CN109470758A - A kind of reusable space atomic oxygen sensor - Google Patents
A kind of reusable space atomic oxygen sensor Download PDFInfo
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- CN109470758A CN109470758A CN201811158237.7A CN201811158237A CN109470758A CN 109470758 A CN109470758 A CN 109470758A CN 201811158237 A CN201811158237 A CN 201811158237A CN 109470758 A CN109470758 A CN 109470758A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4073—Composition or fabrication of the solid electrolyte
- G01N27/4074—Composition or fabrication of the solid electrolyte for detection of gases other than oxygen
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/4065—Circuit arrangements specially adapted therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/4067—Means for heating or controlling the temperature of the solid electrolyte
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
- G01N27/4072—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure characterized by the diffusion barrier
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- Measuring Oxygen Concentration In Cells (AREA)
Abstract
The invention discloses a kind of reusable space atomic oxygen sensors, using the zirconia ceramics of stabilized with yttrium oxide as the solid electrolyte in atomic oxygen sensor, it is used for transmission the oxonium ion by generating after elemental oxygen and cathodic process, by the size of the electric current as caused by the flowing of oxonium ion between measurement cathode and anode, space atomic oxygen flux is measured.Degrading for electrolyte is not will cause when transmitting in zirconia solid electrolyte due to oxonium ion, therefore, it can be avoided the problem of gradually being degraded due to sensor material and elemental oxygen interaction in the prior art, so this sensor provided by the invention may be reused.In addition, space atomic oxygen sensor provided by the invention, also have the characteristics that small in size, light-weight and low in energy consumption, can be improved the sensitivity of current measurement, meet the needs detected for a long time and repeatedly to space atomic oxygen environment.
Description
Technical field
The present invention relates to detection of gas fields, and in particular to a kind of reusable space atomic oxygen sensor.
Background technique
When carrying out the research of Low Earth Orbit atomic oxygen environment ground simulation method, need to produce ground elemental oxygen analog machine
The beam intensity and flux of raw elemental oxygen measure, while being also required to carry instrument and equipment on satellite to Low Earth Orbit
Atomic oxygen beam intensity of flow and flux in environment carry out real-time detection.
Typically now way is to be reacted using film with elemental oxygen, causes Mass lost or resistivity to increase, atom
Oxygen reacts with metal, discharges heat and elemental oxygen and conductive metal film reaction, and the methods of film quality increase is caused to push away
Calculate the beam intensity and flux of elemental oxygen.
Existing Kapton matter damage method, nanometer silverskin survey the methods of conductivity variations method and carbon film matter damage method into
When row space elemental oxygen detects, is gradually degraded after sensor material and elemental oxygen interaction, lead to the electricity of sensor material
Resistance increases or conductivity decline, and the atomic oxygen flux that variable quantity and the sensor of sensor resistance or conductance receive is substantially linear
Relationship.Therefore, changed by the resistance variations or conductance of testing sensor material, can be obtained the flux of space elemental oxygen.?
In these methods, with the increase for the elemental oxygen fluence that sensor is received, sensor material will finally be degraded completely
And loss of function.Therefore, the space atomic oxygen sensor developed based on these conventional methods can not be reused, and complete primary
Detection must just replace probe material.
Summary of the invention
In view of this, having reusable the present invention provides a kind of reusable space atomic oxygen sensor
The advantages of, it can be achieved that being detected for a long time and repeatedly to space atomic oxygen environment.
A kind of reusable space atomic oxygen sensor provided by the invention is made pottery using the zirconium oxide of stabilized with yttrium oxide
Porcelain is used for transmission the oxonium ion by generating after elemental oxygen and cathodic process as the solid electrolyte in atomic oxygen sensor, leads to
The size of the electric current as caused by the flowing of oxonium ion between measurement cathode and anode is crossed, space atomic oxygen flux is measured.
The space atomic oxygen sensor further comprises heating unit, and heating unit is for adding solid electrolyte
Heat.
The space atomic oxygen sensor further comprises reference electrode, is attached at solid electrolyte, enables cathode and reference
Interelectrode pressure difference is less than the pressure difference between cathode and anode.
