CN109597161A - A kind of apodization type bandpass and band-rejection filter of no chirp - Google Patents
A kind of apodization type bandpass and band-rejection filter of no chirp Download PDFInfo
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- CN109597161A CN109597161A CN201910085156.7A CN201910085156A CN109597161A CN 109597161 A CN109597161 A CN 109597161A CN 201910085156 A CN201910085156 A CN 201910085156A CN 109597161 A CN109597161 A CN 109597161A
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- waveguide
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- apodization
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- tapered
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
- G02B6/29323—Coupling to or out of the diffractive element through the lateral surface of the light guide
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention discloses a kind of apodization type bandpass and band-rejection filters of no chirp, the filter is made of road waveguide under singlemode input waveguide, input tapered waveguide, multimode waveguide, Gauss apodization type Bragg waveguide grating, output tapered waveguide, single-mode output waveguide, lower road tapered waveguide and single mode, wherein the coupled zone between input tapered waveguide and lower road tapered waveguide is the coupled zone Xia Lu.Apodization type bandpass and band-rejection filter provided by the present invention is that have the Bragg waveguide grating of Gaussian coupling by the building of phase-modulation mechanism, but do not introduce chirp simultaneously, solves the problems, such as that there is chirps to lead to spectrum widening for traditional apodization type grating.The present invention also achieves the band logical belt-resistance function of optical filter simultaneously, have many advantages, such as that performance is good, structure is simple, compact dimensions and tolerance are big, manufacture craft has CMOS technology compatibility, is easily integrated and extends, facilitate low cost manufacturing, can be applied to the optical interconnection system of on piece High Density Integration.
Description
Technical field
The present invention relates to light to filter integrated device, more particularly to a kind of apodization type bandpass and band-rejection filter of no chirp.
Background technique
With the rapid development of integrated circuit, transistor feature size constantly reduces, and high speed information is when being electrically interconnected transmitting
A series of bottlenecks of speed, bandwidth and power consumption etc. are inevitably met with.Based on the optical on-chip optical interconnection technology of silicon
A kind of feasible scheme is provided for the solution of this problem, the exchange of information will directly carry out in the transport layer of light.
A basic function device of the optical filter as light network technology, unlike signal can be filtered neatly, be close
Collect a very important link in wavelength division multiplexed optical network.Bragg waveguide grating is a kind of widely used filter, but
There are secondary lobes to generate serious crosstalk to adjacency channel for conventional grating resonance wavelength two sides.Traditional method is pressed down with apodization
This phenomenon is made, this usually there are certain requirements the amplitude of grating, duty ratio or grating tooth and the spacing of waveguide, but they are originally
All there is chirp phenomenons in matter, thus inevitably result in the broadening of filtering spectral line, this, which certainly will be also resulted in, to be applied
In dense multichannel.
Therefore, develop no chirp, structure simple, compact dimensions, be easily integrated and make with passband light blocking filter
It is the important and significant work of Future Development on piece integrated optical communication technology.
Summary of the invention
A kind of the purpose of the present invention is to provide structures simple, compact dimensions, the multiple functional, nothing that is easily integrated and makes
The apodization type bandpass and band-rejection filter of chirp.In order to achieve the above objectives, solution of the invention is:
A kind of apodization type bandpass and band-rejection filter of no chirp, it is characterised in that: including singlemode input waveguide, input gradual change
Waveguide, multimode waveguide, Gauss apodization type Bragg waveguide grating, output tapered waveguide, single-mode output waveguide, lower road tapered waveguide
With road waveguide under single mode；Wherein, the coupled zone inputted between tapered waveguide and lower road tapered waveguide is the coupled zone Xia Lu, and single mode is defeated
Enter waveguide to connect by one end of input tapered waveguide and multimode waveguide, single-mode output waveguide passes through output tapered waveguide and multimode
The other end of waveguide connects, and the Gaussian apodization Bragg waveguide grating is located on multimode waveguide and is distributed in antisymmetry.
Preferably, the singlemode input waveguide, input tapered waveguide, multimode waveguide, Gauss apodization type Bragg waveguide
Grating, output tapered waveguide, single-mode output waveguide, lower road tapered waveguide and lower road single mode waveguide are slab waveguide.
Preferably, the duct width transition region of the input tapered waveguide and lower road tapered waveguide occurs the one of waveguide
Side, the waveguide other side remain unchanged.
