CN109472748A - The brightness of image bearing calibration extracted based on nano particle SEM image brightness - Google Patents
The brightness of image bearing calibration extracted based on nano particle SEM image brightness Download PDFInfo
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Abstract
The present invention is based on the brightness of image bearing calibrations that nano particle SEM image brightness is extracted, it is related to general image real time transfer, this method is to carry out whole brightness based on nano particle SEM image to extract and then be corrected the uneven brightness of the image whole region, there is high brightness in some boundary part region especially in nano particle SEM image, and in the case where there is darker brightness in its another boundary part region, show the average brightness of each pixel of nano particle SEM image, and realize the whole region brightness uniformity of nano particle SEM image, it overcomes since high brightness and darker brightness often respectively appear in image difference peripheral boundary in nano particle SEM image, the prior art then cannot achieve nano particle SEM image peripheral limit part and carry out interpolation, cause gained The defect of the brightness irregularities of the nano particle SEM image arrived.
Description
Technical field
Technical solution of the present invention is related to general image real time transfer, is specifically based on nano particle SEM image
The brightness of image bearing calibration that brightness is extracted.
Background technique
In scanning electron microscope (English is Scanning Electron Microscope, below abbreviation SEM)
Electron beam accelerates through overvoltage, is acted on by magnetic lenses convergence and scanning coil, observes sample using secondary electron signal imaging
The configuration of surface of product has reached nanoscale ultrahigh resolution, is widely used in medicine, biology and material subjects
Microcosmic research field.
Cause filament to deviate and swing since Electronic Speculum works long hours, caused by the non-uniform electric current of reflection, and loading
The insecure generation low dip of platform and cause sample reception emission current inconsistent, will appear brightness in the SEM image obtained at present
Unevenly, some region high brightness in nano particle SEM image, some region low-light levels affect nano particle SEM image
Normal display.To solve the above-mentioned problems, those skilled in the art have carried out a series of researchs.CN100411445C discloses school
The image processing method and device of positive image Luminance Distribution, which describe extracted from the image data of image low-frequency brightness at
Point, using the product and operation with multiple Gaussian functions, luminance components distribution is found out, detects the characteristic quantity school of brightness of image ingredient
The actual luminance components of positive image, however, finding out brightness under multiple degree since Gaussian function has certain distribution
The region of component distributing is less than original image.CN101655976B is disclosed based on the modified multi-view image brightness in control point
Bearing calibration, this method count brightness histogram using two width multi-view images of input, and still, SEM equipment is only to provide one
A directional image.CN104778664A discloses a kind of method of brightness of image correction, and this method is by image dividing regions to be corrected
As current region to be corrected behind domain, the correction system of each pixel in current region to be corrected is determined using bilinear interpolation algorithm
Number, original luminance value and the correction coefficient by each pixel in the current region to be corrected, determines each pixel school
Brightness value after just, and the region to be corrected is shunk to the optical centre of image, the region after contraction is divided work again
To be current to be corrected, until reaching default number of corrections, this method is there are more number of corrections, and bilinear interpolation
Algorithm can only realize its internal interpolation, and correcting area is less than the defect of original image.CN107590787A discloses a kind of scanning
The image distortion correction method of electron microscope is the image distortion correction method for scanning electron microscope, and utilizes
Shooting standard target obtains sparse image pixel location information and corresponding Distortion Vector sample set, exists and needs multiple image
Defect.
In short, the defect of the existing technology of above-mentioned brightness of image correction is: due to being highlighted in nano particle SEM image
Degree often respectively appears in the different peripheral boundaries of image with darker brightness, and the prior art then cannot achieve image peripheral boundary part
Interpolation is carried out, the brightness irregularities of obtained nano particle SEM image are caused.
Summary of the invention
The technical problems to be solved by the present invention are: providing the brightness of image extracted based on nano particle SEM image brightness
Bearing calibration, this method are to carry out whole brightness based on nano particle SEM image to extract and then to the image whole region
Uneven brightness is corrected, high brightness occurs in some boundary part region especially in nano particle SEM image, and
In the case that darker brightness occurs in its another boundary part region, each pixel of nano particle SEM image is shown
Average brightness, and realize the whole region brightness uniformity of nano particle SEM image, it overcomes due to nano particle SEM image
Middle high brightness and darker brightness often respectively appear in image difference peripheral boundary, and the prior art then cannot achieve nano particle
SEM image peripheral limit part carries out interpolation, causes the defect of the brightness irregularities of obtained nano particle SEM image.
The present invention solves technical solution used by the technical problem: being extracted based on nano particle SEM image brightness
Brightness of image bearing calibration is a kind of to carry out whole brightness based on nano particle SEM image and extract and then to the complete of the image
The corrected method of portion region uneven brightness, the specific steps are as follows:
The nano particle SEM image of brightness irregularities is divided into M × N number of piecemeal by the first step:
Nano particle SEM image is indicated with P, and the nano particle SEM image of wherein brightness irregularities is divided into longitudinal M etc.
Part and transverse direction N equal portions, total M × N number of piecemeal do not overlap each other between piecemeal and piecemeal other than adjacent block boundary, each
In piecemeal, longitudinally there is m pixel, laterally there is n-pixel, m and n are even number, longitudinal M of corresponding entire nano particle SEM image P ×
M pixel and lateral N × n-pixel, by the corresponding actual range of pixel, to calculate nano particle SEM image P and each point
The actual size of block, the quantity that pixel is covered in single segmented areas is >=10 nano particles, and brightness irregularities are received
The vertical and horizontal of rice grain SEM image include at least 3 segmented areas；
Second step calculates the average brightness and whole image average brightness of each segmented areas image:
To the block image that the nano particle SEM image of wherein brightness irregularities is divided by the above-mentioned first step, calculate every
The average brightness of a segmented areas image is the brightness of piecemeal central point, and assigns matrix expression all piecemeal average brightness,
Concrete operations are as follows:
The average brightness a of (I, J) a piecemeal of longitudinal label I and lateral label JI,JIt is calculated with formula (1),
In formula (1), Pu,vIndicate longitudinal u-th of pixel and lateral v in the nano particle SEM image of brightness irregularities
The brightness of one point of a pixel, longitudinal label I=1,2 ..., M；Lateral label J=1,2 ... .., N；
With average brightness aI,JThe average brightness of all piecemeals is constituted into nano particle SEM image piecemeal according to the position of block
Average brightness matrixAs shown in formula (2),
In formula (2), M is longitudinal equal portions of the nano particle SEM image piecemeal of brightness irregularities, and N is brightness irregularities
