CN109599348B - Timing trigger device and wafer expanding equipment - Google Patents
Timing trigger device and wafer expanding equipment Download PDFInfo
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- CN109599348B CN109599348B CN201710919038.2A CN201710919038A CN109599348B CN 109599348 B CN109599348 B CN 109599348B CN 201710919038 A CN201710919038 A CN 201710919038A CN 109599348 B CN109599348 B CN 109599348B
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- 239000013078 crystal Substances 0.000 claims abstract description 22
- 238000010438 heat treatment Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/22—Modifications for ensuring a predetermined initial state when the supply voltage has been applied
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/28—Modifications for introducing a time delay before switching
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Abstract
The disclosure relates to a timing trigger device and a wafer expanding device. The timing trigger device comprises a main control module, a timing control circuit and a function control circuit. The timing control circuit comprises a timing module and a first switch connected with the main control module, and the first switch is closed when receiving a first signal sent by the main control module, so that the timing module starts timing. The function control circuit comprises a second switch connected with the main control module, and the main control module sends a second signal to the second switch after the timing module completes timing so as to close the second switch to conduct the function control circuit. The crystal expansion equipment comprises an equipment switch, a heating module and the timing trigger device, and the timing module and the heating module are controlled to be synchronously started through the equipment switch, so that the preheating timing accuracy and the crystal expansion equipment operation convenience are improved.
Description
Technical Field
The disclosure relates to the technical field of semiconductors, in particular to a timing trigger device and a crystal expansion device.
Background
After the semiconductor chips such as the LED and the like are scribed, the process steps of chip side surface corrosion, testing, sorting and the like are required. Therefore, after the chips are diced, the blue film is stretched by a wafer spreader to increase the separation distance between the chips. In order to arrange the chips in order after the crystal expansion, the blue film needs to be preheated before the crystal expansion machine stretches the blue film. The preheating time can be accurately mastered to obtain the uniformly stretched blue film, so that the crystal expansion effect is ensured.
Disclosure of Invention
In order to overcome the problems in the related art, the disclosure provides a timing trigger device and a wafer expanding device.
According to a first aspect of the present disclosure, a timing trigger device is provided, including: the timing control circuit comprises a main control module, a timing control circuit and a function control circuit; the timing control circuit comprises a timing module and a first switch connected with the main control module, the first switch is closed when receiving a first signal sent by the main control module, so that the timing control circuit is conducted, and the timing module starts timing; the function control circuit comprises a second switch connected with the main control module, and the main control module sends a second signal to the second switch after the timing module completes timing so as to close the second switch to conduct the function control circuit.
Further, the first switch can be automatically turned off after a first preset time after the timing is finished, so that the timing module is reset.
Further, the second switch may be automatically turned off after a second preset time to cut off the function control line.
Further, the timing trigger device comprises a time relay.
Further, the timing control circuit further comprises a time setting module for setting the timing time.
According to a second aspect of the present disclosure, a wafer expanding apparatus is provided, which includes an apparatus switch, a heating module, and the timing trigger device; the equipment switch is connected with the main control module and is closed so that the main control module sends the first signal; the heating module is communicated with the timing control circuit to synchronously control the timing module and the heating module.
Further, the timing trigger device comprises an operation panel, wherein a first accommodating portion and a second accommodating portion are arranged on the operation panel, the timing trigger device is accommodated in the first accommodating portion, and the equipment switch is accommodated in the second accommodating portion.
The timing control circuit is connected with the timing control circuit, and the function control circuit is connected with the timing control circuit and the function control circuit.
Further, the equipment control circuit comprises at least one of a temperature control module, an altitude control module, an emergency processing module and a time control module.
Further, the wafer expanding device further comprises a wafer expanding platform, wherein the wafer expanding platform is connected with the function control circuit to be controlled to start or stop the wafer expanding operation.
The technical scheme provided by the embodiment of the disclosure can have the following beneficial effects:
according to the timing trigger device, the main control module, the timing control circuit and the function control circuit are arranged, so that the main control module controls the function control circuit to be communicated after timing is completed, and the communication time of the function control circuit is accurately controlled. The crystal expansion equipment comprises an equipment switch, a heating module and the timing trigger device, and the timing module and the heating module are controlled to be synchronously started through the equipment switch, so that the preheating timing accuracy and the crystal expansion equipment operation convenience are improved.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and together with the description, serve to explain the principles of the disclosure.
FIG. 1 is a schematic structural diagram of a wafer expanding apparatus in an exemplary embodiment of the present disclosure;
FIG. 2 is a schematic circuit diagram of a timing trigger device in an exemplary embodiment of the present disclosure;
fig. 3 is a schematic circuit diagram of a wafer expanding apparatus in an exemplary embodiment of the disclosure.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The implementations described in the exemplary embodiments below are not intended to represent all implementations consistent with the present disclosure. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present disclosure, as detailed in the appended claims.
