CN109722653A - A kind of method that solwution method prepares witch culture tin oxide transparent conductive film - Google Patents

A kind of method that solwution method prepares witch culture tin oxide transparent conductive film Download PDF

Info

Publication number
CN109722653A
CN109722653A CN201910001788.0A CN201910001788A CN109722653A CN 109722653 A CN109722653 A CN 109722653A CN 201910001788 A CN201910001788 A CN 201910001788A CN 109722653 A CN109722653 A CN 109722653A
Authority
CN
China
Prior art keywords
conductive film
transparent conductive
tin oxide
oxide transparent
witch culture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201910001788.0A
Other languages
Chinese (zh)
Other versions
CN109722653B (en
Inventor
宁洪龙
张观广
姚日晖
张旭
袁炜健
刘贤哲
梁志豪
梁宏富
周尚雄
彭俊彪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
South China University of Technology SCUT
Original Assignee
South China University of Technology SCUT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by South China University of Technology SCUT filed Critical South China University of Technology SCUT
Priority to CN201910001788.0A priority Critical patent/CN109722653B/en
Publication of CN109722653A publication Critical patent/CN109722653A/en
Application granted granted Critical
Publication of CN109722653B publication Critical patent/CN109722653B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Non-Insulated Conductors (AREA)

Abstract

The invention belongs to transparent conductive film technical fields, disclose a kind of method that solwution method prepares witch culture tin oxide transparent conductive film.Tungsten powder and hydrogenperoxide steam generator are sufficiently reacted in ice-water bath, is diluted after filtering and impurity removing with distilled water, obtains tungstic acid;By SnCl2·2H2O is dissolved in anhydrous ethanol solvent, is stirred evenly, and stannous chloride solution is obtained;Tungstic acid and H are added dropwise into stannous chloride solution2O2Solution, it is that achromaticity and clarification is transparent that sonic oscillation, which is handled to solution, stands aging, obtains mixed liquor;The mixed liquor obtained by spin coating in the glass substrate cleaned up, annealing, obtains witch culture tin oxide transparent conductive film.The present invention is adulterated using wolframic acid and H is added2O2The stability and permeability for improving solution make in final cured film, and W is with the WO of+6 valences3Form exists, and improves the transmittance of film.

