assembled through the beam condensing unit, and the incident light includes
First polarised light and the second polarised light, first polarised light is different from the second polarization light polarization direction, described to be polarized member
Part reflects first polarised light and is emitted second polarised light, and the polarization light conversion element is arranged in the beam condensing unit
In optical path between polarizing component, the polarization light conversion element, which is configured to transmit first polarised light to the optically focused, to be filled
It sets, and is converted to the second polarised light for being incident to the polarizing component.
2. polarization illuminator as described in claim 1, which is characterized in that the beam condensing unit includes camber reflection cover,
The focal point of the camber reflection cover is arranged in the light source.
3. polarization illuminator as claimed in claim 2, which is characterized in that the light source uses white light source or ultraviolet light
Source.
4. polarization illuminator as described in claim 1, which is characterized in that the polarization light conversion element include four/
One wave plate.
5. polarization illuminator as claimed in claim 4, which is characterized in that the polarization light conversion element is configured to convert
The reflected light of the polarizing component is circularly polarized light.
6. polarization illuminator as described in claim 1, which is characterized in that the polarization illuminator further includes filtering
Piece, the filter plate are arranged in the optical path between the light source and polarizing component.
7. polarization illuminator as described in claim 1, which is characterized in that the polarization illuminator further includes protection
Glass, the protection glass are arranged in the optical path between the light source and polarizing component.
8. a kind of smooth orientation equipment, which is characterized in that including the polarized illumination dress as described in any one of claims 1 to 7
It sets.
9. a kind of polarized illumination control method characterized by comprising
The incident light that the sum that light source issues is assembled through beam condensing unit is received by polarizing component, the incident light includes the first polarization
Light and the second polarised light, first polarised light is different from the second polarization light polarization direction, anti-by the polarizing component
It penetrates first polarised light and is emitted second polarised light；
Setting polarization light conversion element, passes through the polarization light conversion element in optical path between beam condensing unit and polarizing component
First polarised light is converted into the second light and is transmitted to the beam condensing unit；
Second light is converged to polarization light conversion element by the beam condensing unit, passes through the polarization light conversion element
Second light is converted into the second polarised light and is transmitted to the polarizing component.
10. polarized illumination control method as claimed in claim 9, which is characterized in that the beam condensing unit includes that curved surface is anti-
Penetrate cover, the polarized illumination control method further include:
Light source is arranged in the focal point of the camber reflection cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711048807.2A CN109725466A (en) | 2017-10-31 | 2017-10-31 | Polarization illuminator, light orientation equipment and polarized illumination control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711048807.2A CN109725466A (en) | 2017-10-31 | 2017-10-31 | Polarization illuminator, light orientation equipment and polarized illumination control method |
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| Publication Number | Publication Date |
|---|---|
| CN109725466A true CN109725466A (en) | 2019-05-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711048807.2A Pending CN109725466A (en) | 2017-10-31 | 2017-10-31 | Polarization illuminator, light orientation equipment and polarized illumination control method |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103293884A (en) * | 2012-02-24 | 2013-09-11 | 上海微电子装备有限公司 | Off-axis alignment system and method for photolithographic equipment |
| US20170045738A1 (en) * | 2015-07-17 | 2017-02-16 | Lg Electronics Inc. | Head up display for vehicle |
| CN106932966A (en) * | 2015-12-31 | 2017-07-07 | 上海微电子装备有限公司 | A kind of polarized-light lighting system and polarized illumination modulator approach |
-
2017
- 2017-10-31 CN CN201711048807.2A patent/CN109725466A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103293884A (en) * | 2012-02-24 | 2013-09-11 | 上海微电子装备有限公司 | Off-axis alignment system and method for photolithographic equipment |
| US20170045738A1 (en) * | 2015-07-17 | 2017-02-16 | Lg Electronics Inc. | Head up display for vehicle |
| CN106932966A (en) * | 2015-12-31 | 2017-07-07 | 上海微电子装备有限公司 | A kind of polarized-light lighting system and polarized illumination modulator approach |
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Application publication date: 20190507 |
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