CN109585980A - A kind of HIGH-POWERED MICROWAVES Auto-matching knot - Google Patents
A kind of HIGH-POWERED MICROWAVES Auto-matching knot Download PDFInfo
- Publication number
- CN109585980A CN109585980A CN201910064028.4A CN201910064028A CN109585980A CN 109585980 A CN109585980 A CN 109585980A CN 201910064028 A CN201910064028 A CN 201910064028A CN 109585980 A CN109585980 A CN 109585980A
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- waveguide
- cover board
- detection module
- adjusting rod
- cavity
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- 238000001514 detection method Methods 0.000 claims abstract description 49
- 230000005540 biological transmission Effects 0.000 claims abstract description 24
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000004484 Briquette Substances 0.000 claims description 18
- 230000005611 electricity Effects 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 1
- 230000007246 mechanism Effects 0.000 abstract description 2
- 230000006641 stabilisation Effects 0.000 abstract description 2
- 238000011105 stabilization Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 9
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/26—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring depth
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P3/00—Waveguides; Transmission lines of the waveguide type
- H01P3/12—Hollow waveguides
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Plasma Technology (AREA)
Abstract
The present invention relates to a kind of HIGH-POWERED MICROWAVES Auto-matching knots, including waveguide cavity and dynamic load, the side of the waveguide cavity is provided with detection module, the detection module and matching module are located at the same side of waveguide cavity, the dynamic load is connected with vertical plane of the waveguide cavity far from detection module, the waveguide cavity is provided with microwave source far from one end of dynamic load, the waveguide cavity includes waveguide cover board, the waveguide cover board is set to the lower section of detection module, and the waveguide cover board is provided with waveguide pedestal far from the side of detection module.The HIGH-POWERED MICROWAVES Auto-matching knot, driving mechanism is constituted between fixed cavity and servo motor, fixed cavity is for installing and supporting fixed servo motor, and nested a transmission gasket on the screw rod of each servo motor leading portion, the stabilization for supporting whole servo motor, facilitates servo motor to work, and adjusting rod and waveguide cover board are isolated, to increase the power capacity of matching knot, it is directly realized by the purpose for increasing microwave system efficiency.
Description
Technical field
The present invention relates to microwave high power technology field, specially a kind of HIGH-POWERED MICROWAVES Auto-matching knot.
Background technique
The utilization rate of microwave energy is heavily dependent on the impedance match situation of microwave, traditional microwave impedance matching skill
Art is difficult to accomplish dynamic load real-time, quick and stable matching, limits microwave system in the application in many fields, makes
Greatly microwave system will be promoted in the application in many fields with matching knot, such as in microwave plasma system, microwave etc.
Plasma source can be equivalent to the load of microwave transmission line.
And the physics of microwave plasma and the variation of chemical property can be embodied by the variation of its impedance, due to etc.
The dynamic characteristic of plasma load impedance, the method for establishing fixed matching network manually is less suitable, at this moment uses automatic impedance
Tuner can realize the matching of impedance in a very short period of time, so that the reflection coefficient of system meets engineering ideal value, and
When establishing plasma, it is necessary to use impedance tuner, in view of the dynamic characteristic of plasma impedance, need using automatic resistance
Anti- tuner, to guarantee the real-time matching of plasma load variation.
In microwave system, for the best transmission for guaranteeing power, impedance matching between signal source and load is needed, to make
System works in traveling-wave mode, and traditional microwave impedance match technique generallys use the mode manually adjusted, hinders fixed load
It is anti-that matching is adjusted, it can not accomplish real-time, the quick and stable matching to dynamic load, this just makes many application fields,
The microwave system efficiency of especially HIGH-POWERED MICROWAVES energy application field is extremely low, and the invention patent is by designing a kind of HIGH-POWERED MICROWAVES
Auto-matching knot, simple and reliable for structure, stability is high, can quickly in real time in the different HIGH-POWERED MICROWAVES systems of 1KW-75KW
Ground Auto-matching dynamic load, has well solved the above problem.
Summary of the invention
The purpose of the present invention is to provide a kind of HIGH-POWERED MICROWAVES Auto-matching knots, to solve above-mentioned background technique proposition
The extremely low problem of microwave system efficiency.
