CN109622467B - Automatic graphite boat cleaning device and method - Google Patents
Automatic graphite boat cleaning device and method Download PDFInfo
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- CN109622467B CN109622467B CN201811465080.2A CN201811465080A CN109622467B CN 109622467 B CN109622467 B CN 109622467B CN 201811465080 A CN201811465080 A CN 201811465080A CN 109622467 B CN109622467 B CN 109622467B
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- rod
- cleaning
- electric telescopic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/007—Fume suction nozzles arranged on a closed or semi-closed surface, e.g. on a circular, ring-shaped or rectangular surface adjacent the area where fumes are produced
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- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses an automatic cleaning device for a graphite boat, which comprises a device main body, an electric telescopic rod for placing articles, an electric telescopic rod for cleaning, a cleaning pipe, a top cover and a return pipe, the two sides of the upper part inside the device main body are obliquely provided with cleaning electric telescopic rods, the telescopic ends of the cleaning electric telescopic rods are rotationally connected with an upper supporting rod and a lower supporting rod through pin shafts, cleaning pipes with cleaning nozzles are tied on the upper supporting rod and the lower supporting rod, one end of each cleaning pipe extends out of the device main body and is communicated with a cleaning liquid tank, a cleaning pump is arranged on the cleaning pipe outside the device main body, the top end of the cleaning liquid tank is communicated with a return pipe, one end of the return pipe is led in from the bottom end of the device main body, a return pump is arranged on the return pipe outside the device main body, a fixed support is fixedly welded on the top end face of the device main body, and an object placing electric telescopic rod is vertically fixed on the fixed support. This graphite boat self-cleaning device has advantages such as structural design is reasonable, practical reliable, can generally use widely.
Description
Technical Field
The invention belongs to the technical field of graphite boat production, and particularly relates to an automatic cleaning device for a graphite boat and a cleaning method of the automatic cleaning device for the graphite boat.
Background
In the production of photovoltaic cells, the graphite boat of the product bearing device of the PECVD equipment has the problem that 0.8-1mm of sediment is attached to the surface of the graphite boat in long-term use, and the quality of the product in the later period is influenced if the graphite boat is continuously used.
Cleaning equipment which can be purchased in the market wastes cleaning liquid to a certain extent, and the cleaning liquid cannot be reused; and because of the size problem, the adaptability is poorer, only one graphite boat can be singly cleaned, but the graphite boat can not cover various types of graphite boats on the market.
Disclosure of Invention
The invention aims to provide an automatic cleaning device for a graphite boat, which aims to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: an automatic cleaning device for a graphite boat comprises a device main body, an electric telescopic rod for placing objects, an electric telescopic rod for cleaning, a cleaning pipe, a top cover and a return pipe, wherein support legs are fixed on the outer side of the bottom end of the device main body, the electric telescopic rod for cleaning is obliquely arranged on two sides above the inner part of the device main body, the telescopic end of the electric telescopic rod for cleaning faces the inner center of the device main body, an upper support rod and a lower support rod are rotatably connected to the telescopic end of the electric telescopic rod for cleaning through a pin shaft, the cleaning pipe with a cleaning nozzle is respectively bound on the upper support rod and the lower support rod, one end of the cleaning pipe extends out of the device main body and is communicated with a cleaning liquid tank, a cleaning pump is mounted on the cleaning pipe outside the device main body, the top end of the cleaning liquid tank is communicated with the return pipe, one end of the return pipe is led in from, the fixed support is vertically fixed with an object placing electric telescopic rod, and the telescopic end of the object placing electric telescopic rod vertically extends downwards into the device main body and is connected with a clamping rod through a connecting rod.
Preferably, a pull rod is arranged between the cleaning electric telescopic rod and the upper supporting rod and between the cleaning electric telescopic rod and the lower supporting rod, the fixed end of the cleaning electric telescopic rod is rotatably connected with one end of the pull rod through a pin shaft, and the other end of the pull rod is rotatably connected with the upper supporting rod and the lower supporting rod through a pin shaft.
Preferably, the bottom of the object placing electric telescopic rod is fixedly welded with the top end of the connecting rod, the bottom end of the connecting rod is rotatably connected with a clamping rod through a pin shaft, the clamping rod is connected with the connecting rod through an object clamping electric telescopic rod, and pin shafts are arranged between the two ends of the object clamping electric telescopic rod and the clamping rod and between the two ends of the object clamping electric telescopic rod and the connecting rod.
