CN109633864A - A kind of optical lens, laser processing device and processing method for laser processing - Google Patents
A kind of optical lens, laser processing device and processing method for laser processing Download PDFInfo
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- CN109633864A CN109633864A CN201811623608.4A CN201811623608A CN109633864A CN 109633864 A CN109633864 A CN 109633864A CN 201811623608 A CN201811623608 A CN 201811623608A CN 109633864 A CN109633864 A CN 109633864A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/042—Automatically aligning the laser beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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Abstract
The present invention is suitable for technical field of laser processing, discloses a kind of optical lens, laser processing device and processing method for laser processing.Telecentric lens include the first lens to the 4th lens set gradually from the object side to the image side, first lens to the 4th lens include first surface to the 8th curved surface, wherein: the radius of curvature of first surface to the 8th curved surface respectively is -31.5 ㎜, -47.5 ㎜, -51.35 ㎜, -42.55 ㎜, ∞ ㎜, -64.6 ㎜, -62.35 ㎜, -111.2 ㎜, and the radius of curvature allowable tolerance of first surface to the 8th curved surface is 10%, the upper deviation is+5%, and lower deviation is -5%.Laser processing step includes: that laser beam, visible light beam successively reach propagation along the first lens to the 4th lens, and laser beam, visible light beam are generally aligned in the same plane after arrival image space.A kind of optical lens, laser processing device and processing method for laser processing provided by the present invention, the progress of work of detection laser beam when in fact real can prevent measurement error in the application of high-precision requirement.
Description
Technical field
The invention belongs to technical field of laser processing more particularly to a kind of optical lens, laser for laser processing to add
Tooling is set and processing method,
Background technique
Along with the universal of industrial automation, and AI industrial application very hot in the recent period, NI Vision Builder for Automated Inspection is in work
In industry production using more and more extensive, NI Vision Builder for Automated Inspection is exactly the visual performance for having machine as people, thus
The functions such as various detections, judgement, identification, measurement are realized in industrial application.
In high-volume industrial processes, if manually visual inspection product quality, often inefficiency, and essence
Degree is not high, and work long hours fatiguability, and testing result consistency is not strong.Detection can be then increased substantially with Machine Vision Detection
Efficiency improves the degree of production automation.Simultaneously in some working environments for being not suitable for manual work, machine vision has
Its only thick advantage.
The mode that Laser industry vision system generallys use is: the visible light of laser beam and vision system that laser issues
Beam separates respectively work, and laser beam is caused not to be overlapped to the optical axis of working face with the optical axis of visible light beam, needs the later period by soft
Part simulation compensates to position, and precision and consistency are difficult to ensure, especially there is measurement in the application of some high-precision requirements and misses
Difference.
Summary of the invention
The present invention is directed at least solve one of above-mentioned technical problem, provide a kind of optical lens for laser processing,
Laser processing device and processing method, shape, relative position by the first lens to the 4th lens, the light of visible light beam
Axis is coupled on the optical axis of laser beam, is allowed the working face of laser beam and the imaging plane of visible light beam to be completely coincident, is avoided
Laser beam is to the optical axis of working face and the optical axis of visible light beam caused by separating respectively work due to laser beam, visible light beam
It is not overlapped, without positioning by the simulation of later period software, compensation, precision and consistency can be guaranteed, and wanted in high precision
It can prevent measurement error in the application asked.
The technical scheme is that a kind of optical lens for laser processing, including successively set from the object side to the image side
The first lens, the second lens, the third lens and the 4th lens set, first lens are bent moon negative lens, and described second thoroughly
Mirror is bent moon positive lens, and the third lens are plano-convex positive lens, and the 4th lens are bent moon negative lens；First lens
Including first surface, the second curved surface, second lens include third curved surface, the 4th curved surface, and the third lens include the 5th
Curved surface, the 6th curved surface, the 4th lens include the 7th curved surface, the 8th curved surface, in which: the first surface to the 8th song
The radius of curvature in face respectively is -31.5 ㎜, -47.5 ㎜, -51.35 ㎜, -42.55 ㎜, ∞ ㎜, -64.6 ㎜, -62.35
㎜, -111.2 ㎜, and the radius of curvature allowable tolerance of the first surface to the 8th curved surface is 10%, the upper deviation is+
5%, lower deviation is -5%.
