CN109487215B - High-precision metal mask plate and manufacturing method thereof - Google Patents
High-precision metal mask plate and manufacturing method thereof Download PDFInfo
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- CN109487215B CN109487215B CN201811588621.0A CN201811588621A CN109487215B CN 109487215 B CN109487215 B CN 109487215B CN 201811588621 A CN201811588621 A CN 201811588621A CN 109487215 B CN109487215 B CN 109487215B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to the technical field of display, in particular to a high-precision metal mask plate and a manufacturing method thereof, wherein the mask plate comprises a mounting frame, a mask strip, a shielding strip and a supporting strip; the support bars are perpendicular to the mask bars and the shielding bars, and two ends of the support bars are welded on the mounting frame; the shielding strip is arranged on the supporting strip and comprises a shielding part and a connecting part, the shielding part is of a U-shaped groove body structure, a notch of the shielding part is arranged upwards, and the connecting part is welded on the mounting frame; the mask strip includes mask portion and welding portion, and mask portion is "U" cell body structure, and the notch of mask portion sets up downwards, and mask portion connects to stride to locate on the shielding portion of two adjacent shielding strips, and mask portion's both sides wall respectively with two corresponding lateral walls lock joint of adjacent shielding portion, welding portion is used for installing frame welded fastening. In this scheme, shielding plate and mask strip set up the lock joint structure laminating inseparable, can improve product evaporation coating yield, reduction in production cost.
Description
Technical Field
The invention relates to the technical field of display, in particular to a high-precision metal mask plate and a manufacturing method thereof.
Background
The current mature preparation process of AMOLED is an organic vacuum evaporation process, and one important process in the organic vacuum evaporation process is an FMM process. And defining an evaporation area by utilizing a metal mask plate, and manufacturing an organic film layer. The important point of the FMM process is that the mask strip and the shielding strip are required to be closely attached to prevent organic steam from penetrating into the gaps to cause color mixing.
At present, the mask strip and the shielding strip are stretched and tensioned firstly in the manufacturing process of the mask plate, and then welded on the mounting frame, so that the mask strip and the shielding plate are tightly attached with higher parallelism. In general, when manufacturing a high-precision metal mask plate, welding a shielding strip, then welding a supporting strip above the shielding strip, and finally welding a mask strip above the supporting strip, so as to ensure the overall flatness of the FMM after welding. Because the rigidity of the support bar and the mask bar is insufficient, the support bar and the mask bar are easy to collapse in the use process, if the tension degree or the flatness of the support bar or the mask bar is abnormal, gaps can appear at the joint of the support bar or the mask bar and the mask bar, organic steam can be dissipated from the gaps, abnormal color mixing is caused, the yield of products is reduced, and the production cost is obviously increased.
Disclosure of Invention
Therefore, a high-precision metal mask plate and a manufacturing method thereof are needed to solve the problems that in the prior art, a supporting strip of the mask plate and a joint of the mask strip are easy to collapse, gaps are easy to appear at joint positions of the supporting strip and the mask strip, organic steam can be dissipated from the gaps, abnormal color mixing is caused, the yield of products is reduced, and the production cost is high.
In order to achieve the above object, the present inventors provide a high-precision metal mask plate, which includes a mounting frame, a mask bar, a shielding bar, and a support bar;
the support bars are perpendicular to the mask bars and the shielding bars, and two ends of the support bars are welded on the mounting frame;
the shielding strip is arranged on a supporting strip, the supporting strip is used for supporting the shielding strip, the shielding strip comprises a shielding part and a connecting part, the shielding part is of a U-shaped groove body structure, the groove depth of the shielding part is d1, a notch of the shielding part is arranged upwards, and the connecting part is welded on the mounting frame;
the mask strip comprises a mask part and a welding part, wherein the mask part is of a U-shaped groove body structure, the groove depth of the mask part is d2, d2 is more than d1, the notch of the mask part is arranged downwards, the mask part is connected and spanned on shielding parts of two adjacent shielding strips, two side walls of the mask part are respectively buckled with two corresponding side walls of the two adjacent shielding parts, and the welding part is used for welding and fixing the mounting frame.
