CN109458844A - A kind of tube furnace with control material processing environmental functional - Google Patents
A kind of tube furnace with control material processing environmental functional Download PDFInfo
- Publication number
- CN109458844A CN109458844A CN201811596542.4A CN201811596542A CN109458844A CN 109458844 A CN109458844 A CN 109458844A CN 201811596542 A CN201811596542 A CN 201811596542A CN 109458844 A CN109458844 A CN 109458844A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- sealed compartment
- inner cavity
- tubular type
- evacuation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims abstract description 42
- 230000007613 environmental effect Effects 0.000 title claims abstract description 25
- 238000012545 processing Methods 0.000 title claims abstract description 25
- 230000007246 mechanism Effects 0.000 claims abstract description 14
- 230000008676 import Effects 0.000 claims abstract description 11
- 238000010438 heat treatment Methods 0.000 claims abstract description 4
- 239000007789 gas Substances 0.000 claims description 21
- 230000007704 transition Effects 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000000428 dust Substances 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000005260 corrosion Methods 0.000 abstract description 4
- 230000007797 corrosion Effects 0.000 abstract description 4
- 230000003647 oxidation Effects 0.000 abstract description 4
- 238000007254 oxidation reaction Methods 0.000 abstract description 4
- 238000004458 analytical method Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000012512 characterization method Methods 0.000 description 3
- 238000005538 encapsulation Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 108010066057 cabin-1 Proteins 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/02—Furnaces of a kind not covered by any preceding group specially designed for laboratory use
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
- F27D21/04—Arrangements of indicators or alarms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0006—Monitoring the characteristics (composition, quantities, temperature, pressure) of at least one of the gases of the kiln atmosphere and using it as a controlling value
- F27D2019/0009—Monitoring the pressure in an enclosure or kiln zone
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Clinical Laboratory Science (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Abstract
The present invention relates to a kind of tube furnaces with control material processing environmental functional, comprising: tubular type furnace body, sealed compartment, the first vacuum evacuation device, the second vacuum evacuation device and clean gas feeding mechanism.The outlet of above-mentioned tubular type furnace body is connected with the inner cavity of sealed compartment, and realizes the connection or closing with sealed compartment inner cavity by import baffles.Clean gas feeding mechanism, the first vacuum evacuation device are connected with the inner cavity of sealed compartment.Second vacuum evacuation device is connected with the inner cavity of tubular type furnace body.The inner cavity of sealed compartment is made to be in vacuum state by the first vacuum evacuation device, at the same time, the inner cavity of tubular type furnace body is made to be also at vacuum state by the second vacuum evacuation device, material after heat treatment is entered by tubular type furnace body after the inner cavity of sealed compartment, close import baffles, it then borrows clean gas feeding mechanism and is filled with clean gas to sealed compartment, oxidation, corrosion phenomena caused by being in contact so as to avoid material itself and air, moisture etc..
Description
Technical field
The present invention relates to tube furnace technical field, in particular to a kind of tubular type with control material processing environmental functional
Furnace.
Background technique
With the development of science and technology, the experimental study that tube furnace completes some harshnesses is usually borrowed.Such as it is cured in biology
The fields such as medicine, health care, microelectronics and special chemical, Bioexperiment.However, material after treatment is leaving fire door
Afterwards, it can inevitably be contacted with air, moisture etc. before encapsulating, oxidation, corrosion etc. are caused to material itself.Currently, market
On there are shut to state solution to the problem or equipment.Thus, it would be highly desirable to technical staff solves the above problems.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of designs of structure simply, and manufacturing cost is cheap, easy to operate
Tube furnace with control material processing environmental functional.
In order to solve the above-mentioned technical problem, the present invention relates to a kind of tubular types with control material processing environmental functional
Furnace, comprising: tubular type furnace body, sealed compartment, the first vacuum evacuation device, the second vacuum evacuation device and clean gas feeding mechanism.
The outlet of above-mentioned tubular type furnace body is connected with the inner cavity of sealed compartment, and realizes the company with sealed compartment inner cavity by import baffles
Logical or closing.Clean gas feeding mechanism, the first vacuum evacuation device are connected with the inner cavity of sealed compartment.Second vacuum evacuation device
It is connected with the inner cavity of tubular type furnace body.The inner cavity of sealed compartment is made to be in vacuum state by the first vacuum evacuation device, with this
Meanwhile make the inner cavity of tubular type furnace body be also at vacuum state by the second vacuum evacuation device, material after heat treatment by
Tubular type furnace body enters after the inner cavity of sealed compartment, closes import baffles, then borrows clean gas feeding mechanism to sealing
Cabin is filled with clean gas.
Further, have control material processing environmental functional tube furnace further include the first vacuum-ness detecting device and
Second vacuum-ness detecting device is respectively intended to adapt to sealed compartment, tubular type furnace body.
