CN109459454A - A kind of charged particle detector for white light neutron source charged particle detection spectrometer - Google Patents
A kind of charged particle detector for white light neutron source charged particle detection spectrometer Download PDFInfo
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- CN109459454A CN109459454A CN201811058066.0A CN201811058066A CN109459454A CN 109459454 A CN109459454 A CN 109459454A CN 201811058066 A CN201811058066 A CN 201811058066A CN 109459454 A CN109459454 A CN 109459454A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/36—Measuring spectral distribution of X-rays or of nuclear radiation spectrometry
- G01T1/361—Measuring spectral distribution of X-rays or of nuclear radiation spectrometry with a combination of detectors of different types, e.g. anti-Compton spectrometers
Abstract
This application discloses a kind of charged particle detectors for white light neutron source charged particle detection spectrometer.The charged particle detector of the application includes Δ E-E detector and ionization chamber detector；Δ E-E detector is combined type gas-solid probe, is made of mutually independent miniature multiwire proportional chamber gas detector and cesium iodide solid probe, using 0.5 μ m-thick polyethylene film particle beams window；Ionization chamber detector uses 8 μ m-thick Kaptons or polyester film particle beams window.The charged particle detector of the application, Δ E-E detector use 0.5 μ m-thick polyethylene film particle beams window, can not only charged particle be allowed to readily penetrate through, but also are resistant to 5000Pa pressure difference and do not rupture.Ionization chamber detector particle beams window uses 8 μ m-thick Kaptons or PET, charged particle can not only be made to be easy to penetrate, and can bear 1atm pressure.
Description
Technical field
This application involves neutron detection field, more particularly to a kind of for white light neutron source charged particle detection spectrometer
Charged particle detector.
Background technique
White light neutron source is an exceedingly useful Nuclear Data measuring study tool, can for nucleus energy facilities design,
The fields such as nuclear astrophysics research, basic physics science and science and techniques of defence provide crucial Nuclear Data.Nuclear Data measuring study exists
Carry out in the world nearly 80 years, experienced Dan Nengdian neutron source, resonance region white light neutron source, fast white light neutron source Nuclear Data and survey
Measure several stages.In generation nineteen sixty, mainly had using low energy accelerator by the reactions such as d-D, d-T, p-T and p-7Li generation in the past
The monoenergetic neutrons of some strength carries out the measurement work of cross-section.In generation nineteen sixty, starts based on the acceleration of high current electronic line of sight
The white light neutron source of device is built up in states such as the U.S., the former Soviet Union, Europe and Japan in succession.White light neutron source being total in 1eV-1MeV
Center of percussion subzone provides very strong continuous spectrum neutron, wherein representative device have ORNL National Laboratory, the U.S. ORELA and
GELINA of the Europe positioned at the laboratory JRC/IRMM of Belgium Geel.The acceleration of high current high energy proton is based on after the 1980's
The white light neutron source of device is since the advantages such as its pulsed neutron intensity is high, neutron energy spectrum range is wide are gradually instead of being based on electronic line of sight
The white light neutron source of accelerator becomes the most powerful of Nuclear Data measurement.The representative device of this respect is the base of U.S. LANL
In the Nuclear Data measuring device that 800MeV proton precessional magnetometer (abbreviation LANSCE) is established, and Europe CERN based on 20GeV's
The Nuclear Data measuring device (abbreviation n-TOF) that proton-synchrotron (abbreviation PS) is established.
LANL is equipped with resonance neutron target station (Lujan Center, Target-1) and fast neutron target station (WNR, Target-
4).It has built a plurality of white light neutron bunch respectively on Lujan Center and WNR, and has established including measuring neutron irradiation
Many platform spectrometers including large-scale g detector device DANCE and neutron detector array FIGARO of capture cross-section etc., they are altogether
Center of percussion, a large amount of vital Nuclear Datas of fast neutron and middle high-energy neutron energy region measurement.It is Japanese then positioned at Tokai
A Nuclear Data is built using the neutron of slowing down on 3GeV spallation neutron source target station on J-PARC large size proton precessional magnetometer to measure
Bunch ANNRI.
The country mainly has the China of China Atomic Energy Science Research Institute is advanced to grind currently used for the neutron source that Nuclear Data measures
It is big to study carefully heap (abbreviation CARR heap) and 13MV tandem accelerator (abridge 5SDH-2), the 4.5MV electrostatic accelerator of Peking University, Lanzhou
300kV accelerator for neutron production etc..The energy range of these neutron sources is between 0.01~42MeV, they are to Chinese nucleus number
According to the study include that the CENDL evaluation of nuclear data library of China is made that significant contribution, but their energy and discontinuous, respectively
A accelerator can provide the neutron beam of portion of energy segment respectively, and beam intensity is lower.With China's Advanced Nuclear Energy Technology, base
The needs of the development such as plinth nuclear physics, nuclear astrophysics and national defense construction, there is an urgent need in a white light that the area Tai Neng is wide, intensity is high
Source arrangement is to meet the requirement that Nuclear Data measures in all directions.
Charged particle detection spectrometer (abbreviation LPDA) is located at the terminal of white light neutron source, is that Chinese spallation neutron source is first batch of
One of 4 spectrometers to put into operation mainly include p, d, t, 3He for testing the data of outgoing charged particles caused by neutron
With the light charged particles such as 4He.This kind of data to nuclear energy of new generation, such as forth generation reactor, ADS etc., research and development it is particularly important,
It is related to many aspects such as neutron detection, radiation protection and detection, reactor control and operation；Meanwhile also hadron therapy is mentioned
For important support.Compared to same type spectrometer in the world, LPDA has more detector quantity, charged particle measurement energy area and neutron
The features such as measurement energy area is wide, as shown in table 1.
1 LPDA of table is compared with the feature of same type spectrometer
| LANSCE | MEDLEY | CROCKER | CYCLONE | LPDA | |
| Detector quantity | 4 | 8 | 3 | 6 | 16 |
| Charged particle measurement can area | 4~50Mev | 8~100Mev | <80Mev | 1.5~80Mev | 0.5~100Mev |
| Neutron measurement energy area | 0.2~50Mev | 70Mev | 10~60Mev | 25~65Mev | 1ev~200Mev |
| Time resolution | 3ns | 2~4ns | ------- | 0.8ns | <5ns |
LPDA includes vacuum target chamber and charged particle detector.Wherein vacuum target chamber is that mechanical, electrical, vacuum and gas integral are set
It is standby, experimental situation is provided to charged particle detector.Therefore, vacuum target chamber integrated level is very high, is a multi-functional vacuum
Cavity.The effect of charged particle detector is detected to charged particle, existing charged particle detector or durability
Difference is easy to happen the rupture of particle beams window under pressure environment；Charged particle permeability is poor, it is difficult to meet LPDA and use need
It asks.Therefore, the good charged particle detector of research and development applicability is the basic guarantee of the detection of charged particle detection spectrometer.
Summary of the invention
The purpose of the application is to provide a kind of new charged particle suitable for white light neutron source charged particle detection spectrometer
Detector.
The application uses following technical scheme:
The one side of the application discloses a kind of charged particle detection for white light neutron source charged particle detection spectrometer
Device, including Δ E-E detector and ionization chamber detector；Δ E-E detector is combined type gas-solid probe, by mutually solely
Vertical miniature multiwire proportional chamber gas detector and cesium iodide solid probe composition, the Δ E-E detector use 0.5 μ m-thick
Polyethylene film particle beams window；Ionization chamber detector uses 8 μ m-thick Kaptons or polyester film particle beams window.