Optionally, the first surface is recessed towards object space and to image space, and second curved surface is towards image space and to image space
Protrusion；
The third curved surface towards object space and to image space be recessed, the 4th curved surface towards image space and image space protrusion；
5th curved surface is towards object space and is plane, and the 6th curved surface is towards image space and raised to image space；
7th curved surface towards object space and to image space be recessed, the 8th curved surface towards image space and image space protrusion.
Optionally, the spacing between second curved surface and the third curved surface be 1.5 ㎜, the 4th curved surface with it is described
Spacing between 5th curved surface is 0.5 ㎜, between the 6th curved surface and the 7th curved surface between be divided into 18 ㎜；
And the interval allowable tolerance among the above is 10%, the upper deviation is+5%, and lower deviation is -5%.
Optionally, the center thickness of first lens to the 4th lens respectively is 4 ㎜, 9.5 ㎜, 12 ㎜, 4
㎜；
And the center thickness allowable tolerance of first lens to the 4th lens is 10%, the upper deviation is+5%,
Lower deviation is -5%.
Optionally, the refractive index and Abbe number ratio of first lens to the 4th lens respectively are 1.613/
37,1.62/60.37,1.62/60.37,1.805/25.48；
And the refractive index and Abbe number ratio allowable tolerance of first lens to the 4th lens are 10%, it is upper inclined
Difference is+5%, and lower deviation is -5%.
Optionally, the focal length of the optical lens is 254 ㎜, and the Entry pupil diameters of the optical lens are 14 ㎜.
Optionally, using crown board class glass or flint class glass.
The present invention also provides a kind of laser processing devices, including a kind of light for laser processing as described in above-mentioned
Camera lens is learned, further includes the laser for launching laser beam and the vision system for issuing visible light beam.
Optionally, the vision system includes the display for observing the visible light beam.
Invention additionally provides a kind of laser processings, using a kind of for laser processing as described in above-mentioned
Optical lens, comprising the following steps:
S1, laser beam, visible light beam are propagated from object space to image space, first pass through the first lens, laser beam, visible light beam are equal
The second lens are propagated to after the first the beams extended by lens；
S2, laser beam, visible light beam propagate to the third lens after the convergence of the second lens；
S3, laser beam, visible light beam propagate to the 4th lens after the third lens expand；
S4, laser beam, visible light beam reach image space and are generally aligned in the same plane after the 4th lens.
A kind of optical lens, laser processing device and processing method for laser processing provided by the present invention, light
Learn camera lens include the first lens, the second lens, the third lens and the 4th lens, by the shape of the first lens to the 4th lens,
Relative position is coupled to the optical axis of visible light beam on the optical axis of laser beam, makes the working face and visible light beam of laser beam
Imaging plane is in same plane and is completely coincident, and avoids caused by separating respectively work due to laser beam, visible light beam
The optical axis of laser beam to working face is not overlapped with the optical axis of visible light beam, without being positioned by the simulation of later period software, compensation,
Precision and consistency can be guaranteed, and can prevent measurement error in the application of high-precision requirement.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to needed in the embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is a kind of structural schematic diagram of optical lens for laser processing provided in an embodiment of the present invention；
Fig. 2 is a kind of structural schematic diagram of optical lens for laser processing provided in an embodiment of the present invention；
Fig. 3 is a kind of astigmatism curve synoptic diagram of optical lens for laser processing provided in an embodiment of the present invention；
Fig. 4 is a kind of distortion curve schematic diagram of optical lens for laser processing provided in an embodiment of the present invention；
Fig. 5 is that a kind of optical transfer function OFT of optical lens for laser processing provided in an embodiment of the present invention is bent
Line schematic diagram；
Fig. 6 is that a kind of modulation transfer functions MFT of optical lens for laser processing provided in an embodiment of the present invention is bent
Line schematic diagram；
Fig. 7 is a kind of disperse hot spot schematic diagram of optical lens for laser processing provided in an embodiment of the present invention；
Fig. 8 is a kind of encircled energy schematic diagram of optical lens for laser processing provided in an embodiment of the present invention；
Fig. 9 is a kind of flow chart of laser processing provided in an embodiment of the present invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
It should be noted that term " setting ", " connection " shall be understood in a broad sense, for example, it may be directly arranged, install,
Connection, can also be arranged indirectly by component placed in the middle, center configuration, be connected.