Further, the tube furnace with control material processing environmental functional further includes the first alarm, the second alarm
Device is respectively intended to receive the detection signal of the first vacuum-ness detecting device, the second vacuum-ness detecting device.
Further, it is above-mentioned have control material processing environmental functional tube furnace can also configure moisture content detection device,
Oxygen detection device and/or dust detection.
Further, have control material processing environmental functional tube furnace further include outlet transition cabin, third take out it is true
Empty device.The outlet transition cabin is set to the side of sealed compartment, and connection or pass with sealed compartment are realized by outlet baffles
It closes.Third vacuum evacuation device is connected with outlet transition cabin.The vent valve being connected with its inner cavity is provided in outlet transition cabin.
Further, the tube furnace with control material processing environmental functional further includes third vacuum-ness detecting device,
It adapts to the outlet transition cabin.
Further, the tube furnace with control material processing environmental functional further includes third alarm, is connect in real time
Receive the detection signal of second vacuum-ness detecting device.
Further, the clean gas is inert protective gas
It is configured by using above-mentioned technical proposal, material after treatment is before carrying out formal encapsulation or surface is special
It cannot be in contact with air, moisture etc. when sign analysis, so that phenomena such as oxidation, corrosion occurs in its own is avoided from the root,
And then ensure its package quality and precision of analysis.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is the structural representation in the present invention with the first embodiment of the tube furnace of control material processing environmental functional
Figure.
Fig. 2 is the structural representation in the present invention with second of embodiment of tube furnace of control material processing environmental functional
Figure.
1- sealed compartment;2- tubular type furnace body;21- import baffles;The first vacuum evacuation device of 3-;The second vacuum means of 4-
It sets;5- clean gas feeding mechanism;The first vacuum-ness detecting device of 6-;The second vacuum-ness detecting device of 7-;The first alarm of 8-;
The second alarm of 9-;10- outlet transition cabin;101- exports baffles;11- third vacuum evacuation device;12- vent valve;13- third
Vacuum-ness detecting device;14- third alarm.
Specific embodiment
Combined with specific embodiments below, the contents of the present invention are described in further detail.
Material after tube furnace is handled, before carrying out formal encapsulation or when surface characterization can unavoidably with sky
Gas and water point is in contact, to influence its package quality and precision of analysis.To solve the above-mentioned problems, Fig. 1 shows
The structural schematic diagram of the first embodiment of the tube furnace of control material processing environmental functional is gone out in the present invention to have.The tubular type
Furnace is by tubular type furnace body 2, sealed compartment 1, the first vacuum evacuation device 3, the second vacuum evacuation device 4 and clean gas feeding mechanism 5
It is constituted etc. several parts, wherein the outlet of tubular type furnace body 2 is connected with the inner cavity of sealed compartment 1, and real by import baffles 21
Now with the connection or closing of 1 inner cavity of sealed compartment.Clean gas feeding mechanism 5, the first vacuum evacuation device 3 are interior with sealed compartment 1
Chamber is connected.Second vacuum evacuation device 4 is connected with the inner cavity of tubular type furnace body 2.To seal by the first vacuum evacuation device 3
The inner cavity in cabin 1 is in vacuum state, at the same time, by the second vacuum evacuation device 4 inner cavity of tubular type furnace body 2 is also at
Vacuum state, material after heat treatment are entered by tubular type furnace body 2 after the inner cavity of sealed compartment 1, close import baffles 21,
It then borrows clean gas feeding mechanism 5 and is filled with clean gas to sealed compartment 1.So, material is avoided from the root certainly
Phenomena such as oxidation, corrosion, occurs for body, and then ensures it with preferable package quality and precision of analysis.
The above-mentioned tube furnace with control material processing environmental functional can also configure moisture content detection device, oxygen detection dress
It sets and/or dust detection (not shown), the moisture, oxygen and dust content of its inner cavity is examined in real time
It surveys, provides reference to carry out the concrete operations of next step.
It should be noted that formally being encapsulated to material in the above-described embodiments or surface characterization must use
Automation equipment.It is of course also possible to use manual type is operated, need that sealing gloves are arranged on the side wall of sealed compartment 1
(similar to the gloves of glove box setting).Correspondingly, sealed compartment 1 is set as transparence, is preferably obtained by glass system.
As advanced optimizing for above-mentioned tube furnace, further include with the chamber pressure of sealed compartment 1 is measured first
Vacuum-ness detecting device 6 and the second vacuum-ness detecting device 7 measured with the chamber pressure of tubular type furnace body 2, thus
Convenient for controlling the vacuum degree variation of sealed compartment 1 and tubular type furnace body 2 in real time.Further, in order to remind staff
It carries out carrying out subsequent operation in time, is additionally provided with the first alarm 8, the second alarm 9, be respectively intended to receive the inspection of the first vacuum degree
Survey the detection signal of device 6, the second vacuum-ness detecting device 7.
