CN109616813B - Side-mounted structure, mounting method thereof and etching device with side-mounted grounding ring - Google Patents
Side-mounted structure, mounting method thereof and etching device with side-mounted grounding ring Download PDFInfo
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- CN109616813B CN109616813B CN201710907839.7A CN201710907839A CN109616813B CN 109616813 B CN109616813 B CN 109616813B CN 201710907839 A CN201710907839 A CN 201710907839A CN 109616813 B CN109616813 B CN 109616813B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
- H01R43/20—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for assembling or disassembling contact members with insulating base, case or sleeve
- H01R43/205—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for assembling or disassembling contact members with insulating base, case or sleeve with a panel or printed circuit board
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/46—Bases; Cases
Abstract
A side-mounted structure for fixedly connecting a first structural member and a second structural member having a contact surface, the side-mounted structure comprising: the special bolt is provided with a bolt head, the middle of the bolt head is thin, the two ends of the bolt head are thick, the middle of the bolt head is thin, a positioning part is formed, and the bolt head is arranged in the accommodating chamber of the first structural member after the bolt head is installed; the first wedge-shaped block is provided with a first clamping groove along the width direction; the second wedge-shaped block is provided with a second clamping groove along the length direction, and the first clamping groove and the second clamping groove are clamped in the positioning part at the same time after the installation is finished so as to clamp and fix the specially-made bolt; and the push rod is used for tightly pushing and fixing the second wedge-shaped block. The invention also provides an installation method for fixedly connecting two structural members by using the side-mounted structure. The invention has the advantages of reducing the occurrence probability of extra faults, improving the process quality control, reducing the workload of replacing the grounding ring and improving the working efficiency.
Description
Technical Field
The invention relates to the field of microelectronics, in particular to a side-mounted structure, an installation method thereof and a grounding ring side-mounted etching device.
Background
The bottom surface of the ground ring is in direct contact with plasma during plasma etching, and therefore, the bottom surface of the ground ring needs to have good plasma corrosion resistance. Therefore, the bottom surface of the grounding ring is protected during the process of installing the grounding ring, and mechanical damage cannot occur. The current mounting method is to add an additional mounting substrate, mount the ground ring on the mounting substrate, mount the substrate on the mounting base, and mount another necessary component, the shower head. This causes new problems such as loosening of the screw, dropping of the screw, or abnormal problems due to poor grounding. In addition, when the grounding ring is disassembled, other parts must be disassembled first, and the workload of replacing the grounding ring is increased.
Disclosure of Invention
The invention aims to provide a side-mounted structure, a mounting method thereof and a side-mounted etching device of a grounding ring, which simplify the process of mounting and dismounting the grounding ring and avoid adding extra parts.
A side-mounted structure for fixedly connecting a first structural member and a second structural member having contact surfaces, the first structural member having an accommodating chamber which penetrates through a side surface of the first structural member and the contact surface of the first structural member and the second structural member, the second structural member having a threaded hole in the contact surface with the first structural member, the side-mounted structure comprising:
the special bolt is fixed in the threaded hole, the middle of a bolt head of the special bolt is thin, the two ends of the bolt head are thick, the middle of the bolt head is thin, a positioning part is formed, and the bolt head is arranged in the accommodating chamber of the first structural member after the special bolt is installed;
the first wedge-shaped block is arranged in the containing chamber of the first structural member, a first clamping groove is formed in the width direction of the first wedge-shaped block, and the width of the first wedge-shaped block is matched with the positioning part of the specially-made bolt;
the second wedge-shaped block is arranged in the containing chamber of the first structural member, a second clamping groove is formed in the length direction of the second wedge-shaped block, the groove width of the second wedge-shaped block is matched with the positioning part of the specially-made bolt, and after the second wedge-shaped block is installed, the first clamping groove and the second clamping groove are clamped in the positioning part at the same time to clamp and fix the specially-made bolt;
and the push rod is arranged in the accommodating chamber of the first structural member and used for pushing and fixing the second wedge block towards the inside of the first structural member.
In the above side-mounting structure, the first wedge-shaped block, the special bolt, the second wedge-shaped block and the push rod are sequentially arranged in the accommodating chamber from inside to outside.
