CN109579977A - A kind of faint acoustic detector based on graphene - Google Patents
A kind of faint acoustic detector based on graphene Download PDFInfo
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- CN109579977A CN109579977A CN201811490892.2A CN201811490892A CN109579977A CN 109579977 A CN109579977 A CN 109579977A CN 201811490892 A CN201811490892 A CN 201811490892A CN 109579977 A CN109579977 A CN 109579977A
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- graphene
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- acoustic detector
- graphene layer
- piezoelectric material
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 75
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 73
- 239000000463 material Substances 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 13
- -1 substrate layer Chemical compound 0.000 claims abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 13
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- 230000000737 periodic effect Effects 0.000 claims description 4
- 239000004698 Polyethylene Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
- 239000005416 organic matter Substances 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- 229920000573 polyethylene Polymers 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims 1
- 230000005684 electric field Effects 0.000 abstract description 7
- 230000030808 detection of mechanical stimulus involved in sensory perception of sound Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 150000001336 alkenes Chemical class 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
The present invention relates to a kind of faint acoustic detector based on graphene, including substrate layer, it is provided with piezoelectric material layer above the substrate layer, insulating layer is provided with above the piezoelectric material layer, is provided with graphene layer above the insulating layer, the acoustic detector, it is transmitted to graphene layer by sound wave, deformation is generated, the dielectric constant of graphene layer is caused to change, by detecting the variation for the voltage that graphene layer is loaded, the detection of sound wave is carried out；The piezoelectric material layer of the acoustic detector can receive the vibration of sound wave simultaneously, to be formed in the interior thereof electric field, which can influence the dielectric constant of graphene layer, to realize the regulation of the dielectric constant of graphene layer；It can also be by the directly incident graphene layer of incident light, so that the change in dielectric constant of graphene layer, regulates and controls the dielectric constant of graphene layer.
Description
Technical field
The present invention relates to Acoustic sounding fields, and in particular to a kind of faint acoustic detector based on graphene.
Background technique
Acoustic detector is becoming extremely important now, either as a part of speech transmission device or energy conduct
A part of optoacoustic detector in the gas analyzer for analyzing gas, such as surrounding air uses.
Common acoustic detector is configured to condenser type detector, and there are two restriction capacitors spaced apart from each other for tool
Diaphragm.One of them of diaphragm is fixed and another can be subjected to displacement by sound wave to be detected.Moveable diaphragm
Displacement determine that the capacitance variations of capacitor, the capacitance variations can be detected by suitable reading circuit and can be used as electric signal
Output, by the electric signal it can be inferred that the characteristic of sound wave to be detected, such as acoustic pressure.
Although capacitor acoustic detector is characterized in that high sensitivity, has and mainly permitted as caused by its labyrinth
More disadvantages.
The shortcomings that common capacitor acoustic detector is in terms of its labyrinth can be eliminated by piezoelectric sound wave detector.
This detector uses the film manufactured by piezoelectric material, and the film can deformation occurs by sound wave to be detected.Piezoelectric film
Deformation induces voltage in piezoelectric film, which can be detected by suitable reading circuit and be can be used as electric signal output, by
The electric signal it can be inferred that sound wave to be detected characteristic.
That there are control modes is single for existing acoustic detector, can not be adjusted according to the characteristic of sound wave, can only be passive
Receive sound wave brought by piezoelectric material deformation caused by change in electric, adaptability is poor, be unfavorable for detect wider frequency
The sound wave of rate range.
Summary of the invention
The purpose of the present invention is overcoming the control methods of existing acoustic detector single, it is unfavorable for detecting wider frequency range
Sound wave the problem of.
For this purpose, the present invention provides a kind of faint acoustic detector based on graphene, including substrate layer, the substrate layer
Top be provided with piezoelectric material layer, be provided with insulating layer above the piezoelectric material layer, the top setting of the insulating layer
There is graphene layer.
The substrate layer is silica.
The piezoelectric material layer is piezoelectric ceramics, piezo-electric crystal, piezoelectricity organic matter.
