CN109461845A - The production method of flexible substrate, flexible display panels and flexible display panels - Google Patents
The production method of flexible substrate, flexible display panels and flexible display panels Download PDFInfo
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- CN109461845A CN109461845A CN201811206587.6A CN201811206587A CN109461845A CN 109461845 A CN109461845 A CN 109461845A CN 201811206587 A CN201811206587 A CN 201811206587A CN 109461845 A CN109461845 A CN 109461845A
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- substrate
- groove
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- flexible
- hard
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/80—Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The present invention provides a kind of flexible substrate, the production method of flexible display panels and flexible display panels, and the production method of the flexible display panels includes: offer flexible substrate；Interconnected groove is formed in a side surface of the flexible substrate, the port of the groove is located inside the flexible substrate；The flexible substrate is fitted on hard substrate, has reeded surface and fits with the hard substrates；It extracts the air in groove out, forms vacuum chamber and/or low pressure chamber between flexible substrate and hard substrate, the flexible substrate is fixed on hard substrate by groove and external draught head；Each film layer is formed in the flexible substrate and is encapsulated, and display panel is formed；Air is injected into groove, is eliminated groove and external draught head, is separated display panel with hard substrate.
Description
Technical field
The present invention relates to field of electronic display more particularly to a kind of flexible substrates, flexible display panels and Flexible Displays face
The production method of plate.
Background technique
In the manufacturing process of flexible self-luminous organic display screen, usually using hard material (such as glass, metal etc.)
As substrate, one layer of flexible substrate is coated on substrate later, then successively form each film layer in the flexible substrate and seal
Dress forms display panel.And then by using laser lift-off technique (LLO, Laser lift-off) by substrate and flexible liner
Bottom separates, and realizes flexible.
Laser lift-off technique energy consumption is big, time-consuming, influences production capacity, and expensive, while will affect flexible display panels
Performance, reduce product yield.
Summary of the invention
The present invention provides the production method of a kind of flexible substrate, flexible display panels and flexible display panels, can substitute
Laser lift-off technique in flexible panel manufacturing process, significantly improves the above problem.
Technical solution provided by the invention is as follows:
A kind of production method of flexible display panels comprising following steps:
Flexible substrate is provided；
Interconnected groove is formed in a side surface of the flexible substrate, the port of the groove is located at the flexibility
Substrate interior；
The flexible substrate is fitted on hard substrate, has reeded surface and fits with the hard substrates；
It extracts the air in groove out, vacuum chamber and/or low pressure chamber is formed between flexible substrate and hard substrate, by recessed
The flexible substrate is fixed on hard substrate by slot and external draught head；
Each film layer is formed in the flexible substrate and is encapsulated, and display panel is formed；
Air is injected into groove, is eliminated groove and external draught head, is separated display panel with hard substrate.
A specific embodiment according to the present invention, wherein be located at the company of the flexible substrate side by least one
Through-hole extracts the air in groove out, and the intercommunicating pore is used for across the side of the flexible substrate, will be located inside flexible substrate
Groove port be connected to outside.
A specific embodiment according to the present invention, wherein run through the lower connection of the hard substrate by least one
Extract the air in groove out in hole.
A specific embodiment according to the present invention, wherein further include following step after display panel is separated with hard substrate
It is rapid:
It heats the flexible substrate and has reeded surface, melt the flexible material on the surface, eliminate the recessed of surface
Slot.
A specific embodiment according to the present invention, wherein further include following step after display panel is separated with hard substrate
It is rapid:
Have in the flexible substrate and be bonded thin polymer film on reeded surface, fills the groove on surface.
A specific embodiment according to the present invention, wherein the depth of the interconnected groove is no more than described soft
/ 10th of property substrate thickness.
A specific embodiment according to the present invention, wherein the flexible substrate further includes positioned at described interconnected
The deep hole of the intersection of groove.
A specific embodiment according to the present invention, wherein the deep hole is hemispherical, and depth is no more than the flexibility
The half of substrate thickness.
Correspondingly, the present invention also provides a kind of flexible substrate, wherein a side surface of the flexible substrate has mutually
The port of the groove of connection, the groove is located inside the flexible substrate；When being bonded with hard substrate, the groove is hard
The sealing of matter substrate, forms a closing chamber between hard substrate and flexible substrate.