Nano particle SEM image piecemeal lateral equal portions, the nano particle SEM image piecemeal average brightness matrix of brightness irregularities
Matrix element aI,JThe central point of each piecemeal of the non-uniform nano particle SEM image of corresponding brightness is AI,J, wherein Zong Xiangbiao
Number I=1,2 ..., M；Lateral label J=1,2 ..., N；Thus the calculating of the average brightness of each segmented areas image is completed；
The whole image average brightness of the nano particle SEM image of brightness irregularities is calculated using formula (3)
In formula (3), M is longitudinal equal portions of the nano particle SEM image piecemeal of brightness irregularities, and N is brightness irregularities
Nano particle SEM image piecemeal lateral equal portions, aI,JFor average brightness, longitudinal label I=1,2 ..., M；Lateral label J=
1,2 ... .., N；
Thus the calculating of the average brightness and whole image average brightness of each segmented areas image is completed；
Third step obtains linear extrapolation by piecemeal average brightness matrix and expands luminance matrix:
To the nano particle SEM image piecemeal average brightness matrix for the brightness irregularities that above-mentioned second step obtainsCarry out line
Property extrapolation expand, obtain linear extrapolation expand luminance matrixAs expand the matrix of M+2 row N+2 columnConcrete operations are as follows:
Firstly, order matrixThe first row, last line, first row and last column matrix element be 0, intermediate matrix
Member by with matrixComposition, matrixWith matrixBetween meet relationship shown in following formula (4),
For this purpose, expanding matrixFor shown in following formula (5),
Expand matrixFor shown in following formula (6),
Secondly, expanding method according to linear extrapolation, above-mentioned expansion matrix is modifiedThe first row and last line matrix element
Following formula (7) and formula (8),
b1,J=2 × b2,J-b3,J(7),
bM+2,J=2 × bM+1,J-bM,J(8),
In formula (7) and formula (8), lateral label J=2,3 ..., N+1；
Equally, above-mentioned expansion matrix is modifiedFirst row and last column following formula of matrix element (9) and formula
(10),
bI,1=2 × bI,2-bI,3(9),
bI,N+2=2 × bI,N+1-bI,N(10),
In formula (9) and formula (10), longitudinal label I=2,3 ..., M+1；
For above-mentioned expansion matrixMatrix element b on four angles1,1、b1,N+2、bM+2,1And bM+2,N+2Respectively following formula
(11), formula (12), formula (13) and formula (14),
Linear extrapolation is obtained as a result, expands luminance matrixShown in following formula (15),
In formula (15), brightness b1,JCorresponding spatial point BI,JBrightness, spatial point BI,JCoordinate be laterally (J-1/2) × n
+ 1 pixel and longitudinal (I-1/2) × m+1 pixel, here, lateral label J=1,2 ..., N+2；Longitudinal label I=1,2 ..., M+
2；
Thus it completes to obtain linear extrapolation expansion luminance matrix by piecemeal average brightness matrix；
4th step extracts the brightness of each point in the nano particle SEM image of brightness irregularities:
(4.1) step determines each brightness in four surrounded regions of point:
Matrix is expanded by linear extrapolation obtained in above-mentioned third stepIn neighbouring four matrix element bI,J、bI,J+1、
bI+1,J+1And bI+1,J, corresponding rectangular BI,JBI,J+1BI+1,J+1BI+1,JFour point BI,J、BI,J+1、BI+1,J+1And BI+1,JIt is right
Brightness is answered, the linear extrapolation is calculated with formula (16) and expands matrixIn neighbouring corresponding four points of four matrix elements
BI,JBI,J+1BI+1,J+1BI+1,JSurround each point C in rectangular rangeI,J,i,jBrightness cI,J,i,j,
In formula (16), rectangular BI,JBI,J+1BI+1,J+1BI+1,JInterior longitudinal direction ith pixel, i=1,2 ..., m；Rectangular BI, JBI,J+1BI+1,J+1BI+1,JJ-th of pixel of interior transverse direction, j=1,2 ..., n；Longitudinal label I=1,2 ..., M+1；Lateral label J=
1,2 ..., N+1；X is pixel Ci,jApart from side BI,JBI,J+1Vertical range, y be pixel Ci,jApart from side BI,JBI+1,JHang down
Straight distance, unit are pixel, and 0≤x≤m, 0≤y≤n；
(4.2) step extracts the brightness of each point in the nano particle SEM image of brightness irregularities:
By matrix element gu,vConstitute the luminance matrix of the nano particle SEM image of brightness irregularities In matrix element
gu,vWith pixel Ci,jBrightness ci,jRelationship such as formula (17) shown in,
g(I-1)×m+i-m/2,(J-1)×n+j-n/2=cI,J,i,j(17),
In formula (17), g(I-1)×m+i-m/2,(J-1)×n+j-n/2That is matrix element gu,v, i=1,2 ..., m；J=1,2 ..., n；I
=1,2 ..., M+1；J=1,2 ..., N+1；It is constrained to 1≤[(I-1) × m+i-m/2]≤M × m and 1≤[(J-1) × n+j-n/
2]≤N × n, u=(I-1) × m+i-m/2, v=(J-1) × n+j-n/2；
By matrix element guvThe luminance matrix of the nano particle SEM image of the brightness irregularities of compositionFollowing formula (18) institute
Show,
In formula (18), longitudinal label u=1,2 ..., M × m, lateral label v=1,2 ..., N × n；
So far it completes to extract the brightness that each is put in the nano particle SEM image of brightness irregularities；
5th step calculates every bit brightness correction coefficients, realizes the correction of nano particle SEM image uneven brightness:
The whole image average brightness of the nano particle SEM image of brightness irregularities is calculated with formula (3)On the basis of, meter
Calculate the correction coefficient of each pointAnd each of the nano particle SEM image of brightness irregularities is realized with formula (19)
The gamma correction q of pointu,v,
In formula (19), Pu,vIndicate longitudinal u-th of pixel and lateral v in the nano particle SEM image of brightness irregularities
The brightness of one point of a pixel, u=1,2 ..., M × m；V=1,2 ..., N × n；For non-uniform nano particle SEM figure
The whole image average brightness of picture,
As shown in formula (20), the gamma correction g of each point of the nano particle SEM image of brightness irregularitiesu,vIt constitutes
The matrix of the nano particle SEM gamma correction image of brightness irregularities
The matrix of the nano particle SEM gamma correction image of brightness irregularitiesShow that nano particle SEM image is uneven
The effect of the correction of brightness；
So far it completes to calculate every bit brightness correction coefficients, realizes the correction of nano particle SEM image uneven brightness.
The above-mentioned brightness of image bearing calibration extracted based on nano particle SEM image brightness, it is described will wherein brightness disproportionation
Even nano particle SEM image is divided into longitudinal M equal portions and transverse direction N equal portions, wherein M=4, N=6.
The above-mentioned brightness of image bearing calibration extracted based on nano particle SEM image brightness in each described piecemeal, is indulged
To there is m pixel, laterally there is n-pixel, wherein n=100 pixel, m=100 pixel.
The above-mentioned brightness of image bearing calibration extracted based on nano particle SEM image brightness, the linear interpolation method are this
The known method of technical field, related operation and calculating are that those skilled in the art will appreciate that.
The beneficial effects of the present invention are: compared with prior art, substantive distinguishing features outstanding of the invention and marked improvement
It is as follows:
(1) prior art will find out average brightness by square, then use linear interpolation method, correct brightness of image, only
There is the region unit for selecting a certain size, just can reflect its true brightness, direct piecemeal expands luminance matrix without extrapolating, only
The brightness of image in the point range of block center can be obtained, and the present invention uses and obtains linear extrapolation expansion by piecemeal average brightness matrix
Luminance matrix contains nano particle SEM image to expand the region that linear extrapolation exhibition luminance matrix corresponding blocks central point surrounds
Each point.
(2) brightness is averaging to arbitrary image piecemeal in the prior art, does not point out the requirement of piecemeal, and the present invention is true
It surely will be according to average brightness not be influenced substantially by individual particle in segmented areas, it is indicated that the constraint condition of piecemeal size.
(3) prior art can not achieve the brightness of image of whole region in the application of facial image piecemeal correcting luminance
Correction, and the present invention applies the brightness of image correction in nano particle SEM image all areas.
