CN109432828A - A kind of gas-liquid separation device - Google Patents
A kind of gas-liquid separation device Download PDFInfo
- Publication number
- CN109432828A CN109432828A CN201811534209.0A CN201811534209A CN109432828A CN 109432828 A CN109432828 A CN 109432828A CN 201811534209 A CN201811534209 A CN 201811534209A CN 109432828 A CN109432828 A CN 109432828A
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- Prior art keywords
- gas
- valve
- vacuum tube
- liquid
- separation device
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- 239000007788 liquid Substances 0.000 title claims abstract description 92
- 238000000926 separation method Methods 0.000 title claims abstract description 50
- 239000001307 helium Substances 0.000 claims abstract description 43
- 229910052734 helium Inorganic materials 0.000 claims abstract description 43
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 43
- 238000005086 pumping Methods 0.000 claims abstract description 16
- 239000007789 gas Substances 0.000 claims abstract description 12
- 230000000740 bleeding effect Effects 0.000 claims abstract description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000001257 hydrogen Substances 0.000 claims abstract description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 7
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 54
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Degasification And Air Bubble Elimination (AREA)
Abstract
The present invention relates to chemical technology fields, disclose a kind of gas-liquid separation device, comprising: vacuum tube which is provided with bleeding point;Separating pipe is located in vacuum tube, for the liquid containing hydrogen and/or helium that circulates in separating pipe;Pumping cells extract the gas in vacuum tube out by bleeding point, so that the gas contained in separation liquid in pipe is passed through separation tube wall and enter in vacuum tube.The present invention is extracted out the gas in vacuum tube by pumping cells, the pressure in vacuum tube is set to be less than or equal to setting value, since the relative molecular mass of the hydrogen or helium that contain in separation liquid in pipe is smaller, and there are pressure differences inside and outside separating pipe, gas can pass through separation tube wall and enter in vacuum tube, and drawn it out by vacuum unit, the degree of purity of liquid is improved by the gas-liquid separation device.
Description
Technical field
The present invention relates to chemical technology field more particularly to a kind of gas-liquid separation devices.
Background technique
The smaller gas of relative molecular mass is often adulterated in liquid, and is generally difficult to be separated.Such as
Chemically common ethyl orthosilicate (Tetraethyl orthosilicate, abbreviation TEOS) is the organic of liquid when room temperature
Object is encapsulated usually using storage tank, TEOS is transported to point of use, is conveyed using evaporator.Due to TEOS be liquid and
Penetrating odor is easy burning, and helium is usually first accessed storage tank by when conveying, and the TEOS of liquid is extruded, when TEOS arrival is set
After constant-pressure, the TEOS in storage tank is transferred out to vapo(u)rization system, evaporator will be delivered to using click-through after TEOS heating evaporation
It exercises and uses.
After tested, there is helium residual in transmission process in the TEOS of liquid, in the prior art without separation TEOS and helium
Device, found through detection, part TEOS after extrusion causes its purity lower because wherein helium content is higher, causes to evaporate
Part TEOS purity afterwards is not able to satisfy use condition, causes the waste of TEOS.
Summary of the invention
The purpose of the present invention is to provide a kind of gas-liquid separation devices, can separate the helium in TEOS, with solution
Certainly evaporation section TEOS causes its purity lower due to wherein helium content is higher, and part TEOS is made to be unsatisfactory for use condition
Problem.
In order to achieve the above object, the invention adopts the following technical scheme:
A kind of gas-liquid separation device is provided characterized by comprising
Vacuum tube which is provided with bleeding point;
Separating pipe is made in the vacuum tube and by soluble poly tetrafluoroethene, for circulating in the separating pipe
Liquid containing hydrogen and/or helium;
Pumping cells extract the gas in the vacuum tube out by the bleeding point, make to contain in the separation liquid in pipe
Some gas passes through the separation tube wall and enters in the vacuum tube.
As a kind of preferred embodiment of gas-liquid separation device, the separating pipe is spiral separating pipe.
As a kind of preferred embodiment of gas-liquid separation device, leakage detector is equipped in the vacuum tube, for detecting
State the liquid in vacuum tube.
As a kind of preferred embodiment of gas-liquid separation device, pressure sensing cell is equipped in the vacuum tube, for detecting
Pressure in the vacuum tube.
As a kind of preferred embodiment of gas-liquid separation device, the absolute pressure intensity values of the vacuum tube are greater than 5Pa.
As a kind of preferred embodiment of gas-liquid separation device, the liquid is ethyl orthosilicate.
Further include the first valve as a kind of preferred embodiment of gas-liquid separation device, be set to the pumping cells with it is described
On the connecting line of vacuum tube.
As a kind of preferred embodiment of gas-liquid separation device, further includes the second valve and third valve, be respectively arranged on described
The medium entrance and media outlet of separating pipe.