It should be noted that the application's it is critical that have developed a kind of particle beams window for Δ E-E detector, i.e., 0.5
The polyethylene film of μ m-thick, which not only can allow charged particle to be easy to penetrate, but also can be resistant to the pressure difference of 5000Pa
White light neutron source charged particle detection spectrometer without rupturing, especially suitable for the application.At the same time, ionization chamber detector by
It is easy to be blocked in charged particle, and it is also required to be able to bear certain pressure, therefore, the application especially has developed energy
Enough meet the particle beams window of its use demand, the i.e. Kapton or polyester film of 8 μ m-thicks；The ionisation chamber of the application detects
Device, particle beams window can either make charged particle be easy to penetrate, and be able to bear the pressure of 1atm, can satisfy white light neutron
The use demand of source charged particle detection spectrometer.
Preferably, in Δ E-E detector, miniature multiwire proportional chamber gas detector and cesium iodide solid probe use rubber
Glue sealing, realizes the mutually indepedent of the two.
Preferably, ionization chamber detector is a kind of gas detector, and internal structure includes cathode, anode, grid and presses
The high-pressure area that ring is formed, charged particle, which enters high-pressure area, to be detected.
Preferably, the distance between cathode and anode are adjustable, to realize that electric field strength is adjusted, in order to different bands
Charged particle is detected.
Preferably, the working gas of ionization chamber detector is argon gas.
The another side of the application discloses the white light neutron source charged particle spy using the charged particle detector of the application
Survey spectrometer.
Preferably, the white light neutron source charged particle detection spectrometer of the application further includes vacuum target chamber, and vacuum target chamber includes
Mechanical system, vacuum air-channel system and control system；Mechanical system includes vacuum cavity 1, sample changer 2 and probe angle
Rotating mechanism 3；Vacuum cavity 1 is used to accommodate charged particle detector 0, sample changer 2 and probe angle rotating mechanism 3,
And experimental enviroment is provided for detection；Sample changer 2 uses sylphon seal, energy for placing multiple samples, sample changer 2
It is enough to move along a straight line under vacuum, realize sample switching；Probe angle rotating mechanism 3 uses magnet fluid sealing, can be in vacuum
Detector 0 is realized for placing detector in lower rotary motion, part of the probe angle rotating mechanism 3 in vacuum cavity 1
Angle adjustment；Vacuum air-channel system includes vacuum subassembly and working gas component, vacuum subassembly respectively with vacuum cavity 1 and electrification
The connection of 0 pipeline of particle detector ensures the vacuum degree of vacuum cavity 1 and charged particle detector 0 for vacuumizing；Work gas
Body component is connected to 0 pipeline of charged particle detector, for providing working gas for charged particle detector 0, also, in vacuum
Safeguard work gas pressure is stablized under the coordination of component and working gas component；Control system is visited for coordinated control charged particle
Survey device 0, sample changer 2, probe angle rotating mechanism 3 and vacuum air-channel system.
It should be noted that the white light neutron source charged particle detection spectrometer vacuum target chamber of the application, each building block energy
Enough high precision movement and positioning under vacuum and radiation environment.In use, by vacuum subassembly to vacuum cavity and detector into
Row vacuumizes, and provides vacuum working environment；Detector is designed as by working gas component and its pressure stabilizing, and stable pressure is provided
Working gas.Also, sample changer uses sylphon seal, can be realized and moves along a straight line under vacuum conditions, to realize
Sample switches, and in a kind of implementation of the application, sample changer can load four samples, realize the switching of four samples
Detection.In addition, probe angle rotating mechanism uses magnet fluid sealing, can be realized under vacuum conditions, while detection
It is online to carry out probe angle adjustment.
Preferably, vacuum cavity 1 is connected to 0 pipeline of charged particle detector, and switch valve 01 is arranged on connecting pipe.
It should be noted that vacuum cavity is connected to detector pipeline, the pressure of detector when its purpose is to guarantee to vacuumize
Higher than the intracorporal pressure of vacuum chamber, and ensure that pressure difference is no more than 5000Pa, can effectively avoid the beam window of detector in this way
Rupture.
Preferably, working gas component includes high pressure gas cylinder 4, and high pressure gas cylinder 4 is connected to 0 pipeline of charged particle detector,
Working gas is provided for it.
Preferably, pressure stabilizing compensator 5 is provided between high pressure gas cylinder 4 and charged particle detector 0.It should be noted that
The effect of pressure stabilizing compensator is to ensure that the operating air pressure in detector is stablized, to provide a stable air pressure ring for detection
Border.
Preferably, multiple pressure valve 51 is offered on pressure stabilizing compensator 5, is used for safeguard work gas pressure, is avoided detector
The rupture of beam window.It should be noted that the effect of multiple pressure valve stablizes air pressure environment also for better, especially in some spies
In different situation, multiple pressure valve can increase suddenly the problem of causing beam window to rupture to avoid air pressure, further ensure making for detector
With safety.
Preferably, vacuum subassembly includes impact-resistant composite molecular pump 6, and composite molecular pump 6 is independent to manage with vacuum cavity 1
Road connection；Meanwhile composite molecular pump 6 is independent is connected to via pressure stabilizing compensator 5 with 0 pipeline of detector.It should be noted that this
Application uses impact-resistant composite molecular pump, specifically, using resistance to 1atm impact in a kind of implementation of the application
Composite molecular pump.
Preferably, it is provided with the first ratio adjusting valve 61 on the pipeline that composite molecular pump 6 is connected to vacuum cavity 1, and
First gear plate valve 62 is provided between first ratio adjusting valve 61 and vacuum cavity 1；Composite molecular pump 6 and pressure stabilizing compensator 5 it
Between connecting pipe on be provided with the second ratio adjusting valve 63, and set between the second ratio adjusting valve 63 and pressure stabilizing compensator 5
It is equipped with second gear plate valve 64.
It should be noted that the application respectively sets a flapper valve before two ratio adjusting valves, when needing to adjust flow velocity
It waits, first closes flapper valve, equal proportion regulating valve is then turned on flapper valve afterwards in place, can be realized accurate control in this way, avoids two
Pressure difference caused by ratio adjusting valve is asynchronous.
Preferably, the control system of the application includes the tele-control system based on EPICS and the local based on Yokogawa PLC
Control system.
It should be noted that local control system uses the sequence CPU of Yokogawa PLC in a kind of implementation of the application
It realizes including functions such as motion control, vacuum monitoring, gas circuit pressure stabilizing, ion beam window and vacuum component protections.Long-range control
System runs EPICS IOC using embedded CPU module F3RP61, makes the number of charged particle detector vacuum target chamber control system
According to being directly brought into the accelerator control system based on EPICS, long-range OPI operation, history data store, sound are realized to facilitate
The functions such as sound alarm.
Preferably, vacuum cavity 1 is cylindrical cavity, and the upper and lower ends of cylindrical cavity are each provided with upper flange 11 under
Flange 12 is provided with a pair of bunch interface flange 13 and 14 that cylindrical cavity is passed through for bunch on the side wall of cylindrical cavity,
And several part flanges 15 through walls.
Preferably, upper flange 11 and lower flange 12 use radiation-resistant viton seal ring.
Preferably, the wall outer surface of vacuum cavity 1 is provided with several collimation positioning targets, for vacuum cavity 1
Carry out space orientation.
Preferably, the outer surface anodization of vacuum cavity 1, inner surface are conductive.
Preferably, it is fixed with neutron beam window in bunch interface flange 13 and 14, in order to which neutron streaming passes through, neutron beam window
For 100 microns of tantalum films of thickness, effective diameter 100mm.
Preferably, sample changer 2 includes lead screw motor 21 and specimen holder 22, and specimen holder 22 uses sylphon seal；On
Sample changer interface 111 is offered on flange 11, lead screw motor 21 is fixedly mounted on the sample changer interface of upper flange 11
On 111, it is located at 1 outside of vacuum cavity, specimen holder 22 is protruded into vacuum cavity 1 by sample changer interface 111；Lead screw motor
21 driving specimen holders 22, which move up and down, realizes test sample replacement.Preferably, specimen holder 22 is tantalum specimen holder.