Fig. 2 shows the structures of second of embodiment of tube furnace in the present invention with control material processing environmental functional
Schematic diagram is with the distinctive points of the first embodiment, be also additionally provided in second of embodiment outlet transition cabin 10 with
And matched third vacuum evacuation device 11, flow backward to be effectively prevented air when material removes into sealed compartment.Outlet
Transfer chamber 10 is set to the left side of sealed compartment 1 or has side, and the connection with sealed compartment 1 is realized by outlet baffles 101
Or it closes.The vent valve 12 being connected with its inner cavity is provided in outlet transition cabin 10.For the ease of in outlet transition cabin 10
Vacuum degree carry out real-time monitoring, be additionally provided with matched third vacuum-ness detecting device 13.
The specific operation process of the tube furnace is as follows: 1) first confiring that import baffles 21, outlet baffles 101 are in
Closed state;2) material is placed in tubular type furnace body 2, and evacuates the sky in tubular type furnace body 2 by the second vacuum evacuation device 4
Gas;3) vacuumize process is carried out to sealed compartment 1 by the first vacuum evacuation device 3;4) confirm the vacuum degree and tube furnace of sealed compartment 1
The vacuum degree of ontology 2 is consistent or difference it is little after, open import baffles 21, subsequent staff is using operating gloves by material
Material moves into sealed compartment 1, and closes import baffles 21;5) cleaning gas is injected into sealed compartment 1 by clean gas feeding mechanism 5
Body, inert gas etc., and the inner cavity of sealed compartment 1 is made to be in normal atmosphere pressure condition;6) material is packaged or surface characteristics
Analysis;7) encapsulation or surface characterization after, sealed compartment 1 is carried out again to vacuumize place by the first vacuum evacuation device 3
Reason carries out vacuumize process to outlet transition cabin 10 by third vacuum evacuation device 11, confirms the true of the two inner cavity at the same time
When reciprocal of duty cycle is consistent or difference is little, outlet baffles 101 are opened;8) material is removed out using operating gloves and is made a slip of the tongue by staff
Cabin 10 is crossed, outlet baffles 101 are then turned off;9) vent valve 12 for opening outlet transition cabin 101, that is, complete operation.
Similar to the first embodiment, tube furnace is also equipped with third alarm 14 in second of embodiment, is used to real
When receive third vacuum-ness detecting device 13 detection signal.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (8)
1. a kind of tube furnace with control material processing environmental functional, comprising: tubular type furnace body, which is characterized in that further include
Sealed compartment, the first vacuum evacuation device, the second vacuum evacuation device and clean gas feeding mechanism;The outlet of the tubular type furnace body
It is connected with the inner cavity of the sealed compartment, and realizes the connection or closing with the sealed compartment inner cavity by import baffles;Institute
It states clean gas feeding mechanism and first vacuum evacuation device is connected with the inner cavity of the sealed compartment;Described second takes out
Vacuum plant is connected with the inner cavity of the tubular type furnace body;Made in the sealed compartment by first vacuum evacuation device
Chamber is in vacuum state, at the same time, by second vacuum evacuation device inner cavity of the tubular type furnace body is also at
Vacuum state, material after heat treatment are entered by the tubular type furnace body after the inner cavity of the sealed compartment, close it is described into
Mouth baffles, then borrow the clean gas feeding mechanism to the sealed compartment and are filled with clean gas.
2. the tube furnace with control material processing environmental functional according to claim 1, which is characterized in that further include the
One vacuum-ness detecting device, the second vacuum-ness detecting device adapt to the sealed compartment, the tubular type furnace body respectively.
3. the tube furnace with control material processing environmental functional according to claim 2, which is characterized in that further include the
One alarm, the second alarm are respectively intended to the first vacuum-ness detecting device, the second vacuum-ness detecting device described in real-time reception
Detection signal.
4. the tube furnace with control material processing environmental functional according to claim 1, which is characterized in that further include water
Divide detection device, oxygen detection device and/or dust detection.
5. having the tube furnace of control material processing environmental functional described in any one of -4 according to claim 1, feature exists
In, further includes: outlet transition cabin, third vacuum evacuation device;The outlet transition cabin is set to the side of the sealed compartment, and logical
Cross connection or closing that outlet baffles realize it with the sealed compartment;The third vacuum evacuation device and the outlet transition cabin
It is connected;The outlet transition cabin is provided with the vent valve being connected with its inner cavity.
6. the tube furnace with control material processing environmental functional according to claim 5, which is characterized in that further include the
Three vacuum-ness detecting devices adapt to the outlet transition cabin.