To achieve the above object, the invention provides the following technical scheme: a kind of HIGH-POWERED MICROWAVES Auto-matching knot, including wave
The side of guide cavity (1) and dynamic load (4), the waveguide cavity (1) is provided with detection module (2), the detection module (2) with
It is located at the same side of waveguide cavity (1) with module (3), the dynamic load (4) is connected with waveguide cavity (1) far from detection module (2)
Vertical plane, the waveguide cavity (1) is provided with microwave source (5) far from the one end of dynamic load (4).
Further, the waveguide cavity (1) includes waveguide cover board (102), and the waveguide cover board (102) is set to detection mould
The lower section of block (2), the waveguide cover board (102) are provided with waveguide pedestal (101), the wave far from the side of detection module (2)
The junction for leading pedestal (101) and waveguide cover board (102) is provided with hollow, rectangular structure.
Further, the detection module (2) includes detection module (202), and the detection module (202) is set to waveguide
Side of the cover board (102) far from waveguide pedestal (101), the detection module (202) are arranged far from the side of waveguide cover board (102)
There are control module (201).
Further, the matching module (3) includes adjusting rod (301), and the adjusting rod (301) is set to metallic briquette
(304) inside, the metallic briquette (304) are located at the same side of waveguide cover board (102), the gold with detection module (202)
Belong to briquetting (304) to be provided with fixed cavity (305) far from the side of waveguide cover board (102), the fixed cavity (305) is far from gold
The side for belonging to briquetting (304) is provided with servo motor (306), and the adjusting rod (301) sets close to the side of waveguide cover board (102)
It being equipped with medium block (302), the junction of the metallic briquette (304) and fixed cavity (305) is provided with transmission gasket (303),
Transmission gasket (303) is set to the inside of metallic briquette (304).
Further, the waveguide cavity (1) can be standard or nonstandard rectangular waveguide, the waveguide of circular waveguide or other forms
Transmission line.
Further, perforation, and the number of holes of waveguide cover board (102) are evenly arranged on the waveguide cover board (102)
It is identical as adjusting rod (301) quantity, and a perforation is correspondingly arranged an adjusting rod (301) and a connection adjusting rod
(301) transmission gasket (303) and a servo motor (306).
Further, the inside of the adjusting rod (301) is hollow structure, and the front end screw rod of adjusting rod (301) runs through
In the inside of servo motor (306), and adjusting rod (301) bottom is closure plane, edge chamfer, and adjusting rod (301)
Middle part is provided with the pin of certain length.
Further, vertical slot, and the pin structure of vertical slot and adjusting rod (301) are offered on the inside of the medium block (302)
At snap-in structure.
Further, it is provided with internal screw thread among the transmission gasket (303), is driven the internal screw thread of gasket (303) and watches
Take the screw flight matching of motor (306) leading portion.
Compared with prior art, the beneficial effects of the present invention are: a kind of HIGH-POWERED MICROWAVES Auto-matching knot is provided with.
1. the transmission gasket and the adjusting rod fixed with transmission gasket being attached thereto have when servo motor axially rotates
Trend is rotated with, but the pin on adjusting rod is stuck in the vertical slot of medium block, prevent the rotation of adjusting rod, passes through servo electricity
The screw rod rotary squeezing of machine front end is driven gasket, and adjusting rod is driven to do the movement of vertical direction, adjusts the side of servo motor rotation
To, it can be achieved that adjusting rod insertion or detach waveguide cavity, to change length of the adjusting rod in waveguide cavity, facilitate change adjusting rod exist
Length in waveguide cavity.
2. constituting driving mechanism between fixed cavity and servo motor, fixed cavity is for installing and supporting fixed servo
Motor, and nested a transmission gasket on the screw rod of each servo motor leading portion, support the stabilization of whole servo motor, facilitate
Servo motor work.
3. adjusting rod and waveguide cover board are isolated, to increase the power capacity of matching knot, it is directly realized by increase microwave system
The purpose of efficiency.
4. detection module passes through several function for extracting in waveguide cavity to be electrically connected between detection module and control module
Rate signal can detect the complex reflection coefficient of place waveguide cavity endface, facilitate the trouble-free operation of the device.
5., can in a short period of time again using matching knot detection -> operation -> control and regulation -> detection work step
Auto-matching is completed, to reach full-automatic matching in real time, realizes high efficiency matching.