Preferably, the opening has been seted up on putting the device main part roof of thing electric telescopic handle week side, and the opening inner cup detains the top cap that the center has the through-hole, and top cap center through-hole diameter is greater than puts the maximum diameter of thing electric telescopic handle, and is provided with the inside exhaust pipe way that lets in the device main part on the top cap, is connected with the air exhauster on the outside exhaust pipe way of device main part.
Preferably, a plurality of groups of fixing rods are fixedly welded at the top ends of the connecting rods and horizontally arranged, and the length of each fixing rod is greater than the diameter of the central through hole of the top cover.
Preferably, the upper support rod and the lower support rod are both arc-shaped structures, the length of the upper support rod is smaller than that of the lower support rod, and the distance between the two ends of the lower support rod is smaller than the height from the top end of the lower support rod to the bottom end face of the device main body when the cleaning electric telescopic rod is completely extended out.
In addition, the invention also provides a cleaning method of the automatic graphite boat cleaning device, which comprises the following steps:
when the graphite boat is cleaned, the object placing electric telescopic rod is contracted until the clamping rod is positioned outside the device main body, the clamping rod is unfolded by utilizing the contraction of the object placing electric telescopic rod, then the object placing electric telescopic rod is expanded, the graphite boat is clamped by utilizing the clamping rod, at the moment, the top cover is lifted by the fixed rod on the connecting rod, then the object placing electric telescopic rod is expanded, the clamping rod and the graphite boat clamped by the clamping rod are enabled to enter the device main body, when the graphite boat enters the device main body, the cleaning electric telescopic rod is in an expansion state, the upper supporting rod and the lower supporting rod are enabled to be outwards expanded, the collision between the graphite boat and the top end of the upper supporting rod is prevented, when the fixed rod enters the device main body, the top cover is buckled with the through hole at the top end of the device main body, then the cleaning electric telescopic rod is retracted, the upper, the graphite boat is cleaned by the cleaning liquid sprayed out through the cleaning spray head, the cleaning liquid flows back to the cleaning liquid box through the reflux pump and the reflux pipe to form circulation, the air suction pipeline on the top cover is connected with the exhaust fan to suck out acid gas generated inside the device main body, and after the cleaning is completed, the electric telescopic handle is stretched and cleaned and retracted to retract the object placing electric telescopic handle, so that the graphite boat can be moved out of the device main body.
The invention has the technical effects and advantages that: according to the automatic graphite boat cleaning device, the graphite boat to be cleaned can be positioned outside the graphite boat to be cleaned in an enclosing manner through the arc-shaped design of the upper supporting rod and the lower supporting rod, the number of groups can be set and the opening and closing degrees of the upper supporting rod and the lower supporting rod can be adjusted according to actual use conditions, the clamping rods with adjustable clamping intervals are matched to adapt to the graphite boats of different sizes, the graphite boats to be cleaned can be cleaned in all directions through the multiple groups of cleaning nozzles, the cleaning effect is good, and the cleaning efficiency is high; through the design of the top cover and the fixed rod, when the electric telescopic rod for placing articles is extended and contracted, the automatic buckling opening of the top cover can be realized, the manual opening and closing are not needed, the manual workload can be reduced, and meanwhile, an exhaust pipeline on the top cover is connected with an exhaust fan, so that the acid gas in the device main body can be extracted in the cleaning process; through the design of back flow and backwash pump, can form a washing circulation with the washing liquid, practice thrift the washing liquid quantity, reduce the washing cost, this graphite boat self-cleaning device has advantages such as structural design is reasonable, practical reliable, can generally use widely.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view of the structure of FIG. 1 at A in accordance with the present invention;
fig. 3 is an enlarged view of the structure at B in fig. 1 according to the present invention.