In order to facilitate the process steps of the semiconductor chips after dicing, the chips are required to be stretched by a wafer stretcher after dicing to increase the separation distance between the chips. The preheating of the blue film for a predetermined time can make the chips aligned after the crystal expansion, so a timing mode for the preheating of the blue film is proposed in the related art: the blue film is placed on the platform of the wafer expanding machine, and a timer independent of the wafer expanding machine is prepared. And manually pressing a timer switch and a preheating operation key simultaneously to preheat, after the timing is finished, the timer gives an alarm to remind an operator, and the operator presses an operation button of the crystal expanding machine to enable the equipment to execute the crystal expanding process. The operation process mainly depends on manual timing for preheating, so that on one hand, if an operator forgets to time, the preheating time is uncertain, and the blue film stretching effect is further influenced; on the other hand, an operator needs to turn on an operation button of the crystal expanding machine while turning off the alarm of the timer so that the equipment executes the crystal expanding process, and manual operation not only hardly ensures the synchronism and the accuracy of operation, but also increases the complexity of operation. Both of the above aspects cause abnormal inter-wafer spacing or alignment, and affect the operation efficiency.
In order to solve some or all of the above technical problems, the present disclosure improves the structure of the wafer expanding apparatus, and the following is described:
fig. 1 is a schematic structural diagram of a wafer expanding apparatus in an exemplary embodiment of the present disclosure, and fig. 2 is a schematic circuit diagram of a timing trigger device in an exemplary embodiment of the present disclosure. As shown in FIG. 1, the wafer expanding equipment 1 comprises an equipment switch 11, a timing trigger device 12 and a heating module 13. As shown in fig. 2, the timing trigger device 12 includes a main control module 123, a timing control line 121, and a function control line 122. The timing control line 121 includes a timing module 1212 and a first switch 1211 connected to the main control module 123, where the first switch 1211 is closed when receiving a first signal sent by the main control module 123, so that the timing control line 121 is turned on, and the timing module 1212 starts timing. The function control circuit 122 includes a second switch 1221 connected to the main control module 123, and the main control module 123 sends a second signal to the second switch 1221 after the timing module 1212 completes timing, so that the second switch 1221 is closed to turn on the function control circuit 122. The device switch 11 is connected to the main control module 123, and the device switch 11 is closed to enable the main control module 123 to send the first signal. The heating module 13 communicates with the timing control line 121 to synchronously control the timing module 1212 and the heating module 13.
The wafer expanding device 1 provided by the present disclosure includes a timing trigger 12, and controls the main control module 123 to send a first signal through the device switch 11, and the first switch 1211 is closed after receiving the first signal, so that the timing module 1212 in the timing control circuit 121 starts timing. Meanwhile, the heating module 13 is communicated with the timing control circuit 121, so that the timing module 1212 and the heating module 13 can be synchronously controlled. The preheating operation of the crystal expanding equipment 1 and the preheating timing aiming at the preheating operation are synchronously controlled through the equipment switch 11, so that the accuracy of the preheating timing of the crystal expanding equipment 1 is improved, and a good crystal expanding effect is further ensured. In addition, only one step of operation is needed when the equipment switch 11 is pressed, so that the operation convenience of the crystal expanding equipment 1 is improved.
In the above embodiment, the wafer expanding apparatus 1 may further include an operation panel 14 and a wafer expanding platform 15. The operation panel 14 is provided with a first accommodating portion 141 and a second accommodating portion 142, the timing trigger device 12 is accommodated in the first accommodating portion 141, and the device switch 11 is accommodated in the second accommodating portion 142. The device switch 11 and the timing trigger device 12 are assembled on the operation panel 14 of the wafer expanding device 1, and the timing time can be set and the timing trigger device 12 can be started through one operation panel 14, so that the operation is convenient, and the working efficiency is improved. The crystal expansion platform 15 is connected with the function control circuit 122 to start or stop the crystal expansion operation under control.
In the embodiment shown in fig. 3, the wafer expanding apparatus 1 may include an apparatus control line 16, and the apparatus control line 16 is respectively communicated with the timing control line 121 and the function control line 122, so that the apparatus control line 16 is conducted when the timing control line 121 or the function control line 122 is conducted. Therefore, other function controls of the wafer expanding equipment 1 are considered under two working states of preheating timing operation or wafer expanding operation, and the overall performance of the wafer expanding equipment 1 is improved. It should be noted that the device control circuit 16 may include at least one of a temperature control module, an altitude control module, an emergency processing module, and a time control module, and may also include other functional modules, which is not limited by the present disclosure.
In the above embodiment, the timing trigger 12 may be a time relay. The time relay is used as an executive device in simple program control, starts timing after receiving a starting signal, and performs opening or closing action on a working contact after timing is finished, so that subsequent circuits are pushed to work. Generally, the timing time and the delay performance of the time relay can be adjusted within the design range, so that the delay time of the time relay can be conveniently adjusted. Therefore, the timing control circuit 121 may further include a time setting module 1213 to set the timing time. The first switch 1211 may be automatically turned off after a first preset time elapses after the timing is completed, so as to reset the timing module 1212. The second switch 1221 may be automatically turned off after a second preset time to cut off the function control line 122. The first switch 1211 and the second switch 1221 may be automatically turned off after a predetermined time elapses after the timing is completed, so as to facilitate the next timing operation. Therefore, the timing trigger device 12 can realize automatic reset of the line switch and the timing module 1212, so as to avoid manual reset operation of the timing trigger device 12 before next operation by an operator, thereby integrally improving the automation performance of the crystal expansion device 1 and improving the operation efficiency of the crystal expansion device 1. The first preset time or the second preset time may be 2 seconds, and the user may set the first preset time or the second preset time according to a requirement, which is not limited by the present disclosure.
Other embodiments of the disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This disclosure is intended to cover any variations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.
It will be understood that the present disclosure is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.
Claims (9)
1. A timing trigger device, comprising: the timing control circuit comprises a main control module, a timing control circuit and a function control circuit; the timing control circuit comprises a timing module and a first switch connected with the main control module, the first switch is closed when receiving a first signal sent by the main control module, so that the timing control circuit is conducted, and the timing module starts timing; the function control circuit comprises a second switch connected with the main control module, and the main control module sends a second signal to the second switch after the timing module completes timing so as to close the second switch to conduct the function control circuit;
the second switch may be automatically turned off after a second preset time to cut off the function control line.
2. The timing trigger device of claim 1, wherein the first switch is automatically opened after a first preset time period has elapsed after the timing is completed to reset the timing module.
3. The timing trigger device of claim 1, wherein said timing trigger device comprises a time relay.
4. The timing trigger device of claim 1, wherein the timing control circuit further comprises a time setting module to set a timing time.
5. A crystal expansion equipment is characterized by comprising an equipment switch, a heating module and a timing trigger device as claimed in any one of claims 1 to 4; the equipment switch is connected with the main control module and is closed so that the main control module sends the first signal; the heating module is communicated with the timing control circuit to synchronously control the timing module and the heating module.
6. The wafer expanding equipment according to claim 5, further comprising an operation panel, wherein the operation panel is provided with a first accommodating portion and a second accommodating portion, the timing trigger device is accommodated in the first accommodating portion, and the equipment switch is accommodated in the second accommodating portion.
7. The wafer expanding equipment according to claim 5, further comprising equipment control lines, wherein the equipment control lines are respectively communicated with the timing control lines and the function control lines so as to be conducted when the timing control lines or the function control lines are conducted.
8. The wafer expanding apparatus according to claim 7, wherein the apparatus control circuit comprises at least one of a temperature control module, a height control module, an emergency treatment module and a time control module.
9. The wafer expanding equipment as claimed in claim 5, further comprising a wafer expanding platform, wherein the wafer expanding platform is connected with the function control circuit to control starting or stopping of the wafer expanding operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710919038.2A CN109599348B (en) | 2017-09-30 | 2017-09-30 | Timing trigger device and wafer expanding equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710919038.2A CN109599348B (en) | 2017-09-30 | 2017-09-30 | Timing trigger device and wafer expanding equipment |
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| Publication Number | Publication Date |
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| CN109599348A CN109599348A (en) | 2019-04-09 |
| CN109599348B true CN109599348B (en) | 2020-12-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710919038.2A Active CN109599348B (en) | 2017-09-30 | 2017-09-30 | Timing trigger device and wafer expanding equipment |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6054892A (en) * | 1997-07-10 | 2000-04-25 | Telefonaktiebolaget Lm Ericsson (Publ) | Timing circuit |
| CN106971967A (en) * | 2017-04-25 | 2017-07-21 | 中山英达思迅智能科技有限公司 | Brilliant machine and its technological process are expanded in a kind of intelligent management and control |
| CN107147198A (en) * | 2017-05-27 | 2017-09-08 | 山东电洞网络科技有限公司 | New-type charge system and charging method |
| CN206524310U (en) * | 2017-03-07 | 2017-09-26 | 广东技标实业有限公司 | One kind has efficient expansion film machine |
-
2017
- 2017-09-30 CN CN201710919038.2A patent/CN109599348B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6054892A (en) * | 1997-07-10 | 2000-04-25 | Telefonaktiebolaget Lm Ericsson (Publ) | Timing circuit |
| CN206524310U (en) * | 2017-03-07 | 2017-09-26 | 广东技标实业有限公司 | One kind has efficient expansion film machine |
| CN106971967A (en) * | 2017-04-25 | 2017-07-21 | 中山英达思迅智能科技有限公司 | Brilliant machine and its technological process are expanded in a kind of intelligent management and control |
| CN107147198A (en) * | 2017-05-27 | 2017-09-08 | 山东电洞网络科技有限公司 | New-type charge system and charging method |
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| CN109599348A (en) | 2019-04-09 |
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