If in addition, have in the embodiment of the present invention "left", "right", " just ", " negative ", " expanding ", " convergence ", " entering ", " out ",
The orientation or positional relationship of the instructions such as " big ", " small ", " recessed ", " convex ", "high", " low " is orientation based on the figure or position
Relationship or conventional placement status or use state, are merely for convenience of description of the present invention and simplification of the description, rather than indicate or
Imply that signified structure, feature, device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore
It is not considered as limiting the invention.In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or two
More than a.
Described each particular technique feature and each embodiment in a specific embodiment, in the case of no contradiction,
It can be combined in any appropriate way, such as can be with shape by different particular technique feature/embodiment combinations
At different embodiments, in order to avoid unnecessary repetition, each the various of particular technique feature/embodiment can in the present invention
No further explanation will be given for the combination of energy.
As shown in Figures 1 to 8, a kind of optical lens for laser processing provided in an embodiment of the present invention, including from object
Side is incident in the present embodiment to image space successively settable the first lens 1, the second lens 2, the third lens 3 and the 4th lens 4
Light can be propagated from left to right, be object side positioned at the optical lens left side, i.e. object space, be on the right of optical lens
Image-side, i.e. image space.First lens 1 can be bent moon negative lens, and the second lens 2 can be bent moon positive lens, and the third lens 3 can
Think that plano-convex positive lens, the 4th lens 4 can be bent moon negative lens.It is to be appreciated that the first lens 1 are negative with the 4th lens 4
Lens have the effect that expands, and the second lens 2 are positive lens with the third lens 3, have the function of convergence；Incident ray is first from the
One lens 1 expand, and then converge from the second lens 2, the third lens 3, then expand from the 4th lens 4 and image in processing plane
On.Incident ray may include laser beam, visible light beam, and laser beam can be emitted by laser, it is seen that light beam can be by vision system
Lighting device transmitting；Laser beam, visible light beam can be propagated successively along 1 to the 4th lens 4 of the first lens simultaneously, make laser beam
Optical axis is generally aligned in the same plane and is overlapped with the optical axis of visible light beam.First lens 1 may include first surface 11, the second curved surface 12,
Second lens 2 may include third curved surface 21, the 4th curved surface 22, and the third lens 3 may include the 5th curved surface 31, the 6th curved surface 32,
Four lens 4 may include the 7th curved surface 41, the 8th curved surface 42, in which: the radius of curvature of 11 to the 8th curved surface 42 of first surface can be according to
Secondary respectively -31.5 ㎜, -47.5 ㎜, -51.35 ㎜, -42.55 ㎜, ∞ ㎜, -64.6 ㎜, -62.35 ㎜, -111.2 ㎜, and
The radius of curvature allowable tolerance of 11 to the 8th curved surface 42 of first surface all can be 10%, wherein the upper deviation can be+5%, under
Deviation can be -5%.Pass through the shapes of the first lens 1, the second lens 2, the third lens 3 and the 4th lens 4 and relative position
Design, is effectively corrected scattered picture and distortion, is overlapped the working face of laser beam with the imaging plane of visible light beam, realizing can
Light-exposed beam has been truly reflected scene when working laser beam completely, can intuitively understand laser beam by observing visible light beam
Working condition, What You See Is What You Get；And the optical lens structure is simple, convenient for batch production, can be widely applied to various works
In the device of industry laser processing.
In the present embodiment, since incident ray is propagated from left to right, it is subject to the intersection point of spherical surface (i.e. curved surface) and primary optical axis,
The centre of sphere is in the intersection point with a left side, then radius of curvature is negative value；Conversely, the centre of sphere in the intersection point with the right side, then radius of curvature is positive value.It can be with
Understand ground, the sign of radius of curvature numerical value only indicates the curved direction of curved surface, and Digital size then indicates the bending journey of curved surface
Degree.
