CN109437870A - A kind of modified low-temperature co-burning ceramic material and preparation method thereof - Google Patents
A kind of modified low-temperature co-burning ceramic material and preparation method thereof Download PDFInfo
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Abstract
The present invention provides a kind of modified low-temperature co-burning ceramic material and preparation method thereof, the low-temperature co-burning ceramic material contains principal component ceramic material and promoter material, wherein, principal component ceramic material contains in terms of oxide weight part, 48~75 parts of Si, 10~20 parts of B and 25~20 part of Al, relative to the principal component ceramic material of 100 parts by weight, the promoter material contain 0.1~10 parts by weight selected from TiO2And ZrO2At least one and 1~10 parts by weight Si3N4。
Description
Technical field
The present invention relates to ceramic material field, in particular to a kind of modified low-temperature co-burning ceramic material and preparation method thereof.
Background technique
Low-temperature co-fired ceramics (Low-temperaturecofiredceramics, LTCC) technology, being exactly will be low temperature co-fired
The accurate and fine and close green band of thickness is made in ceramic powder, and as circuit base material, laser boring, micro- is utilized on green band
The techniques such as hole slip casting, accurate conductor paste printing produce required circuitous pattern, and wherein by the embedment of multiple passive elements, so
After overlap together, in 900 DEG C of cofiring, the passive integration component of three-dimensional circuit network is made, may be made as built-in passive element
Three-dimensional circuit substrate, IC and active device can be mounted on its surface, passive/active integrated functional module is made.
The exploitation of domestic LTCC product at least falls behind 5 years than developed countries.This is mainly due to electronic terminal products
Caused by lagging in development.LTCC functional unit and module are mainly used for CSM, CDMA and PHS mobile phone, wireless phone, WLAN and indigo plant
The communication products such as tooth, in addition to more than 40 million wireless phone, this few class product just grows up for nearly 4 years at home.Shen Zhennan
Glass Electronics Co., Ltd. has introduced current equipment state-of-the-art in the world, has built up domestic 1st article of LTCC production line, has had developed
A variety of LTCC products and own operation, such as: chip LC filter series, chip Bluetooth antenna, chip directional coupler, chip are flat
Weighing apparatus-imbalance converter, low-pass filter array etc., oneself reaches same kind of products at abroad level to performance, and oneself enters market.Mesh
Before, southern glass electronics is developing the multiple functions module of LTCC multilager base plate and wireless transmission.
Currently, the units such as material system, Tsinghua University, Shanghai silicate research institute are just in development in laboratory LTCC ceramic powder
Material, but not yet arrive the degree of batch production.It is domestic to be badly in need of LTCC use developing seriation, having independent intellectual property right now
Ceramic powder, and Virtual production LTCC ceramic green tape series, lay the foundation for the exploitation of LTCC industry.
As low-temperature co-burning ceramic material, usually by B2O3-SiO2It is that glass material is mixed into Al2O3In equal ceramic materials
The compound system of glass ceramics.But since starting material must use glass, and containing the boron element volatile in firing, therefore
The composition of obtained substrate exists uneven, and that there are bending strengths is poor, not enough etc. with the bond strength of substrate external conductor film
Disadvantage.
Summary of the invention
For the defect for overcoming the aforementioned prior art, the present invention provides a kind of composition uniformly, and bending strength is high and electrically conductive film
The high modification low-temperature co-burning ceramic material of conjugation, principal component ceramic material contain in terms of oxide weight part, 48~75 parts
Si, 10~20 parts of B and 25~20 part of Al, relative to the principal component ceramic material of 100 parts by weight, promoter material contains 0.1
~10 parts by weight are selected from TiO2And ZrO2At least one and 1~10 parts by weight silicon nitride.
Ceramic material of the invention, by the way that TiO is added2And ZrO2At least one, although detailed mechanism is not very clear
Chu, but it is believed that accessory ingredient ceramic material TiO2And ZrO2Can increase the ceramic layer formed by low-temperature sintered ceramics material and by
The reactivity between external conductor film that the low melting point metal materials such as copper are formed, is total to firing process by it, sintered body can be improved
With the bond strength of electrically conductive film, that is, the bond strength between ceramic layer and external conductor film.
Silicon nitride (Si3N4) ceramic material all has good mechanical property under high temperature and room temperature, while also having good
Thermal stability, be a kind of one of superhigh temperature ceramics with broad prospect of application.The excellent performances such as antifatigue and anti-thermal shock
Ceramic material, suitable for the operating condition of the bad environments such as high temperature, friction, heavy duty, can be used for manufacturing aerospace component, bearing,
High speed cutting tool etc..
