CN109676406B - Process for processing single crystal furnace heater - Google Patents

Process for processing single crystal furnace heater Download PDF

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Publication number
CN109676406B
CN109676406B CN201710971523.4A CN201710971523A CN109676406B CN 109676406 B CN109676406 B CN 109676406B CN 201710971523 A CN201710971523 A CN 201710971523A CN 109676406 B CN109676406 B CN 109676406B
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heater
clamp
machining
fixed
plate
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CN109676406A (en
Inventor
靳立峰
李世杰
王冲普
楚树恒
刘春茂
高力岗
陈云亮
杨行
解振献
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Hebei Jing Long Sun Equipment Co ltd
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Hebei Jing Long Sun Equipment Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06Work-clamping means
    • B23Q3/062Work-clamping means adapted for holding workpieces having a special form or being made from a special material

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Resistance Heating (AREA)

Abstract

The invention relates to a vertical split machining clamp for a heater of a single crystal furnace, which comprises a fixed seat and a clamp fixedly arranged on the fixed seat, wherein the clamp comprises an upper clamp plate and a lower clamp plate positioned below the upper clamp plate, the upper clamp plate and the lower clamp plate are both made of bakelite discs, the lower clamp plate is fixedly arranged on the fixed seat through a clamp positioning pin, and the upper clamp plate is fixed through a fastening connecting rod and a fastening bolt.

Description

Process for processing single crystal furnace heater
Technical Field
The invention relates to a process for processing a heater of a single crystal furnace.
Background
Along with the upgrading of the technology and the specification of the single crystal furnace, the specification and the size of the heater of the single crystal furnace are larger and higher, the complexity is higher and higher, and the original single circumferential furnace wire heater with small specification is upgraded into a main-auxiliary integrated heater with large specification. Compared with the prior heater only with a circumferential furnace wire, the circumferential furnace wire of the primary and secondary integrated heater is divided into two sections, the upper part is the furnace wire of the primary heater, and the lower part is the furnace wire of the secondary heater; the bottom end surface is provided with electrode pins of the main heater and the auxiliary heater, and furnace wires of the bottom end surface of the auxiliary heater, which are connected with the furnace wires of the periphery of the auxiliary heater and distributed in a radial shape, the specific structure is shown as the attached figure 1, however, the main-auxiliary integrated heater does not have a proper tool clamp and process in the processing process, the end face furnace wire is difficult to design and manufacture a corresponding tool clamp and process for processing in a common milling machine, meanwhile, when the circular heater furnace wire is processed by the split machining, the furnace wire split machining of the prior common heater adopts the mode that a manual dividing head and a tail seat are additionally arranged on a rectangular workbench on a common milling machine, the heater is transversely clamped between the dividing head and the tail seat, the heater wire is processed by dividing and splitting the heating furnace wire through the feeding motion of the workbench of a common milling machine and the manual rotation of the dividing head, the clamp used in the processing mode transversely clamps the workpiece, and the workpiece clamped between the index head and the tail seat is mostly suspended. If the main and auxiliary integrated heaters designed by the main and auxiliary circumferential furnace wires in a segmented mode are machined by the method, the strength of the segmented parts of the workpiece furnace wires is reduced to the minimum when the main and auxiliary circumferential furnace wires are machined in a segmented mode, and the machining process is difficult to conduct. In addition, the processing sequence of the end face furnace wire and the circumferential furnace wire is difficult to arrange, and the strength of the clamping positioning surface adopted in the next procedure is obviously reduced no matter the end face furnace wire is processed firstly or the circumferential furnace wire is processed firstly, so that the clamping firmness is seriously influenced. In view of the above, a need exists for a process for reliably and efficiently completing the processing of the primary and secondary integrated heaters of the single crystal furnace.
Disclosure of Invention
The invention aims to provide a process for processing a primary and secondary integrated heater of a single crystal furnace, which is simple to operate, high in processing efficiency and good in product quality.
In order to solve the problems, the technical scheme adopted by the invention is as follows:
a process for processing a heater of a single crystal furnace is characterized in that a group of processing fixtures is used for fixing and processing, each processing fixture comprises a fixed seat, an end face processing fixture and a split processing fixture, the fixed seat is fixed on a rotary worktable of a horizontal processing center, a workpiece is fixed by the cooperation of the fixed seat and the end face processing fixture to carry out end processing, then the workpiece is fixed by the cooperation of the fixed seat and the split processing fixture to carry out split processing, a screw hole is arranged in the center of the fixed seat, fixture positioning holes are arranged on the periphery of the fixed seat, the end face processing fixture comprises an upper fixture and a lower fixture positioned below the upper fixture, an upper clamping groove and a lower clamping groove are respectively arranged on one side of the upper fixture opposite to the lower fixture, and a fixture positioning pin used for being fixedly arranged on the fixed seat is arranged on the lower fixture, the upper clamp is connected with a fastening connecting rod for fixing, the split machining clamp comprises an upper clamp plate and a lower clamp plate located below the upper clamp plate, the lower clamp plate is provided with four workpiece positioning holes symmetrically arranged, workpiece positioning pins are arranged in the workpiece positioning holes, the lower clamp plate is provided with a clamp positioning pin fixedly arranged on the fixed seat, and the upper clamp plate is connected with a fixing connecting rod for fixing.
Further, the specific process comprises the following steps:
the first process step: establishment of process coordinate system
A fixed seat is additionally arranged on a rotary worktable of a horizontal machining center, the correcting fixed seat is fastened after being coincided with the center of a machine tool rotary worktable, a process coordinate system is established by taking the coincident point of the center of the rotary worktable, which moves on the X axis of the machine tool, on the center position of a machine tool main shaft in the vertical direction as the original point, the center connecting line of two clamp positioning holes on the correcting fixed seat is parallel to the center line of the machine tool main shaft and is taken as the process rotary coordinate of a heater of a single crystal furnace machined by the machine tool for 0 degree;
and a second step: heater end face machining
S1, placing a lower clamp of an end face machining clamp on a fixed seat, correcting the lower clamp to be overlapped with a fixed seat positioning hole, inserting a positioning pin, transversely placing a heater on a lower clamping groove of the lower clamp for positioning, and after installing the clamp on the heater, firmly connecting the upper clamp with a rotary worktable through four fastening connecting rods;
s2, inputting the programmed end face machining program into a machine tool operating system at the bottom of the heater;
s3, adjusting the rotary worktable to rotate to a process coordinate of 0 degree to enable the bottom end face of the heater to be aligned with a machine tool spindle, installing the machine tool spindle into an edge finder, finding out the circle center of the end face of the heater by using a three-point positioning method by taking the circular hole of the end face of the heater as a reference, and establishing an end face machining coordinate system by taking the circle center as an original point;
s4, a drill bit corresponding to the electrode screw hole in size is installed in the machine tool spindle, the tool is adjusted, a corresponding program is called out to drill the electrode screw hole, the corresponding tool can be replaced after the drilling is finished, the corresponding program is called to sequentially process the electrode pin and the end face furnace wire until the workpiece is dismounted after the processing is finished.
And a third step of: vertical split machining of heater
S1, placing a lower clamping plate of a split machining clamp on a fixed seat, aligning a clamp positioning pin on the lower clamping plate and a clamp positioning hole of the fixed seat, vertically placing the bottom end face of a heater subjected to end face electrode pin, electrode screw hole and end face furnace wire machining on the lower clamping plate, adjusting the position to enable the electrode screw hole of the heater and a workpiece positioning hole of the lower clamping plate to be inserted into a workpiece positioning pin, screwing the lower end thread of a fastening connecting rod into a screw hole in the center of the fixed seat through the middle of the heater in a hollow mode, pressing the upper clamping plate on the heater, screwing the upper end of the fastening connecting rod penetrating through the central circular hole of the upper clamping plate through a nut, connecting the upper clamping plate and the fixed seat into;
s2, after the workpiece is clamped, inputting the programmed vertical valve opening machining program into a machine tool operating system at the bottom of the heater;
s3, adjusting the rotary worktable to 0 degree of the established process coordinate, and installing the machine tool spindle into the edge finder to find the upper end position of the heater as the height coordinate origin;
and S4, installing the corresponding cutter into a machine tool main shaft, aligning the cutter, calling a program to process, firstly performing the furnace wire open-petal processing of the main heater on the upper part, and then performing the furnace wire open-petal processing of the periphery of the auxiliary heater on the lower part.
Further, the upper clamp comprises a square steel pipe and a bakelite plate fixed with the square steel pipe, an upper clamping groove is formed in the lower end of the bakelite plate, and fixing holes for the fastening connecting rods to pass through are formed in two ends of the square steel pipe; the lower clamp comprises a bakelite bottom plate and a clamping plate vertically arranged on the bakelite bottom plate, a lower clamping groove is formed in the clamping plate, a workpiece is placed between the upper clamping groove and the lower clamping groove, and a pin hole matched with the positioning pin is formed in the bakelite bottom plate.
Furthermore, the fastening connecting rod penetrates through the upper clamp and then is fixed on the rotary worktable through the fastening sliding block, and a fastening bolt is assembled on the fastening connecting rod.
Further, the upper clamps are divided into two groups.
Furthermore, the upper clamping plate is made of a bakelite plate, and a through hole which is penetrated by the fastening connecting rod is formed in the center of the upper clamping plate; the lower plate material is the bakelite plate, be equipped with on the lower plate with the anchor clamps pinhole of anchor clamps locating pin looks adaptation, the grip block is seted up and is become the work piece locating hole of fixed angle with the corresponding and anchor clamps pinhole of heater electrode screw hole, just there is the hole of stepping down that passes through the fastening connecting rod in the lower plate center.
Furthermore, the fastening connecting rod passes through in proper order and is fixed with fixing base 1 behind punch holder and the lower plate, fastening connecting rod upper portion is equipped with fastening bolt.
Furthermore, a fixing hole is formed in the fixing seat, and a fixing rod used for keeping the fixing with the rotary workbench is arranged in the fixing hole.
Adopt the produced beneficial effect of above-mentioned technical scheme to lie in:
the clamp used in the process is in a module design, is convenient to assemble, is universal for the fixed seat, can avoid frequent alignment of the clamp in the process of repeated disassembly and assembly once the alignment position is fixed and is not disassembled, improves the efficiency and ensures the accuracy consistency of workpieces; the whole fixture is simple in structure, firm in fixation, practical and convenient, and the processing convenience of the heater is guaranteed.
The heater processed by the process has high product quality, and the yield of the heater is effectively improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic structural view of a heater;
fig. 2 is a schematic structural view of a use state of the end face machining jig of the present invention:
FIG. 3 is an exploded view of FIG. 1;
FIG. 4 is a schematic structural view of an upper fixture of the end face machining fixture;
FIG. 5 is a schematic structural view of a lower jig of the end face machining jig;
fig. 6 is a schematic structural view of the split machining fixture of the present invention:
in the drawings: the fixture comprises a fixed seat 1, a fixture positioning hole 10, a fixing hole 11, a screw hole 12, an end face machining fixture 2, an upper fixture 21, an upper clamping groove 211, a square steel pipe 212, a bakelite plate 213, a fixing hole 214, a lower fixture 22, a lower clamping groove 221, a bakelite bottom plate 222, a clamping plate 223, a pin hole 224, a fastening connecting rod 23, a fastening sliding block 24, a fastening bolt 25, an upper clamping plate 31, a lower clamping plate 32, a workpiece positioning hole 33, a workpiece positioning pin 34, a fixing connecting rod 35, a fixing bolt 351, a through hole 36, a fixture pin hole 37, a yielding hole 39, a fixture positioning pin 4, a workpiece 100, a rotary worktable 200 and a sliding chute 201.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail and fully with reference to the following embodiments.
A process for machining a heater of a single crystal furnace is characterized in that a group of machining fixtures is used for fixing and machining, the machining fixtures comprise a fixed seat 1, an end face machining fixture 2 and a split machining fixture shown in the attached drawings 2 and 5, the fixed seat 1 is fixed on a rotary workbench of a horizontal machining center, a workpiece is fixed by matching of the fixed seat 1 and the end face machining fixture 2, end part machining is conducted, and then the workpiece is fixed by matching of the fixed seat 1 and the split machining fixture and is subjected to split machining.
As shown in fig. 2, the fixing seat 1 of the present invention has a screw hole 12 at the center, a clamp positioning hole 10 and a fixing hole 11 at the periphery, and a fixing rod for fixing with a rotary table is installed in the fixing hole 11.
As shown in fig. 3 to 5, the end face machining jig 2 of the present invention includes an upper jig 21 and a lower jig 22 located below the upper jig 21, one side of the upper jig 21 opposite to the lower jig 22 is respectively provided with an upper clamping groove 211 and a lower clamping groove 221, the lower jig 22 is provided with a jig positioning pin 4 for being fixedly arranged on the fixing base 1, the upper jig 21 is connected with a fastening connecting rod 23 for being fixed, and as a specific structure of the end face machining jig 2, the end face machining jig may include: the upper clamp 21 is a square steel pipe 212 and a bakelite plate 213 fixed with the square steel pipe 212, the lower end of the bakelite plate 213 is provided with an upper clamping groove 211, and two ends of the square steel pipe are provided with fixing holes 214 for the fastening connecting rod 23 to pass through; the lower clamp 22 comprises a bakelite base plate 222 and a clamping plate 223 vertically arranged on the bakelite base plate 222, a lower clamping groove 221 is formed in the clamping plate 223, a workpiece is placed between the upper clamping groove and the lower clamping groove, and a pin hole 224 matched with the clamp positioning pin 4 is formed in the bakelite base plate 222. The fastening connecting rod 23 penetrates through the upper clamp 21 and then is fixed on the rotary worktable through the fastening sliding block 24, and a fastening bolt 25 is assembled on the fastening connecting rod 23 and used for clamping the upper clamp, the workpiece, the lower clamp, the fixed seat and the rotary worktable.
The split machining fixture of the invention as shown in fig. 6 comprises an upper clamp plate 31 and a lower clamp plate 32 located below the upper clamp plate 31, wherein the lower clamp plate 32 is provided with four symmetrically arranged workpiece positioning holes 33, workpiece positioning pins 34 are installed in the workpiece positioning holes 33, fixture positioning pins 4 fixedly arranged on the fixed seat 1 are arranged on the lower clamp plate 32, and the upper clamp plate 31 is connected with a fixed connecting rod 35 for fixing. As a specific structure, there may be: the upper clamping plate 31 is made of a bakelite plate, and a through hole 36 which is penetrated through by a fixed connecting rod 35 is formed in the center of the upper clamping plate 31; the lower plate 32 material is bakelite board, be equipped with on the lower plate 32 with the anchor clamps pinhole 37 of 4 looks adaptations of anchor clamps locating pin, the lower plate 32 has been seted up and has been become fixed angle's work piece locating hole corresponding with heater 100 electrode screw hole and with the anchor clamps pinhole, just there is hole 39 of stepping down through fastening connecting rod 23 at the lower plate 32 center, fixed connecting rod 35 passes in proper order fixed with fixing base 1 behind upper plate 31 and the lower plate 32, fixed connecting rod 35 upper portion is equipped with fixing bolt 351 for fixed upper plate 31, work piece, lower plate 32 and fixing base.
The processing technology of the single crystal furnace heater comprises the following steps:
the first process step: establishment of process coordinate system
The fixing seat 1 is placed on the rotary worktable 200 in the horizontal machining center, and a fixing rod is inserted into the fixing hole 11 and fixedly connected with the rotary worktable 200. The center of the correcting fixed seat and the center of the machine tool rotary table are superposed and then fastened, a process coordinate system is established by taking the superposed point of the center of the rotary table in the vertical direction of the X-axis movement of the machine tool to the center position of the machine tool main shaft as the original point, and the center connecting line of the two clamp positioning holes on the correcting fixed seat is parallel to the center line of the machine tool main shaft and is taken as the process rotary coordinate of the heater of the machine tool processing single crystal furnace by 0 degree;
and a second step: heater end face machining
S1, the lower clamp 22 is placed on the fixed seat 1, the clamp positioning pin 4 is inserted into the pin hole 224 of the lower clamp 22 and the clamp positioning hole 10 of the fixed seat to ensure the relative position of the fixed seat 1 and the lower clamp 22, the parallelism of the upper trapezoidal positioning surface and the lower positioning surface in the vertical direction is ensured after the parts are processed and assembled, and the parallelism of the central connecting line of the two positioning holes and the central line of the workpiece in the horizontal direction is ensured after the workpiece is placed on the clamp. Then, the workpiece 100 is transversely placed on the positioning surface of the trapezoidal fixed lower clamping groove 221 of the lower clamp 22, the upper surface of the workpiece is connected and pressed with the rotary worktable 200 through the upper clamp 21 through the four fastening connecting rods 23, the lower ends of the fastening connecting rods 23 are connected to the fastening sliding blocks 24 in the sliding grooves 201 of the rotary worktable 200 through bolts, the middle parts of the fastening sliding blocks penetrate through the fixing holes of the upper clamp, the upper ends of the fastening sliding blocks penetrate through the upper clamp 21 and are fastened through the fastening nuts 25, and therefore the workpiece is fixed firmly.
And S2, inputting the programmed end face machining program into a machine tool operating system at the bottom of the heater.
S3, adjusting the rotary worktable to rotate to a process coordinate of 0 degree to enable the bottom end face of the heater to be aligned with the main shaft of the machine tool, installing the main shaft of the machine tool into the edge finder, finding out the circle center of the end face of the heater by using the circular hole of the end face of the heater as a reference and adopting a three-point positioning method, and establishing an end face machining coordinate system by using the circle center as an original point.
S4, a drill bit corresponding to the electrode screw hole in size is installed in the machine tool spindle, the tool is adjusted, a corresponding program is called out to drill the electrode screw hole 101, the corresponding tool can be replaced after drilling is completed, the corresponding program is called to sequentially process the electrode pin and the end face furnace wire until the workpiece is dismounted after processing is completed.
And a third step of: vertical split machining of heater
S1, a lower clamping plate of the split machining clamp is placed on the fixed seat, a clamp pin hole 37 in the lower clamping plate and a clamp positioning hole 10 in the fixed seat are aligned, and a clamp positioning pin 4 is inserted to ensure the relative positions of the fixed seat 1 and the lower clamping plate 32. The bottom end face of a heater for processing an end face electrode pin, an electrode screw hole and an end face furnace wire is vertically placed on a lower clamping surface, the position is adjusted to enable an electrode screw hole 101 on the end face of a workpiece 100 to coincide with a workpiece positioning hole 33 of a lower clamping plate 32, a workpiece positioning pin 34 is inserted to ensure the mutual position accuracy, the lower end thread of a fixed fastening connecting rod 35 is screwed into a screw hole 12 in the center of a fixed seat 1 through the middle of the heater in a hollow mode, an upper clamping plate 31 is pressed on the heater, the upper end of the fixed connecting rod penetrating through a central through hole 36 of the upper clamping plate is screwed by a fixing nut 351 to connect the upper clamping plate and the fixed seat;
s2, after the workpiece is clamped, inputting the programmed vertical valve opening machining program into a machine tool operating system at the bottom of the heater;
s3, adjusting the rotary worktable to 0 degree of the established process coordinate, and installing the machine tool spindle into the edge finder to find the upper end position of the heater as the height coordinate origin;
and S4, installing the corresponding cutter into a machine tool main shaft, aligning the cutter, calling a program to process, firstly performing the furnace wire open-petal processing of the main heater on the upper part, and then performing the furnace wire open-petal processing of the periphery of the auxiliary heater on the lower part.
The upper clamp can be divided into a plurality of groups, the more the upper clamp is, the better the fixing effect is, but the two groups are better from the cost-saving perspective. The upper clamping groove and the lower clamping groove are trapezoidal, so that the processing requirements of heaters with different diameters can be met, and the upper clamping groove and the lower clamping groove can be V-shaped, arc-shaped and the like.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (7)

1. A process for machining a heater of a single crystal furnace is characterized in that a group of machining fixtures are used for fixing and machining, each machining fixture comprises a fixed seat (1), an end face machining fixture (2) and a split machining fixture, the fixed seat (1) is fixed on a rotary worktable of a horizontal machining center, a workpiece is fixed by the aid of cooperation of the fixed seat (1) and the end face machining fixture (2) for end face machining, then the workpiece is fixed by the aid of cooperation of the fixed seat (1) and the split machining fixture for split machining, a screw hole (12) is formed in the center of the fixed seat (1), fixture positioning holes (10) are formed in the periphery of the fixed seat, each end face machining fixture (2) comprises an upper fixture (21) and a lower fixture (22) located below the upper fixture (21), an upper clamping groove (211) and a lower clamping groove (221) are formed in one side, opposite to the upper fixture (21) and the lower fixture (22), respectively, the lower clamp (22) is provided with a clamp positioning pin (4) fixedly arranged on the fixed seat (1), the upper clamp (21) is connected with a fastening connecting rod (23) for fixing, the split machining clamp comprises an upper clamp plate (31) and a lower clamp plate (32) positioned below the upper clamp plate (31), the lower clamp plate (32) is provided with four symmetrically-arranged workpiece positioning holes (33), the workpiece positioning holes (33) are internally provided with workpiece positioning pins (34), the lower clamp plate (32) is provided with a clamp positioning pin (4) fixedly arranged on the fixed seat (1), and the upper clamp plate (31) is connected with a fixed connecting rod (35) for fixing;
the specific procedures are as follows:
the first process step: establishment of process coordinate system
A fixed seat (1) is additionally arranged on a rotary worktable (200) of a horizontal machining center, the center of the correcting fixed seat (1) is coincident with the center of the rotary worktable (200) of the machine tool and then fastened, the position of the rotary worktable (200) on the X axis of the machine tool is adjusted, the rotary center of the worktable is aligned with the center of a main shaft of the machine tool, a process coordinate system is established by taking the position as an original point, a connecting line of the centers of two clamp positioning holes on the correcting fixed seat is parallel to the central line of the main shaft of the machine tool, and the connecting line is taken as a process coordinate of;
and a second step: heater end face machining
S1, placing a lower clamp (22) of an end face machining clamp on a fixed seat (1), correcting the lower clamp (22) to be overlapped with a clamp positioning hole (10) of the fixed seat (1) and inserting a clamp positioning pin (4), transversely placing a heater in a lower clamping groove (221) of the lower clamp (22) for positioning, and after installing a clamp (21) on the heater, firmly connecting the upper clamp with a rotary worktable through four fastening connecting rods (23);
s2, inputting the end face machining program into the machine tool operation system;
s3, adjusting the rotary worktable to rotate to a process coordinate of 0 degree to enable the bottom end face of the heater to be aligned with a machine tool spindle, installing the machine tool spindle into an edge finder, finding out the circle center of the end face of the heater by using a three-point positioning method by taking the circular hole of the end face of the heater as a reference, and establishing an end face machining coordinate system by taking the circle center as an original point;
s4, installing a drill bit corresponding to the electrode screw hole in size into the machine tool spindle, carrying out tool setting, calling a corresponding program to drill the electrode screw hole, replacing the corresponding tool after the drilling is finished, calling the corresponding program to sequentially carry out electrode pin and end face furnace wire machining, and unloading the workpiece until the machining is finished;
