CN109702191B - Preparation method of high-precision dynamic balance rotary anode target material - Google Patents

Preparation method of high-precision dynamic balance rotary anode target material Download PDF

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CN109702191B
CN109702191B CN201811570067.3A CN201811570067A CN109702191B CN 109702191 B CN109702191 B CN 109702191B CN 201811570067 A CN201811570067 A CN 201811570067A CN 109702191 B CN109702191 B CN 109702191B
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anode target
die
rotary anode
dynamic balance
central
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CN109702191A (en
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张腾
淡新国
刘晨雨
温亚辉
赵娟
金波
王喆
张清
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Xi'an Refra Tungsten & Molybdenum Co ltd
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Xi'an Refra Tungsten & Molybdenum Co ltd
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Abstract

The invention discloses a preparation method of a high-precision dynamic balance rotary anode target material, which comprises the following steps: firstly, filling tungsten powder and molybdenum powder into a die cavity in a layered manner respectively, and pressing to obtain a pressed blank; secondly, placing the pressed compact into a sintering mold for high-temperature sintering to obtain a sintered blank; and thirdly, turning the sintered blank to obtain the rotary anode target. The invention accurately determines the central position of a pressed compact by arranging the positioning cone on the bottom surface of the lower die of the pressing die, and performs turning processing to prepare the rotary anode target by taking the central through hole corresponding to the central position in the sintered blank as a reference, thereby improving the accuracy of machining, ensuring the high-precision dynamic balance performance of the rotary anode target, and the rotary anode target prepared by the method has the advantages of uniform tungsten layer and molybdenum layer junction surface, concentricity not more than 0.2mm, maximum unbalance not more than 1.5 g-cm, short production flow, high yield and suitability for batch production of the rotary anode target.

Description

Preparation method of high-precision dynamic balance rotary anode target material
Technical Field
The invention belongs to the technical field of powder metallurgy, and particularly relates to a preparation method of a high-precision dynamic balance rotary anode target.
Background
With the rapid development of modern medicine and nondestructive testing fields, X-ray technology is widely used in testing equipment. The rotary anode target is a key part of the X-ray tube, the rotary anode is assembled on a wheel after being manufactured into a disc shape to form the rotary anode target, the rotary anode target rotates rapidly under the driving force, and emitted electrons and focused electrons bombard the surface of the rotary anode target to generate X rays. When the rotating anode target is bombarded by electrons to generate X rays, more than 98% of energy is converted into heat energy, and the heat energy is mainly concentrated on the anode and is distributed on the rotating target surface with a certain inclination angle to form a circular heated area. Because the heat radiation of the rotary anode target mainly depends on heat radiation in a vacuum environment and under the use condition of alternating heat load, the efficiency of the heat radiation is lower, and the temperature of the whole target body rises very high when the rotary anode target is continuously loaded. Tungsten has high melting point, high atomic number and good heat dissipation performance and is used as a target surface material, because tungsten has high specific gravity, large moment and long starting time during high-speed rotation, in order to lighten the weight of a target and increase the heat capacity of the target, molybdenum is made into a cone shape and used as a base material to be adhered with tungsten into a whole, and the roundness of a joint surface and the concentricity of layers are difficult to be considered for multilayer cone surface materials, so that the dynamic balance is poor. Under the action of driving force, the high-speed rotation causes mechanical vibration due to unbalance, so that the abrasion of a bearing is accelerated, the strength and the mechanical efficiency of parts are reduced, the balance performance of the target directly influences the X-ray control precision and the service life of the target, and the development of the high-precision dynamic balance rotary anode target is very necessary.
Patent CN101290852A discloses a preparation method of WMo graphite composite target material for a high-power X-ray tube, which adopts WMo powder and a bonding agent to be layered and then to be hot-pressed and sintered in a graphite mold, and practices prove that the target disc prepared by the method has high impurity content, uneven joint surface, more than 0.4mm concentricity and more than 3 g.mm dynamic balance. The patent with publication number CN106531599A, W-Re-Mo alloy rotary anode target material for X-ray tube and its preparation method, adopts powder metallurgy method to prepare rotary target material, the preparation of the target material needs hot isostatic pressing treatment, because of the limitation of furnace charging amount, the production efficiency is lower, straightening and shaping are easy to cause cracks due to deformation, the smoothness of the joint surface and the concentricity of the joint surface can not be controlled, the concentricity is more than 0.3mm, and the dynamic balance is more than 2 g.mm. Patent CN107081517A discloses 'an SPS diffusion welding method of TZM and WRe dissimilar refractory alloy', which has the advantages of high requirements on manufacturing conditions, incapability of mass production, high cost and low yield.
