CN109399642A - Polysilicon takes bar device and method - Google Patents
Polysilicon takes bar device and method Download PDFInfo
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- CN109399642A CN109399642A CN201811605733.2A CN201811605733A CN109399642A CN 109399642 A CN109399642 A CN 109399642A CN 201811605733 A CN201811605733 A CN 201811605733A CN 109399642 A CN109399642 A CN 109399642A
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- carrier member
- mechanical arm
- clean cover
- track
- bar device
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
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Abstract
The present invention provides a kind of polysilicons to take bar device and method, belongs to polysilicon quasi- fortune field.It includes: clean cover that polysilicon, which takes bar device, has closed accommodating chamber in clean cover；Material fetching mechanism, material fetching mechanism are set to the inside of accommodating chamber；Material fetching mechanism includes track, the first carrier member and mechanical arm, and track is set as annular, and the first carrier member and track are slidably connected, and mechanical arm and the connection of the first carrier member, the first carrier member is for driving mechanical arm to move along track；Transshipment acitivity, transshipment acitivity are set to the inside of accommodating chamber；Controller, controller are electrically connected with the first carrier member, mechanical arm and the second carrier member respectively, and controller for controlling the first carrier member, mechanical arm and the second carrier member respectively.This polysilicon takes bar device and method that can carry out in closed space, and extraneous substance can be effectively prevented and pollute to polycrystalline silicon rod, and be transported through in orbit using mechanical arm, can have higher working efficiency.
Description
Technical field
The present invention relates to polysilicon standards to transport field, takes bar device and method in particular to a kind of polysilicon.
Background technique
In recent years, solar energy receives most attention with the advantages that its cleanliness without any pollution, widely distributed, rich reserves, together
When started the upsurge that human development utilizes solar energy, photovoltaic industry comes into being, the polycrystalline as photovoltaic industry chain front end
Silicon industry has become focus most very powerful and exceedingly arrogant in current every profession and trade development, in current photovoltaic under the huge market demand
In industry, Siemens Method be produce polysilicon prevailing technology, main technique first is that electronation be vapor-deposited, it be
It is reacted by the trichlorosilane gas by multistage rectification with hydrogen under 1100 DEG C of high temperature and is reduced into silicon and is constantly deposited on initial silicon
It grows up to form the inverse u shape silicon rod that diameter reaches hundreds of millimeters on core.
Most enterprises take or manually take polycrystalline silicon rod using mechanical arm single pair at present, this process labor intensity of workers is big,
Take a long time, low efficiency easily pollutes silicon rod, and by manually taking polycrystalline silicon rod during will cause silicon rod fracture draw
Hurt operator.Therefore, there is an urgent need to it is a kind of it is efficient, convenient, security performance is secure, and the polysilicon for not causing silicon rod to pollute
Take bar device.
Summary of the invention
The present invention provides a kind of polysilicons to take bar device, it is intended to solve polysilicon in the prior art and take existing for bar device
The above problem；
The present invention also provides a kind of polysilicons to take stick method, it is intended to solve polysilicon in the prior art and stick method is taken to exist
The above problem.
The present invention is implemented as follows:
A kind of polysilicon takes bar device, comprising:
Clean cover, the clean cover is interior to have closed accommodating chamber；
Material fetching mechanism, the material fetching mechanism are set to the inside of the accommodating chamber；
The material fetching mechanism includes track, the first carrier member and mechanical arm, and the track is set as annular, and described first
Carrier member and the track are slidably connected, and the mechanical arm is connected with first carrier member, and first carrier member is used for band
The mechanical arm is moved to move along the track；
Transshipment acitivity, the transshipment acitivity are set to the inside of the accommodating chamber；
The transshipment acitivity includes the second carrier member interconnected and the receiving member for holding polycrystalline silicon rod, and described
Two carrier member are for driving the receiving member to move；
Controller, the controller are electric with first carrier member, the mechanical arm and second carrier member respectively
Connection, the controller for controlling first carrier member, the mechanical arm and second carrier member respectively.