Ceramic material of the invention, using silicon nitride as auxiliary agent, the biggish bending strength for improving ceramics, from aftermentioned
Experimental example it can be appreciated that obtained ceramic substrate have 288MPa or more bending strength.And it is possible to improve gained pottery
Porcelain substrate can also improve the chemical-resistant of substrate to the tolerance of the environmental conditions such as high temperature, high humidity, can inhibit base whereby
The dissolution of plate ingredient in the plating solution.In addition, though detailed mechanism is not very clear, but the addition of silicon nitride overcomes sintering
Not fine and close enough the defect of ceramics.
Ceramic material of the invention also contains 0.1~5 weight relative to the principal component ceramic material of 100 parts by weight
The CuO of part.If the crystallization of low-temperature sintered ceramics material when being burnt into is promoted containing CuO.As a result, can be with
The volume for the liquid phase part for causing substrate strength to decline is reduced, and the bending strength for the ceramic substrate that can make is further
It is promoted.
As auxiliary agent, relative to 100 parts by weight the principal component ceramic material can also containing be converted into respectively CoO,
V2O5For the Co and/or V of 0.1~5.0 parts by weight.These ingredients can further improve the bending strength of ceramic substrate, together
When also play dyestuff.As previously mentioned, low-temperature sintered ceramics material of the invention as starting material do not contain glass, but
The glass as noncrystalline ingredient can be generated in firing circulation, so containing glass in the ceramic substrate after firing.Thus, no
The glass using high price is needed, low-temperature sintered ceramics material can also be steadily made.
Ceramic material of the invention does not contain Li preferably2O or Na2The alkali metal oxides such as O.Because of these alkali metal oxygen
Compound is easy to volatilize, becomes the non-uniform reason of composition for causing gained substrate in firing.In addition, if not containing these
The tolerance to environmental conditions such as high temperature, high humiditys then can be improved in alkali metal oxide, can also improve inhibition to the molten of plating solution
Such chemical-resistant out.
As previously mentioned, low-temperature sintered ceramics material of the invention does not contain glass as starting material, but recycles in firing
The middle glass that can be generated as noncrystalline ingredient, so containing glass in ceramic substrate after firing.Accordingly, it is not necessary to use
The glass of high price can also steadily make low-temperature sintered ceramics material.
Modification low-temperature co-burning ceramic material preparation process of the invention the following steps are included:
Step 1), example by silica, boron oxide, aluminium oxide and is selected from zinc oxide or titanium dioxide at least according to a certain mass ratio
A kind of raw material uses 1~2h of ultrasonic disperse, obtains mixed raw material A through wet mixed in mixed process；
Step 2, by above-mentioned mixed raw material A it is spray-dried after at 800~900 DEG C roast 1~3 hour, obtain raw material powder
Last B；
Step 3) adds a certain amount of silicon nitride and suitable organic bond, dispersing agent and increasing in above-mentioned raw materials powder B
Agent is moulded, ceramic slurry is made after ultrasonic disperse；
Step 4), is packed into mold for the ceramic slurry after dry mixed, and the moulding in a manner of hot pressing obtains ceramic green sheet C；
Above-mentioned ceramic green sheet C is put into the furnace chamber of microwave agglomerating furnace and is sintered 1~10 hour by step 5), sintering temperature 700
DEG C~800 DEG C, after sintering, natural cooling obtains the ceramic material of plate；
The dispensing ratio for controlling each middle raw material during the preparation process, makes resulting ceramic material have following characteristics: with oxide
Parts by weight meter, 48~75 parts of Si, 10~20 parts of B and 25~20 part of Al；Principal component ceramics relative to 100 parts by weight
Material is selected from TiO containing 0.1~10 parts by weight2And ZrO2At least one and 1~10 parts by weight silicon nitride.
It is additionally added magnesia in step 1), is made in ceramic material by controlling additional amount, relative to 100 parts by weight
Principal component ceramic material contains the CuO of 0.1~5 parts by weight.
CoO, V are additionally added in step 3)2O5At least one, by control additional amount make in ceramic material, relative to
The principal component ceramic material of 100 parts by weight contains CoO, V of 0.1~6 parts by weight2O5At least one.
The binders such as the organic binder, including but not limited to polyvinyl butyral, the plasticizer are selected from neighbour
The plasticizer such as phthalic acid di-n-butyl ester, the dispersing agent are waterglass etc..