Preferably, the coupled zone Xia Lu being made of input tapered waveguide and lower road tapered waveguide, wherein two waveguides
Non- gradual change side is opposite and keeps two waveguide separations constant.
Preferably, the grating tooth depth of the Gauss apodization type Bragg waveguide grating remains unchanged, two sides grating tooth
Phase difference be in Gaussian shaped profile.
Preferably, the period of the Gauss apodization type Bragg waveguide grating meets TE basic mode and TE in multimode waveguide
The period of the phase-matching condition that First-Order Mode mutually couples, grating remains unchanged.
Preferably, the periodic unit shape of the composition Gauss apodization type Bragg waveguide grating is rectangle.
The principle of the present invention are as follows: filter provided by the present invention is using Gauss apodization type Bragg waveguide grating and keeps
Grating tooth depth is constant, not only eliminates direct current refractive index modulation in this way, also can avoid spectral line side and there is similar FP effect
Resonance；The phase difference for modulating waveguide two sides grating changes in Gaussian, so that the grating coefficient of coup is in that similar Gaussian changes,
To inhibit the secondary lobe of grating；It is kept for the period of waveguide optical grating remain unchanged, avoids grating from chirp occur, to will not broaden
The spectral line of grating.When filter work, TE light is inputted from singlemode input waveguide, and input tapered waveguide is converted into multimode wave
The basic mode led, then pass through Gauss apodization type Bragg waveguide grating when, the light for meeting the wavelength of phase matched, which is reversed, to be coupled as
The road the Guang Jiangxia coupled zone of mould of multimode waveguide, the reverse transfer is coupled to road waveguide under single mode, defeated from output end
Out；And the transmitted light for being unsatisfactory for phase-matching condition wavelength then passes through output tapered waveguide and exports from single-mode output waveguide.
The beneficial effects of the present invention are:
1, the apodization type bandpass and band-rejection filter of no chirp provided by the present invention combines Gauss apodization type Bradley lattice wave
Guide grating realizes filter band logical and belt-resistance function, has the characteristics that no chirp, high side mode suppression ratio, Insertion Loss is small and tolerance is big.
2, the apodization type bandpass and band-rejection filter of no chirp provided by the present invention is simple with design structure and size is tight
The advantages of gathering.
3, the apodization type bandpass and band-rejection filter manufacture craft of no chirp provided by the present invention is compatible with CMOS technology
Property, so that device is easily integrated and extends, facilitate low cost manufacturing, the light network that can be widely applied on piece High Density Integration is logical
Letter system.
Detailed description of the invention
Fig. 1 is the structure chart of the apodization type bandpass and band-rejection filter of no chirp provided by the present invention；
Fig. 2 is the sectional view of slab waveguide in the apodization type bandpass and band-rejection filter of no chirp provided by the present invention；
Fig. 3 is Gauss apodization type Bragg waveguide in the apodization type bandpass and band-rejection filter of no chirp provided by the present invention
The raster unit figure of grating；
Fig. 4 is Gauss apodization type Bragg waveguide in the apodization type bandpass and band-rejection filter of no chirp provided by the present invention
Grating and the spectrum comparison diagram for having chirp apodization grating.
It is identified in figure: 1, singlemode input waveguide, 2, input tapered waveguide, 3, lower road tapered waveguide, 4, road waveguide under single mode,
5, the coupled zone Xia Lu, 6, multimode waveguide, 7, Gauss apodization type Bragg waveguide grating, 8, output tapered waveguide, 9, single-mode output
Waveguide.
Specific embodiment
As shown in Figure 1, the present invention provides a kind of apodization type bandpass and band-rejection filter of no chirp, including single mode incoming wave
Lead road waveguide (4), the coupled zone Xia Lu (5), multimode waveguide under (1), input tapered waveguide (2), lower road tapered waveguide (3), single mode
(6), Gauss apodization type Bragg waveguide grating (7), output tapered waveguide (8) and single-mode output waveguide (9), wherein single mode inputs
Waveguide (1) is connect with one end of input tapered waveguide (2), and the other end of input tapered waveguide (2) is connect with multimode waveguide (6),
One end of output tapered waveguide (8) is connect with multimode waveguide (6), and the other end is connect with single-mode output waveguide (9), the coupled zone Xia Lu
(5) it is made of input tapered waveguide (2) He Xialu tapered waveguide (3), road single mode waveguide (4) and lower road tapered waveguide under single mode
(3) it connects, Gauss apodization type Bragg waveguide grating (4) is located on multimode waveguide (6), is distributed in antisymmetry；TE light is from single mode
Input waveguide (1) input, input tapered waveguide (2) are converted into the TE basic mode of multimode waveguide, Gauss apodization type Bradley lattice wave
Guide grating (7) is the TE First-Order Mode that the incident light reverse coupled for meeting phase-matching condition wavelength is in multimode waveguide (6), reflection
Light is exported by being converted into the TE mould of road waveguide (4) under single mode when the coupled zone Xia Lu (5)；And it is unsatisfactory for phase-matching condition wave
Long transmitted light is exported by output mode converter (5) from single-mode output waveguide (9), and the present invention realizes light filtering simultaneously
Band logical and belt-resistance function, have the characteristics that no chirp, high side mode suppression ratio, Insertion Loss is small and tolerance is big, manufacture craft has
CMOS technology compatibility, is easily integrated and extends, facilitate low cost manufacturing, can be applied to the light network system of on piece High Density Integration
System.
The input tapered waveguide (2) is made of the slab waveguide of gradual change, and function is by the TE of singlemode input waveguide (1)
Mould is converted to the TE basic mode of multimode waveguide (6)；It inputs tapered waveguide (2) He Xialu tapered waveguide (3) and forms the coupled zone Xia Lu
(5)；
The periodic refractive index perturbation area of the Gauss apodization type Bragg waveguide grating (7) is symmetrically arranged at multimode waveguide
(6) on two sides, two sides grating is distributed in antisymmetry, and phase difference is in Gaussian shaped profile；When incident light in multimode waveguide (6)
When wavelength meets the TE basic mode of phase-matching condition by Gauss apodization type Bragg waveguide grating (7), it can be reversed and be coupled as
The TE First-Order Mode of multimode waveguide (6), the TE First-Order Mode reflected light is by being converted into road waveguide under single mode when the coupled zone Xia Lu (5)
(4) TE mould output；And when the TE basic mode that multimode waveguide (6) medium wavelength is unsatisfactory for phase-matching condition passes through Gauss apodization type cloth
When glug waveguide optical grating (7), which continues onwards transmission, when by output tapered waveguide (8), is converted into single-mode output
The TE mould of waveguide (9) exports.
As shown in figures 1 and 3, the Gauss apodization type Bragg waveguide grating (7) is by etching one in waveguide
Tie up what rectangular Periodic unit was formed, the TE basic mode that the period meets multimode waveguide (6) is coupled back to the phase of TE First-Order Mode
With condition.
To meet the requirement that multimode waveguide (6) TE mould is coupled back to TE First-Order Mode, need to design Bragg waveguide grating
Period can be obtained by following formula:
Λ is screen periods in formula,For the propagation constant of multimode waveguide TE basic mode,For multimode waveguide TE First-Order Mode
Propagation constant.
As shown in figure (3): being in similar Gaussian point to meet the coefficient of coup of Gauss apodization type Bragg waveguide grating (7)
The phase difference of cloth, two sides grating tooth is modulated in Gaussian, in order to eliminate the chirp of Gauss apodization type Bragg waveguide grating (7),
The period of two sides grating remains unchanged.The reflectance spectrum of figure (4) grating corresponding when illustrating there are chirp and eliminating chirp, by
This visible Gauss apodization type Bragg waveguide grating of the invention inhibits the broadening of spectrum well.
In addition, in a kind of apodization type bandpass and band-rejection filter of no chirp of as shown in Figure 1 provided by the present invention, single mode
Waveguide, tapered waveguide, multimode waveguide and Gauss apodization type Bragg waveguide grating etc. constitute device all constituents all positions
In in same plane.All single mode waveguides in Fig. 1, tapered waveguide, multimode waveguide and Gauss apodization type Bragg waveguide grating,
All use slab waveguide as shown in Figure 2.
Embodiment:
As shown in Figure 1, Figure 2 and Figure 3, use top layer silicon thickness for silicon (SOI) on 220nm, 2 μm of buried silicon oxide layer of insulating layer
Material carries out deep-UV lithography or e-beam direct write lithography obtains silicon etching exposure mask, pass through silicon after completing crystal column surface cleaning
Dry etching produces the slab waveguide that height is 220nm, and wherein single mode waveguide width is 450nm, and the width of multimode waveguide is
800nm, the Bragg waveguide grating of the two sides etching antisymmetry structure of multimode waveguide, rectangular raster tooth is 100nm, period
For 320nm, the length of Bragg waveguide grating is 500 μm.