7. the tube furnace with control material processing environmental functional according to claim 6, which is characterized in that further include the
Three alarms, the detection signal of third vacuum-ness detecting device described in real-time reception.
8. the tube furnace with control material processing environmental functional according to claim 5, which is characterized in that the cleaning
Gas is inert protective gas.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811596542.4A CN109458844A (en) | 2018-12-25 | 2018-12-25 | A kind of tube furnace with control material processing environmental functional |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811596542.4A CN109458844A (en) | 2018-12-25 | 2018-12-25 | A kind of tube furnace with control material processing environmental functional |
Publications (1)
Publication Number | Publication Date |
---|---|
CN109458844A true CN109458844A (en) | 2019-03-12 |
Family
ID=65614785
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811596542.4A Pending CN109458844A (en) | 2018-12-25 | 2018-12-25 | A kind of tube furnace with control material processing environmental functional |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109458844A (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104400796A (en) * | 2014-10-14 | 2015-03-11 | 长沙米淇仪器设备有限公司 | All-transparent vacuum glove box and application method thereof |
CN105293474A (en) * | 2014-08-01 | 2016-02-03 | 常州二维碳素科技股份有限公司 | Equipment for quickly preparing graphene and preparation method of graphene |
CN105716931A (en) * | 2016-02-16 | 2016-06-29 | 兰州空间技术物理研究所 | Unsealing method of extraterrestrial celestial sample collection sealed container |
CN207845780U (en) * | 2018-01-06 | 2018-09-11 | 山东广迪教育装备有限公司 | A kind of continuous preparation system of functional nano-composites |
-
2018
- 2018-12-25 CN CN201811596542.4A patent/CN109458844A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105293474A (en) * | 2014-08-01 | 2016-02-03 | 常州二维碳素科技股份有限公司 | Equipment for quickly preparing graphene and preparation method of graphene |
CN104400796A (en) * | 2014-10-14 | 2015-03-11 | 长沙米淇仪器设备有限公司 | All-transparent vacuum glove box and application method thereof |
CN105716931A (en) * | 2016-02-16 | 2016-06-29 | 兰州空间技术物理研究所 | Unsealing method of extraterrestrial celestial sample collection sealed container |
CN207845780U (en) * | 2018-01-06 | 2018-09-11 | 山东广迪教育装备有限公司 | A kind of continuous preparation system of functional nano-composites |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN207243451U (en) | A kind of medicine-filling device | |
CN201900652U (en) | Vacuum glove box | |
CN201348579Y (en) | Sulfur hexafluoride sample collection device | |
CN204278043U (en) | Aseptic processing isolator | |
CN207741899U (en) | A kind of vacuum leak detector | |
CN209630662U (en) | A kind of apophorometer with control material processing environmental functional | |
CN203494225U (en) | Vacuum defoaming machine | |
CN109458844A (en) | A kind of tube furnace with control material processing environmental functional | |
CN209257009U (en) | A kind of bio-safety isolator | |
CN109499090A (en) | A kind of apophorometer with control material processing environmental functional | |
CN206523358U (en) | A kind of extraction element of free water tritium | |
CN207851267U (en) | A kind of density monitor on-line testing device | |
CN207866583U (en) | A kind of sample automatic acquisition device | |
CN214566975U (en) | Lithium cell production material bin | |
CN205240072U (en) | Capper seals quality and tests water drum fast | |
CN102491247B (en) | Pneumatic liquid material conveying device | |
CN109465139A (en) | A kind of coating equipment that coating atmosphere is controllable | |
CN113866117A (en) | CO for industrial production exhaust gas2On-line monitoring device and using method thereof | |
CN209707223U (en) | A kind of full-automatic heat desorption instrument | |
CN208810103U (en) | A kind of use for laboratory drexel bottle | |
CN201999313U (en) | Unidirectional exhausting and pressure reduction plastic bottle inner cover | |
CN208838646U (en) | A kind of online bactericidal unit for isolator | |
CN207076361U (en) | A kind of multiplex pulse formula chemicals dosing plant | |
CN106841524B (en) | A kind of intelligence toxic gas detector experimental rig and method | |
CN208064162U (en) | A kind of isolator transmission cylinder |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information |
Address after: No. 58, Tingtao Road, Suzhou Industrial Park, Jiangsu 215000 Applicant after: Weige Technology (Suzhou) Co.,Ltd. Address before: 215000 No.18 Pingsheng Road, Suzhou Industrial Park, Jiangsu Province Applicant before: VIGOR GAS PURIFICATION TECHNOLIGIES, Inc. |
|
CB02 | Change of applicant information | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190312 |
|
RJ01 | Rejection of invention patent application after publication |