(4) prior art is not described number of blocks in application block correction brightness of image, and divides in the present invention
Transverse direction and longitudinal direction respectively at least divides 3 piecemeals, obtains linear extrapolation and expands luminance matrix, is extracted receiving for brightness irregularities
The brightness of each point in rice grain SEM image.
(5) the multiple stepping bearing calibration of small step-length is used in the prior art, and the present invention is expanded using piecemeal luminance matrix
The method that brightness once corrects nano particle SEM image improves correction efficiency；
(6) in a kind of method of brightness of image of prior art CN104778664A correction by the region to be corrected to image
Optical centre shrink, the correction coefficient of each pixel in current region to be corrected is determined using linear interpolation algorithm, passes through institute
The original luminance value of each pixel and the correction coefficient in current region to be corrected are stated, the brightness after determining each pixel correction
Value, and the region to be corrected is shunk to the optical centre of image, the region after contraction is divided again as currently to school
Just, until reaching default number of corrections, correction is there are more number of corrections in the prior art, and bilinear interpolation
Algorithm can only realize its internal interpolation, and correcting area is less than original image, and without being related to extrapolating, therefore cannot school
Positive image edge portions.And the present invention only need once to divide, spread to interpolation outside just and realize it is bright based on nano particle SEM image
The brightness of image correction that degree extracts.
(7) prior art CN100411445C corrects the image processing method of image brightness distribution and device is from image
Low-frequency brightness ingredient is extracted in image data, detects the characteristic quantity of brightness of image ingredient, with low-frequency brightness ingredient and parameter
The actual luminance components of above-mentioned image are corrected, wherein luminance components distribution is found out using product and operation with multiple Gaussian functions,
Since Gaussian function has certain size, finds out the region that luminance components are distributed under multiple degree and be less than original image.
And then the present invention is obtained every in nano particle SEM image using linear extrapolation around Block Brightness matrix using linear interpolation method
One brightness is realized and is corrected in entire nano material SEM image whole region.
(8) CN101655976B is more using two width of input based on the modified multi-view image brightness bearing calibration in control point
Multi-view image counts brightness histogram, and the directional image that SEM equipment often only provides, the present invention then need to only use nanometer
A sub-picture of material SEM.
(9) a kind of image distortion correction method of scanning electron microscope of CN107590787A is for scanning electron microscopy
The image distortion correction method of mirror, and sparse image pixel location information and corresponding distortion are obtained using shooting standard target
Vector sample set needs multiple image, and the present invention corrects and only needs a sub-picture in the brightness of nano material SEM image, is not required to
It shoots standard target and obtains sparse image pixel positions.
(10) it extrapolates present invention uses piecemeal brightness linear and expands matrix, it is each then to extract nano particle SEM image
The brightness of point, the Integral correction brightness of nano particle SEM image avoid the mutation after correction between image block, overcome
It is eliminated using gradient method and is mutated bring arbitrariness between block.
(11) present invention using piecemeal luminance matrix in being expanded, and only piecemeal luminance matrix is increased, and exploded view
As the central point of block, and the storage of nano particle SEM image does not increase, and piecemeal luminance matrix is far smaller than nano particle
SEM image homography, has saved memory space.
(12) present invention carries out homogenization brightness using nano particle SEM image, and same method can be generalized to medicine
SEM image and optical microscope image have versatility.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is the operating process schematic block diagram of the method for the present invention.
Fig. 2 is nano particle SEM image and divided block area schematic in the method for the present invention.
Fig. 3 is that the nano particle SEM image in the method for the present invention divides M × N number of piecemeal and the central point of each piecemeal shows
It is intended to.
Fig. 4 is that the nano particle SEM image in the method for the present invention divides the corresponding luminance matrix expression shape of M × N number of piecemeal
Formula schematic diagram.
Fig. 5 is the center of the nano particle SEM image brightness linear extrapolation expansion matrix in the method for the present invention and corresponding blocks
Point schematic diagram.
Fig. 6 illustrates to supplement the expansion of 0 matrix element around the nano particle SEM image luminance matrix in the method for the present invention
Figure.
Fig. 7 is that matrix schematic diagram is expanded in the nano particle SEM image brightness linear extrapolation in the method for the present invention.
Fig. 8 is that the expansion point of upper left three in matrix corresponding blocks is expanded in the nano particle SEM image brightness in the method for the present invention
The area schematic surrounded with nano particle SEM image upper left piecemeal average brightness point.
Fig. 9 is corresponding for any neighbour's matrix element in the nano particle SEM image brightness expansion matrix in the method for the present invention
The square region schematic diagram that block central point surrounds.
Figure 10 is the nano particle SEM image schematic diagram used in the embodiment of the present invention 1.
Figure 11 is that the image of each piecemeal average brightness of nano particle SEM image in the embodiment of the present invention 1 shows signal
Figure.
Figure 12 is to carry out linear difference to viewing area brightness using 4 neighbour's differential techniques in the embodiment of the present invention 1, is obtained
Obtain the image display schematic diagram of whole image brightness.
Figure 13 is the image schematic diagram in 1 nano particle SEM image whole region of the embodiment of the present invention after gamma correction.
In figure, 201. nano particle SEM image peripheral boundaries, 501. expand image block, and 502. nano particle SEM images are opened up
The peripheral boundary of block is opened up, the corresponding expansion block of the matrix element of upper left three in matrix-block is expanded in 801. nano particle SEM image brightness
Square is expanded in the region that central point and nano particle SEM image upper left piecemeal central point surround, 901. nano particle SEM image brightness
Neighbouring four matrix element b in battle arrayI,J、bI,J+1、bI+1,J+1And bI+1,JCorresponding blocks central point BI,J、BI,J+1、BI+1,J+1And BI+1,JIt surrounds
Square region,
In figure, the pixel that image as unit uses, drawing image size is directly proportional to pixel quantity.
Specific embodiment
Embodiment illustrated in fig. 1 shows that the operating process of the method for the present invention is: obtaining nano particle SEM image；Not by brightness
Uniform nano particle SEM image is divided into M × N number of piecemeal；Calculate the average brightness of each segmented areas image；It is put down by piecemeal
Equal luminance matrix obtains linear extrapolation and expands luminance matrix；Extract each point in the nano particle SEM image of brightness irregularities
Brightness；Every bit brightness correction coefficients are calculated, realize the correction of nano particle SEM image uneven brightness.
Fig. 2 shows the nano particle SEM image and divided block region to be processed in the method for the present invention, wherein solid line table
Show nano particle SEM image peripheral boundary, dotted line is nano particle SEM image divided block region, nano particle SEM image point
M × N number of piecemeal, other than adjacent block boundary, phase between block and block have been divided at lateral N equal portions and longitudinal direction M equal portions, whole image
It does not overlap.Each piecemeal transverse width is n-pixel and longitudinal direction is highly m pixel, and n is even number, and m is even number.
In Fig. 2, the 1 of abscissa, 2 ... .., N are the number in the lateral divided block region of nano particle SEM image；It is vertical to sit
Target 1,2 ... .., M are the number in longitudinally divided piece of region of nano particle SEM image.