Screen periods parameter in above-described embodiment is the multimode bar shaped for operation wavelength for 1550nm and 800nm width
Waveguide design, device is also suitble to the multimode slab waveguide of other operation wavelengths and width, and it is thick to be also applied for different top layer silicons
The slab waveguide of degree need to only change the size of the graded guide screen periods parameter different with design, and light filtering can be realized
Device function.Entire device, which only needs once to etch, can be completed production.
Above-mentioned specific embodiment is used to illustrate the present invention, rather than limits the invention, of the invention
In spirit and scope of protection of the claims, to any modifications and changes that the present invention makes, protection model of the invention is both fallen within
It encloses.
Claims (7)
1. a kind of apodization type bandpass and band-rejection filter of no chirp, it is characterised in that: gradually including singlemode input waveguide (1), input
Become waveguide (2), multimode waveguide (6), Gauss apodization type Bragg waveguide grating (7), output tapered waveguide (8), single-mode output wave
Lead road waveguide (4) under (9), lower road tapered waveguide (3) and single mode；Wherein, it inputs between tapered waveguide and lower road tapered waveguide
Coupled zone is the coupled zone Xia Lu (5), and singlemode input waveguide is connected by one end of input tapered waveguide and multimode waveguide, and single mode is defeated
Waveguide is connected by the other end of output tapered waveguide and multimode waveguide out, the Gaussian apodization Bragg waveguide grating position
It is distributed on multimode waveguide and in antisymmetry.
2. a kind of apodization type bandpass and band-rejection filter of no chirp according to claim 1, it is characterised in that: the list
Mould input waveguide, input tapered waveguide, multimode waveguide, Gauss apodization type Bragg waveguide grating, output tapered waveguide, single mode are defeated
Waveguide, lower road tapered waveguide and lower road single mode waveguide are slab waveguide out.
3. a kind of apodization type bandpass and band-rejection filter of no chirp according to claim 1, it is characterised in that: described is defeated
The duct width transition region for entering tapered waveguide and lower road tapered waveguide occurs in the side of waveguide, and the waveguide other side remains unchanged.
4. a kind of apodization type bandpass and band-rejection filter of no chirp according to claim 1, it is characterised in that: described by defeated
Enter the coupled zone Xia Lu of tapered waveguide and lower road tapered waveguide composition, wherein the non-gradual change side of two waveguides is opposite and keeps two waves
It is constant to lead interval.
5. a kind of apodization type bandpass and band-rejection filter of no chirp according to claim 1, it is characterised in that: the height
The grating tooth depth of this apodization type Bragg waveguide grating remains unchanged, and the phase difference of two sides grating tooth is in Gaussian shaped profile.
6. a kind of apodization type bandpass and band-rejection filter of no chirp according to claim 1, it is characterised in that: the height
The phase that the period of this apodization type Bragg waveguide grating meets TE basic mode in multimode waveguide and TE First-Order Mode mutually couples
Position matching condition, the period of grating remain unchanged.
7. a kind of apodization type bandpass and band-rejection filter of no chirp according to claim 1, it is characterised in that: the structure
Periodic unit shape at Gauss apodization type Bragg waveguide grating is rectangle.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112379485A (en) * | 2020-11-16 | 2021-02-19 | 西湖大学 | Integrated optical filter structure with ultra-large free spectral range |
| CN113075766A (en) * | 2021-04-06 | 2021-07-06 | 浙江大学 | Polarization insensitive waveguide grating filter based on double-layer structure |
| CN117075265A (en) * | 2023-10-12 | 2023-11-17 | 之江实验室 | Silicon light chirp apodization grating based on sub-wavelength grating structure |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112379485A (en) * | 2020-11-16 | 2021-02-19 | 西湖大学 | Integrated optical filter structure with ultra-large free spectral range |
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| CN113075766A (en) * | 2021-04-06 | 2021-07-06 | 浙江大学 | Polarization insensitive waveguide grating filter based on double-layer structure |
| CN113075766B (en) * | 2021-04-06 | 2022-01-11 | 浙江大学 | Polarization insensitive waveguide grating filter based on double-layer structure |
| CN117075265A (en) * | 2023-10-12 | 2023-11-17 | 之江实验室 | Silicon light chirp apodization grating based on sub-wavelength grating structure |
| CN117075265B (en) * | 2023-10-12 | 2024-03-15 | 之江实验室 | Silicon light chirp apodization grating based on sub-wavelength grating structure |
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Application publication date: 20190409 |