A specific embodiment according to the present invention, wherein have extremely on the hard substrate being bonded with the flexible substrate
Few one runs through the lower intercommunicating pore of the hard substrate, for extracting the air in the groove out.
A specific embodiment according to the present invention, wherein the flexible substrate further includes that at least one is located at side
Intercommunicating pore, for across the side of the flexible substrate, the groove port being located inside flexible substrate to be connected to outside.
A specific embodiment according to the present invention, wherein the flexible substrate further includes corresponding with the intercommunicating pore
Plug, for being closed the communicating passage of groove port and outside inside flexible substrate.
Correspondingly, the present invention also provides a kind of flexible display panels, wherein include flexible substrate, the flexible substrate
One side surface has interconnected groove, and the port of the groove is located inside the flexible substrate；It is pasted when with hard substrate
When conjunction, the groove is sealed by hard substrate, and a closing chamber is formed between hard substrate and flexible substrate.
The invention has the benefit that groove is arranged on the surface of flexible substrate side in the present invention, pasted when with hard substrate
When conjunction, the groove is sealed by hard substrate, and a closing chamber is formed between hard substrate and flexible substrate, by extracting institute out
Flexible substrate and hard substrate can be fixed together by stating the air in closing chamber, accordingly, it is only necessary to infuse in closing chamber
The two can be separated by entering air.The present invention can substitute the laser lift-off technique in flexible panel manufacturing process, reduce life
Cost is produced, product yield is improved.
Detailed description of the invention
Fig. 1 to Fig. 4 is the knot of the display panel in different step in the prior art in the manufacturing process of flexible display panels
Structure schematic diagram；
Fig. 5 to Fig. 7 is the structure of the display panel in different step in the present invention in the manufacturing process of flexible display panels
Schematic diagram；
Fig. 8 is the bottom view of the flexible substrate in a specific embodiment of the invention；
Fig. 9 is the left view of the flexible substrate in Fig. 8；
Figure 10 is the bottom view of the flexible substrate in another specific embodiment of the invention；
Figure 11 is the left view of the flexible substrate in Figure 10；
Figure 12 is the production flow diagram of the flexible display panels in a specific embodiment of the invention.
Specific embodiment
The explanation of following embodiment is referred to the additional illustration, the particular implementation that can be used to implement to illustrate the present invention
Example.The direction term that the present invention is previously mentioned, such as [on], [under], [preceding], [rear], [left side], [right side], [interior], [outer], [side]
Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to
The limitation present invention.The similar unit of structure is with being given the same reference numerals in the figure.
The embodiment of the present invention is described in detail below in conjunction with attached drawing.
The prior art is briefly introduced first.Referring to figs. 1 to Fig. 4, Fig. 1 to Fig. 4 is Flexible Displays in the prior art
In the manufacturing process of panel, the structural schematic diagram of the display panel in different step.
As shown in Figure 1, the hard substrate 110 can be glass, metal, resin etc. firstly, providing hard substrate 110
Various rigidity are met the requirements, and can carry the flexible substrate and each film layer thereon chooses organic glass in the present embodiment
Material of the glass as hard substrate 110.
Later referring to fig. 2, flexible substrate 120 is formed on the hard substrate 110, the flexible substrate 120 can be
Polymer material, such as polyimides (PI), polyethylene terephthalate (PET) etc..Later, successively in the flexible liner
Each functional film layer that display panel is formed on bottom 120, referring to Fig. 3, including tft layer 130, color film layer 140 and envelope
Layer 150 is filled, Fig. 3 is only exemplary two functional film layers shown in display panel, in other embodiments, the film layer
The film layers such as layer during further including liquid crystal layer, polarizing layer, OLED, details are not described herein.
After encapsulation terminates, referring to fig. 4, the device after encapsulation is separated from hard substrate 110.Specifically,
Using display panel described in laser irradiation so that include in ablation layer amorphous silicon hydride release hydrogen, realize display panel and
The separation of hard substrate.The energy consumption of this process is big, time-consuming, influences production capacity, and expensive, while will affect Flexible Displays face
The performance of plate reduces product yield.