Divided by the piecemeal that Fig. 2 illustrates present invention nano particle SEM general image to be processed, with normal image piecemeal and
The difference of local block includes at least ten nano particles in piecemeal of the present invention, and the average brightness of multiple particles is not substantially in block
It is influenced by single nano particle intrinsic brightness, in normal image and is not had the feature；On the other hand, nano particle SEM schemes
Transverse direction and longitudinal direction at least divides three equal portions as in, to guarantee to have enough initial points, realizes that brightness mean matrix is linearly outer
Expansion matrix is pushed away, in 100,000 pixel nano particle SEM images, can satisfy the two requirements completely.Fig. 2 shows nano particle
The peripheral boundary 201 of SEM image by it is longitudinally divided be 5 equal portions, be laterally divided into 4 equal portions, whole image has divided 5 × 4 points
Block.
Fig. 3 is that the nano particle SEM image in the method for the present invention divides M × N number of piecemeal and the central point of each piecemeal shows
It is intended to, it is shown that nano particle SEM image divides the central point of M × N number of piecemeal and each piecemeal, and stain indicates nano particle
SEM image divided block central point, in the case where block size is appropriate, the average brightness of calculation block, equal to the brightness at block center.Fig. 3 is shown
The peripheral boundary 201 of nano particle SEM image by it is longitudinally divided be 5 equal portions, be laterally divided into 4 equal portions, whole image has divided 5
× 4 piecemeals.
In Fig. 3, A1,1、A1,2、....、A1,NIt is respectively the center of the N number of piecemeal of the first row in nano particle SEM image piecemeal
Point, A2,1、A2,2、....、A2,NIt is respectively the central point of the N number of piecemeal of the second row in nano particle SEM image piecemeal, AM,1、
AM,2、....、AM,NIt is respectively the central point of the N number of piecemeal of M row in nano particle SEM image piecemeal.AI,JAnd BI,JIn lower footnote
First letter I indicates that longitudinal label, second letter J indicate lateral label.
The central point that nano particle SEM image of the present invention divides M × N number of piecemeal and each piecemeal, nanometer are illustrated by Fig. 3
Uneven brightness gradually changes in particle SEM image, and nano particle is far smaller than the size of divided block, and it is appropriate to divide size in block
Under, the average brightness of block is equal to the brightness of the block central point, and each piecemeal center point coordinate and its brightness are to realize brightness linear
The necessary condition of matrix and linear interpolation is expanded in extrapolation.
Fig. 4 is that the nano particle SEM image in the method for the present invention divides the corresponding luminance matrix expression shape of M × N number of piecemeal
Formula is divided into M × N number of piecemeal in nano particle SEM image, calculates the corresponding average brightness of each piecemeal, constitutes M row N column
Average brightness matrix.
Nano particle SEM image in the present invention is illustrated by Fig. 4 and divides each piecemeal average brightness of M × N number of piecemeal.Figure
In 4, aI,J、bI,JFirst letter I indicates that longitudinal label, second letter J indicate lateral label in lower footnote.aI,JFor transverse direction
The average brightness of serial number J and longitudinal serial number I piecemeal, I=1,2 ..., M；J=1,2 ..., N.a1,1It is average in corresponding (1,1) block
Brightness is equal to the central point A of the block1,1Brightness, i.e. point A1,1Brightness be a1,1, point A1,2Brightness be a1,2..., point
AM,NBrightness be aM,N, the luminance matrix of M × N number of piecemeal average brightness homography M row N column
The average brightness a of calculation blockI,JFor,
In formula (1), Pu,vFor the brightness of nano particle SEM image (u, v) point, by aI,JConstitute nano particle SEM figure
As piecemeal average brightness matrixFor,
Fig. 5 shows that the extrapolation of the nano particle SEM image brightness linear in the method for the present invention is expanded in matrix and corresponding blocks
Heart point, nano particle SEM image piecemeal obtain the average brightness matrix of M row N column, carry out linear extrapolation to average brightness matrix and open up
Matrix is opened up, determines that the brightness linear of M+2 row N+2 column is extrapolated and expands matrix, in the brightness of matrix element corresponding blocks central point, include
The corresponding center for expanding block of matrix element of matrix is expanded in the central point of divided block and extrapolation in nano particle SEM real image
Point.In Fig. 5, BI,JMatrix element b is expanded for material SEM image brightnessI,JThe central point of corresponding blocks, I=1,2 ..., M+2；J=1,
2 ..., N+2.
The positional relationship that matrix corresponding blocks are expanded in material SEM image brightness linear extrapolation in the present invention is illustrated by Fig. 5, it is bright
It spends matrix linear extrapolation to expand during matrix, matrixUp and down respectively increase a line and left and right respectively increase by one column, by M ×
N matrixIt is expanded into the matrix of (M+2) × (N+2)It is equal to the block center according to the average brightness of luminance matrix member corresponding blocks
The brightness of point, therefore luminance matrix expands out two column of two rows up and down and left and right, the nano particle corresponding to nano particle SEM image
About 201 SEM image peripheral boundary respectively expands out a line image and left and right respectively expands out a column and expands image block 501,
Nano particle SEM image expands the peripheral boundary 502 of block, and in practical nano particle SEM image, these are expanded block and do not deposit
Image concrete form is expanded out outward, the present invention is also practical, has only been expanded average brightness matrix element and has been expanded block
Central point.
Fig. 6 is the expansion that 0 matrix element is supplemented around the nano particle SEM image luminance matrix in the method for the present invention, is given
Out by nano particle SEM image average brightness matrix and the form for forming extrapolation and expanding matrix of surrounding 0 matrix element of supplement.
Material SEM image luminance matrix in the present invention is illustrated by Fig. 6 and expands initial procedure, defines (M+2) × (N+2)
MatrixInitial representation, matrixOutermost two rows up and down and two column matrix members of left and right are 0, intermediate M × N number of matrix element with
MatrixIt is identical, matrix calculating matrix are expanded according to linear extrapolationOutermost two column matrix of two rows up and down and left and right
Member.
Fig. 7 is that matrix is expanded in the SEM image brightness linear extrapolation in the method for the present invention, shows nano particle SEM image
Piecemeal average brightness expands the title of each matrix element of matrix.In Fig. 7, bI,JIt is the brightness expansion square of nano particle SEM image
Array element, the central point of corresponding blocks are BI,J, I=1,2 ..., M+2；J=1,2 ..., N+2.
SEM image brightness linear extrapolation in the present invention is illustrated by Fig. 7 and expands each position in matrix, in the present invention root
Method is expanded according to linear extrapolation, outermost two rows up and down and left and right two column matrix member for expanding matrix B are calculated by formula (7)~(14),
b1,J=2 × b2,J-b3,J(7),
bM+2,J=2 × bM+1,J-bM,J(8),
In formula (7) and formula (8), lateral label J=2,3 ..., N+1；
bI,1=2 × bI,2-bI,3(9),
bI,N+2=2 × bI,N+1-bI,N(10),
In formula (9) and formula (10), longitudinal label I=2,3 ..., M+1；
For above-mentioned expansion matrixMatrix element b on four angles1,1、b1,N+2、bM+2,1And bM+2,N+2Respectively following formula
(11), formula (12), formula (13) and formula (14),
It obtains expanding matrix
Fig. 8 shows that the expansion of upper left three in matrix corresponding blocks is expanded in the nano particle SEM image brightness in the method for the present invention
The region that point and nano particle SEM image upper left piecemeal average brightness point surround.In Fig. 8, BI,J、BI,J+1、BI+1,J+1And BI+1,J.
Neighbouring four matrix element b in matrix are expanded with Block Brightness linear extrapolationI,J、bI,J+1、bI+1,J+1And bI+1,JRespectively correspond rectangular four
A point.