The present invention uses microwave sintering preparation process, during heating, material internal temperature gradient very little, thermal stress
Very little, even if will not generally cause the cracking of material in very high heating rate.And with traditional solid-phase sintering
It compares, the volatilization for greatly reducing boron element, which impacts ceramic material uniformity, improves product quality, shortens sintering
Time and the microstructure that can control material, improve material properties.
Compare with the existing technology, what the present invention had has the technical effect that
(1) low-temperature co-sintered ceramics of the invention, by the way that TiO is added2And ZrO2At least one, increase and made pottery by low-temperature sintering
Reactivity between ceramic layer that ceramic material is formed and the external conductor film formed by low melting point metal materials such as copper.
(2) low-temperature co-sintered ceramics of the invention, by the way that the addition of silicon nitride, the biggish bending for improving ceramics is added
Intensity, the bending strength with 280MPa or more；The boron in the sintering process of low-temperature sintered ceramics material can additionally be reduced
The volatilization of element, there are non-uniform defects for the composition of the substrate overcome.
(3) present invention uses microwave sintering preparation process, substantially reduces sintering time compared with traditional solid-phase sintering,
The volatilization for greatly reducing boron element, which impacts ceramic material uniformity, improves product quality, shorten sintering time,
And can control the microstructure of material, improve material properties.
Specific embodiment
The following is a clear and complete description of the technical scheme in the embodiments of the invention, it is clear that described embodiment
Only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, the common skill in this field
Art personnel every other embodiment obtained without making creative work belongs to the model that the present invention protects
It encloses.
[embodiment 1]
Example silica, boron oxide, aluminium oxide, titanium dioxide raw material cross 40 meshes according to a certain mass ratio, then through wet mixed,
Use ultrasonic disperse 2h in mixed process, obtain mixed raw material A, by mixed raw material A it is spray-dried after at 760 DEG C roast 3
A hour obtains raw material powder B.Then a certain amount of silicon nitride and suitable polyvinyl contracting fourth are added in raw material powder B
Aldehyde, n-butyl phthalate and waterglass, are made ceramic slurry after ultrasonic disperse, by the ceramic slurry after dry mixed
Material is packed into mold, and the moulding in a manner of hot pressing obtains ceramic green sheet C, and ceramic green sheet C is put into the furnace chamber of microwave agglomerating furnace
It is sintered 5 hours, 760 DEG C of sintering temperature, natural cooling obtains the ceramic material of plate, controls in each during the preparation process
The dispensing ratio of raw material, makes resulting ceramic material have following characteristics: in terms of oxide weight part, 70 parts of Si, 10 parts of B
With 35 parts of Al, relative to the principal component ceramic material of 100 parts by weight, the TiO containing 8 parts by weight2And 5 parts by weight nitridation
Silicon.Then, for obtained ceramic material, bending strength is measured by 3 bending strength tests, and comment agglutinating property
Valence.Herein, agglutinating property is that the expression of "○" smoothly completes sintering；Agglutinating property is that the expression of "×" does not have under the described conditions
To fine and close sintered body, or indicate oversintering state, the results are shown in Table 1.
[embodiment 2]
Example silica, boron oxide, aluminium oxide, titanium dioxide, oxidation copper raw material cross 40 meshes according to a certain mass ratio, then through wet
Formula mixing, ultrasonic disperse 2h is used in mixed process, obtains mixed raw material A, by mixed raw material A it is spray-dried after at 760 DEG C
3 hours of lower roasting obtain raw material powder B.Then a certain amount of silicon nitride and suitable polyethylene are added in raw material powder B
Base butyral, n-butyl phthalate and waterglass, are made ceramic slurry after ultrasonic disperse, after dry mixed
Ceramic slurry is packed into mold, and the moulding in a manner of hot pressing obtains ceramic green sheet C, and ceramic green sheet C is put into microwave agglomerating furnace
It is sintered in furnace chamber 5 hours, 760 DEG C of sintering temperature, natural cooling obtains the ceramic material of plate, controls during the preparation process
The dispensing ratio for making each middle raw material, makes resulting ceramic material have following characteristics: in terms of oxide weight part, 70 parts of Si,
10 parts of B and 35 part of Al, relative to the principal component ceramic material of 100 parts by weight, the CuO containing 5 parts by weight, 8 parts by weight
TiO2And 5 parts by weight silicon nitride.Then, strong by 3 bending strength test measurement bendings for obtained ceramic material
Degree, and agglutinating property is evaluated.Herein, agglutinating property is that the expression of "○" smoothly completes sintering；Agglutinating property is "×"
It indicates not obtaining fine and close sintered body under the described conditions, or indicates oversintering state, the results are shown in Table 1.
