CN109630893A - A kind of continuous-stable liquid-supplying system - Google Patents
A kind of continuous-stable liquid-supplying system Download PDFInfo
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- CN109630893A CN109630893A CN201910025357.8A CN201910025357A CN109630893A CN 109630893 A CN109630893 A CN 109630893A CN 201910025357 A CN201910025357 A CN 201910025357A CN 109630893 A CN109630893 A CN 109630893A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/08—Pipe-line systems for liquids or viscous products
- F17D1/12—Conveying liquids or viscous products by pressure of another fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/08—Pipe-line systems for liquids or viscous products
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
- F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Public Health (AREA)
- Water Supply & Treatment (AREA)
- Pipeline Systems (AREA)
Abstract
The present invention provides a kind of continuous-stable liquid-supplying system, including compressed air supply unit, liquid supply device, waste discharge apparatus, liquid feed device and several feed tanks；The compressed air supply unit is connect with the feed tank, and the compressed air supply unit is used to supply to the feed tank；The liquid supply device is connect with the feed tank, and the liquid supply device is used to carry out fluid infusion to the feed tank；The waste discharge apparatus is connect with the feed tank, and the waste discharge apparatus is used to that waste liquid to be discharged to the feed tank；The liquid feed device is connect with the feed tank, and the liquid feed device is used to carry out feed flow to machine.Gas-liquid separation of the present invention, the bubble of removal dissolution in a liquid, feed flow are stablized, are automatically switched, continuous liquid supply；The stability of equipment liquid-supplying system can be improved, corporate device competitiveness is increased, on the other hand, improves consumer product qualification rate, is client's save the cost, creates more values.
Description
Technical field
Semi-conductor device technology field of the present invention more particularly to a kind of continuous-stable liquid-supplying system.
Background technique
In manufacture of semiconductor technique, most technique is completed using chemical liquid.Liquid-supplying system has
Effect property, stability are most important, and the bubble in liquid feeding pipeline be easy to cause technique bad phenomenon, reduce product yield, certain journey
The burden of enterprise is increased on degree.
Common feed liquid method is, by liquid blow-off pipe road, to be arrived under the nitrogen effect of certain pressure using pressurized tank
Up to technique unit, but nitrogen is at normal temperature, by way of filling dissolution, aquation, is dissolved among liquid, these dissolutions
Nitrogen molecule, when being released in the form of micro-bubble in liquid feeding pipeline, seriously affect apparatus and process stability.Together
When, the spacing between each molecule of nitrogen is bigger than feed flow fluid molecule spacing, during feed flow, with cutting for liquid feeding pipeline
It changes, will cause the change of air pressure in feed tank, simultaneously as the compressibility of nitrogen, liquid is different, and cause the wave of feed flow liquid level
It is dynamic, lead to the variation of the flow velocity, flow of liquid in liquid feeding pipeline, to influence the stability of technique unit.There is technology to use
Compressed air/nitrogen directly drives pressure jar liquid surface, makes liquid by being pressed under pressure the pot bottom inside active force of outer pressure difference
External method out.The method disadvantage are as follows: 1. gases are readily soluble among liquid, and a large amount of gas are just had in liquid feeding pipeline liquid
Bubble.There is 2 gases compressibility to be easy to cause pressure transient in feed flow handoff procedure.
Summary of the invention
Technical problems to be solved
The problem to be solved in the present invention is to provide a kind of continuous-stable liquid-supplying systems, to overcome in the prior art in liquid supply pipe
A large amount of bubbles are had in the liquid of road, there is gas compressibility to be easy to cause pressure transient, shadow in feed flow handoff procedure
Ring the defect of product quality.
Technical solution
To solve the technical problem, the present invention provides a kind of continuous-stable liquid-supplying system, including compressed air gas supply dress
It sets, liquid supply device, waste discharge apparatus, liquid feed device and several feed tanks；The compressed air supply unit and the feed tank connect
It connects, the compressed air supply unit is used to supply to the feed tank；The liquid supply device is connect with the feed tank, described
Liquid supply device is used to carry out fluid infusion to the feed tank；The waste discharge apparatus is connect with the feed tank, and the waste discharge apparatus is used
In to the feed tank be discharged waste liquid；The liquid feed device is connect with the feed tank, the liquid feed device be used for machine into
Row feed flow.
