CN109432828A - A kind of gas-liquid separation device - Google Patents

A kind of gas-liquid separation device Download PDF

Info

Publication number
CN109432828A
CN109432828A CN201811534209.0A CN201811534209A CN109432828A CN 109432828 A CN109432828 A CN 109432828A CN 201811534209 A CN201811534209 A CN 201811534209A CN 109432828 A CN109432828 A CN 109432828A
Authority
CN
China
Prior art keywords
gas
valve
vacuum tube
liquid
separation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811534209.0A
Other languages
Chinese (zh)
Inventor
常军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHANGHAI ZHENGFAN TECHNOLOGY Co Ltd
SHANGHAI ZHENGFAN SEMICONDUCTOR EQUIPMENT CO Ltd
Original Assignee
SHANGHAI ZHENGFAN TECHNOLOGY Co Ltd
SHANGHAI ZHENGFAN SEMICONDUCTOR EQUIPMENT CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHANGHAI ZHENGFAN TECHNOLOGY Co Ltd, SHANGHAI ZHENGFAN SEMICONDUCTOR EQUIPMENT CO Ltd filed Critical SHANGHAI ZHENGFAN TECHNOLOGY Co Ltd
Priority to CN201811534209.0A priority Critical patent/CN109432828A/en
Publication of CN109432828A publication Critical patent/CN109432828A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D19/00Degasification of liquids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Degasification And Air Bubble Elimination (AREA)

Abstract

The present invention relates to chemical technology fields, disclose a kind of gas-liquid separation device, comprising: vacuum tube which is provided with bleeding point;Separating pipe is located in vacuum tube, for the liquid containing hydrogen and/or helium that circulates in separating pipe;Pumping cells extract the gas in vacuum tube out by bleeding point, so that the gas contained in separation liquid in pipe is passed through separation tube wall and enter in vacuum tube.The present invention is extracted out the gas in vacuum tube by pumping cells, the pressure in vacuum tube is set to be less than or equal to setting value, since the relative molecular mass of the hydrogen or helium that contain in separation liquid in pipe is smaller, and there are pressure differences inside and outside separating pipe, gas can pass through separation tube wall and enter in vacuum tube, and drawn it out by vacuum unit, the degree of purity of liquid is improved by the gas-liquid separation device.

