CN109637962A - The feed device of silicon wafer - Google Patents
The feed device of silicon wafer Download PDFInfo
- Publication number
- CN109637962A CN109637962A CN201811524710.9A CN201811524710A CN109637962A CN 109637962 A CN109637962 A CN 109637962A CN 201811524710 A CN201811524710 A CN 201811524710A CN 109637962 A CN109637962 A CN 109637962A
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- Prior art keywords
- plate
- mounting plate
- silicon wafer
- sink
- motor
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
Abstract
This application discloses a kind of feed devices of silicon wafer, including horizontally disposed sink, the conveying device being set in the sink, lifting device and silicon wafer pallet, the conveying device includes feeder motor and delivery track, the feeder motor is fixed on the sink outer walls, the output shaft of the feeder motor is sequentially connected in the delivery track, the delivery track cycle rotation is set to the bottom of gullet, the lifting device includes promoting motor and hoisting frame, the outer wall for promoting motor and being fixed on the sink, the output shaft for promoting motor is sequentially connected in the hoisting frame, the hoisting frame, which is vertically movable, to be set in the sink, the hoisting frame is set to the end of the delivery track, the silicon wafer pallet is correspondingly arranged with the delivery track and hoisting frame.The feed device of the silicon wafer can realize silicon wafer self-feeding, cooperate with external slicing apparatus, realize that the fragment of silicon wafer loads, improve working efficiency.
Description
Technical field
This application involves silicon wafer fragment field, in particular to a kind of feed device of silicon wafer.
Background technique
The processing of monocrystalline silicon piece includes silicon single crystal rod elder generation evolution, then is sliced, and the processing of polysilicon chip is cut including polycrystal silicon ingot
It cuts, then is sliced, the processing of quasi-monocrystalline silicon includes mono-like silicon ingot cutting, then is sliced.To sum up, slice is the crystalline silicon sun
One of essential technique in energy battery machining process.The silicon wafer obtained after slice is stacked together, inserts after needing fragment
Enter in silicon wafer bearing box and is transported；The feed device of existing slicing apparatus, which mostly uses greatly, is fixed on mentioning below slicing apparatus
The material-storing box risen, silicon wafer needs to be layered in material-storing box, and during placing silicon wafer, feeding-distribution device is idle, work effect
Rate is low.So needing to propose to improve.
Summary of the invention
The purpose of the present invention is to provide a kind of feed devices of silicon wafer, to overcome deficiency in the prior art.
To achieve the above object, the invention provides the following technical scheme:
The embodiment of the present application discloses a kind of feed device of silicon wafer, including being horizontally placed on the sink of rack, being set to
Conveying device, lifting device and silicon wafer pallet in the sink, the conveying device include feeder motor and delivery track, institute
It states feeder motor to be fixed on except the sink, the output shaft of the feeder motor is sequentially connected in the delivery track, described
Delivery track cycle rotation is set to the bottom of gullet, and the lifting device includes promoting motor and hoisting frame, the promotion
Motor is fixed on the outer wall of the sink, and the output shaft for promoting motor is sequentially connected in the hoisting frame, the hoisting frame
Be vertically movable and be set in the sink, the hoisting frame is set to the end of the delivery track, the silicon wafer pallet with
The delivery track and hoisting frame are correspondingly arranged.
Preferably, in the feed device of above-mentioned silicon wafer, the delivery track includes that driving shaft, driven shaft and two are parallel
The chain of setting, the driving shaft and driven shaft are rotatably set to the bottom of gullet, and the chain is rotatably set to institute
It states between driving shaft and driven shaft, described driving shaft one end protrudes from the basin sidewall, and is sequentially connected by the first belt
The sealed set between the output end of the feeder motor, the driving shaft and the basin sidewall.
Preferably, in the feed device of above-mentioned silicon wafer, the delivery track two sides are respectively equipped with the first guide plate, institute
State that the first guide plate is adjustable to be fixed on the bottom of gullet.
Preferably, in the feed device of above-mentioned silicon wafer, the promotion motor is fixed on the sink by motor cabinet
Outer wall, the motor cabinet include horizontally disposed motor mounting plate, two are vertically arranged at the first peace on the motor mounting plate
Loading board, is vertically arranged between two first mounting plates horizontal the second mounting plate being set between two first mounting plates
Third mounting plate, the promotion motor is fixed on the motor mounting plate, and the motor mounting plate is set to first installation
The one end of backboard from the sink, second mounting plate are set to first mounting plate close to one end of the sink, institute
Level height locating for the second mounting plate is stated higher than level height locating for the motor mounting plate, the third mounting plate is fixed
In the outer wall of the sink, the inboard wall of cistern is equipped with the 4th mounting plate being correspondingly arranged with the third mounting plate, and described the
Sealed set between four mounting plates and the sink.
Preferably, in the feed device of above-mentioned silicon wafer, second mounting plate top is equipped with the lead screw being vertically arranged
The 5th mounting plate is fixed on by bearing block with the top of the 5th mounting plate, the lead screw, institute is run through in the lead screw bottom end
The second mounting plate is stated, and is connect with the promotion motor drive.
Preferably, in the feed device of above-mentioned silicon wafer, the screw of the lead screw is connected to described mention by nut seat
Frame is risen, the nut seat includes the first attachment base and the second attachment base being fixed to each other, and first attachment base is sheathed on described
The screw of lead screw is formed with the first recessing groove, second attachment base and institute between first attachment base and the second attachment base
It states and is equipped with guide rail between the 5th mounting plate, the 5th mounting plate and guide rail are set in first recessing groove, and described second
Attachment base is connected to the hoisting frame by connecting rod.
Preferably, in the feed device of above-mentioned silicon wafer, the hoisting frame includes the first lifting plate and the second lifting plate,
The bottom end of the connecting rod is connected to first lifting plate, first lifting plate close to one end of the sink be recessed with
The second recessing groove that 4th mounting plate is correspondingly arranged, first lifting plate is close to a side end face of second lifting plate
Erecting bed is protruded out, second lifting plate is fixed on the erecting bed, and second lifting plate is close to the conveying device
One end is recessed with the third recessing groove being correspondingly arranged with the conveying device, second promotion plate top surface two sides be respectively equipped with
The second guide plate that the silicon wafer pallet is correspondingly arranged.
Preferably, in the feed device of above-mentioned silicon wafer, the silicon wafer pallet includes bottom plate and is vertically arranged at institute
State one first limit plate and two second limit plates on bottom plate, the outer end face point of first limit plate and two second limit plates
It is not flushed with the one side of the bottom plate, two second limit plates are oppositely arranged, the outer end face point of two second limit plates
It is not provided with handle, the bottom plate top is equipped with cushion.
Preferably, in the feed device of above-mentioned silicon wafer, the bottom plate bottom end deviates from one end of first limit plate
It is recessed with limiting slot, the idler wheel being correspondingly arranged with the limiting slot is equipped in second lifting plate, described second promotes backboard
One end from the third recessing groove is equipped with baffle, has protruded out anti-back plate in the third limiting slot.
Compared with the prior art, the advantages of the present invention are as follows: the feed device of the silicon wafer is using pallet by silicon wafer in device
Outer stack place, feeding is timely, and anti-back plate is equipped in hoisting frame, it is ensured that rise and Slicing procedure in, the stabilization of silicon wafer pallet
Property.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The some embodiments recorded in application, for those of ordinary skill in the art, without creative efforts,
It is also possible to obtain other drawings based on these drawings.
Fig. 1 show the structural schematic diagram of the feed device of silicon wafer in the specific embodiment of the invention.
Fig. 2 show the structural schematic diagram of sink in the specific embodiment of the invention.
Fig. 3 show the structural schematic diagram of motor cabinet in the specific embodiment of the invention.
Fig. 4 show conveying device and lifting device assembling schematic diagram in the specific embodiment of the invention.