It is illustrated by Fig. 8 and expands cashier corresponding to the nano particle SEM image peripheral boundary 201 of nano particle SEM image
The corresponding central point for expanding block of the matrix element of upper left three and nano particle SEM figure in matrix-block are expanded in rice grain SEM image brightness
Picture.The prior art can not cover whole using only the corresponding piecemeal central point of nano particle SEM image piecemeal average brightness matrix
A nano particle peripheral boundary near zone, and the present invention contains brightness linear extrapolation and expands in the corresponding expansion block of matrix
Heart point may include each of entire nano particle SEM image pixel.
It is corresponding that Fig. 9 shows that any neighbour's matrix element in matrix is expanded in the nano particle SEM image brightness in the method for the present invention
The square region that surrounds of block central point, expand the corresponding squared region arbitrarily surrounded of matrix from nano particle SEM image brightness
Domain is able to observe that the positional relationship for needing to calculate luminance point and four Neighbor Points.In Fig. 9, Ci,jFor by BI,J、BI,J+1、
BI+1,J+1And BI+1,JSpatial point in the square region surrounded.BI,J、BI,J+1、BI+1,J+1And BI+1,JTo be opened up with Block Brightness linear extrapolation
Open up neighbouring four matrix element b in matrixI,J、bI,J+1、bI+1,J+1And bI+1,JRespectively correspond four rectangular points.
Brightness of image is illustrated by Fig. 9 and expands the corresponding four points B of four points of neighbour in matrixI,J、BI,J+1、BI+1,J+1With
BI+1,JPoint C to be corrected in the square region surroundedi,jPositional relationship, point Ci,jIn square region BI,J BI,J+1BI+1,J+1BI+1,J
On the inside or side surrounded, four point B of neighbourI,J、BI,J+1、BI+1,J+1And BI+1,JSquare region transverse width m pixel is surrounded,
Longitudinal height n-pixel, pixel C to be askedi,jApart from side BI,JBI,J+1Vertical range x pixel, apart from side BI,JBI+1,JIt is vertical
Distance y pixel, and 0≤x≤m, 0≤y≤n.In Fig. 9, x is the spatial point C of brightness to be askedi,jApart from side BI,JBI,J+1It is vertical
Distance, 0≤x≤m, unit are pixel；Y is the spatial point C of brightness to be askedi,jApart from side BI,JBI+1,JVertical range, 0≤y≤
N, unit are pixel.
Nano particle CI,J,i,jThe brightness c of pointI,J,i,jPass through four point B of neighbourI,J、BI,J+1、BI+1,J+1And BI+1,JPair
Answering brightness is bI,J、bI+1,J、bI,J+1And bI+1,J+1It determines,
In formula (16), rectangular BI,JBI,J+1BI+1,J+1BI+1,JInterior longitudinal direction ith pixel i=1,2 ..., m；Rectangular BI, JBI,J+1BI+1,J+1BI+1,JInterior transverse direction j-th pixel j=1,2 ..., n；Longitudinal label I=1,2 ..., M+1；Lateral label J=1,
2 ..., N+1；X indicates pixel Ci,jApart from side BI,JBI,J+1Vertical range, y indicate pixel Ci,jApart from side BI,JBI+1,J's
Vertical range, unit are pixel, and 0≤x≤m, 0≤y≤n；
By matrix element guvConstitute the luminance matrix of the nano particle SEM image of brightness irregularities In matrix element gu,v
With pixel Ci,jBrightness ci,jRelationship such as formula (17) shown in,
g(I-1)×m+i-m/2,(J-1)×n+j-n/2=cI,J,i,j(17),
In formula (17), g(I-1)×m+i-m/2,(J-1)×n+j-n/2That is matrix element gu,v, i=1,2 ..., m；J=1,2 ..., n；I
=1,2 ..., M+1；J=1,2 ..., N+1；It is constrained to 1≤[(I-1) × m+i-m/2]≤M × m and 1≤[(J-1) × n+j-n/
2]≤N × n, u=(I-1) × m+i-m/2, v=(J-1) × n+j-n/2；
By matrix element gu,vThe luminance matrix of the nano particle SEM image of the brightness irregularities of compositionFollowing formula (18)
It is shown,
So far it completes to extract the brightness that each is put in the nano particle SEM image of brightness irregularities；
Figure 10 shows the nano particle SEM image used in the embodiment of the present invention 1, and size is lateral 600 pixels, longitudinal
400 pixels, each pixel is 1 nanometer corresponding, the brightness disproportionation that nano particle SEM image used by showing in figure occurs
Even, the obvious brightness in the upper left corner is high, and the lower right corner is darker.Numerous nano particles are contained in nano particle SEM image, since image is bright
Degree is uneven, shows that nano particle quantity is more in bright areas, and shows that nano particle is less in brightness darker area, this is to receive
Result caused by rice grain SEM image is shown.However, actually nano particle SEM image has recorded nanometer of different sizes
Grain, nano particle distribution density is not much different in whole image, therefore the luminance difference that nano particle SEM image is shown influences
The correct display of nano particle.
Figure 11 shows the image of each piecemeal average brightness of nano particle SEM image in the embodiment of the present invention 1.This implementation
Nano particle SEM image in example is by being laterally divided into 6 equal portions and being divided longitudinally into 4 equal portions, calculation shows that different piecemeals are average bright
Degree has differences, and illustrates the average brightness of nano particle SEM image in the present embodiment being divided into 24 piecemeals, shows difference
Difference existing for piecemeal, upper left corner piecemeal is brighter, and the lower right corner is darker.
The average brightness a of (I, J) a piecemealI,JIt indicates,
Nano particle SEM image piecemeal average brightness matrix in this corresponding exampleFor shown in formula (2-1),
Matrix element aI,JEqual to nano particle SEM image piecemeal central point AI,JBrightness, wherein the I=1 of the present embodiment,
2,3,4；J=1,2,3,4,5,6.
The whole image average brightness of the nano particle SEM image of brightness irregularities is calculated using formula (3-1)
The whole image average brightness of the nano particle SEM image of brightness irregularities in this corresponding exampleIt is 94.6.
Figure 12 shows linear to viewing area brightness progress poor using 4 neighbour's differential techniques in the embodiment of the present invention 1
Value obtains the image of whole image brightness.
1 method can extract each brightness, concrete operations in nano particle SEM image through the embodiment of the present invention
It is as follows:
C in nano particle SEM imageI,J,i,jThe brightness of point is cI,J,i,jPass through four point B of neighbourI,J、BI,J+1、BI+1,J+1
And BI+1,JCorresponding brightness be bI,J、bI,J+1、bI+1,J+1And bI+1,JIt finds out,
In formula (15-1), in the present embodiment, i=1,2 ..., 100；J=1,2 ..., 100；X and y respectively indicate pixel
Point Ci,jApart from side BI,JBI,J+1Vertical range and apart from side BI,JBI+1,JVertical range, unit is pixel, and
0≤x≤100,0≤y≤100；
By matrix element gu,vConstitute the luminance matrix of the nano particle SEM image of brightness irregularities In matrix element gu,v
With pixel Ci,jBrightness ci,jRelationship such as formula (17) shown in,
g(I-1)×m+i-m/2,(J-1)×n+j-n/2=cI,J,i,j(17),
In formula (17), in the present embodiment, i=1,2 ..., 100；J=1,2 ..., 100；I=1,2 ..., 5；J=1,
2 ..., 7；And meet 1≤[(I-1) × 100+i-50]≤400 and 1≤[(J-1) × 100+j-50]≤600 restrictive conditions, u
=(I-1) × m+i-m/2, v=(J-1) × n+j-n/2；
With formula (18) display matrix member gi,jThe luminance matrix of brightness composition nano particle SEM image
So far it completes to extract the brightness that each is put in the nano particle SEM image of brightness irregularities；
Figure 13 shows the image in 1 nano particle SEM image whole region of the embodiment of the present invention after gamma correction, it will be seen that
The effect of the 1 method correction nano particle SEM image provided through the embodiment of the present invention.