Description

A kind of method that solwution method prepares witch culture tin oxide transparent conductive film
Technical field
The invention belongs to transparent conductive film technical fields, and in particular to a kind of solwution method prepares witch culture tin oxide transparent The method of conductive film.
Background technique
Transparent conductive film is widely used in field of photoelectric technology.The transparent conductive material of commercial applications has indium tin at present Oxide (ITO), fluorine-doped tin oxide (FTO), Al-Doped ZnO (AZO) etc..Wherein ITO has excellent electric conductivity, height thoroughly Penetrate rate, easily etching the advantages that and be used widely.With the fast development of relevant industries, transparent conductive material demand is increasingly mentioned It rises, and the phosphide element in ITO is precious metal element, scarcity of resources, it is difficult to meet future development demand.Although the high electricity of FTO, AZO It leads, but transmissivity is lower.Meanwhile the common preparation process such as ITO, FTO, AZO is vacuum sputtering, equipment cost is high.Cause This, is badly in need of exploitation raw material resources and enriches, makes transparent conductive film at low cost, that electric conductivity is excellent.
SnO 2 thin film abundant raw material can be prepared by solwution method, and cost is relatively low.By suitably adulterate (such as W, F, Sb etc.) electric conductivity and transmission performance of SnO 2 thin film can be significantly improved.Solwution method preparation is mixed W SnO 2 thin film and is often adopted Use WCl6As dopant, the film of preparation although high conductance, but film transmission is low, cannot meet high-transmission rate very well It is required that.
Summary of the invention
In place of the above shortcoming and defect of the existing technology, the purpose of the present invention is to provide a kind of solution legal systems The method of standby witch culture tin oxide transparent conductive film.There is high electricity using the transparent conductive film that the method for the present invention is prepared It leads, highly transmissive advantage.
The object of the invention is achieved through the following technical solutions:
A kind of method that solwution method prepares witch culture tin oxide transparent conductive film, including following preparation step:
(1) tungsten powder and hydrogenperoxide steam generator are sufficiently reacted in ice-water bath, after reaction solution is filtered to remove residual impurity It is diluted with distilled water, obtains tungstic acid;
(2) by SnCl2·2H2O is dissolved in anhydrous ethanol solvent, is stirred evenly, and stannous chloride solution is obtained;
(3) tungstic acid and H are added dropwise into stannous chloride solution2O2Solution, sonic oscillation processing become until solution from muddiness It is transparent for achromaticity and clarification, aging is stood, mixed liquor is obtained;
(4) in the glass substrate cleaned up spin-coating step (3) mixed liquor, annealing, obtain witch culture oxidation Tin transparent conductive film.
Preferably, the concentration of tungstic acid described in step (1) is 0.8~1mol/L.
Preferably, the concentration of stannous chloride solution described in step (2) is 0.5~0.7mol/L.
Preferably, it is calculated in step (3) with Solute mass fraction, wolframic acid doping is the 2%~6% of total soluble matters quality.
Preferably, H described in step (3)2O2The additional amount of solution is the 5%~10% of mixed liquor total volume fraction.
Preferably, sonic oscillation described in step (3) processing time be 30~90min, stand aging time be 1~ 3 days.
Preferably, the revolving speed of spin coating described in step (4) is 3000~5000rpm, and spin-coating time is 30~50s.
Preferably, described in step (4) annealing refer to first at a temperature of 120~150 DEG C pre-anneal treatment 10~ Then 20min makes annealing treatment 60~120min at a temperature of 500~600 DEG C.
Preferably, the number of repetition of spin coating and annealing is 2~4 times in step (4).
The principle of the present invention are as follows:
Using W6+Replace part Sn4+The concentration of carrier in film can be promoted afterwards, promote electric conductivity.In SnCl2It is molten In liquid, wolframic acid is in SnCl after instilling wolframic acid2Reproducibility, the effect of the oxidisability of hydrogen peroxide is lower that series of chemical occurs, The complexing of last and ethyl alcohol, forms colorless and transparent colloidal sol.H2O2Introducing effectively prevent W6+It is reduced, it is penetrating to increase solution Property, it is eventually exhibited as improving the transmissivity of film.