It includes solid electrolyte, carrier that the space atomic oxygen sensor further uses stacked structure from top to bottom
Substrate, heating unit, electric insulation layer and thermocouple temperature sensor and five layers of temperature-control circuit, cathode and reference electrode attach
In solid electrolyte layer, anode is attached at carrier basal layer, and contacts with solid electrolyte；Wherein, carrier substrate is used for
Heat is conducted between solid electrolyte and heating unit, and serves as electric insulating medium；Electric insulation layer, in heating unit and heat
Heat is conducted between galvanic couple temperature sensor and temperature-control circuit, and serves as insulating materials；Thermocouple temperature sensor and temperature
Control circuit for real-time monitoring and controls the temperature of heating unit.
The size of the space atomic oxygen sensor is 20mm × 3.5mm × 0.6mm, using thick film screen typography system
Make, each component part is bonded together by baking.
The material of the cathode of the space atomic oxygen sensor, reference electrode and anode is platinum, carrier substrate and electricity
The material of insulating layer is thermally conductive and electrically insulating medium.
The carrier substrate of the space atomic oxygen sensor and the material of electric insulation layer are aluminium oxide.
The heating temperature of the solid electrolyte layer of the space atomic oxygen sensor is 650 DEG C or more and contains 650 DEG C.
The heating unit of the space atomic oxygen sensor is rectangular-ambulatory-plane heater circuit made of nickel filament.
The thermocouple temperature sensor of the space atomic oxygen sensor is platinum resistance temperature sensor.
The utility model has the advantages that
1, the present invention is using the zirconium oxide of stabilized with yttrium oxide as the solid electrolyte in atomic oxygen sensor, due to elemental oxygen
It is transmitted with will become oxonium ion after cathodic process in zirconia solid electrolyte, by measuring in Zirconia electrolytic indirectly
Ion concentration can measure space atomic oxygen flux, since elemental oxygen becomes oxonium ion in zirconia solid electrolyte in this method
It not will cause degrading for electrolyte when transmitting in matter, therefore, can be avoided in the prior art due to sensor material and original
The problem of sub- oxygen interaction is gradually degraded, so this sensor provided by the invention may be reused.
2, by the present invention in that being heated with zirconia ceramics of the heating unit to stabilized with yttrium oxide, its conduction can be improved
Property, when temperature reaches 650 DEG C or more, electric conductivity will be greatly enhanced, to effectively improve the precision of measurement.
3, the present invention can increase the contact area of heating unit and solid electrolyte by using stacked structure, mention
High heating efficiency extends service life to effectively reduce the overall power of sensor.
4, the whole design using miniaturization of the present invention, can effectively shorten stabilized with yttrium oxide zirconia ceramics length
Degree reduces the conduction distance of oxonium ion, reduces transmission resistance, to improve the sensitivity of current measurement.
5, the present invention considers in use process, and when the oxygen ion concentration near cathode is higher, cathode can nearby be generated
Biggish negative electric field, by increasing reference electrode, it is attached to play decrease cathode so that the further of oxonium ion be inhibited to lead to the problem of
Close negative electricity field action.
Detailed description of the invention
Fig. 1 is space atomic oxygen sensor design diagram.
Wherein, 1-1: DC power supply, 1-2: for measuring the ammeter of electric current between anode and DC power supply, 1-3: Gu
Body electrolyte, 1-4: anode, 1-5: carrier substrate, 1-6: heating unit, 1-7: electric insulation layer, 1-8: temperature sensing
Device and temperature-control circuit, 1-9: cathode, 1-10: reference electrode, 1-11: for measuring bias between reference electrode and cathode
Voltmeter.
Specific embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
The present invention provides a kind of reusable space atomic oxygen sensor, basic principles are as follows: uses yttrium oxide
Stable zirconia ceramics is used for transmission as the solid electrolyte in atomic oxygen sensor by producing after elemental oxygen and cathodic process
Raw oxonium ion measures space atomic oxygen flux by measuring the oxygen ion concentration in Zirconia electrolytic indirectly.In addition, in order to
Improve measurement precision, can also by using heating unit by the zirconia ceramics of stabilized with yttrium oxide be heated to 650 DEG C and with
On, electric conductivity will greatly enhance.