Below in conjunction with attached drawing to being described in detail in the manufacturing process of flexible display panels in the present invention.Firstly, ginseng
Adding Figure 12, Figure 12 is the production flow diagram of the flexible display panels in a specific embodiment of the invention, the present invention provides
A kind of production method of flexible display panels comprising following steps:
S110., flexible substrate is provided；
S120. interconnected groove is formed in a side surface of the flexible substrate, the port of the groove is located at institute
It states inside flexible substrate；
S130. the flexible substrate is fitted on hard substrate, has reeded surface and is affixed with the hard substrates
It closes；
S140. it extracts the air in groove out, forms vacuum chamber and/or low pressure chamber between flexible substrate and hard substrate,
The flexible substrate is fixed on hard substrate by groove and external draught head；
S150. each film layer is formed in the flexible substrate and is encapsulated, and display panel is formed；
S160. air is injected into groove, eliminates groove and external draught head, makes display panel and hard substrate point
From.
The manufacturing process for flexible display panels in the present invention is described in detail below in conjunction with Fig. 5 to Figure 11.
Firstly, providing hard substrate 110, it is full that the hard substrate 110 can be the various rigidity such as glass, metal, resin
Foot requires, and can carry the flexible substrate and each film layer thereon, and in the present embodiment, selection organic glass is as hard
The material of substrate 110.
Next, in step s 110, providing flexible substrate 120.The material of the flexible substrate 120 preferably polymerize
Object material, such as polyimides (PI), polyethylene terephthalate (PET) etc..
Later, in the step s 120, interconnected groove 160, institute are formed in a side surface of the flexible substrate 120
The port for stating groove is located inside the flexible substrate 120.The method for forming the groove 160 can be dry or wet quarter
Erosion, specifically, in practice can be according to the suitable etching of shape selection of the area and required groove 160 of flexible substrate 120
Method.
Fig. 8 shows the schematic diagram of the groove 160 in one embodiment of the present of invention, and the groove 160 is in " well " font
Intersect connection, it is ensured that can be extracted out by an intercommunicating pore air in fluted 160.Preferably, the flexible liner
Bottom 120 further includes the intercommunicating pore that at least one is located at side, for that will be located at flexibility across the side of the flexible substrate 120
The port of groove 160 inside substrate 120 is connected to outside, can will be in groove 160 by the intercommunicating pore in subsequent step
Air extraction, the quantity of the intercommunicating pore is preferably one.
The side view of flexible substrate 120 in the present embodiment is as shown in Figure 9, it is preferred that the flexible substrate 120 further includes
Plug corresponding with the intercommunicating pore is logical for being closed the connection of port and outside of the groove 160 inside flexible substrate 120
Road.After the air extraction in groove 160, the intercommunicating pore can be filled by the plug, avoiding air from entering leads to flexibility
Substrate 120 is detached from.If being not provided with the plug, vaccum-pumping equipment is needed to be always maintained at work in the manufacturing process of display panel
Make, results in waste of resources.
Preferably, in the present embodiment, make closing chamber and the external world that there is bigger air pressure to increase the volume of groove 160
Difference, the groove 160 further include the deep hole positioned at " well " font infall, and the deep hole is hemispherical, as shown in Figure 10, left
Multi-view reference Figure 11.Preferably, the depth of the interconnected groove 160 is no more than the ten of 120 thickness of flexible substrate
/ mono-；And the depth of the deep hole is no more than the half of 120 thickness of flexible substrate.The depth of confinement groove 160
It is in order to avoid the volume of closing chamber is excessive, the pressure applied on flexible substrates has been more than that flexible substrate 120 can bear
Maximum pressure causes to collapse.
Certainly not in other embodiments, the groove 160 can not have the intercommunicating pore；The knot of the groove 160
Structure may be that round, shaped form or other any shapes, the shape of groove 160 have no effect on its effect as closing chamber,
It is only limited to illustrate the present invention, and is not construed as limiting the claims.
Next, in step s 130, the flexible substrate 120 is fitted on hard substrate 110, there is groove 160
Surface fit with the hard substrate 110.Since the port of groove 160 is all located inside the flexible substrate 120,
After flexible substrate 120 is fitted on hard substrate 110, the groove 160 is i.e. in flexible substrate 120 and hard substrate 110
Between form a seal chamber, as shown in Figure 5.
Later, in step S140, the air in groove 160 is extracted out, between flexible substrate 120 and hard substrate 110
Vacuum chamber and/or low pressure chamber are formed, the flexible substrate 120 is fixed on by hard base by groove 160 and external draught head
On plate.As previously mentioned, the flexible substrate 120 further includes at least one intercommunicating pore and intercommunicating pore correspondence for being located at side
For being closed the plug of the communicating passage, the gas in the closing chamber can be extracted out by the intercommunicating pore.In this hair
In another bright embodiment, the port of the groove 160 is all sealed in the flexible substrate 120, at this point, with described soft
Property substrate 120 be bonded hard substrate 110 on at least one run through the hard substrate 110 lower intercommunicating pore, for taking out
Air in the groove 160 out.Correspondingly, the hard substrate 110 also includes one corresponding with the lower intercommunicating pore slotting
Plug, for filling the lower intercommunicating pore, avoids air from entering
In another embodiment of the present invention, in order to which the sealing effect for improving seal chamber in step s 130 will be flexible
Substrate 120 is placed into after hard substrate 110, can be in flexible substrate 120 and hard substrate there are no before starting to vacuumize
Apply sealant on the outside of 110 contact surface.Typically, flexible substrate 120 can not be fixed to hard by the bonding force of sealant
On matter substrate 110, but the sealant can eliminate the gap on the contact surface of flexible substrate 120 and hard substrate 110, make
Seal chamber is easier to be evacuated.
Later, in step S150, each film layer is formed in the flexible substrate 120 and is encapsulated, form display panel.
The step for technology it is same as the prior art, can be by accomplished in many ways, details are not described herein.
Finally, injecting air into groove 160 in step S160, groove 160 and external draught head are eliminated, makes to show
Show that panel is separated with hard substrate 110.Specifically, extracting the plug, seal chamber can be admitted air into, realizes flexible substrate
120 with the separation of hard substrate 110.
Preferably, further comprising the steps of after separating display panel with hard substrate 110 by step S160: to add
The heat flexible substrate 120 has reeded surface, melts the flexible material on the surface, eliminates the groove 160 on surface.Disappear
Except groove 160 can make the outside of display panel smooth, more easily cooperate it is subsequent installation and etc..Certainly, described in elimination
The method of groove 160 is there are also very much, can be by the flexible substrate 120 for example, in another embodiment of the present invention
It is bonded thin polymer film on surface with groove 160, fills the groove on surface.
Groove is arranged on the surface of flexible substrate side in the present invention, and when being bonded with hard substrate, the groove is by hard
Substrate sealing, forms a closing chamber between hard substrate and flexible substrate, is by extracting the air in the closing chamber out
Flexible substrate and hard substrate can be fixed together, accordingly, it is only necessary to which air is injected in closing chamber can be by the two point
From.The present invention can substitute the laser lift-off technique in flexible panel manufacturing process, reduce production cost, and it is good to improve product
Rate.
The present invention also provides a kind of flexible substrates, wherein a side surface of the flexible substrate is recessed with what is be interconnected
The port of slot, the groove is located inside the flexible substrate；When being bonded with hard substrate, the groove is sealed by hard substrate
It closes, forms a closing chamber between hard substrate and flexible substrate.A specific embodiment according to the present invention, wherein with
The lower intercommunicating pore for running through the hard substrate on the hard substrate of the flexible substrate fitting at least one, for extracting out
State the air in groove；The preferred flexible substrate further includes the intercommunicating pore that at least one is located at side, for across described
The groove port being located inside flexible substrate is connected to by the side of flexible substrate with outside；Wherein, the flexible substrate further includes
Plug corresponding with the intercommunicating pore, for being closed the communicating passage of groove port and outside inside flexible substrate.
Fig. 8 shows the schematic diagram of the groove 160 in one embodiment of the present of invention, and the groove 160 is in " well " font
Intersect connection, and the flexible substrate 120 further includes at least one intercommunicating pore for being located at side, for across the flexible substrate
The port of groove 160 being located inside flexible substrate 120 is connected to by 120 side with outside, side view as shown in figure 9, its
In, the flexible substrate 120 further includes plug corresponding with the intercommunicating pore, the groove for being closed inside flexible substrate 120
160 port and the communicating passage in outside.
Preferably, in the present embodiment, make closing chamber and the external world that there is bigger air pressure to increase the volume of groove 160
Difference, the groove 160 further include the deep hole positioned at " well " font infall, and the deep hole is hemispherical, as shown in Figure 10, left
Multi-view reference Figure 11, wherein the depth of the interconnected groove 160 is no more than 120 thickness of flexible substrate very
One of；And the depth of the deep hole is no more than the half of 120 thickness of flexible substrate.The depth of confinement groove 160 is
In order to avoid closing chamber volume is excessive, the pressure that draught head applies on flexible substrates has been more than that flexible substrate 120 can bear
Maximum pressure cause to collapse.