As a preferable structure of the invention, the side wall of the inner frame welded with the shielding strip is provided with the clamping ring, a plurality of clamping rings are correspondingly arranged on the opposite side wall, and the connecting part of the shielding strip passes through the clamping ring from bottom to top and is welded on the upper surface of the mounting frame.
As an optimal structure of the invention, the side wall of the inner frame welded with the mounting frame and the supporting bars is provided with the clamping rings, the clamping rings are correspondingly arranged on the opposite side walls, and the two ends of the supporting bars respectively pass through the clamping rings from bottom to top and are welded on the upper surface of the mounting frame.
As a preferable structure of the present invention, the distance d3 from the lower edge of the snap ring to the upper surface of the mounting frame is d3=d2.
As a preferable structure of the invention, the mask strip, the shielding strip, the support strip and the mounting frame are fixed by laser welding.
Further, the inventor also provides a manufacturing method of the high-precision metal mask plate, which comprises the following steps:
providing a mounting frame formed with an evaporation zone;
welding a support bar on the mounting frame;
set up the shielding strip on the support bar, specifically include: the U-shaped groove body structure is characterized in that a notch of a shielding part with the groove depth d1 faces upwards, and the U-shaped groove body structure is welded with the mounting frame through connecting parts at two ends of the shielding part;
mask strips are arranged on the shielding strips, and the method specifically comprises the following steps: the U-shaped groove body structure is characterized in that a notch of a mask part with the depth d2 is downward, d2 is larger than d1, the mask part is welded with the mounting frame through welding parts at two ends of the shielding part, and the mask part is connected and straddled on shielding parts of two adjacent shielding strips, so that two side walls of the mask part are respectively buckled with two corresponding side walls of the adjacent shielding parts;
wherein the support bar is perpendicular to the mask bar and the shielding bar.
Further, before the step of arranging the shielding strip on the supporting strip, the method further comprises the following steps:
and bending the rectangular metal strip along two sides to form a U-shaped groove body structure, wherein the bending width is d1, and cutting four rectangular corners of the rectangular metal strip along a bending line to form a shielding strip.
Further, before the mask strip is disposed on the shielding strip, the method further includes:
and bending the rectangular metal strip along two sides to form a U-shaped groove body structure, wherein the bending width is d2, and cutting four rectangular corners of the rectangular metal strip along a bending line to form a mask strip.
Further, "welding support bars on mounting frame" is specifically: the two ends of the supporting bar pass through the clamping ring from bottom to top, and the two ends of the supporting bar are stretched outwards to be tensioned and then welded on the mounting frame;
or alternatively, the first and second heat exchangers may be,
the welding between the two ends of the shielding part and the mounting frame is specifically as follows: connecting parts at two ends of the shielding strip penetrate through the clamping ring from bottom to top, and the connecting parts are stretched outwards to be tensioned and then welded on the mounting frame.
Further, the distance d3 from the lower edge of the clamping ring to the upper surface of the mounting frame is the same as the groove depth d2 of the mask portion.
Compared with the prior art, the technical scheme has the following advantages: the shielding strip comprises a shielding part and a connecting part, the shielding part is arranged into a U-shaped groove body structure and is welded and fixed with the mounting frame through the connecting part, the shielding strip comprises a shielding plate part and a welding part, the shielding plate part is arranged into the U-shaped groove body structure and is welded and fixed with the mounting frame through the welding part, the rigidity of the shielding strip and the shielding strip is improved through changing the structures of the shielding strip and the shielding strip, the collapse risk of the shielding strip and the shielding strip after the shielding strip and the shielding strip are mounted is reduced, in addition, the shielding part is connected and straddled on the shielding parts of two adjacent shielding strips, the two side walls of the shielding part are respectively buckled with the two corresponding side walls of the adjacent shielding parts, the groove depth of the shielding part is ensured to be larger than that of the shielding part, the shielding plate and the shielding strip are arranged into the buckling structure, the shielding plate and the shielding strip are tightly attached, the shielding strip and the shielding strip or the supporting strip are enabled to appear, the shielding strip and the collapse position is not sunk along with the shielding strip, and gaps are not generated.