In preferred embodiments of the present invention, the clean cover includes multiple clean cover valves, and multiple clean cover valves are in
Chain is successively hinged, is detachably connected between the clean cover valve of two of both ends, when both ends two clean cover valves it
Between connect, form closed hoop between multiple clean cover valves.
In preferred embodiments of the present invention, the clean cover further includes third carrier member, the third carrier member and institute
The connection of clean cover valve is stated, the third carrier member is for driving the clean cover valve to move.
In preferred embodiments of the present invention, the third carrier member includes third actuator and the third rolling of transmission connection
Wheel, the third actuator is for driving the third idler wheel to rotate, the controller and third actuator electrical connection.
In preferred embodiments of the present invention, first carrier member is set as multiple, and multiple first carrier member exist
It is spaced apart on the track, the mechanical arm is set as multiple, and the mechanical arm and first carrier member correspond.
In preferred embodiments of the present invention, first carrier member includes the first idler wheel and the first driving of transmission connection
Part, first idler wheel and the track roll connection, and first actuator is for driving first idler wheel along described
Track movement, the controller and first actuator electrical connection.
In preferred embodiments of the present invention, second carrier member includes the second actuator and the second rolling of transmission connection
Wheel, second actuator is for driving second idler wheel to rotate, the controller and second actuator electrical connection.
In preferred embodiments of the present invention, there is clamping portion on the mechanical arm, there are induction pieces in the clamping portion,
The induction pieces are used to incude the chucking power in the clamping portion, the induction pieces and controller electrical connection, the controller
For controlling the manipulator motion according to the signal of the induction pieces.
In preferred embodiments of the present invention, the induction pieces are pressure sensor.
A kind of polysilicon takes stick method, includes the following steps:
The track of annular is set on the outside of chassis of reducing furnace；
Clean cover is located on polycrystalline silicon rod；
Polycrystalline silicon rod is clamped to transshipment acitivity with suitable chucking power using mechanical arm；
Clean cover is opened, is transported polycrystalline silicon rod using transshipment acitivity.
The beneficial effects of the present invention are:
The polysilicon that the present invention obtains by above-mentioned design takes bar device, and when in use, track is arranged first
Around chassis of reducing furnace, then clean cover is located on the polycrystalline silicon rod on chassis of reducing furnace, so that polycrystalline silicon rod is closed
Space in realize transhipment, cause the dirt on polycrystalline silicon rod surface so as to avoid polycrystalline silicon rod directly exposed operate in air
Dye, and since track is set as annular, mechanical arm can be moved annularly on it, can be realized from different directions to more
Polycrystalline silicon rod is placed on the receiving member of transshipment acitivity using mechanical arm, opens clean cover later by the transhipment of crystalline silicon rod, can be with
Transshipment acitivity is facilitated to transport.To sum up, this polysilicon takes bar device when in use, can carry out in closed space,
Extraneous substance can be effectively prevented to pollute polycrystalline silicon rod, and be transported through in orbit using mechanical arm, it can be with
Working efficiency with higher.
The polysilicon that the present invention obtains by above-mentioned design takes stick method, when in use, can be in closed space
Middle progress can be effectively prevented extraneous substance and pollute to polycrystalline silicon rod, and turned in orbit using mechanical arm
Fortune, can have higher working efficiency.
Detailed description of the invention
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of embodiment of the present invention
Attached drawing be briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not to be seen as
It is the restriction to range, it for those of ordinary skill in the art, without creative efforts, can be with root
Other relevant attached drawings are obtained according to these attached drawings.
Fig. 1 is the structural schematic diagram that the polysilicon that embodiment of the present invention provides takes bar device；
Fig. 2 is the structural schematic diagram that the polysilicon that embodiment of the present invention provides takes the clean cover valve in bar device.
Icon: 1- controller；2- mechanical arm；3- polycrystalline silicon rod；4- chassis of reducing furnace；5- track；6- transshipment acitivity；7- is clean
Net cover；71- clean cover valve；72- connecting shaft；73- third carrier member.