Preferably, the feed tank is two, is the first feed tank and the second feed tank.
Preferably, the compressed air supply unit includes the first pipeline, the second pipeline, third pipeline, the 4th pipeline, the
One on-off valve and vacuum generator；First on-off valve and vacuum generator are arranged on first pipeline；Described second
Pipeline one end and first piping connection, the other end are connect with second feed tank；The third pipeline respectively with it is described
First feed tank, the second feed tank and vacuum generator connection；Described 4th pipeline one end is connect with first feed tank, separately
One end and second piping connection.
Preferably, the first check valve and the second on-off valve are provided on second pipeline；It is arranged on the third pipeline
There are third on-off valve and the 4th on-off valve, the third on-off valve is arranged on the pipeline for connecting second feed tank, described
4th on-off valve is arranged on the pipeline for connecting first feed tank；Second one-way valve and are provided on 4th pipeline
Five on-off valves.
Preferably, the liquid supply device includes the 5th pipeline, the 6th pipeline and the 7th pipeline, the 5th pipeline, the 6th
Pipeline and the 7th pipeline are connected by triple valve；The 5th pipeline other end is connect with flow container；The 6th pipeline other end
It is connect with the first feed tank；The 7th pipeline other end is connect with second feed tank.
Preferably, the 6th on-off valve, the 7th on-off are respectively arranged on the 5th pipeline, the 6th pipeline and the 7th pipeline
Valve and the 8th on-off valve.
Preferably, the liquid feed device includes the 8th pipeline, the 9th pipeline, the first two-bit triplet switching valve, the second two
Three-way switch valve, the tenth pipeline and the 11st pipeline；Described 8th pipeline one end is connect with first feed tank, the other end with
The first two-bit triplet switching valve connection；Described 9th pipeline one end is connect with second feed tank, the other end with it is described
The connection of second two-bit triplet switching valve；Described tenth pipeline one end is connect with the first two-bit triplet switching valve, the other end with
11st piping connection；Described 11st pipeline one end is connect with the second two-bit triplet switching valve, and the other end is to machine
Device carries out feed flow；The 9th on-off valve is additionally provided on 11st pipeline.
Preferably, the waste discharge apparatus includes the 12nd pipeline, the 13rd pipeline and the 14th pipeline, the 12nd pipe
It is connected between road, the 13rd pipeline and the 14th pipeline by triple valve；12nd pipeline, the 13rd pipeline and the 14th
The tenth on-off valve, the 11st on-off valve and third check valve are respectively arranged on pipeline.
Preferably, the first two-bit triplet switching valve and the second two-bit triplet switching valve are by pipeline respectively with described the
14 piping connections.
Preferably, first feed tank and the second feed flow jar structure are identical, and first feed tank includes tank body, end
Lid, connecting tube and liner, the end cap seal are mounted on the tank body upper end, and the liner is telescopic to be arranged in the tank
In vivo, the liner upper end is connect with the end cap seal；Connecting tube setting the tank wall and with the tank body
Connection；Fluid infusion, supply opening and waste discharge mouth are provided on the end cap；Tank body lower end two sides are provided with air supply opening and take out true
It eats dishes without rice or wine；The connecting tube is respectively arranged with the first liquid level sensor, the second liquid level sensor and third level sensing from top to bottom
Device.
Having the beneficial effect that continuous-stable liquid-supplying system of the invention, gas-liquid separation, bubble in a liquid is dissolved in removal,
Feed flow is stablized, and automatically switches, continuous liquid supply；The stability of equipment liquid-supplying system can be improved, corporate device competitiveness is increased, it is another
Aspect improves consumer product qualification rate, is client's save the cost, creates more values.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of continuous-stable liquid-supplying system of the present invention；
Fig. 2 is the structural schematic diagram of compressed air supply unit and liquid supply device；
Fig. 3 is the structural schematic diagram of liquid feed device；
Fig. 4 is the structural schematic diagram of waste discharge apparatus；
Fig. 5 is the structural schematic diagram of the first feed tank；
Fig. 6 is the half sectional view of the first feed tank；
The structural schematic diagram of feed tank when Fig. 7 is fluid infusion；
The structural schematic diagram of feed tank when Fig. 8 is feed flow.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Implement below
Example is not intended to limit the scope of the invention for illustrating the present invention.
