CN109680255A - A kind of water-cooling system of monomer coating machine - Google Patents

A kind of water-cooling system of monomer coating machine Download PDF

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Publication number
CN109680255A
CN109680255A CN201811550552.4A CN201811550552A CN109680255A CN 109680255 A CN109680255 A CN 109680255A CN 201811550552 A CN201811550552 A CN 201811550552A CN 109680255 A CN109680255 A CN 109680255A
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CN
China
Prior art keywords
water
rotary shaft
annular
water inlet
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811550552.4A
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Chinese (zh)
Inventor
舒逸
刘光斗
李赞
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Hunan Yufeng Vacuum Science and Technology Co Ltd
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Hunan Yufeng Vacuum Science and Technology Co Ltd
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Publication date
Application filed by Hunan Yufeng Vacuum Science and Technology Co Ltd filed Critical Hunan Yufeng Vacuum Science and Technology Co Ltd
Priority to CN201811550552.4A priority Critical patent/CN109680255A/en
Publication of CN109680255A publication Critical patent/CN109680255A/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)

Abstract

The invention discloses a kind of water-cooling systems of monomer coating machine, including going barrel, going barrel upper head plate connects rotary shaft, rotary shaft and vacuum-chamber wall are sealed by device for sealing magnetic fluid, support shaft is connected on bottom plate, rotary shaft is hollow shaft, its hollow portion is equipped with water inlet pipe, exhalant canal is formed between water inlet pipe and rotary shaft, it is closed in the indoor rotation shaft end of vacuum by end cap, the main water outlet which is provided with the water main inlet port being connected to water inlet pipe and be connected to exhalant canal, water diversion disk is further fixed on upper head plate, water diversion disk is equipped with first annular sink and the second annular water tank, first annular sink is connected to water main inlet port, second annular water tank is connected to main water outlet, one, which is equipped with, close to hanging plate inner wall encloses interior coaming plate, multistage water cooling tube is fixed at the interior coaming plate back side, the water inlet end of water cooling tube, water outlet passes through gold respectively Belong to hose and connects first annular sink, the second annular water tank.The risk that the present invention improves cooling effect, reduces leak.