Specific embodiment
To keep the purposes, technical schemes and advantages of embodiment of the present invention clearer, implement below in conjunction with the present invention
The technical solution in embodiment of the present invention is clearly and completely described in attached drawing in mode, it is clear that described reality
The mode of applying is some embodiments of the invention, rather than whole embodiments.Based on the embodiment in the present invention, ability
Domain those of ordinary skill every other embodiment obtained without creative efforts, belongs to the present invention
The range of protection.Therefore, the detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit below and is wanted
The scope of the present invention of protection is sought, but is merely representative of selected embodiment of the invention.Based on the embodiment in the present invention,
Every other embodiment obtained by those of ordinary skill in the art without making creative efforts belongs to this
Invent the range of protection.
In the description of the present invention, it is to be understood that, indicating position or the term of positional relationship are based on shown in attached drawing
Orientation or positional relationship, be merely for convenience of description of the present invention and simplification of the description, rather than the equipment of indication or suggestion meaning
Or element must have a particular orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be mechanical connect
It connects, is also possible to be electrically connected；It can be directly connected, can also can be in two elements indirectly connected through an intermediary
The interaction relationship of the connection in portion or two elements.It for the ordinary skill in the art, can be according to specific feelings
Condition understands the concrete meaning of above-mentioned term in the present invention.
In the present invention unless specifically defined or limited otherwise, fisrt feature can be on or below second feature
Directly contacted including the first and second features, also may include the first and second features be not direct contact but by them it
Between other characterisation contact.Moreover, fisrt feature is on second feature, top and above include fisrt feature second spy
Right above sign and oblique upper, or first feature horizontal height is merely representative of higher than second feature.Fisrt feature second feature it
Under, lower section and fisrt feature included below be directly below and diagonally below the second feature, or be merely representative of first feature horizontal height
Less than second feature.
Embodiment one
It present embodiments provides a kind of polysilicon and takes bar device, referring to Fig. 1, this polysilicon takes the bar device to include:
Clean cover 7, clean cover 7 is interior to have closed accommodating chamber；
Material fetching mechanism, material fetching mechanism are set to the inside of accommodating chamber；
Material fetching mechanism includes track 5, the first carrier member and mechanical arm 2, and track 5 is set as annular, the first carrier member and
Track 5 is slidably connected, and mechanical arm 2 is connected with the first carrier member, and the first carrier member is for driving mechanical arm 2 to move along track 5；
Transshipment acitivity 6, transshipment acitivity 6 are set to the inside of accommodating chamber；
Transshipment acitivity 6 includes the second carrier member interconnected and the receiving member for holding polycrystalline silicon rod 3, the second delivery
Part is for driving receiving member to move；
Controller 1, controller 1 are electrically connected with the first carrier member, mechanical arm 2 and the second carrier member respectively, and controller 1 is used
In controlling the first carrier member, mechanical arm 2 and the second carrier member respectively.
When in use, track 5 is arranged around chassis of reducing furnace 4 first, clean cover 7 is then located at reduction
On polycrystalline silicon rod 3 on furnace hearth plate 4, so that polycrystalline silicon rod 3 realizes transhipment in closed space, so as to avoid polycrystalline silicon rod
3 direct exposed operate in air and the pollution for causing 3 surface of polycrystalline silicon rod, and since track 5 is set as annular, mechanical arm
2 can annularly move on it, can realize the transhipment to polycrystalline silicon rod 3 from different directions, using mechanical arm 2 by polycrystalline
Silicon rod 3 is placed on the receiving member of transshipment acitivity 6, opens clean cover 7 later, can be convenient the transport of transshipment acitivity 6.To sum up, this
Kind polysilicon takes bar device when in use, can carry out in closed space, and extraneous substance pair can be effectively prevented
Polycrystalline silicon rod 3 pollutes, and is transported through on the rail 5 using mechanical arm 2, can have higher working efficiency.
Please refer to Fig. 2.
Optionally, in the present embodiment, clean cover 7 include multiple clean cover valves 71, multiple clean cover valves 71 in chain according to
It is secondary hinged, it is detachably connected between two clean cover valves 71 at both ends, is connected when between two clean cover valves 71 at both ends, it is multiple
Closed hoop is formed between clean cover valve 71.
Clean cover 7 can be convenient storage after usage, when not in use, fold, and need to make
With when, it is reinflated, form the cover of semicircle shape.