Embodiment
As shown in Figure 1, a kind of continuous-stable liquid-supplying system of the invention, including compressed air supply unit 1, liquid supply device
2, waste discharge apparatus 3, liquid feed device 4 and several feed tanks；The compressed air supply unit 1 is connect with the feed tank, described
Compressed air supply unit 1 is used to supply to the feed tank；The liquid supply device 2 is connect with the feed tank, the fluid infusion
Device 2 is used to carry out fluid infusion to the feed tank；The waste discharge apparatus 3 is connect with the feed tank, and the waste discharge apparatus 3 is used for
Waste liquid is discharged to the feed tank；The liquid feed device 4 is connect with the feed tank, the liquid feed device 4 be used for machine into
Row feed flow.
The present embodiment feed tank is two, is the first feed tank 5 and the second feed tank 6.
As shown in Fig. 2, the compressed air supply unit 1 includes the first pipeline 101, the second pipeline 102, third pipeline
103, the 4th pipeline 104, the first on-off valve 105 and vacuum generator 106；First on-off valve 105 and vacuum generator 106
It is arranged on first pipeline 101；Described second pipeline, 102 one end and first pipeline 101 are tightly connected, the other end with
Second feed tank 6 is tightly connected；The third pipeline 103 respectively with first feed tank 5, the second feed tank 6 and true
Empty generator 106 is tightly connected；Described 4th pipeline, 104 one end and first feed tank 5 are tightly connected, the other end with it is described
Second pipeline 102 is tightly connected.The first check valve 107 and the second on-off valve 108 are provided on second pipeline 102；It is described
Third on-off valve 109 and the 4th on-off valve 1010 are provided on third pipeline 103, the setting of third on-off valve 109 is connecting
On the pipeline of second feed tank 6, the 4th on-off valve 1010 is arranged on the pipeline for connecting first feed tank 5；
Second one-way valve 1011 and the 5th on-off valve 1012 are provided on 4th pipeline 104.
As shown in Fig. 2, the liquid supply device 2 includes the 5th pipeline 201, the 6th pipeline 202 and the 7th pipeline 203, it is described
5th pipeline 201, the 6th pipeline 202 and the 7th pipeline 203 are connected by triple valve；5th pipeline, 201 other end and liquid
Tank connection；6th pipeline, 202 other end and the first feed tank 5 are tightly connected；7th pipeline, 203 other end with it is described
Second feed tank 6 is tightly connected.The 6th is respectively arranged on 5th pipeline 201, the 6th pipeline 202 and the 7th pipeline 203
On-off valve 204, the 7th on-off valve 205 and the 8th on-off valve 206.
As shown in figure 3, the liquid feed device 4 includes the 8th pipeline 401, the 9th pipeline 402, the first two-bit triplet switching valve
403, the second two-bit triplet switching valve 404, the tenth pipeline 405 and the 11st pipeline 406；Described 8th pipeline, 401 one end and institute
The sealed connection of the first feed tank 5 is stated, the other end and the first two-bit triplet switching valve 403 are tightly connected；9th pipeline
402 one end and second feed tank 6 are tightly connected, and the other end and the second two-bit triplet switching valve 404 are tightly connected；Institute
It states 405 one end of the tenth pipeline and the first two-bit triplet switching valve 403 is tightly connected, the other end and the 11st pipeline
406 are tightly connected；Described 11st pipeline, 406 one end and the second two-bit triplet switching valve 404 are tightly connected, and the other end is given
Machine carries out feed flow；The 9th on-off valve 407 is additionally provided on 11st pipeline 406.
As shown in figure 4, the waste discharge apparatus 3 includes the 12nd pipeline 301, the 13rd pipeline 302 and the 14th pipeline
303, it is connected between the 12nd pipeline 301, the 13rd pipeline 302 and the 14th pipeline 303 by triple valve；Described tenth
The tenth on-off valve 304, the 11st on-off valve are respectively arranged on two pipelines 301, the 13rd pipeline 302 and the 14th pipeline 303
305 and third check valve 306.
As shown in figure 4, the first two-bit triplet switching valve 403 and the second two-bit triplet switching valve 404 pass through pipeline point
It is not connect with the 14th pipeline 303 (sealing).The effect of this pipeline is: before operation, remaining residual in pipeline
Liquid discharge.
As shown in Figure 5 and Figure 6, first feed tank 5 is identical with 6 structure of the second feed tank, and first feed tank 5 wraps
Tank body 501, end cap 502, connecting tube 5011 and liner 5012 are included, the end cap 502, which is spirally connected, is sealedly mounted in the tank body 501
Upper end, the liner 5012 is telescopic to be arranged in the tank body 501, and 5012 upper end of liner and the end cap 502 are close
Envelope connection；The connecting tube 5011 is arranged in 501 outer wall of tank body and is connected to the tank body 501；It is set on the end cap 502
It is equipped with fluid infusion 503, supply opening 504 and waste discharge mouth 505；The 501 lower end two sides of tank body are provided with air supply opening 506 and vacuumize
Mouth 507；The connecting tube 5011 is respectively arranged with the first liquid level sensor 508, the second liquid level sensor 509 and from top to bottom
Three liquid level sensors 5010.
The corrugated structure of 5012 inside and outside wall of liner, material are made of PTEE, have retractility.In first feed tank 5,
Fluid infusion 503 is connect with the 6th pipeline 202, and supply opening 504 is connect with the 8th pipeline 401, waste discharge mouth 505 and the 12nd pipeline
301 connections, air supply opening 506 are connect with the 4th pipeline 104, and vacuum orifice 507 is connect with third pipeline 103；In second feed tank 6
Fluid infusion, supply opening, waste discharge mouth, air supply opening and vacuum orifice respectively with the 7th pipeline 203, the 9th pipeline the 402, the 13rd manage
Road 302, the second pipeline 102 and third pipeline 103 connect.First liquid level sensor 508, the second liquid level sensor 509 and third
5010 structure of liquid level sensor is identical, is proximity sensor or contactless magnetic switch.
The mounting means of liner 5012 is, with a cover board, liner 5012 to be pushed down, and is being combined screw solid with end cap 502
It is fixed, it is not marked in figure.
The working principle of the invention is: by the brand-new design of pipeline and the first feed tank 5, the second feed tank 6, by interior
Gallbladder 5012 comes gas and liquid separation.
When the invention works: firstly, the liquid level sensing element of the first feed tank 5 and the second feed tank 6 carries out liquid level
Detection executes fluid infusion movement, specific implementation step is: the first on-off valve 105, the when the second liquid level sensor issues signal
Three on-off valves 109, the 4th on-off valve 1010 open simultaneously, and vacuum generator 106 is under the action of compressed air, by the first feed flow
Tank 5 and the second feed tank 6 are pumped into negative-pressure vacuum, at this point, the 8th on-off valve 206, the 7th on-off valve 205, the 6th on-off valve 204
It opens, liquid is charged into the liner of the first feed tank 5 and the second feed tank 6, during feed flow, third level sensing by pipeline
When device issues signal, illustrate that liquid fills in liner at this time, under the action of control system, vacuum generator 106 and the
One on-off valve 105 stops working, and the 8th on-off valve 206, the 7th on-off valve 205, the 6th on-off valve 204 also simultaneously close off, in this way
Just the first feed tank 5 and 6 Cheng Yici filling liquid of the second feed tank are acted；It is more when feed flow reaches third liquid level sensor position
Remaining liquid is discharged under the tenth on-off valve 304, the effect of 305 opening of the 11st on-off valve by waste discharge pipeline；
When needing feed flow, under set process control, 5 feed flow of the first feed tank, the 5th on-off valve are used first
1012 open, and pressurize to 5 liner of the first feed tank, while the first two-bit triplet switching valve 403 and the movement of the 9th on-off valve 407,
Feed flow movement is executed, feeding liquid under pressure to specified pipeline realizes feed flow function；
When the second liquid level sensor of the first feed tank 5 issues signal again, the 5th on-off valve 1012, the first two three
Direction changeover valve 403 is closed, and the first feed tank 5 stops feed flow；At this point, the second on-off valve 108, the second two-bit triplet switching valve 404
It opens, liquid feeding pipeline automatically switches to the second feed tank 6, continuously to technique unit feed flow；The first feed tank 5 starts to mend at this time
Liquid, the 6th on-off valve 204, the 7th on-off valve 205 are opened, and carry out fluid infusion movement to the first feed tank 5 again.As feed flow acts
Progress, 6 liquid level sensing element of the second feed tank moves up, when the second liquid level sensor of the second feed tank 6 issues signal, together
Sample carries out fluid infusion movement to the second feed tank 6, and at the same time, liquid feeding pipeline automatically switches to the first feed tank 5, continues to technique
Unit carries out feed flow, and liquid-supplying system completes a feed flow, fluid infusion, switching circulation at this time.