Disclosure of Invention
The technical problem to be solved by the present invention is to provide a method for preparing a high-precision dynamic balance rotary anode target, aiming at the defects of the prior art. The method accurately determines the central position of a pressed compact by arranging the positioning cone in the rotary anode target pressing die, and then performs turning processing on the central through hole corresponding to the central position in the sintered blank to prepare the rotary anode target, so that the machining accuracy is improved, and the high-precision dynamic balance performance of the rotary anode target is ensured.
In order to solve the technical problems, the invention adopts the technical scheme that: a preparation method of a high-precision dynamic balance rotary anode target is characterized by comprising the following steps:
step one, filling tungsten powder and molybdenum powder into a die cavity of a cylindrical pressing die in a layered manner respectively for pressing to obtain a cylindrical pressed blank with a conical bottom surface; the pressing die consists of an outer wall, an upper die and a lower die which is correspondingly matched with the upper die, the outer wall, the upper die and the lower die form a die cavity, a positioning cone is arranged at the center of the bottom surface of the lower die, concentric circular rings are arranged on the bottom surface around the positioning cone, and the peripheries of the concentric circular rings are gradually raised upwards to form conical surfaces;
step two, placing the pressed blank obtained in the step one into a sintering mold for high-temperature sintering to obtain a sintered blank; the size and the shape of the sintering mold are the same as those of the lower mold;
step three, turning the sintered blank obtained in the step two to obtain a rotary anode target material; in the turning process, a central through hole is machined by taking the top point of a conical surface formed by a positioning cone in a sintered blank as a center, and then turning is carried out by taking the central through hole as a reference; the concentricity of the rotating anode target is not more than 0.2mm, and the maximum unbalance is not more than 1.5 g-cm.
The invention takes tungsten powder and molybdenum powder as raw materials, firstly, starting from the pressing of the raw material powder, a pressing die with symmetrical structure is designed, the center position of the pressed compact is accurately determined by arranging the positioning cone on the bottom surface of the lower die of the pressing die, a reference plane and a center positioning hole are provided for the finish machining of the excircle of the subsequent pressed compact, then a sintering die with the same size and shape as the lower die of the pressing die is adopted to load a pressed blank for high-temperature sintering, the stability of the shape of the pressed blank is ensured, the pressed blank deformation in the high-temperature sintering process is avoided, the size accuracy of the sintered blank is improved, finally, a central through hole is processed by taking the peak of a conical surface formed by a positioning cone in the sintered blank as the center, and turning processing is carried out by taking the central through hole as the reference to obtain the rotary anode target material, because the datum positioning is accurate, the machining accuracy is improved, the machining allowance is reduced, and the high-precision dynamic balance performance of the rotary anode target is ensured; meanwhile, the preparation method realizes the high-precision dynamic balance performance of the rotary anode target material by adjusting the arrangement of the mould, thereby reducing the number of rings for dynamic balance adjustment, lowering the production cost, improving the quality and the production efficiency of the rotary anode target material and being easy to realize industrial production.
The preparation method of the high-precision dynamic balance rotary anode target is characterized in that in the step one, the included angle between the conical surface of the lower die and the bottom surface of the lower die is 5-12 degrees, the diameter of the outer circle of the concentric torus is 5-15 mm, the diameter of the bottom surface of the positioning cone is 3-6 mm, and the included angle between the conical surfaces of the positioning cones is 120 degrees. The parameter setting of above-mentioned lower mould has satisfied the structural requirement of anode target, and the bottom surface diameter of location awl is less than the excircle diameter of concentric torus simultaneously, has ensured the machining allowance of anode target, and the bottom surface diameter of location awl is unanimous with the diameter of the drill bit of follow-up processing through-hole adoption, and the conical surface contained angle of location awl is 120 unanimous with the contained angle on drill bit top that follow-up processing through-hole adopted to the drill bit is more laminated with the conical surface in the course of working of follow-up through-hole, has ensured the control of precision.
The preparation method of the high-precision dynamic balance rotary anode target is characterized in that the high-temperature sintering temperature in the second step is 2150-2300 ℃, and the atmosphere adopted by the high-temperature sintering is hydrogen or vacuum. The density of the sintered blank and the strength of the inner powder joint surface are improved by adopting the temperature for sintering.
