CN109612377B - Electromagnetic detection device, detection method and coating system - Google Patents
Electromagnetic detection device, detection method and coating system Download PDFInfo
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- CN109612377B CN109612377B CN201811591621.6A CN201811591621A CN109612377B CN 109612377 B CN109612377 B CN 109612377B CN 201811591621 A CN201811591621 A CN 201811591621A CN 109612377 B CN109612377 B CN 109612377B
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- 238000001514 detection method Methods 0.000 title claims abstract description 46
- 238000000576 coating method Methods 0.000 title claims abstract description 22
- 239000011248 coating agent Substances 0.000 title claims abstract description 21
- 230000005540 biological transmission Effects 0.000 claims abstract description 22
- 239000004020 conductor Substances 0.000 claims description 9
- 230000032258 transport Effects 0.000 claims description 9
- 230000004907 flux Effects 0.000 claims description 7
- 230000005389 magnetism Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000004804 winding Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 7
- 238000012544 monitoring process Methods 0.000 abstract description 5
- 239000000428 dust Substances 0.000 abstract description 4
- 239000007888 film coating Substances 0.000 abstract description 4
- 238000009501 film coating Methods 0.000 abstract description 4
- 238000012423 maintenance Methods 0.000 abstract description 3
- 230000035699 permeability Effects 0.000 abstract description 2
- 230000006698 induction Effects 0.000 description 11
- 239000002184 metal Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 7
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 238000010248 power generation Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 238000010549 co-Evaporation Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- ZZEMEJKDTZOXOI-UHFFFAOYSA-N digallium;selenium(2-) Chemical compound [Ga+3].[Ga+3].[Se-2].[Se-2].[Se-2] ZZEMEJKDTZOXOI-UHFFFAOYSA-N 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Geophysics And Detection Of Objects (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Abstract
The invention relates to the technical field of equipment detection, in particular to an electromagnetic detection device, a detection method and a coating system. The electromagnetic detection device comprises a carrier for carrying the conveyed object and having magnetic permeability; a transport device for transporting the carrier in a transport direction; an electromagnetic coil arranged on the transmission path of the transmission device and used for the carrier and the conveyed object to pass through; a sensor for detecting the intensity of a magnetic field generated by the carrier as it passes through the electromagnetic coil; and the processor is connected with the magnetic field intensity sensor and is used for determining the position information of the carrier according to the magnitude of the magnetic field intensity detected by the magnetic field intensity sensor. The position signal of the detected part is monitored by adopting a magnetic field strength signal mode, compared with the traditional method, the magnetic field strength monitoring is very difficult to damage, the magnetic field strength monitoring is not easily influenced by a large amount of dust in the film coating chamber, the signal is stable, and the maintenance is simple.
Description
Technical Field
The invention relates to the technical field of equipment detection, in particular to an electromagnetic detection device, a detection method and a coating system.
Background
A CIGS solar cell film is composed of four elements of Cu (copper), in (indium), ga (gallium) and Se (selenium) In optimal proportion, and can be prepared by adopting a co-evaporation system. The solar energy power generation system has the advantages of strong light absorption capacity, good power generation stability, high conversion efficiency, long power generation time in the daytime, high power generation quantity, low production cost, short energy recovery period and the like.
The existing CIGS coating system generally adopts an alternate sputtering method or a co-evaporation method to prepare a preset layer of the copper indium gallium diselenide thin film solar cell. In order to obtain the position of a piece (glass) to be coated in a coating system, a photoelectric sensor is adopted in the prior art for detection. Whereas existing photoelectric sensor assemblies transmit photoelectric signals through quartz rods, they suffer from the following drawbacks:
1. The quartz rod is easily interfered by impurities in the film coating chamber, the correlation signals are easily interfered by the impurities attached to the surface of the quartz rod, along with the production, the tail end of the quartz rod is gradually attached by CIGS dust, the light transmittance is reduced, and the signals are unstable and even abnormal;
2. the photoelectric signal is influenced in the coating environment, and a generating device needs to be cleaned regularly;
3. the quartz structure is easy to damage, and needs to be replaced after being broken, so that a large number of spare parts are generated.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the defects of the photoelectric sensor assembly in the prior art, thereby providing an electromagnetic detection device, a detection method and a coating system.