Compared with prior art, the invention has the following advantages and beneficial effects:
The invention proposes using wolframic acid as dopant, traditional WCl can be replaced6Dopant.Simultaneously using wolframic acid doping H is added2O2The stability and permeability for improving solution make in final cured film, and W is with the WO of+6 valences3Form exists, thin Film conductivity preferably can improve the transmittance of film.
Detailed description of the invention
Fig. 1 is gained witch culture tin oxide transparent conductive film in embodiment 1 in the transmittance graph figure of visible light wave range.
Fig. 2 is gained witch culture tin oxide transparent conductive film in embodiment 2 in the transmittance graph figure of visible light wave range.
Specific embodiment
Present invention will now be described in further detail with reference to the embodiments and the accompanying drawings, but embodiments of the present invention are unlimited In this.
Embodiment 1
(1) it is sufficiently reacted in ice-water bath using 1.84g tungsten powder and 30% hydrogenperoxide steam generator of 8mL, is adopted after fully reacting Residual impurity is filtered out with 0.22 μm of filter tip, 1mol/L tungstic acid is then obtained using distilled water titration.
(2) 1.35g SnCl is weighed2·2H2O after being dissolved in 11mL ethyl alcohol, is added dropwise the 1mol/L tungstic acid of 120 μ L, then delays It is slow that 1mL 30%H is added dropwise2O2Solution, sonic oscillation 30min after sealing is until solution is clarified, and then solution left standstill aging 2 days, obtain SnCl is adulterated to the 2wt.% wolframic acid that solution concentration is 0.5mol/L2Ethanol solution, solution picture are as shown in Figure 1.
(3) it is cleaned by ultrasonic the glass substrate of 1cm × 1cm, film is prepared using the solution spin coating of step (2) after drying, revolves Revolving speed 3000rpm, spin-coating time 30s are applied, 120 DEG C of annealing 10min of Pre-annealing Temperature, are warming up to 500 DEG C of annealing after the completion of spin coating 90min。
(4) step (3) are repeated twice, 3 layers of plated film, obtain witch culture tin oxide transparent conductive film in total.Obtain film It is as shown in Figure 1 in the transmittance graph (glass substrate is blank control) of visible light wave range.
Film rectangular resistance is tested using four probe conduction rate testers, test obtains 1 square resistance of embodiment and is 435.2 ± 20 Ω/sq use step instrument measurement film thickness for 270.6 ± 10nm, and it is 1.18 × 10 that resistivity, which is calculated,-4 Ω·m。
Embodiment 2
(1) it is sufficiently reacted in ice-water bath using 1.84g tungsten powder and 30% hydrogenperoxide steam generator of 8mL, is adopted after fully reacting Residual impurity is filtered out with 0.22 μm of filter tip, 1mol/L tungstic acid is then obtained using distilled water titration.
(2) 1.89g SnCl is weighed2·2H2O after being dissolved in 11mL ethyl alcohol, is added dropwise the 1mol/L tungstic acid of 504 μ L, then delays It is slow that 1mL 30%H is added dropwise2O2Solution, sonic oscillation 90min after sealing is until solution is clarified, and then solution left standstill aging 3 days, obtain SnCl is adulterated to the 6wt.% wolframic acid that solution concentration is 0.7mol/L2Ethanol solution.
(3) it is cleaned by ultrasonic the glass substrate of 1cm × 1cm, film is prepared using the solution spin coating of step (2) after drying, revolves Revolving speed 5000rpm, spin-coating time 50s are applied, 150 DEG C of annealing 20min of Pre-annealing Temperature, are warming up to 600 DEG C of annealing after the completion of spin coating 120min。
(4) step (3) are repeated twice, 3 layers of plated film, obtain witch culture tin oxide transparent conductive film in total.Obtain film It is as shown in Figure 2 in the transmittance graph (glass substrate is blank control) of visible light wave range.
Film rectangular resistance is tested using four probe conduction rate testers, test obtains 2 square resistance of embodiment and is 105.2 ± 20 Ω/sq use step instrument measurement film thickness for 400.5 ± 10nm, and it is 4.21 × 10 that resistivity, which is calculated,-5 Ω·m。
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment Limitation, other any changes, modifications, substitutions, combinations, simplifications made without departing from the spirit and principles of the present invention, It should be equivalent substitute mode, be included within the scope of the present invention.