The preparation method of the high-precision dynamic balance rotary anode target is characterized in that in the third step, the section of the central through hole is circular, and the aperture of the central through hole is 3-7 mm. The aperture of the central through hole is larger than the diameter of the bottom surface of the positioning cone, so that the processing precision and the processing allowance are ensured.
Compared with the prior art, the invention has the following advantages:
1. the invention starts from the links of pressing, sintering, machining and the like, firstly, the central position of a pressed blank is accurately determined by arranging the positioning cone on the bottom surface of the lower die of the pressing die, the machining allowance and the machining positioning accuracy are ensured by arranging the concentric annular surface and the conical surface, then, the pressed blank is loaded by the sintering die with the size and the shape completely the same as those of the lower die of the pressing die for high-temperature sintering, and then, the turning machining is carried out by taking the peak of the conical surface formed by the positioning cone in the sintered blank as the central through hole for central machining as the reference, so that the machining accuracy is increased, and the high-accuracy dynamic balance performance of the rotary anode target is ensured.
2. According to the invention, the high-precision dynamic balance performance of the rotary anode target is realized by adjusting the arrangement of the die, so that the number of rings for dynamic balance adjustment is reduced, the production cost is reduced, the quality and the production efficiency of the rotary anode target are improved, and the industrial production is easy to realize.
3. The junction surface of the tungsten layer and the molybdenum layer of the rotary anode target material prepared by the invention is uniform and smooth, the concentricity of the tungsten layer and the molybdenum layer is not more than 0.2mm, and the maximum unbalance is not more than 1.5 g.cm, so that the rotary anode target material is greatly superior to the dynamic balance performance of the rotary anode target material prepared by the prior art, the mechanical vibration of a rotor is reduced, the abrasion of a bearing is reduced, and the strength and the mechanical efficiency of parts are improved.
4. The rotary anode target material prepared by the invention is near-net-shaped, has less processing amount, low cost and simple positioning, and is suitable for batch production.
5. The die for preparing the rotary anode target material is simple, the single charging amount is large, the mass production is suitable, and the comprehensive cost is low.
The technical solution of the present invention is further described in detail by the accompanying drawings and examples.
Drawings
Fig. 1 is a schematic view of the structure of a press die of the present invention.
Fig. 2 is a top view of a compaction tool according to the invention.
Fig. 3 is a schematic structural view of the sintering die of the present invention.
Fig. 4 is a top view of a sintering die of the present invention.
Fig. 5 is a schematic structural view of a rotary anode target according to the present invention.
Fig. 6 is a left side view of a rotary anode target of the present invention.
Fig. 7 is a photograph of a rotary anode target prepared in example 2 of the present invention.
Description of the reference numerals
1-pressing a mould; 1-outer wall; 1-2-upper die;
1-3-lower die; 1-3-1-positioning cone; 1-3-2-concentric torus;
1-3-cone; 2-sintering the mould; 3-central through hole.
Detailed Description
As shown in fig. 1 and 2, a pressing mold used in embodiments 1 to 3 of the present invention is composed of an outer wall 1-1, an upper mold 1-2, and a lower mold 1-3 correspondingly matched with the upper mold 1-2, wherein the outer wall 1-1, the upper mold 1-2, and the lower mold 1-3 form a mold cavity, a positioning cone 1-3-1 is disposed at the center of the bottom surface of the lower mold 1-3, a concentric circular ring 1-3-2 is disposed on the bottom surface around the positioning cone 1-3-1, and the periphery of the concentric circular ring 1-3-2 gradually protrudes upward to form a conical surface 1-3-3.
As shown in fig. 2 and 3, the sintering mold 2 used in examples 1 to 3 of the present invention has the same size and shape as the lower mold 1 to 3.
As shown in fig. 5 and 6, in examples 1 to 3 of the present invention, turning was performed using the central through hole as a reference for machining the positioning hole, and a rotating anode target was prepared.
