CN109580544A - Based on WO3The tapered fiber grating hydrogen gas sensor of/Pd composite membrane - Google Patents
Based on WO3The tapered fiber grating hydrogen gas sensor of/Pd composite membrane Download PDFInfo
- Publication number
- CN109580544A CN109580544A CN201910029766.5A CN201910029766A CN109580544A CN 109580544 A CN109580544 A CN 109580544A CN 201910029766 A CN201910029766 A CN 201910029766A CN 109580544 A CN109580544 A CN 109580544A
- Authority
- CN
- China
- Prior art keywords
- grating
- fiber
- fiber grating
- hydrogen
- composite membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G41/00—Compounds of tungsten
- C01G41/02—Oxides; Hydroxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
Abstract
The invention discloses be based on WO3The tapered fiber grating hydrogen gas sensor of/Pd composite membrane, by fiber Bragg grating (FBG) demodulator, computer, gas flow control valve, gas chamber, hydrogen cylinder, nitrogen cylinder, WO3/ Pd composite membrane, fiber coupler, hydrogen detector, optical fiber, reference grating, tapered fiber grating, fiber grating, light source；Wherein WO is coated with above tapered fiber grating3/ Pd composite membrane.5nmWO is splashed to tapered fiber grating using radio-frequency sputtering technology3Film recycles co-sputtering technology to sputter 5nmWO3/ Pd hybrid films, finally with the Pd film of d.c. sputtering technology sputtering 30nm.WO3/ Pd laminated film has preferable mechanical performance, improves the performance of fiber grating hydrogen gas sensor.
Description
Technical field
The invention proposes be based on WO3The tapered fiber grating hydrogen gas sensor of/Pd composite membrane, belongs to optical fiber sensing technology
Field.
Background technique
Metal Pd is ideal hydrogen sensitive material, has good selectivity and sensitivity to hydrogen.Due to metal Pd
It is special, hydrogen molecule can form hydrogen atom on palladium surface, and enter in the atom gap of palladium.When the concentration of hydrogen reaches
Certain value, hydrogen atom and Pd are capable of forming stable structure；When density of hydrogen reduces, hydrogen atom can be spread from Pd
Out, Pd can be restored to its original state.It is 900 times of own vol of hydrogen that Pd, which can absorb, and volume can occur
Expansion, therefore metal Pd is ideal hydrogen sensitive material.
Using sol-gal process by WO3It is deposited on fiber grating, H2PtCl6As catalyst, the light under various concentration hydrogen
The wavelength of fine grating varies widely.
The Bending Sensitivity of tapered fiber grating is 80 times higher than ordinary optic fibre grating.Fiber grating Side polishing fiber can be risen
To the effect sensitive to extraneous refractive index.Reduce fiber grating diameter relative to by chemical attack, Side polishing fiber technology is not only
Be able to maintain the mechanical performance of fiber grating, and the formed plane of rubbing down is more conducive to the oriented growth of film, so can be formed compared with
The film of good performance.Document report carries out hydrogen in tapered fiber grating sputtering Pd film and is tested, but pure Pd film with
Optical fiber main component SiO2Physical property there are larger difference, cause Pd film to be easy cracking and de- after multiple logical hydrogen
It falls.
Summary of the invention
In view of the deficiencies of the prior art, the purpose of the present invention is to provide be based on WO3The tapered fiber grating of/Pd composite membrane
Hydrogen gas sensor sputters 5nmWO to tapered fiber grating using radio-frequency sputtering technology3Film recycles co-sputtering technology sputtering
5nm WO3/ Pd hybrid films, finally with the Pd film of d.c. sputtering technology sputtering 30nm.WO3/ Pd laminated film has preferable machine
Tool performance improves the performance of fiber grating hydrogen gas sensor.