Claims (9)

1. a kind of method that solwution method prepares witch culture tin oxide transparent conductive film, it is characterised in that including preparing step as follows It is rapid:
(1) tungsten powder and hydrogenperoxide steam generator are sufficiently reacted in ice-water bath, reaction solution is filtered to remove to use after residual impurity and is steamed Distilled water dilution, obtains tungstic acid;
(2) by SnCl2·2H2O is dissolved in anhydrous ethanol solvent, is stirred evenly, and stannous chloride solution is obtained;
(3) tungstic acid and H are added dropwise into stannous chloride solution2O2Solution, sonic oscillation processing become nothing from muddiness until solution Color clear stands aging, obtains mixed liquor;
(4) in the glass substrate cleaned up spin-coating step (3) mixed liquor, annealing, it is saturating to obtain witch culture tin oxide Bright conductive film.
2. the method that a kind of solwution method according to claim 1 prepares witch culture tin oxide transparent conductive film, feature Be: the concentration of tungstic acid described in step (1) is 0.8~1mol/L.
3. the method that a kind of solwution method according to claim 1 prepares witch culture tin oxide transparent conductive film, feature Be: the concentration of stannous chloride solution described in step (2) is 0.5~0.7mol/L.
4. the method that a kind of solwution method according to claim 1 prepares witch culture tin oxide transparent conductive film, feature Be: step is calculated in (3) with Solute mass fraction, and wolframic acid doping is the 2%~6% of total soluble matters quality.
5. the method that a kind of solwution method according to claim 1 prepares witch culture tin oxide transparent conductive film, feature It is: H described in step (3)2O2The additional amount of solution is the 5%~10% of mixed liquor total volume fraction.
6. the method that a kind of solwution method according to claim 1 prepares witch culture tin oxide transparent conductive film, feature Be: the time of the processing of sonic oscillation described in step (3) is 30~90min, and the time for standing aging is 1~3 day.
7. the method that a kind of solwution method according to claim 1 prepares witch culture tin oxide transparent conductive film, feature Be: the revolving speed of spin coating described in step (4) is 3000~5000rpm, and spin-coating time is 30~50s.
8. the method that a kind of solwution method according to claim 1 prepares witch culture tin oxide transparent conductive film, feature Be: annealing described in step (4) refers to first 10~20min of pre-anneal treatment at a temperature of 120~150 DEG C, then exists 60~120min is made annealing treatment at a temperature of 500~600 DEG C.
9. the method that a kind of solwution method according to claim 1 prepares witch culture tin oxide transparent conductive film, feature Be: the number of repetition of spin coating and annealing is 2~4 times in step (4).
CN201910001788.0A 2019-01-02 2019-01-02 Method for preparing tungsten-doped tin oxide transparent conductive film by solution method Active CN109722653B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910001788.0A CN109722653B (en) 2019-01-02 2019-01-02 Method for preparing tungsten-doped tin oxide transparent conductive film by solution method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910001788.0A CN109722653B (en) 2019-01-02 2019-01-02 Method for preparing tungsten-doped tin oxide transparent conductive film by solution method

Publications (2)

Publication Number Publication Date
CN109722653A true CN109722653A (en) 2019-05-07
CN109722653B CN109722653B (en) 2020-10-27

Family

ID=66298117

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910001788.0A Active CN109722653B (en) 2019-01-02 2019-01-02 Method for preparing tungsten-doped tin oxide transparent conductive film by solution method

Country Status (1)

Country Link
CN (1) CN109722653B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113640169A (en) * 2021-06-23 2021-11-12 南方医科大学皮肤病医院(广东省皮肤病医院、广东省皮肤性病防治中心、中国麻风防治研究中心) WO based on doped Sb3Nanocrystalline QCM sensor and application thereof in monitoring of respiration and skin wound humidity
CN115247064A (en) * 2021-01-18 2022-10-28 浙江理工大学 Terbium-doped tin oxide film and preparation method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101413099A (en) * 2008-11-27 2009-04-22 复旦大学 Polycrystal tungsten-doped tin oxide transparent conductive oxide film and preparation thereof
CN103449508A (en) * 2013-07-31 2013-12-18 深圳大学 Tungsten doped tin dioxide nano powder and preparation method thereof
CN103695874A (en) * 2013-12-26 2014-04-02 武汉理工大学 Preparation method of intelligent temperature control color changing vanadium oxide film
WO2014183265A1 (en) * 2013-05-14 2014-11-20 Essilor International (Compagnie Generale D'optique) Fluorine-doped stannic oxide colloids and method for preparing same
CN105540650A (en) * 2016-02-25 2016-05-04 攀枝花学院 Tungsten-doped stannic oxide sol nanocrystalline and preparing method thereof
CN107614437A (en) * 2015-05-19 2018-01-19 埃西勒国际通用光学公司 The tin oxide colloidal suspension and methods for making them of witch culture

