CN109647549A - A kind of hydrophobic dielectric film and a kind of micro-fluidic chip easily replaced - Google Patents
A kind of hydrophobic dielectric film and a kind of micro-fluidic chip easily replaced Download PDFInfo
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- CN109647549A CN109647549A CN201811542157.1A CN201811542157A CN109647549A CN 109647549 A CN109647549 A CN 109647549A CN 201811542157 A CN201811542157 A CN 201811542157A CN 109647549 A CN109647549 A CN 109647549A
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- dielectric film
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- hydrophobic dielectric
- fluidic chip
- hydrophobic
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- 230000002209 hydrophobic effect Effects 0.000 title claims abstract description 52
- 239000003921 oil Substances 0.000 claims description 14
- 235000019198 oils Nutrition 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 10
- 239000012530 fluid Substances 0.000 claims description 9
- 238000009413 insulation Methods 0.000 claims description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims description 2
- 150000002148 esters Chemical class 0.000 claims description 2
- 150000002170 ethers Chemical class 0.000 claims description 2
- 239000002480 mineral oil Substances 0.000 claims description 2
- 235000010446 mineral oil Nutrition 0.000 claims description 2
- -1 polysiloxanes Polymers 0.000 claims description 2
- 235000015112 vegetable and seed oil Nutrition 0.000 claims description 2
- 239000008158 vegetable oil Substances 0.000 claims description 2
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 230000015556 catabolic process Effects 0.000 description 6
- 238000011160 research Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 108090000623 proteins and genes Proteins 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000002203 pretreatment Methods 0.000 description 3
- 102000004169 proteins and genes Human genes 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000002242 deionisation method Methods 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 2
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- STYHKGTUMYFCLA-UHFFFAOYSA-N 1-ethenoxybut-1-ene Chemical compound CCC=COC=C STYHKGTUMYFCLA-UHFFFAOYSA-N 0.000 description 1
- VRBFTYUMFJWSJY-UHFFFAOYSA-N 28804-46-8 Chemical compound ClC1CC(C=C2)=CC=C2C(Cl)CC2=CC=C1C=C2 VRBFTYUMFJWSJY-UHFFFAOYSA-N 0.000 description 1
- 238000001712 DNA sequencing Methods 0.000 description 1
- 206010019133 Hangover Diseases 0.000 description 1
- 238000003559 RNA-seq method Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000003759 clinical diagnosis Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000008157 edible vegetable oil Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002362 mulch Substances 0.000 description 1
- 239000002547 new drug Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000003075 superhydrophobic effect Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000003053 toxin Substances 0.000 description 1
- 231100000765 toxin Toxicity 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 239000011850 water-based material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
Abstract
The invention discloses hydrophobic dielectric film and a kind of micro-fluidic chip that one kind is easily replaced, the hydrophobic dielectric films easily replaced, including hydrophobic dielectric film and the frame being attached on the hydrophobic dielectric film.Hydrophobic dielectric film surface provided by the invention is smooth, it is laid on the micro-fluidic chip being prepared in the driving electrodes coated with insulating liquid and is able to solve defect existing for the mode for directlying adopt plate hydrophobic dielectric film in driving electrodes in the prior art, it is readily replaceable and reduce costs, as long as replacing the hydrophobic dielectric film below drop when needed, do not need together to abandon following driving electrodes, micro-fluidic chip field with good application prospect.
Description
Technical field
The present invention relates to micro-fluidic chip field, the hydrophobic dielectric film and a kind of miniflow easily replaced more particularly, to one kind
Control chip.
Background technique
Genomics and proteomics are the big particularly important research fields of current field of biomedicine two.DNA/RNA
Sequencing is the important component of genomics, library construction gigantic project, somewhat expensive before being sequenced, and very time-consuming, one
Well-trained operator, which needs to be implemented nearly 60 steps, can just get out sample, and a sample needs to work more than 12.5 small
When, that is, 1.5 working days (8 hours/working day), prepare 4 samples and then needs 6 day time.If 4 samples in parallel into
Row, prepares 32 samples, needs 12 day time, while the risk for also needing to evade pollution or making a mistake, the quality of library construction are straight
Connect the success or failure that decide sequencing experiment;And in the structure and function to detect protein on a large scale for main syllabus target protein group
It learns in research, to verify the structure of protein, top priority is exactly the albumen carried out extensive Mass Spectrometer Method and obtain high quality
Matter crystallization, therefore it is related to a large amount of sample pretreatments and the screening of optimal crystallization condition.Above-mentioned work is inherently a sample
Processing problem, target sample therein is rare, and expensive, the scale of construction is minimum, and treatment process is many and diverse, and some is also anti-comprising certain chemistry
It answers.For a period of time, academia and industrial circle are seeking always ideal genomics and the general big rule of proteomics
Mould, efficient sample process technology.
