CN109540946A - Example of transmission electron microscope drift antidote based on intelligent algorithm - Google Patents

Example of transmission electron microscope drift antidote based on intelligent algorithm Download PDF

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CN109540946A
CN109540946A CN201811249520.0A CN201811249520A CN109540946A CN 109540946 A CN109540946 A CN 109540946A CN 201811249520 A CN201811249520 A CN 201811249520A CN 109540946 A CN109540946 A CN 109540946A
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value
picture
upper left
size
template
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吴幸
骆晨
王茜
顾俊杰
张嘉言
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East China Normal University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2202Preparing specimens therefor
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00Image enhancement or restoration
    • G06T5/80Geometric correction
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10056Microscopic image
    • G06T2207/10061Microscopic image from scanning electron microscope
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20092Interactive image processing based on input by user
    • G06T2207/20104Interactive definition of region of interest [ROI]

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  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
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  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Image Analysis (AREA)

Abstract

The example of transmission electron microscope that the invention discloses a kind of based on intelligent algorithm drifts about antidote, and specially over the display, the picture size of imaging is m × n for operation transmission electron microscope imaging display;For user according to the region M × N for being less than or equal to picture size is selected in formed picture, selected areas is used as image template;According to the region of selection, extracting record gray value using algorithm is data template;Threshold value A is set.Select correction mode: correction in situ or ex situ correction, in situ that image shift only occurs for the variation of no contrast, ex situ is that there are contrast variations;Calculate its departure degree D;If the minimum value of departure degree D value is greater than set threshold value A, mechanical return is realized by control specimen holder;If the minimum value of departure degree D value is less than set threshold value A, is realized and resetted by algorithm.Gain effect of the invention is the drift and shaking that can effectively prevent the image when being continuously shot multiple transmission electron microscope photos.