The above-mentioned side dress structure, wherein:
an opening of the accommodating chamber on the side surface of the first structural component is matched with the shape of the push rod, so that the push rod can enter the accommodating chamber;
the width of a second opening of the accommodating chamber on the contact surface of the first structural member and the second structural member is matched with the diameter of the screw head of the special bolt, and the special bolt can move in the accommodating chamber.
The above-mentioned side dress structure, wherein:
when the first structural member and the second structural member are installed in a relative translation mode, the second opening is an elongated groove;
when the first structural member and the second structural member are installed in a relative rotation mode, the second opening is an arc-shaped groove, and the circle center of the arc-shaped groove is the rotation center during installation.
In the above side mounting structure, the inner wall of the accommodating chamber is provided with or without threads.
In the above side mounting structure, a longitudinal section of a screw head portion of the specially-made bolt is in an i shape, a middle portion of the specially-made bolt is the positioning portion, the first wedge-shaped block and the second wedge-shaped block are clamped and fixed from different directions, and a plane protruding from two ends of the i shape limits the first wedge-shaped block and the second wedge-shaped block.
In the above side mounting structure, a longitudinal section of a screw head portion of the specially-made bolt is dumbbell-shaped, a thinner portion of the screw head portion is the positioning portion, the first wedge-shaped block and the second wedge-shaped block are clamped and fixed from different directions, and the first wedge-shaped block and the second wedge-shaped block are limited by thick portions at two ends of the dumbbell-shaped bolt.
In the above side mounting structure, the push rod is sleeved at the tail of the second wedge block or directly props against the tail of the second wedge block.
In the above side mounting structure, the wedge angle range of the first wedge block and the second wedge block is 0 to 45 °.
In the above side mounting structure, the first wedge block and the second wedge block have the same wedge angle.
A side-mounted structure mounting method adopts the side-mounted structure, and comprises the following steps:
s1, fixing the special bolt on the second structural member;
s2, pushing the first wedge block into the bottom of the accommodating chamber from the side surface of the first structural member;
s3, stretching a screw head of the specially-made bolt fixed on the second structural member into a second opening of the accommodating chamber, adjusting the second structural member fixed with the specially-made bolt and the first wedge-shaped block, clamping a positioning part on the screw head of the specially-made bolt into a first clamping groove of the first wedge-shaped block, and clamping the positioning part of the specially-made bolt by the first clamping groove;
and S4, sequentially pushing the second wedge-shaped block and the push rod into the accommodating chamber from the side surface of the first structural member, and enabling the second clamping groove of the second wedge-shaped block and the first clamping groove to clamp the positioning part of the specially-made bolt from different directions.
In the above-mentioned side-mounted structure mounting method, after step S4, the method further includes:
and S5, pushing the push rod with external force to fix the push rod in the accommodating chamber, or fixing the push rod in the accommodating chamber by using threads, and simultaneously enabling the first wedge block and the second wedge block to be tightly matched, thereby fixedly connecting the first structural component and the second structural component.
The utility model provides an etching device of ground ring side dress, includes mounting base and ground ring, and the mounting base is located ground ring top, the mounting base has one and holds the room, should hold the room and link up the side of mounting base and the contact surface of mounting base and ground ring, the ground ring is equipped with a screw hole on the contact surface with the mounting base, mounting base and ground ring are through the side dress structure fixed connection of above-mentioned arbitrary one.
In the etching device for the side installation of the grounding ring, the grounding ring and the mounting base are fixedly connected through 1-8 side installation structures.
In the etching apparatus for the ground ring side apparatus, the ground ring is made of a silicon conductive material and has good conductivity.
The invention has the advantages and beneficial effects that:
(1) the occurrence probability of extra faults is reduced, and the process quality control effect is improved.
(2) Reduce the work load of changing ground ring, improve work efficiency.
Drawings
FIG. 1 is a cross-sectional view of a side mount structure of the present invention.
FIG. 2 is a schematic diagram of an etching apparatus installed on the side of a ground ring according to the present invention.