As a kind of preferred embodiment of gas-liquid separation device, first valve, second valve and the third valve
Door is respectively arranged below with the first valve rack, the second valve rack and third valve rack.
As a kind of preferred embodiment of gas-liquid separation device, on the export pipeline of first valve and the third valve
It is respectively equipped with the first valve plug and third valve plug, the inlet ductwork of second valve is equipped with the second valve plug.
The invention has the benefit that the gas in vacuum tube is extracted out by pumping cells, make the pressure in vacuum tube
Less than or equal to setting value, since the relative molecular mass of the hydrogen or helium that contain in separation liquid in pipe is smaller, and point
From, there are pressure difference, gas can pass through separation tube wall and enter in vacuum tube, and be drawn it out by vacuum unit inside and outside pipe, pass through
The gas-liquid separation device improves the degree of purity of liquid.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, institute in being described below to the embodiment of the present invention
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without creative efforts, can also implement according to the present invention
The content of example and these attached drawings obtain other attached drawings.
Fig. 1 is the schematic diagram for the gas-liquid separation device that the specific embodiment of the invention provides;
Fig. 2 is the sectional view for the gas-liquid separation device that the specific embodiment of the invention provides.
In figure:
10- first flange, 11- second flange, 12- vacuum tube, 13- separating pipe, 14- leakage detector, 210- medium into
Mouthful, 211- bleeding point, the first valve of 212-, the first valve rack of 213-, 214- the first valve plug, the second valve of 221-,
The second valve rack of 222-, 223- the second valve plug, 230- media outlet, 231- third valve, 232- third valve rack,
233- third valve plug.
Specific embodiment
To keep the technical problems solved, the adopted technical scheme and the technical effect achieved by the invention clearer, below
It will the technical scheme of the embodiment of the invention will be described in further detail in conjunction with attached drawing, it is clear that described embodiment is only
It is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those skilled in the art exist
Every other embodiment obtained under the premise of creative work is not made, shall fall within the protection scope of the present invention.
As depicted in figs. 1 and 2, the present embodiment provides a kind of gas-liquid separation devices, for that will be blended in liquid TEOS
Helium separation point comes.The device includes vacuum tube 12 and the separating pipe 13 in vacuum tube 12, and circulation contains in separating pipe 13
The liquid TEOS of helium, separating pipe 13 are mutually isolated with vacuum tube 12, are connected to separating pipe 13 mutually not with vacuum tube 12, certainly,
Liquid of the invention is not limited to the liquid TEOS in the present embodiment, can also be other liquid, and gas is also not limited to this reality
The helium in example is applied, can also be hydrogen.
Vacuum tube 12 is equipped with bleeding point 211, and the gas-liquid separation device of the present embodiment further includes pumping cells, pumping cells
It is connected to bleeding point 211, pumping cells are used to extract out the helium in vacuum tube 12, and separating pipe 13 is for the liquid containing helium that circulates
State TEOS makes helium pass through 13 tube wall of separating pipe and enters in vacuum tube 12, wherein pumping cells are vacuum pump or negative pressure of vacuum
It stands.The connecting line of pumping cells and vacuum tube 12 is equipped with the first valve 212, has been equipped with below the first valve 212 and has supported the
First valve rack 213 of one valve 212 effect, the outlet conduit of the first valve 212 is equipped with the first valve plug 214, right
Vacuum tube 12 carries out secondary seal, when not using the device, prevents external particle from entering vacuum tube 12, causes in vacuum tube 12
The pollution of portion's environment.The both ends of vacuum tube 12 are equipped with first flange 10 and second flange 11, and second flange 11 is set to the pumping of vacuum
211 one end of port, first flange 10 are set to other end, and first flange 10 and second flange 11 play connection external pipe, separation
The effect of pipe 13 and vacuum tube 12.
The helium that pumping cells are extracted out from vacuum tube 12 is usually discharged into atmosphere, since liquid TEOS can cause environment
Pollution, and it is easy burning, it is discharged into atmosphere after being leaked into vacuum tube 12 in order to avoid the TEOS of liquid, in vacuum tube 12
Interior setting leakage detector 14, once separating pipe 13 has crackle or other damages, is caused for detecting the TEOS in vacuum tube 12
Liquid TEOS enters in vacuum tube 12, closes the first valve 212 immediately at this time, and vacuum tube 12 still can be used as protective layer, realizes
Liquid TEOS and air exclusion, prevent liquid TEOS to be disposed in air and meeting environment is polluted or burnt.Leakage passes
Sensor 14 can detect signal and be sent to controller when detecting in vacuum tube 12 containing TEOS, control the by controller
One valve 212 is closed, and is controlled acoustooptic alarm system simultaneously and made a sound and generate light, and maintenance personal's gas-liquid separation is reminded
Device leaks, and repairs in time to the gas-liquid separation device.