Description

Example of transmission electron microscope drift antidote based on intelligent algorithm
Technical field
The present invention relates to transmission electron microscope the field of test technology, it is related to calculating under a kind of nanoscale based on artificial intelligence The example of transmission electron microscope drift antidote of method.
Background technique
Transmission electron microscope is a kind of important means that the structure of matter can be observed under atomic scale.By giving transmission electricity Sub- microscope, which applies additional accessory, may be implemented the function of elemental analysis.The specimen holder of transmission electron microscope is to carry sample Device, different specimen holders can be to applying different outfield, such as thermal field, electric field, the field of force etc..Due to transmission electron microscopy It is the tool in atomic scale parsing substance, therefore the minimum shake of sample can all cause the difficulty observed, such as the drift of sample It moves and will lead to the position for needing at every moment to adjust sample in observation, make it at observation center.This undoubtedly increases observation The difficulty of difficulty and the real time monitoring to area-of-interest.The main reason for causing sample to drift about includes: that electron beam irradiation causes Thermal drift, drift caused by accumulation drifts about caused by instrument, outside noise, improper operation of operator etc..Therefore such as The drift what solves sample becomes one of the challenge for perplexing transmission electron microscope operator instantly.
Summary of the invention
Present invention aim to address preventing sample from drifting about operating transmission electron microscope shooting photo or when video, It is proposed the example of transmission electron microscope drift antidote under a kind of nanoscale based on intelligent algorithm.
Application scenarios of the invention are to be continuously shot multiple transmission electron microscopies in user's operation transmission electron microscope Mirror photo.Gain effect of the invention is the drift that can effectively prevent the image when being continuously shot multiple transmission electron microscope photos It moves and shakes.
Realizing the specific technical solution of the object of the invention is:
A kind of example of transmission electron microscope drift antidote based on intelligent algorithm, this method includes following tool Body step:
Step 1: operation transmission electron microscope adjusts focal length and enables transmission electron microscope clearly to sample The picture of imaging, sample is most clearly shown on display by external charge coupled cell, and the picture size of imaging is m × n; For user according to the region M × N for being less than or equal to picture size is selected in formed picture, selected areas is used as image mould Plate;
Step 2: according to the region of selection, extracting gray value using algorithm, i.e., to selected areas from the upper left corner to the lower right corner Gray value is recorded line by line and is stored into memory, and the gray value to record at this time is data template;
Step 3: setting threshold value A, i.e., patient image drift or shaking maximum value;
Step 4: selection correction mode: original position correction or ex situ correction, in situ for the variation of no contrast, only generation image is inclined It moves, ex situ is that there are contrast variations;
Step 5: calculating its departure degree D;If the minimum value value of departure degree D is greater than set threshold value A, pass through control Specimen holder processed realizes mechanical return;If the minimum value of departure degree D value is less than set threshold value A, realized by algorithm multiple Position.
It is described that gray value is recorded line by line from the upper left corner to the lower right corner to selected areas, specifically: it is extracted in selected areas With (i, j) for the upper left corner, size is the gray value of the subgraph of M × N, and wherein the definition of subgraph is the picture that size is M × N, is obtained To template data T (s, t), wherein i, j are respectively cross, the ordinate that some in image is put, and s, t are count value.
Calculating its departure degree D, specifically:
Ex situ correction: the size of each picture is m × n;Gray value is extracted in the region that step 2 is chosen and is remembered For data template;Switching current image enters the shooting and storage of next frame picture, extracts in the frame figure with (i, j) as upper left Angle, size are the gray value of the figure of M × N and store S (x, y), and wherein x and y is the count value of subgraph;Calculate S (x, y) and template The deviation value D (i, j) of T (s, t);Then i and j successively add 1, extract and store the S (x, y) after i and j successively adds 1, and calculate i The deviation value D (i, j) of S (x, y) and template T (s, t) after successively adding 1 with j;I and j successively add 1, extract and store i and j successively The purpose of S (x, y) after adding 1 is so that with (i, j) for the upper left corner, and size is that the set of the subgraph gray value of M × N can include The gray value data of whole picture;It is all get with (i, j) be the upper left corner, size be M × N subgraph gray value in, look for To the minimum value of deviation value D (i, j);Whether the value of the D (i, j) of judgement at this time is greater than set threshold value A, if it is greater than the threshold value A then passes through driving specimen holder and realizes that the mechanical return of sample extracts at this time if the value of D (i, j) at this time is less than threshold value A I, j value, and translate with (i, j) be the upper left corner, size be M × N subgraph image so that its upper left position (i, j) and mould The position (i, j) in the plate picture upper left corner is overlapped;Wherein Wherein 1≤i≤m-M+1,1≤j≤n-N+1;Switching current image enters the shooting and storage of next frame picture, weight Multiple above-mentioned steps, until shooting is completed;