Microfluidic chip technology is considered solving an important potential platform of above-mentioned great amount of samples pre-treatment.It is micro-fluidic
The essential characteristic and sharpest edges of chip are that a variety of monotechnicses flexible combination and scale in small controllable platform are integrated.Drop
Microflow control technique is an important branch in micro-fluidic chip field, has precisely manipulation, reconfigurable, parallel work-flow etc. excellent
Gesture.As research deepens continuously, digital drop microflow control technique gradually shows the great potential for being different from existing other technologies.
Digital drop microflow control technique feature be it is flexible, easy-to-use and versatile, for being engaged in the end of biomedical research
It will be a revolutionary tool for end subscriber.Its potential application includes but is not limited to: gene and proteomics sample
Pre-treatment, unicellular research, the instant detection of clinical diagnosis, toxin and the detecting and identification of germ, environmental monitoring, new drug sieve
Choosing and fine chemistry industry synthesis etc..
The prior art is usually using the hydrophobic dielectric film mode of direct plating on the electrode, and there are the following problems: 1. is hydrophobic
Dielectric film is connected directly with driving electrodes plate, is easy breakdown;2. being be easy to cause since driving electrodes plate surface is uneven
The hydrophobic dielectric film surface flatness of top is inadequate;3. when hydrophobic dielectric film is damaged or needs replacing hydrophobic dielectric film
When, the driving electrodes of connection can only be abandoned together, cause the unnecessary waste of driving electrodes plate.The application is intended to develop a kind of dredge
Water dielectric film is used for digital microcurrent-controlled chip, it is therefore an objective to improve existing chip surface problem.
Summary of the invention
In view of the deficiencies of the prior art, technical problem to be solved by the invention is to provide the hydrophobic dielectrics that one kind is easily replaced
Film and a kind of micro-fluidic chip.
The technical solution used in the present invention is:
The present invention provides a kind of hydrophobic dielectric film easily replaced, including hydrophobic dielectric film and is attached to the hydrophobic dielectric
Frame on film.
Preferably, the material of the frame is selected from any one of aluminium, acrylic.In order to play the hydrophobic dielectric film of support
With the purpose of save the cost, frame material, which is generally selected, to be unlikely to deform and the material of easy processing.
Preferably, the hydrophobic dielectric film includes dielectric layer and hydrophobic layer.Hydrophobic dielectric film of the invention can be
The double-layer structure of traditional dielectric layer and hydrophobic layer composition is such as dredged in dielectric layer Parylene (Parylene-C) applied atop
Water-based material Teflon (teflon), with hydrophobicity and dielectricity while being also possible to substitute traditional double-layer structure
One layer of structure such as CYTOP (perfluoro (1-butenyl vinyl ether) polymer).The present invention is suitable for all dredge
Water material includes CYTOP, PDMS and various business super hydrophobic coatings, such as neverwet (R), Fluoropel (Cytonix),
Ultra-Ever Dry etc..
The present invention also provides a kind of micro-fluidic chips, including driving electrodes, coated in the dielectric in the driving electrodes
Body layer and the above-mentioned hydrophobic dielectric film being arranged on the insulating fluid layer.
Preferably, the micro-fluidic chip is single side driving structure or double-side driving structure.
Preferably, dielectric constant > 1.1 of the material of the insulating fluid layer.
Preferably, the material of the insulating fluid layer is natural insulation oil or artificial synthesized insulating oil.
It is further preferred that the natural insulation oil is selected from vegetable oil and mineral oil.
It is further preferred that the artificial synthesized insulating oil is selected from arene insulating oil, ethers insulating oil, esters insulation
Oil and silicone oil.
