CN109587927A - The vacuum bakeout system and method for vacuum chamber in particle accelerator - Google Patents
The vacuum bakeout system and method for vacuum chamber in particle accelerator Download PDFInfo
- Publication number
- CN109587927A CN109587927A CN201910025336.6A CN201910025336A CN109587927A CN 109587927 A CN109587927 A CN 109587927A CN 201910025336 A CN201910025336 A CN 201910025336A CN 109587927 A CN109587927 A CN 109587927A
- Authority
- CN
- China
- Prior art keywords
- shell
- temperature sensor
- temperature
- insulating layer
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/14—Vacuum chambers
- H05H7/18—Cavities; Resonators
Abstract
The present invention relates to a kind of vacuum bakeout systems of the vacuum chamber in particle accelerator, which includes: shell, and the shell is the tubular structure made of stainless steel material；Insulating layer, the insulating layer are covered on the outer wall of the shell；And power supply, the two poles of the earth of the power supply are electrically connected to the both ends of the shell, and using the fuel factor of electric current, the shell is heated to baking required temperature.Another aspect provides a kind of vacuum bakeout methods of the vacuum chamber in particle accelerator.In vacuum bakeout system and method provided by the invention, electric current, which generates heat by shell, to reduce the aperture of the magnet in particle accelerator, reduces the manufacturing cost of magnet instead of traditional scheme heated using heating tape.
Description
Technical field
The present invention relates to particle accelerator fields, and in particular to a kind of vacuum bakeout system of the vacuum chamber in particle accelerator
System and method.
Background technique
It in particle accelerator, needs to obtain the vacuum environment of superelevation/high, is made with reducing line with residual gas collision
At loss, improve beam lifet.In atmospheric environment, the vacuum chamber of particle accelerator can adsorb air molecule, in superelevation/pole
During high vacuum obtains, vacuum inner wall slowly releases gas molecule.In order to accelerate gas molecule release process, need
Vacuum chamber is heated to 100~400 DEG C, and keeps the temperature 40 hours by Baking out system or more, and with molecular pump, ionic pump etc.
Vacuum pump in time extracts the gas released out.
Conventional Baking out system is heated using heating tape, and heating tape is generally the knot that resistance wire adds heat insulation layer
Structure is directly wound on the outside of vacuum chamber pipeline, as the heat source in baking process；And heat losses are reduced by insulating layer,
Reduce heating tape heating power, while high temperature being avoided to examine etc. the damages of elements to magnet, beam.
In particle accelerator, the aperture of magnet is bigger, and cost is higher；Such as currently used heating tape thickness needs 2mm,
Insulating layer needs 3mm, the magnet being mounted on outside vacuum chamber in this way, aperture need additionally to reserve 10mm for accommodate heating tape and
Insulating layer, thus significantly increases magnet costs.Since magnet aperture is bigger, required driving power power is also bigger, therefore
Traditional structure as heating tape and insulating layer also increases the cost of magnet power supply system.In addition, in traditional method, winding
The gap that 0.5~2cm can be retained between the adjacent heating tape on vacuum chamber is caused in baking process in this way at different location
Temperature difference it is larger.
Summary of the invention
In view of the above-mentioned problems, for saving construction cost, while making to heat more uniform, the present invention provides a kind of acceleration of particle
The vacuum bakeout system of vacuum chamber in device, the vacuum bakeout system include:
Shell, the shell are the tubular structure made of stainless steel material, are formed in the inside of the shell described true
Empty room；
Insulating layer, the insulating layer are covered on the outer wall of the shell；And
Power supply, the two poles of the earth of the power supply are electrically connected to the both ends of the shell, using the fuel factor of electric current, by the shell
It is heated to baking required temperature.
In some embodiments, the vacuum bakeout system further include:
Temperature sensor is set to the outer wall of the shell, for detecting the temperature of the shell, the temperature sensor
Positioned at the inside of the insulating layer；And
Toast control unit, the baking control unit and the temperature sensor and the power electric connection, the baking
Roasting control unit is used to receive the temperature signal that the temperature sensor detects, and according to temperature signal control
The output power of power supply, to control the heating power of the shell.
In some embodiments, the number of the temperature sensor is at least one, when the number of the temperature sensor
When for two or more, the temperature sensor is respectively arranged at the different location of the shell.