Specifically, a kind of reusable space atomic oxygen sensor proposed by the present invention, with stabilized with yttrium oxide
Zirconium oxide is as the solid electrolyte in atomic oxygen sensor, there is the platinum (Pt) of high adsorption activity to make respectively elemental oxygen
Electric heating is made with nickel filament using aluminium oxide ceramics as carrier substrate and electric insulation layer for cathode, anode and reference electrode
Atomic oxygen sensor is made using silk-screen printing technique in unit.Its working principle is that: stabilizer oxidation is introduced in zirconium oxide
After yttrium, it will generate Lacking oxygen in the crystal structure of zirconium oxide.At normal temperature, yttria stabilised zirconia ceramics middle reaches
From ion it is seldom, electric conductivity is very weak.With electric heating unit by the zirconia ceramics of stabilized with yttrium oxide be heated to 650 DEG C and with
When upper, electric conductivity will be greatly enhanced.After elemental oxygen (O) and cathode material collision in space, adsorbed by cathode, and in cathode
It obtains electronics and is changed into oxonium ion (O2-) and enter zirconia ceramics electrolyte, to increase zirconia ceramics electrolyte
In ion concentration.When working sensor, the DC voltage of application+5V between anode and cathode.In zirconia ceramics electrolyte
Oxonium ion is under electric field action, displacement from cathode to anode.Due in the variable quantity and Zirconia electrolytic of electric current from
Sub- concentration is related, and ion concentration is related with the atomic oxygen flux density for touching cathode, and current change quantity and space are former
The flux of sub- oxygen has certain proportionate relationship.Therefore, by measuring the variation of electric current, it can be obtained the atom in space environment
Oxygen flux.
The design size of the present embodiment suggestion is 20mm × 3.5mm × 0.6mm, and entire sensor is printed using thick film screen
The production of dataller's skill, overall structure are divided into 5 layers, i.e. solid electrolyte, carrier substrate, heating unit, electrical isolation from top to bottom
Layer and thermocouple temperature sensor and temperature-control circuit, further include cathode, reference electrode and anode.Overall sensor size
It reduces, the length of the zirconia ceramics of stabilized with yttrium oxide can be reduced, reduce the conduction distance of oxonium ion, reduce transmission resistance,
Improve the sensitivity of current measurement.Space atomic oxygen sensor design diagram, as shown in Figure 1, specific as follows:
First layer is solid electrolyte 1-3, is yttria stabilised zirconia ceramics, and the transmission as oxonium ion is logical
Road, between carrier substrate and cathode and reference electrode, right end is connected with anode.In the zirconia ceramics of stabilized with yttrium oxide
There are Lacking oxygen, Lacking oxygen can be used as the channel of oxygen ion transport.Under room temperature, the Lacking oxygen in solid electrolyte is less.When
When temperature reaches 650 DEG C or more, Lacking oxygen increases sharply, so that solid electrolyte has good ionic conductivity, from
And improve the precision of measurement.After the oxonium ion that cathode generates enters solid electrolyte layer, oxonium ion will be in solid electrolyte
Lacking oxygen between transmit.Therefore, the major function of solid electrolyte is to provide transmission channel for oxonium ion.
The second layer is carrier substrate 1-5, for conducting heat between solid electrolyte and heating unit, and serves as electricity
Dielectric, between solid electrolyte and heating unit.Its material is aluminium oxide (also optional other materials, but function
Can be necessary identical), there are two aspects for effect, first is that it is with good heat conductivity and heat-resisting quantity, it can be by heating unit
Heat be rapidly transferred to solid electrolyte layer so that the temperature of solid electrolyte layer maintains 650 DEG C or more；Second is that solid
Electric insulating medium is served as between body electrolyte and heating unit.
Third layer is heating unit 1-6, provides heat source for solid electrolyte layer, is located at carrier substrate and electric insulation layer
Between.It is rectangular-ambulatory-plane heater circuit made of nickel filament, and between carrier substrate and electric insulation layer, effect is to pass through
Electrocaloric effect generates heat, and the temperature of solid electrolyte is maintained 650 DEG C or more.The heating electricity of rectangular-ambulatory-plane made of nickel filament
Road has the advantages that low-power consumption.
4th layer is electric insulation layer 1-7, between heating unit and thermocouple temperature sensor and temperature-control circuit
Heat is conducted, and serves as insulating materials, between heating unit and thermocouple temperature sensor and temperature-control circuit.Its material
Material is aluminium oxide, and between heating unit and thermocouple temperature sensor, effect includes two aspects, first is that in heating unit
Insulating materials is served as between thermocouple temperature sensor, second is that the heat transmission that heating unit is generated to electric thermo-couple temperature senses
Device.
Layer 5 is thermocouple temperature sensor and temperature-control circuit 1-8, and thermocouple temperature sensor and temperature control
Circuit for real-time monitoring and controls the temperature of heating unit, is located at the bottom.Temperature sensor is platinum resistance temperature sensing
Device, effect is real-time monitoring and the temperature for controlling heating unit, to provide stable temperature for second layer solid electrolyte layer
Degree reduces temperature change to the adverse effect of current measurement.
Cathode 1-9 is attached at solid electrolyte layer, and anode 1-4 is attached at carrier basal layer and and solid electrolyte layer
It is connected, material is platinum, the cathode of the external D.C. regulated power supply of cathode, the anode of the external D.C. regulated power supply of anode.Due to
Platinum has high elemental oxygen adsorption activity, and is not easy to be aoxidized by elemental oxygen, and therefore, cathode material must select platinum, function
It is that will be adsorbed by cathode after the elemental oxygen (O) in space environment is collided with cathode and be converted into oxonium ion (O2-).Anode is used
Electric field is established between cathode, the oxonium ion for generating cathode is moved in solid electrolyte layer by the cathode Ghandler motion that faces south.The present embodiment
In, anode is connected with the anode of+5V D.C. regulated power supply.
Reference electrode 1-10 is attached at solid electrolyte layer, and material is platinum, and reference electrode external direct current power supply is just
Pole makes the pressure difference between cathode and reference electrode be less than the pressure difference between cathode and anode, the external direct current of reference electrode in the present embodiment
+ 0.3V the anode of power supply.Since oxonium ion is all generated in cathode, when the oxygen ion concentration near cathode is higher, yin will lead to
Biggish negative electric field is extremely nearby generated, the further generation of oxonium ion will be inhibited, pass through increase reference electrode, energy in the present invention
Enough achieve the effect that weaken the negative electric field near cathode.
In addition, DC power supply 1-1, is dual-output power supply, the positive terminal of output+5V voltage is connected with anode, output+
The positive terminal of 0.3V is connected with reference electrode, and the cathode of the DC power supply is connected with cathode.Ammeter 1-2, be connected on anode and
Between DC power supply, for measuring the electric current between anode and DC power supply.Voltmeter 1-11, is connected in parallel on cathode and reference electrode
Between, for measuring the bias between reference electrode and cathode.
Each layer of sensor passes through silk-screen printing technique, successively according to temperature sensor 1-8, electric insulation layer 1-7,
Heating unit 1-6, carrier substrate 1-5, anode 1-4, solid electrolyte 1-3, reference electrode 1-10 and cathode 1-9
Sequence successively printing, after all layers are completed for printing, places a sensor at baking oven, under conditions of 1000 DEG C, toasts 1 hour,
Between each layer can secure bond together.
It is combined in addition, sensor also can choose other non-laminated structures, heating unit can also use non-contact
Other heating methods of formula realize the heating to solid electrolyte.
Embodiment 1:
This example demonstrates a kind of specific structures of reusable space atomic oxygen sensor proposed by the present invention.
The overall dimensions of atomic oxygen sensor are 20mm × 3.5mm × 0.6mm, and entire sensor is printed using thick film screen
Technique production.
Cathode material is metal platinum, is in flag shape, with the contact portion of solid electrolyte having a size of 2mm × 2.0mm ×
0.02mm, extension is having a size of 5.0mm × 1.0mm × 0.02mm.The material of reference electrode is metal platinum, having a size of 2mm
× 2.0mm × 0.02mm, the spacing with cathode is 2mm, and extension is having a size of 5.0mm × 1.0mm × 0.02mm.Reference electrode
The Dc bias of application+0.3V between cathode.
Solid electrolyte is yttria stabilised zirconia ceramics, is rectangle, having a size of 20.0mm × 3.5mm ×
0.2mm.Zirconia ceramics is heated to 650 DEG C using heating unit.It is negative after space elemental oxygen (O) and cathode material collision
Pole absorption, and obtain electronics in cathode and be changed into oxonium ion (O2-), the ion concentration in solid electrolyte is increased, is improved
The electric conductivity of solid electrolyte increases so as to cause the electric current between yin, yang two-stage.Work of the oxonium ion in anode and cathode electric field
Under, by the Lacking oxygen in solid electrolyte, is transmitted from cathode to anode, increase the electric current in circuit.Pass through measurement electricity
Rheology, in conjunction with nominal data, you can learn that the real-time flux of elemental oxygen.
Anode material is metal platinum, is in flag shape, with the contact portion of solid electrolyte having a size of 6mm × 2.0mm ×
0.02mm, extension is having a size of 10.0mm × 1.0mm × 0.02mm.The Dc bias of application+5V between anode and cathode.