[embodiment 3]
Example silica, boron oxide, aluminium oxide, zirconium dioxide raw material cross 40 meshes according to a certain mass ratio, then through wet mixed,
Use ultrasonic disperse 2h in mixed process, obtain mixed raw material A, by mixed raw material A it is spray-dried after at 760 DEG C roast 3
A hour obtains raw material powder B.Then a certain amount of silicon nitride and suitable polyvinyl contracting fourth are added in raw material powder B
Aldehyde, n-butyl phthalate and waterglass, are made ceramic slurry after ultrasonic disperse, by the ceramic slurry after dry mixed
Material is packed into mold, and the moulding in a manner of hot pressing obtains ceramic green sheet C, and ceramic green sheet C is put into the furnace chamber of microwave agglomerating furnace
It is sintered 5 hours, 760 DEG C of sintering temperature, natural cooling obtains the ceramic material of plate, controls in each during the preparation process
The dispensing ratio of raw material, makes resulting ceramic material have following characteristics: in terms of oxide weight part, 70 parts of Si, 10 parts of B
With 35 parts of Al, relative to the principal component ceramic material of 100 parts by weight, the ZrO containing 8 parts by weight2And 5 parts by weight nitridation
Silicon.Then, for obtained ceramic material, bending strength is measured by 3 bending strength tests, and comment agglutinating property
Valence.Herein, agglutinating property is that the expression of "○" smoothly completes sintering；Agglutinating property is that the expression of "×" does not have under the described conditions
To fine and close sintered body, or indicate oversintering state, the results are shown in Table 1.
[embodiment 4]
Example silica, boron oxide, aluminium oxide, titanium dioxide raw material cross 40 meshes according to a certain mass ratio, then through wet mixed,
Use ultrasonic disperse 2h in mixed process, obtain mixed raw material A, by mixed raw material A it is spray-dried after at 760 DEG C roast 3
A hour obtains raw material powder B.Then a certain amount of cobalt oxide and silicon nitride and suitable polyethylene are added in raw material powder B
Base butyral, n-butyl phthalate and waterglass, are made ceramic slurry after ultrasonic disperse, after dry mixed
Ceramic slurry is packed into mold, and the moulding in a manner of hot pressing obtains ceramic green sheet C, and ceramic green sheet C is put into microwave agglomerating furnace
It is sintered in furnace chamber 5 hours, 760 DEG C of sintering temperature, natural cooling obtains the ceramic material of plate, controls during the preparation process
The dispensing ratio for making each middle raw material, makes resulting ceramic material have following characteristics: in terms of oxide weight part, 70 parts of Si,
10 parts of B and 35 part of Al, relative to the principal component ceramic material of 100 parts by weight, the CoO containing 0.8 parts by weight, 8 parts by weight
TiO2And 5 parts by weight silicon nitride.Then, for obtained ceramic material, pass through 3 bending strength test measurement bendings
Intensity, and agglutinating property is evaluated.Herein, agglutinating property is that the expression of "○" smoothly completes sintering；Agglutinating property is "×"
Expression do not obtain fine and close sintered body under the described conditions, or indicate oversintering state, the results are shown in Table 1.
[embodiment 5]
Example silica, boron oxide, aluminium oxide, titanium dioxide raw material cross 40 meshes according to a certain mass ratio, then through wet mixed,
Use ultrasonic disperse 2h in mixed process, obtain mixed raw material A, by mixed raw material A it is spray-dried after at 760 DEG C roast 3
A hour obtains raw material powder B.Then a certain amount of vanadic anhydride and silicon nitride and suitable poly- are added in raw material powder B
Polyvinyl butyral, n-butyl phthalate and waterglass, are made ceramic slurry after ultrasonic disperse, by dry mixed
Ceramic slurry afterwards is packed into mold, and the moulding in a manner of hot pressing obtains ceramic green sheet C, and ceramic green sheet C is put into microwave sintering
It is sintered in the furnace chamber of furnace 5 hours, 760 DEG C of sintering temperature, natural cooling obtains the ceramic material of plate, in preparation process
The dispensing ratio of middle each middle raw material of control, makes resulting ceramic material have following characteristics: in terms of oxide weight part, 70 parts
Si, 10 parts of B and 35 part of Al, relative to the principal component ceramic material of 100 parts by weight, the ZrO containing 1.2 parts by weight2, 3 weights
Measure the V of part2O5And 2 parts by weight silicon nitride.Then, it for obtained ceramic material, is measured by 3 bending strength tests
Bending strength, and agglutinating property is evaluated.Herein, agglutinating property is that the expression of "○" smoothly completes sintering；Agglutinating property is
The expression of "×" does not obtain fine and close sintered body under the described conditions, or indicates oversintering state, as a result such as 1 institute of table
Show.