In some embodiments, the both ends of the shell are provided with flange, the flange is made of stainless steel material, institute
Power supply is stated to be electrically connected on the flange by conducting wire.
In some embodiments, the shell is made of 304 or 316L stainless steel material；The material of the insulating layer is gas
Gel felt.
Another aspect provides a kind of vacuum bakeout method of the vacuum chamber in particle accelerator, the methods
Include:
The tubular shell for forming the vacuum chamber is manufactured by stainless steel material；
The covering and heat insulating layer on the outer wall of the shell；And
The two poles of the earth of power supply are electrically connected to the both ends of the shell, are heated to dry by the shell using the fuel factor of electric current
Roasting required temperature.
In some embodiments, on the outer wall of the shell before covering and heat insulating layer, it is arranged on the outer wall of the shell
Temperature sensor, the temperature sensor is used to detect the temperature of the shell, and temperature signal is transferred to baking control list
Member；And
The temperature signal that the baking control unit is provided according to hygrosensor, controls the output power of the power supply,
To control the heating power to the shell.
In some embodiments, the number of the temperature sensor is at least one, when the number of the temperature sensor
When for two or more, the temperature sensor is respectively arranged at the different location of the shell.
In some embodiments, the both ends of the shell are provided with flange, the flange is made of stainless steel material, will
The power supply is electrically connected on the flange by conducting wire.
In some embodiments, the shell is manufactured by 304 or 316L stainless steel material；By aerogel blanket material as institute
State insulating layer.
Based on the above-mentioned technical proposal it is found that the present invention at least achieve it is following the utility model has the advantages that
Both ends of the present invention by the way that electric current to be applied directly to the shell made of stainless steel material, utilize the thermal effect of electric current
Shell should be heated, it is no longer necessary to which heating tape is additionally set；Due to eliminating heating tape, magnet in particle accelerator
Aperture can be smaller, and magnet size can reduce, thus magnet cost reduces；After magnet size reduces, required is used to drive
The power of magnet is also smaller, and power supply cost accordingly decreases, remarkable in economical benefits；In addition, shell generates heat everywhere, thickness one
Cause property is good, and uniformly, avoiding heating tape, there are the non-uniform problems of fever caused by gap for fever.
Detailed description of the invention
Fig. 1 is the schematic diagram of the vacuum bakeout system of the vacuum chamber in particle accelerator according to the present invention；
Fig. 2 is the cross-sectional view of the vacuum chamber in Fig. 1.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, technical solution of the present invention will be carried out below
Clearly and completely describe.Obviously, described embodiment is a part of the embodiments of the present invention, instead of all the embodiments.
Based on described the embodiment of the present invention, those of ordinary skill in the art are obtained under the premise of being not necessarily to creative work
Every other embodiment, shall fall within the protection scope of the present invention.
Unless otherwise defined, the technical term or scientific term that the present invention uses should be tool in fields of the present invention
The ordinary meaning for thering is the personage of general technical ability to be understood.
Fig. 1 is the structural schematic diagram of the vacuum bakeout system of the vacuum chamber in the particle accelerator in the embodiment of the present invention.
As shown in Figure 1, the vacuum bakeout system includes shell 1, insulating layer 2 and power supply 3.The shell 1 is made of stainless steel material
Tubular structure forms vacuum chamber in the inside of shell 1；The insulating layer 2 is covered on the outer wall of shell 1；In baking process, power supply
3 the two poles of the earth are electrically connected to the both ends of shell 1, and using the fuel factor of electric current, shell 1 is heated to baking required temperature.Preferably,
Shell 1 can be made of 304 or 316L stainless steel material；The material of insulating layer 2 can be aerogel blanket, can also be using other heat preservations
Material.The characteristics of resistance of shell 1 as made of stainless steel is lower, power supply 3 can be low-voltage, high current, power supply 3
Using DC power supply or AC power source.
Electric current by being applied directly to the both ends of Stainless Steel Shell 1, benefit by vacuum bakeout system in the embodiment of the present invention
It is heated with the fuel factor of electric current, it is no longer necessary to which heating tape is additionally set.And the side wall of shell 1 generates heat everywhere, thickness one
Cause property is good, and uniformly, avoiding heating tape, there are the non-uniform problems of fever caused by gap for fever.Due to eliminating heating tape,
The aperture of magnet in particle accelerator can be smaller, and magnet size can reduce, and magnet cost substantially reduces；Magnet size subtracts
After small, the required power for drive magnet is also smaller, and power supply cost is correspondingly also greatly reduced.For example, using passing
The air gap of the dipolar magnet of the heating tape baking of system needs 40mm, and heating tape heats tape thickness up and down and amount to 4mm with a thickness of 2mm；
And the scheme in the application is used, and after saving heating tape, air gap only needs 36mm, and it is equivalent to air gap and reduces 10%, corresponding magnetic
Iron cost reduces about 10%, and power supply cost reduces about 10%, remarkable in economical benefits.
Preferably, which may also include temperature sensor 4 and baking control unit 5.Temperature sensor 4 is used
In the temperature of detection shell 1, as depicted in figs. 1 and 2, in the present embodiment, temperature sensor 4 is set to the outer wall of shell 1, and position
In the inside of insulating layer 2.Baking control unit 5 is electrically connected with temperature sensor 4 and power supply 3.Baking control unit 5 is for receiving
Temperature sensor 4 detects obtained temperature signal, and the output power of power supply 3 is controlled according to temperature signal, to control to shell 1
Heating power.
In the embodiment of the present invention, temperature sensor 4 is set to the inside of insulating layer 2, and the lead of temperature sensor can be from guarantor
The end of warm layer 2 is drawn, and can realize the detection to the temperature of shell 1 in the case where not influencing the heat insulation effect of insulating layer；Temperature
After degree sensor 4 detects the temperature of shell 1, temperature signal real-time Transmission is given to baking control unit 5；Toast control unit 5
According to the temperature signal that hygrosensor 4 provides, the output power for controlling power supply 3 is made with controlling the heating power to shell 1
Vacuum chamber can be heated up, kept the temperature and be cooled down according to setting baking curve.
Preferably, the number of temperature sensor 4 is at least one, when having two or more temperature sensors 4, two
A or more temperature sensor 4 can be respectively arranged at the different location of shell 1, at the different location to measure shell 1
Temperature.Certainly, other any appropriate number of temperature sensors can be set herein, and can be set in any of shell 1
Several temperature can be arranged in different location according to the length of vacuum chamber and the temperature control precision of needs in suitable position
Sensor.
It is highly preferred that the two sides of shell 1 are provided with flange 6, flange 6 is equally made of stainless steel material, in baking process,
Power supply 3 is electrically connected on flange 6 by conducting wire.Setting in this way, may make in baking process, power supply 3 and shell 1 it
Between electrical connection it is more firm, and flange thickness is larger, and resistance is smaller, may make the electric current on vacuum tube more equal in this way
It is even.
Referring to Fig.1, another aspect of the present invention provides a kind of vacuum bakeout method of the vacuum chamber in particle accelerator, should
Method includes:
By the internal tubular shell 1 for forming vacuum chamber of stainless steel material manufacture；
The covering and heat insulating layer 2 on the outer wall of shell 1；
The two poles of the earth of power supply 3 are electrically connected to the two sides of shell 1, are heated to dry by the shell 1 using the fuel factor of electric current
Roasting required temperature.
Preferably, tubular shell 1 is manufactured by 304 or 316L stainless steel material；By aerogel blanket material as insulating layer 2,
Other thermal insulation materials can also be used.
Preferably, on the outer wall of shell 1 before covering and heat insulating layer 2, temperature sensor 4 is first set on the outer wall of shell 1,
Temperature sensor 4 can be attached on the outer wall of shell 1, be transferred to baking control for detecting the temperature of shell 1, and by temperature signal
Unit 5 processed；The temperature signal that baking control unit 5 is provided according to temperature sensor 4, controls the output power of power supply 3, with control
To the heating power of shell 1.
Preferably, the number of temperature sensor 4 is at least one, when having two or more temperature sensors 4, two
A or more temperature sensor 4 is respectively arranged at the different location of shell 1.
Preferably, the both ends of shell 1 are provided with flange 6, flange 6 is made of stainless steel material, will be electric in baking process
Source 3 is electrically connected on flange 6 by conducting wire.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
Describe in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in protection of the invention
Within the scope of.
Claims (10)
1. a kind of vacuum bakeout system of the vacuum chamber in particle accelerator, which is characterized in that the vacuum bakeout system includes:
Shell, the shell are the tubular structure made of stainless steel material, form the vacuum chamber in the inside of the shell；
Insulating layer, the insulating layer are covered on the outer wall of the shell；And
Power supply, the two poles of the earth of the power supply are electrically connected to the both ends of the shell, and using the fuel factor of electric current, the shell is heated
To baking required temperature.
2. vacuum bakeout system according to claim 1, which is characterized in that the vacuum bakeout system further include:
Temperature sensor is set to the outer wall of the shell, and for detecting the temperature of the shell, the temperature sensor is located at
The inside of the insulating layer；And
Toast control unit, the baking control unit and the temperature sensor and the power electric connection, the baking control
Unit processed controls the power supply for receiving the temperature signal that the temperature sensor detects, and according to the temperature signal
Output power, to control to the heating power of the shell.
3. vacuum bakeout system according to claim 2, which is characterized in that the number of the temperature sensor is at least one
A, when the number of the temperature sensor is two or more, the temperature sensor is respectively arranged at the shell
Different location.
4. vacuum bakeout system according to claim 1, which is characterized in that the two sides of the shell are provided with flange, institute
It states flange to be made of stainless steel material, the power supply is electrically connected on the flange by conducting wire.
5. vacuum bakeout system according to claim 1, which is characterized in that the shell is by 304 or 316L stainless steel
Material is made；The material of the insulating layer is aerogel blanket.
6. a kind of vacuum bakeout method of the vacuum chamber in particle accelerator, which is characterized in that the described method includes:
The tubular shell for forming the vacuum chamber is manufactured by stainless steel material；
The covering and heat insulating layer on the outer wall of the shell；And
The two poles of the earth of power supply are electrically connected to the both ends of the shell, using the fuel factor of electric current, the shell are heated to toast
Required temperature.
7. according to the method described in claim 6, it is characterized in that, this method further include:
On the outer wall of the shell before covering and heat insulating layer, temperature sensor, the temperature are set on the outer wall of the shell
Sensor is used to detect the temperature of the shell, and temperature signal is transferred to baking control unit；
The temperature signal that the baking control unit is provided according to hygrosensor, controls the output power of the power supply, with control
Make the heating power to the shell.
8. working as institute the method according to the description of claim 7 is characterized in that the number of the temperature sensor is at least one
When the number for stating temperature sensor is two or more, the temperature sensor is respectively arranged at the different positions of the shell
It sets.
9. according to the method described in claim 6, it is characterized in that, this method further include:
Flange is set at the both ends of the shell, the flange is made of stainless steel material, the power supply is electrically connected by conducting wire
It is connected on the flange.
10. according to the method described in claim 6, it is characterized in that, manufacturing the shell by 304 or 316L stainless steel material；
By aerogel blanket material as the insulating layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910025336.6A CN109587927A (en) | 2019-01-10 | 2019-01-10 | The vacuum bakeout system and method for vacuum chamber in particle accelerator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910025336.6A CN109587927A (en) | 2019-01-10 | 2019-01-10 | The vacuum bakeout system and method for vacuum chamber in particle accelerator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109587927A true CN109587927A (en) | 2019-04-05 |
Family
ID=65916216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910025336.6A Pending CN109587927A (en) | 2019-01-10 | 2019-01-10 | The vacuum bakeout system and method for vacuum chamber in particle accelerator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109587927A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1715441A (en) * | 2005-05-31 | 2006-01-04 | 中国科学院近代物理研究所 | Vacuum system obtains the baking process of extra-high vacuum |
| WO2009081123A1 (en) * | 2007-12-21 | 2009-07-02 | The Science And Technology Facilities Council | Vacuum vessel |
| US20090291035A1 (en) * | 2008-05-23 | 2009-11-26 | Michael Colin Begg | Vacuum chamber |
| CN103722165A (en) * | 2013-12-31 | 2014-04-16 | 中冶南方工程技术有限公司 | Heat accumulating type vacuum chamber baking system for conducting backing from upper opening and lower opening of vacuum chamber |
| CN204555644U (en) * | 2015-03-30 | 2015-08-12 | 青岛华旗科技有限公司 | The vacuum chamber mounting structure of vacuum sintering furnace |
| CN105575767A (en) * | 2014-11-03 | 2016-05-11 | 上海微电子装备有限公司 | Cleaning apparatus and method for ultrahigh vacuum chamber |
| CN108150730A (en) * | 2018-02-05 | 2018-06-12 | 中国科学院近代物理研究所 | The vacuum pipe structure and synchrotron of synchrotron |
| CN108831812A (en) * | 2018-06-12 | 2018-11-16 | 中国科学院近代物理研究所 | Vacuum tube for accelerator |
-
2019
- 2019-01-10 CN CN201910025336.6A patent/CN109587927A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1715441A (en) * | 2005-05-31 | 2006-01-04 | 中国科学院近代物理研究所 | Vacuum system obtains the baking process of extra-high vacuum |
| WO2009081123A1 (en) * | 2007-12-21 | 2009-07-02 | The Science And Technology Facilities Council | Vacuum vessel |
| US20090291035A1 (en) * | 2008-05-23 | 2009-11-26 | Michael Colin Begg | Vacuum chamber |
| CN103722165A (en) * | 2013-12-31 | 2014-04-16 | 中冶南方工程技术有限公司 | Heat accumulating type vacuum chamber baking system for conducting backing from upper opening and lower opening of vacuum chamber |
| CN105575767A (en) * | 2014-11-03 | 2016-05-11 | 上海微电子装备有限公司 | Cleaning apparatus and method for ultrahigh vacuum chamber |
| CN204555644U (en) * | 2015-03-30 | 2015-08-12 | 青岛华旗科技有限公司 | The vacuum chamber mounting structure of vacuum sintering furnace |
| CN108150730A (en) * | 2018-02-05 | 2018-06-12 | 中国科学院近代物理研究所 | The vacuum pipe structure and synchrotron of synchrotron |
| CN108831812A (en) * | 2018-06-12 | 2018-11-16 | 中国科学院近代物理研究所 | Vacuum tube for accelerator |
Non-Patent Citations (3)
| Title |
|---|
| 万亚鹏等: "HIAF 薄壁二级铁真空室在线烘烤方案研究", 《 真空技术与理论》 * |
| 翁中杰等: "应用直接加热法测定导体的多种物性参数", 《计量技术》 * |
| 谢文君等: "HIAF 强流重离子加速器真空室烘烤功率计算及热- 结构耦合分析", 《真空科学与技术学报》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2007091749A1 (en) | Induction heating element for electric hot air heater and electric heater using the same | |
| CN106521100A (en) | Magnetic field annealing furnace experimental apparatus | |
| CN109186197A (en) | A kind of pole volume high-efficiency drying apparatus and its drying means | |
| CN109587927A (en) | The vacuum bakeout system and method for vacuum chamber in particle accelerator | |
| CN202241875U (en) | Electromagnetic heating device with controllable temperature | |
| CN206160649U (en) | Coil stock drying device | |
| CN101881555A (en) | High-temperature atmosphere furnace with electromagnetic field | |
| CN105698391A (en) | Thermal insulation energy-saving type anti-explosion electric heater | |
| CN208980773U (en) | A kind of furnace body and the fixed device of furnace body of the horizontal magnetic furnace of novel horizontal | |
| CN205678793U (en) | Far infrared automatic dehumidifier | |
| CN208258125U (en) | A kind of stretched wire pipeline heating attemperator | |
| CN104864691B (en) | Method of drying welding electrode through microwave | |
| CN105112611A (en) | Metal heat treatment furnace | |
| CN205228057U (en) | Online steel wire quick drying device | |
| CN106482499A (en) | Pole piece coil drying device and method | |
| CN105150495A (en) | Electromagnetic induction heating system of chinlon screw extruder | |
| CN209497626U (en) | A kind of longitudinal wiring high-temperature electromagnetic induction heating roller | |
| CN209101807U (en) | A kind of Novel electric furnace | |
| CN106755921A (en) | Austenitic stainless steel pressure piping weld joint stable heat treatment system | |
| CN112696790A (en) | Integrated installation method for reducing water resistance of tail end system | |
| CN102360758A (en) | Drying device and drying method of transformer | |
| CN106369658A (en) | Electromagnetic floor heating system | |
| CN219531535U (en) | Drying device | |
| CN202258676U (en) | Drier for transformer | |
| CN204451155U (en) | High-frequency electromagnetic induction sheet material machine die head heater |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190405 |