With the average brightness of the nano particle SEM image of brightness irregularitiesOn the basis of, calculate the correction system of each point
NumberAnd the gamma correction q of each point of the nano particle SEM image of brightness irregularities is realized with formula (19)u,v,
In formula (18), Pu,vIndicate longitudinal u-th of pixel and lateral v in the nano particle SEM image of brightness irregularities
The brightness of one point of a pixel, in this implementation, u=1,2 ..., 400；V=1,2 ..., 600；By formula (3) be calculated for
The average brightness of the nano particle SEM image of brightness irregularities
As shown in formula (20), the gamma correction q of each point of the nano particle SEM image of brightness irregularitiesu,vIt constitutes
The matrix of the nano particle SEM gamma correction image of brightness irregularities
The matrix of the nano particle SEM gamma correction image of brightness irregularitiesShow that nano particle SEM image is uneven
The effect of the correction of brightness.
Figure 13 shows the effect that nano particle SEM image luminance uniformity correction is realized in embodiment of the present invention method 1,
Show practicability of the invention.
Embodiment 1
The nano particle SEM image of brightness irregularities is divided into M × N number of piecemeal by the first step:
Nano particle SEM image is indicated with P, and the nano particle SEM image of wherein brightness irregularities is divided into longitudinal M=
4 equal portions and transverse direction N=6 equal portions, total 4 × 6 piecemeals do not overlap each other between piecemeal and piecemeal other than adjacent block boundary,
In each piecemeal, longitudinally there is m=100 pixel, laterally there is n=100 pixel, the longitudinal direction of corresponding entire nano particle SEM image P
4 × 100 pixels and laterally 6 × 100 pixels, by the corresponding actual range of pixel, come calculate nano particle SEM image P and
The actual size of each piecemeal, the quantity that pixel is covered in single segmented areas is >=10 nano particles, and brightness is not
The vertical and horizontal of uniform nano particle SEM image include at least 3 segmented areas, and the laterally wide of each piecemeal is 100
Pixel, longitudinal a height of 100 pixel are met with guaranteeing to divide the stability of average brightness in nano particle SEM image segmented areas
Average brightness is not influenced substantially by single nanoparticle in block region, ensure that the average brightness that segmented areas calculates is linearly outer
The needs pushed away；
Second step calculates the average brightness and whole image average brightness of each segmented areas image:
To the block image that the nano particle SEM image of wherein brightness irregularities is divided by the above-mentioned first step, calculate every
The average brightness of a segmented areas image is the brightness of piecemeal central point, and assigns matrix expression all piecemeal average brightness,
Concrete operations are as follows:
The average brightness a of (I, J) a piecemeal of longitudinal label I and lateral label JI,JIt is calculated with formula (1),
In formula (1), Pu,vIndicate longitudinal u-th of pixel and lateral v in the nano particle SEM image of brightness irregularities
The brightness of one point of a pixel, longitudinal label I=1,2 ..., M；Lateral label J=1,2 ... .., N；
In the present embodiment, m=100, n=100, M=4, N=6, shown in being specifically expressed as follows in formula (1),
Longitudinal label I=1,2,3,4；Lateral label J=1,2 ... .., 6；
With average brightness aI,JThe average brightness of all piecemeals is constituted into nano particle SEM image piecemeal according to the position of block
Average brightness matrixAs shown in formula (2),
In formula (2), M is longitudinal equal portions of the nano particle SEM image piecemeal of brightness irregularities, and N is brightness irregularities
Nano particle SEM image piecemeal lateral equal portions, the nano particle SEM image piecemeal average brightness matrix of brightness irregularities
Matrix element aI,JThe central point of each piecemeal of the non-uniform nano particle SEM image of corresponding brightness is AI,J, wherein Zong Xiangbiao
Number I=1,2 ..., M；Lateral label J=1,2 ..., N；Thus the calculating of the average brightness of each segmented areas image is completed；
In the present embodiment, the specific data of formula (2) are as follows,
The whole image average brightness of the nano particle SEM image of brightness irregularities is calculated using formula (3)This implementation
In example, the specific data of formula (3) are as follows,
In formula (3), M=4 is longitudinal equal portions of the nano particle SEM image piecemeal of brightness irregularities in the present embodiment, N
=6 be in the present embodiment be brightness irregularities nano particle SEM image piecemeal lateral equal portions, aI,JIt is longitudinal for average brightness
Label I=1,2 ..., M；Lateral label J=1,2 ... .., N；
Thus the calculating of the average brightness and whole image average brightness of each segmented areas image is completed；
Third step obtains linear extrapolation by piecemeal average brightness matrix and expands luminance matrix:
To the nano particle SEM image piecemeal average brightness matrix for the brightness irregularities that above-mentioned second step obtainsCarry out line
Property extrapolation expand, obtain linear extrapolation expand luminance matrixAs expand the matrix of M+2 row N+2 columnConcrete operations are such as
Under:
Firstly, order matrixThe first row, last line, first row and last column matrix element be 0, intermediate matrix
Member by with matrixComposition, matrixWith matrixBetween meet relationship shown in following formula (4),
In the present embodiment, the specific data of formula (4) are as follows,
For this purpose, expanding matrixFor shown in following formula (5),
Expand matrixFor shown in following formula (6),
In the present embodiment, byMatrix supplement 0 obtains matrixIt is as follows,
Secondly, expanding method according to linear extrapolation, above-mentioned expansion matrix is modifiedThe first row and last line matrix element
Following formula (7) and formula (8),
b1,J=2 × b2,J-b3,J(7),
bM+2,J=2 × bM+1,J-bM,J(8),
In the present embodiment, M=4 in formula (8) has