The invention is realized by the following technical scheme: being based on WO3The tapered fiber grating hydrogen gas sensor of/Pd composite membrane,
By fiber Bragg grating (FBG) demodulator (1), computer (2), gas flow control valve (3), gas chamber (4), fiber coupler (5), hydrogen cylinder
(6), nitrogen cylinder (7), WO3/ Pd composite membrane (8), optical fiber (9), reference grating (10), tapered fiber grating (11), fiber grating
(12), light source (13) forms；It is characterized by: computer (2) is connect with fiber Bragg grating (FBG) demodulator (1) right end, fiber grating solution
Instrument (1) left end is adjusted to connect with fiber coupler (5) right end, fiber coupler (5) left end is connect with optical fiber (9) right end, optical fiber (9)
Left end is connect with reference grating (10) right end, and the central wavelength of reference grating (10) is 1550nm, reference grating (10) left end with
Tapered fiber grating (11) right end connection, tapered fiber grating (11) central wavelength is 1299.576nm, is coated with WO3/ Pd is compound
Film (8), WO3/ Pd composite membrane (8) with a thickness of 40nm, tapered fiber grating (11) left end is connect with fiber grating (12) right end,
The central wavelength of fiber grating (12) is 1540nm, and fiber grating (12) surface is coated with Pd/Au composite membrane, Pd/Au composite membrane
With a thickness of 200nm, fiber grating (12) left end is connect with light source (13), and gas chamber (4) and hydrogen cylinder (6) and nitrogen cylinder (7) are even
It connects.It is passed through suitable hydrogen and nitrogen from gas chamber (4) air inlet gas flow control valve (3) control, passes through hydrogen detector
The concentration variation for controlling gas chamber (4) interior hydrogen, when density of hydrogen changes, fiber grating (12) and tapered fiber grating (11)
Central wavelength can all drift about, it is poor by comparing their drift, density of hydrogen and its variable quantity can be measured, experiment temperature
Degree control is at 18.6 degrees Celsius.
The working principle of the invention is: fiber grating progress Side polishing fiber being formed tapered fiber grating, in sputtering Pd film
The preceding WO that 5nm is sputtered on tapered fiber grating3Film, then Pd and WO3The Pd and WO of cosputtering formation 5nm3Transition zone,
It is sputtered finally by d.c. sputtering and forms sensing probe on 30nmPd film to tapered fiber grating.By increasing intermediate layer energy
The binding force for enough improving Pd film and tapered fiber grating, to improve the performance of sensing probe
λB=2neffΛ (1)
ΔλB=2 (neffΔΛ+ΛΔneff) (2)
The central wavelength lambda of formula (1) expression fiber gratingBWith fiber core effective refractive index neff, fiber grating periods lambda pass
System；Formula (2) indicates generated strain effect of grating when by axial stress, and leads to fiber bragg grating center wavelength
Variation.
When fiber grating is by axial stress, the periods lambda and effective refractive index n of gratingeffIt can change, but grating week
The change rate of phase is greater than the change rate of effective refractive index and expands after Pd film absorbs hydrogen, and applies to tapered fiber grating (11)
Add axial stress, the periods lambda of tapered fiber grating (11) becomes larger, and photoelastic effect causes the variation of effective refractive index opposite
It is smaller, lead to the central wavelength lambda of tapered fiber grating (11)BIt drifts about to long wavelength.By detecting in tapered fiber grating (11)
The long variation of cardiac wave can be obtained by the concentration of hydrogen.By fiber grating in conjunction with hydrogen sensitive material Pd film, bored by measurement
The concentration that type fiber grating (11) reflection kernel wavelength obtains hydrogen not only can be to avoid light in fiber birefringence effect and optical fiber
Influence of the strong variation to accuracy of measurement, and due to using Wavelength demodulation, it is capable of forming distributed measurement, makes the range of detection
It greatly improves.
The beneficial effects of the present invention are: proposing that WO will be sputtered3The tapered fiber grating (11) of/Pd hydrogen sensitive film is used to feel
Know density of hydrogen, which will be remarkably reinforced the sensitivity that extraneous density of hydrogen changes, and provide one kind for hydrogen detection
It is relatively simple easily build, reliably, the new method of high sensitivity.
Detailed description of the invention
Fig. 1 is of the invention based on WO3The tapered fiber grating hydrogen gas sensor characterizing arrangement schematic diagram of/Pd composite membrane.