Correction in situ: the size of each picture is m × n;Gray value is extracted in the region that step 2 is chosen and is denoted as Data template;Switching current image enters the shooting and storage of next frame picture, extracts in the frame figure with (i, j) as upper left Angle, size are the gray value of the figure of M × N and store S (x, y), and wherein x and y is the count value of subgraph;Calculate S (x, y) and template The deviation value D (i, j) of T (s, t);Then i and j successively add 1, extract and store the S (x, y) after i and j successively adds 1, and calculate i The deviation value D (i, j) of S (x, y) and template T (s, t) after successively adding 1 with j;I and j successively add 1, extract and store i and j successively The purpose of S (x, y) after adding 1 is so that with (i, j) for the upper left corner, and size is that the set of the subgraph gray value of M × N can include The gray value data of whole picture;It is all get with (i, j) be the upper left corner, size be M × N subgraph gray value in, look for To the minimum value of deviation value D (i, j);Whether the value of the D (i, j) of judgement at this time is greater than threshold value A set by step 3, if it is greater than The threshold value A then realizes that the mechanical return of sample mentions if the value of D (i, j) at this time is less than threshold value A by driving specimen holder Taking i at this time, j value, and translating with (i, j) as the upper left corner, size is the subgraph image of M × N, so that its upper left position (i, J) it is overlapped with the position (i, j) in the template picture upper left corner;Wherein Wherein 1≤i≤m-M+1,1≤j≤n-N+1;Revised picture is saved as at this time new template, switched Current image enters the shooting and storage of next frame picture, repeats the above steps, until shooting is completed.
Beneficial effects of the present invention:
The present invention can preferably overcome user's difficulty caused by sample drift when operating transmission electron microscope.And User can neatly select interested region to operate, and correct to whole-course automation the operation that drift facilitates user.
Detailed description of the invention
Fig. 1 is flow chart of the present invention.
Specific embodiment
Embodiment 1
The present embodiment changes for no contrast, and image shift (ex situ) state only occurs, specifically includes:
Step 1: operation transmission electron microscope adjusts focal length and enables transmission electron microscope clearly to sample Imaging.The picture of sample is most clearly shown on display by external charge coupled cell at this time.User can be according to formed As selecting a size for the region of 300 × 300 pixels, selected areas is used as template, that is, guaranteeing should in subsequent operation Region does not occur drift and shakes.
Step 2: the extracted region characteristic point that algorithm is chosen according to user, i.e., to selected areas from the upper left corner to the lower right corner by In row record gray value and storage to storage equipment, and the data to record at this time is templates.Specially extracted in the frame figure With (i, j) be the upper left corner, size be 300 × 300 subgraph gray value and storage, obtain template data T (300,300).
Step 3: setting threshold value is 50, i.e., user patient image drift or shaking maximum position.
Step 4: choice experiment mode is ex situ experiment.
Step 5: calculating its departure degree.The total size of picture is 2000 × 2000 pixels, under switching current image enters One frame picture, in the frame figure extract with (i, j) be the upper left corner, size be 300 × 300 subgraph gray value and store S (300, 300) similarity of itself and template T (300,300), is calculated;1 purpose is successively added to be by i and j so that with (i, j) for the upper left corner, size is 300 × 300 subgraph gray value can get the gray value data of whole picture, it is all get with (i, j) be the upper left corner, In the subgraph gray value that size is 300 × 300, find with template difference it is the smallest with (i, j) for the upper left corner, size is M × N Subgraph be as a result, displacement images are overlapped the position (i, j) in its upper left position (i, j) and the template picture upper left corner, and it is same When calculate the size of deviant D value, wherein Wherein 1≤i≤1701,1≤j≤1701.If find with template difference it is the smallest with (i, j) be the upper left corner, size 300 The D value of × 300 subgraph is greater than the threshold value 50 that operator was originally arranged, then carries out mechanical return by software-driven specimen holder. The threshold value 50 being originally arranged if it is less than operator, then the frame picture completes drift correction, then takes the next frame of the frame, in repetition Step is stated, until correction is completed in the position of all pictures.
Embodiment 2
The present embodiment is the home state for having contrast to change, and is specifically included:
Step 1: operation transmission electron microscope adjusts focal length and enables transmission electron microscope clearly to sample Imaging.The picture of sample is most clearly shown on display by external charge coupled cell at this time.User can be according to formed As selecting a size for the region of 300 × 300 pixels, selected areas is used as template, that is, guaranteeing should in subsequent operation Region does not occur drift and shakes.
Step 2: the extracted region characteristic point that algorithm is chosen according to user, i.e., to selected areas from the upper left corner to the lower right corner by In row record gray value and storage to storage equipment, and the data to record at this time is templates.Specially extracted in the frame figure With (i, j) be the upper left corner, size be 300 × 300 subgraph gray value and storage, obtain template data T (300,300).
Step 3: setting threshold value is 50, i.e., user patient image drift or shaking maximum position.
Step 4: choice experiment mode is experiment in situ.
Step 5: calculating its departure degree.The total size of picture is 2000 × 2000 pixels, and switching current image enters next Frame picture, in the frame figure extract with (i, j) be the upper left corner, size be 300 × 300 subgraph gray value and store S (300, 300) similarity of itself and template T (300,300), is calculated;1 purpose is successively added to be by i and j so that with (i, j) for the upper left corner, size is 300 × 300 subgraph gray value can get the gray value data of whole picture, it is all get with (i, j) be the upper left corner, In the subgraph gray value that size is 300 × 300, find with template difference it is the smallest with (i, j) for the upper left corner, size is M × N Subgraph be as a result, displacement images are overlapped the position (i, j) in its upper left position (i, j) and the template picture upper left corner, and it is same When calculate the size of deviant D value, wherein Wherein 1≤i≤1701,1≤j≤1701.If find with template difference it is the smallest with (i, j) be the upper left corner, size 300 The D value of × 300 subgraph is greater than the threshold value 50 that operator was originally arranged, then carries out mechanical return by software-driven specimen holder, The threshold value 50 being originally arranged if it is less than operator, then the frame picture completes drift correction, and revised picture is saved at this time For new template, switches shooting and storage that current image enters next frame picture, repeat the above steps, until shooting is completed, The next frame for taking the frame again, repeats the above steps, until correction is completed in the position of all pictures.
Protection content of the invention is not limited to above embodiments.Without departing from the spirit and scope of the invention, originally Field technical staff it is conceivable that variation and advantage be all included in the present invention, and with appended claims be protect Protect range.