Fig. 5 show the structural schematic diagram of lifting device in the specific embodiment of the invention.
Fig. 6 show the structural schematic diagram of conveying device in the specific embodiment of the invention.
Fig. 7 show in the specific embodiment of the invention assembling schematic diagram between driving shaft and sink.
Fig. 8 show the structural schematic diagram of nut seat in the specific embodiment of the invention.
Fig. 9 show the structural schematic diagram of hoisting frame in the specific embodiment of the invention.
Figure 10 show the structural schematic diagram of anti-back plate in the specific embodiment of the invention.
Figure 11 show the structural schematic diagram of silicon wafer pallet in the specific embodiment of the invention.
Figure 12 show the structural schematic diagram of specific embodiment of the invention insole board.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out detailed retouch
It states, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on the present invention
In embodiment, those of ordinary skill in the art's every other implementation obtained without making creative work
Example, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
Join shown in Fig. 1 to Figure 12, the feed device of the silicon wafer in the present embodiment, including is horizontally placed on rack (not shown)
Sink 100, the conveying device 200, lifting device 300 and the silicon wafer pallet 400 that are set in sink 100, conveying device 200 wraps
Feeder motor 210 and delivery track 220 are included, feeder motor 210 is fixed on except sink 100, and the output shaft of feeder motor 210 passes
Dynamic to be connected to delivery track 220,220 cycle rotation of delivery track is set to 100 bottom of sink, and lifting device 300 includes being promoted
Motor 310 and hoisting frame 320 promote the outer wall that motor 310 is fixed on sink 100, promote the output shaft transmission connection of motor 310
In hoisting frame 320, hoisting frame 320, which is vertically movable, to be set in sink 100, and hoisting frame 320 is set to the end of delivery track 220
End, silicon wafer pallet 400 are correspondingly arranged with delivery track 220 and hoisting frame 320.
In the technical solution, outside is additionally provided with the necessaries such as control device, and rack and sink can be directly using existing
Technology, the feed device of the silicon wafer are used to be fed to silicon wafer slicing apparatus, the silicon wafer after cutting be laminated in pallet, then work
Make on the delivery track that the pallet for being placed with silicon wafer is put into sink by personnel, starting device, due to the initial state of hoisting frame,
Lower than the upper plane of delivery track, so the pallet for being placed with silicon wafer can be delivered directly to by feeder motor control delivery track
On hoisting frame, after conveying in place, promotes motor control hoisting frame and rise to external slicing apparatus bottom, the feed device of the silicon wafer
Outer stack using pallet by silicon wafer in device is placed, and feeding is timely, reduces the standby time of slicing apparatus, improves work effect
Rate.
Further, delivery track 220 includes driving shaft 221, driven shaft 222 and two chains 223 disposed in parallel, active
Axis 221 and driven shaft 222 are rotatably set to 100 bottom of sink, and chain 223 is rotatably set to driving shaft 221 and driven shaft
Between 222,221 one end of driving shaft protrudes from 100 side wall of sink, and is sequentially connected by the first belt 224 in feeder motor 210
Output end, sealed set between 100 side wall of driving shaft 221 and sink.
In the technical solution, driving shaft 221 and driven shaft 222 are fixed on sink bottom surface, driving shaft by bearing block respectively
221 and 222 both ends of driven shaft be respectively equipped with the sprocket wheel being correspondingly arranged with chain 223, between 100 side wall of driving shaft 221 and sink
It is fixed by diamond shape bearing block, sealing plate, sealing plate and 100 side wall of sink is equipped between 100 side wall of diamond shape bearing block and sink
Between pass through backbone sealing ring seal.
Further, 220 two sides of delivery track are respectively equipped with the first guide plate 225, and the first guide plate 225 is adjustable to be fixed on
100 bottom of sink.
In the technical solution, the first guide plate 225 can use stainless sheet steel panel beating and form, and pass through the first guiding
The effect of plate guarantees the conveying direction of pallet.