[embodiment 6]
Example silica, boron oxide, aluminium oxide, titanium dioxide, oxidation copper raw material cross 40 meshes according to a certain mass ratio, then through wet
Formula mixing, ultrasonic disperse 2h is used in mixed process, obtains mixed raw material A, by mixed raw material A it is spray-dried after at 760 DEG C
3 hours of lower roasting obtain raw material powder B.Then added in raw material powder B a certain amount of vanadic anhydride and silicon nitride and
Ceramic slurry is made in suitable polyvinyl butyral, n-butyl phthalate and waterglass after ultrasonic disperse, will
Ceramic slurry after dry mixed is packed into mold, and the moulding in a manner of hot pressing obtains ceramic green sheet C, and ceramic green sheet C is put into
It being sintered in the furnace chamber of microwave agglomerating furnace 5 hours, 760 DEG C of sintering temperature, natural cooling obtains the ceramic material of plate,
The dispensing ratio that each middle raw material is controlled in preparation process, makes resulting ceramic material have following characteristics: with oxide weight part
Meter, 70 parts of Si, 10 parts of B and 35 part of Al contain 3 parts by weight relative to the principal component ceramic material of 100 parts by weight
V2O5, the CuO of 7 parts by weight, the ZrO of 3 parts by weight2And 2 parts by weight silicon nitride.Then, for obtained ceramic material, lead to
3 bending strength test measurement bending strengths are crossed, and agglutinating property is evaluated.Herein, agglutinating property is the expression of "○"
Smoothly complete sintering；Agglutinating property is that the expression of "×" does not obtain fine and close sintered body under the described conditions, or indicates
Sintering state, the results are shown in Table 1.
[comparative example 1]
40 meshes are crossed by example silica, boron oxide, aluminium oxide, titanium dioxide raw material according to a certain mass ratio, it is then mixed through wet type
Close, ultrasonic disperse 2h used in mixed process, obtains mixed raw material A, by mixed raw material A it is spray-dried after roast at 760 DEG C
Burning 3 hours obtains raw material powder B.Then suitable polyvinyl butyral, phthalic acid two are added in raw material powder B
N-butyl and waterglass, are made ceramic slurry after ultrasonic disperse, and the ceramic slurry after dry mixed is packed into mold, with
The mode moulding of hot pressing, obtains ceramic green sheet C, and ceramic green sheet C is put into the furnace chamber of microwave agglomerating furnace and is sintered 5 hours,
760 DEG C of sintering temperature, natural cooling obtains the ceramic material of plate, controls the dispensing ratio of each middle raw material during the preparation process,
Resulting ceramic material is set to have following characteristics: in terms of oxide weight part, 70 parts of Si, 10 parts of B and 35 part of Al, relatively
In the principal component ceramic material of 100 parts by weight, the TiO containing 8 parts by weight2.Then, for obtained ceramic material, pass through at 3 points
Bending strength test measures bending strength, and evaluates agglutinating property.Herein, agglutinating property is that the expression of "○" is smoothly complete
At sintering；Agglutinating property is that the expression of "×" does not obtain fine and close sintered body under the described conditions, or indicates oversintering shape
State, the results are shown in Table 1.
[comparative example 2]
Example silica, boron oxide, aluminium oxide, titanium dioxide raw material cross 40 meshes according to a certain mass ratio, then through wet mixed,
Use ultrasonic disperse 2h in mixed process, obtain mixed raw material A, by mixed raw material A it is spray-dried after at 760 DEG C roast 3
A hour obtains raw material powder B.Then a certain amount of cobalt oxide and suitable polyvinyl contracting fourth are added in raw material powder B
Aldehyde, n-butyl phthalate and waterglass, are made ceramic slurry after ultrasonic disperse, by the ceramic slurry after dry mixed
Material is packed into mold, and the moulding in a manner of hot pressing obtains ceramic green sheet C, and ceramic green sheet C is put into the furnace chamber of microwave agglomerating furnace
It is sintered 5 hours, 760 DEG C of sintering temperature, natural cooling obtains the ceramic material of plate, controls in each during the preparation process
The dispensing ratio of raw material, makes resulting ceramic material have following characteristics: in terms of oxide weight part, 70 parts of Si, 10 parts of B
Contain 0.8 parts by weight CoO relative to the principal component ceramic material of 100 parts by weight with 35 parts of Al.Then, the pottery for obtaining
Ceramic material measures bending strength by 3 bending strength tests, and evaluates agglutinating property.Herein, agglutinating property is
The expression of "○" smoothly completes sintering；Agglutinating property is the sintered body that the expression of "×" does not obtain densification under the described conditions, or
Person is to indicate oversintering state, and the results are shown in Table 1.