Preferably, probe angle rotating mechanism interface 121, probe angle rotating mechanism 3 are offered on lower flange 12
It is fixedly mounted on the probe angle rotating mechanism interface 121 of lower flange 12, the driving end position of probe angle rotating mechanism 3
In 1 outside of vacuum cavity, 3 movable end of probe angle rotating mechanism is protruded into very by probe angle rotating mechanism interface 121
In cavity body 1, for connecting charged particle detector 0.
The beneficial effects of the present application are as follows:
The charged particle detector of the application, Δ E-E detector have developed a kind of particle beams window, i.e. 0.5 μ m-thick gathers
Vinyl film not only can allow charged particle to be easy to penetrate, but also can be resistant to the pressure difference of 5000Pa without rupturing.Ionisation chamber detection
The particle beams window of device uses 8 μ m-thick Kaptons or PET, charged particle can not only be made to be easy to penetrate, Er Qieneng
Enough bear 1atm pressure.The charged particle detector of the application is improved and is optimized by the particle beams window to detector, is made
Its use demand that can satisfy white light neutron source charged particle detection spectrometer is established for the normal operation of charged particle detection spectrometer
Basis is determined.
Detailed description of the invention
Fig. 1 is the structural block diagram of white light neutron source charged particle detection spectrometer vacuum target chamber in the embodiment of the present application；
Fig. 2 is the mechanical system and correlation of white light neutron source charged particle detection spectrometer vacuum target chamber in the embodiment of the present application
The structural block diagram of component；
Fig. 3 is the schematic perspective view in kind of charged particle detection spectrometer vacuum target chamber in the embodiment of the present application；
Fig. 4 is the internal structure cross-sectional view of charged particle detection spectrometer vacuum target chamber in the embodiment of the present application；
Fig. 5 is the side structure schematic diagram of charged particle detection spectrometer vacuum target chamber in the embodiment of the present application；
Fig. 6 is the vacuum cavity structural schematic diagram of charged particle detection spectrometer vacuum target chamber in the embodiment of the present application；
Fig. 7 is the structural schematic diagram of the support frame of charged particle detection spectrometer vacuum target chamber in the embodiment of the present application；
Fig. 8 is the structural schematic diagram of the sample changer of charged particle detection spectrometer vacuum target chamber in the embodiment of the present application；
Fig. 9 is the structural schematic diagram of the specimen holder of sample changer in the embodiment of the present application；
Figure 10 is the Control system architecture block diagram of charged particle detection spectrometer vacuum target chamber in the embodiment of the present application；
Figure 11 is the schematic perspective view of Δ E-E detector in the embodiment of the present application charged particle detector；
Figure 12 is the schematic cross-sectional view of Δ E-E detector in the embodiment of the present application charged particle detector；
Figure 13 is the schematic perspective view of ionization chamber detector in the embodiment of the present application charged particle detector；
Figure 14 is the side structure schematic diagram and its AA of ionization chamber detector in the embodiment of the present application charged particle detector
Cross-sectional view；
Figure 15 is the electrical block diagram of ionization chamber detector in the embodiment of the present application charged particle detector.
Specific embodiment
The application is described in further detail below by specific embodiment.Following embodiment only to the application carry out into
One step explanation, should not be construed as the limitation to the application.
Embodiment
The white light neutron source charged particle detection spectrometer of this example includes vacuum target chamber and charged particle detector, wherein true
Air target room is mechanical, electrical, the gentle integration apparatus of vacuum, and charged particle detector is by Δ E-E detector and ionization chamber detector group
At being described in detail as follows:
The white light neutron source charged particle detection spectrometer vacuum target chamber of this example, as shown in Figures 1 to 5, including mechanical system,
Vacuum air-channel system and control system.Wherein, mechanical system is as shown in Figures 2 to 5, including vacuum cavity 1, sample changer 2
With probe angle rotating mechanism 3.Vacuum cavity 1 is used to accommodate charged particle detector 0 (hereinafter referred to as detector), sample changes
Sample device 2 and probe angle rotating mechanism 3, and experimental enviroment is provided for detection；Vacuum cavity 1 is connected to 0 pipeline of detector, and
Switch valve 01 is set on connecting pipe.The vacuum cavity 1 of this example is cylindrical cavity, the outer surface anodization of vacuum cavity 1
Processing, inner surface is conductive, as shown in Figure 6；The upper and lower ends of cylindrical cavity are each provided with upper flange 11 and lower flange 12, cylinder
Be provided on the side wall of shape cavity it is a pair of for bunch pass through cylindrical cavity bunch interface flange 13 and 14 and several wear
Wall part flange 15.It is fixed with neutron beam window in bunch interface flange 13 and 14, in order to which neutron streaming passes through, neutron beam window is thickness
The tantalum films of 100 microns of degree, effective diameter 100mm.Upper flange 11 and lower flange 12 use radiation-resistant viton seal ring,
This example specifically uses 1010mm × cross-sectional diameter 8mm viton seal ring.The wall outer surface of vacuum cavity 1 is provided with four
A collimation positioning target 16, for carrying out space orientation to vacuum cavity 1.Several lifting bolts are set on vacuum cavity, with side
Just vacuum cavity lifts.This example vacuum cavity working vacuum degree: final vacuum is 5 × 10 when cavity zero load-3Pa, and pressure is steady
Fixed and as uniform as possible, the vacuum pumping mouth symmetric configuration as far as possible of distribution.
The vacuum cavity 1 of this example is mounted as a whole on the upper surface of support frame 7, and support frame 7 is as shown in fig. 7, support frame 7 is used for
Vacuum cavity 1 is supported, to facilitate the isostructural design of probe angle rotating mechanism 3；The bottom of support frame 7 is provided with
Several universal wheels 71, to be moved easily vacuum cavity 1；Overall 2 tons of the load-bearing of support frame 7.Between vacuum cavity 1 and support frame 7
It is provided with height adjustment mechanism 8, for finely tuning the height of vacuum cavity 1, as shown in figure 4, specifically, height adjusting structure 8 is logical
Overregulate screw realization；8 short transverse of height adjustment mechanism can adjust ± 10mm, and horizontal both direction can adjust ±
10mm, degree of regulation 0.1mm.Level tune plate 9 is provided on the side of support frame 7, for manually adjusting horizontal position, such as 4
With shown in Fig. 5, Level tune plate 9 and screw 91 cooperate the fine tuning for realizing horizontal position.
Sample changer 2 uses sylphon seal for placing multiple samples, sample changer 2, can be straight under vacuum
Sample switching is realized in line movement.The sample changer 2 of this example, as shown in figure 8, including lead screw motor 21 and specimen holder 22, sample
Frame 22 is sealed using bellows 23；Upper flange maximum deformation quantity is no more than 0.05mm, offers sample changer on upper flange 11
Interface 111, lead screw motor 21 are fixedly mounted on the sample changer interface 111 of upper flange 11, are located at 1 outside of vacuum cavity,
Specimen holder 22 is protruded into vacuum cavity 1 by sample changer interface 111；Lead screw motor 21 drives specimen holder 22 to move up and down reality
Existing test sample replacement.The specimen holder 22 of this example is tantalum specimen holder, as shown in figure 9, tantalum specimen holder can place four samples
Product, repetitive positioning accuracy 0.05mm, sample changer are fixed with vacuum cavity upper flange relative position, and vacuum cavity has 24 companies
It connects screw to sell with 24 in total, all at 15 °Jiao uniform layouts.The assembly of different angle, enables specimen holder and beam direction
At ± 30 °, ± 45 °, ± 60 ° and ± 75 °, this eight angle positions have required slide fit finger setting, there is the shielding of tantalum system before sample
Shell.