Example 1
The preparation method of this example includes the following steps:
step one, uniformly mixing tungsten powder and molybdenum powder, and filling the mixture into a die cavity of a cylindrical pressing die 1 for pressing to obtain a pressed blank; the pressing die 1 consists of an outer wall 1-1, an upper die 1-2 and a lower die 1-3 correspondingly matched with the upper die 1-2, the outer wall 1-1, the upper die 1-2 and the lower die 1-3 form a die cavity, a positioning cone 1-3-1 is arranged at the center of the bottom surface of the lower die 1-3, a concentric circular ring surface 1-3-2 is arranged on the bottom surface around the positioning cone 1-3-1, and the periphery of the concentric circular ring surface 1-3-2 gradually protrudes upwards to form a conical surface 1-3-3; the included angle between the conical surface 1-3-3 of the lower die 1-3 and the bottom surface of the lower die 1-3 is 5 degrees, the diameter of the concentric torus 1-3-2 is 15mm, the diameter of the bottom surface of the positioning cone 1-3-1 is 6mm, and the included angle between the conical surfaces of the positioning cones 1-3-1 is 120 degrees;
step two, putting the pressed blank obtained in the step one into a sintering die 2 for high-temperature sintering to obtain a sintered blank; the size and the shape of the sintering mold 2 are the same as those of the lower mold 1-3; the high-temperature sintering temperature is 2150 ℃, and the atmosphere adopted by the high-temperature sintering is hydrogen atmosphere;
step three, turning the sintered blank obtained in the step two to obtain a rotary anode target material; in the turning process, a central through hole 3 with a circular section and a 7mm aperture is machined by taking the vertex of a conical surface formed by a positioning cone 1-3-1 in a sintered blank as a center, and then turning is carried out by taking the central through hole 3 as a reference; the concentricity of the rotating anode target is 0.2mm, and the maximum unbalance amount is 1.5g cm.
Example 2
The preparation method of this example includes the following steps:
step one, uniformly mixing tungsten powder and molybdenum powder, and filling the mixture into a die cavity of a cylindrical pressing die 1 for pressing to obtain a pressed blank; the pressing die 1 consists of an outer wall 1-1, an upper die 1-2 and a lower die 1-3 correspondingly matched with the upper die 1-2, the outer wall 1-1, the upper die 1-2 and the lower die 1-3 form a die cavity, a positioning cone 1-3-1 is arranged at the center of the bottom surface of the lower die 1-3, a concentric circular ring surface 1-3-2 is arranged on the bottom surface around the positioning cone 1-3-1, and the periphery of the concentric circular ring surface 1-3-2 gradually protrudes upwards to form a conical surface 1-3-3; the included angle between the conical surface 1-3-3 of the lower die 1-3 and the bottom surface of the lower die 1-3 is 12 degrees, the diameter of the concentric torus 1-3-2 is 5mm, the diameter of the bottom surface of the positioning cone 1-3-1 is 3mm, and the included angle between the conical surfaces of the positioning cones 1-3-1 is 120 degrees;
step two, putting the pressed blank obtained in the step one into a sintering mold 2 for vacuum high-temperature sintering to obtain a sintered blank; the size and the shape of the sintering mold 2 are the same as those of the lower mold 1-3; the temperature of the high-temperature sintering is 2300 ℃;
step three, turning the sintered blank obtained in the step two to obtain a rotary anode target material, as shown in fig. 7; in the turning process, a central through hole 3 with a circular section and a 3mm aperture is machined by taking the vertex of a conical surface formed by a positioning cone 1-3-1 in a sintered blank as a center, and then turning is carried out by taking the central through hole 3 as a reference; the concentricity of the rotating anode target is 0.15mm, and the maximum unbalance amount is 1.3g cm.
Example 3
The preparation method of this example includes the following steps:
step one, uniformly mixing tungsten powder and molybdenum powder, and filling the mixture into a die cavity of a cylindrical pressing die 1 for pressing to obtain a pressed blank; the pressing die 1 consists of an outer wall 1-1, an upper die 1-2 and a lower die 1-3 correspondingly matched with the upper die 1-2, the outer wall 1-1, the upper die 1-2 and the lower die 1-3 form a die cavity, a positioning cone 1-3-1 is arranged at the center of the bottom surface of the lower die 1-3, a concentric circular ring surface 1-3-2 is arranged on the bottom surface around the positioning cone 1-3-1, and the periphery of the concentric circular ring surface 1-3-2 gradually protrudes upwards to form a conical surface 1-3-3; the included angle between the conical surface 1-3-3 of the lower die 1-3 and the bottom surface of the lower die 1-3 is 8 degrees, the diameter of the concentric torus 1-3-2 is 10mm, the diameter of the bottom surface of the positioning cone 1-3-1 is 5mm, and the included angle between the conical surfaces of the positioning cones 1-3-1 is 120 degrees;
step two, putting the pressed blank obtained in the step one into a sintering die 2 for high-temperature sintering to obtain a sintered blank; the size and the shape of the sintering mold 2 are the same as those of the lower mold 1-3; the high-temperature sintering temperature is 2200 ℃, and the atmosphere adopted by the high-temperature sintering is hydrogen;
step three, turning the sintered blank obtained in the step two to obtain a rotary anode target material; in the turning process, a central through hole 3 with a circular section and a 5mm aperture is machined by taking the vertex of a conical surface formed by a positioning cone 1-3-1 in a sintered blank as a center, and then turning is carried out by taking the central through hole 3 as a reference; the concentricity of the rotating anode target is 0.1mm, and the maximum unbalance amount is 1.1g cm.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention in any way. Any simple modification, change and equivalent changes of the above embodiments according to the technical essence of the invention are still within the protection scope of the technical solution of the invention.

