CN109668924B - Submerged gas liquefaction cryogenic experiment device and experiment method thereof - Google Patents
Submerged gas liquefaction cryogenic experiment device and experiment method thereof Download PDFInfo
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- CN109668924B CN109668924B CN201910055596.8A CN201910055596A CN109668924B CN 109668924 B CN109668924 B CN 109668924B CN 201910055596 A CN201910055596 A CN 201910055596A CN 109668924 B CN109668924 B CN 109668924B
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- 238000002474 experimental method Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims description 13
- 238000007789 sealing Methods 0.000 claims abstract description 30
- 238000010438 heat treatment Methods 0.000 claims abstract description 12
- 238000001816 cooling Methods 0.000 claims abstract description 7
- 230000009467 reduction Effects 0.000 claims abstract description 4
- 239000007788 liquid Substances 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 230000000630 rising effect Effects 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 47
- 239000000463 material Substances 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- RIRXDDRGHVUXNJ-UHFFFAOYSA-N [Cu].[P] Chemical compound [Cu].[P] RIRXDDRGHVUXNJ-UHFFFAOYSA-N 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
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Abstract
A submerged gas liquefaction cryogenic experiment device with good cooling and temperature control effects and convenient disassembly and replacement comprises a base, a seat frame and a refrigerator, wherein a vacuum cylinder is arranged outside the refrigerator, a vacuum chamber is arranged inside the vacuum cylinder, a hollow cryogenic liquefaction cavity is arranged on a cold head of the refrigerator, a sealing knife edge flange cover is arranged above the cryogenic liquefaction cavity, the sealing knife edge flange cover is provided with an annular knife edge, the cross section of the annular knife edge is wedge-shaped, the annular knife edge is pre-pressed and sealed with a sealing surface of the cryogenic liquefaction cavity through a screw, the thermal shrinkage rate of the sealing knife edge flange cover is smaller than that of the cryogenic liquefaction cavity, so that the wedge-shaped cross section of the annular knife edge is gradually and tightly attached to the sealing surface of the cryogenic liquefaction cavity along with temperature reduction, a heating block and a temperature sensor are respectively connected with the cryogenic liquefaction cavity, and the temperature controller controls the heating block according to temperature data returned by the temperature sensor, thereby accurately controlling the temperature in the cryogenic liquefaction cavity.
Description
Technical Field
The invention belongs to the technical field of low-temperature physical properties of materials.
Background
In the study of low-temperature physical properties of various metal materials and nonmetallic materials, a method for immersing the materials in liquid gas is needed, the method continuously reduces the temperature of a cryogenic liquefaction cavity in a high vacuum environment through a refrigerator, when the temperature reaches a three-phase point of the gas, the cryogenic liquefaction cavity is filled with liquid and submerged with the gas, so that the submerged gas liquefaction cryogenic experiment device is required to have the functions of good vacuum environment and shielding external heat radiation, and meanwhile, the submerged gas liquefaction cryogenic experiment device is also required to have the functions of lifting, charging and discharging and easy replacement of the test sample. The cryogenic liquefaction cavity is arranged on a secondary cold head of the refrigerator, but if the cryogenic liquefaction cavity is a large-size test sample, the internal space of the cryogenic liquefaction cavity is limited and the power of the refrigerator is limited, so that higher requirements are provided for the heat shielding capability of a temperature raising and reducing and low-temperature shielding cover of the cryogenic liquefaction cavity.
Disclosure of Invention
The submerged gas liquefaction cryogenic experiment device is good in cooling and temperature control effect and convenient to detach and replace.