Optionally, first surface 11 can be oppositely arranged with the second curved surface 12, first surface 11 can towards object space and should
Face can be recessed to image space, the second curved surface 12 can towards image space one side and the face can to image space protrusion；
Third curved surface 21 can be oppositely arranged with the 4th curved surface 22, and third curved surface 21 can be the one side for being located relatively at object space, and
And the face can image space recess, the 4th curved surface 22 can be the one side for being located relatively at image space, and the face can object space protrusion；
5th curved surface 31 can be oppositely arranged with the 6th curved surface 32, the 5th curved surface 31 can towards object space one side and the face can
Think plane, the 6th curved surface 32 can towards image space and the face can be to image space protrusion；
7th curved surface 41 can be oppositely arranged with the 8th curved surface 42, and the 7th curved surface 41 can be towards object space and the face can be to image space
Recess, the 8th curved surface 42 can be towards image space and the face can be to image space protrusion.
It is to be appreciated that laser beam, visible light beam can be propagated along 11 to the 8th curved surface 42 of first surface, finally by the 8th song
Face 42, which reflects, is coupled to the optical axis of visible light beam on the optical axis of laser beam, that is, can ensure that the working face of laser beam with can
The imaging plane of light-exposed beam is overlapped, and realizes What You See Is What You Get.
Optionally, between the second curved surface 12 and third curved surface 21, between the 4th curved surface 22 and the 5th curved surface 31, the 6th curved surface
32 and the 7th interval allowable tolerance between curved surface 41 all can be 10%, and the upper deviation can be+5%, and lower deviation can be with
It is -5%, in which:
Spacing 5 between second curved surface 12 and third curved surface 21 can be 1.5 ± 5% ㎜,
Spacing 6 between 4th curved surface 22 and the 5th curved surface 31 can be 0.5 ± 5% ㎜,
Interval 7 between 6th curved surface 32 and the 7th curved surface 41 can be 18 ± 5% ㎜.
Optionally, the center thickness allowable tolerance of 1 to the 4th lens 4 of the first lens all can be 10%, and the upper deviation
It can be+5%, lower deviation can be -5%, in which:
The center thickness 13 of first lens 1 can be 4 ± 5% ㎜,
The center thickness 23 of second lens 2 can be 9.5 ± 5% ㎜,
The center thickness 33 of the third lens 3 can be 12 ± 5% ㎜,
The center thickness 43 of 4th lens 4 can be 4 ± 5% ㎜；
It is to be appreciated that the center thickness of the first lens 1 and the 4th lens 4 can be consistent.
Optionally, the refractive index of 1 to the 4th lens 4 of the first lens and Abbe number ratio allowable tolerance all can be 10%,
And the upper deviation can be+5%, and lower deviation can be -5%, in which:
The refractive index and Abbe number ratio of first lens 1 can be 1.613/37,
The refractive index and Abbe number ratio of second lens 2 can be 1.62/60.37,
The refractive index and Abbe number ratio of the third lens 3 can be 1.62/60.37,
The refractive index and Abbe number ratio of 4th lens 4 can be 1.805/25.48；
Optionally, the first lens 1, the second lens 2, the third lens 3 and the 4th lens 4 can be unlike material, Ke Yili
Xie Di obtains different refractive index and different dispersion system (Abbe number) using different materials.In the present embodiment, first thoroughly
1 to the 4th lens 4 of mirror can be utilized respectively the different refractive index and abbe number of crown board class glass and flint class glass.
Optionally, the focal length of optical lens can be 254 ㎜, and the Entry pupil diameters of optical lens can be 14 ㎜.
In the present embodiment, the condition for realizing that the effect of correcting chromatic aberration needs to meet is as follows:
F=254 ㎜,
D=14 ㎜；
Also, work as
λ 1=1064nm,
λ 2=650nm,
When 2 ω=50 °, it is known that:
160 ㎜ of A=160 ㎜ *；
Wherein, f is focal length, and D is Entry pupil diameters, and λ 1 is the wavelength of laser beam, and λ 2 is the wavelength of visible light beam, and 2 ω are complete
Field angle, A are laser beam flying range.