FIG. 3 is a schematic cross-sectional view of a ground ring side-mounted portion of an etching apparatus for ground ring side-mounting according to the present invention.
Fig. 4 is an elevation view of a first wedge block of the present invention.
Fig. 5 is a side view of a first wedge block of the present invention.
Fig. 6 is an elevation view of a second wedge block in the present invention.
Fig. 7 is a side view of a second wedge block of the present invention.
Fig. 8 is an embodiment of the present invention in which a second wedge block is coupled to a pushrod.
FIG. 9 is a sectional view of the containing chamber in the embodiment.
Fig. 10 is a schematic side opening view of the accommodation chamber in the embodiment.
Fig. 11 is a schematic view of a second opening of the receiving chamber in the embodiment.
Detailed Description
The present invention will now be further described by way of the following detailed description of a preferred embodiment thereof, taken in conjunction with the accompanying drawings.
The invention discloses a side mounting structure which can be used for fixedly connecting a first structural member and a second structural member with contact surfaces, wherein the first structural member is provided with an accommodating chamber, the accommodating chamber penetrates through the side surface of the first structural member and the contact surface of the first structural member and the second structural member, a threaded hole is formed in the contact surface of the second structural member and the first structural member, and the side mounting structure comprises a first wedge block 1, a special bolt 2, a second wedge block 3 and a push rod 4.
And the special bolt 2 is fixed in the threaded hole, and the head of the special bolt protrudes out of the surface of the first structural component. The screw head of the specially-made bolt 2 is thin in the middle and thick at two ends, the thin part in the middle forms a positioning part, and the screw head is positioned in the accommodating chamber of the first structural member after the first structural member is fixedly connected with the second structural member.
Further, the longitudinal section of the screw head part of the specially-made bolt 2 is in an I shape, the middle part of the specially-made bolt is the positioning part, the first wedge-shaped block 1 and the second wedge-shaped block 3 are clamped and fixed from different directions, and the protruding planes at the two ends of the I shape limit the first wedge-shaped block 1 and the second wedge-shaped block 2.
Further, the longitudinal section of the screw head part of the specially-made bolt 2 can be dumbbell-shaped, the middle part of the specially-made bolt is the positioning part, the first wedge-shaped block 1 and the second wedge-shaped block 3 can be clamped and fixed from different directions, and the first wedge-shaped block 1 and the second wedge-shaped block 2 are limited by thick parts at two ends of the dumbbell-shaped bolt.
As shown in fig. 4 and 5, the first wedge block 1 is disposed in the accommodating chamber of the first structural member, and a first engaging groove 11 is formed along a width direction thereof, and a groove width is matched with a positioning portion of the special bolt 2.
As shown in fig. 6 and 7, the second wedge 3 is disposed in the accommodating chamber of the first structural member, and a second locking groove 31 is disposed along the length direction thereof, and the width of the second wedge matches with the positioning portion of the tailored bolt 2.
After the installation is finished, the first clamping groove 11 and the second clamping groove 31 are clamped in the positioning part of the specially-made bolt 2 at the same time, and the specially-made bolt 2 is clamped and fixed. It should be mentioned that, in order to fix the tailored bolt 2, the first locking groove 11 and the second locking groove 31 inevitably intersect, and the two locking grooves together form a 360 ° enclosure, so as to ensure that the tailored bolt 2 does not fall out of the limited range of the first locking groove 11 and the second locking groove 31.
The push rod 4 is disposed in the housing chamber of the first structural member, and pushes and fixes the second wedge 3 toward the inside of the first structural member. The second wedge-shaped block 3 and the first wedge-shaped block 1 are mutually matched and mutually staggered to bite the positioning part of the special bolt 2, so that the effect of fixing the special bolt 2 is achieved.
The push rod 4 and the containing chamber have two matching and mounting modes.
First, the inner wall of the accommodating chamber is not provided with threads, and the diameter of one end of the push rod 4 is smaller than the opening of the side wall of the accommodating chamber, and the diameter of the other end is larger than the opening of the side wall of the accommodating chamber. During installation, the push rod 4 is pushed into the accommodating chamber to be fixed in a nail striking mode. The fixing mode is inconvenient to disassemble and is not suitable for the use environment needing repeated disassembly and assembly.