Claims (3)

  1. A kind of antidote 1. example of transmission electron microscope based on intelligent algorithm drifts about, which is characterized in that this method Comprising the following specific steps
    Step 1: operation transmission electron microscope, adjust focal length enable transmission electron microscope clearly to sample at The picture of picture, sample is most clearly shown on display by external charge coupled cell, and the picture size of imaging is m × n;With According to the region M × N for being less than or equal to picture size is selected in formed picture, selected areas is used as image template at family;
    Step 2: according to the region of selection, extract gray value using algorithm, i.e., to selected areas from the upper left corner to the lower right corner line by line It records gray value and stores into memory, and the gray value to record at this time is data template;
    Step 3: setting threshold value A, i.e., patient image drift or shaking maximum value;
    Step 4: selection correction mode: correction in situ or ex situ correction, it is in situ that image shift only occurs for the variation of no contrast, it is non- In situ is that there are contrast variations;
    Step 5: calculating its departure degree D;If the minimum value of departure degree D value is greater than set threshold value A, pass through control sample Product bar realizes mechanical return;If the minimum value of departure degree D value is less than set threshold value A, is realized and resetted by algorithm.
  2. The antidote 2. example of transmission electron microscope according to claim 1 based on intelligent algorithm drifts about, It is characterized in that, it is described that gray value is recorded line by line from the upper left corner to the lower right corner to selected areas, specifically: it is extracted in selected areas With (i, j) for the upper left corner, size is the gray value of the subgraph of M × N, and wherein the definition of subgraph is the picture that size is M × N, is obtained To template data T (s, t), wherein i, j are respectively cross, the ordinate that some in image is put, and s, t are count value.
  3. The antidote 3. example of transmission electron microscope according to claim 1 based on intelligent algorithm drifts about, It is characterized in that, calculating its departure degree D, specifically:
    Ex situ correction: the size of each picture is m × n;Gray value is extracted in the region that step 2 is chosen and is denoted as number According to template;Switching current image enters the shooting and storage of next frame picture, extracts in the frame figure with (i, j) as the upper left corner, Size is the gray value of the figure of M × N and stores S (x, y), and wherein x and y is the count value of subgraph;Calculate S (x, y) and template T The deviation value D (i, j) of (s, t);Then i and j successively add 1, extract and store the S (x, y) after i and j successively adds 1, and calculate i and J successively add 1 after S (x, y) and template T (s, t) deviation value D (i, j);I and j successively add 1, extract and store i and j successively adds The purpose of S (x, y) after 1 is so that with (i, j) for the upper left corner, and size is that the set of the subgraph gray value of M × N can include whole The gray value data of picture;It is all get with (i, j) be the upper left corner, size be M × N subgraph gray value in, find The minimum value of deviation value D (i, j);Whether the value of the D (i, j) of judgement at this time is greater than set threshold value A, if it is greater than the threshold value A Then realize that the mechanical return of sample extracts at this time if the value of D (i, j) at this time is less than threshold value A by driving specimen holder I, j value, and translate with (i, j) as the upper left corner, size is the subgraph image of M × N, so that its upper left position (i, j) and template The position (i, j) in the picture upper left corner is overlapped;Wherein Wherein 1≤i≤m-M+1,1≤j≤n-N+1;Switching current image enters the shooting and storage of next frame picture, repeats above-mentioned step Suddenly, until shooting is completed;
    Correction in situ: the size of each picture is m × n;Gray value is extracted in the region that step 2 is chosen and is denoted as data Template;Switching current image enters the shooting and storage of next frame picture, extracts in the frame figure with (i, j) for the upper left corner, greatly The gray value of the small figure for M × N simultaneously stores S (x, y), and wherein x and y is the count value of subgraph;Calculate S (x, y) and template T (s, T) deviation value D (i, j);Then i and j successively add 1, extract and store the S (x, y) after i and j successively adds 1, and calculate i and j according to It is secondary plus 1 after S (x, y) and template T (s, t) deviation value D (i, j);I and j successively add 1, extract and store after i and j successively adds 1 S (x, y) purpose be so that with (i, j) be the upper left corner, size be M × N subgraph gray value set can include whole The gray value data of picture;It is all get with (i, j) be the upper left corner, size be M × N subgraph gray value in, find partially Minimum value from value D (i, j);Whether the value of the D (i, j) of judgement at this time is greater than threshold value A set by step 3, if it is greater than the threshold Value A then realizes that the mechanical return of sample extracts this if the value of D (i, j) at this time is less than threshold value A by driving specimen holder When i, j value, and translate with (i, j) be the upper left corner, size be M × N subgraph image so that its upper left position (i, j) with The position (i, j) in the template picture upper left corner is overlapped;Wherein Wherein 1≤i≤m-M+1,1≤j≤n-N+1;Revised picture is saved as at this time new template, switched Current image enters the shooting and storage of next frame picture, repeats the above steps, until shooting is completed.
CN201811249520.0A 2018-10-25 2018-10-25 Example of transmission electron microscope drift antidote based on intelligent algorithm Pending CN109540946A (en)

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Application publication date: 20190329