In conclusion it is restricted embodiment of the invention, all those skilled in the art that above embodiment, which is not,
The modification carried out on the basis of substantive content of the invention or equivalent deformation, in technology scope of the invention.
Claims (10)
1. a kind of continuous-stable liquid-supplying system, it is characterised in that: including compressed air supply unit (1), liquid supply device (2), row
Waste-removing device (3), liquid feed device (4) and several feed tanks；The compressed air supply unit (1) connect with the feed tank, institute
Compressed air supply unit (1) is stated for supplying to the feed tank；The liquid supply device (2) connect with the feed tank, institute
Liquid supply device (2) are stated for carrying out fluid infusion to the feed tank；The waste discharge apparatus (3) connect with the feed tank, the row
Waste-removing device (3) is used to that waste liquid to be discharged to the feed tank；The liquid feed device (4) connect with the feed tank, the feed flow dress
(4) are set for carrying out feed flow to machine.
2. continuous-stable liquid-supplying system according to claim 1, it is characterised in that: the feed tank is two, is first
Feed tank (5) and the second feed tank (6).
3. continuous-stable liquid-supplying system according to claim 2, it is characterised in that: the compressed air supply unit (1)
Including the first pipeline (101), the second pipeline (102), third pipeline (103), the 4th pipeline (104), the first on-off valve (105) and
Vacuum generator (106)；First on-off valve (105) and vacuum generator (106) are arranged in first pipeline (101)
On；Described second pipeline (102) one end is connect with first pipeline (101), and the other end and second feed tank (6) are even
It connects；The third pipeline 103) connect respectively with first feed tank (5), the second feed tank (6) and vacuum generator (106)
It connects；4th pipeline (104) one end is connect with first feed tank (5), and the other end and second pipeline (102) are even
It connects.
4. continuous-stable liquid-supplying system according to claim 3, it is characterised in that: be arranged on second pipeline (102)
There are the first check valve (107) and the second on-off valve (108)；Be provided on the third pipeline (103) third on-off valve (109) and
4th on-off valve (1010), third on-off valve (109) setting are described on the pipeline for connecting second feed tank (6)
The setting of 4th on-off valve (1010) is on the pipeline for connecting first feed tank (5)；It is provided on 4th pipeline (104)
Second one-way valve (1011) and the 5th on-off valve (1012).
5. continuous-stable liquid-supplying system according to claim 2, it is characterised in that: the liquid supply device (2) includes the 5th
Pipeline (201), the 6th pipeline (202) and the 7th pipeline (203), the 5th pipeline (201), the 6th pipeline (202) and the 7th
Pipeline (203) is connected by triple valve；5th pipeline (201) other end is connect with flow container；6th pipeline (202) is another
One end is connect with the first feed tank (5)；7th pipeline (203) other end is connect with second feed tank (6).
6. continuous-stable liquid-supplying system according to claim 5, it is characterised in that: the 5th pipeline (201), the 6th pipe
The 6th on-off valve (204), the 7th on-off valve (205) and the 8th on-off valve are respectively arranged on road (202) and the 7th pipeline (203)
(206)。
7. continuous-stable liquid-supplying system according to claim 2, it is characterised in that: the liquid feed device (4) includes the 8th
Pipeline (401), the 9th pipeline (402), the first two-bit triplet switching valve (403), the second two-bit triplet switching valve (404), the tenth
Pipeline (405) and the 11st pipeline (406)；8th pipeline (401) one end is connect with first feed tank (5), another
End is connect with the first two-bit triplet switching valve (403)；9th pipeline (402) one end and second feed tank (6)
Connection, the other end are connect with the second two-bit triplet switching valve (404)；Tenth pipeline (405) one end and described first
Two-bit triplet switching valve (403) connection, the other end are connect with the 11st pipeline (406)；11st pipeline (406) one
End is connect with the second two-bit triplet switching valve (404), and the other end carries out feed flow to machine；11st pipeline (406)
On be additionally provided with the 9th on-off valve (407).