The second matching mode is that the inner wall of the containing chamber is provided with threads, and the outer surface of the push rod 4 is also correspondingly provided with threads and a straight or cross groove. During installation, the push rod 4 is pushed into the accommodating chamber to be fixed in a screw screwing mode. The fixing mode is flexible, simple and convenient, and can be repeatedly disassembled and assembled.
The push rod 4 and the second wedge-shaped block 3 also have two matching and mounting modes.
First, one end of the push rod 4 is a plane. During installation, the second wedge-shaped block 3 and the push rod 4 are respectively plugged into the accommodating chamber in sequence. The plane end of the push rod 4 is propped against the tail part of the second wedge-shaped block 3, and when the push rod 4 is pushed, the second wedge-shaped block 3 is pushed to move to the deep part of the accommodating chamber due to the force transmission.
The second matching mode is that one end of the push rod 4 is provided with a clamping groove, and the tail part of the second wedge-shaped block 3 is provided with a buckle. The snap of the second wedge 3 and the snap of the push rod 4 are pre-assembled as shown in fig. 8. After preassembling, the second wedge block 3 is movably connected with the push rod 4, and the two can also rotate relatively. And plugging the preassembled second wedge-shaped block 3 and the push rod 4 into the accommodating chamber, and fastening the push rod 4 so as to finally fix the special screw 2. The second engagement means defines that the second wedge 3 can only move in the axial direction due to the presence of the locking groove.
Further, the first wedge-shaped block 1, the special bolt 2, the second wedge-shaped block 3 and the push rod 4 are sequentially arranged in the accommodating chamber from inside to outside.
The opening of the accommodating chamber on the side surface of the first structural component is matched with the shape of the push rod 4 for the push rod to enter; the width of a second opening of the containing chamber on the contact surface of the first structural member and the second structural member is matched with the diameter of the screw head of the special bolt 2, so that the special bolt 2 can move and be fastened in the containing chamber.
Further, if the first structural member and the second structural member are mounted in a relatively translational manner, the second opening is an elongated groove; if the first structural member and the second structural member are installed in a relative rotation mode, the second opening is an arc-shaped groove, and the circle center of the arc-shaped groove is the rotation center during installation.
Further, the inner wall of the accommodating chamber is provided with threads or is not provided with threads.
Further, the wedge angle of the first wedge block 1 and the second wedge block 3 ranges from 0 ° to 45 °.
Further, the wedge angles of the first wedge block 1 and the second wedge block 3 are the same. I.e. the inclination of the inclined surfaces of both wedge blocks is the same.
The invention also discloses a side-mounted structure mounting method, which comprises the following steps:
s1, fixing the special bolt 2 on the second structural member;
s2, pushing the first wedge block 1 into the bottom of the accommodating chamber from the side surface of the first structural member;
s3, stretching a screw head of the specially-made bolt 2 fixed on the second structural member into a second opening of the accommodating chamber, adjusting the second structural member fixed with the specially-made bolt 2 and the first wedge-shaped block 1, clamping a positioning part on the screw head of the specially-made bolt 2 into a first clamping groove 11 of the first wedge-shaped block 1, and clamping the positioning part of the specially-made bolt 2 by the first clamping groove 11;
and S4, sequentially pushing the second wedge-shaped block 3 and the push rod 4 into the accommodating chamber from the side surface of the first structural member, and enabling the second clamping groove of the second wedge-shaped block 3 and the first clamping groove 11 to clamp the positioning part of the specially-made bolt 2 from different directions.
Further, step S4 is followed by:
and S5, pushing the push rod 4 with external force to fix the push rod in the accommodating chamber, or fixing the push rod 4 in the accommodating chamber by using threads, and simultaneously enabling the first wedge block 1 and the second wedge block 3 to be tightly matched, thereby fixedly connecting the first structural component and the second structural component.
Examples
The invention also discloses an etching device arranged on the side of the grounding ring. Fig. 2 is an overall schematic diagram of an etching apparatus installed on the side of a ground ring, which includes a mounting base 5 and the ground ring 6, wherein the mounting base 5 is located above the ground ring 6. Fig. 3 is a schematic view showing the connection between the mounting base 5 and the ground ring 6. FIG. 1 is a cross-sectional view of one of the side mount structures of FIG. 3.
In this embodiment, the mounting base 5 and the grounding ring 6 are the first structural member and the second structural member. The mounting base 5 is provided with a containing chamber 7, the containing chamber 7 penetrates through the side face of the mounting base 5 and the contact face of the mounting base 5 and the grounding ring 6, the grounding ring 6 is provided with a threaded hole on the contact face of the grounding ring 6 and the mounting base 5, and the mounting base 5 and the grounding ring 6 are fixedly connected through a side mounting structure. For the installation stability, this embodiment is along the fixed mounting base 5 of 6 side dress structures fixed mounting base and ground ring 6 of circumference evenly distributed.
The part 2 in fig. 1 shows a special bolt 2 in this embodiment, and the vertical section of the screw head part is i-shaped. The I-shaped shape has a clearer positioning part and a smoother contact surface compared with the dumbbell shape, and is beneficial to clamping and positioning of the wedge-shaped block.
In fig. 1, the member 3 is a second wedge 3 in this embodiment, and the member 4 is a push rod 4 in this embodiment. The tail of the second wedge block 3 is provided with a buckle, the push rod 4 is provided with a clamping groove, the buckle is embedded into the clamping groove, the second wedge block 3 and the push rod 4 are movably connected, and the second wedge block 3 and the push rod 4 can rotate relatively. The push rod 4 is a threaded push rod and is in threaded connection with the inner wall surface of the corresponding position of the containing chamber 7 in the mounting base 5, the threaded push rod extends into the containing chamber 7 from the side surface of the mounting base 5, and the threaded push rod pushes the second wedge-shaped block 3 under the action of thread guiding so that the second clamping groove of the second wedge-shaped block 3 clamps the specially-made bolt 2. The second wedge 3 and the push rod 4 are pushed together into the receiving space 7 after being preassembled according to fig. 8. The end of the push rod 4 opposite to the clamping groove is provided with a straight groove which is matched and fastened with a screwdriver.
After fastening, the first wedge block 1 and the second wedge block 3 are mutually staggered, the horizontal position is fixed by the push rod 4, and the vertical position is fixed by acting force generated by the mutually staggered first wedge block 1 and the second wedge block 3.
The accommodating chamber 7 is designed according to the installation requirement of the side-mounted structure, the mounting base 5 and the grounding ring 6 in the embodiment are both circular/annular in appearance, and a relative rotation mode is adopted during installation, so that the second opening of the accommodating chamber 7 on the mounting base 5 is an arc-shaped groove. The sectional view, the side opening and the second opening of the housing chamber 7 are shown in FIGS. 9 to 11, respectively. In fig. 9, the accommodating chamber 7 accommodates the first wedge-shaped block 1, the special bolt 2, the second wedge-shaped block 3 and the push rod 4 from inside to outside in sequence, the diameter of each section of the accommodating chamber 7 is adapted to the part accommodated by the section, and a thread is arranged at the position corresponding to the push rod 4. Fig. 10 shows the view in the direction a of fig. 9, i.e. the side opening described above, into which the first wedge block 1, the second wedge block 3 and the push rod 4 are pushed one after the other. Fig. 11 is a view in the direction B of fig. 9, i.e., a second opening for insertion and removal of the tailored bolt 2.
Further, the grounding ring 6 is made of a silicon conductive material and has good conductivity.
While the present invention has been described in detail with reference to the preferred embodiments, it should be understood that the above description should not be taken as limiting the invention. Various modifications and alterations to this invention will become apparent to those skilled in the art upon reading the foregoing description. Accordingly, the scope of the invention should be determined from the following claims.