Description

A kind of gas-liquid separation device
Technical field
The present invention relates to chemical technology field more particularly to a kind of gas-liquid separation devices.
Background technique
The smaller gas of relative molecular mass is often adulterated in liquid, and is generally difficult to be separated.Such as Chemically common ethyl orthosilicate (Tetraethyl orthosilicate, abbreviation TEOS) is the organic of liquid when room temperature Object is encapsulated usually using storage tank, TEOS is transported to point of use, is conveyed using evaporator.Due to TEOS be liquid and Penetrating odor is easy burning, and helium is usually first accessed storage tank by when conveying, and the TEOS of liquid is extruded, when TEOS arrival is set After constant-pressure, the TEOS in storage tank is transferred out to vapo(u)rization system, evaporator will be delivered to using click-through after TEOS heating evaporation It exercises and uses.
After tested, there is helium residual in transmission process in the TEOS of liquid, in the prior art without separation TEOS and helium Device, found through detection, part TEOS after extrusion causes its purity lower because wherein helium content is higher, causes to evaporate Part TEOS purity afterwards is not able to satisfy use condition, causes the waste of TEOS.
Summary of the invention
The purpose of the present invention is to provide a kind of gas-liquid separation devices, can separate the helium in TEOS, with solution Certainly evaporation section TEOS causes its purity lower due to wherein helium content is higher, and part TEOS is made to be unsatisfactory for use condition Problem.
In order to achieve the above object, the invention adopts the following technical scheme:
A kind of gas-liquid separation device is provided characterized by comprising
Vacuum tube which is provided with bleeding point;
Separating pipe is made in the vacuum tube and by soluble poly tetrafluoroethene, for circulating in the separating pipe Liquid containing hydrogen and/or helium;
Pumping cells extract the gas in the vacuum tube out by the bleeding point, make to contain in the separation liquid in pipe Some gas passes through the separation tube wall and enters in the vacuum tube.
As a kind of preferred embodiment of gas-liquid separation device, the separating pipe is spiral separating pipe.
As a kind of preferred embodiment of gas-liquid separation device, leakage detector is equipped in the vacuum tube, for detecting State the liquid in vacuum tube.
As a kind of preferred embodiment of gas-liquid separation device, pressure sensing cell is equipped in the vacuum tube, for detecting Pressure in the vacuum tube.
As a kind of preferred embodiment of gas-liquid separation device, the absolute pressure intensity values of the vacuum tube are greater than 5Pa.
As a kind of preferred embodiment of gas-liquid separation device, the liquid is ethyl orthosilicate.
Further include the first valve as a kind of preferred embodiment of gas-liquid separation device, be set to the pumping cells with it is described On the connecting line of vacuum tube.
As a kind of preferred embodiment of gas-liquid separation device, further includes the second valve and third valve, be respectively arranged on described The medium entrance and media outlet of separating pipe.
As a kind of preferred embodiment of gas-liquid separation device, first valve, second valve and the third valve Door is respectively arranged below with the first valve rack, the second valve rack and third valve rack.
As a kind of preferred embodiment of gas-liquid separation device, on the export pipeline of first valve and the third valve It is respectively equipped with the first valve plug and third valve plug, the inlet ductwork of second valve is equipped with the second valve plug.
The invention has the benefit that the gas in vacuum tube is extracted out by pumping cells, make the pressure in vacuum tube Less than or equal to setting value, since the relative molecular mass of the hydrogen or helium that contain in separation liquid in pipe is smaller, and point From, there are pressure difference, gas can pass through separation tube wall and enter in vacuum tube, and be drawn it out by vacuum unit inside and outside pipe, pass through The gas-liquid separation device improves the degree of purity of liquid.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, institute in being described below to the embodiment of the present invention Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention Example, for those of ordinary skill in the art, without creative efforts, can also implement according to the present invention The content of example and these attached drawings obtain other attached drawings.
Fig. 1 is the schematic diagram for the gas-liquid separation device that the specific embodiment of the invention provides;
Fig. 2 is the sectional view for the gas-liquid separation device that the specific embodiment of the invention provides.
In figure:
10- first flange, 11- second flange, 12- vacuum tube, 13- separating pipe, 14- leakage detector, 210- medium into Mouthful, 211- bleeding point, the first valve of 212-, the first valve rack of 213-, 214- the first valve plug, the second valve of 221-, The second valve rack of 222-, 223- the second valve plug, 230- media outlet, 231- third valve, 232- third valve rack, 233- third valve plug.
Specific embodiment
To keep the technical problems solved, the adopted technical scheme and the technical effect achieved by the invention clearer, below It will the technical scheme of the embodiment of the invention will be described in further detail in conjunction with attached drawing, it is clear that described embodiment is only It is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those skilled in the art exist Every other embodiment obtained under the premise of creative work is not made, shall fall within the protection scope of the present invention.
As depicted in figs. 1 and 2, the present embodiment provides a kind of gas-liquid separation devices, for that will be blended in liquid TEOS Helium separation point comes.The device includes vacuum tube 12 and the separating pipe 13 in vacuum tube 12, and circulation contains in separating pipe 13 The liquid TEOS of helium, separating pipe 13 are mutually isolated with vacuum tube 12, are connected to separating pipe 13 mutually not with vacuum tube 12, certainly, Liquid of the invention is not limited to the liquid TEOS in the present embodiment, can also be other liquid, and gas is also not limited to this reality The helium in example is applied, can also be hydrogen.
Vacuum tube 12 is equipped with bleeding point 211, and the gas-liquid separation device of the present embodiment further includes pumping cells, pumping cells It is connected to bleeding point 211, pumping cells are used to extract out the helium in vacuum tube 12, and separating pipe 13 is for the liquid containing helium that circulates State TEOS makes helium pass through 13 tube wall of separating pipe and enters in vacuum tube 12, wherein pumping cells are vacuum pump or negative pressure of vacuum It stands.The connecting line of pumping cells and vacuum tube 12 is equipped with the first valve 212, has been equipped with below the first valve 212 and has supported the First valve rack 213 of one valve 212 effect, the outlet conduit of the first valve 212 is equipped with the first valve plug 214, right Vacuum tube 12 carries out secondary seal, when not using the device, prevents external particle from entering vacuum tube 12, causes in vacuum tube 12 The pollution of portion's environment.The both ends of vacuum tube 12 are equipped with first flange 10 and second flange 11, and second flange 11 is set to the pumping of vacuum 211 one end of port, first flange 10 are set to other end, and first flange 10 and second flange 11 play connection external pipe, separation The effect of pipe 13 and vacuum tube 12.
The helium that pumping cells are extracted out from vacuum tube 12 is usually discharged into atmosphere, since liquid TEOS can cause environment Pollution, and it is easy burning, it is discharged into atmosphere after being leaked into vacuum tube 12 in order to avoid the TEOS of liquid, in vacuum tube 12 Interior setting leakage detector 14, once separating pipe 13 has crackle or other damages, is caused for detecting the TEOS in vacuum tube 12 Liquid TEOS enters in vacuum tube 12, closes the first valve 212 immediately at this time, and vacuum tube 12 still can be used as protective layer, realizes Liquid TEOS and air exclusion, prevent liquid TEOS to be disposed in air and meeting environment is polluted or burnt.Leakage passes Sensor 14 can detect signal and be sent to controller when detecting in vacuum tube 12 containing TEOS, control the by controller One valve 212 is closed, and is controlled acoustooptic alarm system simultaneously and made a sound and generate light, and maintenance personal's gas-liquid separation is reminded Device leaks, and repairs in time to the gas-liquid separation device.
The separating pipe 13 of the present embodiment is made of soluble poly tetrafluoroethene (abbreviation PFA), can be used in ultra-pure industry System, the pressure in separating pipe 13 are greater than the pressure in vacuum tube 12, and the helium in liquid TEOS can be passed through made of PFA The structure interval of separating pipe 13 enters hydrogen that relative molecular mass is smaller and helium in vacuum tube 12 from separating pipe 13.
In order to which the smaller helium of the relative molecular mass that will be adulterated in the liquid TEOS in separating pipe 13 is as much as possible It is come out by 13 leaktightness of wall of tubes of separating pipe, needs to increase the total length of separating pipe 13, separating pipe 13 is spiral in the present embodiment Separating pipe 13, in a limited space in increase the length of separating pipe 13, and this design can also be such that liquid TEOS fills with helium Divide mixing, during flowing liquid TEOS in separating pipe 13, conducive to the helium being entrained in liquid TEOS along its flowing Direction is gradually released out.Along the flow direction liquid TEOS, since the helium in liquid TEOS is constantly separated, edge Separating pipe 13 is gradually increased containing concentrations of helium in liquid TEOS, may be existed radially adjacent to 13 central axial direction of separating pipe Helium near 13 central axis of separating pipe is not completely segregated out and discharged situation, and spirally ties The separating pipe 13 of structure, can be such that liquid TEOS is sufficiently mixed with helium, separate helium is as much as possible, and separating pipe 13 is long The increase of degree further increases the amount of helium isolated, be not in the liquid TEOS being discharged by separating pipe 13 still contain compared with The phenomenon that more helium.
Separating pipe 13 is equipped with medium entrance 210 and media outlet 230, and medium entrance 210 is set to one end of separating pipe 13, Media outlet 230 is set to the other end of separating pipe 13, can increase the process of liquid TEOS and helium in separating pipe 13 in this way, Separation is entrained in the helium increased in liquid TEOS to a greater extent.Medium entrance 210 and media outlet 230 are respectively equipped with second Valve 221 and third valve 231, the second valve 221 and third valve 231 have been respectively arranged below with the second valve 221 of support The second valve rack 222 and third valve rack 232 acted on third valve 231, on the inlet pipeline of the second valve 221 and The second valve plug 223 and third valve plug 233 are further respectively had on the outlet conduit of third valve 231, to separating pipe 13 Secondary seal is carried out, when not using the device, prevents external particle from entering separating pipe 13, causes 13 internal environment of separating pipe Pollution.
Gas-liquid separation device provided by the present embodiment further includes pressure sensing cell, is set in vacuum tube 12, is used for Pressure, that is, the pressure for detecting the unit area in vacuum tube 12, can be grasped in real time inside vacuum tube 12 by pressure sensing cell Pressure.It obtains through a large number of experiments, the present embodiment is when separating the helium adulterated in liquid TEOS, in vacuum tube 12 Absolute pressure be greater than 5pa, separated for save the cost and by the helium in liquid TEOS, it is preferable that in vacuum tube 12 Absolute pressure be 6.65Pa, the amount for isolating the helium of doping from liquid TEOS under the pressure is more, i.e. separative efficiency Higher, the degree of purity of the liquid TEOS come out from media outlet 230 is also bigger.
Under original state, the first valve 212, the second valve 221 and third valve 231 are in closed state, and adopt Carrying out gas-liquid separation with above-mentioned gas-liquid separation device, detailed process is as follows:
Firstly, backing out the first valve plug 214 on 212 export pipeline of the first valve, bleeding point 211 is connected to vacuum pump The second valve plug 223 in 221 inlet ductwork of the second valve is backed out in import, and the connection of medium entrance 210, which is equipped with, contains helium The outlet of liquid TEOS storage tank, backs out the third valve plug 233 in 231 inlet ductwork of third valve, and media outlet 230 connects To the import of another liquid TEOS storage tank.
Secondly, opening the first valve 212 and starting pumping cells, unit in vacuum tube 12 is detected by pressure sensing cell The pressure value of area closes the first valve 212 when the corresponding pressure of pressure in vacuum tube 12 is less than or equal to setting value.
Finally, successively opening the second valve 221 and third valve 231, the mixture of liquid TEOS and helium are delivered to In separating pipe 13, and the liquid TEOS after separation is delivered to vapo(u)rization system, in this way, the medium entrance 210 of separating pipe 13 is always In the mixture for constantly entering liquid TEOS and helium, media outlet 230 is constantly flowing out always the higher liquid of degree of purity State TEOS.
With the leakage of helium, the pressure in vacuum tube 12 is gradually increased, and when pressure increases to a certain preset value, is opened First valve 212 continues to be evacuated vacuum tube 12, until the pressure values in vacuum tube 12 are again less than equal to above-mentioned setting Value, is again switched off the first valve 212, the first valve of opening and closing 212 and so on, and the pressure in vacuum tube 12 is maintained to exist In a certain range, the helium for adulterating liquid TEOS is as much as possible to be separated.
The present embodiment is extracted out the helium in vacuum tube 12 by pumping cells, is less than or equal to the pressure in vacuum tube 12 Setting value, since the relative molecular mass of the helium contained in liquid in separating pipe 13 is smaller, and the inside and outside presence of separating pipe 13 Pressure difference, helium can pass through 13 wall of separating pipe and enter in vacuum tube 12, and be drawn it out by vacuum unit, pass through the gas-liquid point From the degree of purity that device improves liquid TEOS.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation, It readjusts and substitutes without departing from protection scope of the present invention.Therefore, although being carried out by above embodiments to the present invention It is described in further detail, but the present invention is not limited to the above embodiments only, without departing from the inventive concept, also It may include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.

Claims (10)

1. a kind of gas-liquid separation device characterized by comprising
Vacuum tube (12) which is provided with bleeding point (211);
Separating pipe (13) is located in the vacuum tube (12) and is made of soluble poly tetrafluoroethene, in the separating pipe (13) For the liquid containing hydrogen and/or helium that circulates;
Pumping cells are extracted the gas in the vacuum tube (12) out by the bleeding point (211), are made in the separating pipe (13) The gas contained in liquid passes through the separating pipe (13) tube wall and enters in the vacuum tube (12).
2. gas-liquid separation device according to claim 1, which is characterized in that the separating pipe (13) is spiral separation Pipe.
3. gas-liquid separation device according to claim 1, which is characterized in that be equipped with leak detection in the vacuum tube (12) Instrument (14), for detecting the liquid in the vacuum tube (12).
4. gas-liquid separation device according to claim 1, which is characterized in that be equipped with pressure detecting in the vacuum tube (12) Unit, for detecting the pressure in the vacuum tube (12).
5. gas-liquid separation device according to claim 4, which is characterized in that the absolute pressure intensity values of the vacuum tube (12) are big In 5Pa.
6. gas-liquid separation device according to claim 1, which is characterized in that the liquid is ethyl orthosilicate.
7. gas-liquid separation device according to any one of claims 1 to 6, which is characterized in that further include the first valve (212), it is set on the pumping cells and the connecting line of the vacuum tube (12).
8. gas-liquid separation device according to claim 7, which is characterized in that further include the second valve (221) and third valve Door (231), is respectively arranged on the medium entrance (210) and media outlet (230) of the separating pipe (13).
9. gas-liquid separation device according to claim 8, which is characterized in that first valve (212), second valve Door (221) and the third valve (231) are respectively arranged below with the first valve rack (213), the second valve rack (222) and the Three valve racks (232).
10. gas-liquid separation device according to claim 9, which is characterized in that first valve (212) and the third The first valve plug (214) and third valve plug (233), second valve are respectively equipped on the export pipeline of valve (231) The inlet ductwork of door (221) is equipped with the second valve plug (223).
CN201811534209.0A 2018-12-14 2018-12-14 A kind of gas-liquid separation device Pending CN109432828A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811534209.0A CN109432828A (en) 2018-12-14 2018-12-14 A kind of gas-liquid separation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811534209.0A CN109432828A (en) 2018-12-14 2018-12-14 A kind of gas-liquid separation device

Publications (1)

Publication Number Publication Date
CN109432828A true CN109432828A (en) 2019-03-08

Family

ID=65559382

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811534209.0A Pending CN109432828A (en) 2018-12-14 2018-12-14 A kind of gas-liquid separation device

Country Status (1)

Country Link
CN (1) CN109432828A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111482134A (en) * 2020-04-16 2020-08-04 四川轻化工大学 Gas generating device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108371846A (en) * 2018-03-30 2018-08-07 张维国 Gas-liquid separation device
CN108593371A (en) * 2018-07-17 2018-09-28 广州海洋地质调查局 The de- solution collection device and method of solution gas in water body
CN209302249U (en) * 2018-12-14 2019-08-27 上海正帆半导体设备有限公司 A kind of gas-liquid separation device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108371846A (en) * 2018-03-30 2018-08-07 张维国 Gas-liquid separation device
CN108593371A (en) * 2018-07-17 2018-09-28 广州海洋地质调查局 The de- solution collection device and method of solution gas in water body
CN209302249U (en) * 2018-12-14 2019-08-27 上海正帆半导体设备有限公司 A kind of gas-liquid separation device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111482134A (en) * 2020-04-16 2020-08-04 四川轻化工大学 Gas generating device

Similar Documents

Publication Publication Date Title
WO2005036100A3 (en) Method and apparatus for locating leak holes in pipeline using tracers
JPS56126733A (en) Detecting method for leakage of helium
CN209302249U (en) A kind of gas-liquid separation device
CN101995452A (en) Test chamber for rapidly detecting release amount of formaldehyde in artificial board and product
CN109432828A (en) A kind of gas-liquid separation device
CN206670871U (en) A kind of threeway groove pipe fitting air tightness detection equipment
CN113086364B (en) Animal ovary conveyer
GB2392725A (en) Liquid sample take-up device
CN208951670U (en) A kind of carbon dioxide charging device
CN207123358U (en) A kind of leakage detection device of air of heat transmission equipment
CN110187138A (en) Sample needle cleaning solution drainage system for in-vitro diagnosis equipment
CN206208460U (en) A kind of leakage detection apparatus
CN213874835U (en) Gas pipeline leakage detection device
CN208223000U (en) A kind of high-efficiency vacuum drying box of water heated type
CN207086489U (en) Heat-conducting oil system cleaning equipment
CN208076269U (en) A kind of dynamic uniform blasting dilution instrument with double dilution air sources
CN112161146A (en) Shared pigging connecting device and shared pipeline
CN206295776U (en) One kind revolving solvent gas processing unit
US5447193A (en) Apparatus for injecting a volume of liquid into a liquid-conducting system
JP3433519B2 (en) Membrane separation device
CN215712850U (en) Biogas pretreatment dehumidifying device
CN214119706U (en) Energy-saving visual type leakage-proof gas drainer
CN204988658U (en) A equipment for tanker aircraft
CN220337675U (en) Special pipe and device for constructing volatile liquid gaseous contamination microenvironment
CN210533617U (en) Vapor recovery system leakproofness detection device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination