CN109594048B - Metal sputtering machine - Google Patents

Metal sputtering machine Download PDF

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Publication number
CN109594048B
CN109594048B CN201910089111.7A CN201910089111A CN109594048B CN 109594048 B CN109594048 B CN 109594048B CN 201910089111 A CN201910089111 A CN 201910089111A CN 109594048 B CN109594048 B CN 109594048B
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China
Prior art keywords
tray
sputtering machine
transport trolley
substrate
controller
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Active
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CN201910089111.7A
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Chinese (zh)
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CN109594048A (en
Inventor
沈能辉
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Priority to CN201910089111.7A priority Critical patent/CN109594048B/en
Publication of CN109594048A publication Critical patent/CN109594048A/en
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Abstract

The invention provides a metal sputtering machine, comprising: the sputtering machine is used for sputtering metal on the substrate; the tray is placed on the sputtering machine table and used for bearing the substrate; a tray storage bin for storing trays; a transport trolley for transporting the pallet; the sealing door is used for sealing the sputtering machine platform; the control device is used for controlling the opening and closing of the sealing door and the operation of the transportation trolley; realize the full automatization of tray and closed door through setting up controlling means and change, reduced manual change tray and switch closed door required time, lifting means comprehensive efficiency to promote the production productivity, also reduce the potential safety hazard that personnel's manual operation brought simultaneously, reduce personnel and get into the impurity of bringing, promote the product yield.

Description

Metal sputtering machine
Technical Field
The invention relates to the field of film coating, in particular to a metal sputtering machine.
Background
In the metal sputtering machine, the substrate is placed on the tray for metal sputtering, and the substrates with different specifications correspond to the trays with different standards, so that the tray is often required to be replaced in the working process of the metal sputtering machine. The existing tray replacement mode is manual and low in efficiency.
Namely, the existing metal sputtering machine has defects and needs to be improved.
Disclosure of Invention
The invention provides a metal sputtering machine, which solves the technical problem that the prior metal sputtering machine can not realize the full-automatic transmission and exchange of a tray between a tray storage bin and a sputtering machine table.
In order to solve the above problems, the technical scheme provided by the invention is as follows:
the invention provides a metal sputtering machine, comprising:
the sputtering machine is used for sputtering metal on the substrate;
the tray is placed on the sputtering machine table and used for bearing the substrate;
a tray storage bin for storing trays;
a transport trolley for transporting the pallet;
the sealing door is used for sealing the sputtering machine platform;
and the control device is used for controlling the opening and closing of the sealing door and the operation of the transportation trolley.
In the metal sputtering machine of the invention, the control device comprises a controller, and the controller is used for controlling the transport trolley to replace the tray when receiving a replacement command.
In the metal sputtering machine, the controller is also used for controlling the transport trolley to replace the tray according to the tray identification carried by the replacement instruction.
In the metal sputtering machine, the control device comprises a controller, and the controller is used for controlling the transport trolley to replace the tray according to the parameters of the substrate to be sputtered.
In the metal sputtering machine, the controller is used for controlling the tray storage bin to provide the corresponding tray for the transport trolley according to the parameters of the substrate to be sputtered.
In the metal sputtering machine, the controller is used for controlling the transport trolley to select the corresponding tray in the tray storage bin according to the parameters of the substrate to be sputtered.
In the metal sputtering machine, the control device comprises a sensor and a controller, and the controller is used for controlling the opening and closing of the closing door according to the distance change between the transport trolley and the closing door detected by the sensor.
In the metal sputtering machine, the control device comprises a sensor and a controller, the sensor is used for detecting the distance between the transport trolley and the closed door, and the controller is used for controlling the opening and closing of the closed door according to whether the distance is smaller than a preset value.
In the metal sputtering machine of the invention, the sensor is arranged on the transport trolley.
In the metal sputtering machine of the invention, the control device is wirelessly connected with the transport trolley.
The invention has the beneficial effects that: the invention provides a metal sputtering machine, comprising: the sputtering machine is used for sputtering metal on the substrate; the tray is placed on the sputtering machine table and used for bearing the substrate; a tray storage bin for storing trays; a transport trolley for transporting the pallet; the sealing door is used for sealing the sputtering machine platform; the control device is used for controlling the opening and closing of the sealing door and the operation of the transportation trolley; realize the full automatization of tray and closed door through setting up controlling means and change, reduced manual change tray and switch closed door required time, lifting means comprehensive efficiency to promote the production productivity, also reduce the potential safety hazard that personnel's manual operation brought simultaneously, reduce personnel and get into the impurity of bringing, promote the product yield.
Drawings
In order to illustrate the embodiments or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the invention, and it is obvious for a person skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic view of a metal sputtering machine according to the present invention;
FIG. 2 is a schematic view of the working process of the metal sputtering machine of the present invention;
FIG. 3 is a schematic view of a tray number selection interface of the metal sputtering machine of the present invention.
Detailed Description
While the embodiments and/or examples of the present invention will be described in detail and fully with reference to the specific embodiments thereof, it should be understood that the embodiments and/or examples described below are only a part of the embodiments and/or examples of the present invention and are not intended to limit the scope of the invention. All other embodiments and/or examples, which can be obtained by a person skilled in the art without making any inventive step, based on the embodiments and/or examples of the present invention, belong to the scope of protection of the present invention.
Directional terms used in the present invention, such as [ upper ], [ lower ], [ left ], [ right ], [ front ], [ rear ], [ inner ], [ outer ], [ side ], are only referring to the directions of the attached drawings. Accordingly, the directional terminology is used for the purpose of describing and understanding the invention and is in no way limiting. The terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature.
The invention provides a metal sputtering machine, which solves the technical problem that the prior metal sputtering machine can not realize the full-automatic transmission and exchange of a tray between a tray storage bin and a sputtering machine table.
Fig. 1 is a schematic structural diagram of a metal sputtering machine according to an embodiment of the present invention. The metal sputtering machine comprises a sputtering machine table 10, a transport trolley 20, a tray storage bin 30 and a sealing door 40 arranged between the sputtering machine table 10 and the tray storage bin 30.
A substrate 101 is placed on the sputter table 10, and the substrate 101 completes a sputtering process on the sputter table 10. In the sputtering step, the substrate 101 needs to be supported by a corresponding tray for sputtering.
The tray stocker 30 is used to store trays and to recover replaced trays. According to different production requirements, the types of the substrates sputtered on the sputter 10 are different, each type of substrate needs to be supported by a tray of a corresponding type, and then sputtering is completed on the sputter 10, so that various trays corresponding to the substrates on the sputter 10 are stored in the tray storage bin 30. When the substrate 101 starts to be sputtered, the tray storage bin 30 provides a tray 301 with a corresponding model, and the tray 301 carries the substrate 101 for a sputtering process.
After the sputtering process is completed, the substrate 101 enters the next process, and the tray 301 needs to be recovered into the tray storage 30.
The transport trolley 20 is used for transporting a pallet, and since the pallet storage bin 30 and the sputter 10 belong to different working areas, that is, a certain distance is formed between the pallet storage bin 30 and the sputter 10, when the substrate 101 on the sputter 10 is ready for sputtering, the pallet 301 of a specific model corresponding to the substrate 101 needs to be taken out from the pallet storage bin 30 and transferred to the sputter 10.
When the sputtering of the substrate 101 on the sputter 10 is completed, the tray 301 carrying the substrate needs to be replaced, and at this time, the transport trolley 20 takes the tray 301 off the sputter 10 and then transfers the tray to the tray storage bin 30, and the substrate 101 enters the next process, and the transport trolley 20 is reset.
Then, the sputter 10 needs to sputter a next substrate, that is, another substrate to be sputtered enters the sputter 10 to prepare for a sputtering process, and at this time, the transport cart 20 needs to take out a tray corresponding to the substrate to be sputtered from the tray storage bin 30 and then transfer the tray to the sputter 10. When the metal sputtering machine finishes a sputtering process, the transport trolley 20 repeats the operation of replacing the tray once.
The transport cart 20 further includes a take-out member (not shown) for taking out and putting in a tray from and from the sputter station 10 and taking out and putting in a tray from and from the tray storage 30.
Between the pallet storage bin 30 and the sputter platform 10, that is, between the transportation paths of the transportation trolley 20, a transportation rail 50 is provided, the transportation trolley 20 transports pallets back and forth between the pallet storage bin 30 and the sputter platform 10 through the transportation rail 50, and the transportation rail 50 can make the transportation route of the transportation trolley 20 more accurate.
A sealing door 40 is disposed between the sputter table 10 and the tray storage bin 30 to seal the sputter table 10. Since the sputtering process requires a closed environment, the enclosure door 40 is required to separate the sputtering operation area from other areas. When the metal sputtering machine needs to replace the pallet, the closing door 40 is opened, and the transport trolley 20 carries the pallet to pass through; when the metal sputtering machine does not need to replace the pallet, the closing door 40 is in a closed state, and the transportation trolley 20 is also in a reset state.
The metal sputtering machine further comprises a control device (not shown) for controlling the opening and closing of the closing door 40 and the operation of the transport trolley 20. The material taking member of the transportation trolley 20 can also be controlled by the control device to automatically take and place the tray. Because the switch of the sealing door and the replacement mode of the tray in the existing metal sputtering machine are manual and have low efficiency, the invention is provided with the control device to realize the full-automatic replacement of the tray and the sealing door.
In one embodiment, the control means comprises a controller for controlling the transport trolley 20 to change the pallet upon receiving a change instruction. When the substrate 101 finishes a sputtering process, the metal sputtering machine sends a replacement instruction to the controller of the control system, and after receiving the replacement instruction, the controller controls the transport trolley 20 to move to the sputtering machine 10, to replace the tray 301 carrying the substrate 101, and then controls the transport trolley 20 to move to the tray storage bin 30, to place the tray 301 in the tray storage bin 30.
When the sputtering machine 10 does not perform the sputtering task of the next substrate, the controller controls the transport trolley 20 to reset, and the task of replacing the pallet is completed.
When the sputtering machine 10 continues to perform the sputtering task of the next substrate, the controller controls the tray storage bin 30 to take out a new tray and transmit the new tray to the sputtering machine 10, and finally controls the transport trolley 20 to reset, thereby completing the task of replacing the tray.
In one embodiment, the controller is further configured to control the transportation cart 20 to replace the pallet according to a pallet identifier carried by the replacement command. When the substrate 101 finishes a sputtering process, the metal sputtering machine sends a replacement instruction to the controller, and the controller receives a tray identification carried by the replacement instruction when receiving the replacement instruction, namely the replacement instruction indicates a tray number to be replaced, and at the moment, the controller directly controls the transport trolley 20 to replace the tray with the indicated number, and then controls the transport trolley 20 to reset, so that a task of replacing the tray is completed.
In one embodiment, the controller is configured to control the transport trolley 20 to change the tray according to the parameters of the substrate to be sputtered. When a substrate to be sputtered is about to perform a sputtering process, the metal sputtering machine sends parameters of the substrate to be sputtered to the controller, the controller determines parameters of a tray for bearing the substrate to be sputtered according to the parameters of the substrate to be sputtered, further determines the serial number of the tray to be replaced, and then controls the transport trolley 20 to replace the corresponding tray, so as to complete a task of replacing the tray.
In one embodiment, the controller is configured to control the tray storage 30 to provide the corresponding tray to the transport trolley 20 according to the parameter of the substrate to be sputtered. When a substrate to be sputtered is about to perform a sputtering process, the metal sputtering machine sends parameters of the substrate to be sputtered to the controller, the controller determines parameters of a tray for bearing the substrate to be sputtered according to the parameters of the substrate to be sputtered, and further determines the serial number of the tray to be replaced, at the moment, the controller controls the tray storage bin 30 to select the tray to be replaced in advance, when the transport trolley 20 moves to the tray storage bin 30, the tray to be replaced is directly placed on the transport trolley 20, then the transport trolley 20 is controlled to move to the sputtering machine 10, the tray to be replaced is placed on the sputtering machine 10, and the substrate to be sputtered is borne.
In one embodiment, the controller is configured to control the transport trolley 20 to select a corresponding tray in the tray storage bin 30 according to a parameter of a substrate to be sputtered. When a substrate to be sputtered is about to perform a sputtering process, the metal sputtering machine sends parameters of the substrate to be sputtered to the controller, the controller determines parameters of a tray for bearing the substrate to be sputtered according to the parameters of the substrate to be sputtered, and further determines the serial number of the tray to be replaced, at the moment, the controller controls the transport trolley 20 to directly select the tray to be replaced in the tray storage bin 30, then controls the transport trolley 20 to move to the sputtering machine 10, and places the tray to be replaced on the sputtering machine 10 to bear the substrate to be sputtered.
In one embodiment, the control device includes a sensor and a controller for controlling the opening and closing of the closing door 40 according to a change in the distance between the transport trolley 20 and the closing door 40 detected by the sensor.
The closing door 40 is an automatic door that can be automatically opened and closed under the control of the controller. The control device further comprises a microprocessor, the closing door 40 is connected with the sensor, the sensor is used for sensing the distance change between the transport trolley 20 and the closing door 40 and sending a sensing value to the microprocessor, and the microprocessor sends an instruction for opening or closing the closing door 40 to the controller according to the increase or decrease of the sensing value.
Specifically, when the sensor senses that the distance between the transportation cart 20 and the closing door 40 is gradually decreasing, a sensing value is sent to the microprocessor, the microprocessor sends an instruction to the controller to open the closing door 40, and the controller controls the closing door 40 to be opened so that the transportation cart 20 can pass through the closing door 40; when the sensor senses that the distance between the transportation trolley 20 and the closing door 40 is gradually increased, a sensing value is sent to the microprocessor, the microprocessor sends an instruction for closing the closing door 40 to the controller, and the controller controls the closing door 40 to be closed.
In one embodiment, the sensor is configured to detect a distance between the transportation cart 20 and the closing door 40, and the controller is configured to control opening and closing of the closing door 40 according to whether the distance is smaller than a preset value.
The closing door 40 is an automatic door that can be automatically opened and closed under the control of the controller. The control device further comprises a microprocessor, the closing door 40 is connected with the sensor, the sensor is used for detecting the distance between the transport trolley 20 and the closing door 40 and sending the induction value to the microprocessor, the microprocessor compares the induction value with a preset value, and an instruction for opening or closing the closing door 40 is sent to the controller according to the comparison result.
Specifically, when the sensor senses the distance between the transportation cart 20 and the closing door 40, the sensed value is sent to the microprocessor, the microprocessor compares the sensed value with a preset value, if the sensed value is smaller than the preset value, the microprocessor sends an instruction to the controller to open the closing door 40, and the controller controls the closing door 40 to open so that the transportation cart 20 can pass through the closing door 40; when the sensed value is greater than the preset value, the microprocessor sends an instruction for closing the closing door 40 to the controller, and the controller controls the closing door 40 to close.
In one embodiment, the sensor is disposed on the transport trolley 20. The sensor may be an acoustic wave sensor, an optical sensor, or the like. The sensors can be arranged at one place or a plurality of places.
For example, as shown in fig. 1, the transport trolley 20 has a top surface 201, and a sensor (not shown) is disposed on the top surface 201, and the sensor can detect the distance between the transport trolley 20 and the closing door 40 at any position of the transport trolley 20 on the transport rail 50.