Detailed description of the invention
Fig. 1 is schematic structural view of the invention；
Fig. 2 is present invention work transferring structure schematic diagram；
Fig. 3 is schematic diagram of the three-dimensional structure；
Fig. 4 is workflow structure schematic diagram of the present invention.
In figure: 1, waveguide cavity, 101, waveguide pedestal, 102, waveguide cover board, 2, detection module, 201, control module, 202,
Detection module, 3, matching module, 301, adjusting rod, 302, medium block, 303, transmission gasket, 304, metallic briquette, 305, fixation
Cavity, 306, servo motor, 4, dynamic load, 5, microwave source.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1-4 is please referred to, the present invention provides a kind of technical solution: a kind of HIGH-POWERED MICROWAVES Auto-matching knot, including waveguide
The side of chamber 1, detection module 2, matching module 3, dynamic load 4 and microwave source 5, the waveguide cavity 1 is provided with detection module 2,
The detection module 2 is located at the same side of waveguide cavity 1 with matching module 3, and the dynamic load 4 is connected with waveguide cavity 1 far from inspection
The vertical plane of module 2 is surveyed, the waveguide cavity 1 is provided with microwave source 5 far from one end of dynamic load 4.
Preferably, the waveguide cavity 1 includes waveguide pedestal 101 and waveguide cover board 102, and the waveguide cover board 102 is set to
The lower section of detection module 2, the waveguide cover board 102 are provided with waveguide pedestal 101, the waveguide far from the side of detection module 2
The junction of pedestal 101 and waveguide cover board 102 is provided with hollow, rectangular structure.
Preferably, the detection module 2 includes control module 201 and detection module 202, and the detection module 202 is arranged
In side of the waveguide cover board 102 far from waveguide pedestal 101, the detection module 202 is provided with far from the side of waveguide cover board 102
Control module 201.
Preferably, the matching module 3 include adjusting rod 301, medium block 302, transmission gasket 303, metallic briquette 304,
Fixed cavity 305 and servo motor 306, the adjusting rod 301 are set to the inside of metallic briquette 304, the metallic briquette 304
It is located at the same side of waveguide cover board 102 with detection module 202, the metallic briquette 304 is arranged far from the side of waveguide cover board 102
There is fixed cavity 305, the fixed cavity 305 is provided with servo motor 306, the adjusting far from the side of metallic briquette 304
Bar 301 is provided with medium block 302, the connection of the metallic briquette 304 and fixed cavity 305 close to the side of waveguide cover board 102
Place is provided with transmission gasket 303, and the transmission gasket 303 is set to the inside of metallic briquette 304.
Preferably, the waveguide cavity 1 can be standard or nonstandard rectangular waveguide, the waveguide transmission of circular waveguide or other forms
Line.
Preferably, perforation, and the number of holes of waveguide cover board 102 and adjusting are evenly arranged on the waveguide cover board 102
301 quantity of bar is identical, and a perforation is correspondingly arranged the driving pad of an adjusting rod 301 and a connection adjusting rod 301
Piece 303 and a servo motor 306.
Preferably, the inside of the adjusting rod 301 is hollow structure, and the front end screw rod of adjusting rod 301 is through servo
The inside of motor 306, and 301 bottom of adjusting rod is closure plane, edge chamfer, and be provided with one in the middle part of adjusting rod 301
The pin of measured length.
Preferably, the inside of the medium block 302 offers vertical slot, and vertical slot engages with the pin of adjusting rod 301 composition
Structure.
Preferably, it is provided with internal screw thread among the transmission gasket 303, is driven the internal screw thread and servo motor of gasket 303
The screw flight of 306 leading portions matches.