The separating pipe 13 of the present embodiment is made of soluble poly tetrafluoroethene (abbreviation PFA), can be used in ultra-pure industry
System, the pressure in separating pipe 13 are greater than the pressure in vacuum tube 12, and the helium in liquid TEOS can be passed through made of PFA
The structure interval of separating pipe 13 enters hydrogen that relative molecular mass is smaller and helium in vacuum tube 12 from separating pipe 13.
In order to which the smaller helium of the relative molecular mass that will be adulterated in the liquid TEOS in separating pipe 13 is as much as possible
It is come out by 13 leaktightness of wall of tubes of separating pipe, needs to increase the total length of separating pipe 13, separating pipe 13 is spiral in the present embodiment
Separating pipe 13, in a limited space in increase the length of separating pipe 13, and this design can also be such that liquid TEOS fills with helium
Divide mixing, during flowing liquid TEOS in separating pipe 13, conducive to the helium being entrained in liquid TEOS along its flowing
Direction is gradually released out.Along the flow direction liquid TEOS, since the helium in liquid TEOS is constantly separated, edge
Separating pipe 13 is gradually increased containing concentrations of helium in liquid TEOS, may be existed radially adjacent to 13 central axial direction of separating pipe
Helium near 13 central axis of separating pipe is not completely segregated out and discharged situation, and spirally ties
The separating pipe 13 of structure, can be such that liquid TEOS is sufficiently mixed with helium, separate helium is as much as possible, and separating pipe 13 is long
The increase of degree further increases the amount of helium isolated, be not in the liquid TEOS being discharged by separating pipe 13 still contain compared with
The phenomenon that more helium.
Separating pipe 13 is equipped with medium entrance 210 and media outlet 230, and medium entrance 210 is set to one end of separating pipe 13,
Media outlet 230 is set to the other end of separating pipe 13, can increase the process of liquid TEOS and helium in separating pipe 13 in this way,
Separation is entrained in the helium increased in liquid TEOS to a greater extent.Medium entrance 210 and media outlet 230 are respectively equipped with second
Valve 221 and third valve 231, the second valve 221 and third valve 231 have been respectively arranged below with the second valve 221 of support
The second valve rack 222 and third valve rack 232 acted on third valve 231, on the inlet pipeline of the second valve 221 and
The second valve plug 223 and third valve plug 233 are further respectively had on the outlet conduit of third valve 231, to separating pipe 13
Secondary seal is carried out, when not using the device, prevents external particle from entering separating pipe 13, causes 13 internal environment of separating pipe
Pollution.
Gas-liquid separation device provided by the present embodiment further includes pressure sensing cell, is set in vacuum tube 12, is used for
Pressure, that is, the pressure for detecting the unit area in vacuum tube 12, can be grasped in real time inside vacuum tube 12 by pressure sensing cell
Pressure.It obtains through a large number of experiments, the present embodiment is when separating the helium adulterated in liquid TEOS, in vacuum tube 12
Absolute pressure be greater than 5pa, separated for save the cost and by the helium in liquid TEOS, it is preferable that in vacuum tube 12
Absolute pressure be 6.65Pa, the amount for isolating the helium of doping from liquid TEOS under the pressure is more, i.e. separative efficiency
Higher, the degree of purity of the liquid TEOS come out from media outlet 230 is also bigger.
Under original state, the first valve 212, the second valve 221 and third valve 231 are in closed state, and adopt
Carrying out gas-liquid separation with above-mentioned gas-liquid separation device, detailed process is as follows:
Firstly, backing out the first valve plug 214 on 212 export pipeline of the first valve, bleeding point 211 is connected to vacuum pump
The second valve plug 223 in 221 inlet ductwork of the second valve is backed out in import, and the connection of medium entrance 210, which is equipped with, contains helium
The outlet of liquid TEOS storage tank, backs out the third valve plug 233 in 231 inlet ductwork of third valve, and media outlet 230 connects
To the import of another liquid TEOS storage tank.
Secondly, opening the first valve 212 and starting pumping cells, unit in vacuum tube 12 is detected by pressure sensing cell
The pressure value of area closes the first valve 212 when the corresponding pressure of pressure in vacuum tube 12 is less than or equal to setting value.
Finally, successively opening the second valve 221 and third valve 231, the mixture of liquid TEOS and helium are delivered to
In separating pipe 13, and the liquid TEOS after separation is delivered to vapo(u)rization system, in this way, the medium entrance 210 of separating pipe 13 is always
In the mixture for constantly entering liquid TEOS and helium, media outlet 230 is constantly flowing out always the higher liquid of degree of purity
State TEOS.