and a third step of: vertical split machining of heater
S1, a lower clamping plate (32) of a split machining clamp is placed on a fixed seat (1), an upper clamp positioning pin (4) of the lower clamping plate (32) and a clamp positioning hole (10) of the fixed seat are aligned, the bottom end face of a heater subjected to end face electrode pin, electrode screw hole and end face furnace wire machining is placed on the lower clamping plate (32) in a downward vertical direction, the position is adjusted to enable the electrode screw hole of the heater to be aligned with a workpiece positioning hole of the lower clamping plate and inserted into a workpiece positioning pin (34), lower end threads of a fastening connecting rod are screwed into a screw hole (12) in the center of the fixed seat through the middle of the heater in a hollow mode, the upper clamping plate (31) is pressed on the heater, the upper end of the fixing connecting rod penetrating through a central circular hole of the upper clamping plate (31) is screwed through;
s2, after clamping the workpiece, inputting the programmed vertical open-petal machining program into a machine tool operating system;
s3, adjusting the rotary worktable to 0 degree of the established process coordinate, and installing the machine tool spindle into the edge finder to find the upper end position of the heater as the height coordinate origin;
and S4, installing the corresponding cutter into a machine tool main shaft, aligning the cutter, calling a program to process, firstly performing the furnace wire open-petal processing of the main heater on the upper part, and then performing the furnace wire open-petal processing of the periphery of the auxiliary heater on the lower part.
2. The process for machining the heater of the single crystal furnace according to claim 1, wherein the upper clamp (21) comprises a square steel tube (212) and a bakelite plate (213) fixed with the square steel tube (212), the lower end of the bakelite plate (213) is provided with an upper clamping groove (211), and two ends of the square steel tube are provided with fixing holes (214) for the fastening connecting rods (23) to pass through; the lower clamp (22) comprises a bakelite bottom plate (222) and a clamping plate (223) vertically arranged on the bakelite bottom plate (222), a lower clamping groove (221) is formed in the clamping plate (223), a workpiece is placed between the upper clamping groove and the lower clamping groove, and a pin hole (224) matched with the clamp positioning pin (4) is formed in the bakelite bottom plate (222).
3. The process for manufacturing the heater of the single crystal furnace according to claim 1 or 2, wherein the fastening connecting rod (23) is fixed on the rotary table through a fastening slider (24) after passing through the upper clamp (21), and a fastening bolt (25) is assembled on the fastening connecting rod (23).
4. The process for manufacturing a heater of a single crystal furnace according to claim 1 or 2, wherein the upper jigs (21) are two groups.
5. The process for processing the heater of the single crystal furnace according to the claim 1 or 2, wherein the upper clamping plate (31) is made of a bakelite plate, and a through hole (36) which passes through a fixed connecting rod (35) is formed in the center of the upper clamping plate (31); lower plate (32) material is bakelite board, be equipped with on lower plate (32) with anchor clamps pinhole (37) of anchor clamps locating pin (4) looks adaptation, lower plate (32) are seted up with heater electrode screw hole corresponding and become fixed angle's work piece locating hole with the anchor clamps pinhole, just there is hole (39) of stepping down through fastening connecting rod (23) at lower plate (32) center.
6. The process for processing the heater of the single crystal furnace according to the claim 1 or 2, characterized in that the fixed connecting rod (35) passes through the upper clamping plate (31) and the lower clamping plate (32) in sequence and then is fixed with the fixed base (1), and the fixed connecting rod (35) is provided with a fixed bolt (351) at the upper part.
7. The process for processing the heater of the single crystal furnace according to the claim 1 or 2, wherein the fixed seat (1) is provided with a fixed hole (11), and a fixed rod used for keeping fixed with the rotary worktable is arranged in the fixed hole (11).
CN201710971523.4A 2017-10-18 2017-10-18 Process for processing single crystal furnace heater Active CN109676406B (en)

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