CN109459168A - A kind of electromagnetic balance formula pull pressure sensor - Google Patents
A kind of electromagnetic balance formula pull pressure sensor Download PDFInfo
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- CN109459168A CN109459168A CN201811157952.9A CN201811157952A CN109459168A CN 109459168 A CN109459168 A CN 109459168A CN 201811157952 A CN201811157952 A CN 201811157952A CN 109459168 A CN109459168 A CN 109459168A
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- 238000001514 detection method Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 6
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- 238000011896 sensitive detection Methods 0.000 claims description 4
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P13/00—Indicating or recording presence, absence, or direction, of movement
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- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
本发明公开了一种电磁平衡式拉压力传感器，包括电磁结构、加载杆和信号反馈系统；所述电磁结构包括壳体、挠性梁、永磁动圈式力发生器和差动电容传感器；所述挠性梁的一端固定在壳体内，永磁动圈式力发生器的线圈骨架与挠性梁连接；所述差动电容传感器设置在挠性梁的另一端；所述加载杆的一端与挠性梁的另一端连接，加载杆的另一端用于加载待测力；所述信号反馈系统的一端与差动电容传感器连接，另一端与永磁动圈式力发生器连接。本发明测量原理简单，形成闭环测量系统，因此具有测量精度高、体积小、抗干扰能力强并可判断所受力方向的特点。
The invention discloses an electromagnetic balanced tension and pressure sensor, comprising an electromagnetic structure, a loading rod and a signal feedback system; the electromagnetic structure includes a shell, a flexible beam, a permanent magnet moving coil force generator and a differential capacitance sensor; One end of the flexible beam is fixed in the casing, and the coil skeleton of the permanent magnet moving coil force generator is connected to the flexible beam; the differential capacitance sensor is arranged at the other end of the flexible beam; one end of the loading rod is It is connected with the other end of the flexible beam, and the other end of the loading rod is used to load the force to be measured; one end of the signal feedback system is connected with the differential capacitance sensor, and the other end is connected with the permanent magnet moving coil force generator. The measurement principle of the invention is simple, and a closed-loop measurement system is formed, so it has the characteristics of high measurement accuracy, small size, strong anti-interference ability and can judge the direction of the force.
Description
Technical field
The present invention relates to the sensor technical fields of power measurement, and in particular to a kind of electromagnetic balance formula pull pressure sensor.
Background technique
The development of domestic force snesor industry can trace back to the late nineteen seventies of twentieth century, the sensing in that period
Device, mainly imitated American-European, Deng state design and manufacturing technology, can only carry out small lot production, scope of the enterprise was universal at that time
Smaller, technique assembles horizontal poor, yield and technical performance is relatively low.By development in more than 30 years, especially nearly ten years,
With the fast development of national economy, science and technology, especially electronics and computer technology, the increasing of basic research investment is
The development of force snesor provides very large space and haves laid a good foundation, and makes its applying in national economy every field
Quick development has been arrived, powerful industry is formd.It recently as the rise of Internet of Things and digital technology, and is force snesor
Industrial upgrading creates condition.
Traditional force measuring sensors are the strains that generate when beam stress deformation by pasting foil gauge on spring beam
It is transmitted to foil gauge, the resistance of foil gauge changes, and the bridge circuit being made of foil gauge is exported and reinforced on spring beam
The voltage signal of direct ratio.Since there are non-linear and braking problems for elastic beam structure itself, along with foil gauge is to stick with glue
In on spring beam, glue is influenced by temperature and will appear aging phenomenon to the firm pasting degree of foil gauge, therefore will lead to survey
Force system degradation.Its precision of the dynamometric system made of foil gauge is difficult to break through 0.02%FS.Also, traditional power measurement
Sensor is using in manufacturing process, and there are also some shortcomings:
1 metal strain chip sensor: biggish non-linear for having strained greatly；Output signal is weaker；Although metal is answered
The temperature coefficient for becoming piece is smaller, but its resistance can vary with temperature after all；Transversal effect brings error to measurement；Metal strain plate
Gage factor it is small.