Optionally, in the present embodiment, clean cover 7 further includes third carrier member 73, third carrier member 73 and clean cover valve
71 connections, third carrier member 73 is for driving clean cover valve 71 to move.
The carrying to clean cover 7 may be implemented in third carrier member 73, can use the realization of controller 1 to the position of clean cover 7
The control set.
It is hinged by connecting shaft 72 between clean cover valve 71 specifically, in the present embodiment, it when in use, can be with
Part is facilitated to fold, and one of connecting shaft 72 and third carrier member 73 connect, so that third carrier member 73 can be with
Realize the drive of the movement to clean cover valve 71.
Certainly, in other examples, clean cover 7 can also be by the way of integral structure design, it is only necessary to clean
Cover 7 can build closed environment at work for polycrystalline silicon rod 3, and can be convenient disassembly.
Please refer to Fig. 1.
Optionally, in the present embodiment, third carrier member 73 includes the third actuator and third idler wheel of transmission connection, the
Three actuators are for driving third idler wheel to rotate, controller 1 and the electrical connection of third actuator.
Third carrier member 73 is the carrier mechanism that can be controlled by controller 1 common in the prior art, the
Three idler wheels are set as multiple, multiple third idler wheel common rotations, and clean cover 7 can be driven to move, and third actuator is set as
Motor, power supply can be powered using the power supply mode commonly used in the prior art such as battery, and itself and controller 1 it
Between connection, can be attached, and be attached using wireless signal as the prior art by the way of wireless signal connection
In commonly used by be remotely controlled the mode of manipulation, specific working principle and connection type are the prior art, and details are not described herein.
Optionally, in the present embodiment, the first carrier member is set as multiple, and multiple first carrier member are spaced on the rail 5
Distribution, mechanical arm 2 are set as multiple, and mechanical arm 2 and the first carrier member correspond.
Multiple first carrier member can drive multiple mechanical arms 2 to move respectively, and work together between multiple mechanical arms 2,
It can effectively improve working efficiency.
Optionally, in the present embodiment, the first carrier member include transmission connection the first idler wheel and the first actuator, first
Idler wheel and track 5 roll connection, and the first actuator is for driving the first idler wheel to move along track 5, controller 1 and the first driving
Part electrical connection.
First carrier member is the carrier mechanism that can be controlled by controller 1 common in the prior art, first
Idler wheel is set as multiple, multiple first idler wheel common rotations, and clean cover 7 can be driven to move, and the first actuator is set as electricity
Machine, power supply can be powered using the power supply mode commonly used in the prior art such as battery, and it is between controller 1
Connection, can be attached, and be attached using wireless signal as in the prior art by the way of wireless signal connection
Commonly used by be remotely controlled the mode of manipulation, specific working principle and connection type are the prior art, and details are not described herein.
Optionally, in the present embodiment, the second carrier member include transmission connection the second actuator and the second idler wheel, second
Actuator is for driving the rotation of the second idler wheel, controller 1 and the electrical connection of the second actuator.
Second carrier member is the carrier mechanism that can be controlled by controller 1 common in the prior art, second
Idler wheel is set as multiple, multiple second idler wheel common rotations, and clean cover 7 can be driven to move, and the second actuator is set as electricity
Machine, power supply can be powered using the power supply mode commonly used in the prior art such as battery, and it is between controller 1
Connection, can be attached, and be attached using wireless signal as in the prior art by the way of wireless signal connection
Commonly used by be remotely controlled the mode of manipulation, specific working principle and connection type are the prior art, and details are not described herein.
Optionally, in the present embodiment, there is clamping portion on mechanical arm 2, there are induction pieces in clamping portion, induction pieces are used for
Incude the chucking power in clamping portion, induction pieces and controller 1 are electrically connected, and controller 1 is used for the signal controlling machine tool according to induction pieces
Arm 2 moves.
Induction pieces are set among the clamping portion on mechanical arm 2, can effectively identify clamping piece when clamping polycrystalline silicon rod 3
Chucking power, so as to which signal is passed to controller 1, controller 1 controls mechanical arm 2 and is stepped up chucking power, and controls
Device processed 1 persistently receives the signal from induction pieces, when the signal of induction pieces is reached from being less than preset chucking power and be stepped up
After preset chucking power, controller 1, which controls mechanical arm 2, to be stopped increasing chucking power, so as to effectively prevent chucking power smaller
Or it is adversely affected caused by the larger transhipment polycrystalline silicon rod 3.
Specifically, mechanical arm 2 is the prior art commonly used in the prior art, when operation, in the prior art
In the presence of the structure for being stepped up chucking power using the control of controller 1, it is only necessary to be by direct utilize of mechanical arm 2 in the prior art
Can, without being improved to mechanical arm 2.
Optionally, in the present embodiment, induction pieces are pressure sensor.
The accurate detection to chucking power may be implemented using pressure sensor.
It is that when in use, track 5 is arranged first that polysilicon provided in this embodiment, which takes the working principle of bar device,
Around chassis of reducing furnace 4, then clean cover 7 is located on the polycrystalline silicon rod 3 on chassis of reducing furnace 4, so that polycrystalline silicon rod 3
Transhipment is realized in closed space, causes polycrystalline silicon rod 3 so as to avoid directly exposed operate in air of polycrystalline silicon rod 3
The pollution on surface, and since track 5 is set as annular, mechanical arm 2 can be moved annularly on it, can be from different sides
To the transhipment realized to polycrystalline silicon rod 3, polycrystalline silicon rod 3 is placed on the receiving member of transshipment acitivity 6 using mechanical arm 2, later
Clean cover 7 is opened, can be convenient the transport of transshipment acitivity 6.To sum up, this polysilicon takes bar device when in use, Ke Yi
It is carried out in closed space, extraneous substance can be effectively prevented, polycrystalline silicon rod 3 is polluted, and existed using mechanical arm 2
It is transported through on track 5, can have higher working efficiency.
Embodiment two
It present embodiments provides a kind of polysilicon and takes stick method, include the following steps:
The track 5 of annular is set to 4 outside of chassis of reducing furnace；
Clean cover 7 is located on polycrystalline silicon rod 3；
Polycrystalline silicon rod 3 is clamped to transshipment acitivity 6 with suitable chucking power using mechanical arm 2；
Clean cover 7 is opened, is transported polycrystalline silicon rod 3 using transshipment acitivity 6.
Specifically, when in use, bar device can be taken to realize using the polysilicon provided in embodiment one.
Polysilicon provided in this embodiment takes stick method, when in use, can carry out in closed space, can be with
It effectively prevent extraneous substance to pollute polycrystalline silicon rod 3, and is transported through on the rail 5 using mechanical arm 2, can be had
There is higher working efficiency.
The above is only the preferred embodiment of the present invention, are not intended to restrict the invention, for the technology of this field
For personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of polysilicon takes bar device characterized by comprising
Clean cover, the clean cover is interior to have closed accommodating chamber；
Material fetching mechanism, the material fetching mechanism are set to the inside of the accommodating chamber；
The material fetching mechanism includes track, the first carrier member and mechanical arm, and the track is set as annular, first delivery
Part and the track are slidably connected, and the mechanical arm is connected with first carrier member, and first carrier member is for driving institute
Mechanical arm is stated to move along the track；
Transshipment acitivity, the transshipment acitivity are set to the inside of the accommodating chamber；
The transshipment acitivity includes the second carrier member interconnected and the receiving member for holding polycrystalline silicon rod, second fortune
Holder is for driving the receiving member to move；
Controller, the controller are electrically connected with first carrier member, the mechanical arm and second carrier member respectively,
The controller for controlling first carrier member, the mechanical arm and second carrier member respectively.
2. polysilicon according to claim 1 takes bar device, which is characterized in that the clean cover includes multiple clean covers
Valve, multiple clean cover valves are successively hinged in chain, are detachably connected between the clean cover valve of two of both ends, work as both ends
Two clean cover valves between connect, form closed hoop between multiple clean cover valves.