Certainly not in other embodiments, the groove 160 can not have the intercommunicating pore；The knot of the groove 160
Structure may be that round, shaped form or other any shapes, the shape of groove 160 have no effect on its effect as closing chamber,
It is only limited to illustrate the present invention, and is not construed as limiting the claims.
Correspondingly, the present invention also provides a kind of flexible display panels, wherein include flexible substrate, the flexible substrate
One side surface has interconnected groove, and the port of the groove is located inside the flexible substrate；It is pasted when with hard substrate
When conjunction, the groove is sealed by hard substrate, and a closing chamber is formed between hard substrate and flexible substrate.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention subjects to the scope of the claims.
Claims (10)
1. a kind of production method of flexible display panels, which comprises the following steps:
Flexible substrate is provided；
Interconnected groove is formed in a side surface of the flexible substrate, the port of the groove is located at the flexible substrate
It is internal；
The flexible substrate is fitted on hard substrate, has reeded surface and fits with the hard substrates；
Extract the air in groove out, form vacuum chamber and/or low pressure chamber between flexible substrate and hard substrate, by groove and
The flexible substrate is fixed on hard substrate by external draught head；
Each film layer is formed in the flexible substrate and is encapsulated, and display panel is formed；
Air is injected into groove, is eliminated groove and external draught head, is separated display panel with hard substrate.
2. the production method of flexible display panels according to claim 1, which is characterized in that be located at institute by least one
The air in the intercommunicating pore extraction groove of flexible substrate side is stated, the intercommunicating pore is used for across the side of the flexible substrate,
The groove port being located inside flexible substrate is connected to outside.
3. the production method of flexible display panels according to claim 1, which is characterized in that run through institute by least one
State the air in the lower intercommunicating pore extraction groove of hard substrate.
4. the production method of flexible display panels according to claim 1, which is characterized in that display panel and hard substrate
It is further comprising the steps of after separation:
It heats the flexible substrate and has reeded surface, melt the flexible material on the surface, eliminate the groove on surface.
5. the production method of flexible display panels according to claim 1, which is characterized in that display panel and hard substrate
It is further comprising the steps of after separation:
Have in the flexible substrate and be bonded thin polymer film on reeded surface, fills the groove on surface.
6. the production method of flexible display panels according to claim 1, which is characterized in that the interconnected groove
Depth be no more than the flexible substrate thickness 1/10th.
7. the production method of flexible display panels according to claim 1, which is characterized in that the flexible substrate further includes
Positioned at the deep hole of the intersection of the interconnected groove.
8. the production method of flexible display panels according to claim 7, which is characterized in that the deep hole is hemispherical,
Its depth is no more than the half of the flexible substrate thickness.
9. a kind of flexible substrate, which is characterized in that a side surface of the flexible substrate has interconnected groove, described recessed
The port of slot is located inside the flexible substrate；When being bonded with hard substrate, the groove is sealed by hard substrate, in hard
A closing chamber is formed between substrate and flexible substrate.
10. a kind of flexible display panels, which is characterized in that include flexible substrate, a side surface of the flexible substrate has phase
The port of intercommunicated groove, the groove is located inside the flexible substrate；When being bonded with hard substrate, the groove quilt
Hard substrate sealing, forms a closing chamber between hard substrate and flexible substrate.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811206587.6A CN109461845A (en) | 2018-10-17 | 2018-10-17 | The production method of flexible substrate, flexible display panels and flexible display panels |
| PCT/CN2018/122779 WO2020077827A1 (en) | 2018-10-17 | 2018-12-21 | Flexible substrate, flexible display panel and method for manufacturing flexible display panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811206587.6A CN109461845A (en) | 2018-10-17 | 2018-10-17 | The production method of flexible substrate, flexible display panels and flexible display panels |
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| CN109461845A true CN109461845A (en) | 2019-03-12 |
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| CN201811206587.6A Pending CN109461845A (en) | 2018-10-17 | 2018-10-17 | The production method of flexible substrate, flexible display panels and flexible display panels |
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| CN (1) | CN109461845A (en) |
| WO (1) | WO2020077827A1 (en) |
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| WO2020077827A1 (en) | 2020-04-23 |
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