CN109506785B - Vacuum characteristic detection device and method for infrared detector Dewar - Google Patents
Vacuum characteristic detection device and method for infrared detector Dewar Download PDFInfo
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- CN109506785B CN109506785B CN201811563095.2A CN201811563095A CN109506785B CN 109506785 B CN109506785 B CN 109506785B CN 201811563095 A CN201811563095 A CN 201811563095A CN 109506785 B CN109506785 B CN 109506785B
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- detector dewar
- puncture needle
- mass spectrometer
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- 238000001514 detection method Methods 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims description 16
- 239000005357 flat glass Substances 0.000 claims abstract description 36
- 230000003287 optical effect Effects 0.000 claims abstract description 36
- 230000000149 penetrating effect Effects 0.000 claims abstract description 5
- 238000007789 sealing Methods 0.000 claims description 33
- 230000015556 catabolic process Effects 0.000 claims description 10
- 238000006731 degradation reaction Methods 0.000 claims description 10
- 230000006866 deterioration Effects 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims 2
- 239000007789 gas Substances 0.000 description 36
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J5/068—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling parameters other than temperature
Abstract
The invention relates to a vacuum characteristic detection device of an infrared detector Dewar, which comprises: puncture needle, puncture pipeline and mass spectrometer; a channel is arranged in the puncture needle, and the puncture needle is used for penetrating through the optical window glass of the infrared detector Dewar and then is communicated with the gas in the infrared detector Dewar so as to collect the gas in the infrared detector Dewar; one end of the puncture pipeline is communicated with a passage in the puncture needle, and the other end of the puncture pipeline is communicated with the mass spectrometer and is used for conveying the gas collected by the puncture needle to the mass spectrometer; the mass spectrometer is used for detecting gas collected by a puncture needle conveyed by a puncture pipeline so as to obtain the vacuum characteristic of the infrared detector Dewar. The invention utilizes the puncture needle to penetrate the optical window glass of the infrared detector Dewar to collect the gas in the infrared detector Dewar, the collected gas is conveyed to the mass spectrometer through the puncture pipeline, and the mass spectrometer detects the collected gas, thereby directly obtaining the vacuum characteristic of the infrared detector Dewar.
Description
Technical Field
The invention relates to the technical field of infrared focal plane array detectors, in particular to a vacuum characteristic detection device and a vacuum characteristic detection method of an infrared detector dewar and a vacuum degree degradation reason detection method.
Background
For most materials of infrared focal plane array detectors (infrared detectors for short), the normal operation can be realized only by suppressing noise at low temperature, and the working temperature generally needs to be as low as 60-90K, so that the infrared detector comprises an infrared detector chip, a dewar and a refrigerator, wherein the dewar is used for maintaining a low-temperature vacuum environment.
However, during the use of the infrared detector, the vacuum degree of the dewar may be deteriorated, so that the infrared detector cannot continue to maintain the low temperature environment required for normal operation. Therefore, the vacuum degree of the dewar needs to be detected, and the detection is generally carried out by adopting a liquid nitrogen evaporation method or a method of externally connecting/internally connecting a vacuum gauge.
The liquid nitrogen evaporation method is characterized in that the heat dissipation power of a Dewar is calculated by calculating liquid nitrogen of the Dewar, the vacuum characteristic of the Dewar is indirectly evaluated, and the vacuum characteristic of the Dewar cannot be accurately and directly detected; although the external connection/internal connection vacuum gauge can directly obtain the vacuum degree of a Dewar, the external connection/internal connection vacuum gauge can cause additional influence on detection and bring potential safety hazard in the use process of the infrared detector.
Disclosure of Invention
Accordingly, there is a need for an apparatus and method for detecting vacuum characteristics of an infrared detector dewar, which can accurately, directly and safely detect the vacuum characteristics of the dewar and analyze the cause of vacuum degradation of the dewar.
A vacuum characteristic detection device of an infrared detector Dewar comprises: puncture needle, puncture pipeline and mass spectrometer; a channel is arranged in the puncture needle, and the puncture needle is used for penetrating through the optical window glass of the infrared detector Dewar and then is communicated with the gas in the infrared detector Dewar so as to collect the gas in the infrared detector Dewar; one end of the puncture pipeline is communicated with a passage in the puncture needle, and the other end of the puncture pipeline is communicated with the mass spectrometer and is used for conveying the gas collected by the puncture needle to the mass spectrometer; the mass spectrometer is used for detecting gas collected by a puncture needle conveyed by a puncture pipeline so as to obtain the vacuum characteristic of the infrared detector Dewar.