3. polysilicon according to claim 2 takes bar device, which is characterized in that the clean cover further includes third delivery
Part, the third carrier member are connected with the clean cover valve, and the third carrier member is for driving the clean cover valve to move.
4. polysilicon according to claim 3 takes bar device, which is characterized in that the third carrier member includes transmission connection
Third actuator and third idler wheel, the third actuator is for driving the third idler wheel to rotate, the controller and institute
State the electrical connection of third actuator.
5. polysilicon according to claim 1 takes bar device, which is characterized in that first carrier member is set as multiple,
Multiple first carrier member are spaced apart on the track, and the mechanical arm is set as multiple, the mechanical arm and described
First carrier member corresponds.
6. polysilicon according to claim 1 takes bar device, which is characterized in that first carrier member includes transmission connection
The first idler wheel and the first actuator, first idler wheel and the track roll connection, and first actuator is for driving
First idler wheel is moved along the track, the controller and first actuator electrical connection.
7. polysilicon according to claim 1 takes bar device, which is characterized in that second carrier member includes transmission connection
The second actuator and the second idler wheel, second actuator is for driving second idler wheel to rotate, the controller and institute
State the electrical connection of the second actuator.
8. polysilicon according to claim 1 takes bar device, which is characterized in that have clamping portion, institute on the mechanical arm
Stating has induction pieces in clamping portion, the induction pieces are used to incude the chucking power in the clamping portion, the induction pieces and the control
Device electrical connection processed, the controller are used to control the manipulator motion according to the signal of the induction pieces.
9. polysilicon according to claim 8 takes bar device, which is characterized in that the induction pieces are pressure sensor.
10. a kind of polysilicon takes stick method, which comprises the steps of:
The track of annular is set on the outside of chassis of reducing furnace；
Clean cover is located on polycrystalline silicon rod；
Polycrystalline silicon rod is clamped to transshipment acitivity with suitable chucking power using mechanical arm；
Clean cover is opened, is transported polycrystalline silicon rod using transshipment acitivity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811605733.2A CN109399642B (en) | 2018-12-25 | 2018-12-25 | Polysilicon takes bar device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811605733.2A CN109399642B (en) | 2018-12-25 | 2018-12-25 | Polysilicon takes bar device and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109399642A true CN109399642A (en) | 2019-03-01 |
| CN109399642B CN109399642B (en) | 2019-10-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811605733.2A Active CN109399642B (en) | 2018-12-25 | 2018-12-25 | Polysilicon takes bar device and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115557504A (en) * | 2022-11-08 | 2023-01-03 | 新特能源股份有限公司 | Efficient and intelligent rod-detaching cleaning method for reduction furnace |
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| CN102145490A (en) * | 2010-02-08 | 2011-08-10 | 鸿富锦精密工业（深圳）有限公司 | Mechanical arm device |
| CN103846556A (en) * | 2012-12-05 | 2014-06-11 | 朱玉静 | Laser cutting carrier |
| CN106315588A (en) * | 2016-08-31 | 2017-01-11 | 亚洲硅业（青海）有限公司 | Rod taking device for polycrystalline silicon reduction furnace |
| CN108974940A (en) * | 2018-06-12 | 2018-12-11 | 山东大海新能源发展有限公司 | A kind of silicon single crystal rod movement system |
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2018
- 2018-12-25 CN CN201811605733.2A patent/CN109399642B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102145490A (en) * | 2010-02-08 | 2011-08-10 | 鸿富锦精密工业（深圳）有限公司 | Mechanical arm device |
| CN103846556A (en) * | 2012-12-05 | 2014-06-11 | 朱玉静 | Laser cutting carrier |
| CN106315588A (en) * | 2016-08-31 | 2017-01-11 | 亚洲硅业（青海）有限公司 | Rod taking device for polycrystalline silicon reduction furnace |
| CN108974940A (en) * | 2018-06-12 | 2018-12-11 | 山东大海新能源发展有限公司 | A kind of silicon single crystal rod movement system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115557504A (en) * | 2022-11-08 | 2023-01-03 | 新特能源股份有限公司 | Efficient and intelligent rod-detaching cleaning method for reduction furnace |
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| CN109399642B (en) | 2019-10-29 |
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