Description

A kind of water-cooling system of monomer coating machine
Technical field
The present invention relates to technical field of vacuum plating, specially a kind of water-cooling system of monomer coating machine.
Background technique
In vacuum coating industry, cooling device always is more risky device in vacuum chamber, if cooling device There is leak, it will directly contribute scrapping for product.It is being used for sanitaryware, automobile decoration, hardware tool, hardware dies, electricity In the monomer coating machine of sub-industry articles etc., usually workpiece is pasted on hanging plate, then the hanging plate for being stained with workpiece is fixed on Then going barrel is sent into the coating chamber of monomer coating machine and carries out plated film, in coating process, going barrel by going barrel outer surface High speed rotation can occur.The cooling structure of such coating machine is complicated, and maintenance operation is inconvenient.Traditional cooling structure is using rotation The form of adapter is introduced into water the inside cavity of going barrel, and the influence due to being limited to connector bore can not hang large area Plate carries out effective water cooling, causes product impacted.
Summary of the invention
For above-mentioned problems of the prior art, the present invention provides a kind of water-cooling system of monomer coating machine, improves Cooling effect, the risk for reducing leak.
The technical solution adopted by the invention is as follows: a kind of water-cooling system of monomer coating machine, including to be placed in vacuum indoor Going barrel, the going barrel is integrally cylindrical, is used to place the hanging plate of workpiece including upper head plate, bottom plate and cylinder, on End plate connection rotary shaft, rotary shaft are stretched out outside vacuum chamber, and rotary shaft and vacuum-chamber wall are sealed by device for sealing magnetic fluid, lower end Support shaft is connected on plate, the rotary shaft is hollow shaft, is equipped with water inlet pipe, water inlet pipe outer wall and rotation in rotary shaft hollow portion Exhalant canal is formed between axis inner wall, is closed in the indoor rotation shaft end of vacuum by end cap, water inlet pipe is fixed on end cap, The water main inlet port being connected to water inlet pipe and the main water outlet being connected to exhalant canal are equipped on end cap, it is also solid on upper head plate Surely have a water diversion disk, water diversion disk is equipped with first annular sink and the second annular water tank, first annular sink by water supply hose with Water main inlet port connection, the second annular water tank are connected to by delivery hose with main water outlet, are equipped in a circle and are enclosed close to hanging plate inner wall Plate is fixed with multistage water cooling tube at the interior coaming plate back side, and water cooling tube is S-type to be uniformly distributed on interior coaming plate, every section of water cooling tube into The water inlet that divides on first annular sink is arranged in by connection by metal hose in water end (W.E.), and water outlet is arranged by connection by metal hose The mouth of a river is separated on the second annular water tank.
Further, the rotation shaft end outside vacuum chamber is fixed with a point water-stop seat, is connected on dividing water-stop seat Point watertight big envelope, divides water-stop seat and divides and connect and pass through skeleton oil seal between watertight big envelope by deep groove ball bearing, Divide water-stop to put on and is equipped with the water inlet being connected to water inlet pipe and the discharge outlet being connected to exhalant canal.
Further, described that watertight big envelope is divided to fix by fixed bracket so as to which watertight big envelope is divided not rotate with rotary shaft.
Further, every piece of hanging plate all corresponds to individual one section of water cooling tube.
Further, the water inlet end of water cooling tube and water outlet are respectively positioned on the top of going barrel.
The water-cooling system of monomer coating machine of the invention, cooling water are passed in and out by hollow rotary shaft, and rotary shaft is being transmitted Good water flowing is also ensured while power, one water diversion disk is installed in the upper end of going barrel, the water introduced is logical Each face that the metal hose connecting with water diversion disk is diverted to going barrel is crossed, has been distributed cooling water pipe on each face, is protected While having demonstrate,proved cooling effect, the quantity of water-cooling joint is effectively reduced using water diversion disk, reduces the risk of leak.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention.
Fig. 2 be in Fig. 1 A-A to structural schematic diagram.
Fig. 3 is rotary shaft partial structure diagram of the invention.
Specific embodiment
To facilitate the understanding of the present invention, the present invention is made below in conjunction with Figure of description and preferred embodiment more complete Face meticulously describes, but the protection scope of the present invention is not limited to the following specific embodiments.
As shown in Fig. 1-Fig. 3, a kind of water-cooling system of monomer coating machine of the present embodiment, including to be placed in vacuum indoor Going barrel 1, the going barrel 1 is whole cylindrical, including upper head plate 101, bottom plate 102 and cylinder for placing workpiece Hanging plate 103, upper head plate 101 connect rotary shaft 2, and rotary shaft 2 is stretched out outside vacuum chamber, and rotary shaft 2 and vacuum-chamber wall 4 pass through magnetic fluid Sealing device 5 seals, and support shaft 3 is connected on bottom plate 102, and the rotary shaft 2 is hollow shaft, sets in 2 hollow portion of rotary shaft There is water inlet pipe 6, form exhalant canal between 2 inner wall of 6 outer wall of water inlet pipe and rotary shaft, passes through in the indoor rotation shaft end of vacuum End cap 201 is closed, and water inlet pipe 6 is fixed on end cap 201, and the water main inlet port 202 being connected to water inlet pipe 6 is equipped on end cap 201 And the main water outlet 203 being connected to exhalant canal, it is further fixed on water diversion disk 7 on upper head plate 101, water diversion disk 7 is equipped with the One annular water tank 701 and the second annular water tank 702, first annular sink 701 are connected by water supply hose 904 and water main inlet port 202 Logical, the second annular water tank 702 is connected to by delivery hose 902 with main water outlet 203, is equipped with one close to hanging plate inner wall and is enclosed interior coaming plate 10, it is fixed with multistage water cooling tube 8 at interior 10 back side of coaming plate, every piece of hanging plate all corresponds to individual one section of water cooling tube 8, and water cooling tube 8 is in S Type is uniformly distributed on interior coaming plate 10, and the water inlet end of water cooling tube 8 and water outlet are respectively positioned on the top of going barrel 1, every section of water cooling tube 8 Water inlet end the water inlet that divides that is arranged on first annular sink 701 is connected by metal hose 903, water outlet is soft by metal The connection of pipe 903, which is arranged on the second annular water tank 702, separates the mouth of a river.
2 end of rotary shaft outside vacuum chamber is fixed with a point water-stop seat 11, and a point water is connected on dividing water-stop seat 11 Sealing shroud 12, divide water-stop seat 11 and divide between watertight big envelope 12 by deep groove ball bearing 13 connect and by outside framework oil seal 14 it is close Envelope is equipped with the water inlet 15 being connected to water inlet pipe 6 and the discharge outlet 16 being connected to exhalant canal on dividing watertight big envelope 12.Point It is fixed so as to which watertight big envelope is divided not rotate with rotary shaft that watertight big envelope 12 passes through fixed bracket 17.
The water-cooling system of monomer coating machine of the invention, cooling water are passed in and out by hollow rotary shaft, and rotary shaft is being transmitted Good water flowing is also ensured while power, one water diversion disk is installed in the upper end of going barrel, the water introduced is logical Each face that the metal hose connecting with water diversion disk is diverted to going barrel is crossed, has been distributed cooling water pipe on each face, is protected While having demonstrate,proved cooling effect, the quantity of water-cooling joint is effectively reduced using water diversion disk, reduces the risk of leak.
With the help of the introduction present in aforementioned specification and relevant drawings, those skilled in the art in the invention will It will recognize that many modifications and other embodiments of the invention.It will consequently be understood that the present invention is not limited to disclosed specific realities Scheme is applied, modification and other embodiments are to be considered as included in scope of the appended claims.Although spy is used herein Determine term, they are only used with generic and descriptive sense, rather than limitation.

