CN1095983C - 测量薄膜厚度的球面方法 - Google Patents
测量薄膜厚度的球面方法 Download PDFInfo
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Abstract
提出了一种更准确、简便、效率更高的测量薄膜厚度的方法,它是基于添加适当研磨剂将沉积薄膜的球滑动摩擦磨掉一球冠,测量新生平面与薄膜外表面及基体表面形成的截圆的尺寸,再由球的已知尺寸计算薄膜厚度。
Description
本发明涉及薄膜技术领域,属于表面工程技术领域的前沿性技术,拟获得的薄膜厚度一般在0.5~5um范围。薄膜厚度既是薄膜的一重要使用性能,亦是薄膜成膜过程控制的一重要参数,其测定具有重要的理论和实际意义。
已有的测定薄膜厚度方法有多种,各有其优缺点。诸如截面金相法,表面轮廓法、Calotest法等等。其中截面金相法虽应用最普遍,但由于PVD膜一般与基体金相组织的硬度差较大,又处于试样的外缘,研磨、抛光要求较苛刻,制样的成功率较低,费工费时,很不方便。同时也受到金相显微镜测微尺的最小测量单位的限制而致测量精度很低。表面轮廓法的测量精度虽较高,但其试样制作尚存在技术问题,同时拟用的表面轮廓仪价格昂贵难以较广应用。Calotest法虽已在测定薄膜厚度中得到大量应用,但需采用专用仪器,其所采用的专用钢球在试验研磨作用下易磨损,会影响结果的准确性。
本发明旨在于提供一种测定薄膜厚度的改进方法,它能更准确、简便、效率更高地测定薄膜厚度。
本发明的目的是这样达到的,在已知尺寸的球,例如滚动轴承的已知尺寸的钢球上沉积(例如电镀、PVD、PCVD)薄膜(可与工件经历同样的工艺过程)。然后装入滑动摩擦试验机与硬质光滑平面对摩件进行滑动摩擦,使钢球上磨去一个球冠。为了磨出的边界清晰,摩擦均匀,磨削效率高,在滑动摩擦过程中要加研磨剂,例如金刚粉膏,牙膏,可用显微镜测量新生平面与薄膜外表面以及基体表面形成的截圆尺寸,再由钢球已知尺寸计算薄膜的厚度。本发明的测量和计算原理如附图1A和图1B。
按附图1B所示R1 2=(a+b)2+(R2-a2)=b2+2ab+R2 式中:a:磨痕半径(可用低倍显微镜测定)
b:覆层截面的宽度(可用高倍显微镜测定)
R1:覆层后球的半径(无法直接准确测定)
R:覆层前球的半径(标准尺寸,可准确测定)
R1-R:覆层前后球的半径差即覆层厚度(无法直接准确测定)
在测出a、b和R后即可计算出覆层的实际厚度R1-R。
本发明的方法具有如下特点
一、与Calotest法一样,本发明都是让薄膜的厚度投影于尺寸已知的球面上进行测量和计算,由投影的放大作用减少了测量误差,提高了测量精度。
二、与Calotest法不同的是本方法的被测量点处于同一平面(附图2),而Calotest法则是在一凹球坑内(附图3),Calotest法测量的R1和R两圆环不在同一平面内,薄膜的厚度是两平面间距离,以致若显微镜的物镜景深不够,则会出现测量误差。本发明方法却不存在这种误差。
三、本发明方法采用球,例如标准滚珠轴承钢球,其表面质量(波纹度、粗糙度)、几何尺寸,椭圆度等等都可有严格的误差范围,而且球不能重复使用,进一步保证了几何尺寸的精确,从而能保证基准尺寸可靠,使测量结果准确。
四、本方法采用机械自动磨平,减少了手工制作金相试样测量厚度的麻烦和人为干扰,而基本上可一次成功,大大减少了劳动强度,提高了工作效率。
五、本方法无需专门设备,简单易行,尤其适用于PVD,PACVD等薄膜。
本发明附图说明如下:
附图1A 本发明球面法薄膜厚度测定原理示意图。
附图1B 本发明计算原理示意图。
附图2 本发明测量平面示意图。
附图3 与本发明对比的Calotest法测量平面示意图。
如附图1所示,a-磨痕半径(可用低倍显微镜测定)b-覆层截面的宽度,R-覆层前球的半径(标准尺寸,可准确测定),R1-覆层后球的半径(无法直接准确测定),R1-R-覆层前后球的半径差,即覆层厚度(无法直接准确测定),在测出a、b和R后即与计算覆层的实际厚度R1-R。
如图2所示本方法的被测量点处于同一平面,如图3所示Calotest法的被测量点处于一球坑内,R1和R两园球不在同一平面内,薄膜的实际厚度是两平面间的距离。
Claims (3)
1、一种测量薄膜厚度的方法,其特征在于利用滑动摩擦试验装置将沉积有薄膜的已知尺寸球磨去一球冠,测量所得新生平面与薄膜外表面及基体表面形成的截圆尺寸,再由球的已知尺寸计算薄膜厚度。
2、根据权利要求1所述的一种测量薄膜厚度的方法,其特征在于已知尺寸的球为滚珠轴承钢球。
3、根据权利要求1或2所述的一种测量薄膜厚度的方法,其特征在于滑动摩擦过程中要添加研磨剂。
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CN102095345A (zh) * | 2010-11-19 | 2011-06-15 | 深圳金迈克精密科技有限公司 | 一种球痕式镀层测厚仪 |
CN103075986B (zh) * | 2013-01-11 | 2015-04-29 | 清华大学 | 一种用于测量薄膜厚度的方法 |
CN105157651B (zh) * | 2015-08-25 | 2017-10-24 | 北京经纬恒润科技有限公司 | 一种敷型涂覆膜厚度的测量方法、装置及系统 |
CN105784522B (zh) * | 2016-05-18 | 2018-07-27 | 中航工业哈尔滨轴承有限公司 | 一种用于检测轴承磨削变质层的方法 |
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