Further, it promotes motor 310 and 100 outer wall of sink is fixed on by motor cabinet 330, motor cabinet 330 includes level
The first mounting plate 332 that motor mounting plate 331, two is vertically arranged on motor mounting plate 331 is set, horizontal is set to two first
The second mounting plate 333 between mounting plate 332, the third mounting plate 334 being vertically arranged between two first mounting plates 332, mention
Lifting motor 310 is fixed on motor mounting plate 331, and motor mounting plate 331 is set to one end that the first mounting plate 332 deviates from sink 100,
Second mounting plate 333 is set to the first mounting plate 332 close to one end of sink 100, level height locating for the second mounting plate 333
Higher than level height locating for motor mounting plate 331, third mounting plate 334 is fixed on the outer wall of sink 100,100 inner wall of sink
Equipped with the 4th mounting plate 335 being correspondingly arranged with third mounting plate 334, seals and set between the 4th mounting plate 335 and sink 100
It sets.
In the technical solution, third mounting plate 334 is fixed on sink outer walls by bolt and the 4th mounting plate 335, and the 4th
Sealing ring is equipped between basin sidewall in mounting plate 335 corresponding threaded hole (blind hole).
Further, 333 top of the second mounting plate is equipped with the lead screw 340 and the 5th mounting plate 341 being vertically arranged, lead screw
The 5th mounting plate 341 is fixed on by bearing block 342 in 340 top, and the second mounting plate 333 is run through in 340 bottom end of lead screw, and with mention
Lifting motor 310 is sequentially connected.
In the technical solution, 340 bottom end of lead screw is arranged with belt pulley, promotes motor and is connected by the second belt and lead screw transmission
It connects, to drive lead screw to rotate.
Further, the screw of lead screw 340 is connected to hoisting frame 320 by nut seat 343, and nut seat includes being fixed to each other
The first attachment base and the second attachment base, the first attachment base is sheathed on the screw of lead screw, the first attachment base and the second attachment base it
Between be formed with the first recessing groove, between the second attachment base and the 5th mounting plate be equipped with guide rail 344, the 5th mounting plate and guide rail setting
In in the first recessing groove, the second attachment base is connected to hoisting frame 320 by connecting rod 350.
In the technical solution, lead screw rotation drives nut seat lifting, to realize the lifting of hoisting frame, lead screw and guide rail are matched
The precision for guaranteeing that screw is mobile is closed, the 5th mounting plate side can also increase the devices such as grating scale, and promote motor cooperation to protect
The mobile accuracy for demonstrate,proving hoisting frame, belongs to the prior art, does not just repeat one by one herein.
Further, hoisting frame 320 includes the first lifting plate 321 and the second lifting plate 322, and the bottom end of connecting rod 350 connects
It is connected to the first lifting plate 321, the first lifting plate 321 is recessed with close to one end of sink 100 to be correspondingly arranged with the 4th mounting plate 335
The second recessing groove, the first lifting plate 321 protruded out erecting bed, the second lifting plate close to a side end face of the second lifting plate 322
322 are fixed on erecting bed, and the second lifting plate 322 is recessed with close to one end of conveying device 200 to be correspondingly arranged with conveying device 200
Third recessing groove, 322 top surface two sides of the second lifting plate are respectively equipped with the second guide plate being correspondingly arranged with silicon wafer pallet 400
323。
In the technical solution, the first lifting plate 321 is recessed with corresponding with the 4th mounting plate 335 close to one end of sink 100
The second recessing groove being arranged avoids the 4th mounting plate 335 from interfering the movement of the first lifting plate 321, when initial state, conveyor chain
End be in the second recessing groove, also, the upper plane of conveyor chain is higher than the top surface of the second lifting plate, and conveyor chain can be with
Silicon wafer pallet is delivered directly in the second lifting plate, is joined shown in Fig. 4 and 9, the second guide plate is divided into fixed guide plate and adjusting
Guide plate adjusts guide plate by the way that mounting bar is adjustable and is fixed on the second lifting plate, and mounting bar is away from the one end for adjusting guide plate
Recessed inductor mounting hole, inductor mounting hole is interior to install optoelectronic switch, for confirming that silicon wafer pallet transports in place.