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101413099A (en) * 2008-11-27 2009-04-22 复旦大学 Polycrystal tungsten-doped tin oxide transparent conductive oxide film and preparation thereof
WO2014183265A1 (en) * 2013-05-14 2014-11-20 Essilor International (Compagnie Generale D'optique) Fluorine-doped stannic oxide colloids and method for preparing same
CN103449508A (en) * 2013-07-31 2013-12-18 深圳大学 Tungsten doped tin dioxide nano powder and preparation method thereof
CN103695874A (en) * 2013-12-26 2014-04-02 武汉理工大学 Preparation method of intelligent temperature control color changing vanadium oxide film
CN107614437A (en) * 2015-05-19 2018-01-19 埃西勒国际通用光学公司 The tin oxide colloidal suspension and methods for making them of witch culture
CN105540650A (en) * 2016-02-25 2016-05-04 攀枝花学院 Tungsten-doped stannic oxide sol nanocrystalline and preparing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115247064A (en) * 2021-01-18 2022-10-28 浙江理工大学 Terbium-doped tin oxide film and preparation method thereof
CN113640169A (en) * 2021-06-23 2021-11-12 南方医科大学皮肤病医院(广东省皮肤病医院、广东省皮肤性病防治中心、中国麻风防治研究中心) WO based on doped Sb3Nanocrystalline QCM sensor and application thereof in monitoring of respiration and skin wound humidity

Also Published As

Publication number Publication date
CN109722653B (en) 2020-10-27

Similar Documents

Publication Publication Date Title
CN109722653A (en) A kind of method that solwution method prepares witch culture tin oxide transparent conductive film
CN102849963B (en) One prepares WO 3the method of film
CN102943253A (en) Aluminum-doped zinc oxide (AZO) transparent conducting film and preparation method thereof
CN113161042B (en) Preparation method of sodium carboxymethylcellulose flexible transparent conductive film based on silver nanowires
CN107275006A (en) Redox graphene/SnO2Compound transparent electricity conductive film and preparation method thereof
CN106191775A (en) A kind of transparent conductive film and its preparation method and application
CN104492675A (en) Low-temperature electrochromic NiO film preparation method
CN108707997A (en) Redox graphene coats the preparation method of copper nano-wire conducing composite material
CN108376587A (en) A kind of high-performance stablizes the preparation method of copper nano-wire flexible transparent conductive film
CN110070965A (en) A kind of multi-layer-structure transparent conductive film and preparation method thereof
CN106477914A (en) A kind of preparation method of compound transparent electricity conductive film glass
CN106229037A (en) A kind of flexible composite transparent conductive film and preparation method thereof
CN108511133A (en) It is a kind of exempt from transfer, high cohesiveness metal grill transparent electrode preparation method
CN1868948B (en) Preparation method of indium tin oxide precusor size and ITO thin film
CN103500796B (en) Oxide-based transparent RRAM (Resistive Random Access Memory) and preparation method thereof
CN109030484B (en) Colorimetric humidity sensor
CN114957753B (en) High-strength copper sulfide/nanocellulose/polyvinyl alcohol near-infrared shielding heat insulation film and preparation method and application thereof
CN104498916B (en) Method used for preparing aluminium-doped zinc oxide thin film via electroless deposition
CN116354616A (en) TCO glass with high light transmittance and preparation method thereof
CN116371703A (en) Preparation method of ITO film suitable for flexible substrate and ITO film
TW588118B (en) Preparation of the electrochromic materials of nickel oxide thin film by electroless method
CN108374162A (en) A kind of preparation method of aluminum-doped zinc oxide transparent conductive film
Armstrong et al. Scalable Solution Processing of Cu: NiO x Nanoparticles for Perovskite Solar Cells
CN103345977B (en) A kind of preparation method of Ag doping ito thin film
CN209216605U (en) A kind of anti-reflection conductive film

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant