CN109682351B - Zero calibration method for micro-silicon tilt sensor - Google Patents
Zero calibration method for micro-silicon tilt sensor Download PDFInfo
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- CN109682351B CN109682351B CN201811551002.4A CN201811551002A CN109682351B CN 109682351 B CN109682351 B CN 109682351B CN 201811551002 A CN201811551002 A CN 201811551002A CN 109682351 B CN109682351 B CN 109682351B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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Abstract
The invention relates to a zero calibration method of a micro-silicon tilt sensor, which comprises a shell, a base, a substrate, a motor, a microcontroller and a micro-silicon chip, wherein the base, the substrate, the motor, the microcontroller and the micro-silicon chip are positioned in the shell, a data communication interface is arranged on the shell, the substrate is hinged with the base through a central shaft, the motor is connected with the substrate through gear matching, and the micro-silicon chip is welded on the substrate. The method for zero calibration of the micro silicon tilt sensor comprises the following steps: determining the consistency of the directions of the sensitive axis of the micro silicon chip and the tilt angle sensor; and accurately positioning 0 degree and 180 degrees, and performing zero calibration. The invention has simple structure and convenient use, and can ensure the positioning precision so as to improve the zero position precision.
Description
Technical Field
The invention relates to zero calibration of a measuring device of a horizontal deviation value, in particular to a method for calibrating the zero calibration of a micro-silicon tilt sensor.
Background
The tilt angle sensor is widely applied to the fields of civil construction, weaponry, aerospace, bioengineering and the like. The micro-silicon type inclination angle sensor is a commonly used inclination angle sensor at present, a micro-silicon (MEMS) inclination sensor chip is welded on a substrate to be used as a measuring element, and forms sensing equipment with a base, a microcontroller, a data processing circuit and the like, and the micro-silicon type inclination angle sensor has the advantages of small volume, light weight, low cost, low power consumption, high sensitivity, batch production, easiness in integration, intelligentization realization and the like. However, since the sensor uses the bottom surface of the base as a measurement reference, the zero position of the micro silicon chip is required to be consistent with the base surface of the base as much as possible during assembly, and in addition, the indicating value of the micro silicon chip is corrected to be the reference zero position through data processing. Namely, the existing micro silicon tilt sensor has the following defects: the assembly difficulty is high; although micro silicon can be compensated, the range is limited; the micro silicon zero can drift along with time and temperature and needs to be calibrated frequently, otherwise, the zero error is large.
In order to further improve the zero position precision, micro silicon tilt sensors which adopt a zero position self-calibration technology to offset zero position errors have appeared. The micro silicon type inclination angle sensor firstly runs a zero self-calibration program before each measurement, and introduces a calibration result into the inclination angle measurement, so that the precision is greatly improved, but the micro silicon type inclination angle sensor also has the defects that: firstly, although zero position error between the micro silicon chip and a horizontal reference is solved by zero position self-calibration, installation error is difficult to avoid, the sensitive direction of the micro silicon chip is possibly inconsistent with the direction indicated by a sensor, and thus, when measurement is carried out, an error exists between an output inclination amount and an actual inclination amount; secondly, when zero automatic calibration is carried out, the precision of the stop block and the proximity switch is low, the actual rotation amount is larger than or smaller than 180 degrees, and the zero error repeatability is poor.
Aiming at the defects in the prior art, the invention provides the method for calibrating the zero position of the micro silicon tilt sensor, which has a simple structure and is convenient to use, and can ensure the positioning precision so as to improve the zero position precision.
Disclosure of Invention
The invention aims to provide a zero calibration method of a micro silicon tilt sensor, which has a simple structure and is convenient to use, and can ensure positioning accuracy so as to improve zero accuracy.
In order to achieve the purpose, the invention adopts the following technical scheme: a micro-silicon type inclination angle sensor comprises a shell, a base, a substrate, a motor, a microcontroller and a micro-silicon chip, wherein the base is positioned in the shell, the upper surface of the shell is provided with an arrow pointing to the sensitive direction of the sensor, the shell is provided with a data communication interface, the substrate comprises a rotary disc, a driven gear and a central shaft, the rotary disc, the driven gear and the central shaft are coaxial and are connected into a whole from top to bottom, the substrate is hinged with the base through the central shaft, the motor is positioned in the base, an output shaft of the motor is provided with a driving gear, the motor is connected with the substrate through the matching of the driving gear and the driven gear, the micro-silicon chip is welded on the substrate, the micro-silicon type inclination angle sensor also comprises an angle encoder, the angle encoder is coaxial and fixedly connected with the central shaft, the signal output ends, the method for zero calibration of the micro silicon tilt sensor by communication between the microcontroller and the upper computer comprises the following steps:
s1, determining the consistency of the direction of a sensitive axis of a micro silicon chip and a tilt angle sensor;
s1.1, stably placing the tilt angle sensor on a marble platform with a working surface and a horizontal plane having an included angle of 5-10 degrees, so that the direction indicated by an arrow of a shell of the tilt angle sensor is consistent with the inclination direction of the platform, and the arrow points to the upward facing direction of the workbench;
s1.2, connecting the tilt angle sensor with an upper computer;
s1.3, electrifying;
s1.4, after the tilt angle sensor is normally started, passing through the upper positionMachine for workingStarting a motor to enable the substrate to rotate slowly;
s1.5, monitoring the real-time output voltage of the micro silicon chip through an upper computer;
s1.6, when the output voltage of the micro silicon chip is maximum, the upper computer controls the motor to stop rotating;
s1.7, recording and storing the current indicating value of the angle encoder in a microcontroller;
s1.8, correcting the position to be a 0-degree value during zero-position calibration of the tilt angle sensor;
s2, accurately positioning 0 degree and 180 degrees, and performing zero calibration;
s2.1, placing the tilt angle sensor on a working plane to be measured;
s2.2, electrifying;
s2.3, rotating the substrate to a time point of 0 degree determined by an encoder in S1 through a microcontroller;
s2.4, recording as V1 after the output value of the micro silicon chip is stable;
s2.5, rotating the microcontroller until the encoder displays 180 degrees;
s2.6, recording as V2 after the output value of the micro silicon chip is stable;
s2.7. mixing V1、V2Substitution formula
Find V0And recording the microcontroller as a zero correction value.
The invention adds an angle encoder on the prior tilt angle sensor for determining the real-time angle position rotated by the micro silicon, and realizes the direction consistency of the micro silicon sensitive axis and the direction indicated by the tilt angle sensor through calibration on the basis, so that the prior art which can only determine the direction of the micro silicon sensitive axis through design or assembly is advanced to show the quantitative calibration of the direction of the micro silicon sensitive axis by measurable data, thereby effectively improving the measurement precision of the tilt angle sensor.
The invention has simple structure and convenient use.
Drawings
FIG. 1 is a schematic structural diagram of a micro-silicon tilt sensor according to the present invention;
fig. 2 is a schematic view of the outline of the micro-silicon tilt sensor of the present invention.
In the figure: 1-a shell; 1.1-arrow; 1.2-data communication interface; 2-a base; 3-a substrate; 3.1-rotating disc; 3.2-driven gear; 3.3-central axis; 4-a motor; 5-a microcontroller; 6-micro silicon chip; 7-a driving gear; 8-an angle encoder; 9-an upper computer.
Detailed Description
The invention is further described below with reference to the following figures and examples, which should not be construed as limiting the invention.
The micro-silicon type inclination angle sensor comprises a shell 1, a base 2, a substrate 3, a motor 4, a microcontroller 5 and a micro-silicon chip 6, wherein the base 2 is positioned in the shell 1, the upper surface of the shell 1 is provided with an arrow 1.1 pointing to the sensitive direction of the sensor, the shell 1 is provided with a data communication interface 1.2, the substrate 3 comprises a rotary table 3.1, a driven gear 3.2 and a central shaft 3.3, the rotary table 3.1, the driven gear 3.2 and the central shaft 3.3 are coaxial and are connected into a whole from top to bottom, the substrate 3 is hinged with the base 2 through the central shaft 3.3, the motor 4 is positioned in the base 2, an output shaft of the motor 4 is provided with a driving gear 7, the motor 4 is connected with the substrate 3 through the matching of the driving gear 7 and the driven gear 3.2, the micro-silicon chip 6 is welded on the substrate 3, the angle encoder 8 is also included, the angle encoder 8 is coaxial and fixedly connected with the central shaft 3.3, the control signal output end of the microcontroller 5 is connected with the control signal input end of the motor 4, and the microcontroller 5 is communicated with the upper computer 9.
The method for zero calibration of the micro silicon tilt sensor comprises the following steps:
s1, determining the consistency of the direction of a sensitive axis of a micro silicon chip and a tilt angle sensor;
s1.1, stably placing the tilt angle sensor on a marble platform with a working surface and a horizontal plane having an included angle of 5-10 degrees, so that the direction indicated by an arrow of a shell of the tilt angle sensor is consistent with the inclination direction of the platform, and the arrow points to the upward facing direction of the workbench;
s1.2, connecting the tilt angle sensor with an upper computer;
s1.3, electrifying;
s1.4, after the tilt angle sensor is normally started, passing through the upper positionMachine for workingStarting a motor to enable the substrate to rotate slowly;
s1.5, monitoring the real-time output voltage of the micro silicon chip through an upper computer;
s1.6, when the output voltage of the micro silicon chip is maximum, the upper computer controls the motor to stop rotating;
s1.7, recording and storing the current indicating value of the angle encoder in a microcontroller;
s1.8, correcting the position to be a 0-degree value during zero-position calibration of the tilt angle sensor;
s2, accurately positioning 0 degree and 180 degrees, and performing zero calibration;
s2.1, placing the tilt angle sensor on a working plane to be measured;
s2.2, electrifying;
s2.3, rotating the substrate to a time point of 0 degree determined by an encoder in S1 through a microcontroller;
s2.4, recording as V1 after the output value of the micro silicon chip is stable;
s2.5, rotating the microcontroller until the encoder displays 180 degrees;
s2.6, recording as V2 after the output value of the micro silicon chip is stable;
s2.7, substituting V1 and V2 into a formula
V0 is obtained and is recorded in the microcontroller as a zero correction value.
Those not described in detail in this specification are prior art to the knowledge of those skilled in the art.
Claims (1)
1. A micro-silicon type inclination angle sensor comprises a shell (1), a base (2) positioned in the shell (1), a substrate (3), a motor (4), a microcontroller (5) and a micro-silicon chip (6), wherein an arrow (1.1) pointing to the sensitive direction of the sensor is arranged on the upper surface of the shell (1), a data communication interface (1.2) is arranged on the shell (1), the substrate (3) comprises a turntable (3.1), a driven gear (3.2) and a central shaft (3.3), the turntable (3.1), the driven gear (3.2) and the central shaft (3.3) are coaxial and are connected into a whole from top to bottom, the substrate (3) is hinged with the base (2) through the central shaft (3.3), the motor (4) is positioned in the base (2), a driving gear (7) is arranged on an output shaft of the motor (4), the motor (4) is connected with the substrate (3) through the matching of the driving gear (7) and the driven gear (3.2), little silicon chip (6) welding is on base plate (3), still include angle encoder (8), angle encoder (8) and center pin (3.3) coaxial line and fixed connection, the signal output part of little silicon chip (6) and angle encoder (8) is connected with the signal input part of microcontroller (5) respectively, the control signal output part of microcontroller (5) is connected with the control signal input part of motor (4), communicate between microcontroller (5) and host computer (9), its characterized in that: the method for zero calibration of the micro silicon tilt sensor comprises the following steps:
s1, determining the consistency of the direction of a sensitive axis of a micro silicon chip and a tilt angle sensor;
s1.1, stably placing the tilt angle sensor on a marble platform with a working surface and a horizontal plane having an included angle of 5-10 degrees, so that the direction indicated by an arrow of a shell of the tilt angle sensor is consistent with the inclination direction of the platform, and the arrow points to the upward facing direction of the workbench;
s1.2, connecting the tilt angle sensor with an upper computer;
s1.3, electrifying;
s1.4, after the tilt angle sensor is normally started, passing through the upper positionMachine for workingStarting a motor to enable the substrate to rotate slowly;
s1.5, monitoring the real-time output voltage of the micro silicon chip through an upper computer;
s1.6, when the output voltage of the micro silicon chip is maximum, the upper computer controls the motor to stop rotating;
s1.7, recording and storing the current indicating value of the angle encoder in a microcontroller;
s1.8, correcting the position to be a 0-degree value during zero-position calibration of the tilt angle sensor;
s2, accurately positioning 0 degree and 180 degrees, and performing zero calibration;
s2.1, placing the tilt angle sensor on a working plane to be measured;
s2.2, electrifying;
s2.3, rotating the substrate to a time point of 0 degree determined by an encoder in S1 through a microcontroller;
s2.4, recording as V1 after the output value of the micro silicon chip is stable;
s2.5, rotating the microcontroller until the encoder displays 180 degrees;
s2.6, recording as V2 after the output value of the micro silicon chip is stable;
s2.7, substituting V1 and V2 into a formula
V0 is obtained and is recorded in the microcontroller as a zero correction value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811551002.4A CN109682351B (en) | 2018-12-18 | 2018-12-18 | Zero calibration method for micro-silicon tilt sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811551002.4A CN109682351B (en) | 2018-12-18 | 2018-12-18 | Zero calibration method for micro-silicon tilt sensor |
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| CN109682351A CN109682351A (en) | 2019-04-26 |
| CN109682351B true CN109682351B (en) | 2021-03-19 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1932448A (en) * | 2006-09-30 | 2007-03-21 | 北京普析科学仪器有限责任公司 | Step-by-step motor step angle precision measuring device and method |
| CN201090970Y (en) * | 2007-03-12 | 2008-07-23 | 北京信息工程学院 | Inclination angle measuring apparatus capable of automatic performing zero compensation |
| CN102042823B (en) * | 2009-10-26 | 2014-02-26 | 北京信息科技大学 | Inclination angle measuring device and measuring method thereof |
| US9506751B2 (en) * | 2014-08-25 | 2016-11-29 | Bode Energy Equipment Co., Ltd. | Solar battery wireless inclinometer |
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