Further, silicon wafer pallet 400 includes bottom plate 410 and one first limit plate being vertically arranged on bottom plate
420 and two second limit plates 430, the outer end face of the first limit plate and two second limit plates is flushed with the one side of bottom plate respectively,
Two second limit plates are oppositely arranged, and the outer end face of two second limit plates is respectively arranged with handle 431, and 410 top surface of bottom plate is equipped with slow
Rush pad 411.
In above-mentioned technical proposal, staff utilizes handle, and convenient for silicon wafer pallet of taking, bottom plate is not provided with limit plate
One is arranged facing towards hoisting frame, and cushion avoids silicon wafer from directly contacting with bottom plate, and cushion can be selected the materials such as PU and be made, and protects
Silicon wafer is not destroyed.
Further, 410 bottom end of bottom plate is recessed with limiting slot 412, the second lifting plate away from one end of the first limit plate 420
The idler wheel being correspondingly arranged with limiting slot 412 is equipped in 322, the second lifting plate 322 is equipped with baffle away from one end of third recessing groove
324, anti-back plate 325 has been protruded out in third limiting slot.
In the technical solution, silicon wafer pallet is transported to hoisting frame by conveying device, and limiting slot is arranged in idler wheel, realizes to silicon
The positioning of tablet tray, and the setting of baffle can prevent silicon wafer pallet from going out hoisting frame, silicon wafer pallet is promoted to slicing apparatus
Afterwards, slicing apparatus applies active force to silicon wafer, and anti-back plate can prevent silicon wafer pallet to be pushed out hoisting frame.
In conclusion outer stack of the feed device of the silicon wafer using pallet by silicon wafer in device is placed, feeding is timely, mentions
It rises and is equipped with anti-back plate in frame, it is ensured that in rising and Slicing procedure, the stability of silicon wafer pallet.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in process, method, article or equipment including the element.
The above is only the specific embodiment of the application, it is noted that for the ordinary skill people of the art
For member, under the premise of not departing from the application principle, several improvements and modifications can also be made, these improvements and modifications are also answered
It is considered as the protection scope of the application.
Claims (9)
1. a kind of feed device of silicon wafer, which is characterized in that including being horizontally placed on the sink of rack, being set in the sink
Conveying device, lifting device and silicon wafer pallet, the conveying device includes feeder motor and delivery track, the feeder motor
It is fixed on except the sink, the output shaft of the feeder motor is sequentially connected in the delivery track, and the delivery track follows
Ring is rotatably dispose in the bottom of gullet, and the lifting device includes that promotion motor and hoisting frame, the promotion motor are fixed on
The outer wall of the sink, the output shaft for promoting motor are sequentially connected in the hoisting frame, and the hoisting frame is vertically movable
It is set in the sink, the hoisting frame is set to the end of the delivery track, the silicon wafer pallet and the conveyor track
Road and hoisting frame are correspondingly arranged.
2. the feed device of silicon wafer according to claim 1, it is characterised in that: the delivery track include driving shaft, from
Moving axis and two chains disposed in parallel, the driving shaft and driven shaft are rotatably set to the bottom of gullet, and the chain can
It is rotatably dispose between the driving shaft and driven shaft, described driving shaft one end protrudes from the basin sidewall, and passes through first
Belt transmission connection sealed set between the output end of the feeder motor, the driving shaft and the basin sidewall.
3. the feed device of silicon wafer according to claim 2, it is characterised in that: the delivery track two sides are respectively equipped with
One guide plate, first guide plate is adjustable to be fixed on the bottom of gullet.