Probe angle rotating mechanism 3 use magnet fluid sealing, can rotary motion under vacuum, probe angle rotation
The angle adjustment of detector 0 is realized for placing detector 0 in part of the mechanism 3 in vacuum cavity 1.The lower flange 12 of this example
On offer probe angle rotating mechanism interface 121, probe angle rotating mechanism 3 is fixedly mounted on the detection of lower flange 12
On device angle rotating mechanism interface 121, the driving end of probe angle rotating mechanism 3 is located at 1 outside of vacuum cavity, detector angle
Degree 3 movable end of rotating mechanism is protruded into vacuum cavity 1 by probe angle rotating mechanism interface 121, for connecting detector
0.Probe angle rotating mechanism 3 uses magnet fluid sealing after being mounted on probe angle rotating mechanism interface 121.Detector
Angle rotating mechanism can ± 10 ° rotation, 0.05 ° of repetitive positioning accuracy, component in a vacuum needs to consider vacuum influence, close
Envelope uses magnet fluid sealing, and this example specifically uses the product in Hangzhou great river, and zero-point positioning, limit switch use radiation-resistant device
Part, angular transducer use radiation-resistant brushless resovler.
The vacuum air-channel system of this example includes vacuum subassembly and working gas component, vacuum subassembly respectively with vacuum cavity 1
It is connected to 0 pipeline of detector, for vacuumizing, ensures the vacuum degree of vacuum cavity 1 and detector 0；Working gas component and spy
The connection of 0 pipeline of device is surveyed, for providing working gas for detector 0, also, under the coordination of vacuum subassembly and working gas component
Safeguard work gas pressure is stablized.Specifically, the working gas component of this example includes high pressure gas cylinder 4, high pressure gas cylinder 4 and detector
The connection of 0 pipeline, provides working gas for it.Pressure stabilizing compensator 5 is provided between high pressure gas cylinder 4 and detector 0；Pressure stabilizing compensator
Multiple pressure valve 51 is offered on 5, is used for safeguard work gas pressure, the beam window of detector ionisation chamber is avoided to rupture；4 He of high pressure gas cylinder
Control valve is set between pressure stabilizing compensator 5, control valve is set between pressure stabilizing compensator 5 and detector 0.The vacuum subassembly packet of this example
The composite molecular pump 6 of resistance to 1atm impact is included, composite molecular pump 6 is independent to be connected to 1 pipeline of vacuum cavity；Meanwhile compound molecule
6 are pumped independent to be connected to via pressure stabilizing compensator 5 with 0 pipeline of detector.On the pipeline that composite molecular pump 6 is connected to vacuum cavity 1
It is provided with the first ratio adjusting valve 61, and is provided with first gear plate valve 62 between the first ratio adjusting valve 61 and vacuum cavity 1；
The second ratio adjusting valve 63 is provided on connecting pipe between composite molecular pump 6 and pressure stabilizing compensator 5, and in the second ratio tune
Second gear plate valve 64 is provided between section valve 63 and pressure stabilizing compensator 5.
Molecular pump interface flange 122 on the lower flange 12 of this example is vacuumized for connecting composite molecular pump 6；Surely
Pressure compensator 5 is mounted on the bottom of support frame 7, positioned at the underface of vacuum cavity 1, pressure stabilizing compensator 5 and 1 pipeline of vacuum cavity
Connection, for stablizing the intracorporal air pressure of vacuum chamber.
The control system of this example is for coordinated control detector 0, sample changer 2, probe angle rotating mechanism 3 and true
Empty air-channel system.Control system, as shown in Figure 10, including the tele-control system based on EPICS and the local based on Yokogawa PLC
Control system.Wherein, local control system is realized using the sequence CPU of Yokogawa PLC including motion control, vacuum monitoring, gas
The functions such as road pressure stabilizing, ion beam window and the protection of vacuum component.Tele-control system is run using embedded CPU module F3RP61
EPICS IOC makes the data of charged particle detector vacuum target chamber control system be directly brought into the Accelerator control based on EPICS
In system, the functions such as long-range OPI operation, history data store, audible alarm are realized to facilitate.
This example is used for the charged particle detector of white light neutron source charged particle detection spectrometer by Δ E-E detector and ionization
Room detector composition.Δ E-E detector is combined type gas-solid probe, as shown in FIG. 11 and 12, by mutually independent
Miniature multiwire proportional chamber gas detector 001 and cesium iodide solid probe 002 form, miniature multiwire proportional chamber gas detector
It is sealed with cesium iodide solid probe using rubber seal, the series connection iodate of miniature multiwire proportional chamber gas detector side
Pcb board 003 is arranged in caesium solid probe, the other side；The particle beams window 004 of Δ E-E detector is thin using 0.5 μ m-thick polyethylene
Film.
The ionization chamber detector of this example is a gas detector, and ionization chamber detector uses 8 μ m-thick Kaptons
Or polyester film particle beams window, it is able to bear 1atm pressure；As shown in FIG. 13 to 15, ionization chamber detector internal structure includes
The high-pressure area being made of cathode, anode, grid and grading ring, charged particle enter high-pressure area, it will be able to it is detected,
Ionization chamber detector working gas is argon gas.The distance between cathode and anode are adjustable, thus realize that electric field strength is adjusted, so as to
Different charged particles are detected.
The charged particle detector of this example is installed in vacuum target chamber, and is fixed on probe angle rotating mechanism 3, is led to
The angle adjustment that probe angle rotating mechanism realizes charged particle detector is crossed, to realize the detection of different angle.
The Δ E-E detector of this example, feature and difficult point are: first, Δ E-E detector is that gas solids detector is multiple
It is mutually indepedent to realize that detection of gas and solid detect by rubber seal for mould assembly detector；Second, it is visited for low pressure gas
Device is surveyed, in the preferred embodiment of this example, by working gas plus a small amount of carbon dioxide, and removes metal surface burr as far as possible
Etc. modes reduce high voltage arc；Third, since charged particle is easy to be blocked, therefore it is required that particle beams window should allow electrification
Particle readily penetrates through, and has to be resistant at least 5000Pa pressure difference without rupturing, for this purpose, a kind of particle of this example especial manufacture
Beam window uses 0.5 μ m-thick polyethylene film particle beams window.
The characteristics of this example ionization chamber detector and difficult point are: first, detection is that charged particle is had nothing in common with each other, for this purpose, this example
It is particularly designed so that the distance between electrode is adjustable, electric field strength is adjusted to realize by adjusting electrode distance, with suitable
Different charged particles is answered, to preferably detect charged particle；Second, likewise, charged particle is also to be easy to be hindered
Gear, therefore particle beams window also has to be easy that charged particle is allowed to penetrate, and is able to bear pressure, this example specifically needs
Be able to bear 1atm pressure, thus this example especial manufacture particle beams window of ionization chamber detector, i.e., it is sub- using the polyamides of 8 μ m-thicks
Amine film or PET.
The detector of this example includes Δ E-E detector and ionization chamber detector, and design requirement is as follows:
A) Δ E-E detector and ionization chamber detector have particle beams window, the former selects 0.5 micron polyethylene, Hou Zhexuan
Select 8 micrometer polyamide films or PET.The leak rate for needing to accurately measure two kinds of detectors, leak rate including ion beam window,
The leak rate etc. of air-path interface.
B) working environment vacuum degree: leak rate and vacuum system according to detector determine jointly；Particle beams window is able to bear
The pressure of working gas
C) Δ E-E detector working gas pressure is 1000Pa~5000Pa, and the specific value of different experiments is different, wave
Dynamic range ± 5%；Ionization chamber detector working gas pressure is 1atm, fluctuation range ± 5%.
D) air-path interface: quick-release crossover sub.
The specific development process of vacuum target chamber and charged particle detector is as follows:
One, the design and development of vacuum cavity
As shown in Figures 2 and 3, vacuum cavity is both a scattering chamber, is the space of detector work, and be a sample
Chamber is the space varied online.It is by groups such as cylinder, upper lower flange, cavity peripheral flange, two-dimensional adjustment mechanism and support frames
At.