2 semiconductor gauge sensors: although the high sensitivity of this foil gauge, its nonlinearity erron is big, maximum
The disadvantage is that output voltage is affected by temperature greatly, therefore is used in the environment of temperature change, it is ensured that certain precision, it is necessary into
Trip temperature compensation, but this compensation only reduces the influence of temperature to a certain extent, is difficult environment temperature at all seasons
It is compensated well in the case where degree variation.
For the measurement accuracy for improving sensor, defect existing for strain-gauge transducer is solved, there has been proposed a kind of electricity
Magnetic balance type force snesor.
A kind of patent of invention of Multifunctional high-accuracy electronic balance of Kunshan big encyclopaedia laboratory equipment Engineering Co., Ltd, should
For electronic balance described in patent when weighing, the gravity for being weighed object makes the moving part of electromagnetic force balance sensor that position occur
It moves, displacement is provided by symmetrical photoelectric cell, and a compensation electric current is generated in feedback coil, senses electromagnetic force equilibrium
The moving part of device restores balance position, and the size for compensating electric current reflects the gravity of testee generation.
The qin of applying of Voestalpine metallurgical technology company, Siemens devised a electromagnetic type gravitational equilibrium sensor in 2013,
The sensor is also the displacement of coil being connected by electrooptical device judgement with lever, by regulating winding electric current it is big
It is small, so that lever is restored to equilbrium position.
Wang Qiuxiao of University Of Chongqing et al. was set in 2016 based on electromagnetic force lever mechanism principle and electromagnetic force equilibrium principle
A sensor is counted, which makes it generate electricity when lever positions change, by adjusting electromagnet both end voltage
Magnetic force adsorbs armature, lever is made to be restored to initial rest position.
Shao Wanli of Hunan University et al. devised a accurate electromagnetic force balance sensor in 2012, which adopts
Beam balance is judged with electrooptical device, it is big by the current strength passed through in the coil at air gap in indirect determination steady magnetic field
It is small, obtain the quality of weighed object.
The above design is the power or mass measuring method of the principle based on gravity and electromagnetic force equilibrium, all uses two photoelectricity
Device realizes the adjusting of dynamic balance, therefore the consistency of performance of this two photoelectric devices determines the performance of obtained instrument.
If the consistency of the performance indicator of two photoelectric devices is difficult to accomplish, therefore this just makes with the displacement of electrooptical device detection beam
The performance for the instrument about developed further increases.In addition, above-mentioned electromagnetic balance formula force checking device volume is larger.
Summary of the invention
The present invention is directed to solve one of above-mentioned technical problem at least to a certain extent.The present invention provides a kind of electromagnetism thus
Balanced type pull pressure sensor.The sensor measurement principle is simple, have measurement accuracy is high, small in size, strong antijamming capability and
The characteristics of can determine whether institute's Impact direction.
The technical scheme is that a kind of electromagnetic balance formula pull pressure sensor, including electromagnetic structure, load bar and letter
Number feedback system；
The electromagnetic structure includes shell, flexible beam, permanent magnetic moving winding forcer and differential capacitance sensor；It is described to scratch
One end of property beam is immobilized in the shell, and the coil rack of permanent magnetic moving winding forcer is connect with flexible beam；The differential capacitor
The other end of flexible beam is arranged in sensor；
One end of the load bar and the other end of flexible beam connect, and the other end of load bar is for loading testing force；
One end of the signal feedback system is connect with differential capacitance sensor, the other end and permanent magnetic moving winding forcer
Connection.
In above scheme, the differential capacitance sensor includes upper fixed plate, upper movable plate electrode, lower movable plate electrode and lower determines pole
Plate；
The upper fixed plate and lower fixed plate are respectively arranged on shell；The upper movable plate electrode and lower movable plate electrode are installed respectively
In the flexible beam other end；
The position of the upper fixed plate and upper movable plate electrode is corresponding；The position of the lower movable plate electrode and lower fixed plate is opposite
It answers；
The upper fixed plate, lower fixed plate, upper movable plate electrode and lower movable plate electrode the equal metal-plated membrane of pole-face.