Claims (4)

1. A preparation method of a high-precision dynamic balance rotary anode target is characterized by comprising the following steps:
step one, filling tungsten powder and molybdenum powder into a die cavity of a cylindrical pressing die (1) in a layered manner respectively for pressing to obtain a cylindrical pressed blank with a conical bottom surface; the pressing die (1) consists of an outer wall (1-1), an upper die (1-2) and a lower die (1-3) which is correspondingly matched with the upper die (1-2), the outer wall (1-1), the upper die (1-2) and the lower die (1-3) form a die cavity, a positioning cone (1-3-1) is arranged at the center of the bottom surface of the lower die (1-3), a concentric annular surface (1-3-2) is arranged on the bottom surface around the positioning cone (1-3-1), and the periphery of the concentric annular surface (1-3-2) gradually protrudes upwards to form a conical surface (1-3-3);
step two, placing the pressed blank obtained in the step one into a sintering die (2) for high-temperature sintering to obtain a sintered blank; the size and the shape of the sintering mold (2) are the same as those of the lower mold (1-3);
step three, turning the sintered blank obtained in the step two to obtain a rotary anode target material; in the turning process, the central through hole (3) is machined by taking the vertex of a conical surface formed by the positioning cone (1-3-1) in the sintered blank as a center, and then turning is carried out by taking the central through hole (3) as a reference; the concentricity of the rotating anode target is not more than 0.2mm, and the maximum unbalance is not more than 1.5 g-cm.
2. The preparation method of the high-precision dynamic balance rotating anode target material according to claim 1, wherein in the first step, an included angle between the conical surface (1-3-3) of the lower die (1-3) and the bottom surface of the lower die (1-3) is 5-12 degrees, the diameter of the outer circle of the concentric torus (1-3-2) is 5-15 mm, the diameter of the bottom surface of the positioning cone (1-3-1) is 3-6 mm, and the included angle between the conical surfaces of the positioning cone (1-3-1) is 120 degrees.
3. The method for preparing a high-precision dynamic balance rotary anode target material according to claim 1, wherein the temperature of the high-temperature sintering in the second step is 2150 ℃ to 2300 ℃, and the atmosphere used for the high-temperature sintering is hydrogen or vacuum.
4. The method for preparing a high-precision dynamic balance rotary anode target material according to claim 2, wherein the section of the central through hole (3) in the step three is circular, and the aperture of the central through hole (3) is 3mm to 7 mm.
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CN1048117C (en) * 1993-04-13 2000-01-05 西北有色金属研究院 Dished molybdenum-base tungsten target manufacturing method
AU4822499A (en) * 1998-06-15 2000-01-05 Boeing Company, The Making particulates of controlled dimensions
CN101290852B (en) * 2008-06-03 2010-06-02 西安理工大学 Preparing method of WMo mineral carbon composited anode target material for X ray tube with great power
CN103696695B (en) * 2013-12-19 2016-08-17 北京科技大学 A kind of submarine oil spiral bit and preparation technology thereof
CN204294929U (en) * 2014-11-28 2015-04-29 株洲硬质合金集团有限公司 With the extrusion molding dies of inner spiral hole pole
CN106531599B (en) * 2016-10-28 2018-04-17 安泰天龙钨钼科技有限公司 A kind of X-ray tube W-Re molybdenum alloy rotary anode target and preparation method thereof
CN107081517B (en) * 2017-06-28 2019-11-29 合肥工业大学 A kind of law temperature joining method of TZM and WRe different alloys

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