CN109683310A - A kind of super surface design method of cascade that THz wave ultra wide band achromatism focuses - Google Patents
A kind of super surface design method of cascade that THz wave ultra wide band achromatism focuses Download PDFInfo
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- CN109683310A CN109683310A CN201910024241.2A CN201910024241A CN109683310A CN 109683310 A CN109683310 A CN 109683310A CN 201910024241 A CN201910024241 A CN 201910024241A CN 109683310 A CN109683310 A CN 109683310A
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Abstract
The invention proposes the super surface design methods of cascade that a kind of THz wave ultra wide band achromatism focuses, it is first determined target wavelength bandwidth range, numerical aperture and the focal length size on super surface；Later according to formula and numerical aperture is focused, determine that phase number corresponding to the THz wave of different wave length is distributed；Then according to the distribution of phase number, it determines the corresponding phase difference value in target wavelength bandwidth range boundary, parametrization scanning is carried out by simulation software, the structural parameters met at the super surface different location of 1/ λ linear phase relationship are found, which matches with broadband facet phases difference；The structure at different location is rotated into angle, θ again later, to match the focusing phase distribution of the maximum wavelength in target wavelength bandwidth range；Super surface is finally prepared, using the identical super surface of at least two panels, the super surface of cascade is combined into the stack manner that upper and lower alignment keys are closed.The present invention is to realize the feasible scheme of Terahertz ultra wide band achromatism and large-numerical aperture focusing.
Description
Technical field
It is super in ultra wide band achromat-design technical field more particularly to a kind of THz wave the invention belongs to cascade super surface
The super surface design method of cascade that broadband achromatism focuses.
Background technique
Terahertz (THz) wave refers to electromagnetic wave of the frequency in 0.1THz to 10THz range, wavelength between infrared waves with
Between microwave.In recent years, as various countries increase the research and development to THz source and detector, people has been excited to expand THz wave
Carry out the interest of application study into the fields such as biomedicine, non-destructive testing, spectral imaging technology, wherein THz wave focuses saturating
Mirror is important function element in Terahertz detection and imaging field, but the color difference problem of condenser lens be still influence detection and
An important factor for image quality, is simultaneously undecided always.It is generally single-frequency point focusing effect that existing THz wave, which focuses super surface,
Lens.Super surface is usually made of sub-wavelength structure unit, and the response with the unexistent special electromagnetic field of nature material is special
Property, new visual angle and direction (Nano Letters, 12 (11), 5750-5755,2012) are provided for regulation electromagnetic wave, too
The extensive research of hertz frequency range provides a possibility that very big for the research and development and application of high-performance THz wave functional device
(Optics Letters,42(21),4494-4497,2017).Along with the rapid development of THz wave technology, broadband colour killing
The important function that difference focuses in imaging and substance detection becomes urgent problem to be solved.
Although some THz wave condenser lens designs exist in the prior art, such lens are only that few frequency point realizes poly-
Coke design, solves the problems, such as color difference and numerical aperture is small equal to imaging and detect effect and limit to these design methods.This
Outside, the super Surface Numerical aperture of existing THz wave focusing is smaller, and compared with common coloured aplanat and there is no apparent excellent
Gesture.
Summary of the invention
The purpose of the present invention is to provide a kind of THz wave ultra wide band achromatism focus the super surface design method of cascade,
It solves problems of the prior art, is to realize that Terahertz ultra wide band achromatism and large-numerical aperture focus practical
Design method.To achieve the above object, the technical scheme adopted by the invention is as follows:
A kind of super surface design method of cascade that THz wave ultra wide band achromatism focuses, comprising the following steps:
Step S1: target wavelength bandwidth range, numerical aperture and the focal length size on super surface are determined；
Step S2: according to formula and numerical aperture is focused, phase number corresponding to the THz wave of different wave length is determined
Distribution；
Step S3: the distribution of the phase number as described in step S2 determines target wavelength according to the distribution of phase number
The corresponding phase difference value in bandwidth range boundary；
Step S4: carrying out parametrization scanning by simulation software, and the super surface for finding the 1/ λ linear phase relationship that meets is different
Structural parameters at position, the structural parameters are matched with broadband facet phases difference；Step S5: geometry phase relation formula is utilized
φPBStructure at the different location is rotated angle, θ, to match the maximum wave in the target wavelength bandwidth range by=2 θ
Long focusing phase distribution；
Step S6: it is based on step S1~S5, the super surface is prepared, using the identical super table of at least two panels
Face is combined into the super surface of cascade in a manner of stacked on top.
Preferably, in step s 2, the focusing formula is
Preferably, in step s 4, the structural parameters include length and width.
Preferably, in step s 6, the super surface of cascade includes multiple structural units；The period of the structural unit is
55 μm~65 μm.
Preferably, the substrate thickness on the super surface, depth are respectively 145 μm~155 μm, 245 μm~255 μm.
Preferably, the substrate thickness of the substrate thickness on the super surface is 145 μm~155 μm.
Preferably, the super surface uses high resistant silicon materials.
Preferably, in step s 6, the super surface is prepared through deep silicon etching technique.
Preferably, in step s 6, super at the cascade by the process step combinations of alignment and bonding between the super surface
Surface.
Compared with prior art, advantages of the present invention are as follows: the super surface of the cascade is made of high resistant silicon materials, through deep silicon etching
Technique, engineer and meticulously arrangement etching, realize the focusing of ultra wide band achromatism and large-numerical aperture focuses, to expand
Achromatic lens is imaged in THz wave field and the application of biological detection.
Detailed description of the invention
Fig. 1 is the stream for the super surface design method of cascade that the THz wave ultra wide band achromatism of one embodiment of the invention focuses
Cheng Tu；
Fig. 2 (a) is the corresponding efficiency of type I typical structure diagram and linear phase relational graph on the super surface of cascade in Fig. 1；
Fig. 2 (b) is the typical structure diagram in Fig. 2 (a)；
Fig. 2 (c) is the corresponding efficiency of Type II typical structure diagram and linear phase relationship on the super surface of cascade in Fig. 1
Figure；
Fig. 2 (d) is the typical structure diagram in Fig. 2 (c)；
Fig. 3 is the structural schematic diagram on the super surface of cascade in Fig. 1；
Fig. 4 is the super surface achromatism effect picture of cascade in Fig. 1.
Specific embodiment
The super surface design side of cascade that THz wave ultra wide band achromatism of the invention is focused below in conjunction with schematic diagram
Method is described in more detail, and which show the preferred embodiment of the present invention, it should be appreciated that those skilled in the art can repair
Change invention described herein, and still realizes advantageous effects of the invention.Therefore, following description should be understood as this
Field technical staff's is widely known, and is not intended as limitation of the present invention.
As shown in Figure 1, the super surface design method of cascade that a kind of THz wave ultra wide band achromatism focuses, including following step
Rapid S1~S6, specific as follows:
Step S1: design and determine the target wavelength bandwidth range (λ on super surfacemin, λmax), numerical aperture (Numerical
Aperture, NA) and focal length (f) size；The achromatic lens of any focal length can be theoretically designed, it is in the present embodiment, burnt
Away from for f=12mm；The achromatism of unlimited width can be theoretically designed, shows (0.5THz, 1.1THz) frequency model in the present embodiment
It is focused on same focal plane in enclosing with the achromatism of dextrorotation (left-handed) circular polarization outgoing wave when left-handed (dextrorotation) circular polarization incident；
Numerical aperture refers to that NA=sin α, α refer to angular aperture, is that the effective radius of the focus and lens on lens axis is formed by angle
Degree
Step S2: according to focusing formula and numerical aperture (NA), when the THz wave incidence of any wavelength, super surface lens
Under phase number corresponding to different location, the i.e. THz wave of arbitrary target wavelength are incident, the phase distribution on the super surface；Its
In, focusing formula is formula (1):
In formula (1), x, y respectively indicate the coordinate of super surface lens different location, and f indicates focal length, λmax、λminWith λ points
Not any wavelength in two boundary wavelengths of expression-target band and frequency band.First item indicates λ in formulamaxIt is corresponding initial
Phase, the focal length and λ that all wavelengths are realized in the broadband range that super surface is realizedmaxCorresponding focal length is equal；Section 2 table
Show the phase and λ of any wavelength in frequency bandmaxPhase between phase difference.
Step S3: by the distribution of the phase number in step S2, determine color difference phenomenon in target wavelength bandwidth range by
Section 2 causes, and the phase difference and 1/ λ are in a linear relationship；When λ is equal to λminWhen, it can be by compensating the phase difference straight line
On (1/ λmax,φλmax) and (1/ λmin,φλmin) realize target band in continuous spectrum phase difference compensation, it is thus determined that (λmin,
λmax) in meet the structural parameters of phase difference value be crucial.
Step S4: parametrization scanning is carried out by simulation software Lumerical FDTD, searching meets 1/ λ linear phase pass
Structural parameters at the super surface different location of system,；Because the structural parameters of super surface different location are in λminAnd λmaxPlace there are
Different phase difference values, but all meet the linear relationship of 1/ λ, by Lumerical FDTD software, determine suitable structure ginseng
Number is with the phase difference value for the specific position that coincide.Wherein, which includes length and width.In this step, mentality of designing
It is according to the structural parameters of the color difference Selecting phasing phase matched at lens different location, and in the parameter for meeting phase condition
The highest one group of parameter (such as table 1) of efficiency of selection obtains all optimum translation efficiency by table 1 and meets frequency linearity phase requirements
Cellular construction parameter and compensation phase, the linear phase relationship of two kinds of typical forms is as shown in blue line in Fig. 2, red line
The corresponding transfer efficiency of representative structure.
Table 1 cascades on super surface for the parameter of all structural units of phase compensation and compensation phase
Wherein, in table 1, shown in rod structure, hole structural unit such as Fig. 2 (a)~Fig. 2 (d).
Step S5: the initial phase that focusing is matched with the incoherent geometric phase of wavelength, geometry phase relation are utilized
FormulaStructure at different location is rotated into angle, θ, to match the poly- of the maximum wavelength in target wavelength bandwidth range
Burnt phase distribution；In the step, the compensation phase in step S4 is modified and is coincide using geometric phase realization, specifically such as
Shown in table 2.
The structural parameters and rotation angle selected at 2 radius different location of table
In table 2, radius refers to round lens center to the distance at edge.
Step S6: being based on step S1~S5, super surface is prepared, using the identical super surface of two panels, to be aligned up and down
The stack manner of bonding is combined into the super surface of cascade.It is identical using multi-disc in other embodiments except this embodiment
Super surface cascade, can theoretically design the achromatism of unlimited width.In the present embodiment, cascading super surface includes multiple structures
Unit；As shown in figure 3, the period p of structural unit is 60 μm, the substrate thickness h on super surface is 150 μm, and the structure on super surface is deep
Spending t is 250 μm.In other embodiments except this embodiment, period p can be 55 μm, 56 μm, 58 μm, 59 μm and 60 μm.
The substrate thickness on super surface can be 145 μm, 146 μm, 147 μm, 150 μm and 155 μm；The depth on super surface can for 245 μm,
246 μm, 247 μm, 248 μm, 249 μm, 250 μm and 255 μm.
In the present embodiment, super surface uses high resistant silicon materials.Super surface sample material is High Resistivity Si, it is in THz wave
Frequency range has good transparency, smaller to the absorption of THz wave；
In the present embodiment, super surface is prepared through deep silicon etching technique.
In the present embodiment, it is prepared by the process of alignment and bonding through complicated micro Process path combination between super surface
At the super surface of cascade.
The present invention in use, THz wave is incident on the super surface lens of cascade with dextrorotation (left-handed) circularly polarized light,
The focusing effect of left-handed (dextrorotation) circularly polarized light in broadband range is obtained in transmission direction, wherein design principle is to utilize geometry phase
Position is realized that color difference is eliminated and obtains ultra wide band with the method that resonance phase combines and is focused, and utilizes the technique system of deep silicon etching later
Two super surfaces simultaneously are merged to form the super surface of cascade by standby super surface with silicon-silicon alignment keys, followed by probe scanning system pair
Sample carries out the evolved behavior of test transmitted wave, obtains the ultra wide band achromatism focusing effect of the example by data processing,
As shown in Figure 3.In Fig. 3, be from left to right followed successively by 0.5THz, 0.6THz, 0.7THz, 0.8THz, 0.9THz, 1.0THz,
The corresponding ultra wide band achromatism focusing effect figure of 1.1THz.From figure 3, it can be seen that in 0.5THz to 1.1THz range, it should
Device may be implemented achromatism to THz wave and focus, and focal length f=12mm, finally demonstrate the effect of ultra wide band achromatism focusing
Fruit.
To sum up, the super surface design method of cascade focused in THz wave ultra wide band achromatism provided in an embodiment of the present invention
In, it designs first and prepares super surface, be later the identical super surface of the two panels of substrate with aligned stack using High Resistivity Si
For mode to realize that ultra wide band achromatism focuses, this super surface design method of cascade can effectively reduce deep silicon etching preparation
The big difficult point of depth-to-width ratio in sample, the function of the final achromatism ultra-thin lens for realizing ultra-wide broadband and more large-numerical aperture.
The above is only a preferred embodiment of the present invention, does not play the role of any restrictions to the present invention.Belonging to any
Those skilled in the art, in the range of not departing from technical solution of the present invention, to the invention discloses technical solution and
Technology contents make the variation such as any type of equivalent replacement or modification, belong to the content without departing from technical solution of the present invention, still
Within belonging to the scope of protection of the present invention.
Claims (9)
1. the super surface design method of cascade that a kind of THz wave ultra wide band achromatism focuses, which is characterized in that including following step
It is rapid:
Step S1: target wavelength bandwidth range, numerical aperture and the focal length size on super surface are determined；
Step S2: according to formula and numerical aperture is focused, determine that phase number corresponding to the THz wave of different wave length is distributed；
Step S3: the distribution of the phase number as described in step S2 determines target wavelength bandwidth according to the distribution of phase number
The corresponding phase difference value of range boundary；
Step S4: parametrization scanning is carried out by simulation software, finds the super surface different location for the 1/ λ linear phase relationship that meets
The structural parameters at place, the structural parameters are matched with broadband facet phases difference；
Step S5: geometry phase relation formula φ is utilizedPB=2 θ, by the different location structure rotate angle, θ, with
Focusing phase distribution with the maximum wavelength in the target wavelength bandwidth range；
Step S6: being based on step S1~S5, prepare the super surface, using the identical super surface of at least two panels, with
The stack manner of alignment bonding is combined into the super surface of cascade up and down.
2. the super surface design method of cascade that THz wave ultra wide band achromatism according to claim 1 focuses, feature
It is, in step s 2, the focusing formula is
3. the super surface design method of cascade that THz wave ultra wide band achromatism according to claim 1 focuses, feature
It is, in step s 4, the structural parameters include length and width.
4. the super surface design method of cascade that THz wave ultra wide band achromatism according to claim 1 focuses, feature
It is, in step s 6, the super surface of cascade includes multiple structural units；The period of the structural unit is 55 μm~65 μ
m。
5. the super surface design method of cascade that THz wave ultra wide band achromatism according to claim 1 focuses, feature
It is, the substrate thickness on the super surface, depth are respectively 145 μm~155 μm, 245 μm~255 μm.
6. the super surface design method of cascade that THz wave ultra wide band achromatism according to claim 1 focuses, feature
It is, the substrate thickness of the substrate thickness on the super surface is 145 μm~155 μm.
7. the super surface design method of cascade that THz wave ultra wide band achromatism according to claim 1 focuses, feature
It is, the super surface uses high resistant silicon materials.
8. the super surface design method of cascade that THz wave ultra wide band achromatism according to claim 1 focuses, feature
It is, in step s 6, the super surface is prepared through deep silicon etching technique.
9. the super surface design method of cascade that THz wave ultra wide band achromatism according to claim 1 focuses, feature
It is, in step s 6, by the process step combinations of alignment and bonding at the super surface of cascade between the super surface.
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| CN110275327A (en) * | 2019-06-25 | 2019-09-24 | 复旦大学 | The surface phasmon wavefront modulator of the incident chirality dependence of rotatory polarization |
| CN111158070A (en) * | 2020-02-25 | 2020-05-15 | 南京大学 | Double-layer achromatic lens based on all-dielectric super-surface |
| CN111399262A (en) * | 2020-04-27 | 2020-07-10 | 南京南辉智能光学感控研究院有限公司 | Adjustable terahertz lens and preparation method and application thereof |
| CN111474611A (en) * | 2020-06-05 | 2020-07-31 | 浙江舜宇光学有限公司 | Super lens group and super imaging device |
| CN111830620A (en) * | 2020-07-21 | 2020-10-27 | 上海理工大学 | Ultrathin transmission-type terahertz circularly-polarized asymmetric focusing lens |
| CN113378372A (en) * | 2021-06-04 | 2021-09-10 | 南京南辉智能光学感控研究院有限公司 | Design method of terahertz vortex processor, product obtained by design method and application of product |
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| CN114815232A (en) * | 2022-06-28 | 2022-07-29 | 中山大学 | Design method of achromatic lens based on cascade super surface and achromatic lens |
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|---|---|---|---|---|
| CN110275327A (en) * | 2019-06-25 | 2019-09-24 | 复旦大学 | The surface phasmon wavefront modulator of the incident chirality dependence of rotatory polarization |
| CN111158070A (en) * | 2020-02-25 | 2020-05-15 | 南京大学 | Double-layer achromatic lens based on all-dielectric super-surface |
| CN111158070B (en) * | 2020-02-25 | 2021-09-28 | 南京大学 | Double-layer achromatic lens based on all-dielectric super-surface |
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| CN111399262A (en) * | 2020-04-27 | 2020-07-10 | 南京南辉智能光学感控研究院有限公司 | Adjustable terahertz lens and preparation method and application thereof |
| CN111399262B (en) * | 2020-04-27 | 2023-10-31 | 南京南辉智能光学感控研究院有限公司 | Adjustable terahertz lens and preparation method and application thereof |
| CN111474611A (en) * | 2020-06-05 | 2020-07-31 | 浙江舜宇光学有限公司 | Super lens group and super imaging device |
| CN111474611B (en) * | 2020-06-05 | 2023-08-08 | 浙江舜宇光学有限公司 | Superlens group and superimaging device |
| CN111830620A (en) * | 2020-07-21 | 2020-10-27 | 上海理工大学 | Ultrathin transmission-type terahertz circularly-polarized asymmetric focusing lens |
| EP4027174A1 (en) * | 2021-01-12 | 2022-07-13 | Samsung Electronics Co., Ltd. | Meta-optical device and electronic apparatus including the same |
| CN113378372A (en) * | 2021-06-04 | 2021-09-10 | 南京南辉智能光学感控研究院有限公司 | Design method of terahertz vortex processor, product obtained by design method and application of product |
| CN113378372B (en) * | 2021-06-04 | 2024-03-15 | 南京南辉智能光学感控研究院有限公司 | Design method of terahertz vortex processor, product obtained by design method and application of terahertz vortex processor |
| CN114815232A (en) * | 2022-06-28 | 2022-07-29 | 中山大学 | Design method of achromatic lens based on cascade super surface and achromatic lens |
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Application publication date: 20190426 |