Drawings
FIG. 1 is a schematic diagram of a high-precision metal mask in an oblique view according to an embodiment of the present invention;
FIG. 2 is a schematic perspective view of an embodiment of a mounting frame for a high precision metal mask plate according to the present invention;
FIG. 3 is a schematic view, partially in section, of one embodiment of a mounting frame for a high precision metal mask in accordance with the present invention;
FIG. 4 is a schematic perspective view of an embodiment of a masking strip for a high precision metal mask in accordance with the present invention;
FIG. 5 is a schematic view of a manufacturing process of a shielding strip of a high-precision metal mask plate according to the present invention;
FIG. 6 is a schematic diagram illustrating a high-precision metal mask strip according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of a mask strip manufacturing process of a high-precision metal mask plate according to the present invention;
FIG. 8 is a schematic diagram illustrating the cooperation of a support bar and a mounting frame of an embodiment of a high-precision metal mask according to the present invention;
FIG. 9 is a schematic diagram illustrating the cooperation of a support bar, a mounting frame, and a shielding bar according to an embodiment of the present invention;
FIG. 10 is a schematic diagram of a high precision metal mask masking strip and masking strip combination according to the present invention;
FIG. 11 is a flow chart of a method of manufacturing a high precision metal mask plate according to the present invention.
Reference numerals illustrate:
100. a mounting frame;
200. mask strips; 210. a mask portion; 220. a welding part;
300. a shielding strip; 310. a shielding part; 320. a connection part;
400. a support bar;
500. a clasp;
Detailed Description
In order to describe the technical content, constructional features, achieved objects and effects of the technical solution in detail, the following description is made in connection with the specific embodiments in conjunction with the accompanying drawings.
Referring to fig. 1 to 9, the present invention provides a high-precision metal mask plate, wherein the mask plate is used in an OLED vacuum evaporation process, and an evaporation material is evaporated at a high temperature and deposited on a back plate glass through evaporation holes on the mask plate, so as to finally form an organic film for realizing OLED luminescence. Specifically, the mask plate includes a mounting frame 100, a mask bar 200, a shielding bar 300 and a supporting bar 400;
as shown in fig. 8, the support bar 400 is disposed perpendicular to the mask bar 200 and the shielding bar 300, and both ends of the support bar 400 are welded to the mounting frame 100;
as shown in fig. 4 and 9, the shielding strip 300 is disposed on a supporting strip 400, the supporting strip 400 is used for supporting the shielding strip 300, the shielding strip 300 includes a shielding portion 310 and a connecting portion 320, the shielding portion 310 has a "u" groove body structure, the depth of the groove is d1, the notch of the shielding portion 310 is disposed upward, and the connecting portion 320 is welded on the mounting frame 100;
as shown in fig. 1 and 6, the mask bar 200 includes a mask portion 210 and a welding portion 220, the mask portion 210 is in a "u" groove structure, the depth of the groove is d2, and d2 > d1, the notch of the mask portion 210 is disposed downward, the mask portion 210 is connected to and spans the shielding portions 310 of two adjacent shielding bars 300, two side walls of the mask portion 210 are respectively fastened to two corresponding side walls of the adjacent shielding portions 310, and the welding portion 220 is used for welding and fixing the mounting frame 100.
The mounting frame 100 is used as a main body bearing mechanism of the mask plate, and is used for mounting the mask strip 200, the shielding strip 300 and the supporting strip 400, and is arranged above an evaporation source in actual use, organic materials in the evaporation source are heated and evaporated to pass through evaporation holes in the mask strip 200, and the evaporation materials escaping from the evaporation holes are deposited on the back plate glass to form an organic film. The mask plate generally comprises 1 mask bar 200, and the mask bars 200 are mutually spliced to form a pattern of the mask plate. The shielding strips 300 are arranged at the mutually spliced positions of the mask strips 200, and the shielding strips 300 are arranged parallel to the mask strips 200 and are used for playing a role in shielding so as to prevent evaporation materials from penetrating from the spliced positions during evaporation; the support bar 400 is used for supporting the shielding bar 300 in the present embodiment, and the shielding bar 300 is used for supporting the mask bar 200, which has the following functions: firstly, deformation of evaporation holes caused by sagging of the mask strips 200 is avoided; second, the problem of uneven color mixing of the panel occurs by preventing the shadow strip 300 from sagging to cause gaps at the joint of the shadow strip and the mask strip 200. The invention aims to protect the supporting strips, the shielding strips and the clamping connection structures of the mutually matched masking strips, and in the embodiment shown in fig. 1, the masking plate is only provided with one masking strip structure to form the masking plate, the protection scope of the invention is not limited, and the number of masking strips in actual production needs to be properly selected according to the size of the masking plate.
Referring to fig. 1, 4, 6 and 10, in this embodiment, the shielding strip 300 includes a shielding portion 310 and a connecting portion 320, the shielding portion 310 is in a "U" shaped groove structure and is welded with the mounting frame 100 through the connecting portion 320, the mask strip 200 includes a mask portion 210 and a welding portion 220, the mask portion 210 is in a "U" shaped groove structure and is welded with the mounting frame 100 through the welding portion 220, and the shielding strip 300 and the mask strip 200 are configured into the above structure, so that the rigidity of the shielding strip 300 and the mask strip 200 is improved, and the risk of collapse after the shielding strip and the mask strip 200 are mounted is reduced. Meanwhile, the notch of the shielding part 310 of the U-shaped groove body structure in the shielding strip 300 is upwards arranged, the notch of the shielding part 210 of the U-shaped groove body structure in the mask strip 200 is downwards arranged to be of a -shaped structure, the shielding parts 210 are connected and spanned on the shielding parts 310 of the two adjacent shielding strips 300, two side walls of the shielding parts 210 are respectively buckled with two corresponding side walls of the two adjacent shielding strips 310, the shielding plates and the mask strip 200 are arranged to be of the buckling structures, the shielding plates and the mask strip 200 can be tightly attached, the depth d2 of the shielding parts 210 is ensured to be larger than the depth d1 of the shielding parts 310, so that the mask strip 200, the shielding strip 300 or the supporting strip 400 collapses, the mask strip 200 can sink along with the shielding strip 300, gaps can not appear at the attaching positions of the shielding strips 300, the product yield is improved, and the production cost is reduced.
Referring to fig. 2 and 8, as a preferred embodiment of the present invention, the inner frame side wall of the mounting frame 100 welded to the shielding strip 300 is provided with a snap ring 500, a plurality of snap rings 500 are correspondingly disposed on opposite side walls, and the connecting portion 320 of the shielding strip 300 passes through the snap ring 500 from bottom to top and is welded to the upper surface of the mounting frame 100. The setting of snap ring 500 makes things convenient for counterpoint setting of shielding strip 300 more, sets up corresponding snap ring 500 on the relative lateral wall of the inside casing of installing frame 100 earlier, can guarantee shielding strip 300 fixed-position welding's accuracy to when shielding strip 300 installs, make shielding strip 300 left and right sides connecting portion 320 pass snap ring 500 from the bottom up by the portion and then weld on installing frame 100 upper surface, snap ring 500 also can play limiting displacement, prevents that the condition of shifting from appearing in the use of mask plate, thereby influences the evaporation effect of panel.
Referring to fig. 2 and 9, as a preferred embodiment of the present invention, the side walls of the inner frame welded to the mounting frame 100 and the supporting bars 400 are provided with snap rings 500, a plurality of snap rings 500 are correspondingly disposed on the opposite side walls, and two ends of the supporting bars 400 respectively pass through the snap rings 500 from bottom to top and are welded to the upper surface of the mounting frame 100. The setting of snap ring 500 makes things convenient for the counterpoint setting of support bar 400 more, sets up corresponding snap ring 500 on the relative lateral wall of the inside casing of installing frame 100 earlier, can guarantee support bar 400 fixed-position welding's accuracy to when support bar 400 installs, make the both ends of support bar 400 pass snap ring 500 from bottom to top and weld on installing frame 100 upper surface afterwards, under the spacing effect of snap ring 500 and welded part, prevent support bar 400 difficult emergence shift or the condition of sinking in the use, guaranteed the evaporation coating effect of panel. In addition, a snap ring 500 is provided on the inner frame of the installation frame 100, and the barrier rib 300 is conveniently controlled to be vertically disposed above the support bar 400 at the time of assembly.
In the embodiment shown in fig. 1 to 3, the distance d3 from the lower edge of the snap ring 500 to the upper surface of the mounting frame 100 is d3=d2. In this embodiment, the distance d3 from the lower edge of the collar 500 to the upper surface of the mounting frame 100 is the same as the groove depth d2 of the mask portion 210 in the mask strip 200, so that when the mask strip 200 is welded on the mounting frame 100, the mask strip 200 and the mounting frame 100 can be kept at the same level, thereby ensuring the flatness of the mask strip 200 and performing the vapor deposition effect of the mask plate.
In a further embodiment, referring to fig. 1 and 11, the present inventors also provide a method for manufacturing a high-precision metal mask, the method comprising the following steps:
s100, providing a mounting frame with an evaporation zone; the mounting frame is of a hollow structure, and the hollow area is used as an evaporation area.
S200, welding support bars on the mounting frame;
s300, a shielding strip is arranged on the supporting strip, and the method specifically comprises the following steps: the U-shaped groove body structure is characterized in that a notch of a shielding part with the groove depth d1 faces upwards, and the U-shaped groove body structure is welded with the mounting frame through connecting parts at two ends of the shielding part;
s400, setting a mask strip on the shielding strip, specifically comprising: the U-shaped groove body structure is characterized in that a notch of a mask part with the depth d2 is downward, d2 is larger than d1, the mask part is welded with the mounting frame through welding parts at two ends of the shielding part, and the mask part is connected and straddled on shielding parts of two adjacent shielding strips, so that two side walls of the mask part are respectively buckled with two corresponding side walls of the adjacent shielding parts;
wherein the support bar is perpendicular to the mask bar and the shielding bar.
In the method for manufacturing the metal mask plate, the supporting bars, the shielding bars and the mask bars are welded on the mounting frame from bottom to top in sequence, the supporting bars are perpendicular to the shielding bars and the mask bars, the notch of the shielding part of the U-shaped groove body structure in the shielding bars is upward, the notch of the mask part of the U-shaped groove body structure in the mask bars is downward, the mask parts are connected and spanned on the shielding parts of the adjacent two shielding bars, the two side walls of the mask parts are respectively buckled with the two corresponding side walls of the adjacent shielding parts, the shielding plates and the mask bars are arranged into the buckling structures, the two can be tightly attached, the groove depth d2 of the mask parts is larger than the groove depth d1 of the shielding parts, so that the mask bars, the shielding bars or the supporting bars collapse, the mask bars can sink along with the shielding bars, gaps can not appear at the attaching positions of the two shielding bars, the product yield is improved, and the production cost is reduced. In the manufacturing method, the mask strip and the shielding strip are required to form an up-down buckling structure, so that the support strip originally positioned between the shielding strip and the mask strip is required to be welded at the lowest part to play a supporting role.
Further, before the step of arranging the shielding strip on the supporting strip, the method further comprises the following steps:
as shown in FIG. 5, the U-shaped groove structure is formed by bending along two sides of the rectangular metal strip, the bending width is d1, and four rectangular corners of the rectangular metal strip are cut off along bending lines (broken lines in the drawing) to form the shielding strip. The manufacturing method is simple and quick, the bending width of the two sides of the rectangular metal strip is d1, and the groove depth of the U-shaped groove body formed by the rectangular metal strip can be d1. As shown in fig. 7, the method further includes, before the step of disposing the mask bar on the barrier bar: and bending the rectangular metal strip along two sides to form a U-shaped groove body structure, wherein the bending width is d2, and cutting four rectangular corners of the rectangular metal strip along bending lines (shown by dotted lines in the figure) to form a mask strip. Preferably, the bending angles of the two sides of the rectangular metal strip for manufacturing the shielding strip and the mask strip can be 89 degrees, so that the shielding part and the mask part are buckled more conveniently and smoothly.
Referring to fig. 2, 8 and 9, in a further embodiment, the "welding support bar on mounting frame" is specifically: the two ends of the supporting bar pass through the clamping ring from bottom to top, and the two ends of the supporting bar are stretched outwards to be tensioned and then welded on the mounting frame; the welding between the two ends of the shielding part and the mounting frame is specifically as follows: connecting parts at two ends of the shielding strip penetrate through the clamping ring from bottom to top, and the connecting parts are stretched outwards to be tensioned and then welded on the mounting frame. By adopting the manufacturing method, the clamping ring is arranged on the existing mounting frame, so that the positioning of the supporting bar and the shielding bar is facilitated, meanwhile, the two ends of the supporting bar and the shielding bar firstly penetrate through the clamping ring, then are fixed on the mounting frame after being tensioned outwards, and the welding efficiency is higher. And meanwhile, under the limiting action of the clamping ring, the shielding part of the shielding strip can be prevented from being deformed.
It should be noted that, although the foregoing embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concepts of the present invention, alterations and modifications to the embodiments described herein, or equivalent structures or equivalent flow transformations made by the present description and drawings, apply the above technical solutions directly or indirectly to other relevant technical fields, all of which are included in the scope of protection of the present patent.
Claims (10)
1. The high-precision metal mask plate is characterized by comprising a mounting frame, mask strips, shielding strips and supporting strips;
the support bars are perpendicular to the mask bars and the shielding bars, and two ends of the support bars are welded on the mounting frame;
the shielding strip is arranged on a supporting strip, the supporting strip is used for supporting the shielding strip, the shielding strip comprises a shielding part and a connecting part, the shielding part is of a U-shaped groove body structure, the groove depth of the shielding part is d1, a notch of the shielding part is arranged upwards, and the connecting part is welded on the mounting frame;
the mask strip comprises a mask part and a welding part, wherein the mask part is of a U-shaped groove body structure, the groove depth of the mask part is d2, d2 is larger than d1, the notch of the mask part is downwards arranged, the mask part is arranged on the shielding parts of the two adjacent shielding strips in a crossing mode, two side walls of the mask part are respectively buckled with corresponding side walls of the adjacent shielding parts, two inner side walls of the mask part are respectively tightly attached to the side walls of the corresponding shielding parts, and the welding part is used for welding and fixing the installation frame.
2. The high-precision metal mask plate according to claim 1, wherein the mounting frame and the shielding strips are welded, the side walls of the inner frame are provided with clamping rings, the clamping rings are correspondingly arranged on the opposite side walls, and the connecting parts of the shielding strips penetrate through the clamping rings from bottom to top and are welded on the upper surface of the mounting frame.
3. The high-precision metal mask plate according to claim 1 or 2, wherein the mounting frame and the supporting bars are welded, clamping rings are arranged on the side walls of the inner frame, a plurality of clamping rings are correspondingly arranged on the opposite side walls, and two ends of the supporting bars respectively penetrate through the clamping rings from bottom to top and are welded on the upper surface of the mounting frame.
4. A high precision metal mask plate according to claim 3, wherein the distance d3 from the lower edge of the snap ring to the upper surface of the mounting frame is d3=d2.
5. The high precision metal mask plate according to claim 1, wherein the mask strips, the shielding strips and the support strips are fixed with the mounting frame by laser welding.
6. The manufacturing method of the high-precision metal mask plate is characterized by comprising the following steps of:
providing a mounting frame formed with an evaporation zone;
welding a support bar on the mounting frame;
set up the shielding strip on the support bar, specifically include: the U-shaped groove body structure is characterized in that a notch of a shielding part with the groove depth d1 faces upwards, and the U-shaped groove body structure is welded with the mounting frame through connecting parts at two ends of the shielding part;
mask strips are arranged on the shielding strips, and the method specifically comprises the following steps: the U-shaped groove body structure is characterized in that a notch of a mask part with the depth d2 is downward, d2 is larger than d1, the mask part is welded with the mounting frame through welding parts at two ends of the mask part, and the mask part is arranged on shielding parts of two adjacent shielding strips in a crossing manner, so that two side walls of the mask part are respectively buckled with corresponding side walls of the adjacent shielding parts; the two inner side walls of the mask part are respectively and tightly attached to the side walls of the corresponding shielding part; wherein the support bar is perpendicular to the mask bar and the shielding bar.
7. The method of manufacturing a high-precision metal mask plate according to claim 6, wherein the step of disposing a shielding strip on the supporting strip further comprises, before:
and bending the rectangular metal strip along two sides to form a U-shaped groove body structure, wherein the bending width is d1, and cutting four rectangular corners of the rectangular metal strip along a bending line to form a shielding strip.
8. The method for manufacturing a high-precision metal mask plate according to claim 6, wherein before the step of disposing the mask bar on the barrier bar, further comprises:
and bending the rectangular metal strip along two sides to form a U-shaped groove body structure, wherein the bending width is d2, and cutting four rectangular corners of the rectangular metal strip along a bending line to form a mask strip.
9. The method of manufacturing a high-precision metal mask plate according to claim 6, wherein the "welding support bar on mounting frame" is specifically: the two ends of the supporting bar pass through the clamping ring from bottom to top, and the two ends of the supporting bar are stretched outwards to be tensioned and then welded on the mounting frame; the welding between the two ends of the shielding part and the mounting frame is specifically as follows: connecting parts at two ends of the shielding strip penetrate through the clamping ring from bottom to top, and the connecting parts are stretched outwards to be tensioned and then welded on the mounting frame.
10. The method of manufacturing a high-precision metal mask plate according to claim 9, wherein a distance d3 from the lower edge of the retainer ring to the upper surface of the mounting frame is the same as a groove depth d2 of the mask portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811588621.0A CN109487215B (en) | 2018-12-25 | 2018-12-25 | High-precision metal mask plate and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811588621.0A CN109487215B (en) | 2018-12-25 | 2018-12-25 | High-precision metal mask plate and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109487215A CN109487215A (en) | 2019-03-19 |
| CN109487215B true CN109487215B (en) | 2023-08-01 |
Family
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| CN110846614B (en) * | 2019-11-21 | 2022-03-25 | 昆山国显光电有限公司 | Mask and evaporation system |
| CN112080720A (en) * | 2020-08-12 | 2020-12-15 | 福建华佳彩有限公司 | Support bar, OLED evaporation mask plate and manufacturing method thereof |
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| CN102841501A (en) * | 2012-09-12 | 2012-12-26 | 深圳市华星光电技术有限公司 | Mask and manufacturing method thereof |
| CN105039907A (en) * | 2015-09-22 | 2015-11-11 | 深圳市华星光电技术有限公司 | Fixing assembly for mask plate |
| CN105951042A (en) * | 2016-07-01 | 2016-09-21 | 京东方科技集团股份有限公司 | Mask plate and manufacturing method thereof |
| CN206270648U (en) * | 2016-11-23 | 2017-06-20 | 信利（惠州）智能显示有限公司 | Mask supporting construction |
| CN108034923A (en) * | 2018-01-24 | 2018-05-15 | 武汉华星光电半导体显示技术有限公司 | Mask assembly, mask frame and mask support frame |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102841501A (en) * | 2012-09-12 | 2012-12-26 | 深圳市华星光电技术有限公司 | Mask and manufacturing method thereof |
| CN105039907A (en) * | 2015-09-22 | 2015-11-11 | 深圳市华星光电技术有限公司 | Fixing assembly for mask plate |
| CN105951042A (en) * | 2016-07-01 | 2016-09-21 | 京东方科技集团股份有限公司 | Mask plate and manufacturing method thereof |
| CN206270648U (en) * | 2016-11-23 | 2017-06-20 | 信利（惠州）智能显示有限公司 | Mask supporting construction |
| CN108034923A (en) * | 2018-01-24 | 2018-05-15 | 武汉华星光电半导体显示技术有限公司 | Mask assembly, mask frame and mask support frame |
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