b6,J=2 × b5,J-b4,J(8-1),
In formula (7), formula (8) and formula (8-1), lateral label J=2,3 ..., 7；
Equally, above-mentioned expansion matrix is modifiedFirst row and last column following formula of matrix element (9) and formula
(10),
bI,1=2 × bI,2-bI,3(9),
bI,N+2=2 × bI,N+1-bI,N(10),
In the present embodiment, N=6 in formula (10) has
bI,8=2 × bI,7-bI,6(10-1),
In formula (9), formula (10) and formula (10-1), longitudinal label I=2,3,4,5；
For above-mentioned expansion matrixMatrix element b on four angles1,1、b1,N+2、bM+2,1And bM+2,N+2Respectively following formula
(11), formula (12), formula (13) and formula (14),
In the present embodiment, formula (11)-(14) are respectively following data,
Linear extrapolation is obtained as a result, expands luminance matrixShown in following formula (15),
In formula (15), brightness b1,JCorresponding spatial point BI,JBrightness, spatial point BI,JCoordinate be laterally (J-1/2) × n
+ 1 pixel and longitudinal (I-1/2) × m+1 pixel, here, lateral label J=1,2 ..., N+2；Longitudinal label I=1,2 ..., M+
2；
In the present embodiment, formula (15) is following data,
In the present embodiment, brightness bI,JCorresponding points BI,JBrightness, BI,JCoordinate is lateral (J-1/2) × 100+1 pixel, is indulged
To (I-1/2) × 100+1 pixel, I=1 here, 2 ..., 6；J=1,2 ..., 8；
Figure 11 shows the image of each piecemeal average brightness of nano particle SEM image in embodiment 1.In the present embodiment
Nano particle SEM image is by being laterally divided into 6 equal portions and being divided longitudinally into 4 equal portions, calculation shows that different piecemeal average brightness exist
Difference illustrates the average brightness of nano particle SEM image in the present embodiment being divided into 24 piecemeals, shows that different piecemeals are deposited
Difference, upper left corner piecemeal is brighter, and the lower right corner is darker；
Thus it completes to obtain linear extrapolation expansion luminance matrix by piecemeal average brightness matrix；
4th step extracts the brightness of each point in the nano particle SEM image of brightness irregularities:
(4.1) step determines each brightness in four surrounded regions of point:
Matrix is expanded by linear extrapolation obtained in above-mentioned third stepIn neighbouring four matrix element bI,J、bI,J+1、
bI+1,J+1And bI+1,J, corresponding rectangular BI,JBI,J+1BI+1,J+1BI+1,JFour point BI,J、BI,J+1、BI+1,J+1And BI+1,JIt is right
Brightness is answered, the linear extrapolation is calculated with formula (16) and expands matrixIn neighbouring corresponding four points of four matrix elements
BI,JBI,J+1BI+1,J+1BI+1,JSurround each point C in rectangular rangeI,J,i,jBrightness cI,J,i,j,
In formula (16), rectangular BI,JBI,J+1BI+1,J+1BI+1,JInterior longitudinal direction ith pixel, i=1,2 ..., m；Rectangular BI, JBI,J+1BI+1,J+1BI+1,JJ-th of pixel of interior transverse direction, j=1,2 ..., n；Longitudinal label I=1,2 ..., M+1；Lateral label J=
1,2 ..., N+1；X is pixel Ci,jApart from side BI,JBI,J+1Vertical range, y be pixel Ci,jApart from side BI,JBI+1,JHang down
Straight distance, unit are pixel, and 0≤x≤m, 0≤y≤n；
In the present embodiment, formula (16) is following data,
Here i=1,2 ..., 100；J=1,2 ..., 100；I=1,2 ..., 5；J=1,2 ..., 7；0≤x≤100,0≤
y≤100；
(4.2) step extracts the brightness of each point in the nano particle SEM image of brightness irregularities:
By matrix element guvConstitute the luminance matrix of the nano particle SEM image of brightness irregularities In matrix element gu,v
With pixel Ci,jBrightness ci,jRelationship such as formula (17) shown in,
g(I-1)×m+i-m/2,(J-1)×n+j-n/2=cI,J,i,j(17),
In formula (17), g(I-1)×m+i-m/2,(J-1)×n+j-n/2That is matrix element gu,v, i=1,2 ..., m；J=1,2 ..., n；I
=1,2 ..., M+1；J=1,2 ..., N+1；It is constrained to 1≤[(I-1) × m+i-m/2]≤M × m and 1≤[(J-1) × n+j-n/
2]≤N × n, u=(I-1) × m+i-m/2, v=(J-1) × n+j-n/2；
In the present embodiment, i=1,2 ..., 100；J=1,2 ..., 100；I=1,2 ..., 5；J=1,2 ..., 7；It is constrained to
1≤[(I-1) × 100+i-50]≤400 and 1≤[(J-1) × 100+j-50]≤600, u=(I-1) × 100+i-50, v=
(J-1)×100+j-50；
By matrix element gu,vThe luminance matrix of the nano particle SEM image of the brightness irregularities of compositionFollowing formula (18)
It is shown,
So far it completes to extract the brightness that each is put in the nano particle SEM image of brightness irregularities；
5th step calculates every bit brightness correction coefficients, realizes the correction of nano particle SEM image uneven brightness:
The whole image average brightness of the nano particle SEM image of brightness irregularities is calculated with formula (3)On the basis of, meter
Calculate the correction coefficient of each pointAnd each of the nano particle SEM image of brightness irregularities is realized with formula (19)
The gamma correction q of pointu,v,
In formula (19), Pu,vIndicate longitudinal ith pixel and lateral jth in the nano particle SEM image of brightness irregularities
The brightness of one point of a pixel, u=1,2 ..., M × m；V=1,2 ..., N × n；For non-uniform nano particle SEM figure
The whole image average brightness of picture, in the present embodiment, u=1,2 ..., 400；V=1,2 ..., 600；
As shown in formula (20), the gamma correction g of each point of the nano particle SEM image of brightness irregularitiesu,vIt constitutes
The matrix of the nano particle SEM gamma correction image of brightness irregularities
The matrix of the nano particle SEM gamma correction image of brightness irregularitiesShow that nano particle SEM image is uneven
The effect of the correction of brightness；
So far it completes to calculate every bit brightness correction coefficients, realizes the correction of nano particle SEM image uneven brightness.
Figure 13 shows the effect that nano particle SEM image luminance uniformity correction is realized in embodiment of the present invention method 1,
Compared to the nano particle SEM image used in the embodiment of the present invention 1 shown by Figure 10, Figure 13 by the method for the present invention correction is aobvious
The nano particle SEM image brightness uniformity shown is obviously improved, and shows practicability of the invention.
In above-described embodiment, the linear interpolation method is the known method of the art, related operation and calculating
It is that those skilled in the art will appreciate that.