In above scheme, the signal feedback system includes sequentially connected bridge circuit, differential amplifier circuit, phase sensitivity inspection
Wave circuit, low-pass filter circuit and power amplification circuit.
In above scheme, the permanent magnetic moving winding forcer includes coil and magnetic loop；
The coil is wrapped on coil rack；
The magnetic loop is connect with shell, and the magnetic loop includes two symmetrical E shape magnetic circuits, and coil is located at two symmetrically
E shape magnetic circuit between.
In above scheme, the shell is equipped with rack ventilating hole；One end of the load bar passes through rack ventilating hole and flexible beam
The other end connection.
In above scheme, the shell is additionally provided with winding wire through-hole and detection circuit wire through-hole.
In above scheme, the flexible beam is quartz material.
In above scheme, the coil rack is laminated by silicon steel sheet.
Compared with prior art, the beneficial effects of the present invention are:
1. electromagnetic balance formula pull pressure sensor measuring principle of the present invention is simple, and have measurement accuracy it is high, it is small in size and
Strong antijamming capability, and the characteristics of can determine whether institute's Impact direction.
2. the present invention detects the displacement of beam using differential capacitance sensor, because capacitance sensor detects the sensitive of displacement
Degree is high, therefore the sensitivity of designed tension gauge device can also correspondingly increase；And differential capacitance sensor is not easily susceptible to high-intensity magnetic field
Interference, stability are good.
3. handling displacement signal, this method letter using phase-sensitive detection circuit in capacitive sensor signal processing circuit of the present invention
Single easy, biggest advantage is to may determine that the direction of displacement of flexible beam, so judge beam institute stress be pressure or
Pulling force.
Have the characteristics that high sensitivity when 4. the present invention is using capacitance sensor detection displacement, is passed using difference structure capacitor
Sensor detects the balance of electromagnetic force and gravity, and it is symmetrically difficult to overcome above-mentioned force detection system requirement photoelectric device performance indicator
Topic.In structure design, the present invention reduces the volume of detection device using girder structure.Furthermore the present invention is not only capable of measuring weight
Power, moreover it is possible to detect pulling force.
Detailed description of the invention
Above-mentioned and/or additional aspect of the invention and advantage will become from the description of the embodiment in conjunction with the following figures
Obviously and it is readily appreciated that, in which:
Fig. 1 is the internal structure diagrammatic cross-section of the electromagnetic balance formula pull pressure sensor of an embodiment of the present invention；
Fig. 2 is the external view of the electromagnetic balance formula pull pressure sensor of an embodiment of the present invention；
Fig. 3 is the signal feedback system connection figure of an embodiment of the present invention.
In figure, 1, shell；2, flexible beam；3, coil；4, magnetic loop；5, coil rack；6, upper fixed polar plate；7, upper movable
Pole plate, 8, lower movable plate；9, lower fixed polar plate；10, differential capacitance sensor；11, load bar；12, rack ventilating hole；13, line
Enclose wire through-hole；14, detection circuit wire through-hole.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, it is intended to is used to explain the present invention, and is not considered as limiting the invention.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
The orientation or positional relationship of the instructions such as " thickness ", "upper", "lower", " axial direction ", " radial direction ", "vertical", "horizontal", "inner", "outside"
To be based on the orientation or positional relationship shown in the drawings, be merely for convenience of description of the present invention and simplification of the description, rather than indicate or
It implies that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as
Limitation of the present invention.In addition, term " first ", " second " are used for description purposes only, it is not understood to indicate or imply phase
To importance or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be with
Explicitly or implicitly include one or more of the features.In the description of the present invention, the meaning of " plurality " is two or
Two or more, unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can be machine
Tool connection, is also possible to be electrically connected；It can be directly connected, two members can also be can be indirectly connected through an intermediary
Connection inside part.For the ordinary skill in the art, above-mentioned term can be understood in this hair as the case may be
Concrete meaning in bright.