Table 1
| Agglutinating property | Bending strength | |
| Embodiment 1 | ○ | 288Mpa |
| Embodiment 2 | ○ | 296Mpa |
| Embodiment 3 | ○ | 293Mpa |
| Embodiment 4 | ○ | 303Mpa |
| Embodiment 5 | ○ | 298Mpa |
| Embodiment 6 | ○ | 306Mpa |
| Comparative example 1 | × | 210Mpa |
| Comparative example 2 | × | 216Mpa |
Above description sufficiently discloses a specific embodiment of the invention.It should be pointed out that being familiar with the technology in the field
Range of any change that personnel do a specific embodiment of the invention all without departing from claims of the present invention.Accordingly
Ground, the scope of the claims of the invention are also not limited only to previous embodiment.
Claims (7)
1. a kind of modified low-temperature co-burning ceramic material, which is characterized in that containing principal component ceramic material and promoter material, the master
Ingredient ceramic material contains in terms of oxide weight part, 48~75 parts of Si, 10~20 parts of B and 25~20 part of Al,
Relative to the principal component ceramic material of 100 parts by weight, the promoter material contain 0.1~10 parts by weight selected from TiO2With
ZrO2At least one and 1~10 parts by weight Si3N4。
2. modified low-temperature co-burning ceramic material as described in claim 1, which is characterized in that relative to described in 100 parts by weight
Principal component ceramic material, CuO of the promoter material also containing 0.1~5 parts by weight.
3. modified low-temperature co-burning ceramic material as claimed in claim 1 or 2, which is characterized in that the institute relative to 100 parts by weight
State principal component ceramic material, CoO, V that the promoter material also contains2O5At least one.
4. modified low-temperature co-burning ceramic material as claimed in claim 1 or 2, which is characterized in that the ceramic material is free of alkali
Metallic element.
5. a kind of manufacturing method of modified low-temperature co-burning ceramic material, it is characterised in that comprise the steps of:
Step 1), example by silica, boron oxide, aluminium oxide and is selected from zinc oxide or titanium dioxide at least according to a certain mass ratio
A kind of raw material uses ultrasonic disperse 1-2h, obtains mixed raw material A through wet mixed in mixed process；
Step 2, by above-mentioned mixed raw material A it is spray-dried after at 800~900 DEG C roast 1~3 hour, obtain raw material powder
Last B；
Step 3) adds a certain amount of silicon nitride and suitable organic bond, dispersing agent and increasing in above-mentioned raw materials powder B
Agent is moulded, ceramic slurry is made after ultrasonic disperse；
Step 4), is packed into mold for the ceramic slurry after dry mixed, and the moulding in a manner of hot pressing obtains ceramic green sheet C；
Above-mentioned ceramic green sheet C is put into the furnace chamber of microwave agglomerating furnace and is sintered 1~10 hour by step 5), sintering temperature 700
DEG C~800 DEG C, after sintering, natural cooling obtains the ceramic material of plate；
The dispensing ratio for controlling each middle raw material during the preparation process, makes resulting ceramic material have following characteristics: with oxide
Parts by weight meter, 48~75 parts of Si, 10~20 parts of B and 25~20 part of Al.
6. the manufacturing method of modified low-temperature co-burning ceramic material as claimed in claim 5, which is characterized in that in step 1) also
Magnesia is added, is made in ceramic material by controlling additional amount, the principal component ceramic material relative to 100 parts by weight contains
The CuO of 0.1~5 parts by weight.
7. the manufacturing method of modified low-temperature co-burning ceramic material as claimed in claim 5, which is characterized in that in step 3) also
CoO, V is added2O5At least one, by control additional amount make in ceramic material, relative to 100 parts by weight principal component make pottery
Ceramic material contains CoO, V of 0.1~6 parts by weight2O5At least one.
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