In one embodiment, the vacuum characteristic detection device of the infrared detector dewar further comprises a vacuum cover; the vacuum cover is used for covering the optical window glass of the infrared detector Dewar, and the puncture needle is arranged in the vacuum cover; a sealing valve is arranged on the vacuum cover; one end of the sealing valve is communicated with the puncture needle, and the other end of the sealing valve is positioned outside the vacuum cover and used for driving the puncture needle to penetrate through the optical window glass of the infrared detector Dewar; an air exhaust hole is formed in the sealing valve; and the puncture pipeline penetrates through the air suction hole and is communicated with the interior of the sealing valve so as to be communicated with the puncture needle.
In one embodiment, the sealing valve is screwed with the puncture needle through a thread structure.
In one embodiment, the vacuum characteristic detection device of the infrared detector dewar further comprises an air exhaust pipeline and a vacuum pump; the air exhaust pipeline is respectively communicated with the mass spectrometer and the vacuum pump, and the air exhaust pipeline is communicated with the puncture pipeline through the mass spectrometer; the vacuum pump is used for carrying out vacuum-pumping treatment on the vacuum cover.
In one embodiment, the mass spectrometer is a quadrupole mass spectrometer.
In one embodiment, the vacuum pump is a molecular pump.
In one embodiment, the apparatus for vacuum characteristic detection of an infrared detector dewar further comprises a computer device; and the computer equipment is electrically connected with the mass spectrometer and is used for receiving the detection result of the mass spectrometer, analyzing the detection result of the mass spectrometer and judging the reason of the Dewar vacuum degree degradation of the infrared detector.
A vacuum characteristic detection method of an infrared detector Dewar comprises the following steps:
baking the infrared detector Dewar;
puncturing the optical window glass of the infrared detector Dewar by a puncture needle, and collecting the gas in the infrared detector Dewar;
conveying the gas collected by the puncture needle to a mass spectrometer through a puncture pipeline;
and detecting the gas collected by the puncture needle through a mass spectrometer to obtain the vacuum characteristic of the Dewar.
In one embodiment, before puncturing the optical window glass of the infrared detector dewar by puncturing, the method further comprises:
and local thinning treatment is carried out on the optical window glass of the infrared detector Dewar to form a puncture part for puncture by a puncture needle.
In one embodiment, the method for detecting vacuum characteristics of an infrared detector dewar further comprises:
and analyzing the detection result of the mass spectrometer by computer equipment to obtain the vacuum degree degradation reason of the infrared detector Dewar.
According to the device and the method for detecting the vacuum characteristic of the infrared detector Dewar, the puncture needle penetrates through the optical window glass of the infrared detector Dewar to collect gas inside the infrared detector Dewar, the collected gas is conveyed to the mass spectrometer through the puncture pipeline, the mass spectrometer detects the collected gas, and the vacuum characteristic of the infrared detector Dewar can be directly obtained.
Drawings
FIG. 1 is a schematic diagram of an exemplary vacuum characteristic testing apparatus for an infrared detector dewar;
FIG. 2 is a schematic view of another embodiment of a vacuum characteristic testing apparatus for an infrared detector dewar;
FIG. 3 is a schematic flow chart illustrating a method for vacuum characteristic inspection of an infrared detector dewar according to one embodiment;
FIG. 4 is a schematic flow chart illustrating a method for vacuum characteristic measurement of an infrared detector dewar according to another embodiment.
Description of reference numerals:
100. the infrared detector Dewar 101, the optical window glass 210, the puncture needle 220, the puncture pipeline 230, the mass spectrometer 240, the vacuum cover 250, the sealing valve 260, the vacuum pump 270 and the air exhaust pipeline.
Detailed Description
In order that the invention may be more fully understood, reference will now be made to the following description. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
In a specific embodiment, a vacuum characteristic detecting apparatus of an infrared detector dewar, as shown in fig. 1, includes: a puncture needle 210, a puncture tube 220 and a mass spectrometer 230; a passage is arranged in the puncture needle 210, and the puncture needle is used for penetrating through the optical window glass 101 of the infrared detector Dewar 100 and then communicating with the gas in the infrared detector Dewar 101 so as to collect the gas in the infrared detector Dewar 101; one end of the puncture pipeline 220 is communicated with a passage inside the puncture needle 210, and the other end is communicated with the mass spectrometer 230, and is used for conveying the gas collected by the puncture needle 210 to the mass spectrometer 230; the mass spectrometer 230 is used for detecting the gas collected by the puncture needle 210 conveyed by the puncture pipeline 220 so as to obtain the vacuum characteristic of the infrared detector Dewar 100.
The passage formed inside the puncture needle 210 penetrates through the needle head and the needle tail of the puncture needle 210, wherein the needle head is used for puncturing the optical window glass 101 of the infrared detector Dewar 100, the needle tail is communicated with one end of the puncture pipeline 220, so that the inside of the puncture needle 210 is communicated with the inside of the puncture pipeline 220 and can pass through fluid, and the other end of the puncture pipeline 220 is communicated with the mass spectrometer 230. Before the puncture needle 210 is used to puncture and collect gas, the puncture needle 210, the puncture tube 220, and the mass spectrometer 230 need to be subjected to vacuum treatment to form a vacuum passage. When the puncture needle 210 penetrates through the optical window glass 101 of the infrared detector dewar 100, gas in the infrared detector dewar 100 flows into the puncture pipeline 220 through the puncture needle 210 and finally flows into the mass spectrometer 230, the mass spectrometer 230 can detect the gas inside the infrared detector dewar 100 collected by the puncture needle 210, and the mass spectrometer 230 analyzes the components and content of the gas, so that the vacuum characteristic of the infrared detector dewar 100 can be obtained.
According to the vacuum characteristic detection device of the infrared detector Dewar, the puncture needle 210 penetrates through the optical window glass 101 of the infrared detector Dewar 100 to collect gas inside the infrared detector Dewar 100, the collected gas is conveyed to the mass spectrometer 230 through the puncture pipeline 220, the mass spectrometer 230 detects the collected gas, and the vacuum characteristic of the infrared detector Dewar 100 can be directly obtained. Compared with a liquid nitrogen evaporation method for detection, the device can directly obtain accurate vacuum characteristics of the infrared detector Dewar 100; compared with an internal/external vacuum gauge for measuring the vacuum degree, the device is safer and does not influence the internal environment of the infrared detector Dewar 100.
In one embodiment, the vacuum characteristic detection device of the infrared detector dewar further includes a vacuum enclosure 240; the vacuum cover 240 is used for covering the optical window glass 101 of the infrared detector Dewar 100, and the puncture needle 210 is arranged inside the vacuum cover 240; the vacuum housing 240 is provided with a sealing valve 250; one end of the sealing valve 250 is communicated with the puncture needle 210, and the other end is positioned outside the vacuum cover 240 and used for driving the puncture needle 210 to penetrate through the optical window glass 101 of the infrared detector Dewar 100; the sealing valve 250 is provided with an air suction hole; the puncture tube 220 passes through the suction hole to communicate with the inside of the sealing valve 250 to communicate with the puncture needle 210.
In one embodiment, the sealing valve 250 is threadably connected to the puncture needle 210 by a threaded structure.
The sealing valve 250 has a first thread on the inner surface thereof, the puncture needle 210 has a second thread on the outer surface thereof, the sealing valve 250 and the puncture needle 210 can be screwed together by a thread structure, i.e. the first thread and the second thread, and the puncture needle 210 can be driven to advance or retreat by rotating the sealing valve 250.
In one embodiment, the apparatus for detecting vacuum characteristics of an infrared detector dewar further comprises an air exhaust pipe 270 and a vacuum pump 260; the air exhaust pipeline 270 is respectively communicated with the mass spectrometer 230 and the vacuum pump 260, and the air exhaust pipeline 270 is communicated with the puncture pipeline 220 through the mass spectrometer 230; the vacuum pump 260 is used to evacuate the vacuum enclosure 240.
The vacuum pump 260 is communicated with the mass spectrometer 230, the puncture pipeline 220, the sealing valve 250 and the puncture needle 210 through the air exhaust pipeline 270, when the puncture needle 210 is not used for puncturing the optical window glass 101 of the infrared detector Dewar 100, because the puncture needle 210 is arranged inside the vacuum cover 240, the vacuum pump 260 is communicated with the vacuum cover 240 at the moment, the vacuum pump 260 is started to vacuumize the vacuum cover 240, the vacuum cover 240 is hermetically fixed on the optical window glass 101 of the infrared detector Dewar 100, the puncture needle 210, the sealing valve 250, the puncture pipeline 220 and the mass spectrometer 230 are all vacuumized, the vacuum pump 260 is always in a working state during detection, the detection result is prevented from being influenced by external air, and the external air is prevented from entering the infrared detector Dewar 100.
In one embodiment, mass spectrometer 230 is a quadrupole mass spectrometer.
The quadrupole mass spectrometer has high analysis precision which can reach 10ppmv, namely a volume ratio of parts per million, and can accurately and effectively detect the vacuum characteristic of the infrared detector Dewar 100 even if the content of gas in the infrared detector Dewar 100 is low.
In one embodiment, the vacuum pump is a molecular pump.
The vacuum degree of the molecular pump is superior to that of the infrared detector Dewar under the normal state, and in some embodiments, the vacuum degree of the molecular pump is less than 10-5Pa。
The molecular pump has the advantages of short starting time and high compression ratio under the molecular flow state, can pump out various gases and steam, can directly influence the detection result due to the fact that whether oxygen, nitrogen, carbon dioxide and water vapor exist, and can pump out the gases influencing the result by using the molecular pump, and the realization accuracy is guaranteed.
In one embodiment, the apparatus for vacuum characteristic detection of an infrared detector dewar further comprises a computer device; the computer device is electrically connected with the mass spectrometer 230 and is used for receiving the detection result of the mass spectrometer 230, analyzing the detection result of the mass spectrometer 230 and judging the reason of the degradation of the vacuum degree of the infrared detector dewar 100.
The mass spectrometer 230 sends the result of gas detection collected by the puncture needle 210 to the computer device, and the computer device can analyze the detection result sent by the mass spectrometer 260, judge the reason for the degradation of the vacuum degree of the infrared detector dewar 100, and better improve the infrared detector dewar 100 to improve the service life of the infrared detector dewar 100.
The computer device may be, but is not limited to, a server, a computer, or the like capable of processing and analyzing data.
In one specific embodiment, a method for detecting vacuum characteristics of an infrared detector dewar comprises the following steps:
and step 310, baking the infrared detector du 100.
The infrared detector dewar 100 to be analyzed is pre-baked to sufficiently activate the gas and water vapor inside the infrared detector dewar 100, and in some embodiments, the baking temperature is 105 ℃ and the baking time is 24 hours.
And 320, puncturing the optical window glass 101 of the infrared detector Dewar 100 through the puncture needle 210 to collect gas in the infrared detector Dewar 100.
Before collection, puncture needle 210, puncture tube 220 and mass spectrometer 230 are vacuumized, and in some embodiments, vacuum degree of puncture needle 210, puncture tube 220 and mass spectrometer 230 is less than 10-5Pa. In some embodiments, the apparatus for detecting vacuum characteristics of a dewar of an infrared detector further comprises a vacuum cover 240 and a sealing valve 250, wherein the vacuum cover 240, the sealing valve 250, the puncture needle 210, the puncture tube 220 and the mass spectrometer 230 are subjected to vacuum pumping treatment, and the vacuum degree is less than 10-5Pa。
Because the paths of the puncture needle 210, the puncture pipeline 220 and the mass spectrometer 230 are vacuumized, when the puncture needle 210 punctures the infrared detector Dewar 100, the gas pressure difference is formed due to different vacuum degrees, and the gas in the infrared detector Dewar 100 is passed through the puncture needle and finally introduced into the mass spectrometer 230.
In step 330, the gas collected by the puncture needle 210 is transported to the mass spectrometer through the puncture tube 220.
The gas inside the infrared detector dewar 100 passes through the puncture needle 210 and the puncture pipeline 220 and is introduced into the mass spectrometer 230, and the mass spectrometer 230 detects the introduced gas.
In step 340, the gas collected by the puncture needle 210 is detected by the mass spectrometer 230, and the vacuum characteristic of the infrared detector dewar 100 is obtained.
The mass spectrometer 230 can detect the components and the contents of the components of the gas collected by the puncture needle 210, thereby obtaining the vacuum characteristics of the infrared detector dewar.
In one embodiment, before puncturing the optical window glass of the infrared detector dewar by puncturing, the method further comprises:
the optical window glass 101 of the infrared detector dewar 100 is locally thinned to form a piercing part for piercing by the piercing needle 210.
The optical window glass 101 is subjected to local thinning treatment in advance to form a puncturing part, so that the puncturing part 210 can conveniently puncture, and the optical window glass 101 is prevented from being broken in the puncturing process due to the fact that the optical window glass 101 is too thick.
In one embodiment, the method for detecting vacuum characteristics of an infrared detector dewar further comprises:
and 350, analyzing the detection result of the mass spectrometer through computer equipment, and judging the reason of the vacuum degree degradation of the infrared detector Dewar.