For another example, the transport cart 20 has a first side 202 close to the sputter platform 10 and a second side 203 far from the sputter platform 10, the first side 202 has a first sensor (not shown), and the second side 203 has a second sensor (not shown). Detecting a distance between the transport cart 20 and the closing door 40 by the first sensor when the transport cart 20 is between the sputter station 10 and the closing door; the distance between the transport trolley 20 and the closing door 40 is detected by the second sensor when the transport trolley 20 is between the pallet storage bin 30 and the closing door 40.
In one embodiment, the control device is wirelessly connected to the transport trolley.
As shown in fig. 2, a schematic view of a working process of a metal sputtering machine of the present invention includes the following steps:
step S1: the project has the requirement of changing the tray;
step S2: clicking a tray to replace the material allocation system operation interface;
step S3: selecting a tray to be replaced and then clicking to execute;
step S4: the metal sputtering machine sends a demand signal to the transport trolley;
step S5: the closing door is automatically opened when sensing a signal;
step S6: the transport trolley takes out the tray to be replaced on the sputtering machine platform and puts the tray into a tray storage bin;
step S7: the transport trolley takes out a new tray from the tray storage bin and puts the new tray on the sputtering machine platform;
step S8: after the tray replacing action is finished, the closing door senses a signal and automatically closes;
step S9: and (5) recovering the machine.
The following describes the specific operation flow of the metal sputtering machine of the present embodiment in detail with reference to fig. 1, fig. 2, and fig. 3.
In step S1, there is a tray replacement request, that is, the substrate 101 on the sputter platform 10 has completed the sputtering process, i.e., the next process is about to be performed, and the tray 301 carrying the substrate 101 needs to be replaced.
In step S2, the material blending system operation interface clicks on a pallet change. The metal sputtering machine comprises a material allocation system operation interface, wherein a 'tray replacement' button is arranged on the material allocation system operation interface, and when a requirement of replacing a tray exists in a project, the 'tray replacement' button is clicked to enter a tray number selection interface.
In step S3, the tray to be replaced is selected and then click-to-execute is performed. Fig. 3 is a schematic view of a tray number selection interface of the metal sputtering machine of the present invention. In the tray number selection interface, the transportation direction of the transportation trolley 20 may be set, for example, the number of the tray to be replaced and the position of the tray to be replaced in the tray storage bin 30 may be set when the tray is transported from the sputter station 10 to the tray storage bin 30; the transport direction of the transport cart 20 may be set to be the direction from the pallet storage bin 30 to the sputter station 10, and at this time, the position of the pallet to be replaced in the pallet storage bin 30 is also set.
After the transportation direction of the transportation trolley 20 is set, relevant parameters of the tray are set, and then an 'execution' button is clicked to determine a replacement task.
In step S4, the metal sputtering machine sends a request signal to the transport trolley. When the replacement task is determined, the transportation vehicle 20 receives a task instruction and starts to move along a set path.
In step S5, the closing door senses a signal to automatically open. When the transport trolley 20 receives a task instruction, the sensor of the control device detects the distance or the change in distance between the transport trolley 20 and the closing door, and the closing door 40 is opened under the control of the controller of the control device so that the transport trolley 20 can pass.
In step S6, the transport cart takes out the tray to be replaced on the sputter platform and puts it into the tray storage bin. The transport cart 20 accurately takes the trays with the corresponding numbers off the sputter station 10 according to the parameters set in the step S3, and then transfers the trays to the tray storage bin 30 and places the trays at the position set in the step S3.
In step S7, the transport cart takes out a new tray from the tray storage bin and puts it on the sputter station. The transport cart 20 accurately takes out the pallet at the position corresponding to the pallet storage bin from the pallet storage bin 30 according to the parameters set in the step S3, and then transfers the pallet to the sputter station 10.