Specific embodiment
Present invention is further described in detail with specific embodiment with reference to the accompanying drawing.
Referring to attached drawing 1, it is based on WO3The tapered fiber grating hydrogen gas sensor of/Pd composite membrane, by fiber Bragg grating (FBG) demodulator
(1), computer (2), gas flow control valve (3), gas chamber (4), fiber coupler (5), hydrogen cylinder (6), nitrogen cylinder (7),
WO3/ Pd composite membrane (8), optical fiber (9), reference grating (10), tapered fiber grating (11), fiber grating (12), light source (13) group
At；It is characterized by: computer (2) is connect with fiber Bragg grating (FBG) demodulator (1) right end, fiber Bragg grating (FBG) demodulator (1) left end and light
Fine coupler (5) right end connection, fiber coupler (5) left end are connect with optical fiber (9) right end, optical fiber (9) left end and reference grating
(10) right end connects, and the central wavelength of reference grating (10) is 1550nm, reference grating (10) left end and tapered fiber grating
(11) right end connects, and tapered fiber grating (11) central wavelength is 1299.576nm, is coated with WO3/ Pd composite membrane (8), WO3/ Pd is multiple
Close film (8) with a thickness of 40nm, tapered fiber grating (11) left end is connect with fiber grating (12) right end, fiber grating (12)
Central wavelength is 1540nm, and fiber grating (12) surface is coated with Pd/Au composite membrane, Pd/Au composite membrane with a thickness of 200nm, light
Fine grating (12) left end is connect with light source (13), and gas chamber (4) is connect with hydrogen cylinder (6) and nitrogen cylinder (7), and density of hydrogen becomes
When change, the central wavelength of fiber grating (12) and tapered fiber grating (11) can all drift about, by comparing their drift
Difference can measure density of hydrogen and its variable quantity.
Using sputtering 5nmWO of the superhigh vacuum magnetron sputtering system on tapered fiber grating (11)3,5nm WO3And Pd
Hybrid films, 30nmPd film.It first will be with SiO2WO similar in property3Tapered fiber grating surface is splashed to as basal layer,
Then the WO of 5nm is sputtered simultaneously3With Pd hybrid films as intermediate layer, the Pd of 30nm is finally sputtered as hydrogen sensitive layer.
Claims (1)
1. being based on WO3The tapered fiber grating hydrogen gas sensor of/Pd composite membrane, by fiber Bragg grating (FBG) demodulator (1), computer (2),
Gas flow control valve (3), gas chamber (4), fiber coupler (5), hydrogen cylinder (6), nitrogen cylinder (7), WO3/ Pd composite membrane (8),
Optical fiber (9), reference grating (10), tapered fiber grating (11), fiber grating (12), light source (13) composition；It is characterized by: meter
Calculation machine (2) is connect with fiber Bragg grating (FBG) demodulator (1) right end, and fiber Bragg grating (FBG) demodulator (1) left end and fiber coupler (5) right end connect
It connects, fiber coupler (5) left end is connect with optical fiber (9) right end, and optical fiber (9) left end is connect with reference grating (10) right end, reference
The central wavelength of grating (10) is 1550nm, and reference grating (10) left end is connect with tapered fiber grating (11) right end, tapered light
Fine grating (11) central wavelength is 1299.576nm, is coated with WO3/ Pd composite membrane (8), WO3/ Pd composite membrane (8) with a thickness of
40nm, tapered fiber grating (11) left end are connect with fiber grating (12) right end, and the central wavelength of fiber grating (12) is
1540nm, fiber grating (12) surface are coated with Pd/Au composite membrane, Pd/Au composite membrane with a thickness of 200nm, fiber grating (12)
Left end is connect with light source (13), and gas chamber (4) is connect with hydrogen cylinder (6) and nitrogen cylinder (7), when density of hydrogen changes, optical fiber
The central wavelength of grating (12) and tapered fiber grating (11) can all drift about, poor by comparing their drift, can survey