Claims (15)
1. A side mount structure for fixedly connecting a first structural member and a second structural member having contact surfaces, wherein the first structural member has an accommodating chamber that penetrates through a side surface of the first structural member and a contact surface between the first structural member and the second structural member, and the second structural member has a threaded hole in the contact surface with the first structural member, the side mount structure comprising:
the special bolt (2) is fixed in the threaded hole, the middle of a bolt head of the special bolt (2) is thin, the two ends of the bolt head are thick, the middle of the bolt head is thin, a positioning part is formed, and the bolt head is arranged in the accommodating chamber of the first structural member after the bolt head is installed;
the first wedge-shaped block (1) is arranged in the containing chamber of the first structural member, a first clamping groove (11) is formed in the width direction of the first wedge-shaped block, and the width of the first wedge-shaped block is matched with the positioning part of the specially-made bolt (2);
the second wedge-shaped block (3) is arranged in the containing chamber of the first structural member, a second clamping groove (31) is formed in the length direction of the second wedge-shaped block, the groove width of the second wedge-shaped block is matched with that of the positioning part of the specially-made bolt (2), and after the second wedge-shaped block is installed, the first clamping groove (11) and the second clamping groove (31) are clamped in the positioning part at the same time to clamp and fix the specially-made bolt (2);
and a push rod (4) which is arranged in the accommodating chamber of the first structural component and pushes and fixes the second wedge block (3) to the interior of the first structural component.
2. A side mounting structure according to claim 1, wherein the first wedge block (1), the special bolt (2), the second wedge block (3) and the push rod (4) are arranged in the accommodating chamber from inside to outside.
3. A side mount structure as claimed in claim 1 or 2, wherein:
the opening of the accommodating chamber on the side surface of the first structural component is matched with the shape of the push rod (4) for the push rod to enter;
the width of a second opening of the containing chamber on the contact surface of the first structural member and the second structural member is matched with the diameter of the head of the special bolt (2) for the special bolt (2) to move in.
4. A side mount structure as claimed in claim 3, wherein:
if the first structural member and the second structural member are installed in a relative translation mode, the second opening is an elongated groove;
if the first structural member and the second structural member are installed in a relative rotation mode, the second opening is an arc-shaped groove, and the circle center of the arc-shaped groove is the rotation center during installation.
5. A side mounting structure according to claim 3 wherein the interior wall of said housing is threaded or unthreaded.
6. A side mounting structure as claimed in claim 1 or 2, wherein the longitudinal section of the screw head part of the special bolt (2) is i-shaped, the middle part of the special bolt is the positioning part for clamping and fixing the first wedge-shaped block (1) and the second wedge-shaped block (3) from different directions, and the protruding planes at the two ends of the i-shaped bolt limit the first wedge-shaped block (1) and the second wedge-shaped block (3).
7. A side mounting structure as claimed in claim 1 or 2, wherein the longitudinal section of the screw head part of the special bolt (2) is dumbbell-shaped, the thinner part of the screw head part is the positioning part for clamping and fixing the first wedge block (1) and the second wedge block (3) from different directions, and the thicker parts at the two ends of the dumbbell-shaped bolt limit the first wedge block (1) and the second wedge block (3).
8. A side mounting structure as claimed in claim 1 or 2, wherein the push rod (4) is sleeved on the tail of the second wedge block (3) or directly props against the tail of the second wedge block (3).
9. A side mounting structure according to claim 1 or 2, wherein the wedge angle of the first and second wedge blocks (1, 3) is in the range of 0 ° to 45 °.
10. A side mounting according to claim 1 or 2, wherein the first wedge block (1) and the second wedge block (3) have the same wedge angle.
11. A side-mounted structure mounting method, characterized in that the side-mounted structure according to any one of claims 1 to 10 is adopted, and the mounting method comprises the following steps:
s1, fixing the special bolt (2) on the second structural part;
s2, pushing the first wedge-shaped block (1) into the bottom of the accommodating chamber from the side surface of the first structural member;
s3, stretching a screw head of the specially-made bolt (2) fixed on the second structural member into a second opening of the accommodating chamber, adjusting the second structural member and the first wedge-shaped block (1) fixed with the specially-made bolt (2), clamping a positioning part on the screw head of the specially-made bolt (2) into a first clamping groove (11) of the first wedge-shaped block (1), and clamping the positioning part of the specially-made bolt (2) by the first clamping groove (11);
s4, the second wedge-shaped block (3) and the push rod (4) are sequentially pushed into the containing chamber from the side face of the first structural member, and the second clamping groove of the second wedge-shaped block (3) and the first clamping groove (11) clamp the positioning portion of the specially-made bolt (2) from different directions.