It follows that, by correcting the color difference of 1064nm wavelength and 650nm wavelength, making wavelength in the present embodiment
The visible light beam that the laser beam and wavelength of 1064nm is 650nm is controlled in approximately the same plane, can be with the work of real-time detection laser beam
Make process.Using the variant refractive index of 1 to the 4th lens 4 of the first lens and Abbe number ratio (refractive index of i.e. each material and
Dispersion system is different), the variant radius of curvature of 11 to the 8th curved surface 42 of first surface, the first lens 1 to the 4th lens 4 it is different
Center thickness and each lens between different spaced design, wavelength be 1064nm laser beam and wavelength be 650nm can
Light-exposed beam alignment is on same plane, i.e., wavelength is the working face of 1064nm laser beam and wavelength is 650nm visible light beam
Imaging plane is completely coincident, and realizes laser beam while work, the purpose that can be monitored on-line by visible light beam.
As shown in Figure 3 and Figure 4, wherein Fig. 3 is the laser beam that optical lens is 1064nm in wavelength in the present embodiment, wave
The astigmatism curve graph of the visible light beam of a length of 650nm, Fig. 4 are the laser that optical lens is 1064nm in wavelength in the present embodiment
The distortion curve of beam, the visible light beam that wavelength is 650nm.The present embodiment in mentioning there is the optical lens of above-mentioned condition to exist
1064nm is almost overlapped at 650nm, and the bending degree of astigmatism curve and distortion curve is substantially accomplished ideal correction
State, image planes significantly flatten so that the image planes within the scope of entire laser beam flying are all very flat, and on axis with nothing equal outside axis
Significant difference.Astigmatism is small, distortion is small, that is, can reach hyperfine, high-precision processing.
As shown in Figure 5 and Figure 6, wherein Fig. 5 is the optical transfer function OTF (Optical of optical lens in the present embodiment
Transfer Function) curve graph, Fig. 6 is the modulation transfer functions MTF (Modulation of optical lens in the present embodiment
Transfer Function) curve graph.It follows that on axis after the optical lens point with off-axis point without significant difference, can
Achieve the purpose that image field flattens out the progress of work, it can be achieved that real-time detection laser beam, realizes hyperfine, high-precision processing.
As shown in Figure 7 and Figure 8, wherein Fig. 7 is the disperse hot spot schematic diagram of optical lens in the present embodiment, and Fig. 8 is this reality
Apply the encircled energy schematic diagram of optical lens in example.It follows that the diameter of disperse hot spot is 50 in all visual fields
In μm, and encircled energy also illustrates that all energy of laser beam also concentrate in 50 μm, and encircled energy is high, realizes
Mark is imaged in high quality, improves image quality, and then hyperfine, high-precision processing may be implemented.
In conclusion needing for the progress of work for realizing real-time detection laser beam by the optical axis of laser beam to working face
It is controlled in same plane with the optical axis of visible light beam, the imaging plane of the working face and visible light beam that make laser beam is completely heavy
It closes, and the scanning field of view of optical lens needs certain range.When using wavelength for the laser beam of 1064nm and wavelength to be 650nm
Visible light beam when, the focal length of optical lens may be configured as 254 ㎜, and full filed angle is set as 50 °, do not move processing object or
In the case where person's workbench, the scanning field of view of optical lens provided in an embodiment of the present invention may range from 160 ㎜ *, 160 ㎜, i.e.,
The progress of work of real-time detection laser beam, What You See Is What You Get, without soft by the later period can be realized in hyperfine machining accuracy
Part simulation compensates to position, and precision and consistency can be guaranteed.
The embodiment of the invention also provides a kind of laser processing device, including as it is one of above-mentioned for laser processing
Optical lens may also include the laser for launching laser beam and issue the vision system of visible light beam.
Optionally, laser can use far-infrared laser, and it is 1064nm which, which can launch wavelength,
Laser beam, and the power of the far-infrared laser can be equal to or more than 20W.
Optionally, vision system may include display；Further, vision system may also include lighting module, vision inspection
It surveys module (CCD), vision-based detection module collects the visible light beam that sensitive wave length is 650nm, by lighting module that this is visible
Light beam is exported to display, can by display observe visible light beam operating condition come the work of real-time detection laser beam into
Journey, What You See Is What You Get, so as to realize hyperfine, high-precision processing.