Claims (5)

1. a kind of water-cooling system of monomer coating machine, including it is placed in the indoor going barrel of vacuum, the going barrel is integrally in cylinder Shape is used to place the hanging plate of workpiece including upper head plate, bottom plate and cylinder, and upper head plate connects rotary shaft, and rotary shaft is stretched out true Outside empty room, rotary shaft and vacuum-chamber wall are sealed by device for sealing magnetic fluid, are connected with support shaft on bottom plate, feature exists In: the rotary shaft is hollow shaft, is equipped with water inlet pipe in rotary shaft hollow portion, is formed between pipe outer wall of intaking and rotary shaft inner wall Exhalant canal is closed in the indoor rotation shaft end of vacuum by end cap, and water inlet pipe is fixed on end cap, be equipped on end cap with The water main inlet port of water inlet pipe connection and the main water outlet being connected to exhalant canal, are further fixed on water diversion disk on upper head plate, point Water pond is equipped with first annular sink and the second annular water tank, and first annular sink is connected to by water supply hose with water main inlet port, Second annular water tank is connected to by delivery hose with main water outlet, is equipped with one close to hanging plate inner wall and is enclosed interior coaming plate, carries on the back in interior coaming plate Face is fixed with multistage water cooling tube, and water cooling tube is S-type to be uniformly distributed on interior coaming plate, and the water inlet end of every section of water cooling tube is soft by metal Pipe connects the water inlet that divides being arranged on first annular sink, and water outlet is arranged by connection by metal hose in the second annular water tank On separate the mouth of a river.
2. a kind of water-cooling system of monomer coating machine as described in claim 1, it is characterised in that: the rotary shaft outside vacuum chamber End is fixed with a point water-stop seat, and a point watertight big envelope is connected on dividing water-stop seat, divide water-stop seat and divide watertight big envelope it Between skeleton oil seal is connected and passed through by deep groove ball bearing, be equipped with the water inlet that is connected to water inlet pipe dividing water-stop to cover And the discharge outlet being connected to exhalant canal.
3. a kind of water-cooling system of monomer coating machine as claimed in claim 2, it is characterised in that: described that watertight big envelope is divided to pass through Fixed bracket is fixed so as to which watertight big envelope is divided not rotate with rotary shaft.
4. a kind of water-cooling system of monomer coating machine as described in claim 1, it is characterised in that: every piece of hanging plate is all corresponding independent One section of water cooling tube.
5. a kind of water-cooling system of monomer coating machine as described in claim 1, it is characterised in that: the water inlet end of water cooling tube and go out Water end (W.E.) is respectively positioned on the top of going barrel.
CN201811550552.4A 2018-12-18 2018-12-18 A kind of water-cooling system of monomer coating machine Pending CN109680255A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811550552.4A CN109680255A (en) 2018-12-18 2018-12-18 A kind of water-cooling system of monomer coating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811550552.4A CN109680255A (en) 2018-12-18 2018-12-18 A kind of water-cooling system of monomer coating machine

Publications (1)

Publication Number Publication Date
CN109680255A true CN109680255A (en) 2019-04-26

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN207213174U (en) * 2017-08-11 2018-04-10 杭州慧翔电液技术开发有限公司 A kind of optical coating system device for sealing magnetic fluid
CN108774730A (en) * 2018-09-05 2018-11-09 北京丹鹏表面技术研究中心 A kind of extensible formula drum apparatus for vacuum coating
CN209456562U (en) * 2018-12-18 2019-10-01 湖南玉丰真空科学技术有限公司 A kind of water-cooling system of monomer coating machine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN207213174U (en) * 2017-08-11 2018-04-10 杭州慧翔电液技术开发有限公司 A kind of optical coating system device for sealing magnetic fluid
CN108774730A (en) * 2018-09-05 2018-11-09 北京丹鹏表面技术研究中心 A kind of extensible formula drum apparatus for vacuum coating
CN209456562U (en) * 2018-12-18 2019-10-01 湖南玉丰真空科学技术有限公司 A kind of water-cooling system of monomer coating machine

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