In the figure: 2 scavenge pipe, 3 scavenging pumps, 4 cleaning solution casees, 5 exhaust ducts, 6 fixed bolsters, 7 put thing electric telescopic handle, 8 top caps, 9 upper strut, 10 washing shower nozzles, 11 lower strut, 12 backwash pumps, 13 device main parts, 14 back flows, 15 stabilizer blades, 16 washing electric telescopic handle, 17 pull rods, 18 dead levers, 19 clamp thing electric telescopic handle, 20 clamp poles, 21 connecting rods.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides an automatic cleaning device for a graphite boat as shown in figures 1-3, which comprises a device main body 13, an object placing electric telescopic rod 7, a cleaning electric telescopic rod 16, a cleaning pipe 2, a top cover 8 and a return pipe 14, wherein a support leg 15 is fixed on the outer side of the bottom end of the device main body 13, the cleaning electric telescopic rod 16 is obliquely arranged on two sides above the inner part of the device main body 13, the telescopic end of the cleaning electric telescopic rod 16 faces to the center of the inner part of the device main body 13, an upper support rod 9 and a lower support rod 11 are rotatably connected with the telescopic end of the cleaning electric telescopic rod 16 through a pin shaft, the cleaning pipe 2 with a cleaning nozzle 10 is bound on the upper support rod 9 and the lower support rod 11, one end of the cleaning pipe 2 extends out of the device main body 13 and is communicated with a cleaning liquid tank 4, a cleaning pump 3 is arranged on the cleaning pipe 2 outside, one end of the return pipe 14 is led in from the bottom end of the device main body 13, a return pump 12 is installed on the return pipe 14 outside the device main body 13, a fixed support 6 is fixedly welded on the top end face of the device main body 13, an object placing electric telescopic rod 7 is vertically fixed on the fixed support 6, and the telescopic end of the object placing electric telescopic rod 7 vertically extends downwards into the device main body 13 and is connected with a clamping rod 20 through a connecting rod 21.
Specifically, wash electric telescopic handle 16 and last support bar 9, all be provided with pull rod 17 between lower support bar 11, the stiff end of washing electric telescopic handle 16 is connected through the round pin axle rotation with the one end of pull rod 17, the other end of pull rod 17 is through round pin axle and last support bar 9, lower support bar 11 rotates and is connected, through the length that changes washing electric telescopic handle 16, realize the opening and shutting degree of last support bar 9 and lower support bar 11, guarantee to treat that the graphite boat that washs is not touched, get into inside device main part 13 smoothly.
Specifically, put the bottom of thing electric telescopic handle 7 and the fixed welding in top of connecting rod 21, rotate through the round pin axle in the bottom of connecting rod 21 and be connected with clamping bar 20, clamping bar 20 is connected with connecting rod 21 through pressing from both sides thing electric telescopic handle 19, and all is provided with the round pin axle between the both ends of pressing from both sides thing electric telescopic handle 19 and clamping bar 20, connecting rod 21, and the degree of opening of telescopic control clamping bar 20 through pressing from both sides thing electric telescopic handle 19, and then the graphite boat is treated to the centre gripping.
The opening is formed in the top wall of the device main body 13 on the side, around the object placing electric telescopic rod 7, of the top cover 8, the center of the opening inner cover buckle is provided with a through hole, the diameter of the through hole in the center of the top cover 8 is larger than the maximum diameter of the object placing electric telescopic rod 7, the stretching and retracting of the object placing electric telescopic rod 7 are not affected, the top cover 8 is provided with an air suction pipeline 5 which is communicated with the inside of the device main body 13, and an air exhauster is connected to the air suction pipeline 5 outside the device main.
Specifically, fixed welding has multiunit dead lever 18, multiunit on connecting rod 21 top dead lever 18 level sets up, just the length of dead lever 18 is greater than the diameter of top cap 8 center through-hole, and when putting thing electric telescopic handle 7 and driving dead lever 18 and rise, dead lever 18 drives apron 8 and moves upward, and then realizes opening top cap 8 voluntarily when wasing the completion.
Specifically, upper strut 9 and lower support 11 are the arc structure, and upper strut 9 and lower support 11 can set up according to actual conditions in the inside quantity of device main part 13 to improve cleaning efficiency, upper strut 9's length is less than the length of lower support 11, and lower support 11 both ends interval length is less than the height of 11 top distances of device main part 13 bottom face of lower support when washing electric telescopic handle 16 stretches out completely, in order to prevent to wash when electric telescopic handle 16 stretches out, bottom that lower support 11 rotation leads to touches the end.