The embodiment of the present invention is additionally provided with a kind of laser processing, using such as one of above-mentioned for laser machining
Optical lens, the method and step of optical lens paths may include as follows:
As shown in figure 9,
S1, laser beam, visible light beam are propagated from object space to image space, and the first lens 1, laser beam, visible light beam are first passed through
The second lens 2 are propagated to image space after the first lens 1 expand.Since the first lens 1 are bent moon negative lens, it is possible to expand
Beam laser beam, visible light beam；
S2, laser beam, visible light beam propagate to the third lens 3 to image space after the convergence of the second lens 2.Thoroughly due to second
Mirror 2 is bent moon positive lens, it is possible to converge laser beam, visible light beam；
S3, laser beam, visible light beam propagate to the 4th lens 4 to image space after the third lens 3 expand.Since third is saturating
Mirror 3 is plano-convex positive lens, it is possible to converge laser beam, visible light beam；
S4, laser beam, visible light beam reach image space after the 4th lens 4, and laser beam and visible light beam are located at together
One plane.Since the 4th lens 4 are bent moon negative lens, it is possible to expand laser beam, visible light beam.
It follows that laser beam, visible light beam after the first lens 1 to the refraction of 4 different angle of the 4th lens, reach
Image space is simultaneously in same plane, and the working face for realizing laser beam is overlapped with the imaging plane of visible light beam, can pass through vision
Output Display Unit in system observes visible light beam in the operation process of imaging plane, and visible light beam is in the operation of imaging plane
Process is the progress of work of the real-time reflected laser beam in processing plane, and What You See Is What You Get realizes the work of real-time detection laser beam
Process, without positioning by the simulation of later period software, compensation, precision and consistency can be guaranteed, in answering for high-precision requirement
It can prevent measurement error in.
A kind of optical lens, laser processing device and processing side for laser processing provided by the embodiment of the present invention
Method, optical lens include the first lens 1, the second lens 2, the third lens 3 and the 4th lens 4, pass through the first lens 1 to the 4th
The shape of lens 4, relative position are coupled to the optical axis of visible light beam on the optical axis of laser beam, make the working face of laser beam
Same plane is in the imaging plane of visible light beam and is completely coincident, and is avoided since laser beam, visible light beam are separately respective
The optical axis of laser beam to working face is not overlapped with the optical axis of visible light beam caused by work, without relying on later period software mould
To position, precision and consistency can be guaranteed for quasi-, compensation, and can prevent measurement error in the application of high-precision requirement；
And the optical lens structure is simple, convenient for design, is suitble to be widely used in respective laser processing device.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modification, equivalent replacement or improvement etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. a kind of optical lens for laser processing, which is characterized in that first including setting gradually from the object side to the image side is saturating
Mirror, the second lens, the third lens and the 4th lens, first lens be bent moon negative lens, second lens be bent moon just
Lens, the third lens are plano-convex positive lens, and the 4th lens are bent moon negative lens；First lens include first bent
Face, the second curved surface, second lens include third curved surface, the 4th curved surface, and the third lens include the 5th curved surface, the 6th song
Face, the 4th lens include the 7th curved surface, the 8th curved surface, in which: the curvature of the first surface to the 8th curved surface half
Diameter respectively is -31.5 ㎜, -47.5 ㎜, -51.35 ㎜, -42.55 ㎜, ∞ ㎜, -64.6 ㎜, -62.35 ㎜, -111.2 ㎜,
And the radius of curvature allowable tolerance of the first surface to the 8th curved surface is 10%, the upper deviation be+5%, lower deviation be-
5%.
2. a kind of optical lens for laser processing as described in claim 1, which is characterized in that the first surface direction
Object space and to image space be recessed, second curved surface towards image space and to image space protrusion；
The third curved surface towards object space and to image space be recessed, the 4th curved surface towards image space and image space protrusion；
5th curved surface is towards object space and is plane, and the 6th curved surface is towards image space and raised to image space；
7th curved surface towards object space and to image space be recessed, the 8th curved surface towards image space and image space protrusion.
3. a kind of optical lens for laser processing as described in claim 1, which is characterized in that second curved surface and institute
Stating the spacing between third curved surface is 1.5 ㎜, and the spacing between the 4th curved surface and the 5th curved surface is 0.5 ㎜, described
18 ㎜ are divided between 6th curved surface and the 7th curved surface；
And the interval allowable tolerance among the above is 10%, the upper deviation is+5%, and lower deviation is -5%.
