CN109445001B

CN109445001B - Method for generating micro-nano lenses in batches

Info

Publication number: CN109445001B
Application number: CN201811181990.8A
Authority: CN
Inventors: 王玉亮; 曾炳霖
Original assignee: Beihang University
Current assignee: Beihang University
Priority date: 2018-10-10
Filing date: 2018-10-10
Publication date: 2020-05-26
Anticipated expiration: 2038-10-10
Also published as: CN109445001A

Abstract

The invention relates to a micro-nano device preparation technology, in particular to a technical method and a technical process for preparing micro-nano lenses in batch by dissolving polymer films by micro-nano liquid drops, wherein the specific preparation method comprises the following steps: firstly, spin-coating a layer of Polystyrene (PS) film on a substrate; immersing the PS film in a toluene-ethanol mixed solution, then dropping a drop of deionized water in the mixed solution, at the moment, separating out toluene and dissolving the PS film, and generating a large number of toluene-PS mixed drops, then automatically dissolving the toluene in the toluene-PS mixed drops into the solution, and obtaining a large number of micro-nano lenses made of PS materials on a substrate. The preparation method is simple in preparation process, and the controllability on the size, the density and the shape of the micro-nano lens is good.

Description

Method for generating micro-nano lenses in batches

Technical Field

The invention relates to the field of micro-nano device preparation, in particular to a technical method and a technical process for preparing micro-nano lenses in batch by dissolving polymer films by micro-nano liquid drops.

Background

The micro-nano lens is a lens with the size of nanometer or micron level, and different from a common optical lens, the micro-nano lens has special optical characteristics due to the tiny size. The micro-nano lens has wide application prospect in the fields of surface reflection prevention, bionic lenses, high-capacity optical storage, precise photoetching and surface Raman enhancement by virtue of special optical performance and a tiny segment shape. In recent years, researchers prove that the micro-nano lens can overcome the optical diffraction limit and improve the resolution of microscopic optical imaging, which has very important significance to the field of biological imaging.

The preparation of micro-nano lenses is a hot problem for research in the last two decades. At present, various methods are used for preparing micro-nano lenses, and the method can be divided into a single lens preparation method and a batch lens preparation method according to the difference of the number of prepared lenses. The preparation method of the single micro-nano lens comprises a crystal growth method, a microsphere thermal shaping method, a suspended particle polymerization method and the like, wherein the crystal growth method can be used for generating the suspended micro-nano lens, but the size and the shape of the lens are difficult to control. The micro-nano lens is directly prepared on the substrate by a microsphere thermoplastic method and a suspended particle polymerization method, the size and the shape of the lens can be well controlled, and the prepared lens has good optical properties. The efficiency of single lens production is low and methods for mass production of lenses have been developed in recent years, such as thin film wet removal, dip-pen, surface drape, laser expansion and droplet photocuring. The three methods can prepare the micro-nano lenses in batches, but the prepared micro-nano lenses are not regular spherical segment shapes, and have certain influence on the optical performance of the micro-nano lenses. The film dewetting method is to utilize heating or special solvent to induce the instability of a high polymer film so as to enable the film to dewet by itself to generate a micro-nano lens, the micro-nano lens prepared by the method has a regular spherical segment shape, but the density of the lens cannot be accurately controlled at present. In addition, the organic liquid drops are generated on the surface of the substrate in a solution replacement or Wuzuo effect mode, and then the organic liquid drops are solidified into the micro-nano lens in a photocuring mode.

In a word, the micro-nano lens preparation method has room for improvement in shape control and density control of the lens, and most methods are complex in process, require special equipment and are not beneficial to popularization and use.

Disclosure of Invention

The invention aims to provide a method for preparing micro-nano lenses in batch, which is simple, can be prepared in one step and does not need any precise equipment, aiming at the defects of the existing preparation method.

To achieve the above object, the present invention comprises: the method for preparing the micro-nano lenses in batches is provided, and comprises the steps of firstly, spin-coating a polystyrene film (2) on a substrate (1); immersing the polystyrene film (2) in a toluene-ethanol mixed solution (3), then dropping a drop of deionized water drop (4) in the mixed solution, at the moment, separating out toluene and dissolving the polystyrene film (2) to generate a large number of toluene-polystyrene mixed drops (5), then automatically dissolving the toluene in the toluene-polystyrene mixed drops (5) into the solution, and obtaining a large number of micro-nano lenses (6) made of polystyrene materials on the substrate (1).

Furthermore, the size and the density of the micro-nano lens (6) are jointly regulated and controlled by changing the thickness of the polystyrene film (2) and the concentration of toluene.

Drawings

FIG. 1 is a schematic view of a lens manufacturing process of the present invention;

FIG. 2 is an optical image of a micro-nano lens sample prepared by the invention;

Detailed Description

For the purpose of making the objects, aspects and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings.

The method for dissolving the polymer film based on the liquid drops realizes simple and rapid batch preparation of the micro-nano lens, the whole preparation process is shown in figure 1, and the preparation process comprises the following steps:

step 1: as shown in fig. 1(a), taking a substrate (1), spin-coating a polystyrene film (2) on the substrate (1), wherein the substrate (1) can be transparent glass or opaque silicon wafer;

step 2: immersing the substrate (1) coated with the polystyrene film (2) into a toluene-ethanol mixed solution (3) as shown in fig. 1 (b);

and step 3: as shown in fig. 1(b, c), a drop of deionized water (4) is dropped into the toluene-ethanol mixed solution (3), at this time, due to the addition of the deionized water (4), an "wuzou effect" is caused, that is, a toluene droplet with a size in the micro-nanometer level is generated, a part of the toluene droplet falls onto the surface of the polystyrene film (2) and dissolves the polystyrene film (2), and a mixed droplet (5) containing toluene and polystyrene is generated; as shown in fig. 1(d), after the ethanol in the mixed solution (3) and the newly added water are uniformly mixed, the toluene in the toluene-polystyrene mixed liquid drop (5) is dissolved into the mixed solution again, and finally the micro-nano lens (6) made of polystyrene material is left on the surface of the substrate (1).

And 4, step 4: and (e) taking the micro-nano lens (6) together with the substrate (1) out of the mixed solution, cleaning, and drying at 40 ℃ to obtain the formed micro-nano lens (6).

The above embodiments are only for illustrating the invention and are not to be construed as limiting the invention, and those skilled in the art can make various modifications and variations to the invention without departing from the spirit and scope of the invention, so that all equivalent technical solutions also fall into the scope of the invention, and the scope of the invention should be determined by the claims.

Claims

1. A method for preparing micro-nano lenses in batches is characterized in that a layer of polystyrene film (2) is coated on a substrate (1) in a spinning mode; immersing the polystyrene film (2) in a toluene-ethanol mixed solution (3), then dropping a drop of deionized water drop (4) in the mixed solution, at the moment, separating out toluene and dissolving the polystyrene film (2) to generate a large number of toluene-polystyrene mixed drops (5), then automatically dissolving the toluene in the toluene-polystyrene mixed drops (5) into the solution, and obtaining a large number of micro-nano lenses (6) made of polystyrene materials on the substrate (1).

2. The method for batch preparation of micro-nano lenses according to claim 1, wherein the size and density of the micro-nano lenses (6) are jointly controlled by changing the thickness of the polystyrene film (2) and the concentration of toluene.