With the leakage of helium, the pressure in vacuum tube 12 is gradually increased, and when pressure increases to a certain preset value, is opened
First valve 212 continues to be evacuated vacuum tube 12, until the pressure values in vacuum tube 12 are again less than equal to above-mentioned setting
Value, is again switched off the first valve 212, the first valve of opening and closing 212 and so on, and the pressure in vacuum tube 12 is maintained to exist
In a certain range, the helium for adulterating liquid TEOS is as much as possible to be separated.
The present embodiment is extracted out the helium in vacuum tube 12 by pumping cells, is less than or equal to the pressure in vacuum tube 12
Setting value, since the relative molecular mass of the helium contained in liquid in separating pipe 13 is smaller, and the inside and outside presence of separating pipe 13
Pressure difference, helium can pass through 13 wall of separating pipe and enter in vacuum tube 12, and be drawn it out by vacuum unit, pass through the gas-liquid point
From the degree of purity that device improves liquid TEOS.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that
The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation,
It readjusts and substitutes without departing from protection scope of the present invention.Therefore, although being carried out by above embodiments to the present invention
It is described in further detail, but the present invention is not limited to the above embodiments only, without departing from the inventive concept, also
It may include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.
Claims (10)
1. a kind of gas-liquid separation device characterized by comprising
Vacuum tube (12) which is provided with bleeding point (211);
Separating pipe (13) is located in the vacuum tube (12) and is made of soluble poly tetrafluoroethene, in the separating pipe (13)
For the liquid containing hydrogen and/or helium that circulates;
Pumping cells are extracted the gas in the vacuum tube (12) out by the bleeding point (211), are made in the separating pipe (13)
The gas contained in liquid passes through the separating pipe (13) tube wall and enters in the vacuum tube (12).
2. gas-liquid separation device according to claim 1, which is characterized in that the separating pipe (13) is spiral separation
Pipe.
3. gas-liquid separation device according to claim 1, which is characterized in that be equipped with leak detection in the vacuum tube (12)
Instrument (14), for detecting the liquid in the vacuum tube (12).
4. gas-liquid separation device according to claim 1, which is characterized in that be equipped with pressure detecting in the vacuum tube (12)
Unit, for detecting the pressure in the vacuum tube (12).
5. gas-liquid separation device according to claim 4, which is characterized in that the absolute pressure intensity values of the vacuum tube (12) are big
In 5Pa.
6. gas-liquid separation device according to claim 1, which is characterized in that the liquid is ethyl orthosilicate.
7. gas-liquid separation device according to any one of claims 1 to 6, which is characterized in that further include the first valve
(212), it is set on the pumping cells and the connecting line of the vacuum tube (12).
8. gas-liquid separation device according to claim 7, which is characterized in that further include the second valve (221) and third valve
Door (231), is respectively arranged on the medium entrance (210) and media outlet (230) of the separating pipe (13).
9. gas-liquid separation device according to claim 8, which is characterized in that first valve (212), second valve
Door (221) and the third valve (231) are respectively arranged below with the first valve rack (213), the second valve rack (222) and the
Three valve racks (232).
10. gas-liquid separation device according to claim 9, which is characterized in that first valve (212) and the third
The first valve plug (214) and third valve plug (233), second valve are respectively equipped on the export pipeline of valve (231)
The inlet ductwork of door (221) is equipped with the second valve plug (223).
Priority Applications (1)
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CN201811534209.0A CN109432828A (en) | 2018-12-14 | 2018-12-14 | A kind of gas-liquid separation device |
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CN201811534209.0A CN109432828A (en) | 2018-12-14 | 2018-12-14 | A kind of gas-liquid separation device |
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CN201811534209.0A Pending CN109432828A (en) | 2018-12-14 | 2018-12-14 | A kind of gas-liquid separation device |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111482134A (en) * | 2020-04-16 | 2020-08-04 | 四川轻化工大学 | Gas generating device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108371846A (en) * | 2018-03-30 | 2018-08-07 | 张维国 | Gas-liquid separation device |
CN108593371A (en) * | 2018-07-17 | 2018-09-28 | 广州海洋地质调查局 | The de- solution collection device and method of solution gas in water body |
CN209302249U (en) * | 2018-12-14 | 2019-08-27 | 上海正帆半导体设备有限公司 | A kind of gas-liquid separation device |
-
2018
- 2018-12-14 CN CN201811534209.0A patent/CN109432828A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108371846A (en) * | 2018-03-30 | 2018-08-07 | 张维国 | Gas-liquid separation device |
CN108593371A (en) * | 2018-07-17 | 2018-09-28 | 广州海洋地质调查局 | The de- solution collection device and method of solution gas in water body |
CN209302249U (en) * | 2018-12-14 | 2019-08-27 | 上海正帆半导体设备有限公司 | A kind of gas-liquid separation device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111482134A (en) * | 2020-04-16 | 2020-08-04 | 四川轻化工大学 | Gas generating device |
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