1. the finite element analysis of vacuum cavity
It is about 18-20mm, the chamber of this example according to aluminum pressure vessel JB1580-75, DN1000 Aluminum cylindrical cavity thickness
There are 8 small flanges around body, therefore, thickness selects 24mm；According to amount JISB2290-1998Vacuum technology-
Flange dimensions, lower flange DN1000, screw thread bore dia 1090mm, seal groove internal diameter 1010mm on vacuum cavity, slot
Wide 10mm, groove depth 6.4mm.Using Tieling rubber industry studying and designing institute internal diameter 1010mm × cross-sectional diameter 8mm fluorubber
Sealing ring.And it is bolted using 24 M24.
The upper flange of vacuum cavity is the benchmark of sample changer, its deformation directly affects the kinematic accuracy of changer.
Important is the structures for passing through finite element optimization upper flange.
The upper flange Finite element analysis results of vacuum cavity show, upper flange size:(thickness), boss(thickness), material: AL5083.Upper flange is connected with sample changer, in order to guarantee that Sample location is accurate, upper
Position has added a boss among flange, reduces deflection, and finite element analysis does not consider about 33.9 microns of gravitational displacement, considers weight
Power displacement is 34.9 microns.When boss thickness 40, being displaced is 39 microns；When boss thickness 20, being displaced is 46 microns；
When boss thickness 0, being displaced is 56 microns；When flange thickness becomes 70, without boss, being displaced is 78 microns；When flange thickness
Degree becomes 90, and without boss, being displaced is 43 microns.
The lower flange Finite element analysis results of vacuum cavity show, lower flange size:(thickness), material:
AL5083, lower flange are connected with rotating mechanism, and finite element analysis is displaced about 37 μm.
In view of upper flange structure not only sole mass weight, but also it is big to process consumable quantity, bionical automobile upper plate spring mechanism,
It is designed to that several steps, maximum gauge become 125mm by 140mm.Integral finite element analysis shows that the whole maximum of vacuum cavity becomes
Shape amount is located at upper flange center, and being displaced is 44 μm, is better than 50 μm of design objective.
2. the manufacture of vacuum cavity
Vacuum cavity is an aluminium vessel, and the cylinder of internal diameter 1016mm, connecting place are first rolled into the aluminium alloy plate of 30mm thickness
Through welding, portion is welded in the cavity for upper lower flange, upper and lower cover plates and peripheral flange, and all guarantee inside that carry out non-destructive testing are not split
Seam, integral solder need to carry out well residual stress crash handling, and chamber outer surface carries out anodization, inner surface polishing.
In cylinder manufacturing process, using plasma blanking, blank size: 3210 × 510 × 30；Planer uses metal-planing machine
Working width is to size 490；Gantry mill, processing length direction to size 3192；Metal plate carries out reel according to drawing size, in
Core diameterWelding carries out longitudinal measure, welding requirements complete penetraction and fusion in welding according to drawing size；Lathe founds vehicle and presss from both sides outer circle, vehicle
Inner hole is to sizeInner hole processing excircles are supportted to drawing size, process both ends step and welding groove；Finally cleaning removal
Surface and oil contaminant, that is, cylinder needed for obtaining.
In upper and lower flange fabrication technology, blanking uses plasma blanking, blank size:Center digging is extremely
SizeLathe founds vehicle and presss from both sides outer circle Che Kongzhi sizeA light-exposed end face, u-turn support inner hole turning to size, folder
Outer circle car hole and step are to size；Degreasing is cleaned, that is, flange needed for obtaining.
It needs to carry out roughing and finishing respectively after obtaining vacuum cavity.In roughing technique, welding needs basis
Drawing requirement is aligned, and is welded after self-test size qualification, it is desirable that inner sealing weldering, external reinforcing weldering, when welding carry out
Preheating；And it needs to hunt leak to cylinder weld seam；Lathe, after standing vehicle folder outer circle correction, vehicle end flange is light-exposed, u-turn folder outer circle
Another flange of vehicle is to thickness 48, u-turn folder another flange of outer circle vehicle to thickness 48, outer circle and inner hole to drawing size；It is sleeping to add, with
On the basis of flange face, worktable rotary processes institute's lateral aperture to drawing size；Finally cleaning removal surface and oil contaminant.Roughing technique
In, welding is aligned according to drawing requirement, is welded after self-test size qualification, it is desirable that inner sealing weldering, external reinforcing
Weldering, when welding, guarantee the concentricity of symmetrical flange using tooling；Then, it hunts leak to cylinder weld seam；Lathe founds vehicle and presss from both sides outer circle
After correction, vehicle end flange is light-exposed, u-turn folder another flange of outer circle vehicle to thickness 45, u-turn folder another flange of outer circle vehicle to thickness
45；Sleeping to add, on the basis of flange face, worktable rotary processes line mouth flange inner hole and Flange Plane, guarantees that beam center arrives
Flange bottom distance and two flange coaxialities；Finally cleaning removal surface and oil contaminant.
Surface treatment, then cavity is placed into anodic oxidation pond by all installing port blind plate sealings, carries out anode
Oxidation guarantees that the surface of contact vacuum section is not oxidized anodically；Or integrated oxidation, inner surface polishing；Cleaning, according to superelevation
Vacuum requirement cleans part,
In upper cover plate manufacturing process, blanking uses plasma blanking, blank sizeIt is rough turn, press from both sides outer circle
One end, turning to sizeU-turn folder outer circle connects knife turning to sizeEnd face is light-exposed, u-turn folder outer circle
Upper surface stepped overall thickness size 132 is processed on the basis of bottom surface, repeatedly turns over each depth of cut 1, processing overall thickness is extremely
Size 127, turning and inner hole made allowance unilateral 1；Ageing treatment carries out natrual ageing to part, and roughing terminates placement one
Section time and artificial aging；Half smart car, 0.3, the 3 turn two sides processing of each depth of cut；Smart car, the processing of 0.2 two sides of the depth of cut
To size, turning and inner hole to size；Numerical control, process all holes andStep surface is to size；Pincers worker, to threaded hole into
The processing of row studding；Finally cleaning removal surface and oil contaminant.
In support frame manufacturing process, blanking, upper and lower bottom plate uses material 316, and bracket uses 8# square tube；After the completion of welding,
It is heat-treated, stress relief annealing is carried out to bracket；Gantry mill, plane guarantees that flatness is wanted to height dimension in processing
It asks；Finally cleaning removal surface and oil contaminant.
3. the detection of vacuum cavity
The parameter of vacuum cavity most critical is vacuum degree, leak rate and connection size geometric tolerance.Its test result such as 2 institute of table
Show.
2 vacuum cavity testing result of table
| Test content | Design requirement | Test data | Conclusion |
| Unloaded final vacuum | 5.0×10-3Pa | 1.71×10-3Pa | It is qualified |
| The height of line flange from the ground | 1405±1mm | 1405.1mm | It is qualified |
| The depth of parallelism of cavity upper flange and line | ≤0.05mm | 0.01mm | It is qualified |
| Leak rate (welding, sealing) | ≤1.0×10-9Pa.m3/s | ≤4.1×10-11Pa.m3/s | It is qualified |
| The depth of parallelism between line flange | ≤0.05mm | 0.015mm | It is qualified |
| The spacing of two flange of front and back | 1160±1mm | 1160.047mm | It is qualified |
Table 2 the results show that this example vacuum cavity items test all meet design requirement.
Two, the design and development of sample changer
For the sample changer of this example as shown in figure 8, sample changer is for replacing sample online, it includes motor 21
With specimen holder 22, specimen holder 22 is sealed using bellows 23；Motor 21 is fixedly mounted on support frame 24, the surface of support frame 24
It is provided with guide rail 25, motor 21 is fixed on one end of guide rail 25；Ripple is respectively adopted in 23 both ends open of bellows, two ports
Pipe fixing seat 231 and the closing of lower bellows fixing seat 232, upper bellows fixing seat 231 are movably installed in 25 one end of guide rail, and
It is proximate to one end of motor 21, lower bellows fixing seat 232 is fixedly installed in 25 other end of guide rail, lower bellows fixing seat 232
On offer the through-hole passed through for specimen holder 22, upper bellows fixing seat 231 and lower bellows fixing seat 232 install after by wave
Line pipe 23 is set up in the surface of guide rail 25, and parallel with guide rail 25；The screw rod 211 of motor 21 is equally arranged in parallel in guide rail
25 surface, and between bellows 23 and guide rail 25；Specimen holder 22 is by opening up in lower bellows fixing seat 232
Through-hole penetrates in bellows 23, and is fixedly connected with upper bellows fixing seat 231；In use, upper bellows fixing seat 231 exists
It under the driving of motor 21, is moved down along guide rail 25 and screw rod 211, compress bellows 23, while specimen holder 22 being driven to stretch out wave
Line pipe 23 realizes sample replacement.