12. The side mount structure mounting method according to claim 11, further comprising, after step S4:
and S5, pushing the push rod (4) with external force to fix the push rod in the accommodating chamber, or fixing the push rod (4) in the accommodating chamber by using threads, and simultaneously enabling the first wedge-shaped block (1) and the second wedge-shaped block (3) to be tightly matched, thereby fixedly connecting the first structural component and the second structural component.
13. An etching device for side mounting of a grounding ring comprises a mounting base (5) and the grounding ring (6), wherein the mounting base (5) is positioned above the grounding ring (6), the etching device is characterized in that the mounting base (5) is provided with a containing chamber, the containing chamber penetrates through the side surface of the mounting base (5) and the contact surface of the mounting base (5) and the grounding ring (6), the grounding ring (6) is provided with a threaded hole on the contact surface with the mounting base (5), and the mounting base (5) and the grounding ring (6) are fixedly connected through a side mounting structure according to any one of claims 1-10.
14. An etching apparatus for side mounting of grounding ring according to claim 13, characterized in that the grounding ring (6) and the mounting base (5) are fixedly connected by 1-8 said side mounting structures.
15. A ground ring side-mounted etching apparatus according to claim 13, wherein said ground ring (6) is made of a silicon conductive material and has a good conductivity.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710907839.7A CN109616813B (en) | 2017-09-29 | 2017-09-29 | Side-mounted structure, mounting method thereof and etching device with side-mounted grounding ring |
| TW107129162A TWI681456B (en) | 2017-09-29 | 2018-08-21 | Side-mounted structure and installation method and etching device for side-mounted ground ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710907839.7A CN109616813B (en) | 2017-09-29 | 2017-09-29 | Side-mounted structure, mounting method thereof and etching device with side-mounted grounding ring |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109616813A CN109616813A (en) | 2019-04-12 |
| CN109616813B true CN109616813B (en) | 2020-05-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710907839.7A Active CN109616813B (en) | 2017-09-29 | 2017-09-29 | Side-mounted structure, mounting method thereof and etching device with side-mounted grounding ring |
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| Country | Link |
|---|---|
| CN (1) | CN109616813B (en) |
| TW (1) | TWI681456B (en) |
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| CN102202811A (en) * | 2008-11-11 | 2011-09-28 | 韦拉有限公司 | Device for clamping a tool |
| CN202108833U (en) * | 2011-06-22 | 2012-01-11 | 金纯信 | Connecting fastener and connecting device of panel furniture |
| CN104299881A (en) * | 2014-09-01 | 2015-01-21 | 上海华力微电子有限公司 | Plasma etching device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7641762B2 (en) * | 2005-09-02 | 2010-01-05 | Applied Materials, Inc. | Gas sealing skirt for suspended showerhead in process chamber |
| US8679288B2 (en) * | 2008-06-09 | 2014-03-25 | Lam Research Corporation | Showerhead electrode assemblies for plasma processing apparatuses |
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2017
- 2017-09-29 CN CN201710907839.7A patent/CN109616813B/en active Active
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2018
- 2018-08-21 TW TW107129162A patent/TWI681456B/en active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2287221Y (en) * | 1997-04-24 | 1998-08-05 | 林玉女 | Improved linkage of assembled furniture |
| CN102202811A (en) * | 2008-11-11 | 2011-09-28 | 韦拉有限公司 | Device for clamping a tool |
| CN202108833U (en) * | 2011-06-22 | 2012-01-11 | 金纯信 | Connecting fastener and connecting device of panel furniture |
| CN104299881A (en) * | 2014-09-01 | 2015-01-21 | 上海华力微电子有限公司 | Plasma etching device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201921487A (en) | 2019-06-01 |
| TWI681456B (en) | 2020-01-01 |
| CN109616813A (en) | 2019-04-12 |
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