CN109571293A - A kind of Combined iron-casting abrasive disk - Google Patents
A kind of Combined iron-casting abrasive disk Download PDFInfo
- Publication number
- CN109571293A CN109571293A CN201811595327.2A CN201811595327A CN109571293A CN 109571293 A CN109571293 A CN 109571293A CN 201811595327 A CN201811595327 A CN 201811595327A CN 109571293 A CN109571293 A CN 109571293A
- Authority
- CN
- China
- Prior art keywords
- abrasive disk
- several
- mounting base
- casting
- block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005266 casting Methods 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 230000002950 deficient Effects 0.000 abstract description 6
- 238000012423 maintenance Methods 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 9
- 229910001018 Cast iron Inorganic materials 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
- B24D7/066—Grinding blocks; their mountings or supports
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The present invention provides a kind of Combined iron-casting abrasive disk, including abrasive disk mounting base, several abrasive disk blocks and several screws, several abrasive disk blocks are mounted in abrasive disk mounting base, abrasive disk mounting base structure in the form of annular discs, several through-holes are distributed in abrasive disk mounting base, the fan-shaped structure of every piece of abrasive disk block, several pieces of abrasive disk blocks closely surround and are surrounded by torus structure, the lower surface of abrasive disk block is equipped with several fixation holes, and the through-hole that screw passes through in abrasive disk mounting base is fixedly connected with the fixation hole on abrasive disk block.The unitized abrasive disk of abandoning tradition of the present invention, a kind of novel combination type abrasive disk is researched and developed, several abrasive disk blocks are fixed in abrasive disk mounting base, forms Combined iron-casting abrasive disk, reduce casting dimension, so that casting difficulty is greatly reduced, while in process of production, such as finding defective abrasive disk block, only need to change defective abrasive disk block, no replacement is required entire abrasive disk is convenient for later maintenance, reduces maintenance cost.
Description
Technical field
The present invention relates to technical field of semiconductors, in particular it relates to a kind of Combined iron-casting abrasive disk.
Background technique
In semiconductor wafer twin grinding processing technology, need to grind semiconductor wafer using cast iron abrasive disk
Processing, as shown in Figure 1, traditional cast iron abrasive disk is the cast iron abrasive disk of integral type.It is existing in actual production process
The cast iron abrasive disk of integral type have following defects that
1, in order to avoid with reduce process of lapping in scratched caused by semiconductor wafer surface, cast iron abrasive disk cannot have
The defects of burning into sand, stomata, uneven hardness；However, due to the particularity of cast iron products process for machining and manufacturing, the bigger casting of size
Its powder injection molding difficulty of ironware is bigger, so that its manufacture threshold is higher；
2, the cast iron abrasive disk of integral type is since yield rate is lowly so as to cause Integral iron casting abrasive disk higher cost；
3, after effectively using layer use, residual fraction cannot use Integral iron casting abrasive disk, cause larger
Waste, directly affects semiconductor wafer manufacturing cost.
To solve the above problems, the present invention provides a kind of Combined iron-casting abrasive disk, the unitized abrasive of abandoning tradition
Disk researches and develops a kind of novel combination type abrasive disk, reduces the difficulty and casting cost of casting technique.
Summary of the invention
In order to solve problems in the prior art, the present invention provides a kind of Combined iron-casting abrasive disk, the one of abandoning tradition
Body formula abrasive disk researches and develops a kind of novel combination type abrasive disk, reduces the difficulty and casting cost of casting technique.
The invention patent provide a kind of Combined iron-casting abrasive disk, including abrasive disk mounting base, several abrasive disk blocks with
And several screws, several abrasive disk blocks are mounted in the abrasive disk mounting base, the abrasive disk mounting base structure in the form of annular discs,
It is distributed with several through-holes in the abrasive disk mounting base, every piece of the abrasive disk block fan-shaped structure, several pieces of abrasive disk blocks are tight
Close surround is surrounded by torus structure, and the lower surface of the abrasive disk block is equipped with several fixation holes, and the screw passes through described grind
Through-hole in mill mounting base is fixedly connected with the fixation hole on the abrasive disk block.
Preferably, it is sector structure that each abrasive disk is block-shaped, each abrasive disk block it is in the same size.
Preferably, the lower surface of the abrasive disk block is set there are six fixation hole.
Preferably, the through-hole there are six corresponding position is distributed in the abrasive disk mounting base.
Preferably, the internal screw thread matched with the screw external screw thread is distributed on the inner wall of the fixation hole.
Preferably, several ring-shaped grooves are distributed on each abrasive disk block.
Technical solution provided by the invention has the benefit that
1, Combined iron-casting abrasive disk provided by the invention, the unitized abrasive disk of abandoning tradition research and develop a kind of novel group
Several abrasive disk blocks are fixed in abrasive disk mounting base by box-like abrasive disk, form Combined iron-casting abrasive disk；
2, the present invention need to only control the casting quality of each abrasive disk block, casting is greatly decreased when controlling casting quality
Size reduces processing threshold so that casting difficulty is greatly reduced；
3, it in process of production, such as finds defective abrasive disk block, only needs to change defective abrasive disk block, without more
Entire abrasive disk is changed, later maintenance is convenient for, reduces maintenance cost, simultaneous grinding disk mounting base can be recycled, and reduce material wave
Take, is conducive to control cost.
Detailed description of the invention
It, below will be to required use in embodiment description in order to illustrate more clearly of the technical solution in the invention patent
Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this
For the those of ordinary skill of field, without creative efforts, it can also be obtained according to these attached drawings others
Attached drawing.
Fig. 1 is the structural schematic diagram of existing Integral iron casting abrasive disk；
Fig. 2 is the structural schematic diagram of abrasive disk block in the present invention；
Fig. 3 is the structural schematic diagram of abrasive disk mounting base in the present invention；
Fig. 4 is the structural schematic diagram of Combined iron-casting abrasive disk in the present invention.
Specific embodiment
To keep the contents of the present invention more clear and easy to understand, below in conjunction with Figure of description, the contents of the present invention are made into one
Walk explanation.Certainly the invention is not limited to the specific embodiment, general replacement known to those skilled in the art
It is included within the scope of protection of the present invention.Secondly, the present invention has carried out detailed statement using schematic diagram, it is real the present invention is described in detail
When example, for ease of description, schematic diagram is not partially enlarged in proportion to the general scale, should not be in this, as limitation of the invention.
Above and other technical characteristic and beneficial effect, will in conjunction with the embodiments and attached drawing grinds Combined iron-casting of the invention
Mill is described in detail.As shown, Fig. 2 is the structural schematic diagram of abrasive disk block in the present invention；Fig. 3 is ground in the present invention
The structural schematic diagram of disk mounting base；Fig. 4 is the structural schematic diagram of Combined iron-casting abrasive disk in the present invention.
As in Figure 2-4, the present invention provides a kind of Combined iron-casting abrasive disk, including abrasive disk mounting base 20, Ruo Ganyan
Mill block 10 and several screws 30, several abrasive disk blocks 10 are mounted in abrasive disk mounting base 20.Combination provided by the invention
Formula cast iron abrasive disk, the unitized abrasive disk of abandoning tradition research and develop a kind of novel combination type abrasive disk, and several abrasive disk blocks are consolidated
It is scheduled in abrasive disk mounting base, forms Combined iron-casting abrasive disk.
As shown in Fig. 2, each abrasive disk block 10 is segment structure, each abrasive disk block 10 it is in the same size, every piece in fan
Physique structure, several pieces of abrasive disk blocks 10 are closely around torus structure is surrounded by, there are six the lower surface of abrasive disk block 10 is set
Fixation hole；Wherein, the depth of fixation hole accounts for the half of 10 thickness of abrasive disk block；In addition, each abrasive disk in the present embodiment
Several ring-shaped grooves are distributed on block 10.
As shown in figure 3, the structure in the form of annular discs of abrasive disk mounting base 20, several through-holes are distributed in abrasive disk mounting base 20,
It is distributed the through-hole there are six corresponding position in abrasive disk mounting base 20, is distributed on the inner wall of through-hole and matches with 30 external screw thread of screw
The internal screw thread of conjunction.
As shown in figure 4, screw 30 passes through on through-hole and abrasive disk block 10 in abrasive disk mounting base 20 in the present embodiment
Fixation hole is fixedly connected；Wherein, the internal screw thread matched with screw external screw thread is distributed on the inner wall of fixation hole.
In conclusion the present invention when controlling casting quality, need to only control the casting quality of each abrasive disk block, substantially subtract
Few casting dimension reduces processing threshold so that casting difficulty is greatly reduced；In addition, in process of production, such as finding defective
Abrasive disk block only needs to change defective abrasive disk block, no replacement is required entire abrasive disk, is convenient for later maintenance, reduce maintenance at
This, simultaneous grinding disk mounting base can be recycled, and reduce waste of material, be conducive to control cost.
Although the present invention essentially describes above embodiments, example is intended only as to be described, and the present invention is simultaneously
It is without being limited thereto.Those of ordinary skill in the art can make the essential characteristics of a variety of modifications and application without departing from embodiment.For example,
Each component that embodiment is shown in detail can be modified and be run, be believed that and be included in the modification and the relevant difference of application
In protection scope of the present invention as defined in the appended claims.
Embodiment involved in this specification is meant that specially feature, structure or the spy described in conjunction with the embodiment
Property is included at least one embodiment of the present invention.These terms for coming across everywhere in specification are not necessarily directed to same
Embodiment.In addition, it is common all to think that it falls into this field when describing a particular feature, structure, or characteristic in conjunction with any embodiment
In the range of these a particular feature, structure, or characteristics that technical staff combines other embodiments that can realize.
Claims (6)
1. a kind of Combined iron-casting abrasive disk, which is characterized in that including abrasive disk mounting base, several abrasive disk blocks and several spiral shells
Silk, several abrasive disk blocks are mounted in the abrasive disk mounting base, the abrasive disk mounting base structure in the form of annular discs, the grinding
Several through-holes, every piece of the abrasive disk block fan-shaped structure are distributed in disk mounting base, several pieces of abrasive disk blocks, which are closely surround, to be enclosed
It is coiled into torus structure, the lower surface of the abrasive disk block is equipped with several fixation holes, and the screw is installed across the abrasive disk
Through-hole on seat is fixedly connected with the fixation hole on the abrasive disk block.
2. Combined iron-casting abrasive disk according to claim 1, which is characterized in that each abrasive disk block is fan-shaped knot
Structure, each abrasive disk block it is in the same size.
3. Combined iron-casting abrasive disk according to claim 1, which is characterized in that the lower surface of the abrasive disk block is equipped with
Six fixation holes.
4. Combined iron-casting abrasive disk according to claim 3, which is characterized in that be distributed in the abrasive disk mounting base
The through-hole of six corresponding positions.
5. Combined iron-casting abrasive disk according to claim 1, which is characterized in that be distributed on the inner wall of the fixation hole
The internal screw thread matched with the screw external screw thread.
6. Combined iron-casting abrasive disk according to claim 1, which is characterized in that if being distributed on each abrasive disk block
Dry ring-shaped groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811595327.2A CN109571293A (en) | 2018-12-25 | 2018-12-25 | A kind of Combined iron-casting abrasive disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811595327.2A CN109571293A (en) | 2018-12-25 | 2018-12-25 | A kind of Combined iron-casting abrasive disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109571293A true CN109571293A (en) | 2019-04-05 |
Family
ID=65931749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811595327.2A Pending CN109571293A (en) | 2018-12-25 | 2018-12-25 | A kind of Combined iron-casting abrasive disk |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109571293A (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1255380A (en) * | 1960-01-23 | 1961-03-10 | Polishing disc improvements | |
| US4351489A (en) * | 1978-06-21 | 1982-09-28 | Laptev Lev N | Refiner disk |
| CN2740350Y (en) * | 2004-11-09 | 2005-11-16 | 黄绍国 | Perforated sectional grinding disk |
| KR20130005075U (en) * | 2012-02-16 | 2013-08-26 | 임홍순 | Flap disc |
| CN203665306U (en) * | 2013-10-31 | 2014-06-25 | 重庆晶宇光电科技有限公司 | Wafer grinding disc |
| KR20140100712A (en) * | 2013-02-07 | 2014-08-18 | 김희수 | Surface treatment polishing device |
| CN205614503U (en) * | 2016-04-26 | 2016-10-05 | 河南金宜精密磨具有限公司 | Mill of integrated form abrasive brick |
| KR101815528B1 (en) * | 2017-08-23 | 2018-01-05 | 이창용 | Polishing plate of smartphone camera housing |
| CN207548540U (en) * | 2017-12-13 | 2018-06-29 | 广州捷骏电子科技有限公司 | A kind of PCB grindings diamond circular disc brush |
| CN209364414U (en) * | 2018-12-25 | 2019-09-10 | 上海致领半导体科技发展有限公司 | A kind of Combined iron-casting abrasive disk |
-
2018
- 2018-12-25 CN CN201811595327.2A patent/CN109571293A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1255380A (en) * | 1960-01-23 | 1961-03-10 | Polishing disc improvements | |
| US4351489A (en) * | 1978-06-21 | 1982-09-28 | Laptev Lev N | Refiner disk |
| CN2740350Y (en) * | 2004-11-09 | 2005-11-16 | 黄绍国 | Perforated sectional grinding disk |
| KR20130005075U (en) * | 2012-02-16 | 2013-08-26 | 임홍순 | Flap disc |
| KR20140100712A (en) * | 2013-02-07 | 2014-08-18 | 김희수 | Surface treatment polishing device |
| CN203665306U (en) * | 2013-10-31 | 2014-06-25 | 重庆晶宇光电科技有限公司 | Wafer grinding disc |
| CN205614503U (en) * | 2016-04-26 | 2016-10-05 | 河南金宜精密磨具有限公司 | Mill of integrated form abrasive brick |
| KR101815528B1 (en) * | 2017-08-23 | 2018-01-05 | 이창용 | Polishing plate of smartphone camera housing |
| CN207548540U (en) * | 2017-12-13 | 2018-06-29 | 广州捷骏电子科技有限公司 | A kind of PCB grindings diamond circular disc brush |
| CN209364414U (en) * | 2018-12-25 | 2019-09-10 | 上海致领半导体科技发展有限公司 | A kind of Combined iron-casting abrasive disk |
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| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
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