The piezoelectric material layer with a thickness of 100nm~1000nm.
The insulating layer is silica, aluminum oxide, polyethylene.
The insulating layer with a thickness of 20nm~1000nm.
The piezoelectric material layer is provided with the gap of periodic distribution.
The width in the gap is 200nm~1000nm.
The gap is trapezoidal, and the angle of bevel edge and the angle of bottom surface is 60 °~80 °.
The graphene layer is made of periodical graphene micro-structure.
Beneficial effects of the present invention: this faint acoustic detector based on graphene provided by the invention passes through sound wave
It is transmitted to graphene layer, deformation is generated, the dielectric constant of graphene layer is caused to change, is loaded by detecting graphene layer
Voltage variation, carry out the detection of sound wave；The piezoelectric material layer of the acoustic detector can receive the vibration of sound wave simultaneously, from
And it is formed in the interior thereof electric field, which can influence the dielectric constant of graphene layer, to realize the dielectric of graphene layer
The regulation of constant；It can also be by the directly incident graphene layer of incident light, so that the change in dielectric constant of graphene layer, to graphite
The dielectric constant of alkene layer is regulated and controled；In short, the acoustic detector, can not only incude sound wave, but also can pass through light field, electricity
Field carries out more regulations, actively adjusts so that the acoustic detector is able to carry out, with more flexible ground frequency regulation characteristics.
The present invention is described in further details below with reference to attached drawing.
Detailed description of the invention
Fig. 1 is acoustic detector structural schematic diagram one.
Fig. 2 is acoustic detector structural schematic diagram two.
Fig. 3 is acoustic detector structural schematic diagram three.
Fig. 4 is acoustic detector structural schematic diagram four.
Fig. 5 is graphene layer structural schematic diagram one.
Fig. 6 is graphene layer structural schematic diagram two.
Fig. 7 is graphene layer structural schematic diagram three.
Fig. 8 is graphene layer structural schematic diagram four.
In figure: 1, substrate layer；2, piezoelectric material layer；3, insulating layer；4, graphene layer；5, gap；6, angle.
Specific embodiment
Reach the technical means and efficacy that predetermined purpose is taken for the present invention is further explained, below in conjunction with attached drawing and reality
Example is applied to a specific embodiment of the invention, structure feature and its effect, detailed description are as follows.
Embodiment 1
In order to overcome the control methods of existing acoustic detector single, it is unfavorable for detecting asking for the sound wave of wider frequency range
Topic.The present invention provides a kind of faint acoustic detector based on graphene as shown in Figure 1, including substrate layer 1, the substrate layers
1 primarily serves supporting role, and substrate layer 1 can be used silica, quartz, glass etc. and be made, and the top of the substrate layer 1 is set
It is equipped with piezoelectric material layer 2, the top of the piezoelectric material layer 2 is provided with insulating layer 3, and the top of the insulating layer 3 is provided with stone
Black alkene layer 4；Insulating layer 3 completely cuts off the grid-control voltage that the detection voltage that graphene layer 4 is loaded and piezoelectric material layer 2 load,
The two is avoided to influence each other；The piezoelectric material layer 2 can receive the vibration of sound wave, thus in the inside shape of piezoelectric material layer 2
At electric field, which can influence the dielectric constant of above-mentioned graphene layer 4, to realize the dielectric constant of graphene layer 4
Regulation；Graphene layer 4 is for experiencing sound wave, and deformation occurs, in addition, graphene layer 4 can also receive incident light wave, enters
The light wave penetrated can make the change in dielectric constant of graphene layer 4, regulate and control to the dielectric constant of graphene layer 4；Actually answer
With when, on graphene layer 4 load detection voltage, when sound wave incident, influencing graphene layer 4, deformation occurs, to make
The dielectric constant for obtaining graphene layer 4 changes, by detecting the variation of loaded detection voltage, to examine to sound wave
It surveys；Meanwhile graphene layer 4 can squeeze the insulating layer 3 of lower section during deformation, 3 meeting of insulating layer is so that piezoelectric material layer 2 is sent out
Raw deformation, thus formed inside piezoelectric material layer 2 it is uneven and distribution of charges, thus in piezoelectric material layer 2 and graphene layer 4
Between formation one because piezoelectric material deformation is different and the electric field of dynamic change, the electric field can influence graphene layer 4
Dielectric constant regulates and controls the dielectric constant of graphene layer 4；Can also incident different light wave to graphene layer 4, to graphite
The dielectric constant of alkene layer 4 is regulated and controled.