Working principle: when using a kind of HIGH-POWERED MICROWAVES Auto-matching knot, microwave source 5 can be solid state microwave first
Source and microwave magnetron source and other microwave generators, when work, microwave source 5 emits microwave energy to system, passes through automatic
Detection module 202 with knot, detection module 202 and control module 201 are in electrical communication with one another, and detection module 202 detects multiple anti-
It penetrates coefficient and control module 201 is transmitted to by electric signal, the complex reflection coefficient that control module 201 is transmitted according to detection module 202,
Several adjusting rods 301 are calculated respectively and should be inserted into the depth in waveguide cavity 1, control module 202 passes through cable and servo motor 306
Connection, and 306 revolution issue of different servo motor is controlled by pulse signal, different adjustment bar 301 is obtained in waveguide cavity 1
Exact length, realize Auto-matching, the complex reflection coefficient of current system can be detected in detection module 202, if interflection system
Number is higher than set highest threshold value, and 201 decision-making system of control module is in mismatch Conditions, and by intelligent operation, automatically
Controlling servo motor 306 drives adjusting rod 301 to be inserted into 1 certain depth of waveguide cavity, and transmission gasket 303 is fixed by screws in adjusting
The top of bar 301, medium block 302 are wrapped in outside several adjusting rods 301, and medium block 302 is fixed on waveguide by metallic briquette 304
On cover board 102, until the complex reflection coefficient that detection module 202 returns meets the engineer application value being arranged, when working with system
Between passage, dynamic load 4 can change impedance because the microwave energy that receives increases, to make system mismatch again, benefit
Detection -> operation -> control and regulation -> detection work step is tied with matching, automatic can be completed again in a short period of time
Match, to reach full-automatic matching in real time.
It should be noted that, in this document, the terms "include", "comprise" or its any other variant are intended to non-row
His property includes, so that the process, method, article or equipment for including a series of elements not only includes those elements, and
And further include other elements that are not explicitly listed, or further include for this process, method, article or equipment institute it is intrinsic
Element.
Used herein a specific example illustrates the principle and implementation of the invention, the explanation of above example
It is merely used to help understand method and its core concept of the invention.The above is only a preferred embodiment of the present invention, it answers
When pointing out due to the finiteness of literal expression, and objectively there is unlimited specific structure, for the common skill of the art
For art personnel, without departing from the principle of the present invention, several improvement, retouching or variation can also be made, can also incited somebody to action
Above-mentioned technical characteristic is combined in the right way；These improve retouching, variation or combination, or the not improved structure by invention
Think and technical solution directly applies to other occasions, is regarded as protection scope of the present invention.
Claims (9)
1. a kind of HIGH-POWERED MICROWAVES Auto-matching knot, including waveguide cavity (1) and dynamic load (4), it is characterised in that: the waveguide
The side of chamber (1) is provided with detection module (2), and the detection module (2) is located at the same of waveguide cavity (1) with matching module (3)
Side, the dynamic load (4) are connected with the vertical plane of waveguide cavity (1) far from detection module (2), and the waveguide cavity (1) is far from dynamic
One end of load (4) is provided with microwave source (5).
2. a kind of HIGH-POWERED MICROWAVES Auto-matching knot according to claim 1, it is characterised in that: waveguide cavity (1) packet
It includes waveguide cover board (102), the waveguide cover board (102) is set to the lower section of detection module (2), and the waveguide cover board (102) is remote
Side from detection module (2) is provided with waveguide pedestal (101), the connection of the waveguide pedestal (101) and waveguide cover board (102)
Place is provided with hollow, rectangular structure.
3. a kind of HIGH-POWERED MICROWAVES Auto-matching knot according to claim 2, it is characterised in that: the detection module (2)
Including control module (201) and detection module (202), the detection module (202) is set to waveguide cover board (102) far from waveguide
The side of pedestal (101), the detection module (202) are provided with control module (201) far from the side of waveguide cover board (102).
4. a kind of HIGH-POWERED MICROWAVES Auto-matching knot according to claim 1 or 2, it is characterised in that: the matching module
It (3) include adjusting rod (301), the adjusting rod (301) is set to the inside of metallic briquette (304), the metallic briquette (304)
It is located at the same side of waveguide cover board (102) with detection module (202), the metallic briquette (304) is far from waveguide cover board (102)
Side is provided with fixed cavity (305), and the fixed cavity (305) is provided with servo electricity far from the side of metallic briquette (304)
Machine (306), the adjusting rod (301) are provided with medium block (302), the metallic briquette close to the side of waveguide cover board (102)
(304) transmission gasket (303) is provided with the junction of fixed cavity (305), the transmission gasket (303) is set to metal pressure
The inside of block (304).
5. a kind of HIGH-POWERED MICROWAVES Auto-matching knot according to claim 1, it is characterised in that: the waveguide cavity (1) can
To be standard or nonstandard rectangular waveguide, the waveguide transmission line of circular waveguide or other forms.