8. continuous-stable liquid-supplying system according to claim 7, it is characterised in that: the waste discharge apparatus (3) includes the tenth
Two pipelines (301), the 13rd pipeline (302) and the 14th pipeline (303), the 12nd pipeline (301), the 13rd pipeline
(302) and between the 14th pipeline (303) it is connected by triple valve；12nd pipeline (301), the 13rd pipeline (302)
And the 14th be respectively arranged with the tenth on-off valve (304), the 11st on-off valve (305) and third check valve on pipeline (303)
(306)。
9. continuous-stable liquid-supplying system according to claim 8, it is characterised in that: the first two-bit triplet switching valve
(403) and the second two-bit triplet switching valve (404) is connect with the 14th pipeline (303) respectively by pipeline.
10. according to the described in any item continuous-stable liquid-supplying systems of claim 2 to 9, it is characterised in that: first feed tank
(5) identical with the second feed tank (6) structure, first feed tank (5) includes tank body (501), end cap (502), connecting tube
(5011) and liner (5012), the end cap (502) are sealedly mounted in the tank body (501) upper end, the liner (5012)
In the tank body (501), liner (5012) upper end and the end cap (502) are tightly connected for telescopic setting；It is described
Connecting tube (5011) is arranged in the tank body (501) outer wall and is connected to the tank body (501)；It is arranged on the end cap (502)
There are fluid infusion (503), supply opening (504) and waste discharge mouth (505)；Tank body (501) the lower end two sides are provided with air supply opening (506)
With vacuum orifice (507)；The connecting tube (5011) is respectively arranged with the first liquid level sensor (508), the second liquid from top to bottom
Level sensor (509) and third liquid level sensor (5010).
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| CN201910025357.8A CN109630893B (en) | 2019-01-11 | 2019-01-11 | Continuous stable liquid supply system |
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|---|---|---|---|
| CN201910025357.8A CN109630893B (en) | 2019-01-11 | 2019-01-11 | Continuous stable liquid supply system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110486624A (en) * | 2019-08-28 | 2019-11-22 | 西南石油大学 | A kind of gas high sealing pressure regulation system and method at a slow speed |
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| CN201125031Y (en) * | 2007-12-05 | 2008-10-01 | 日角贤二 | Vacuum liquor bottle and liner thereof |
| CN201339814Y (en) * | 2009-02-04 | 2009-11-04 | 韩宝山 | Full-automatic liquid conveying device |
| CN102650373A (en) * | 2012-06-11 | 2012-08-29 | 成都华气厚普机电设备股份有限公司 | L-CNG (Liquid-Compressed Natural Gas) skid-mounted device without energy consumption |
| CN103811297A (en) * | 2012-11-15 | 2014-05-21 | 沈阳芯源微电子设备有限公司 | Chemical liquid feeding device |
| CN103047539A (en) * | 2012-12-21 | 2013-04-17 | 北京七星华创电子股份有限公司 | Chemical liquor supply system |
| CN205116295U (en) * | 2015-10-15 | 2016-03-30 | 山东华立供水设备有限公司 | Negative pressure water supply equipment is not had in low energy consumption |
| CN107202246A (en) * | 2016-03-18 | 2017-09-26 | 北京健坤伟华新能源科技有限公司 | A kind of external-compression type HTHP material dosing conveying device |
| CN107304035A (en) * | 2016-04-23 | 2017-10-31 | 上海米全自动化科技有限公司 | A kind of isolated barrel of pocket type inner bag |
| CN207814947U (en) * | 2018-01-05 | 2018-09-04 | 上海弗川自动化技术有限公司 | A kind of liquid phase working media supply system |
| CN208204548U (en) * | 2018-02-15 | 2018-12-07 | 上海晶福机电科技有限公司 | A kind of chemicals supply system |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110486624A (en) * | 2019-08-28 | 2019-11-22 | 西南石油大学 | A kind of gas high sealing pressure regulation system and method at a slow speed |
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