In order to solve the technical problems, the invention adopts the following technical scheme:
the invention provides an electromagnetic detection device, comprising:
the carrier is used for carrying the conveyed object; the carrier has magnetism conductivity;
A transport device that transports the carrier in a transport direction;
an electromagnetic coil which is arranged on a transmission path of the transmission device and can be penetrated by the carrier and the conveyed object;
the magnetic field intensity sensor is used for detecting the magnetic field intensity generated when the carrier passes through the electromagnetic coil;
And the processor is connected with the magnetic field intensity sensor and is used for determining the position information of the carrier according to the intensity of the magnetic field detected by the magnetic field intensity sensor.
In the electromagnetic detection device, the electromagnetic coil is formed by spirally winding a wire, and two ends of the wire are respectively connected with the direct current power supply.
In the electromagnetic detection device, a conveying channel is arranged in the middle of the electromagnetic coil, and the direction of the conveying channel is consistent with the conveying direction of the conveying device and is used for the carrier and the conveyed object to pass through.
In the electromagnetic detection apparatus, the magnetic field intensity sensor is a magnetic flux sensor.
In the electromagnetic detection device, the carrier is provided with a magnetic conductive material, and the magnetic conductive properties of the carrier at different positions along the transmission direction of the carrier are different.
In the electromagnetic detection apparatus, the carrier includes:
The length direction of the longitudinal beams is parallel to the transmission direction of the carrier, the number of the longitudinal beams is multiple, and the longitudinal beams are arranged at intervals along the direction perpendicular to the transmission direction of the carrier;
the cross beam is perpendicular to the longitudinal beams and connected among the longitudinal beams, and the magnetic conductive material is arranged in the cross beam.
Further, the number of the cross beams is multiple, the multiple cross beams are arranged at intervals along the transmission direction of the carrier, and magnetic conduction materials in the cross beams are the same. Preferably, the weight of the magnetic conductive material in each of the transverse amounts is different.
The invention also provides a coating system which is characterized by comprising the electromagnetic detection device.
The invention also provides a detection method adopting the electromagnetic detection device, which comprises the following steps of,
Receiving magnetic field intensity information detected by the magnetic field intensity sensor;
and determining the real-time position information of the carrier according to the relation between the pre-stored magnetic field intensity information and the position information of the carrier.
The technical scheme of the invention has the following advantages:
1. The electromagnetic detection device provided by the invention adopts a magnetic field intensity signal mode to monitor the position signal of the detected part, adopts an electromagnetic coil to replace a fragile quartz conduction part, and is very difficult to damage compared with the traditional means. The magnetic field intensity type monitoring is not easily affected by a large amount of dust in the film coating chamber, the signal is stable, and the maintenance is simple.
2. According to the electromagnetic detection device provided by the invention, the metal cores are respectively embedded in the cross beams of the carrier, when the cross beams of the carrier pass through the electrified solenoid, the cross section area of the iron core in the coil is maximum, the influence on magnetic flux is also maximum, the characteristic parts of the carrier can be distinguished in the induction process, if the iron cores with different masses are respectively embedded in the three cross beams, the three different signals can be distinguished more obviously, and therefore, the specific passing position of the carrier can be determined.
3. The detection method and the coating system provided by the invention adopt an electromagnetic detection device to electrify the electromagnetic coil, the detected part moves towards the electromagnetic coil to cause the state change of magnetic flux, thereby detecting the magnetic field intensity by the magnetic field intensity sensor and judging the position of the detected part according to the magnetic field intensity. Therefore, when the coating system fails or the position of the carrier needs to be acquired, the position of the carrier can be positioned at any time.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a front view of an electromagnetic detecting apparatus provided in embodiment 1 of the present invention;
Fig. 2 is a top view of the electromagnetic detecting device provided in embodiment 1 of the present invention;
Fig. 3 is a right side view of the electromagnetic detecting device provided in embodiment 1 of the present invention.
Reference numerals illustrate:
1-coating equipment; 2-a transmission device; 3-metal carrier; 11-an interior space; 51-electromagnetic coil; 52-direct current power supply; 61-a magnetic field strength sensor; 62-processor.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Example 1
As shown in fig. 1 to 3, the present embodiment provides an electromagnetic detection apparatus, including:
a carrier 3 for carrying the conveyed object; the carrier 3 has magnetism conductivity;
A transport device 2 for transporting the carriers 3 in a transport direction;
An electromagnetic coil 51 provided on a transmission path of the transmission device 2 and through which the carrier 3 and the conveyed object pass;
a magnetic field intensity sensor 61 for detecting the intensity of a magnetic field generated when the carrier 3 passes through the electromagnetic coil 51;
And a processor 62, connected to the magnetic field intensity sensor 61, for determining the position information of the carrier 3 according to the magnitude of the magnetic field intensity detected by the magnetic field intensity sensor 61.
In the electromagnetic detecting device according to the present embodiment, the carrier 3 carrying the object to be conveyed is conveyed in the conveying direction by the conveying device 2. The conveyed object may be glass, but the conveyed object may be any sheet without limiting the present invention. The carrier 3 carrying the conveyed object passes through the electromagnetic coil 51 arranged on the transmission path, and has magnetic permeability, so that the carrier acts as a metal core in the process of passing through the electromagnetic coil 51, can integrate a magnetic induction line and a conductive magnetic field, and can change along with the change of the moving position, namely, the change of the magnetic induction intensity around the spiral coil can be caused. The magnetic field intensity sensor provided in the embodiment of the invention can detect the magnetic induction intensity around the solenoid, namely, can detect the changed magnetic induction intensity data generated along with the change of the position of the carrier, and can transmit the detected magnetic induction intensity data to the processor 62, so that the processor 62 can correspondingly obtain the position of the carrier according to the magnetic induction intensity data.
The electromagnetic detection device provided by the embodiment adopts a magnetic field intensity signal mode to monitor the position signal of the detected part, adopts an electromagnetic coil to replace a fragile quartz conduction part, and is very difficult to damage compared with the traditional means. The magnetic field intensity type monitoring is not easily affected by a large amount of dust in the film coating chamber, the signal is stable, and the maintenance is simple.
In this embodiment, the electromagnetic coil 51 is formed by spirally winding a wire, and both ends of the wire are respectively connected to the dc power supply 52.
In the present embodiment, the magnetic field strength sensor 61 is a magnetic flux sensor.
The electromagnetic coil DC power supply 52 adopts a small-sized switching power supply device with rated power of about 100-500W, and the power supply is used as a DC power source of the magnetic induction coil, and when in use, the output current is regulated to about 5A, and the output current is connected in series with the magnetic induction coil to form an electrified solenoid which is used as a magnetic field source of the device.
The electromagnetic coil (solenoid), the coil surrounds the circumference of the detected position of the carrier, imitates a winding mode similar to that of an electromagnet electrifying solenoid and an internal iron core, the carrier has magnetism conductivity to integrate magnetic induction lines in the solenoid and conduct the magnetic field, the attribute of the carrier in the solenoid plays a key role in the strength of the magnetic field, besides magnetic substances such as iron and the like, all metals also have certain magnetic conductivity, and the magnetic field strength can be influenced to a certain extent when placed in the electrifying solenoid.
The magnetic field intensity sensor is used for detecting the intensity of a magnetic field generated by the electromagnetic coil and the iron core under the condition of residual amounts of different metal sources, judging whether metal components (metal carriers) of the device pass through the solenoid according to magnetic field data, and is used as a final measuring part of the device, and the magnetic field intensity sensor needs to have higher precision and is provided with an analog output port for communicating with CIGS (copper indium gallium arsenide) equipment.