Claims (3)
1. the brightness of image bearing calibration extracted based on nano particle SEM image brightness, it is characterised in that: be a kind of based on nanometer
Particle SEM image carries out whole brightness and extracts the corrected method of whole region uneven brightness to the image in turn,
Specific step is as follows:
The nano particle SEM image of brightness irregularities is divided into M × N number of piecemeal by the first step:
Nano particle SEM image indicates with P, by the nano particle SEM image of wherein brightness irregularities be divided into longitudinal M equal portions and
Lateral N equal portions, total M × N number of piecemeal do not overlap each other between piecemeal and piecemeal other than adjacent block boundary, each piecemeal
In, longitudinally there is m pixel, laterally there is n-pixel, m and n are even number, longitudinal M × m picture of corresponding entire nano particle SEM image P
Element and lateral N × n-pixel, by the corresponding actual range of pixel, to calculate nano particle SEM image P and each piecemeal
Actual size, the quantity that pixel is covered in single segmented areas is >=10 nano particles, the nanometer of brightness irregularities
The vertical and horizontal of particle SEM image include at least 3 segmented areas；
Second step calculates the average brightness and whole image average brightness of each segmented areas image:
To the block image that the nano particle SEM image of wherein brightness irregularities is divided by the above-mentioned first step, each point is calculated
The average brightness of block area image is the brightness of piecemeal central point, and assigns matrix expression all piecemeal average brightness, specifically
It operates as follows:
The average brightness a of (I, J) a piecemeal of longitudinal label I and lateral label JI,JIt is calculated with formula (1),
In formula (1), Pu,vIndicate longitudinal u-th of pixel and lateral v-th of picture in the nano particle SEM image of brightness irregularities
The brightness of one point of element, longitudinal label I=1,2 ..., M；Lateral label J=1,2 ... .., N；
With average brightness aI,JThe average brightness of all piecemeals nano particle SEM image piecemeal is constituted according to the position of block to be averaged
Luminance matrixAs shown in formula (2),
In formula (2), M is longitudinal equal portions of the nano particle SEM image piecemeal of brightness irregularities, and N is receiving for brightness irregularities
The lateral equal portions of rice grain SEM image piecemeal, the nano particle SEM image piecemeal average brightness matrix of brightness irregularitiesSquare
Array element aI,JThe central point of each piecemeal of the non-uniform nano particle SEM image of corresponding brightness is AI,J, wherein longitudinal label I
=1,2 ..., M；Lateral label J=1,2 ..., N；Thus the calculating of the average brightness of each segmented areas image is completed；
The whole image average brightness of the nano particle SEM image of brightness irregularities is calculated using formula (3)
In formula (3), M is longitudinal equal portions of the nano particle SEM image piecemeal of brightness irregularities, and N is receiving for brightness irregularities
The lateral equal portions of rice grain SEM image piecemeal, aI,JFor average brightness, longitudinal label I=1,2 ..., M；Lateral label J=1,
2 ... .., N；
Thus the calculating of the average brightness and whole image average brightness of each segmented areas image is completed；
Third step obtains linear extrapolation by piecemeal average brightness matrix and expands luminance matrix:
To the nano particle SEM image piecemeal average brightness matrix for the brightness irregularities that above-mentioned second step obtainsIt carries out linear outer
Expansion is pushed away, linear extrapolation is obtained and expands luminance matrixAs expand the matrix of M+2 row N+2 columnConcrete operations are as follows:
Firstly, order matrixThe first row, last line, first row and last column matrix element be 0, intermediate matrix element by
With matrixComposition, matrixWith matrixBetween meet relationship shown in following formula (4),
For this purpose, expanding matrixFor shown in following formula (5),
Expand matrixFor shown in following formula (6),
Secondly, expanding method according to linear extrapolation, above-mentioned expansion matrix is modifiedThe first row and last line matrix element it is public as follows
Formula (7) and formula (8),
b1,J=2 × b2,J-b3,J(7),
bM+2,J=2 × bM+1,J-bM,J(8),
In formula (7) and formula (8), lateral label J=2,3 ..., N+1；
Equally, above-mentioned expansion matrix is modifiedFirst row and last column following formula of matrix element (9) and formula (10), bI,1
=2 × bI,2-bI,3(9),
bI,N+2=2 × bI,N+1-bI,N(10),
In formula (9) and formula (10), longitudinal label I=2,3 ..., M+1；
For above-mentioned expansion matrixMatrix element b on four angles1,1、b1,N+2、bM+2,1And bM+2,N+2Respectively following formula (11),
Formula (12), formula (13) and formula (14),
Linear extrapolation is obtained as a result, expands luminance matrixShown in following formula (15),
In formula (15), brightness b1,JCorresponding spatial point BI,JBrightness, spatial point BI,JCoordinate be lateral (J-1/2) × n+1 picture
Element and longitudinal (I-1/2) × m+1 pixel, here, lateral label J=1,2 ..., N+2；Longitudinal label I=1,2 ..., M+2；
Thus it completes to obtain linear extrapolation expansion luminance matrix by piecemeal average brightness matrix；
4th step extracts the brightness of each point in the nano particle SEM image of brightness irregularities:
(4.1) step determines each brightness in four surrounded regions of point:
Matrix is expanded by linear extrapolation obtained in above-mentioned third stepIn neighbouring four matrix element bI,J、bI,J+1、bI+1,J+1
And bI+1,J, corresponding rectangular BI,JBI,J+1BI+1,J+1BI+1,JFour point BI,J、BI,J+1、BI+1,J+1And BI+1,JCorresponding brightness,
The linear extrapolation, which is calculated, with formula (16) expands matrixIn the neighbouring corresponding four points B of four matrix elementsI,JBI,J+ 1BI+1,J+1BI+1,JSurround each point C in rectangular rangeI,J,i,jBrightness cI,J,i,j,
In formula (16), rectangular BI,JBI,J+1BI+1,J+1BI+1,JInterior longitudinal direction ith pixel, i=1,2 ..., m；Rectangular BI,JBI,J+ 1BI+1,J+1BI+1,JJ-th of pixel of interior transverse direction, j=1,2 ..., n；Longitudinal label I=1,2 ..., M+1；Lateral label J=1,
2 ..., N+1；X is pixel Ci,jApart from side BI,JBI,J+1Vertical range, y be pixel Ci,jApart from side BI,JBI+1,JIt is vertical
Distance, unit are pixel, and 0≤x≤m, 0≤y≤n；
(4.2) step extracts the brightness of each point in the nano particle SEM image of brightness irregularities:
By matrix element gu,vConstitute the luminance matrix of the nano particle SEM image of brightness irregularitiesIn matrix element gu,vWith
Pixel Ci,jBrightness ci,jRelationship such as formula (17) shown in,
g(I-1)×m+i-m/2,(J-1)×n+j-n/2=cI,J,i,j(17),
In formula (17), g(I-1)×m+i-m/2,(J-1)×n+j-n/2That is matrix element gu,v, i=1,2 ..., m；J=1,2 ..., n；I=1,
2 ..., M+1；J=1,2 ..., N+1；Be constrained to 1≤[(I-1) × m+i-m/2]≤M × m and 1≤[(J-1) × n+j-n/2]≤
N × n, u=(I-1) × m+i-m/2, v=(J-1) × n+j-n/2；
By matrix element gu,vThe luminance matrix of the nano particle SEM image of the brightness irregularities of compositionShown in following formula (18),
In formula (18), longitudinal label u=1,2 ..., M × m, lateral label v=1,2 ..., N × n；
So far it completes to extract the brightness that each is put in the nano particle SEM image of brightness irregularities；
5th step calculates every bit brightness correction coefficients, realizes the correction of nano particle SEM image uneven brightness:
The whole image average brightness of the nano particle SEM image of brightness irregularities is calculated with formula (3)On the basis of, it calculates every
The correction coefficient of one pointAnd each point of the nano particle SEM image of brightness irregularities is realized with formula (19)
Gamma correction qu,v,
In formula (19), Pu,vIndicate longitudinal u-th of pixel and lateral v-th of picture in the nano particle SEM image of brightness irregularities
The brightness of one point of element, u=1,2 ..., M × m；V=1,2 ..., N × n；For non-uniform nano particle SEM image
Whole image average brightness,
As shown in formula (20), the gamma correction g of each point of the nano particle SEM image of brightness irregularitiesu,vConstitute brightness
The matrix of non-uniform nano particle SEM gamma correction image
The matrix of the nano particle SEM gamma correction image of brightness irregularitiesShow nano particle SEM image uneven brightness
Correction effect；
So far it completes to calculate every bit brightness correction coefficients, realizes the correction of nano particle SEM image uneven brightness.
2. the brightness of image bearing calibration extracted according to claim 1 based on nano particle SEM image brightness, feature are existed
In: it is described that the nano particle SEM image of wherein brightness irregularities is divided into longitudinal M equal portions and transverse direction N equal portions, wherein M=4,
N=6.
3. the brightness of image bearing calibration extracted according to claim 1 based on nano particle SEM image brightness, feature are existed
In: in each described piecemeal, longitudinally there is m pixel, laterally there is n-pixel, wherein n=100 pixel, m=100 pixel.
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