1. the design of sample changer
Sample changer requires to replace sample in a vacuum, i.e. specimen holder is to run under vacuum conditions.Pass through motor band
Dynamic screw rod, is transformed into vacuum corrugated pipe compression movement, finally sample holder is driven to move up and down, repetitive positioning accuracy 0.05mm.
Sample changer installs, and operation sample repetitive positioning accuracy is 0.1mm.Due to bellows protective effect, so that sample
Always it is in vacuum state.In addition there are two limit switches for sample changer, for limiting sample high-low limit position, also together
The zero point of Shi Zuowei motion control.
A total of 4 samples on specimen holder, the gross mass about 10Kg of specimen holder, sample, bellows vacuum pressure convert into matter
Measure about 60Kg, gross mass about 70Kg.The distance between sample is 70mm, it is desirable that repetitive positioning accuracy 0.05mm.
Choice of electrical machine: this example uses the GYB751D5-RB2 (- B) of servo motor FUJI ELECTRIC smart series, motor output
Shaft diameter is 16mm, and screw rod selects ball screw, wire rod thread M16, lead 4mm.Select d-axis without oil sealing, encoder choosing
Select 20.
Screw rod uniform motion, then motor needs the smallest torque are as follows:
The limit switch of sample changer selects radiation-resistant rotation Omron/TZ-1G.
2. the manufacture of sample changer
This example uses bellows cavity upper flange and bellows cavity lower flange.
Bellows cavity upper flange technique is as follows:
A. inner hole increases step, carries out transition connection by L plate, is bolted pin hole positioning, and the later period is made to assemble and add
Work is more convenient；
B. bellows-welding boss is added at the flange back side, and there are welding stress slots；
C. nut connecting hole is changed to straight hole by stepped hole, and cooperation ball screw nut is processed；
In process flow, blanking uses plasma blanking, blank size 190 × 145 × 45；Planer processes surrounding to size
178×130×40；Wire cutting correcting plane post-processing shape and cuts inner hole to drawing size on the basis of length direction one end,
Length direction retains size 178；Lathe, four paws clamps flange, and after correcting plane, machining bellows weld boss and inner hole both ends
Step is to size；Numerical control, on the basis of inner hole groove surface, processing flange bottom to size 176 guarantees 98 tolerance of size；
BoringThrough-hole, and other all holes are processed to size；Pincers worker mainly carries out tapping process to threaded hole；Finally according to superelevation
Vacuum requirement is cleaned, and carries out whole detection to part using three coordinate measurement tools.
Bellows cavity lower flange process program is as follows:
A. inner hole increases step, carries out transition connection by L plate, is bolted, and the later period is made to assemble and process more square
Just；
B. bellows-welding boss is added at the flange back side, and there are welding stress slots；
In process flow, blanking uses plasma blanking, blank size 215 × 145 × 45；Planer, processing surrounding to ruler
Very little 200 × 130 × 40；Wire cutting correcting plane post-processing shape and cuts inner hole to drawing ruler on the basis of length direction one end
It is very little；Lathe, four paws clamps flange, and after correcting plane, machining bellows weld boss and inner hole both ends step to size；Numerical control,
On the basis of flange bottom, processingHole guarantees 43 tolerance of size to size；BoringBearing hole, and process other
All holes are to size；Pincers worker carries out tapping process to threaded hole；It finally requires to be cleaned according to ultrahigh vacuum, and utilizes three
Coordinate measurement tool carries out whole detection to part.
Specimen holder: since part length size is larger, local thickness is relatively thin, as a whole structure process, machining deformation compared with
It is difficult to control, it is difficult to guarantee the final matching requirements of part；The specimen holder process program of this example is as follows:
As shown in figure 9, specimen holder carries out soldering post-processing by stainless steel plate 221 and tantalum plate, and relatively thin in tantalum plate tail portion
Place's 2mm thickness tantalum plate directly processes the circular hole 222 for accommodating sample, this part tantalum plate and sample fixed plate 223, stainless steel plate 221
For being fixedly connected with upper bellows fixing seat 231.
In stainless steel plate process flow, blanking uses plasma blanking, having a size of 520 × 100 × 12；Planer processes surrounding
To size 510 × 90,6mm step is processed to drawing size；The processing of thickness direction polishing both surfaces；Finally it is removed surface oil
It is dirty.
Tantalum plate is using 110 × 95 × 12 tantalum plate purchased；Then it carries out planer and processes four weeks to size 105 × 90, add
Work 6mm step is to drawing size, and finally cleaning removes surface and oil contaminant.
Stainless steel plate and tantalum plate use vacuum brazing；After the completion of welding, number milling, thickness direction repeatedly turns over processing, every time
The depth of cut is respectively 1,0.5,0.5mm be worked into size 8, processing four weeks arrive size 555 × 80, processing step and all holes to ruler
It is very little, match after peg in hole operation and beats；It finally cleans, removes surface and oil contaminant.
Sample fixed plate is using 370 × 90 × 2 tantalum material purchased；Then wire cutting is carried out, processing four weeks arrive size
362 × 80, and process 4Through-hole；By numerical control processing stepped hole to size, counter sink is processed；Finally according to superelevation
Vacuum requirement is cleaned.
Line end face of flange and the guide rail loading end depth of parallelism, guide supporting face and tantalum plate to the sample changer of this example
The depth of parallelism, repetitive positioning accuracy, the leak rate of welding bellows, the flatness of specimen holder and hysterisis error of screw rod etc. are examined
It surveys, the results are shown in Table 3.
The testing result of 3 sample changer of table
Table 3 the results show that the indices of sample changer all meet design requirement.
Three, the design and development of angle rotating mechanism
Angle rotating mechanism includes rotating disk, rotator and motor, and rotating disk is in order to which detector can be rotated centainly
Angle, rotating disk is connected with rotator, is then connected to the motor again.Wherein rotator is a magnetic fluid seal, rotation
Disk includes the quality of load and rotary inertia is respectively 100Kg, 12.5Kg.m2.Rotating disk torque is no more than 4N.m.Rotating disk is set
± 10 ° of rotations are calculated as, repetitive positioning accuracy is 0.05 °.
1. the design of angle rotating mechanism
Angle rotating mechanism requires rotary part to move under vacuum, using magnet fluid sealing mode rotary motion from sky
It is transported in vacuum in gas.Rotating disk is the biggish plate of rotary inertia, to consider Inertia Matching problem.In addition vacuum chamber
There is bigger neutron irradiation in vivo, to consider using radiation-resistant electronic device.
The magnetic fluid seal of this example is big by Hangzhou and manufacture, leak rate are less than 10-7Pa.L/s, revolving speed are less than 10RPM, just
Normal revolving speed 2RPM, axial load 150Kg, installation direction are vertically downward.
The GYG751C5-RB2 (- B) of selection of Motor servo motor FUJI ELECTRIC smart series, motor output shaft diameter are
19mm.Selection selects 20 without oil sealing, d-axis, encoder.
By calculating the rotary inertia of rotating disk close to 3Kg.m2, and the motor rotary inertia selected is 8.88 × 10-
4Kg.m2.Obvious inertia mismatches, and needs to add a retarder among motor and rotating disk.