Electromagnetic balance formula pull pressure sensor according to an embodiment of the present invention is specifically described in conjunction with attached drawing first below.
Fig. 1 show a kind of embodiment of electromagnetic balance formula pull pressure sensor of the present invention, the electromagnetic balance
Formula pull pressure sensor, including electromagnetic structure, load bar 11 and signal feedback system.
The electromagnetic structure includes shell 1, flexible beam 2, permanent magnetic moving winding forcer and differential capacitance sensor 10.Institute
The one end for stating flexible beam 2 is fixed in shell 1, and the coil rack 5 of permanent magnetic moving winding forcer is fixed on the centre of flexible beam 2
Part；The other end of flexible beam 2 is arranged in the differential capacitance sensor 10.
One end of the load bar 11 is connect with the other end of flexible beam 2, and the other end of load bar 11 is to be measured for loading
Power.
One end of the signal feedback system is connect with differential capacitance sensor 10, and the other end and permanent magnetic moving winding power occur
Device connection.
Preferably, the permanent magnetic moving winding forcer includes coil 3 and magnetic loop 4；Two groups of lines are wound on coil rack 5
Circle 3, two groups of series connection reversal connections of coil 3；The magnetic loop 4 is connect with shell 1, and the magnetic loop 4 includes two symmetrical E shape magnetic
Road, coil 3 are located between two symmetrical E shape magnetic circuits.Magnetic loop 4 and coil 3 constitute permanent magnetic moving winding forcer, push away each other
Tying-in structure substantially increases the utilization rate and anti-interference of magnetic circuit.
Preferably, the differential capacitance sensor 10 includes upper fixed plate 6, upper movable plate electrode 7, lower movable plate electrode 8 and lower determines pole
Plate 9；The upper fixed plate 6 and lower fixed plate 9 are respectively arranged on shell 1；The upper movable plate electrode 7 and lower movable plate electrode 8 are pacified respectively
Mounted in 2 other end of flexible beam；The position of the upper fixed plate 6 and upper movable plate electrode 7 is corresponding；The lower movable plate electrode 8 and lower determine pole
The position of plate 9 is corresponding；The upper fixed plate 6, lower fixed plate 9, upper movable plate electrode 7 and lower movable plate electrode 8 pole-face be coated with metal
Film forms electrode, constitutes differential capacitance sensor 10.
As shown in Fig. 2, the shell 1 is equipped with rack ventilating hole 12；One end of the load bar 11 pass through rack ventilating hole 12 with
The other end of flexible beam 2 connects.
The shell 1 is additionally provided with two winding wire through-holes 13 and two detection circuit wire through-holes 14.
As shown in Figure 3, it is preferred that the signal feedback system includes sequentially connected C/U conversion bridge circuit, differential puts
Big circuit, phase-sensitive detection circuit, low-pass filter circuit and power amplification circuit.
The upper fixed plate 6 and lower fixed plate 9 are separately connected conducting wire, and conducting wire is pierced by from detection circuit wire through-hole 14 respectively
Successively connect with C/U conversion bridge circuit, differential amplifier circuit, phase-sensitive detection circuit, low-pass filter circuit and power amplification circuit
It connects, power amplification circuit passes through winding wire through-hole 13 by conducting wire and connect with one end of coil 3；Voltage collecting device can lead to
It crosses conducting wire to connect with the other end of coil 3, for acquiring the voltage of output.
Preferably, the flexible beam 2 is quartz material.The upper fixed plate 6, upper movable plate electrode 7, lower movable plate electrode 8 and lower fixed
Pole plate 9 is that quartz material is made.
Preferably, the coil rack 5 is laminated by silicon steel sheet.
Working principle of the present invention:
When working sensor, power acts on flexible beam 2 by load bar 11, and flexible beam 2 is made to generate displacement；
The offset of the flexible beam 2 can be detected by differential capacitance sensor 10, and bridge output voltage is passed through signal
Processing circuit, power amplification circuit pass to feed circuit, generate electric current in the coil of feed circuit, the coil to alive
3 generate an electromagnetic force contrary with testing force in magnetic field, adjust the size of electromagnetic force, can make to generate the flexibility being displaced
Beam 2 is restored to original equilbrium position again；
When the flexible beam 2 balances again, and by the corresponding compensation electric current of dynamometry, after sample resistance, in resistance
Both ends can get output voltage, and output voltage is directly proportional to by dynamometry.
Pulling force suffered by the flexible beam 2 or pressure are reflected by the positive and negative of output voltage at sampling resistor both ends.
The present invention is in electromagnetic structure, and coil rack 5 is by 2 elastic bearing of quartz flexible beam；2 one end of flexible beam is fixed on shell
On body 1；The electrode for being fixed on two quartzy fixed plates and two movable plate electrodes on flexible beam 2 of shell 1 is made of metal coating,
Pole plate as differential capacitance sensor 10；Two symmetrical E shape magnetic circuits and coil constitute push-pull configuration permanent magnetic moving winding power each other
Generator.Under the action of by dynamometry, flexible beam 2 generates displacement.Differential capacitance sensor 10 detects the offset of flexible beam 2,
And offset is passed to signal feedback system, give coil 3 one compensation electric currents by signal feedback system, the coil to alive
3 generate an electromagnetic force contrary with testing force in magnetic field, adjust the size of electromagnetic force, can make to generate the flexibility being displaced
Beam 2 can be restored to original equilbrium position again.The invention measuring principle is simple, forms closed-loop measuring system, therefore have measurement
Precision is high, small in size, strong antijamming capability and the characteristics of can determine whether institute's Impact direction.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not
Centainly refer to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be any
One or more embodiment or examples in can be combined in any suitable manner.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example
Property, it is not considered as limiting the invention, those skilled in the art are not departing from the principle of the present invention and objective
In the case where can make changes, modifications, alterations, and variations to the above described embodiments within the scope of the invention.
Claims (8)
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| CN201811157952.9A CN109459168A (en) | 2018-09-30 | 2018-09-30 | A kind of electromagnetic balance formula pull pressure sensor |
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| CN201811157952.9A CN109459168A (en) | 2018-09-30 | 2018-09-30 | A kind of electromagnetic balance formula pull pressure sensor |
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| CN109459168A true CN109459168A (en) | 2019-03-12 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110440836A (en) * | 2019-06-28 | 2019-11-12 | 中国船舶重工集团公司第七0七研究所 | A kind of quartzy capacitive displacement transducer having Ethylmercurichlorendimide grade resolving power level |
| CN111943070A (en) * | 2020-08-28 | 2020-11-17 | 杭州契卡拉起重机械有限公司 | An intelligent electric hoist with suspension control structure |
| CN114544326A (en) * | 2022-02-25 | 2022-05-27 | 河南省计量科学研究院 | Fiber strength measuring method |
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| CN107102168A (en) * | 2017-04-27 | 2017-08-29 | 青岛智腾微电子有限公司 | A kind of quartz flexible accelerometer |
| CN107105374A (en) * | 2017-04-27 | 2017-08-29 | 河南大学 | It is a kind of to weaken the electroacoustic transducer for phenomenon of point shaking |
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| CN110440836A (en) * | 2019-06-28 | 2019-11-12 | 中国船舶重工集团公司第七0七研究所 | A kind of quartzy capacitive displacement transducer having Ethylmercurichlorendimide grade resolving power level |
| CN111943070A (en) * | 2020-08-28 | 2020-11-17 | 杭州契卡拉起重机械有限公司 | An intelligent electric hoist with suspension control structure |
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