6. a kind of HIGH-POWERED MICROWAVES Auto-matching knot according to claim 2 or 4, it is characterised in that: the waveguide cover board
(102) perforation is evenly arranged on, and the number of holes of waveguide cover board (102) is identical as adjusting rod (301) quantity, and one
Perforation is correspondingly arranged the transmission gasket (303) and a servo electricity of an adjusting rod (301) and a connection adjusting rod (301)
Machine (306).
7. a kind of HIGH-POWERED MICROWAVES Auto-matching knot according to claim 4, it is characterised in that: the adjusting rod (301)
Inside be hollow structure, and the front end screw rod of adjusting rod (301) is through the inside of servo motor (306), and adjusting rod
(301) bottom is the pin that certain length is provided in the middle part of closure plane, edge chamfer, and adjusting rod (301).
8. a kind of HIGH-POWERED MICROWAVES Auto-matching knot according to claim 4, it is characterised in that: the medium block (302)
Inside offer vertical slot, and vertical slot and the pin of adjusting rod (301) constitute snap-in structure.
9. a kind of HIGH-POWERED MICROWAVES Auto-matching knot according to claim 4, it is characterised in that: the transmission gasket
(303) intermediate to be provided with internal screw thread, the internal screw thread of transmission gasket (303) is matched with the screw flight of servo motor (306) leading portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910064028.4A CN109585980A (en) | 2019-01-23 | 2019-01-23 | A kind of HIGH-POWERED MICROWAVES Auto-matching knot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910064028.4A CN109585980A (en) | 2019-01-23 | 2019-01-23 | A kind of HIGH-POWERED MICROWAVES Auto-matching knot |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109585980A true CN109585980A (en) | 2019-04-05 |
Family
ID=65917005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910064028.4A Pending CN109585980A (en) | 2019-01-23 | 2019-01-23 | A kind of HIGH-POWERED MICROWAVES Auto-matching knot |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109585980A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112533348A (en) * | 2020-12-15 | 2021-03-19 | 成都迈频汇能科技有限公司 | High-power microwave automatic blending device |
| CN115000662A (en) * | 2022-06-20 | 2022-09-02 | 深圳市恒运昌真空技术有限公司 | Microwave transmission system of integrated solid-state microwave source |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06140811A (en) * | 1992-10-26 | 1994-05-20 | Fujitsu Ltd | Waveguide type variable attenuator |
| JP2001251107A (en) * | 2000-03-03 | 2001-09-14 | Kyosan Electric Mfg Co Ltd | Impedance matching device |
| DE10107484A1 (en) * | 2001-02-15 | 2002-09-12 | Mueller Weingarten Maschf | Sheet slotting punch lift control centers round sleeved excentric bolt turn angle off servomotor under machine control appropriate to operating stage. |
| CN106299570A (en) * | 2016-08-11 | 2017-01-04 | 电子科技大学 | Microwave impedance generator |
| CN209747689U (en) * | 2019-01-23 | 2019-12-06 | 成都迈频科技有限公司 | High-power microwave automatic matching junction |
-
2019
- 2019-01-23 CN CN201910064028.4A patent/CN109585980A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06140811A (en) * | 1992-10-26 | 1994-05-20 | Fujitsu Ltd | Waveguide type variable attenuator |
| JP2001251107A (en) * | 2000-03-03 | 2001-09-14 | Kyosan Electric Mfg Co Ltd | Impedance matching device |
| DE10107484A1 (en) * | 2001-02-15 | 2002-09-12 | Mueller Weingarten Maschf | Sheet slotting punch lift control centers round sleeved excentric bolt turn angle off servomotor under machine control appropriate to operating stage. |
| CN106299570A (en) * | 2016-08-11 | 2017-01-04 | 电子科技大学 | Microwave impedance generator |
| CN209747689U (en) * | 2019-01-23 | 2019-12-06 | 成都迈频科技有限公司 | High-power microwave automatic matching junction |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112533348A (en) * | 2020-12-15 | 2021-03-19 | 成都迈频汇能科技有限公司 | High-power microwave automatic blending device |
| CN115000662A (en) * | 2022-06-20 | 2022-09-02 | 深圳市恒运昌真空技术有限公司 | Microwave transmission system of integrated solid-state microwave source |
| CN115000662B (en) * | 2022-06-20 | 2023-12-19 | 深圳市恒运昌真空技术有限公司 | Microwave transmission system integrated with solid-state microwave source |
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Application publication date: 20190405 |