The piezoelectric material layer 2 is piezoelectric ceramics, piezo-electric crystal, piezoelectricity organic matter.
The piezoelectric material layer 2 with a thickness of 100nm~1000nm, it is preferential can choose 200nm, 300nm, 400nm,
500nm, 550nm, 600nm, 700nm, 800nm etc..
The insulating layer 3 is silica, aluminum oxide, polyethylene.
The insulating layer 3 with a thickness of 20nm~1000nm, it is preferential can choose 50nm, 100nm, 200nm, 300nm,
400nm, 450nm etc..
As shown in Figure 2 and Figure 3, the piezoelectric material layer 2 is provided with the gap 5 of periodic distribution, thus it is possible, on the one hand, can increase
The pressure of the part of pressurization material layer 2, can assemble more charges at the top of piezoelectric material layer 2, so that institute's shape
At electric field it is more strong, can change more family to 4 dielectric constant of graphene layer it is obvious so that the acoustic detector is more
Sensitivity.On the other hand, when carrying out light wave regulation, it is also possible that the absorption to light wave is more obvious, to increase
Add to the change to 4 dielectric constant of graphene layer, improves the acoustic detector more sensitivity.
The width in the gap 5 is 200nm~1000nm, it is preferential can choose 300nm, 300nm, 500nm, 550nm,
600nm, 700nm, 800nm etc..
Further, as shown in figure 4, the gap 5 be it is trapezoidal, and the angle of bevel edge and the angle of bottom surface 6 be 60 °~
80 °, preferential 65 °, 70 °, 75 ° of selection etc..
The graphene layer 5 is made of periodical graphene micro-structure, can be isotropic structure, such as Fig. 5, Fig. 6 institute
Show；It may be anisotropic structure, as shown in Figure 7, Figure 8, naturally it is also possible to it is other periodic structures, it in this way can be right
The light wave of different characteristics generates effect, to influence the dielectric constant of graphene layer 5.
In conclusion being somebody's turn to do the faint acoustic detector based on graphene, graphene layer 4 is transmitted to by sound wave, generates shape
Become, the dielectric constant of graphene layer 4 is caused to change, by detecting the variation for the voltage that graphene layer 4 is loaded, carry out sound
The detection of wave；The piezoelectric material layer 2 of the acoustic detector can receive the vibration of sound wave simultaneously, to be formed in the interior thereof electricity
, which can influence the dielectric constant of graphene layer 4, to realize the regulation of the dielectric constant of graphene layer 4；It can also
To pass through the directly incident graphene layer 4 of incident light, so that the change in dielectric constant of graphene layer 4, normal to the dielectric of graphene layer 4
Number is regulated and controled；In short, the acoustic detector, can not only incude sound wave, but also more tune can be carried out by light field, electric field
Control is actively adjusted so that the acoustic detector is able to carry out, and has more flexible ground frequency regulation characteristics.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that
Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist
Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention
Protection scope.
Claims (10)
1. a kind of faint acoustic detector based on graphene, including substrate layer (1), it is characterised in that: the substrate layer (1)
Top is provided with piezoelectric material layer (2), is provided with insulating layer (3) above the piezoelectric material layer (2), the insulating layer (3)
Top be provided with graphene layer (4).
2. a kind of faint acoustic detector based on graphene as described in claim 1, it is characterised in that: the substrate layer
It (1) is silica.
3. a kind of faint acoustic detector based on graphene as described in claim 1, it is characterised in that: the piezoelectric material
Layer (2) is piezoelectric ceramics, piezo-electric crystal, piezoelectricity organic matter.