The invention provides a submerged gas liquefaction cryogenic experiment device, which comprises a base, wherein a seat frame is arranged above the base, a refrigerator is longitudinally arranged on the seat frame, a vacuum cylinder is arranged outside the refrigerator, a vacuum chamber is arranged inside the vacuum cylinder, a hollow cryogenic liquefaction cavity is arranged on a cold head of the refrigerator, a sealing knife edge flange cover is arranged above the cryogenic liquefaction cavity, the sealing knife edge flange cover is provided with an annular knife edge, the section of the annular knife edge is wedge-shaped, the annular knife edge is pre-pressed and sealed with a sealing surface of the cryogenic liquefaction cavity through a screw, and the thermal shrinkage rate of the sealing knife edge flange cover is smaller than that of the cryogenic liquefaction cavity, so that the wedge-shaped section of the annular knife edge is gradually and tightly attached with the sealing surface of the cryogenic liquefaction cavity along with the temperature reduction; the temperature controller controls the heating block according to temperature data transmitted by the temperature sensor so as to accurately control the temperature in the cryogenic liquefaction cavity; the cryogenic liquefaction chamber is provided with a first air passage, the first air passage is connected with an inflation system, the vacuum chamber is provided with a second air passage, the second air passage is connected with the vacuum system, a third air passage is arranged between the first air passage and the second air passage, a third valve is arranged on the first air passage, a first valve is arranged on the second air passage, a second valve is arranged on the third air passage, and a fourth valve is arranged on the inflation system.
Preferably, the vacuum cylinder is fixedly connected with the refrigerator through a vacuum base flange.
Preferably, a flange supporting rod is arranged below the vacuum base flange, and the flange supporting rod is supported on the base.
Preferably, the refrigerator is a G-M refrigerator.
Preferably, an upper cover is arranged at the top of the vacuum cylinder body, and the upper cover is tightly sealed above the vacuum chamber through bolts.
Preferably, the temperature control precision of the temperature controller on the temperature of the cryogenic liquefaction cavity is 4.2 k-20 k+/-1 mk.
Preferably, the first air passage is fixed on the cryogenic liquefaction cavity by laser welding.
Preferably, a first-stage low-temperature shield is arranged outside the refrigerator, the cryogenic liquefaction cavity is positioned inside the first-stage low-temperature shield, and the first-stage low-temperature shield is positioned inside the vacuum chamber.
Preferably, the sealing surface of the cryogenic liquefaction chamber is a rough surface.
According to another aspect of the invention, there is provided a submerged gas liquefaction cryogenic experiment method comprising the steps of:
and (3) vacuumizing: placing a test sample in the cryogenic liquefaction cavity, starting a vacuum system, opening a first valve, a second valve and a third valve, closing a fourth valve, and simultaneously vacuumizing the vacuum chamber and the cryogenic liquefaction cavity for more than or equal to 6 hours;
A gas replacement step: when the vacuum degree reaches 5X 10 -4 Pa, closing the second valve, opening the fourth valve, starting the inflation system, filling gas to be liquefied into the cryogenic liquefaction cavity, closing the inflation system after normal pressure is reached, closing the fourth valve, opening the third valve, extracting the filled gas, and repeating the same inflation and replacement process twice after the vacuum degree reaches 5X 10 -4 Pa, so as to ensure that no impurity gas exists in the cryogenic liquefaction cavity;
And (3) cooling: the refrigerator is started, the temperature of the primary low-temperature shielding is set to be less than or equal to 120k, the temperature of the cryogenic liquefaction cavity is set to be the three-phase point temperature of the required liquefied gas, and the temperature of the cryogenic liquefaction cavity is accurately controlled to reach the three-phase point of the frozen gas;
And (3) aerating and liquefying: closing the second valve, opening the third valve and the fourth valve, starting the inflation system, filling the gas to be liquefied into the cryogenic liquefaction cavity, gradually rising the liquid level until the test sample is submerged and the cryogenic liquefaction cavity is full of the gas, closing the inflation system and the fourth valve, and keeping the test sample in the liquefied gas for a set test time;
Ending the steps: and opening the first valve, the second valve and the third valve, heating the cryogenic liquefaction cavity, setting the temperature to be higher than the three-phase point of gas to gasify and evacuate the liquid, sequentially closing the third valve, the second valve and the first valve after the pressure in the cryogenic liquefaction cavity is lower than normal pressure, closing the vacuum system, naturally returning the cryogenic liquefaction cavity to normal temperature, deflating the vacuum chamber and the cryogenic liquefaction cavity, balancing the atmospheric pressure, removing the upper cover of the vacuum chamber, removing the sealing knife edge flange cover on the cryogenic liquefaction cavity, and finally taking out the test sample.
The invention has simple structure, easy manufacture, good cooling and temperature control effect, convenient disassembly and replacement and suitability for various gases.
Drawings
FIG. 1 is a schematic diagram of a submerged gas liquefaction cryogenic experiment device in a main section;
FIG. 2 is an enlarged schematic view of a portion of FIG. 1 at A;
fig. 3 is a schematic perspective sectional view of the submerged gas liquefaction cryogenic experiment device of the invention.
1. A base; 2. a mounting; 3. a flange support rod; 4. a vacuum base flange; 5. a refrigerating machine; 6. a vacuum chamber; 7. first-stage low-temperature shielding; 8. a first air path; 9. a cryogenic liquefaction chamber; 10. a test sample; 11. a heating block; 12. a temperature sensor; 13. sealing the knife edge flange cover; 14. an upper cover; 15. a first valve; 16. a second valve; 17. a third valve; 18. a fourth valve; 19. a vacuum system; 20. an inflation system; 21. a temperature controller; 22. a vacuum cylinder; 23. an annular knife edge; 24. a second air path; 25. and a third air path.
Detailed Description
The following detailed description of the preferred embodiments of the invention is provided to enable those skilled in the art to more readily understand the advantages and features of the invention and to make a clear and concise definition of the scope of the invention.
Referring to fig. 1, fig. 1 is a schematic main section view of a submerged gas liquefaction cryogenic experiment device of the invention, which comprises a base 1, a seat frame 2 is arranged above the base 1, a refrigerator 5 is longitudinally arranged on the seat frame 2, a vacuum cylinder 22 is arranged outside the refrigerator 5, a vacuum chamber 6 is arranged inside the vacuum cylinder 22, a hollow cryogenic liquefaction cavity 9 is arranged on a cold head of the refrigerator 5, the vacuum cylinder 22 is fixedly connected with the refrigerator 5 through a vacuum base flange 4, a flange support rod 3 is arranged below the vacuum base flange 4, and the flange support rod 3 is supported on the base 1. An upper cover 14 is mounted on top of the vacuum cylinder 22, and the upper cover 14 is tightly sealed above the vacuum chamber 6 by bolts. The outside of refrigerator 5 is provided with one-level low temperature shielding 7, and cryogenic liquefaction chamber 9 is located one-level low temperature shielding 7 inside, and one-level low temperature shielding 7 is located vacuum chamber 6 inside.
The refrigerator 5 is a G-M refrigerator, which mainly comprises a compressor unit (including a helium compressor, a low-pressure gas storage tank, a high-pressure gas storage tank, and a cooler), an expander (including a cylinder and a pushing piston), a gas distribution mechanism (including a driving mechanism, an air inlet valve, and an air outlet valve), a regenerator, and a cold head heat exchanger. The components of the compressor unit are connected through pipelines, and the air inlet valve and the air outlet valve are both at room temperature and are controlled to be opened and closed by mechanical/pneumatic drive so as to control the air flow, the circulating pressure and the volume passing through the cold accumulator and the expander. The cold accumulator is filled with cold accumulating material such as phosphor copper net, lead ball, etc. and cold and hot air flow periodically and alternately passes through the cold accumulator to store and recover cold. The cold head heat exchanger is used for outputting cold energy. The cylinder and the pushing piston of the expander are in sealing fit through the piston ring, so that gas between the cold and hot cavities is prevented from being mixed. The up-and-down movement of the pushing piston is controlled by a small crankshaft, which is combined with a control mechanism of the air inlet and outlet valve and driven by a micro motor. The opening and closing of the air inlet and outlet valve are matched with the moving position of the pushing piston according to a certain phase angle so as to ensure the thermodynamic cycle of the refrigerator.
The G-M refrigerator is cooled by simon expansion (adiabatic deflation principle), and its ideal thermodynamic cycle can be divided into 4 processes: adiabatic boost, isobaric intake, adiabatic bleed and isobaric exhaust. Wherein the Simon expansion generates cold energy, and the cold accumulator plays a role in realizing heat exchange between cold and hot air flows so as to obtain the lowest possible refrigeration temperature. In another embodiment of the present invention, a single high power chiller or multiple chillers may be used in parallel to increase the cooling power and heat shielding capabilities of the shield.
Fig. 2 is a partial enlarged schematic diagram of a position a in fig. 1, a sealing knife edge flange cover 13 is installed above the cryogenic liquefaction cavity 9, the sealing knife edge flange cover 13 is provided with an annular knife edge 23, the section of the annular knife edge 23 is wedge-shaped, the annular knife edge 23 is in prepressing sealing with a sealing surface of the cryogenic liquefaction cavity 9 through a screw, the thermal shrinkage rate of the sealing knife edge flange cover 13 is smaller than that of the cryogenic liquefaction cavity 9, the sealing surface of the cryogenic liquefaction cavity 9 is a rough surface, and the wedge-shaped section of the annular knife edge 23 is gradually tightly attached with the sealing surface of the cryogenic liquefaction cavity 9 along with temperature reduction in a cryogenic temperature state, so that the sealing of filled gas and liquid gas is ensured.
Fig. 3 is a schematic perspective sectional view of the submerged gas liquefaction cryogenic experiment device of the invention. The cryogenic liquefaction cavity 9 is provided with a heating block 11 and a temperature sensor 12, the heating block 11 and the temperature sensor 12 are respectively connected with a temperature controller 21, the temperature controller 21 controls the temperature of the cryogenic liquefaction cavity 9 to be 4.2k-20k+/-1 mk, and the temperature controller 21 controls the heating block 11 according to temperature data transmitted back by the temperature sensor 12 so as to accurately control the temperature in the cryogenic liquefaction cavity 9.
The cryogenic liquefaction cavity 9 is provided with a first air passage 8, the first air passage 8 is connected with the inflation system 20, the vacuum chamber 6 is provided with a second air passage 24, the second air passage 24 is connected with the vacuum system 19, a third air passage 25 is arranged between the first air passage 8 and the second air passage 24, a third valve 17 is arranged on the first air passage 8, a first valve 15 is arranged on the second air passage 24, a second valve 16 is arranged on the third air passage 25, and the inflation system 20 is provided with a fourth valve 18. The first gas circuit 8 is fixed on the cryogenic liquefaction chamber 9 by laser welding.
The submerged gas liquefaction cryogenic experiment method provided by the invention comprises the following steps:
And (3) vacuumizing: placing a test sample 10 in the cryogenic liquefaction cavity 9, starting a vacuum system 19, opening a first valve 15, a second valve 16 and a third valve 17, closing a fourth valve 18, and simultaneously vacuumizing the vacuum chamber 6 and the cryogenic liquefaction cavity 9 for more than or equal to 6 hours;
A gas replacement step: when the vacuum degree reaches 5×10 -4 Pa, closing the second valve 16, opening the fourth valve 18, starting the inflation system 20, filling gas to be liquefied into the cryogenic liquefaction cavity 9, closing the inflation system 20 after reaching normal pressure, closing the fourth valve 18, opening the third valve 17, extracting the filled gas, and repeating the same inflation replacement process twice after the vacuum degree reaches 5×10 -4 Pa to ensure that no impurity gas exists in the cryogenic liquefaction cavity 9;
And (3) cooling: the refrigerator 5 is opened, the temperature of the primary low-temperature shielding 7 is set to be less than or equal to 120k, the temperature of the cryogenic liquefaction cavity 9 is set to be the three-phase point temperature of the required liquefied gas, and the temperature of the cryogenic liquefaction cavity 9 is accurately controlled to reach the three-phase point of the frozen gas;
And (3) aerating and liquefying: closing the second valve 16, opening the third valve 17 and the fourth valve 18, starting the inflation system 20, filling the gas to be liquefied into the cryogenic liquefaction cavity 9, liquefying the gas after the saturated vapor pressure and the temperature of the gas meet the liquefaction conditions, gradually raising the liquid level until the test sample 10 is submerged and the cryogenic liquefaction cavity 9 is filled with the gas along with continuous injection and liquefaction of the gas, closing the inflation system 20 and the fourth valve 18, and keeping the test sample 10 in the liquefied gas for a set test time;
Ending the steps: the first valve 15, the second valve 16 and the third valve 17 are opened, the cryogenic liquefaction cavity 9 is heated at the same time, the temperature is set to be higher than the three-phase point of gas to gasify and evacuate the liquid, the liquid gas is gradually gasified and evacuated by a vacuum system until the liquid gas is completely gasified and evacuated, the pressure in the cryogenic liquefaction cavity 9 is lower than normal pressure, the third valve 17, the second valve 16 and the first valve 15 are sequentially closed, the vacuum system 19 is closed, the cryogenic liquefaction cavity 9 naturally returns to normal temperature, the vacuum chamber 6 and the cryogenic liquefaction cavity 9 are deflated, the upper cover 14 of the vacuum chamber 6 is removed after the pressure is balanced with the atmospheric pressure, the sealing knife edge flange cover 13 on the cryogenic liquefaction cavity 9 is removed, and finally the test sample 10 is taken out.
The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and to implement the same, but are not intended to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention are included in the scope of the present invention.
Claims (10)
1. A submerged gas liquefaction cryogenic experiment device is characterized in that: the refrigerator comprises a base (1), wherein a seat frame (2) is arranged above the base (1), a refrigerator (5) is longitudinally arranged on the seat frame (2), a vacuum cylinder body (22) is arranged outside the refrigerator (5), a vacuum chamber (6) is arranged inside the vacuum cylinder body (22), a hollow cryogenic liquefaction cavity (9) is arranged on a cold head of the refrigerator (5), a sealing knife edge flange cover (13) is arranged above the cryogenic liquefaction cavity (9), the sealing knife edge flange cover (13) is provided with an annular knife edge (23), the cross section of the annular knife edge (23) is in a wedge shape, the annular knife edge (23) is pre-pressed and sealed with the sealing surface of the cryogenic liquefaction cavity (9) through a screw, and the thermal shrinkage rate of the sealing knife edge flange cover (13) is smaller than that of the cryogenic liquefaction cavity (9), so that the wedge-shaped cross section of the annular knife edge (23) is gradually and tightly attached with the sealing surface of the cryogenic liquefaction cavity (9) along with the temperature reduction; wherein,
The cryogenic liquefying cavity (9) is provided with a heating block (11) and a temperature sensor (12), the heating block (11) and the temperature sensor (12) are respectively connected with a temperature controller (21), and the temperature controller (21) controls the heating block (11) according to temperature data transmitted back by the temperature sensor (12) so as to accurately control the temperature in the cryogenic liquefying cavity (9);
The cryogenic liquefaction chamber (9) have first gas circuit (8), first gas circuit (8) link to each other with gas charging system (20), vacuum chamber (6) have second gas circuit (24), second gas circuit (24) link to each other with vacuum system (19), first gas circuit (8) and second gas circuit (24) between be provided with third gas circuit (25), first gas circuit (8) on be provided with third valve (17), second gas circuit (24) on be provided with first valve (15), third gas circuit (25) on be provided with second valve (16), gas charging system (20) be provided with fourth valve (18).
2. The submerged gas liquefaction cryogenic experiment device according to claim 1, wherein: the vacuum cylinder body (22) is fixedly connected with the refrigerator (5) through the vacuum base flange (4).
3. The submerged gas liquefaction cryogenic experiment device according to claim 2, wherein: the vacuum base is characterized in that a flange supporting rod (3) is arranged below the vacuum base flange (4), and the flange supporting rod (3) is supported on the base (1).
4. The submerged gas liquefaction cryogenic experiment device according to claim 1, wherein: the refrigerator (5) is a G-M refrigerator.
5. The submerged gas liquefaction cryogenic experiment device according to claim 1, wherein: an upper cover (14) is arranged at the top of the vacuum cylinder body (22), and the upper cover (14) is tightly sealed above the vacuum chamber (6) through bolts.
6. The submerged gas liquefaction cryogenic experiment device according to claim 1, wherein: the temperature control device (21) controls the temperature of the cryogenic liquefaction cavity (9) to be 4.2k-20k+/-1 mk.
7. The submerged gas liquefaction cryogenic experiment device according to claim 1, wherein: the first air passage (8) is fixed on the cryogenic liquefaction cavity (9) through laser welding.
8. The submerged gas liquefaction cryogenic experiment device according to claim 1, wherein: the refrigerator (5) is provided with a first-stage low-temperature shielding (7) outside, the cryogenic liquefaction cavity (9) is located inside the first-stage low-temperature shielding (7), and the first-stage low-temperature shielding (7) is located inside the vacuum chamber (6).
9. The submerged gas liquefaction cryogenic experiment device according to claim 1, wherein: the sealing surface of the cryogenic liquefaction cavity (9) is a rough surface.
10. A submerged gas liquefaction cryogenic experiment method, which is used for the submerged gas liquefaction cryogenic experiment device as claimed in claims 1 to 9, and is characterized in that: the method comprises the following steps:
and (3) vacuumizing: placing a test sample (10) in the cryogenic liquefaction cavity (9), starting a vacuum system (19), opening a first valve (15), a second valve (16) and a third valve (17), closing a fourth valve (18), and simultaneously vacuumizing the vacuum chamber (6) and the cryogenic liquefaction cavity (9) for more than or equal to 6 hours;
A gas replacement step: when the vacuum degree reaches 5X 10 -4 Pa, closing the second valve (16), opening the fourth valve (18), starting the inflation system (20), filling gas to be liquefied into the cryogenic liquefaction cavity (9), closing the inflation system (20) after reaching normal pressure, closing the fourth valve (18), opening the third valve (17), extracting the filled gas, and repeating the same inflation and replacement process twice after the vacuum degree reaches 5X 10 -4 Pa, so as to ensure that no impurity gas exists in the cryogenic liquefaction cavity (9);
And (3) cooling: the refrigerator (5) is opened, the temperature of the primary low-temperature shielding (7) is set to be less than or equal to 120k, the temperature of the cryogenic liquefaction cavity (9) is set to be the three-phase point temperature of the required liquefied gas, and the temperature of the cryogenic liquefaction cavity (9) is accurately controlled to reach the three-phase point of the frozen gas;
and (3) aerating and liquefying: closing the second valve (16), opening the third valve (17) and the fourth valve (18), starting the inflation system (20), filling the gas to be liquefied into the cryogenic liquefaction cavity (9), gradually rising the liquid level until the test sample (10) is submerged and the cryogenic liquefaction cavity (9) is full, closing the inflation system (20) and the fourth valve (18), and keeping the test sample (10) in the liquefied gas for a set test time;
Ending the steps: the method comprises the steps of opening a first valve (15), a second valve (16) and a third valve (17), heating a cryogenic liquefaction cavity (9) at the same time, setting the temperature to be higher than a three-phase point of gas to enable liquid to be gasified and pumped out, closing the third valve (17), the second valve (16) and the first valve (15) in sequence after the pressure in the cryogenic liquefaction cavity (9) is lower than normal pressure, closing a vacuum system (19), naturally returning the cryogenic liquefaction cavity (9) to normal temperature, deflating the vacuum chamber (6) and the cryogenic liquefaction cavity (9) after balancing with atmospheric pressure, taking down an upper cover (14) of the vacuum chamber (6), taking down a sealing knife edge flange cover (13) on the cryogenic liquefaction cavity (9), and finally taking out a test sample (10).
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