The beneficial effects of the present invention are:
The present invention provides a kind of hydrophobic dielectric film, and tiles and form micro-fluidic chip to driving electrodes surface, have with
Lower technical advantage: 1, cost is reduced, it is only necessary to replace the hydrophobic dielectric film below drop, not need following driving electricity
Pole abandons together, and electrode chip is reusable, low in cost, environmentally friendly;2, manufacturing time shortens, and does not need to make again
Make driving electrodes plate;3, resistance to breakdown, under identical voltage, the present invention is less likely to occur to puncture, and overcomes traditional die maximum barrier
Hinder the defect easily punctured;4, using plastic film mulch mode, film surface is very smooth, not will receive the influence of coarse electrode surface, puts down
Whole degree increases, and reduces drop moving resistance.Hydrophobic dielectric film surface provided by the invention is smooth, is laid on and is coated with
The micro-fluidic chip being prepared in the driving electrodes of insulating liquid, which is able to solve, to be directlyed adopt in the prior art in driving electrodes
Defect existing for the mode of the hydrophobic dielectric film of upper plating, it is readily replaceable and reduce costs, as long as replacing drop when needed
Following hydrophobic dielectric film does not need together to abandon following driving electrodes, has in micro-fluidic chip field preferable
Application prospect.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the hydrophobic dielectric film in embodiment 1;
Fig. 2 is the structural schematic diagram of micro-fluidic chip in embodiment 2;
Fig. 3 is breakdown schematic diagram of the existing micro-fluidic chip in the case where applying voltage;
Fig. 4 is that the micro-fluidic chip that embodiment 2 assembles uses schematic diagram in the case where applying voltage.
Specific embodiment
It is clearly and completely described below with reference to technical effect of the embodiment to design and generation of the invention, with
It is completely understood by the purpose of the present invention, feature and effect.Obviously, described embodiment is that a part of the invention is implemented
Example, rather than whole embodiments, based on the embodiment of the present invention, those skilled in the art is not before making the creative labor
Other embodiments obtained are put, the scope of protection of the invention is belonged to.
Embodiment 1
Referring to Fig. 1, the present embodiment provides the hydrophobic dielectric film 3 that one kind is easily replaced, including hydrophobic dielectric film 1 and it is attached to
Frame 2 on the hydrophobic dielectric film, the hydrophobic dielectric film 1 include dielectric layer 11 and hydrophobic layer 12.
The preparation process of the above-mentioned hydrophobic dielectric film 1 easily replaced is as follows: using RCA standard line clean silicon wafer, deionization
Water flushes three times, and is dried with nitrogen, and after coating about 1u sacrifices layer photoresist drying, then applies 10um PDMS dielectric layer, is then deposited
The cytop hydrophobic layer of 30nm finally pastes acrylic frame, take off take in after film it is spare in storage box.
A kind of hydrophobic dielectric film with frame is prepared in the present embodiment, and aluminium frame is posted on hydrophobic dielectric film,
Film is undeformed, thickness only 10um.The film is unique consumptive material in digital microcurrent-controlled chip, can greatly reduce digital miniflow
Control chip cost.By water droplet on above-mentioned hydrophobic dielectric film, water droplet is 120 ° in the contact angle that film surface is formed.
Embodiment 2
Referring to fig. 2, it the present embodiment provides a kind of micro-fluidic chip, including driving electrodes 4, is coated in the driving electrodes
Insulating fluid layer 5 and the embodiment 1 that is arranged on the insulating fluid layer in hydrophobic dielectric film 3.The present embodiment it is micro-
By taking the single side driving structure for completely dispensing with top crown as an example, the applicable micro-fluidic chip of the practical present invention includes but not fluidic chip
It is limited to above structure, can be applicable to the single side driving structure and double-side driving structure that need top crown as earth plate,
And the driving electrodes used are suitable for all electrode structures.
The assemble method of above-mentioned micro-fluidic chip, it is specific as follows: one layer of edible oil to be applied on driving electrodes surface, by embodiment
Hydrophobic dielectric film in 1 is placed on right above driving electrodes, is then affixed to driving electrodes surface, which can
Greatly reduce the roughness on driving electrodes surface, hence it is evident that reduce the mobile resistance of drop, drop fast moved under electric drive to
Target electrode, the phenomenon that not generating any hangover.
Resistance to breakdown test:
Take it is homemade using silicon wafer or sheet glass as the digital microcurrent-controlled chip of substrate by traditional handicraft, pass through vapor deposition and spin coating
Etc. techniques dielectric layer and hydrophobic layer are coated directly on substrate, be continuously applied 200v driving voltage, experimental result shows deionization
Water drop (is no more than 100 times) after movement recycles several times, and micro-fluidic chip surface occurs being bubbled, burns the significantly breakdown such as black
Phenomenon, as shown in Figure 3.
The micro-fluidic chip of the present embodiment assembling is taken, applies 200v driving voltage under equal conditions, experimental result is shown
Ion water drop moves back and forth thousands of time (> 1000 times), micro-fluidic chip surface any breakdown trace does not occur as shown in figure 4,
By voltage is continuously applied, the micro-fluidic chip service life of the invention is tested in 5h or more.
Claims (9)
1. the hydrophobic dielectric film that one kind is easily replaced, which is characterized in that including hydrophobic dielectric film and be attached to the hydrophobic dielectric
Frame on film.
2. the hydrophobic dielectric film according to claim 1 easily replaced, which is characterized in that the material of the frame is selected from
Any one of aluminium, acrylic.
3. the hydrophobic dielectric film according to claim 1 or 2 easily replaced, which is characterized in that the hydrophobic dielectric film
Including dielectric layer and hydrophobic layer.
4. a kind of micro-fluidic chip, which is characterized in that including driving electrodes, coated in the insulating fluid layer in the driving electrodes
With the described in any item hydrophobic dielectric films of claim 1-3 being arranged on the insulating fluid layer.
5. micro-fluidic chip according to claim 4, which is characterized in that the micro-fluidic chip be single side driving structure or
Double-side driving structure.
6. micro-fluidic chip according to claim 4 or 5, which is characterized in that the dielectric of the material of the insulating fluid layer
Constant > 1.1.
7. micro-fluidic chip according to claim 4 or 5, which is characterized in that the material of the insulating fluid layer is natural
Insulating oil or artificial synthesized insulating oil.
8. micro-fluidic chip according to claim 7, which is characterized in that the natural insulation oil is selected from vegetable oil and mineral
Oil.
9. micro-fluidic chip according to claim 7, which is characterized in that the artificial synthesized insulating oil is selected from arene
Insulating oil, ethers insulating oil, esters insulating oil and polysiloxanes.
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CN201811542157.1A CN109647549A (en) | 2018-12-17 | 2018-12-17 | A kind of hydrophobic dielectric film and a kind of micro-fluidic chip easily replaced |
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Cited By (7)
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---|---|---|---|---|
CN110272559A (en) * | 2019-07-23 | 2019-09-24 | 华南师范大学 | A kind of preparation method of the hydrophobic dielectric film of flexibility for Electrowetting device |
CN110653011A (en) * | 2019-09-30 | 2020-01-07 | 浙江大学 | Reusable double-layer digital microfluidic chip based on hydrophobic film and rapid preparation method |
CN110665554A (en) * | 2019-09-30 | 2020-01-10 | 浙江大学 | Double-layer DMF (dimethyl formamide) chip quickly prepared based on polymer composite film and preparation method |
CN114146739A (en) * | 2021-12-17 | 2022-03-08 | 北京理工大学 | DMF dielectric layer film laminating method and system and digital microfluidic chip |
CN114308152A (en) * | 2021-12-13 | 2022-04-12 | 中国科学院上海微系统与信息技术研究所 | Digital microfluidic chip and preparation method and application thereof |
WO2023035289A1 (en) * | 2021-09-13 | 2023-03-16 | 上海仁芯生物科技有限公司 | Microfluidic chip having flat dielectric layer surface, preparation method therefor, and manufacturing mold |
WO2024032791A1 (en) * | 2022-08-12 | 2024-02-15 | 江苏液滴逻辑生物技术有限公司 | Thin film, digital microfluidic chip substrate and preparation method therefor |
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CN110272559A (en) * | 2019-07-23 | 2019-09-24 | 华南师范大学 | A kind of preparation method of the hydrophobic dielectric film of flexibility for Electrowetting device |
CN110653011A (en) * | 2019-09-30 | 2020-01-07 | 浙江大学 | Reusable double-layer digital microfluidic chip based on hydrophobic film and rapid preparation method |
CN110665554A (en) * | 2019-09-30 | 2020-01-10 | 浙江大学 | Double-layer DMF (dimethyl formamide) chip quickly prepared based on polymer composite film and preparation method |
WO2023035289A1 (en) * | 2021-09-13 | 2023-03-16 | 上海仁芯生物科技有限公司 | Microfluidic chip having flat dielectric layer surface, preparation method therefor, and manufacturing mold |
CN114308152A (en) * | 2021-12-13 | 2022-04-12 | 中国科学院上海微系统与信息技术研究所 | Digital microfluidic chip and preparation method and application thereof |
CN114146739A (en) * | 2021-12-17 | 2022-03-08 | 北京理工大学 | DMF dielectric layer film laminating method and system and digital microfluidic chip |
WO2024032791A1 (en) * | 2022-08-12 | 2024-02-15 | 江苏液滴逻辑生物技术有限公司 | Thin film, digital microfluidic chip substrate and preparation method therefor |
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