Obtain density of hydrogen and its variable quantity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910029766.5A CN109580544A (en) | 2019-01-14 | 2019-01-14 | Based on WO3The tapered fiber grating hydrogen gas sensor of/Pd composite membrane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910029766.5A CN109580544A (en) | 2019-01-14 | 2019-01-14 | Based on WO3The tapered fiber grating hydrogen gas sensor of/Pd composite membrane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109580544A true CN109580544A (en) | 2019-04-05 |
Family
ID=65916425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910029766.5A Pending CN109580544A (en) | 2019-01-14 | 2019-01-14 | Based on WO3The tapered fiber grating hydrogen gas sensor of/Pd composite membrane |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109580544A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114235747A (en) * | 2021-12-21 | 2022-03-25 | 浙江树人学院（浙江树人大学） | Optical fiber reflection type hydrogen detector |
-
2019
- 2019-01-14 CN CN201910029766.5A patent/CN109580544A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114235747A (en) * | 2021-12-21 | 2022-03-25 | 浙江树人学院（浙江树人大学） | Optical fiber reflection type hydrogen detector |
| CN114235747B (en) * | 2021-12-21 | 2024-01-12 | 浙江树人学院（浙江树人大学） | Optical fiber reflection type hydrogen detector |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109358038B (en) | Microstructure optical fiber surface plasma resonance multifunctional sensor and preparation method thereof | |
| Yang et al. | Hydrogen sensing performance comparison of Pd layer and Pd/WO3 composite thin film coated on side-polished single-and multimode fibers | |
| Tomyshev et al. | High-resolution fiber optic surface plasmon resonance sensor for biomedical applications | |
| CN103868457B (en) | Optical fiber multiple spot micro-displacement sensing method and device based on surface plasma resonance | |
| CN103822901B (en) | Based on the inclined optical fiber grating two-parameter measurement device to density of hydrogen and ambient temperature | |
| CN101776595A (en) | Manufacture method of optical fiber humidity sensor based on Fabry-Perot interference | |
| Hlubina et al. | Reflection-based fibre-optic refractive index sensor using surface plasmon resonance | |
| CN104458658A (en) | Tilted fiber Bragg grating (TFBG)-based surface plasmon resonance (SPR) biosensor | |
| CN102095719A (en) | Optical fiber type sensor system based on surface plasma resonance and stimulated Raman scattering | |
| Wang et al. | Optical relative humidity sensing based on oscillating wave-enhanced Goos–Hänchen shift | |
| CN207318351U (en) | Solution concentration detection system based on SPR sensor | |
| CN109580544A (en) | Based on WO3The tapered fiber grating hydrogen gas sensor of/Pd composite membrane | |
| CN108414474A (en) | A kind of SPR fibre optical sensors and preparation method thereof based on temperature self-compensation | |
| CN104359868A (en) | Tilted fiber bragg grating surface plasma resonance biosensor based on M-Z interference | |
| Wang et al. | Polarization Maintaining Fiber Temperature and Stress Gradient Sensitization Sensor Based on Semiconductor-Metal–Polymer Three-Layer Film Coating | |
| CN205080057U (en) | Michelson interference type optic fibre hydrogen sensor based on PM -PCF | |
| CN209624386U (en) | Based on WO3The tapered fiber grating hydrogen gas sensor of/Pd composite membrane | |
| Yin et al. | A broadband SPR sensor based on a no-core fiber coated with gold-silver for refractive index and temperature measurement | |
| CN105606536A (en) | Polarization-maintaining photonic crystal fiber hydrogen sensor based on polarized light interferences | |
| Huang et al. | Influence of ions on dynamic response of surface plasmon resonance fiber optic sensor | |
| Wang et al. | SPR Sensor Based on Cascaded NCF and U-Shaped Multimode Fibers for Simultaneous Detection of Refractive Index and Temperature | |
| CN107560780A (en) | A kind of temperature compensation of optical fiber F P cavate pressure sensors | |
| Chang et al. | The temperature responsive mechanism of fiber surface plasmon resonance sensor | |
| CN208043656U (en) | A kind of SPR fibre optical sensors based on temperature self-compensation | |
| CN204165900U (en) | Based on the inclined optical fiber grating surface plasma resonance biosensor that M-Z interferes |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |