CN109554666B - A kind of preparation method of conical fiber SERS probe - Google Patents

A kind of preparation method of conical fiber SERS probe Download PDF

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CN109554666B
CN109554666B CN201811342587.9A CN201811342587A CN109554666B CN 109554666 B CN109554666 B CN 109554666B CN 201811342587 A CN201811342587 A CN 201811342587A CN 109554666 B CN109554666 B CN 109554666B
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optical fiber
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CN109554666A (en
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刘晔
周飞
王红成
凌东雄
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Dongguan University of Technology
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5806Thermal treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5806Thermal treatment
    • C23C14/5813Thermal treatment using lasers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • G01N21/658Raman scattering enhancement Raman, e.g. surface plasmons
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • G01N2021/653Coherent methods [CARS]
    • G01N2021/655Stimulated Raman

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Abstract

The invention discloses a kind of preparation methods of conical fiber SERS probe, are related to Surface Enhanced Raman Scattering Spectrum field.The preparation method includes: the optical fiber conical surface that noble metal nano film is plated on to conical fiber structure;Using laser coupled unit, couple femtosecond laser in the conical fiber for being coated with noble metal nano film;The femtosecond laser transmitted in conical fiber structure interacts with the noble metal nano film for being plated on the optical fiber conical surface, the laser energy of noble metal nano film absorption femtosecond laser is simultaneously converted to self heat, noble metal nano film experience insulation high-temperature annealing process, to form the noble metal nano particles of dispersion in the optical fiber conical surface, the preparation of optical fiber SERS probe is realized.Femtosecond laser preparation method provided by the present invention is able to solve the problem of existing continuous light prepares the photo-thermal accumulation or damage that face when optical fiber SERS probe;And transmitted by coupling femtosecond laser in optical fiber, solve the problems, such as that existing femtosecond laser technology is difficult to prepare conical fiber SERS probe.

Description

A kind of preparation method of conical fiber SERS probe
Technical field
The present invention relates to Surface Enhanced Raman Scattering Spectrum fields, more particularly to a kind of system of conical fiber SERS probe Preparation Method.
Background technique
It is logical that optical fiber surface, which enhances Raman scattering (surface enhanced Raman scattering, SERS) probe, It crosses and prepares noble metal nano structure or particle in optical fiber surface and formed, SERS spectra technology is mutually tied with optical fiber sensing technology It closes, there is Raman detection high sensitivity, reproducible, strong antijamming capability, low in cost and long-range, in-situ Raman detection etc. Advantage shows important application prospect in fields such as biomedicine, life science, chemical reaction monitorings.
The preparation of optical fiber SERS probe is the key that realize highly sensitive detection.Currently, induced with laser method is to prepare optical fiber A kind of common method of SERS probe.For example, Jilin University Xu Weiqing, Tsinghua University Yang Chang happiness etc. has developed laser-induced chemical Sedimentation (Langmuir, 2008,24:4394;Langmuir,2011,27:4623;CN200910135729), by by laser It is coupled in optical fiber, is transmitted in the reaction solution containing reducing agent and soluble precious-metal salt through optical fiber, utilizes induced with laser Redox reaction can realize noble metal nano particles in the deposition of fiber end face, to form optical fiber SERS probe.Due to The laser used in this method is continuous laser, and when carrying out probe preparation, there are light thermal buildup issue, Yi Yinqi nano particles Between reunion and damage;And the nanoparticle size being prepared is larger, pattern is not easy to control, to influence SERS enhancing effect Fruit.
A kind of induced with laser self-assembly method is disclosed in patent of invention CN201510692551, by by laser through optical fiber coupling Merging is transmitted in noble metal nano particles colloidal sol, utilizes the photo-thermal effect and electromagnetism phase of noble metal nano particles under induced with laser Interaction, can be in the assembling of optical fiber conical surface realization pattern, the more uniform noble metal nano particles of size.Although this method can be compared with Big degree solves the problems, such as the pattern of optical fiber conical surface noble metal nano particles, dimensional homogeneity, but due to equally using continuous laser It is irradiated, it will be apparent that heat accumulation and thermal diffusion still will lead to the reunion between noble metal nano particles and even damage.
In recent years, it has been proposed that a kind of method (such as Optics for preparing SERS substrate using femtosecond laser revulsion Letters, 2010,35:2937, Sensors andActuators B, 2018,272:485).By in precious metal salt solution Femtosecond laser is focused to the optical fiber conical surface on substrate by bottom holding plane substrate (such as Si, SiO2, PMMA), and is aided with quickly Laser scanning can realize that noble metal nano particles are precipitated in the substrate optical fiber conical surface using the multiphoton -effect that femtosecond laser induces, To form SERS substrate;The method of this femtosecond laser processing can effectively avoid photo-thermal diffusion and accumulation, be conducive to be formed smaller Size, the noble metal nano structure of greater density distribution, improve SERS detection sensitivity.But space-focusing coupling in this method It closes and the working method that quickly scans is not particularly suited for the heavy of noble metal nano particles on curved surface (such as the optical fiber conical surface, side) Product;In addition, the multiphoton -effect that femtosecond laser induces in precious metal salt solution belongs to nonlinear optical effect, the list of required laser Pulse energy is higher, it usually needs uses amplifying stage, increases preparation cost.To sum up, existing conical fiber SERS probe preparation is deposited Photo-thermal accumulation or damage problem and femtosecond laser processing method in the preparation of such as continuous light are difficult to prepare conical fiber The problem of SERS probe.
Summary of the invention
The purpose of the present invention is to provide a kind of conical fiber SERS probe preparation methods, to solve existing continuous light preparation The photo-thermal accumulation faced when optical fiber SERS probe or damage problem and existing femtosecond laser processing method are difficult to prepare conical fiber The problem of SERS probe.
To achieve the above object, the present invention provides following schemes:
A kind of preparation method of conical fiber SERS probe, comprising:
Noble metal nano film is plated on to the optical fiber conical surface of conical fiber structure;Using laser coupled unit, femtosecond is swashed It is optically coupled in the conical fiber for being coated with the noble metal nano film, forms conical fiber SERS probe;The conical fiber The femtosecond laser transmitted in structure interacts with the noble metal nano film for being plated on the optical fiber conical surface, described expensive Metal nanometer thin film absorbs the laser energy of the femtosecond laser and is converted to self heat, the noble metal nano film experience It is insulated high-temperature annealing process, to form the noble metal nano particles of dispersion in the optical fiber conical surface, realizes the system of optical fiber SERS probe It is standby.
Optionally, the thicknesses of layers of the noble metal nano film is less than 20nm.
Optionally, described to utilize laser coupled unit, it couples femtosecond laser to and is coated with the noble metal nano film In conical fiber, formed before conical fiber SERS probe, further includes:
Adjust the power and repetition rate of the femtosecond laser.
Optionally, the fiber optic materials of the conical fiber structure be common silica fibre material, polymer light fiber material or Ti:Sapphire laser fiber optic materials;The optical fiber type of the conical fiber structure is single mode optical fiber, multimode fibre or D-type optical fiber.
Optionally, layers of chrome, the thickness of the layers of chrome are coated between the noble metal nano film and the optical fiber conical surface For 1nm, the layers of chrome is used to increase the adhesive force of the noble metal nano film Yu the optical fiber conical surface.
Optionally, the material of the noble metal nano film is the metal material with larger surface plasma resonance characteristic Material, the ingredient of the metal material are gold, silver, platinum or copper.
Optionally, the laser coupled unit determines that the femtosecond swashs according to the different output interfaces of the femtosecond laser Coupled modes between light and the conical fiber structure;The coupled modes include spatial coupling and the direct coupling of optical fiber Conjunction mode.
Optionally, the preparation method of the conical fiber structure includes fused biconical taper method and HF etch.
Optionally, the plated film mode of the noble metal nano film includes vacuum magnetic-control sputtering method and thermal evaporation plated film Method.
The specific embodiment provided according to the present invention, the invention discloses following technical effects: the present invention provides one kind The preparation method of conical fiber SERS probe, using on the femtosecond laser and the optical fiber conical surface transmitted in conical fiber structure Noble metal nano film directly intercouples effect, forms optical fiber SERS probe, effectively overcomes traditional continuous laser expensive when inducing The photo-thermal of metal Nano structure accumulates or the problems such as photothermal injury, is conducive to improve SERS detection sensitivity;Simultaneously as being omitted The step of noble metal nano particles is precipitated in precious metal salt solution under Multiphoton Absorbtion effect, is not necessarily to very high single laser pulse energy Amount solves in current femtosecond laser processing since space-focusing and quick scanning work mode are difficult to realize conical fiber SERS The difficulty of probe preparation, reduces preparation cost, has application value.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention Example, for those of ordinary skill in the art, without any creative labor, can also be according to these attached drawings Obtain other attached drawings.
Fig. 1 is the preparation method flow chart of conical fiber SERS probe provided by the present invention;
Fig. 2 is conical fiber SERS probe preparation facilities structural schematic diagram provided by the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
The object of the present invention is to provide a kind of preparation methods of conical fiber SERS probe, to solve existing continuous light preparation The photo-thermal accumulation faced when optical fiber SERS probe or damage problem and existing femtosecond laser processing method are difficult to prepare conical fiber The problem of SERS probe.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real Applying mode, the present invention is described in further detail.
As shown in Figure 1, the present invention provides a kind of preparation methods of conical fiber SERS probe, based on as shown in Figure 2 Preparation facilities.
Step 101: noble metal nano film is plated on to the optical fiber conical surface of conical fiber structure;The taper of the optical fiber conical surface It can be a variety of geometries such as single cone, bipyramid, combination tapered.
Step 102: utilizing laser coupled unit, couple femtosecond laser to the taper for being coated with the noble metal nano film In optical fiber structure, conical fiber SERS probe is formed.
The present invention prepares conical fiber structure using a variety of methods such as fused biconical taper method, HF etch;On the optical fiber conical surface Noble metal nano film is plated, thicknesses of layers is from several nanometers to 20 nanometer;Open femtosecond laser light source 1, the femtosecond laser light Source issues femtosecond laser, and the femtosecond laser passes through laser coupled unit 2, realizes the femtosecond laser and the conical fiber Efficient, stable coupling between SERS probe;By modes such as the power of adjusting femtosecond laser light source and repetition rates, in femtosecond Under the insulation high-temperature annealing process of laser, noble metal nano film is converted into the noble metal nano particles of dispersion, to realize cone The preparation of shape optical fiber SERS probe.
In practical applications, the thicknesses of layers of the noble metal nano film is less than 20nm.
In practical applications, described to utilize laser coupled unit, it couples femtosecond laser to and is coated with the noble metal nano In the conical fiber of film, formed before conical fiber SERS probe, further includes:
Adjust the power and repetition rate of the femtosecond laser.
In practical applications, the fiber optic materials of the conical fiber structure are common silica fibre material, polymer optical fiber Material or Ti:Sapphire laser fiber optic materials;The optical fiber type of the conical fiber structure is single mode optical fiber, multimode fibre or D-type optical fiber.
In practical applications, layers of chrome, the layers of chrome are coated between the noble metal nano film and the optical fiber conical surface Thickness be 1nm, the layers of chrome is used to increase the adhesive force of the noble metal nano film Yu the optical fiber conical surface.
In practical applications, the material of the noble metal nano film is with larger surface plasma resonance characteristic Metal material, the ingredient of the metal material are gold, silver, platinum or copper.
In practical applications, the laser coupled unit is according to the different output interfaces of the femtosecond laser, determine described in Coupled modes between femtosecond laser and the conical fiber structure;The coupled modes include spatial coupling and optical fiber Direct coupling system.
In practical applications, the preparation method of the conical fiber structure includes fused biconical taper method and HF etch.
In practical applications, the plated film mode of the noble metal nano film includes vacuum magnetic-control sputtering method and thermal evaporation Coating method.
The present invention prepares optical fiber SERS probe using femtosecond laser revulsion, effectively overcomes traditional continuous laser expensive when inducing The photo-thermal of metal Nano structure accumulates or the problems such as photothermal injury;Meanwhile this method is easy to operate, can be formed in the optical fiber conical surface The noble metal nano particles that small size, greater density are distributed are conducive to improve SERS detection sensitivity.
The present invention is direct by the noble metal nano particles film using the femtosecond laser and the optical fiber conical surface transmitted in optical fiber The method for interacting and forming optical fiber SERS probe efficiently solves in the processing of current femtosecond laser due to space-focusing and fast Fast scanning work mode is difficult to realize the difficulty of conical fiber SERS probe preparation.
Compared with femtosecond laser preparation SERS FLOOR method of the tradition based on Multiphoton Absorbtion effect, the present invention proposes benefit The mechanism of dispersion noble metal nano particles is formed under high annealing with noble metal nano film to prepare optical fiber SERS probe, pole The big energy for reducing required femtosecond laser when preparation, conducive to cost is reduced.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other The difference of embodiment, the same or similar parts in each embodiment may refer to each other.
Used herein a specific example illustrates the principle and implementation of the invention, and above embodiments are said It is bright to be merely used to help understand method and its core concept of the invention;At the same time, for those skilled in the art, foundation Thought of the invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification is not It is interpreted as limitation of the present invention.

Claims (9)

1. a kind of preparation method of conical fiber SERS probe characterized by comprising
Noble metal nano film is plated on to the optical fiber conical surface of conical fiber structure;
It using laser coupled unit, couples femtosecond laser in the conical fiber for being coated with the noble metal nano film, is formed Conical fiber SERS probe;The femtosecond laser transmitted in the conical fiber structure and your gold for being plated on the optical fiber conical surface Belong to nano thin-film to interact, the laser energy of femtosecond laser described in the noble metal nano film absorption is simultaneously converted to certainly Body heat, the noble metal nano film experience insulation high-temperature annealing process, to form the noble metal of dispersion in the optical fiber conical surface Nano particle realizes the preparation of optical fiber SERS probe.
2. the preparation method of conical fiber SERS probe according to claim 1, which is characterized in that the noble metal nano The thicknesses of layers of film is less than 20nm.
3. the preparation method of conical fiber SERS probe according to claim 1, which is characterized in that described to utilize laser coupling Unit is closed, is coupled femtosecond laser in the conical fiber for being coated with the noble metal nano film, conical fiber SERS is formed and visits Before needle, further includes:
Adjust the power and repetition rate of the femtosecond laser.
4. the preparation method of conical fiber SERS probe according to claim 1, which is characterized in that the conical fiber knot The fiber optic materials of structure are common silica fibre material, polymer light fiber material or Ti:Sapphire laser fiber optic materials;The conical fiber knot The optical fiber type of structure is single mode optical fiber, multimode fibre or D-type optical fiber.
5. the preparation method of conical fiber SERS probe according to claim 1, which is characterized in that the noble metal nano Layers of chrome is coated between film and the optical fiber conical surface, the thickness of the layers of chrome is 1nm, and the layers of chrome is for your gold to be increased Belong to the adhesive force of nano thin-film and the optical fiber conical surface.
6. the preparation method of conical fiber SERS probe according to claim 1, which is characterized in that the noble metal nano The material of film is the metal material with larger surface plasma resonance characteristic, the ingredient of the metal material be gold, silver, Platinum or copper.
7. the preparation method of conical fiber SERS probe according to claim 1, which is characterized in that the laser coupled list Member determines the coupling between the femtosecond laser and the conical fiber structure according to the different output interfaces of the femtosecond laser Mode;The coupled modes include spatial coupling and Direct couple mode.
8. the preparation method of conical fiber SERS probe according to claim 1, which is characterized in that the conical fiber knot The preparation method of structure includes fused biconical taper method and HF etch.
9. the preparation method of conical fiber SERS probe according to claim 1, which is characterized in that the noble metal nano The plated film mode of film includes vacuum magnetic-control sputtering method and thermal evaporation coating method.
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