If the gas collected by the puncture needle 210 contains nitrogen and oxygen components, the reason for the deterioration of the vacuum degree is leakage of the dewar; if the gas collected by the puncture needle 210 contains water vapor and carbon dioxide, the vacuum degree is deteriorated because the dewar inner material is deflated.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A vacuum characteristic detection device of an infrared detector Dewar is characterized by comprising: puncture needle, puncture pipeline and mass spectrometer;
a channel is formed in the puncture needle, and the puncture needle is used for penetrating through optical window glass of an infrared detector Dewar and then is communicated with gas in the infrared detector Dewar so as to collect the gas in the infrared detector Dewar;
one end of the puncture pipeline is communicated with a passage inside the puncture needle, and the other end of the puncture pipeline is communicated with the mass spectrometer and is used for conveying the gas collected by the puncture needle to the mass spectrometer;
the mass spectrometer is used for detecting the gas collected by the puncture needle conveyed by the puncture pipeline and analyzing the components and the content of the gas collected by the puncture needle so as to obtain the vacuum characteristic of the infrared detector Dewar and the reason of the degradation of the vacuum degree of the infrared detector Dewar.
2. The infrared detector dewar vacuum characteristic detecting device according to claim 1, further comprising a vacuum cover;
the vacuum cover is used for covering the optical window glass of the infrared detector Dewar, and the puncture needle is arranged in the vacuum cover;
a sealing valve is arranged on the vacuum cover;
one end of the sealing valve is communicated with the puncture needle, and the other end of the sealing valve is positioned outside the vacuum cover and used for driving the puncture needle to penetrate through the optical window glass of the infrared detector Dewar;
an air suction hole is formed in the sealing valve;
the puncture pipeline penetrates through the air suction hole and is communicated with the interior of the sealing valve so as to be communicated with the puncture needle.
3. The infrared detector dewar vacuum characteristic detecting device as claimed in claim 2, wherein said sealing valve and said puncture needle are screwed by a screw structure.
4. The apparatus for detecting vacuum characteristics of an infrared detector dewar according to any one of claims 2 or 3, further comprising an air exhaust duct and a vacuum pump;
the air extraction pipeline is respectively communicated with the mass spectrometer and the vacuum pump, and the air extraction pipeline is communicated with the puncture pipeline through the mass spectrometer;
the vacuum pump is used for vacuumizing the vacuum cover.
5. The infrared detector dewar vacuum property detecting device as claimed in claim 1, wherein the mass spectrometer is a quadrupole mass spectrometer.
6. The apparatus of claim 4, wherein the vacuum pump is a molecular pump.
7. The infrared detector dewar vacuum characteristic detecting apparatus according to claim 4, further comprising a computer device;
and the computer equipment is electrically connected with the mass spectrometer and is used for receiving the detection result of the mass spectrometer, analyzing the detection result of the mass spectrometer and judging the reason of the infrared detector Dewar vacuum degree deterioration.
8. A vacuum characteristic detection method of an infrared detector Dewar is characterized by comprising the following steps:
baking the infrared detector Dewar;
puncturing the optical window glass of the infrared detector Dewar by a puncture needle, and collecting gas in the infrared detector Dewar;
conveying the gas collected by the puncture needle to a mass spectrometer through a puncture pipeline;
and detecting the gas collected by the puncture needle through the mass spectrometer, and analyzing the components and the content of the gas collected by the puncture needle to obtain the vacuum characteristic of the infrared detector Dewar and the reason of the degradation of the vacuum degree of the infrared detector Dewar.
9. The method of claim 8, wherein prior to piercing the optical window glass of the infrared detector dewar by the piercing, further comprising:
and locally thinning the optical window glass of the infrared detector Dewar to form a puncture part for the puncture needle to puncture.
10. The method for detecting vacuum characteristics of an infrared detector dewar according to any one of claims 8 or 9, further comprising:
and analyzing the detection result of the mass spectrometer through computer equipment to obtain the reason for the degradation of the vacuum degree of the infrared detector Dewar.
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Address after: 511300 No.78, west of Zhucun Avenue, Zhucun street, Zengcheng District, Guangzhou City, Guangdong Province Applicant after: CHINA ELECTRONIC PRODUCT RELIABILITY AND ENVIRONMENTAL TESTING RESEARCH INSTITUTE ((THE FIFTH ELECTRONIC RESEARCH INSTITUTE OF MIIT)(CEPREI LABORATORY)) Address before: 510610 No. 110 Zhuang Road, Tianhe District, Guangdong, Guangzhou, Dongguan Applicant before: CHINA ELECTRONIC PRODUCT RELIABILITY AND ENVIRONMENTAL TESTING RESEARCH INSTITUTE ((THE FIFTH ELECTRONIC RESEARCH INSTITUTE OF MIIT)(CEPREI LABORATORY)) |
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