4. a kind of faint acoustic detector based on graphene as claimed in claim 1 or 3, it is characterised in that: the piezoelectricity
Material layer (2) with a thickness of 100nm~1000nm.
5. a kind of faint acoustic detector based on graphene as described in claim 1, it is characterised in that: the insulating layer
It (3) is silica, aluminum oxide, polyethylene.
6. a kind of faint acoustic detector based on graphene as claimed in claim 1 or 5, it is characterised in that: the insulation
Layer (3) with a thickness of 20nm~1000nm.
7. a kind of faint acoustic detector based on graphene as described in claim 1, it is characterised in that: the piezoelectric material
Layer (2) is provided with the gap (5) of periodic distribution.
8. a kind of faint acoustic detector based on graphene as claimed in claim 7, it is characterised in that: the gap (5)
Width be 200nm~1000nm.
9. a kind of faint acoustic detector based on graphene as described in claim 1, it is characterised in that: the gap (5)
To be trapezoidal, and the angle of bevel edge and the angle (6) of bottom surface is 60 °~80 °.
10. a kind of faint acoustic detector based on graphene as described in claim 1, it is characterised in that: the graphene
Layer (4) is made of periodical graphene micro-structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811490892.2A CN109579977B (en) | 2018-12-07 | 2018-12-07 | Weak sound wave detector based on graphene |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811490892.2A CN109579977B (en) | 2018-12-07 | 2018-12-07 | Weak sound wave detector based on graphene |
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| Publication Number | Publication Date |
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| CN109579977A true CN109579977A (en) | 2019-04-05 |
| CN109579977B CN109579977B (en) | 2020-12-11 |
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|---|---|---|---|
| CN201811490892.2A Active CN109579977B (en) | 2018-12-07 | 2018-12-07 | Weak sound wave detector based on graphene |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102540506A (en) * | 2011-12-31 | 2012-07-04 | 泰州巨纳新能源有限公司 | D-type optical fiber based graphene electro-optical modulator and preparation method thereof |
| CN103001003A (en) * | 2012-12-13 | 2013-03-27 | 大连理工大学 | Manual electromagnetic metamaterial based on topology and graphene material and having tunable gradient force traps |
| CN104062775A (en) * | 2014-06-30 | 2014-09-24 | 浙江大学 | Nonvolatile optical memory unit |
| CN107246911A (en) * | 2017-06-09 | 2017-10-13 | 西南交通大学 | A kind of passive detection device of utilization piezoelectric structure |
| CN108432268A (en) * | 2015-11-05 | 2018-08-21 | 诺基亚技术有限公司 | Acoustic apparatus and related methods |
| CN207854171U (en) * | 2018-03-02 | 2018-09-11 | 上海微联传感科技有限公司 | piezoelectric microphone |
-
2018
- 2018-12-07 CN CN201811490892.2A patent/CN109579977B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102540506A (en) * | 2011-12-31 | 2012-07-04 | 泰州巨纳新能源有限公司 | D-type optical fiber based graphene electro-optical modulator and preparation method thereof |
| CN103001003A (en) * | 2012-12-13 | 2013-03-27 | 大连理工大学 | Manual electromagnetic metamaterial based on topology and graphene material and having tunable gradient force traps |
| CN104062775A (en) * | 2014-06-30 | 2014-09-24 | 浙江大学 | Nonvolatile optical memory unit |
| CN108432268A (en) * | 2015-11-05 | 2018-08-21 | 诺基亚技术有限公司 | Acoustic apparatus and related methods |
| CN107246911A (en) * | 2017-06-09 | 2017-10-13 | 西南交通大学 | A kind of passive detection device of utilization piezoelectric structure |
| CN207854171U (en) * | 2018-03-02 | 2018-09-11 | 上海微联传感科技有限公司 | piezoelectric microphone |
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| Publication number | Publication date |
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| CN109579977B (en) | 2020-12-11 |
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