CN109668869A - A kind of hand-held reflection Confocal laser-scanning microscopy detection device - Google Patents
A kind of hand-held reflection Confocal laser-scanning microscopy detection device Download PDFInfo
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- CN109668869A CN109668869A CN201811624059.2A CN201811624059A CN109668869A CN 109668869 A CN109668869 A CN 109668869A CN 201811624059 A CN201811624059 A CN 201811624059A CN 109668869 A CN109668869 A CN 109668869A
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- mirror
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- Chemical & Material Sciences (AREA)
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- Immunology (AREA)
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- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
A kind of hand-held reflection Confocal laser-scanning microscopy detection device belongs to laser technology field, it is therefore intended that solves the problems, such as that resolution ratio of the existing technology is low, can not carry out accurate spectral measurement and explain.The present invention includes confocal Raman detection optical path and catoptric imaging optical path;In Raman detection optical path, laser enters through laser fiber access interface, after dichroic filters filtering reflective, reach MEMS scanning mirror, object lens are reached after changing polarization state, spectroscope light splitting via supplementary lens transmission, refluxing reflection mirror reflection, the transmission of postposition lens, quarter-wave plate again after the reflection of MEMS scanning mirror, reach sample after object lens and hemisphere front lens, the Raman light reflected from sample, it is returned along original optical path, enters Raman optical output port through dichroic filters;In catoptric imaging optical path, for LED illumination on sample surface, the visible light under LED illumination reaches camera through hemisphere front lens, object lens, spectroscope and imaging and focusing mirror, realizes sample surfaces imaging.
Description
Technical field
The invention belongs to laser technology fields, and in particular to a kind of hand-held reflection Confocal laser-scanning microscopy detection device.
Background technique
Raman detection is a kind of spectral detection means of fast development, be widely used in skiing, material, archaeology, false distinguishing with
And the fields such as criminal investigation, the mechanism of Raman scattering are that beam of laser is radiated on sample to be tested briefly, then sample to be tested scatters
Raman diffused light out, Raman diffused light is connect by detector to be searched and carries out signal processing.
Generally use large-scale desk-top microscope currently with the research of these technologies, and be not suitable for laboratory environment it
Outer use.And common Handheld Raman spectrum does not have the micrometer resolution of cell grade generally, researcher can not be to sample
Accurate spectral measurement and explanation are carried out, thus a kind of hand-held of demand reflects Confocal laser-scanning microscopy detection device.
Summary of the invention
It is an object of the invention to propose a kind of hand-held reflection Confocal laser-scanning microscopy detection device, the prior art is solved
Existing resolution ratio is low, the problem of can not carrying out accurate spectral measurement and explaining.
To achieve the above object, a kind of hand-held of the invention reflection Confocal laser-scanning microscopy detection device includes confocal
Raman detection optical path and catoptric imaging optical path;
The Raman detection optical path includes: Raman optical output port, laser fiber access interface, dichroic filters, MEMS
Scanning mirror, refluxing reflection mirror, quarter-wave plate, spectroscope, object lens, hemisphere front lens, supplementary lens and postposition lens;Laser
Enter through laser fiber access interface, after dichroic filters filtering reflective, reaches MEMS scanning mirror, reflected through MEMS scanning mirror
Change polarization state, light splitting via supplementary lens transmission, refluxing reflection mirror reflection, the transmission of postposition lens, quarter-wave plate again afterwards
Object lens are reached after mirror light splitting, reach sample after object lens and hemisphere front lens, the Raman light reflected from sample, along
Original optical path returns, and enters Raman optical output port through dichroic filters;
The catoptric imaging optical path includes: imaging and focusing mirror, camera and LED;LED illumination is on sample surface, in LED
Visible light under irradiation reaches camera through hemisphere front lens, object lens, spectroscope and imaging and focusing mirror, realizes sample surfaces imaging.
The dichroic filters include two dichronic mirrors and two filter plates;The laser warp that laser fiber access interface enters
Another dichronic mirror is refracted to through a dichronic mirror again after one filter plate filtering, enters MEMS through another dichroic mirror
Scanning mirror;The Raman light reflected from sample transmits after the reflection of MEMS scanning mirror through another dichronic mirror, then through another
Raman optical output port is reached after filter plate filtering.
The detection device further includes focusing structure, the focusing structure include linear motor and with the linear motor
The focusing frame of connection, linear motor drive the object lens to move back and forth by focusing frame.
Raman optical output port and laser fiber access interface are optical fiber interface.
The invention has the benefit that a kind of hand-held of the invention reflects Confocal laser-scanning microscopy detection device for laser
Scanning confocal catoptric imaging and Confocal laser-scanning microscopy are combined together, and integrally further include a hand-held probe, laser scanning
Confocal reflection imaging and Confocal laser-scanning microscopy combine the compact hand-held probe in, the probe can in various environment into
Row high-resolution imaging and spectrum analysis.The instrument can be such that researcher carries out under reflection Laser Scanning Confocal Microscope imaging guidance
More accurate minute yardstick raman spectroscopy measurement, to carry out accurate spectral measurement and explanation to the sample in research.Pass through
Confocal laser-scanning microscopy detection is realized in the scanning of MEMS scanning mirror and the back-and-forth motion of the object lens under the control of linear motor
Purpose.Focused light passages and Raman optical path are total to optical path altogether, can be used for the raman spectroscopy measurement in reflecting surfaces such as skins.
Detailed description of the invention
Fig. 1 is that a kind of hand-held of the invention reflects Confocal laser-scanning microscopy structure of the detecting device schematic diagram;
Wherein: 1, Raman optical output port, 2, laser fiber access interface, 3, dichroic filters, 4, dichronic mirror, 5, filtering
Piece, 6, MEMS scanning mirror, 7, refluxing reflection mirror, 8, quarter-wave plate, 9, spectroscope, 10, imaging and focusing mirror, 11, camera,
12, object lens, 13, LED, 14, linear motor, 15, focusing frame, 16, hemisphere front lens, 17, sample, 18, supplementary lens,
19, postposition lens.
Specific embodiment
Embodiments of the present invention are described further with reference to the accompanying drawing.
Referring to attached drawing 1, a kind of hand-held reflection Confocal laser-scanning microscopy detection device of the invention includes confocal Raman
Light path and catoptric imaging optical path;
The Raman detection optical path include: Raman optical output port 1, laser fiber access interface 2, dichroic filters 3,
MEMS scanning mirror 6, refluxing reflection mirror 7, quarter-wave plate 8, spectroscope 9, object lens 12, hemisphere front lens 16, supplementary lens 18
With postposition lens 19;Laser enters through laser fiber access interface 2, after 3 filtering reflective of dichroic filters, reaches MEMS scanning
Mirror 6, again via the transmission of supplementary lens 18, the reflection of refluxing reflection mirror 7, the transmission of postposition lens 19, four after the reflection of MEMS scanning mirror 6
Object lens 12 are reached after/mono- wave plate 8 changes polarization state, spectroscope 9 is divided, reach quilt after object lens 12 and hemisphere front lens 16
Sample 17, the Raman light reflected from sample 17, returns along original optical path, enters Raman light output through dichroic filters 3
Port 1;
The catoptric imaging optical path includes: imaging and focusing mirror 10, camera 11 and LED13;LED13 is radiated at sample 17
Surface, the visible light under LED13 irradiation reach camera through hemisphere front lens 16, object lens 12, spectroscope 9 and imaging and focusing mirror 10
11, realize sample surfaces imaging.
The dichroic filters 3 include two dichronic mirrors 4 and two filter plates 5;What laser fiber access interface 2 entered
Laser refracts to another dichronic mirror 4 through a dichronic mirror 4 again after a filter plate 5 filters, and reflects through another dichronic mirror 4
Enter MEMS scanning mirror 6;The Raman light reflected from sample 17 is after the reflection of MEMS scanning mirror 6 through another dichronic mirror 4
Transmission, then Raman optical output port 1 is reached after the filtering of another filter plate 5.
The detection device further includes focusing structure, the focusing structure include linear motor 14 and with the straight-line electric
The focusing frame 15 that machine 14 connects, linear motor 14 drive the object lens 12 to move back and forth by frame 15 of focusing, and object lens 12 are fixed on
It focuses on frame 15.
Raman optical output port 1 and laser fiber access interface 2 are optical fiber interface, scanning by MEMS scanning mirror 6 into
Row scanning, object lens 12 are moved forward and backward under the drive of linear motor 14, and hemisphere front lens 16 mentions the NA of object lens 12
It rises, carries out accurately micro-meter scale coke Raman spectrum detection under the common guiding of reflection confocal microscopy and camera 11.
Claims (4)
1. a kind of hand-held reflects Confocal laser-scanning microscopy detection device, which is characterized in that including confocal Raman detection optical path
With catoptric imaging optical path;
The Raman detection optical path include: Raman optical output port (1), laser fiber access interface (2), dichroic filters (3),
MEMS scanning mirror (6), refluxing reflection mirror (7), quarter-wave plate (8), spectroscope (9), object lens (12), hemisphere front lens
(16), supplementary lens (18) and postposition lens (19);Laser enters through laser fiber access interface (2), by dichroic filters (3)
It after filtering reflective, reaches MEMS scanning mirror (6), transmits, turns back via supplementary lens (18) again after MEMS scanning mirror (6) reflection
Reflecting mirror (7) reflection, postposition lens (19) transmission, quarter-wave plate (8) reach after changing polarization state, spectroscope (9) light splitting
Object lens (12) reach sample (17) after object lens (12) and hemisphere front lens (16), the drawing reflected from sample (17)
Graceful light, returns along original optical path, enters Raman optical output port (1) through dichroic filters (3);
The catoptric imaging optical path includes: imaging and focusing mirror (10), camera (11) and LED (13);LED (13) is radiated at detected sample
Product (17) surface, the visible light under LED (13) irradiation are poly- through hemisphere front lens (16), object lens (12), spectroscope (9) and imaging
Jiao Jing (10) reaches camera (11), realizes sample surfaces imaging.
2. a kind of hand-held according to claim 1 reflects Confocal laser-scanning microscopy detection device, which is characterized in that described
Dichroic filters (3) include two dichronic mirrors (4) and two filter plates (5);The laser warp that laser fiber access interface (2) enters
Another dichronic mirror (4) is refracted to through a dichronic mirror (4) again after one filter plate (5) filtering, it is anti-through another dichronic mirror (4)
It penetrates and enters MEMS scanning mirror (6);From sample (17) reflect Raman light through MEMS scanning mirror (6) reflection after mirror through another
A dichronic mirror (4) transmission, then Raman optical output port (1) is reached after the filtering of another filter plate (5).
3. a kind of hand-held according to claim 1 or 2 reflects Confocal laser-scanning microscopy detection device, which is characterized in that
The detection device further includes focusing structure, the focusing structure include linear motor (14) and with the linear motor (14)
The focusing frame (15) of connection, linear motor (14) drive the object lens (12) to move back and forth by focusing frame (15).
4. a kind of hand-held according to claim 1 reflects Confocal laser-scanning microscopy detection device, which is characterized in that Raman
Optical output port (1) and laser fiber access interface (2) are optical fiber interface.
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Application publication date: 20190423 |