4. the feed device of silicon wafer according to claim 1, it is characterised in that: the promotion motor is fixed by motor cabinet
In the sink outer walls, the motor cabinet include horizontally disposed motor mounting plate, two be vertically arranged at the motor mounting plate it
On the first mounting plate, horizontal the second mounting plate being set between two first mounting plates, be vertically arranged at two described first
Third mounting plate between mounting plate, the promotion motor are fixed on the motor mounting plate, and the motor mounting plate is set to institute
One end that the first mounting plate deviates from the sink is stated, second mounting plate is set to first mounting plate close to the sink
One end, level height locating for second mounting plate is higher than level height locating for the motor mounting plate, the third
Mounting plate is fixed on the outer wall of the sink, and the inboard wall of cistern is equipped with the 4th installation being correspondingly arranged with the third mounting plate
Plate, sealed set between the 4th mounting plate and the sink.
5. the feed device of silicon wafer according to claim 4, it is characterised in that: second mounting plate top is equipped with vertical
The 5th mounting plate, the lead screw are fixed on by bearing block in the top of the lead screw of setting and the 5th mounting plate, the lead screw
Second mounting plate is run through in bottom end, and connect with the promotion motor drive.
6. the feed device of silicon wafer according to claim 5, it is characterised in that: the screw of the lead screw is connected by nut seat
It is connected to the hoisting frame, the nut seat includes the first attachment base and the second attachment base being fixed to each other, first attachment base
It is sheathed on the screw of the lead screw, is formed with the first recessing groove between first attachment base and the second attachment base, described second
Guide rail is equipped between attachment base and the 5th mounting plate, the 5th mounting plate and guide rail are set to first recessing groove
Interior, second attachment base is connected to the hoisting frame by connecting rod.
7. the feed device of silicon wafer according to claim 6, it is characterised in that: the hoisting frame include the first lifting plate and
Second lifting plate, the bottom end of the connecting rod are connected to first lifting plate, and first lifting plate is close to the sink
One end is recessed with the second recessing groove being correspondingly arranged with the 4th mounting plate, and first lifting plate is promoted close to described second
One side end face of plate has protruded out erecting bed, and second lifting plate is fixed on the erecting bed, and second lifting plate is close to institute
The one end for stating conveying device is recessed with the third recessing groove being correspondingly arranged with the conveying device, and described second promotes plate top surface two
Side is respectively equipped with the second guide plate being correspondingly arranged with the silicon wafer pallet.
8. the feed device of silicon wafer according to claim 7, it is characterised in that: the silicon wafer pallet includes bottom plate and erects
One first limit plate and two second limit plates being directly set on the bottom plate, first limit plate and two second limit plates
Outer end face flushed respectively with the one side of the bottom plate, two second limit plates are oppositely arranged, two second limit plates
Outer end face be respectively arranged with handle, the bottom plate top is equipped with cushion.
9. the feed device of silicon wafer according to claim 8, it is characterised in that: the bottom plate bottom end is away from first limit
One end of position plate is recessed with limiting slot, is equipped with the idler wheel being correspondingly arranged with the limiting slot in second lifting plate, and described the
Two lifting plates are equipped with baffle away from one end of the third recessing groove, have protruded out anti-back plate in the third limiting slot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811524710.9A CN109637962A (en) | 2018-12-13 | 2018-12-13 | The feed device of silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811524710.9A CN109637962A (en) | 2018-12-13 | 2018-12-13 | The feed device of silicon wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109637962A true CN109637962A (en) | 2019-04-16 |
Family
ID=66073607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811524710.9A Withdrawn CN109637962A (en) | 2018-12-13 | 2018-12-13 | The feed device of silicon wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109637962A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113651123A (en) * | 2021-08-09 | 2021-11-16 | 张家港市超声电气有限公司 | Slicing device for silicon wafer |
-
2018
- 2018-12-13 CN CN201811524710.9A patent/CN109637962A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113651123A (en) * | 2021-08-09 | 2021-11-16 | 张家港市超声电气有限公司 | Slicing device for silicon wafer |
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Application publication date: 20190416 |