In this embodiment, a conveying channel is disposed in the middle of the electromagnetic coil 52, and the direction of the conveying channel is consistent with the conveying direction of the conveying device 2, so that the carrier 3 and the conveyed object can pass through.
In this embodiment, the carrier 3 is provided with a magnetic conductive material, and the carrier 3 has different magnetic conductive properties at different positions along the transmission direction of the carrier 3.
Further, the carrier 3 includes:
The length direction of the longitudinal beams is parallel to the transmission direction of the carrier, the number of the longitudinal beams is multiple, and the longitudinal beams are arranged at intervals along the direction perpendicular to the transmission direction of the carrier;
the cross beam is perpendicular to the longitudinal beams and connected among the longitudinal beams, and the magnetic conductive material is arranged in the cross beam.
Preferably, the number of the cross beams is multiple, the multiple cross beams are arranged at intervals along the transmission direction of the carrier, and the magnetic conductive materials in the cross beams are the same.
Further preferably, the weight within the lateral amounts is different for each. The strength of the magnetic field generated around the electromagnetic coil is also different when each beam passes through the electromagnetic coil. The processor can determine the position of the carrier according to the pre-stored relationship between the magnetic field intensity and the position, namely the position of the conveyed object on the carrier can be determined through the detected magnetic field intensity.
In this embodiment, the magnetic conductive material is preferably a magnetic steel material.
When the front, middle and rear cross beams of the carrier pass through the electrified solenoid, the sectional area of an iron core in the coil is the largest, the influence on magnetic flux is the largest, the characteristic parts of the carrier can be distinguished in the induction process, and three different signals can be distinguished. The magnetic flux sensor controller transmits the data signals to the communication upstream of the equipment according to different data signals, and the whole working flow is completed.
The embodiment also provides a detection method adopting the electromagnetic detection device, which comprises the following steps,
Receiving magnetic field intensity information detected by the magnetic field intensity sensor;
and determining the real-time position information of the carrier according to the relation between the pre-stored magnetic field intensity information and the position information of the carrier.
In the present detection method, the magnetic field intensity change detected by the magnetic field intensity sensor during the process of passing through the electromagnetic coil 3 of the carrier 3 is a continuously changing curve, and according to the continuously changing magnetic field intensity curve information, the information can be in one-to-one correspondence with the actual position of the carrier. And the relation between the magnetic field intensity information and the position information of the carrier is stored in advance, and in the actual detection process, when the magnetic field intensity information detected by the magnetic field intensity sensor is received, the real-time position information of the carrier can be determined according to the relation between the magnetic field intensity information and the position information of the carrier.
In summary, the electromagnetic detection device and the detection method according to the embodiments of the present invention monitor the position signal of the detected component by using the magnetic field intensity signal, so that the position of the detected component can be detected without being affected by the external environment, and stable detection of the detected component can be realized.
Example 2
As shown in fig. 1-3, this embodiment further provides a coating system, which includes a coating apparatus 1, an inner space 11 is provided in the coating apparatus 1, the metal carrier 3 carries glass to move in the inner space 11 along the transmission direction to complete coating, and the electromagnetic detection device described in embodiment 1 is used to detect the position of the metal carrier 3, so as to realize real-time monitoring of the coating object in the coating system.
In summary, the electromagnetic detection device is used in the coating system of the embodiment to detect the position of the detected component in the coating process, so that the position of the carrier can be positioned at any time when the coating system fails or the position of the carrier needs to be acquired.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (10)
1. An electromagnetic detection apparatus, comprising:
A carrier (3) for carrying the conveyed objects; the carrier has magnetism conductivity;
A transport device (2) that transports the carrier (3) in a transport direction;
an electromagnetic coil (51) which is provided on a transmission path of the transmission device (2) and through which the carrier (3) and the conveyed object pass;
A magnetic field intensity sensor (61) for detecting the intensity of a magnetic field generated when the carrier (3) passes through the electromagnetic coil (51);
And a processor (62) connected with the magnetic field intensity sensor (61) and used for determining the position information of the carrier (3) according to the magnitude of the magnetic field intensity detected by the magnetic field intensity sensor (61).