In addition, the invention also provides a cleaning method of the automatic graphite boat cleaning device, which comprises the following steps:
when the graphite boat is cleaned, the object placing electric telescopic rod 7 is contracted until the clamping rod 20 is positioned outside the device main body 13, the object placing electric telescopic rod 19 is contracted to expand the clamping rod 20, then the object placing electric telescopic rod 19 is expanded to clamp the graphite boat by using the clamping rod 20, at the moment, the top cover 8 is lifted by the fixing rod 18 on the connecting rod 21, then the object placing electric telescopic rod 7 is expanded to enable the clamping rod 20 and the graphite boat clamped by the clamping rod 20 to enter the device main body 13, when the graphite boat enters the device main body 13, the cleaning electric telescopic rod 16 is in an expansion state, the upper supporting rod 9 and the lower supporting rod 11 are opened outwards to prevent the graphite boat from colliding with the top end of the upper supporting rod 9, when the fixing rod 18 enters the device main body 13, the top cover 8 is buckled with the through hole at the top end of the device main body 13, then the cleaning electric telescopic rod 16 is, cleaning spray head 10 encircles the graphite boat outside, utilize cleaning pump 3 to 2 inside pump income washing liquids of scavenge pipe, the washing liquid washs the graphite boat through cleaning spray head 10 blowout, backwash pump 12 and back flow 14 flow back the washing liquid to the washing liquid case 4 in, form the circulation, the air draft pipeline 5 on the top cap 8 is connected the air exhauster and is taken the inside acidic gas who produces of device main part 13 out, after the washing is accomplished, the extension is washd electric telescopic handle 16 and is withdrawed and put thing electric telescopic handle 7 and can be with graphite boat remove device main part 13.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.
Claims (3)
1. The utility model provides a graphite boat self-cleaning device, includes device main part (13), puts thing electric telescopic handle (7), washs electric telescopic handle (16), scavenge pipe (2), top cap (8) and back flow (14), its characterized in that: a support leg (15) is fixed on the outer side of the bottom end of the device main body (13), cleaning electric telescopic rods (16) are obliquely arranged on two sides above the inner part of the device main body (13), the telescopic ends of the cleaning electric telescopic rods (16) face to the inner center of the device main body (13), the telescopic ends of the cleaning electric telescopic rods (16) are rotatably connected with an upper support rod (9) and a lower support rod (11) through pin shafts, cleaning pipes (2) with cleaning nozzles (10) are respectively bound on the upper support rod (9) and the lower support rod (11), one end of each cleaning pipe (2) extends out of the device main body (13) and is communicated with a cleaning liquid tank (4), a cleaning pump (3) is arranged on each cleaning pipe (2) outside the device main body (13), a return pipe (14) is communicated with the top end of each cleaning liquid tank (4), one end of each return pipe (14) is introduced from the bottom end of the device main body (13), and a return pump (12) is arranged on, a fixed support (6) is fixedly welded on the top end face of the device main body (13), an object placing electric telescopic rod (7) is vertically fixed on the fixed support (6), the telescopic end of the object placing electric telescopic rod (7) vertically extends downwards into the device main body (13), and is connected with a clamping rod (20) through a connecting rod (21); a pull rod (17) is arranged between the cleaning electric telescopic rod (16) and the upper support rod (9) and between the cleaning electric telescopic rod and the lower support rod (11), the fixed end of the cleaning electric telescopic rod (16) is rotatably connected with one end of the pull rod (17) through a pin shaft, and the other end of the pull rod (17) is rotatably connected with the upper support rod (9) and the lower support rod (11) through a pin shaft; the bottom end of the object placing electric telescopic rod (7) is fixedly welded with the top end of the connecting rod (21), the bottom end of the connecting rod (21) is rotatably connected with a clamping rod (20) through a pin shaft, the clamping rod (20) is connected with the connecting rod (21) through an object placing electric telescopic rod (19), and pin shafts are arranged between the two ends of the object placing electric telescopic rod (19) and the clamping rod (20) and between the two ends of the object placing electric telescopic rod (19) and the connecting rod (21); a through hole is formed in the top wall of the device main body (13) on the periphery of the storage electric telescopic rod (7), a top cover (8) with a through hole is arranged in the center of the through hole inner cover buckle, the diameter of the through hole in the center of the top cover (8) is larger than the maximum diameter of the storage electric telescopic rod (7), an air suction pipeline (5) communicated into the device main body (13) is arranged on the top cover (8), and an exhaust fan is connected to the air suction pipeline (5) outside the device main body (13); a plurality of groups of fixing rods (18) are fixedly welded at the top ends of the connecting rods (21), the groups of fixing rods (18) are horizontally arranged, and the length of each fixing rod (18) is greater than the diameter of a central through hole of the top cover (8).
2. The automatic cleaning device for graphite boats as claimed in claim 1, wherein: the upper supporting rod (9) and the lower supporting rod (11) are both arc-shaped structures, the length of the upper supporting rod (9) is smaller than that of the lower supporting rod (11), and the distance between the two ends of the lower supporting rod (11) is smaller than the height from the top end of the lower supporting rod (11) to the bottom end face of the device main body (13) when the cleaning electric telescopic rod (16) completely extends out.