In step S8, the closing door is automatically closed when sensing a signal after the tray replacement operation is completed. When the tray replacing operation is completed, the transporting carriage 20 returns to the initial position, the sensor senses the distance or the change of the distance between the transporting carriage 20 and the closing door 40, and the closing door 40 is automatically closed under the control of the controller.
In step S9, the machine is reset. And after the whole task of replacing the tray is completed, the previously set parameters are restored to the original state to wait for the next task instruction.
According to the above embodiments:
an embodiment of the present invention provides a metal sputtering machine, including: the sputtering machine is used for sputtering metal on the substrate; the tray is placed on the sputtering machine table and used for bearing the substrate; a tray storage bin for storing trays; a transport trolley for transporting the pallet; the sealing door is used for sealing the sputtering machine platform; the control device is used for controlling the opening and closing of the sealing door and the operation of the transportation trolley; realize the full automatization of tray and closed door through setting up controlling means and change, reduced manual change tray and switch closed door required time, lifting means comprehensive efficiency to promote the production productivity, also reduce the potential safety hazard that personnel's manual operation brought simultaneously, reduce personnel and get into the impurity of bringing, promote the product yield.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, therefore, the scope of the present invention shall be determined by the appended claims.

Claims (5)

1. A metal sputtering machine, comprising:
the sputtering machine is used for sputtering metal on the substrate;
the tray is placed on the sputtering machine table and used for bearing the substrate;
a tray storage bin for storing trays;
a transport trolley for transporting the pallet;
the sealing door is used for sealing the sputtering machine platform;
the control device is used for controlling the opening and closing of the sealing door and the operation of the transportation trolley; the control device comprises a controller, wherein the controller is used for determining tray parameters for bearing the substrate to be sputtered according to the parameters of the substrate to be sputtered carried by the replacement command, further determining the serial number of the tray to be replaced, controlling the tray storage bin to provide the tray corresponding to the serial number of the tray to be replaced for the transport trolley, controlling the transport trolley to transmit the tray corresponding to the serial number of the tray to be replaced to the sputtering machine, and finally controlling the transport trolley to reset to complete the task of replacing the tray.
2. A metal sputtering machine according to claim 1, wherein said control means comprises a sensor and a controller for controlling the opening and closing of said closure door in response to a change in the distance between said transport trolley and said closure door as detected by said sensor.
3. A metal sputtering machine according to claim 1, wherein said control means comprises a sensor for detecting the distance between said transport trolley and said closing door and a controller for controlling the opening and closing of said closing door depending on whether said distance is less than a preset value.
4. Metal sputtering machine according to one of the claims 2 or 3, characterized in that the sensor is arranged on the transport trolley.
5. Metal sputtering machine according to one of the claims 1 to 3, characterized in that the control device is wirelessly connected to the transport trolley.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004075388A1 (en) * 2003-02-18 2004-09-02 Eamex Corporation Drive mechanism
CN1840448A (en) * 2005-03-29 2006-10-04 精工爱普生株式会社 Substrate transfer apparatus, method of transferring substrate, and method of manufacturing electro-optical device
CN107709014A (en) * 2015-06-08 2018-02-16 富士机械制造株式会社 Printing equipment and to base board operation device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3887253B2 (en) * 2002-03-19 2007-02-28 日鉱金属株式会社 Transport box for sputtering target
CN104851831B (en) * 2015-04-08 2018-10-23 沈阳拓荆科技有限公司 A kind of automatic biography sheet devices and control method applied to semiconductor equipment
CN107043908B (en) * 2017-04-24 2019-05-17 昆山国显光电有限公司 The control method of handling device and handling device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004075388A1 (en) * 2003-02-18 2004-09-02 Eamex Corporation Drive mechanism
CN1840448A (en) * 2005-03-29 2006-10-04 精工爱普生株式会社 Substrate transfer apparatus, method of transferring substrate, and method of manufacturing electro-optical device
CN107709014A (en) * 2015-06-08 2018-02-16 富士机械制造株式会社 Printing equipment and to base board operation device

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