4. a kind of optical lens for laser processing as described in claim 1, which is characterized in that first lens to institute
The center thickness for stating the 4th lens respectively is 4 ㎜, 9.5 ㎜, 12 ㎜, 4 ㎜；
And the center thickness allowable tolerance of first lens to the 4th lens is 10%, the upper deviation is+5%, lower inclined
Difference is -5%.
5. a kind of optical lens for laser processing as described in claim 1, which is characterized in that first lens to institute
The refractive index and Abbe number ratio for stating the 4th lens respectively are 1.613/37,1.62/60.37,1.62/60.37,1.805/
25.48；
And the refractive index and Abbe number ratio allowable tolerance of first lens to the 4th lens are 10%, the upper deviation is
+ 5%, lower deviation is -5%.
6. a kind of optical lens for laser processing as described in claim 1, which is characterized in that the coke of the optical lens
It is 14 ㎜ away from the Entry pupil diameters for 254 ㎜, the optical lens.
7. a kind of optical lens for laser processing as described in claim 1, which is characterized in that the optical lens uses
Crown board class glass or flint class glass.
8. a kind of laser processing device, which is characterized in that including one kind as described in any one of claims 1 to 7 for swashing
The optical lens of light processing, further includes laser and vision system.
9. a kind of laser processing device as claimed in claim 8, which is characterized in that the vision system includes Output Display Unit.
10. a kind of laser processing, which is characterized in that added using a kind of laser as described in any one of claim 8 to 9
Tooling is set, comprising the following steps:
S1, laser beam, visible light beam are propagated from object space to image space, first pass through the first lens, and laser beam, visible light beam are through the
The second lens are propagated to after one the beams extended by lens；
S2, laser beam, visible light beam propagate to the third lens after the convergence of the second lens；
S3, laser beam, visible light beam propagate to the 4th lens after the third lens expand；
S4, laser beam, visible light beam reach image space and are generally aligned in the same plane after the 4th lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811623608.4A CN109633864B (en) | 2018-12-28 | 2018-12-28 | Optical lens for laser processing, laser processing device and processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811623608.4A CN109633864B (en) | 2018-12-28 | 2018-12-28 | Optical lens for laser processing, laser processing device and processing method |
Publications (2)
| Publication Number | Publication Date |
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| CN109633864A true CN109633864A (en) | 2019-04-16 |
| CN109633864B CN109633864B (en) | 2021-08-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811623608.4A Active CN109633864B (en) | 2018-12-28 | 2018-12-28 | Optical lens for laser processing, laser processing device and processing method |
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| Country | Link |
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| CN (1) | CN109633864B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111283320A (en) * | 2020-03-06 | 2020-06-16 | 大族激光科技产业集团股份有限公司 | Laser beam expanding lens and laser processing equipment |
| CN112756775A (en) * | 2020-10-30 | 2021-05-07 | 苏州创鑫激光科技有限公司 | Laser processing method, optical system and laser processing equipment |
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| JP2007286372A (en) * | 2006-04-18 | 2007-11-01 | Nidec Copal Corp | Imaging lens |
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| CN104238071A (en) * | 2013-06-24 | 2014-12-24 | 深圳市大族激光科技股份有限公司 | F-theta optical lens and laser processing system |
| WO2016033730A1 (en) * | 2014-09-02 | 2016-03-10 | 深圳市大族激光科技股份有限公司 | Optical lens |
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| JPS59170810A (en) * | 1983-03-17 | 1984-09-27 | Konishiroku Photo Ind Co Ltd | Ftheta lens system |
| JP2007286372A (en) * | 2006-04-18 | 2007-11-01 | Nidec Copal Corp | Imaging lens |
| KR20140003129A (en) * | 2012-06-29 | 2014-01-09 | 주식회사 나무가 | Fast lens for near infrared ray |
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| CN111283320A (en) * | 2020-03-06 | 2020-06-16 | 大族激光科技产业集团股份有限公司 | Laser beam expanding lens and laser processing equipment |
| CN112756775A (en) * | 2020-10-30 | 2021-05-07 | 苏州创鑫激光科技有限公司 | Laser processing method, optical system and laser processing equipment |
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| Publication number | Publication date |
|---|---|
| CN109633864B (en) | 2021-08-17 |
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