Retarder: this example uses day essence AFCZ22H-60L200S2, and output shaft diameter is 22mm, and input shaft diameter is
14mm, power 200W, transmission ratio 1/60.It is 12.5Kg.m that rotating disk, which is converted to the rotary inertia on motor shaft,2/(60×
60)=34.72 × 10-4Kg.m2.Match rotating disk with motor rotary inertia.
The limit switch of detector rotating mechanism rotates Omron/TZ-1G, and rotary transformer uses phytron.
2. the detection of angle rotating mechanism
To the repetitive positioning accuracy of the angle rotating mechanism of this example, the concentricity of rotating disk and vacuum cavity and rotating disk with
The depth of parallelism of vacuum cavity upper flange is detected, and the results are shown in Table 4.
The testing result of 4 angle rotating mechanism of table
Table 4 the results show that this example preparation angle rotating mechanism meet design requirement.
Four, the design and development of charged particle detector mechanical structure
1. Δ E-E detector
The Δ E-E detector of this example is detected by miniature multiwire proportional chamber (abbreviation MWPC) gas detector and cesium iodide solid
Device composition, as is illustrated by figs. 11 and 12.Δ E-E detector particle beams window is the polyethylene film of 0.5 μ m-thick, can be resistant to 5000Pa
Pressure difference without rupture.
2. ionization chamber detector
The ionization chamber detector of this example is a gas detector, and as shown in FIG. 13 to 15, working gas is argon gas, interior
Portion's structure is cathode, anode, grid and grading ring, and charged particle enters high-pressure area, it will be able to be detected.Due to electrification
Particle is easy to be blocked, and particle beams window selects 8 μm of Kaptons or PET, particle beams window to be able to bear 1atm pressure.
This example specifically uses two kinds of product films as particle beams window, and the test result of two kinds of films is as follows:
Mylar film, 8 μm of thickness, when effective diameter is 60mm, the results show that Mylar film cannot withstand an atmospheric pressure
Power, rupture are predominantly located at intermediate position, this illustrates that film has occurred and that placticity failure.Then measurement bulge height has 10mm, in this way
Deformation quantity is more than 30%.
Kapton or PET, 8 μm of thickness, effective diameter 60mm, through failure test, there is no rupture, explanations
Kapton or PET can bear an atmospheric pressure.The particle beams window of this example mainly use Kapton or
Person PET.
Five, the alignment of mechanical system
Steps are as follows for mechanical system overall package:
1) bottom bracket and adjustable plate, lower cover plate are assembled and is adjusted in middle position；
2) magnetic fluid is installed, is fixed by bolt；
3) rotating disk is installed, swivel plate is adjusted by beating table and laser tracker；
4) rotating disk limit switch is installed, and is demarcated by laser tracker；
5) 4 gas detectors are installed, by vacuum rubber pipe and clamp connection between detector and detector；
6) vacuum cavity is installed, is positioned by taper pin, is fixed by bolt；
7) molecular pump and rotating electric machine are installed；
8) coordinate calibration is carried out using three coordinates to sample changer；
9) installation upper cover plate and sample changer are integrated, and carry out integral calibrating by laser tracker；
10) mechanical system is docked with air-channel system；
11) pumping leak detection is carried out to system；
12) joint debugging is carried out to whole system；
Wherein, upper cover plate, that is, upper flange 11, lower cover plate, that is, lower flange 12.After being installed, flange before and after vacuum target chamber, i.e.,
Bunch interface flange 13 and 14, center line and beam line concentricity within 0.05mm.
The depth of parallelism for carrying out unloaded final vacuum test, cavity upper flange and line to mounted vacuum target chamber is surveyed
The detections such as examination, leak rate test.The results are shown in Table 5.
5 mechanical system test result of table
| Test content | Design requirement | Test data | Conclusion |
| Unloaded final vacuum | 5.0×10-3Pa | 1.71×10-3Pa | It is qualified |
| The height of line flange from the ground | 1405±1mm | 1405.1mm | It is qualified |
| The depth of parallelism of cavity upper flange and line | ≤0.05mm | 0.01mm | It is qualified |
| Leak rate (welding, sealing) | ≤1.0×10-9Pa.m3/s | ≤4.1×10-11Pa.m3/s | It is qualified |
| The depth of parallelism between line flange | ≤0.05mm | 0.015mm | It is qualified |
| The spacing of two flange of front and back | 1160±1mm | 1160.047mm | It is qualified |
Table 5 the results show that the vacuum target chamber of this example installs after, properties all meet expection.
The vacuum target chamber of this example is in use, vacuum and air-channel system are vacuumized to vacuum target chamber and working gas supplement.This
During a, strict control is needed, on the one hand, need to stablize the gas pressure of detector, provide for detector detection stable
Pressure environment avoids beam window from rupturing；On the other hand, need to maintain certain vacuum degree, to save pressure stabilizing environment；Also, into
In one step improved plan, it is also necessary to design the safeguard measure after beam window contingency ruptures to molecular pump and vacuum gauge etc..
The white light neutron source charged particle detector vacuum target chamber of this example, control system are divided into Hardware Subdivision from physical angle
Point and software section, be divided into field control system (i.e. device systems control) and tele-control system from far and near angle.This example
Field control system is realized using the sequence CPU of Yokogawa PLC including motion control, vacuum monitoring, gas circuit pressure stabilizing, ion beam window
With vacuum component protection etc. functions.Tele-control system runs EPICS IOC using embedded CPU module F3RP61, makes white
The data of phot-neutron source charged particle detector vacuum target chamber control system are directly brought into the accelerator control system based on EPICS
In, the functions such as long-range OPI operation, history data store, audible alarm are realized to facilitate.
The control system of this example uses fieldbus based layer distributed, open configurable structure, and entire coiling is raw
Producing line is physically divided into three layers: ipc monitor control layer, controller layer and scene equipment level.Software is suitble to open system ring
It is run under border, and there is mature operating experience.
The ipc monitor control layer equipment of this example is the touch screen of a Weinview, has easy to operate, Yong Hujie
Friend is good, full-localized, and prompt is clear, and function is detailed, high reliablity.Host/operator workstation can be automatically performed white light neutron
The acquisition and processing of source charged particle detector vacuum target control system real-time status, the acquisition and processing of real time execution parameter,
Monitoring, controlled device operating parameter is adjusted, alarm and accident record, the inquiry of historical data, state, report form processing with
Printing, counting statistics, the functions such as real-time display equipment running status and parameter.
Controller layer uses the Yokogawa PLC system of customer requirement, including controller, power module, I/O module, position control
Molding block, communication module lamp.Exploitation is safe and reliable, the program of lower computer of complete function, completes subsystems and each equipment
Control, monitoring, the functions such as protection.
Field control layer includes various field equipment and subsystem, including gas system, vacuum system, valve group, pump group, respectively
Sensor, transmitter, instrument, Sampler, probe angle rotating mechanism etc..
The white light neutron source charged particle detector vacuum target chamber of this example, the design requirement of vacuum cavity are cavity zero loads
When ultimate vacuum be 5 × 10-3Pa, 1405 ± 1mm, all weld leak rates are not higher than 10 from the ground at line interface flange center- 9Pa.m3/ s, leak rate is not higher than 10 at all sealings-8Pa.m3/s；Actual measured results show, ultimate vacuum is when cavity zero load
1.7×10-3Pa, line interface flange center 1405.1mm from the ground, whole leak rate 4.1 × 10-11Pa.m3/ s, meeting design needs
It asks.The sample repetitive positioning accuracy of sample changer reaches 0.03mm；The rotation of probe angle rotating mechanism ± 10 °, it is fixed to repeat
Position precision reaches 0.02 °.In vacuum system and air-channel system, the pressure control range of gas detector voltage-stabilizing system 5000 ±
200pa, meeting any value fluctuation in pressure limit, all within ± 5%, ionization chamber detector working gas pressure is 1atm,
The design requirement of fluctuation range ± 5%.Also, control system can guarantee that moving component is accurately positioned, detector working gas pressure
Power is stablized, the protection of ion beam window, vacuum gauge and molecular pump, and there are the interface with tele-control system, response technology satisfaction is wanted
It asks.
Group's field observation and test after tested, vacuum cavity and sample changer vacuum performance reach design requirement, sample
Product changer and the motion control of probe angle rotating mechanism and positioning repeatable accuracy reach design requirement, and gas circuit control can be put down
Steady work can guarantee that particle beams window film does not rupture, and detector substitution gas system can guarantee detector working gas
Purity reaches design requirement, and detector gas systems stabilisation can make pressure stability reach design requirement, match between each system
Good, smooth running is closed, indices reach or better than design requirement.
The foregoing is a further detailed description of the present application in conjunction with specific implementation manners, and it cannot be said that this Shen
Specific implementation please is only limited to these instructions.For those of ordinary skill in the art to which this application belongs, it is not taking off
Under the premise of from the application design, a number of simple deductions or replacements can also be made.
Claims (10)
1. a kind of charged particle detector for white light neutron source charged particle detection spectrometer, it is characterised in that: including Δ E-E
Detector and ionization chamber detector；
The Δ E-E detector is combined type gas-solid probe, by mutually independent miniature multiwire proportional chamber detection of gas
Device and cesium iodide solid probe composition, the Δ E-E detector use 0.5 μ m-thick polyethylene film particle beams window；
The ionization chamber detector uses 8 μ m-thick Kaptons or polyester film particle beams window.
2. charged particle detector according to claim 1, it is characterised in that: in the Δ E-E detector, small-sized multifibres
Proportional chamber gas detector and cesium iodide solid probe use rubber seal, realize the mutually indepedent of the two.
3. charged particle detector according to claim 1, it is characterised in that: the ionization chamber detector is a kind of gas
Detector, internal structure include the high-pressure area that cathode, anode, grid and grading ring are formed, and charged particle enters high-pressure area
It can be detected；
Preferably, the distance between cathode and anode are adjustable, to realize that electric field strength is adjusted, in order to different band electrochondrias
Son is detected；
Preferably, the working gas of ionization chamber detector is argon gas.
4. a kind of white light neutron source charged particle detection using the described in any item charged particle detectors of claim 1-3 is composed
Instrument.
5. white light neutron source charged particle detection spectrometer according to claim 4, it is characterised in that: further include vacuum target
Room, the vacuum target chamber include mechanical system, vacuum air-channel system and control system；
The mechanical system includes vacuum cavity (1), sample changer (2) and probe angle rotating mechanism (3)；The vacuum
Cavity (1) is for accommodating the described in any item charged particle detectors of claim 1-3 (0), sample changer (2) and detector
Angle rotating mechanism (3) provides experimental enviroment for detection；
The sample changer (2) uses sylphon seal for placing multiple samples, sample changer (2), can be in vacuum
Lower linear motion realizes sample switching；
The probe angle rotating mechanism (3) use magnet fluid sealing, can rotary motion under vacuum, probe angle rotation
The angle adjustment of charged particle detector (0) is realized for placing detector in part of the rotation mechanism (3) in vacuum cavity (1)；
The vacuum air-channel system includes vacuum subassembly and working gas component, vacuum subassembly respectively with vacuum cavity (1) and band
The connection of charged particle detector (0) pipeline ensures the vacuum degree of vacuum cavity (1) and detector (0) inside for vacuumizing；Work
Make gas component to be connected to charged particle detector (0) pipeline, is charged particle detector (0) offer working gas, also,
Safeguard work gas pressure is stablized under the coordination of vacuum subassembly and working gas component；
The control system is used for coordinated control charged particle detector (0), sample changer (2), probe angle whirler
Structure (3) and vacuum air-channel system；
Preferably, the vacuum cavity (1) is connected to charged particle detector (0) pipeline, and switch is arranged on connecting pipe
Valve (01).
6. white light neutron source charged particle detection spectrometer according to claim 5, it is characterised in that: the working gas group
Part includes high pressure gas cylinder (4), and high pressure gas cylinder (4) is connected to charged particle detector (0) pipeline, provides working gas for it；
Preferably, pressure stabilizing compensator (5) are provided between the high pressure gas cylinder (4) and charged particle detector (0)；
Preferably, multiple pressure valve (51) are offered on the pressure stabilizing compensator (5), is used for safeguard work gas pressure, avoids detecting
The beam window of device ionisation chamber ruptures；
Preferably, the vacuum subassembly includes impact-resistant composite molecular pump (6), and composite molecular pump (6) is independent and vacuum chamber
The connection of body (1) pipeline；Meanwhile composite molecular pump (6) is independent via pressure stabilizing compensator (5) and charged particle detector (0) pipe
Road connection；
Preferably, the first ratio adjusting valve is provided on the pipeline that the composite molecular pump (6) is connected to vacuum cavity (1)
(61), first gear plate valve (62) and between the first ratio adjusting valve (61) and vacuum cavity (1) are provided with；
The second ratio adjusting valve (63) are provided on connecting pipe between the composite molecular pump (6) and pressure stabilizing compensator (5),
And second gear plate valve (64) are provided between the second ratio adjusting valve (63) and pressure stabilizing compensator (5).
7. white light neutron source charged particle detection spectrometer according to claim 5, it is characterised in that: the control system packet
Include the tele-control system based on EPICS and the local control system based on Yokogawa PLC.
8. white light neutron source charged particle detection spectrometer according to claim 5, it is characterised in that: the vacuum cavity
It (1) is cylindrical cavity, the upper and lower ends of cylindrical cavity are each provided with upper flange (11) and lower flange (12), cylindrical cavity
Side wall on be provided with a pair of bunch interface flange (13,14) and several parts through walls that cylindrical cavity is passed through for bunch
Flange (15)；
Preferably, the upper flange (11) and lower flange (12) use radiation-resistant viton seal ring；
Preferably, the wall outer surface of the vacuum cavity (1) is provided with several collimation positioning targets, for vacuum cavity
(1) space orientation is carried out；
Preferably, the outer surface anodization of the vacuum cavity (1), inner surface are conductive；
Preferably, be fixed with neutron beam window on the bunch interface flange (13,14), in order to which neutron streaming passes through, it is described in
The tantalum films that beamlet window is 100 microns of thickness, effective diameter 100mm.
9. white light neutron source charged particle detection spectrometer according to claim 8, it is characterised in that: the sample changer
It (2) include lead screw motor (21) and specimen holder (22), specimen holder (22) uses sylphon seal；
Sample changer interface (111) is offered on the upper flange (11), the lead screw motor (21) is fixedly mounted on method
On the sample changer interface (111) of blue (11), it is located at outside vacuum cavity (1), the specimen holder (22) passes through the sample
Changer interface (111) protrudes into vacuum cavity (1)；Lead screw motor (21) driving specimen holder (22) moves up and down realization detection sample
Product replacement；
Preferably, the specimen holder (22) is tantalum specimen holder.
10. white light neutron source charged particle detection spectrometer according to claim 8, it is characterised in that: the lower flange
(12) probe angle rotating mechanism interface (121) is offered on, the probe angle rotating mechanism (3) is fixedly mounted on down
On the probe angle rotating mechanism interface (121) of flange (12), the driving end of probe angle rotating mechanism (3) is located at vacuum
Outside cavity (1), probe angle rotating mechanism (3) movable end is protruded into very by probe angle rotating mechanism interface (121)
In cavity body (1), for connecting charged particle detector (0).
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| CN110618377B (en) * | 2019-09-12 | 2020-08-11 | 中国科学院近代物理研究所 | Main and auxiliary chamber structure target chamber system for circuit board testing and use method thereof |
| CN112612049A (en) * | 2020-12-04 | 2021-04-06 | 中广核久源（成都）科技有限公司 | Distance-adjustable vacuum radioactivity detection device and detection method |
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| CN109459454B (en) | 2021-07-06 |
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