2. The electromagnetic type detection apparatus according to claim 1, wherein the electromagnetic coil (51) is formed by spirally winding a wire, and both ends of the wire are respectively connected to a dc power supply (52).
3. Electromagnetic detection device according to claim 2, characterized in that the middle part of the electromagnetic coil is provided with a conveying channel, the direction of which corresponds to the conveying direction of the conveying device for the passage of the carrier (3) and the conveyed object.
4. The electromagnetic testing device of claim 2, wherein the magnetic field strength sensor is a magnetic flux sensor.
5. Electromagnetic detection device according to claim 2, characterized in that the carrier (3) is provided with magnetically permeable material and that the carrier (3) has different magnetically permeable properties at different positions along the transport direction of the carrier (3).
6. The electromagnetic detection apparatus as set forth in claim 5, wherein the carrier (3) includes:
The length direction of the longitudinal beams is parallel to the transmission direction of the carrier, the number of the longitudinal beams is multiple, and the longitudinal beams are arranged at intervals along the direction perpendicular to the transmission direction of the carrier;
the cross beam is perpendicular to the longitudinal beams and connected among the longitudinal beams, and the magnetic conductive material is arranged in the cross beam.
7. The electromagnetic testing device of claim 6, wherein the number of cross beams is plural, the plural cross beams are arranged at intervals along the transmission direction of the carrier, and the magnetic conductive materials in the cross beams are the same.
8. The electromagnetic testing device of claim 7, wherein the magnetically permeable material in each of said beams has a different weight.
9. A coating system comprising an electromagnetic detection apparatus according to any one of claims 1 to 8.
10. A detection method using the electromagnetic detection apparatus according to any one of claims 1 to 8, comprising:
Receiving magnetic field intensity information detected by the magnetic field intensity sensor;
and determining the real-time position information of the carrier according to the relation between the pre-stored magnetic field intensity information and the position information of the carrier.
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| CN201811591621.6A CN109612377B (en) | 2018-12-25 | 2018-12-25 | Electromagnetic detection device, detection method and coating system |
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| CN201811591621.6A CN109612377B (en) | 2018-12-25 | 2018-12-25 | Electromagnetic detection device, detection method and coating system |
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| CN109612377B true CN109612377B (en) | 2024-05-24 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3522523A (en) * | 1967-06-09 | 1970-08-04 | Plessey Co Ltd | Method and apparatus for testing thin magnetic film carried on a wire substrate |
| CN103556122A (en) * | 2013-10-23 | 2014-02-05 | 苏州矩阵光电有限公司 | Self-adaptive magnetic field adjustment type magnetic-controlled sputter coating device and coating method thereof |
| CN204117126U (en) * | 2013-07-26 | 2015-01-21 | 株式会社和冠 | The coating member of electromagnetic sensor and electromagnetic sensor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011075176A1 (en) * | 2011-05-03 | 2012-11-08 | Robert Bosch Gmbh | Method for operating an electromagnetic transfer system and transfer system |
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2018
- 2018-12-25 CN CN201811591621.6A patent/CN109612377B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3522523A (en) * | 1967-06-09 | 1970-08-04 | Plessey Co Ltd | Method and apparatus for testing thin magnetic film carried on a wire substrate |
| CN204117126U (en) * | 2013-07-26 | 2015-01-21 | 株式会社和冠 | The coating member of electromagnetic sensor and electromagnetic sensor |
| CN103556122A (en) * | 2013-10-23 | 2014-02-05 | 苏州矩阵光电有限公司 | Self-adaptive magnetic field adjustment type magnetic-controlled sputter coating device and coating method thereof |
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