3. A cleaning method of the automatic cleaning device for graphite boats as claimed in claim 1 or 2, characterized in that: the method comprises the following steps:
when the graphite boat is cleaned, the object holding electric telescopic rod (7) is contracted until the clamping rod (20) is positioned outside the device main body (13), the object holding electric telescopic rod (19) is contracted to expand the clamping rod (20), then the object holding electric telescopic rod (19) is expanded, the graphite boat is clamped by the clamping rod (20), at the moment, the top cover (8) is lifted by the fixing rod (18) on the connecting rod (21), then the object holding electric telescopic rod (7) is expanded, the clamping rod (20) and the graphite boat clamped by the clamping rod enter the device main body (13), when the graphite boat enters the device main body (13), the cleaning electric telescopic rod (16) is in an expansion state, the upper support rod (9) and the lower support rod (11) are outwards opened to prevent the graphite boat from colliding with the top end of the upper support rod (9), when the fixing rod (18) enters the device main body (13), the top cover (8) is buckled with the through hole at the top end of the device main body, then, the cleaning electric telescopic rod (16) is retracted to enable the upper support rod (9) and the lower support rod (11) to be folded towards the direction of the graphite boat, the cleaning spray head (10) surrounds the outer side of the graphite boat, cleaning liquid is pumped into the cleaning pipe (2) by using the cleaning pump (3), the cleaning liquid is sprayed out through the cleaning spray head (10) to clean the graphite boat, the cleaning liquid flows back into the cleaning liquid tank (4) by using the reflux pump (12) and the reflux pipe (14) to form circulation, an air suction pipeline (5) on the top cover (8) is connected with an exhaust fan to pump out acid gas generated inside the device main body (13), and after cleaning is completed, the cleaning electric telescopic rod (16) is stretched to be cleaned, and the article placing electric telescopic rod (7) is retracted to move the graphite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811465080.2A CN109622467B (en) | 2018-12-03 | 2018-12-03 | Automatic graphite boat cleaning device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811465080.2A CN109622467B (en) | 2018-12-03 | 2018-12-03 | Automatic graphite boat cleaning device and method |
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| Publication Number | Publication Date |
|---|---|
| CN109622467A CN109622467A (en) | 2019-04-16 |
| CN109622467B true CN109622467B (en) | 2020-06-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811465080.2A Active CN109622467B (en) | 2018-12-03 | 2018-12-03 | Automatic graphite boat cleaning device and method |
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| CN (1) | CN109622467B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109911630B (en) * | 2019-05-15 | 2019-08-20 | 烟台工程职业技术学院(烟台市技师学院) | A kind of Pneumatic pipe conveyer transportation system and its working method |
| KR102124854B1 (en) * | 2019-09-30 | 2020-06-19 | 이문호 | Vessel automatic cleaning device |
| CN111871913B (en) * | 2020-07-01 | 2021-06-15 | 何宏高 | Road and bridge construction is with quick cleaning equipment of anticollision bucket |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2007130594A (en) * | 2005-11-11 | 2007-05-31 | Tokyo Densetsu Service Kk | Washing device of steel wire rope |
| CN202052733U (en) * | 2010-12-30 | 2011-11-30 | 江苏通鼎光电股份有限公司 | Surface automatic processing apparatus of large-size quartz optical rod |
| CN207227549U (en) * | 2017-09-09 | 2018-04-13 | 上海英冠镀膜科技有限公司 | A kind of coating machine feeding device |
| CN107344181A (en) * | 2017-09-11 | 2017-11-14 | 浙江千鹤工艺品有限公司 | A kind of cleaning device for handicraft |
| CN207615254U (en) * | 2017-10-25 | 2018-07-17 | 重庆赛明科技有限公司 | A kind of circuit board cleaning device |
| CN108465667A (en) * | 2018-05-11 | 2018-08-31 | 褚雯 | A kind of plastic products cleaning device |
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Effective date of registration: 20230410 Address after: No. 218 Dongmao Road, Liantang Town, Qingpu District, Shanghai, 201799 Patentee after: SHANGHAI HONGFENG INDUSTRIAL Co.,Ltd. Address before: 037002 Garden Village, Xinrong District, Datong, Shanxi Patentee before: DATONG XINCHENG NEW MATERIAL Co.,Ltd. |
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