Carrier base material is aluminium oxide, is rectangle, having a size of 20mm × 3.5mm × 0.1mm.
The material of heating unit be nickel filament, shape is rectangular-ambulatory-plane, effective heating unit having a size of 10mm × 3.0mm ×
The size of 0.06mm, two extraction poles (anode and cathode) are 3.0mm × 3.0mm × 0.06mm.
Electric insulation layer material is aluminium oxide, is rectangle, having a size of 18.0mm × 3.0mm × 0.1mm.
Temperature sensor is made of platinum resistance temperature sensor, having a size of 20mm × 3.0mm × 0.1mm, for real-time
The temperature of heating unit is monitored, and by corresponding control circuit, the temperature of heating unit is made to maintain 650 DEG C, is solid electricity
Solution matter provides stable temperature, reduces temperature change and interferes current measurement bring, improves the precision of current measurement.
In conclusion the above is merely preferred embodiments of the present invention, being not intended to limit the scope of the present invention.
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in of the invention
Within protection scope.
Claims (10)
1. a kind of reusable space atomic oxygen sensor, which is characterized in that using the zirconia ceramics of stabilized with yttrium oxide
As the solid electrolyte in atomic oxygen sensor, it is used for transmission the oxonium ion by generating after elemental oxygen and cathodic process, is passed through
The size of the electric current as caused by the flowing of oxonium ion between cathode and anode is measured, space atomic oxygen flux is measured.
2. space atomic oxygen sensor according to claim 1, which is characterized in that the space atomic oxygen sensor is into one
Step includes heating unit, and heating unit is for heating solid electrolyte.
3. space atomic oxygen sensor according to claim 1 or 2, which is characterized in that the space atomic oxygen sensor
Further comprise reference electrode, be attached at solid electrolyte, the pressure difference between cathode and reference electrode is enabled to be less than between cathode and anode
Pressure difference.
4. space atomic oxygen sensor according to claim 3, which is characterized in that wrapped from top to bottom using stacked structure
Include solid electrolyte, carrier substrate, heating unit, electric insulation layer and thermocouple temperature sensor and temperature-control circuit five
Layer, cathode and reference electrode are attached at solid electrolyte layer, and anode is attached at carrier basal layer, and connects with solid electrolyte
Touching；Wherein, carrier substrate for conducting heat between solid electrolyte and heating unit, and serves as electric insulating medium；It is electric exhausted
Edge layer for conducting heat between heating unit and thermocouple temperature sensor and temperature-control circuit, and serves as insulating materials；
Thermocouple temperature sensor and temperature-control circuit for real-time monitoring and control the temperature of heating unit.
5. space atomic oxygen sensor according to claim 4, which is characterized in that the space atomic oxygen sensor size
It for 20mm × 3.5mm × 0.6mm, is made of thick film screen typography, each component part is bonded together by baking.
6. space atomic oxygen sensor according to claim 3, which is characterized in that the cathode, reference electrode and anode
Material be platinum；The material of the carrier substrate and the electric insulation layer is thermally conductive and electrically insulating medium.
7. space atomic oxygen sensor according to claim 4, which is characterized in that the carrier substrate and the electricity are absolutely
The material of edge layer is aluminium oxide.
8. space atomic oxygen sensor according to claim 2, which is characterized in that the heating temperature of the solid electrolyte layer
Degree contains 650 DEG C for 650 DEG C or more.
9. space atomic oxygen sensor according to claim 2, which is characterized in that the heating unit is made of nickel filament
Rectangular-ambulatory-plane heater circuit.
10. space atomic oxygen sensor according to claim 4, which is characterized in that the thermocouple temperature sensor is
Platinum resistance temperature sensor.
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| CN201811158237.7A CN109470758A (en) | 2018-09-30 | 2018-09-30 | A kind of reusable space atomic oxygen sensor |
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| CN201811158237.7A CN109470758A (en) | 2018-09-30 | 2018-09-30 | A kind of reusable space atomic oxygen sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022060921A1 (en) * | 2020-09-21 | 2022-03-24 | Applied Materials, Inc. | Atomic oxygen detection in semiconductor processing chambers |
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| WO2022060921A1 (en) * | 2020-09-21 | 2022-03-24 | Applied Materials, Inc. | Atomic oxygen detection in semiconductor processing chambers |
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Application publication date: 20190315 |